CN103575234A - Three-dimensional image measuring device - Google Patents
Three-dimensional image measuring device Download PDFInfo
- Publication number
- CN103575234A CN103575234A CN201210252608.4A CN201210252608A CN103575234A CN 103575234 A CN103575234 A CN 103575234A CN 201210252608 A CN201210252608 A CN 201210252608A CN 103575234 A CN103575234 A CN 103575234A
- Authority
- CN
- China
- Prior art keywords
- under test
- module
- object under
- dimensional image
- order
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a three-dimensional image measuring device which comprises a measuring platform, a movable optical head, a three-dimensional computing module, a movable module and a correction control module. The movable optical head comprises a light splitting unit, a projecting module, an image capturing module and an indicating module. The measuring platform is used for bearing an object to be measured. The projecting module is used for generating stripe pattern light to the object to be measured. The image capturing module comprises multiple image capturing units which face toward the object to be measured in different direction or angles, and each image capturing unit is used for shooting a reflection image, wherein the stripe pattern light passes through the object to be measured to form the reflection image. The indicating module is used for emitting alignment light to the object to be measured to form an alignment mark. The correction control module selectively drives the movable module according to the alignment mark to move the movable optical head.
Description
Technical field
The invention relates to a kind of 3-dimensional image measurement mechanism, and particularly relevant for the optical arrangement in a kind of 3-dimensional image measurement mechanism.
Background technology
In printed circuit board (PCB) processing procedure, the application of two-dimentional automatic optical detector (AOI) is quite ripe.By single or multiple image-taking device, coordinate three look angular light, two-dimensional detection technology can be put part and be detected, and so as to management and control, puts part quality.Yet due to the lifting of the demand of detection, three-dimensional measurement technology is widely accepted gradually in recent years, to replace conventional two-dimensional automated optical detection technique or to overcome its restriction and not enough place.In the method for 3D shape of measuring object under test part, known common measuring method is as adopted moire fringes (Moire Pattern) projection, utilize projection module by candy strip ray cast to object under test part, further based on phase-shift method, the image being reflected by object under test part and obtain the 3D shape of object under test part.
According to phase-shift method, first obtain a plurality of reflected images under candy strip light, and considering that in the form of candy strip light and the height situation of measurement plane, described reflected image can be analyzed to learn the 3D shape of object under test part.
Summary of the invention
For solving the problem of known technology, an object of the present invention is to provide a kind of 3-dimensional image measurement mechanism, it utilizes projection module produce candy strip light and be projected on object under test via spectrophotometric unit, and utilize a plurality of image extraction modules directly over object under test, to carry out image capture with the different directions such as oblique upper or angle respectively, and along with sequential is adjusted the phase place of the candy strip light that projection module produces, and then according to phase-shift method, in the reflected image that the image extraction module of above-mentioned a plurality of different angles produces under out of phase, calculate the three-dimensional model of learning object under test.
Because the image extraction module of 3-dimensional image measurement mechanism is not photographed to object under test via catoptron, the impact bringing while therefore reaching reduction vibration except reducing light path acting surface, more can reduce element cost.In addition, 3-dimensional image measurement mechanism of the present invention is also set up indicating module, and the contraposition light that can project by indicating module carries out the location of object under test and the curved calculating of the plate of object under test.
An aspect of of the present present invention is that a kind of 3-dimensional image measurement mechanism is being provided, and it comprises measuring table, movable optical head, mobile module and proofreaies and correct control module.Measuring table is in order to carry an object under test.Wherein, movable optical head comprises spectrophotometric unit, projection module, image extraction module, indicating module, three-dimensional computations module, and spectrophotometric unit is positioned at this measuring table top.Projection module is in order to produce a candy strip light, and this candy strip light is projected to this object under test through this spectrophotometric unit.Image extraction module comprises a plurality of taking units, described a plurality of taking unit be positioned at this measuring table top respectively with different directions or angle faces to this object under test, each taking unit is in order to take the reflected image reflecting to form through this object under test under this candy strip light.Indicating module is positioned at this measuring table top, and also sloping floor is to this measuring table, and this indicating module forms a contraposition sign in order to launch a contraposition light to this object under test.Three-dimensional computations module is in order to calculate the 3-dimensional image about this object under test according to described a plurality of reflected images.Mobile module operability connects this movable optical head, and in order to mobile this movable optical head.Proofread and correct control module in order to indicate according to this contraposition in described a plurality of reflected images, and selectivity drives this mobile module with mobile this movable optical head.
According to one embodiment of the invention, image extraction module is to comprise a plurality of the first taking units and one second taking unit.A plurality of the first taking units are positioned at this measuring table top, and also sloping floor is to this measuring table, and described in each, the first taking unit is in order to take under this candy strip light through one of this object under test reflection oblique reflected image.The second taking unit through spectrophotometric unit by this object under test of vertical angle shot, to produce under this candy strip light the reflected image through a forward of this object under test reflection.
According to one embodiment of the invention, when this 3-dimensional image measurement mechanism is in a three-dimensional measurement pattern, this three-dimensional computations module is in order to calculate this 3-dimensional image about this object under test according to the reflected image of described oblique reflected image and this forward.
According to one embodiment of the invention, when this 3-dimensional image measurement mechanism is in a two-dimentional photograph mode, utilize this second taking unit to produce the reflected image of this forward as a bidimensional image of this object under test.
According to one embodiment of the invention, this candy strip light that is projected to this object under test by this spectrophotometric unit has an optical axis, and described a plurality of the first taking unit is to arrange around this optical axis.
According to one embodiment of the invention, projection module comprises light source, grating and grating shifter.Grating, between this light source and this spectrophotometric unit, is converted to this candy strip light in order to the light that this light source is produced.Grating shifter laterally moves relative to this light source in order to activate this grating, so as to changing a phase place of this candy strip light.
According to one embodiment of the invention, wherein this projection module comprises a light source and a grating.Grating, between this light source and this spectrophotometric unit, is converted to this candy strip light in order to the light that this light source is produced.Wherein this mobile module makes this movable optical head flatly move relative to this object under test, so as to changing equivalently the phase place of this candy strip ray cast on this object under test.
According to one embodiment of the invention, this contraposition indicates and comprises a single loci, and this indicating module comprises a Laser emission element and indicates in order to project this contraposition.
According to one embodiment of the invention, this contraposition indicates and comprises a multiple spot to bit patterns, and this indicating module comprises a plurality of Laser emission elements and indicates in order to project this contraposition.
According to one embodiment of the invention, this correction control module is chosen in described a plurality of reflected image at least one, among judging this reflected image of choosing, this contraposition indicates whether depart from a precalculated position, and selectivity drives this mobile module with mobile this movable optical head whereby.
According to one embodiment of the invention, when indicating, this contraposition departs from this precalculated position, and this corrections control module indicates the offset direction in relative this precalculated position and a deviation distance and then drives this mobile module according to this contraposition.
Another aspect of the present invention is that a kind of 3-dimensional image measurement mechanism is being provided, and comprises measuring table, movable optical head, three-dimensional computations module, mobile module and proofreaies and correct control module.Measuring table is in order to carry an object under test.Movable optical head comprises spectrophotometric unit, projection module, image extraction module and indicating module.Movable optical head is positioned at this measuring table top.Spectrophotometric unit is positioned at this measuring table top.Projection module is in order to produce a candy strip light, and this candy strip light is projected to this object under test through this spectrophotometric unit.Image extraction module comprises a plurality of taking units, described a plurality of taking unit be positioned at this measuring table top respectively with different directions or angle faces to this object under test, each taking unit is in order to take the reflected image reflecting to form through this object under test under this candy strip light.Indicating module is positioned at this measuring table top, and also sloping floor is to this measuring table, and this indicating module forms a contraposition sign in order to launch a contraposition light to this object under test.Three-dimensional computations module is in order to calculate the 3-dimensional image about this object under test according to described reflected image.Mobile module operability connects this movable optical head, in order to mobile this movable optical head.This contraposition separately indicates described a plurality of reflected images is integrated into an integration image according to described a plurality of reflected images to proofread and correct control module, and in this integration image, captures at least a portion and form a correcting image.
According to one embodiment of the invention, image extraction module is to comprise a plurality of the first taking units and one second taking unit.The first taking unit is positioned at this measuring table top, and also sloping floor is to this measuring table, and described in each, the first taking unit is in order to take under this candy strip light through one of this object under test reflection oblique reflected image.The second taking unit through this spectrophotometric unit by this object under test of vertical angle shot, to produce under this candy strip light the reflected image through a forward of this object under test reflection.
According to one embodiment of the invention, when 3-dimensional image measurement mechanism is in three-dimensional measurement pattern, this three-dimensional computations module is in order to calculate this 3-dimensional image about this object under test according to described oblique reflected image.
According to one embodiment of the invention, when this 3-dimensional image measurement mechanism is in two-dimentional photograph mode, utilize this second taking unit to produce the reflected image of this forward as a bidimensional image of this object under test.
Accompanying drawing explanation
For above and other object of the present invention, feature, advantage and embodiment can be become apparent, appended the description of the drawings is as follows:
Figure 1A illustrates according to the schematic diagram of a kind of 3-dimensional image measurement mechanism in one embodiment of the invention;
The schematic diagram of Figure 1B a kind of 3-dimensional image measurement mechanism in illustrating according to another embodiment of the present invention;
Fig. 2 illustrate according in one embodiment of the invention when object under test generation plate is curved the schematic diagram of 3-dimensional image measurement mechanism;
Fig. 3 illustrates the schematic diagram of one of them reflected image that 3-dimensional image measurement mechanism produces when object under test generation plate is curved in the embodiment of Fig. 2; And
Fig. 4 is illustrated in the schematic diagram of the reflected image that in another embodiment, 3-dimensional image measurement mechanism produces when object under test generation plate is curved;
A kind of schematic diagram of 3-dimensional image measurement mechanism in illustrating according to another embodiment of the present invention shown in Fig. 5;
Fig. 6 is illustrated in another embodiment the schematic diagram of each taking unit, indicating module and object under test in image extraction module;
What Fig. 7 illustrated is the schematic diagram of the taken reflected image of each taking unit; And
Fig. 8 illustrate for the integration image schematic diagram of each reflected image.
[main element symbol description]
100: 3-dimensional image measurement mechanism
120: measuring table
130: spectrophotometric unit
140: movable optical head
142: the first taking units
144: the second taking units
150: ring-like secondary light source module
152: luminescence unit
160: projection module
162: light source
164: grating
166: grating shifter
170: three-dimensional computations module
180: indicating module
182: contraposition indicates
190: proofread and correct control module
192: mobile module
200: object under test
202: precalculated position
Embodiment
Below will disclose a plurality of embodiment of the present invention with accompanying drawing, as clearly stated, the details in many practices will be explained in the following description.Yet, should be appreciated that, the details in these practices does not apply to limit the present invention.That is to say, in part embodiment of the present invention, the details in these practices is non-essential.In addition,, for the purpose of simplifying accompanying drawing, some known habitual structures and element illustrate the mode simply to illustrate in the accompanying drawings.
Refer to Figure 1A, it illustrates according to the schematic diagram of a kind of 3-dimensional image measurement mechanism 100 in one embodiment of the invention.As shown in Figure 1A, 3-dimensional image measurement mechanism 100 comprises measuring table 120, movable optical head 140, three-dimensional computations module 170, proofreaies and correct control module 190 and mobile module 192.Wherein, in this embodiment, in movable optical head 140, comprise the inner members such as spectrophotometric unit 130, image extraction module (it comprises taking unit 142 and taking unit 144), projection module 160 and indicating module 180.
Measuring table 120 is in order to carry object under test 200.
In this embodiment, image extraction module comprises a plurality of taking units (as illustrated in Figure 1A two the first taking units 142 and second taking unit 144), described a plurality of taking unit 142,144 be positioned at measuring table 120 tops respectively with different directions or angle faces to object under test 200, each taking unit 142,144 in order to take the reflected image R1 reflecting through object under test 200 under candy strip light L1, R2.In this embodiment, each taking unit 142,144 in image extraction module can prolong three-dimensional axle (as X, Y, the axis of orientations such as Z) movement by relative measurement platform 120, obtains whereby the image of object under test 200 each angles.
As shown in Figure 1A, image extraction module comprises a plurality of the first taking units 142, is two the first taking units 142 in this example, but not as limit.The first taking unit 142 lays respectively at measuring table 120 tops sloping floor to measuring table 120, and each first taking unit 142 is in order to take under candy strip light L1 the oblique reflected image R1 through object under test 200 reflections.
The candy strip light L1 that spectrophotometric unit 130 reflexes to object under test 200 has optical axis AX, and above-mentioned the first taking unit 142 is to arrange to arrange around optical axis AX.For example, in other embodiment, the first taking unit 142 that image extraction module also can comprise three the first taking units 142 (can lay respectively at 0 degree, 120 degree and 240 degree), four the first taking units 142 (can lay respectively at 0 degree, 90 degree, 180 degree and 270 degree) or other numbers that arrange around optical axis AX respectively around optical axis AX fifty-fifty or non-ly arrange fifty-fifty.
In addition, image extraction module separately comprises the second taking unit 144, the second taking unit 144 is positioned at spectrophotometric unit 130 tops vertical ground to measuring table 120 and spectrophotometric unit 130, the second taking unit 144 is taken object under test 200 in order to penetrate spectrophotometric unit 130, to produce the reflected image R2 of the forward reflecting through object under test 200 under candy strip light L1.
By above-mentioned a plurality of taking units 142,144, the image extraction module in this disclosure of documents can be collected the reflected image R1 from each different directions or angle, R2 simultaneously.
In addition, in the embodiment of Figure 1A, the second taking unit 144 is to be positioned at spectrophotometric unit 130 tops vertical ground to measuring table 120 and spectrophotometric unit 130, and projection module 160 is the sides that are positioned at spectrophotometric unit 130, candy strip light L1 is projected on object under test 200 after spectrophotometric unit 130 refractions change direction, but the setting position of the second taking unit 144 of the present invention and projection module 160 is not as limit.In another embodiment, the second taking unit 144 is interchangeable with the setting position of projection module 160, as shown in the embodiment of Figure 1B, the second taking unit 144 can be arranged at the side of spectrophotometric unit 130 and change direction by vertical angle shot object under test 200 via spectrophotometric unit refraction, projection module 160 is arranged at spectrophotometric unit 130 tops vertical ground to measuring table 120, the candy strip light L1 that projection module 160 produces penetrates spectrophotometric unit 130 and is projected on object under test 200, in Figure 1B illustrated embodiment, the setting position of the second taking unit 144 and projection module 160 also can reach identity function after exchanging.
In practical application, under different capture patterns (as three-dimensional measurement pattern, two-dimentional photograph mode, the curved correction mode of plate etc.), the 3-dimensional image measurement mechanism 100 of the present embodiment can utilize taking unit different in image extraction module 142,144 to complete.
For example, under three-dimensional measurement pattern, in an embodiment, 3-dimensional image measurement mechanism 100 mainly utilizes two reflected image R1 that oblique taking unit 142 produces in image extraction module.Three-dimensional computations module 170 receives above-mentioned reflected image R1, in order to calculate the 3-dimensional image about object under test 200 according to the reflected image R1 from each different directions or angle.Further, along with grating shifter 166 is in order to translation grating 162, and form the various phasing degree of candy strip light L1, each taking unit 142 in image extraction module, the 144 a plurality of oblique image R1 that further acquisition object under test 200 reflects to form in the various phasing degree of this candy strip light L1, see through phase shift mensuration, just can obtain the phase information of corresponding each reflected image R1 under various phasing degree.
Three-dimensional computations module 170 is the phase information under various phasing degree according to each reflected image R1, can calculate the 3-dimensional image of learning object under test 200.What must supplement is, three-dimensional computations module 170 is calculated the 3-dimensional image about object under test 200 according to the reflected image R1 from each different directions or angle simultaneously, its three-dimensional computations has and preferably judges speed and precision, and can detect the three-dimensional configuration of object under test 200.Be applied on element test, be conducive to discover the shape defect of object under test 200, as side-facing depressions or oblique breach etc., this cannot discover for the capture of known single angle.
In above-described embodiment, be that explanation is worked as 3-dimensional image measurement mechanism 100 in three-dimensional measurement pattern, three-dimensional computations module 170 is in order to calculate the 3-dimensional image about object under test 200 according to described oblique reflected image R1.
In Another Application, 3-dimensional image measurement mechanism 100 in this disclosure of documents also can be used on the application situation of two dimension photography, when 3-dimensional image measurement mechanism 100 is under two-dimentional photograph mode, can directly utilize the second taking unit 144 to produce the reflected image R2 of forward as the bidimensional image of object under test 200, can complete two-dimentional photography demand, in addition, also can be simultaneously with reference to two other first oblique taking unit 142 in image extraction module, to obtain the side bidimensional image of object under test 200 under different capture angles.
In addition, 3-dimensional image measurement mechanism 100 can further comprise ring-like secondary light source module 150, ring-like secondary light source module 150 can comprise a plurality of luminescence units 152, in diagram, illustrate two luminescence units 152, but the present invention is not as limit, in practical application, ring-like secondary light source module 150 can comprise three, four or above luminescence unit 152.A plurality of luminescence units 152 arrange in ring-like mode and towards object under test 200, can provide light to object under test 200 by different angles.Especially under two-dimentional photograph mode, projection module 160 does not now produce the candy strip light L1 that three-dimensional measurement is used, and therefore must adopt ring-like secondary light source module 150 as floor light, as the light source of two-dimentional photograph mode.
In practical application, the measured object under test 200 of 3-dimensional image measurement mechanism 100 can comprise circuit board, optics sheet material or other substrates, and the above-mentioned sheet material in object under test 200 may be because the phenomenon of external stress or the bending of gravity effect generation sheet material.The curved phenomenon of above-mentioned plate often causes 3-dimensional image measurement mechanism 100 to decline in the accuracy of measuring object under test 200, for example, because object under test 200 has the skew in vertical direction because plate is curved, the position that makes scheduled measurement on object under test 200 is not in image extraction module in the burnt section of the best capture of each taking unit 142,144.
Therefore, 3-dimensional image measurement mechanism 100 more comprises indicating module 180, and indicating module 180 is positioned at measuring table 120 tops sloping floor to measuring table 120, and indicating module 180 indicates to forming contraposition on object under test 200 in order to launch contraposition light L2.
See also Fig. 2, Fig. 2 illustrates according to the schematic diagram of plate 3-dimensional image measurement mechanism 100 when curved occurs when object under test 200 in one embodiment of the invention.Please contrast Figure 1A and Fig. 2 simultaneously, suppose that Figure 1A illustrates as the schematic diagram of plate when curved do not occur object under test 200, in the example of Figure 1A, the contraposition light L2 of indicating module 180 transmittings roughly drops on object under test 200 centre.And in shown in Fig. 2, when object under test 200 plate occurs when curved, the contraposition light L2 of indicating module 180 transmittings drops on slightly the take back position of side of object under test 200 because object under test 200 is bent upwards.
Now, proofread and correct control module 190 and can choose described a plurality of reflected image R1, among R2, at least one group reflected image judges, proofread and correct according to this subsequently the curved phenomenon of plate of object under test 200, in an embodiment, under the curved correction mode of plate, proofread and correct control module 190 and mainly choose the reflected image R2 that the second taking unit 144 produces forwards and process.See also Fig. 3, Fig. 3 illustrates in the embodiment of Fig. 2 the schematic diagram that plate one of them reflected image that 3-dimensional image measurement mechanism 100 produces when curved occurs when object under test 200.In this embodiment, the reflected image R2 of the forward that the reflected image that Fig. 3 illustrates produces with the second taking unit 144 illustrates, but the present invention is not as limit.
As shown in Figure 3, suppose when object under test 200 does not exist plate curved, the contraposition light L2 of indicating module 180 transmittings is predetermined by the precalculated position 202 being radiated in Fig. 3.Yet that plates occur is curved because of object under test 200, make contraposition that the contraposition light L2 of indicating module 180 transmittings produces indicate 182 out of position 202.
Proofread and correct control module 190 and judge contraposition sign 182 whether out of position 202 according to the reflected image R2 (as shown in Figure 3) choosing, when indicating, this contraposition departs from this precalculated position, offset direction (being skew left in this example) and deviation distance Ds that this correction control module 190 indicates 182 relative precalculated positions 202 according to this contraposition drive mobile module 192, mobile module 192 can move the position of movable optical head 140 according to this, and then change each taking unit 142, 144 with relative position and the distance of object under test 200, until indicating 182, the contraposition that indicating module 180 forms on object under test 200 gets back in the scope in precalculated position 202.
In addition, in the embodiment shown in Fig. 3, contraposition indicates 182 and comprises single loci, in this example, indicating module 180 can comprise Laser emission element and indicate 182 in order to project this contraposition, yet the contraposition of this disclosure of documents indicates 182, with single loci, is not limited.
See also Fig. 4, it is illustrated in another embodiment the schematic diagram that the plate reflected image that 3-dimensional image measurement mechanism 100 produces when curved occurs when object under test 200.In the embodiment of Fig. 4, contraposition indicates 182 and comprises multiple spot to bit patterns, to improve the accuracy of contraposition sign and the curved correction of plate.In this example, contraposition indicates 182 and comprises three loci of arranging in equilateral triangle mode.In this example, indicating module 180 can further comprise three Laser emission elements and indicate 182 in order to project this contraposition, and the multiple spot that indicating module 180 produces is not arranged and is limited in equilateral triangle mode bit patterns, can adopt the various to bit patterns of tool equality.
In sum, 3-dimensional image measurement mechanism utilizes projection module produce candy strip light and be projected on object under test via spectrophotometric unit, and utilize a plurality of image extraction modules directly over object under test, to carry out image capture with the different directions such as oblique upper or angle respectively, and along with sequential is adjusted the phase place of the candy strip light that projection module produces, and then according to phase-shift method, in the reflected image that the image extraction module of above-mentioned a plurality of different angles produces under out of phase, calculate the three-dimensional model of learning object under test.
In above-described embodiment, 3-dimensional image measurement mechanism 100 is to utilize grating shifter 166 to make grating 164 be displaced sideways to form the various phase places of candy strip light L1, but the present invention is not as limit.In another embodiment, as shown in Figure 5, the schematic diagram of its a kind of 3-dimensional image measurement mechanism 102 in illustrating according to another embodiment of the present invention, grating shifter 166 is not set in 3-dimensional image measurement mechanism 102, this mobile module 192 makes movable optical head 140 flatly move relative to object under test 200, so as to changing equivalently candy strip light L1, be incident upon the phase place on object under test 200, also can reach similar effect.
In addition, in above-described embodiment, the position of movable optical head 140 is moved in main utilization, and then changes relative position and the distance of each taking unit 142,144 and object under test 200, come correction plate curved, but the present invention is not as limit.In another embodiment, can be the in the situation that of mobile not movable optical head 140, with the curved image deviation of compute mode amending plates.Refer to Fig. 6, Fig. 7 and Fig. 8, Fig. 6 is illustrated in another embodiment the schematic diagram of each taking unit 142,144 in image extraction module, indicating module 180 and object under test 200.
In the example of Fig. 6, the level height of object under test 200 because of the curved phenomenon of plate by below dotted line position bring up to top solid line height.Therefore, the taken contraposition sign 182 of each taking unit 142,144 will depart from original precalculated position 202.Yet different from angle because of the position that each taking unit 142,144 is set, therefore, it will be different separately from degrees of offset that the taken contraposition of each taking unit 142,144 indicates 182 offset direction, for example by turning right respectively, left side and upper right side be offset.
That Fig. 7 illustrates is the taken reflected image P1 of each taking unit 142,144, the schematic diagram of P2 and P3, as shown in Figure 7, the taken reflected image P1 of each taking unit 142,144, among P2 and P3, contraposition indicates 182a, and 182b and 182c lay respectively at the diverse location in each image.
Therefore, proofreading and correct control module 190 can be by reflected image P1 on a virtual plane, and P2 and P3 integrate.That Fig. 8 illustrates is reflected image P1, the integration image schematic diagram of P2 and P3.As shown in Figure 8, can pass through reflected image P1, contraposition in P2 and P3 indicates 182a, 182b and 182c alignment and congruence are on same coordinate, can form the integration image P4 that three integrates, proofread and correct control module 190 according to reflected image P1, P2 and P3 this contraposition separately indicates 182a, 182b and 182c are integrated into and integrate image P4, then proofread and correct control module 190 can in integrating image P4, capture at least a portion (for example capture three occur simultaneously part or acquisition three joins collection part) form correcting image.Thus, proofreading and correct control module 190 just can be the in the situation that of mobile not movable optical head 140, with the curved image deviation of compute mode amending plates.
Because the image extraction module of 3-dimensional image measurement mechanism is not photographed to object under test via catoptron, the impact bringing while therefore reaching reduction vibration except reducing light path acting surface, more can reduce element cost.In addition, 3-dimensional image measurement mechanism of the present invention is also set up indicating module, and the contraposition light that can project by indicating module carries out the location of object under test and the curved calculating of the plate of object under test.
Although the present invention discloses as above with embodiment; so it is not in order to limit the present invention; anyly be familiar with this skill person; without departing from the spirit and scope of the present invention; when being used for a variety of modifications and variations, so the scope that protection scope of the present invention ought define depending on appending claims is as the criterion.
Claims (15)
1. a 3-dimensional image measurement mechanism, is characterized in that, comprises:
One measuring table, in order to carry an object under test; And
One movable optical head, is positioned at this measuring table top, and this movable optical head comprises:
One spectrophotometric unit, is positioned at this measuring table top;
One projection module, in order to produce a candy strip light, this candy strip light is projected to this object under test through this spectrophotometric unit;
One image extraction module, comprise a plurality of taking units, described a plurality of taking unit be positioned at this measuring table top respectively with different directions or angle faces to this object under test, each taking unit is in order to take the reflected image reflecting to form through this object under test under this candy strip light; And
One indicating module, is positioned at this measuring table top sloping floor to this measuring table, and this indicating module forms a contraposition sign in order to launch a contraposition light to this object under test;
One three-dimensional computations module, in order to calculate the 3-dimensional image about this object under test according to described a plurality of reflected images;
One mobile module, operability connects this movable optical head, in order to mobile this movable optical head; And
One proofreaies and correct control module, and in order to indicate according to this contraposition in described a plurality of reflected images, and selectivity drives this mobile module with mobile this movable optical head.
2. 3-dimensional image measurement mechanism according to claim 1, is characterized in that, this image extraction module is to comprise:
A plurality of the first taking units, are positioned at this measuring table top sloping floor to this measuring table, and described in each, the first taking unit is in order to take under this candy strip light through one of this object under test reflection oblique reflected image; And
One second taking unit, this second taking unit through this spectrophotometric unit by this object under test of vertical angle shot, to produce under this candy strip light the reflected image through a forward of this object under test reflection.
3. 3-dimensional image measurement mechanism according to claim 2, it is characterized in that, when this 3-dimensional image measurement mechanism is in a three-dimensional measurement pattern, this three-dimensional computations module is in order to calculate this 3-dimensional image about this object under test according to described oblique reflected image.
4. 3-dimensional image measurement mechanism according to claim 2, is characterized in that, when this 3-dimensional image measurement mechanism is in a two-dimentional photograph mode, utilizes this second taking unit to produce the reflected image of this forward as a bidimensional image of this object under test.
5. 3-dimensional image measurement mechanism according to claim 2, is characterized in that, this candy strip light that is projected to this object under test by this spectrophotometric unit has an optical axis, and described a plurality of the first taking unit is to arrange around this optical axis.
6. 3-dimensional image measurement mechanism according to claim 1, is characterized in that, this projection module comprises:
One light source;
One grating, between this light source and this spectrophotometric unit, is converted to this candy strip light in order to the light that this light source is produced; And
One grating shifter, laterally moves relative to this light source in order to activate this grating, so as to changing a phase place of this candy strip light.
7. 3-dimensional image measurement mechanism according to claim 1, is characterized in that, this projection module comprises:
One light source; And
One grating, between this light source and this spectrophotometric unit, is converted to this candy strip light in order to the light that this light source is produced;
Wherein, this mobile module makes this movable optical head flatly move relative to this object under test, so as to changing equivalently the phase place of this candy strip ray cast on this object under test.
8. 3-dimensional image measurement mechanism according to claim 1, is characterized in that, this contraposition indicates and comprises a single loci, and this indicating module comprises a Laser emission element and indicates in order to project this contraposition.
9. 3-dimensional image measurement mechanism according to claim 1, is characterized in that, this contraposition indicates and comprises a multiple spot to bit patterns, and this indicating module comprises a plurality of Laser emission elements and indicates in order to project this contraposition.
10. 3-dimensional image measurement mechanism according to claim 1, it is characterized in that, this correction control module is chosen in described a plurality of reflected image at least one, among judging this reflected image of choosing, this contraposition indicates whether depart from a precalculated position, and selectivity drives this mobile module with mobile this movable optical head whereby.
11. 3-dimensional image measurement mechanisms according to claim 10, it is characterized in that, when this contraposition indicates, depart from this precalculated position, this corrections control module indicates the offset direction in relative this precalculated position and a deviation distance and then drives this mobile module according to this contraposition.
12. 1 kinds of 3-dimensional image measurement mechanisms, is characterized in that, comprise:
One measuring table, in order to carry an object under test; And
One movable optical head, is positioned at this measuring table top, and this movable optical head comprises:
One spectrophotometric unit, is positioned at this measuring table top;
One projection module, in order to produce a candy strip light, this candy strip light is projected to this object under test through this spectrophotometric unit;
One image extraction module, comprise a plurality of taking units, described a plurality of taking unit be positioned at this measuring table top respectively with different directions or angle faces to this object under test, each taking unit is in order to take the reflected image reflecting to form through this object under test under this candy strip light;
One indicating module, is positioned at this measuring table top sloping floor to this measuring table, and this indicating module forms a contraposition sign in order to launch a contraposition light to this object under test; And
One three-dimensional computations module, in order to calculate the 3-dimensional image about this object under test according to described a plurality of reflected images;
One mobile module, operability connects this movable optical head, in order to mobile this movable optical head; And
One proofreaies and correct control module, and according to described a plurality of reflected images, this contraposition separately indicates described a plurality of reflected images are integrated into an integration image, and in this integration image, captures at least a portion and form a correcting image.
13. 3-dimensional image measurement mechanisms according to claim 12, is characterized in that, this image extraction module is to comprise:
A plurality of the first taking units, are positioned at this measuring table top sloping floor to this measuring table, and described in each, the first taking unit is in order to take under this candy strip light through one of this object under test reflection oblique reflected image; And
One second taking unit, this second taking unit through this spectrophotometric unit by this object under test of vertical angle shot, to produce under this candy strip light the reflected image through a forward of this object under test reflection.
14. 3-dimensional image measurement mechanisms according to claim 13, it is characterized in that, when this 3-dimensional image measurement mechanism is in a three-dimensional measurement pattern, this three-dimensional computations module is in order to calculate this 3-dimensional image about this object under test according to described oblique reflected image.
15. 3-dimensional image measurement mechanisms according to claim 13, is characterized in that, when this 3-dimensional image measurement mechanism is in a two-dimentional photograph mode, utilize this second taking unit to produce the reflected image of this forward as a bidimensional image of this object under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210252608.4A CN103575234B (en) | 2012-07-20 | 2012-07-20 | 3-dimensional image measurement apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210252608.4A CN103575234B (en) | 2012-07-20 | 2012-07-20 | 3-dimensional image measurement apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103575234A true CN103575234A (en) | 2014-02-12 |
| CN103575234B CN103575234B (en) | 2016-08-24 |
Family
ID=50047532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210252608.4A Active CN103575234B (en) | 2012-07-20 | 2012-07-20 | 3-dimensional image measurement apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103575234B (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105093800A (en) * | 2014-05-05 | 2015-11-25 | 徐平 | Multi-view stereoscopic camera with automatic gathering function |
| CN105526872A (en) * | 2016-01-11 | 2016-04-27 | 浣石 | Three-dimensional motion measurement system based on digital image measurement |
| CN105890547A (en) * | 2016-06-03 | 2016-08-24 | 杭州汉振科技有限公司 | Three-dimensional profile measurement instrument |
| CN105892043A (en) * | 2014-12-15 | 2016-08-24 | 德律科技股份有限公司 | Optical system |
| CN106323194A (en) * | 2015-06-29 | 2017-01-11 | 株式会社三丰 | Object-forming machine, cross-section measurement apparatus, and cross-section measurement method |
| CN107850423A (en) * | 2015-07-09 | 2018-03-27 | 佳能株式会社 | For measurement apparatus, system and the manufacture method of the shape for measuring destination object |
| CN108278945A (en) * | 2017-12-28 | 2018-07-13 | 洛阳轴承研究所有限公司 | A kind of the pocket hole measurement tooling and measurement method of retainer |
| CN109631792A (en) * | 2017-10-09 | 2019-04-16 | 和全丰光电股份有限公司 | Non-contact surface profile scan device |
| CN110531563A (en) * | 2018-05-24 | 2019-12-03 | 视锐光科技股份有限公司 | Dot matrix projector structure and the method for capturing image using dot matrix projector structure |
| CN110542392A (en) * | 2019-09-06 | 2019-12-06 | 深圳中科飞测科技有限公司 | Detection equipment and detection method |
| CN110940293A (en) * | 2018-09-21 | 2020-03-31 | 日月光半导体制造股份有限公司 | Apparatus and method for measuring bending |
| CN111649697A (en) * | 2020-07-03 | 2020-09-11 | 东北大学 | Metal strip shape detection method based on stereo vision of linear array camera |
| CN112179271A (en) * | 2019-07-04 | 2021-01-05 | 和硕联合科技股份有限公司 | Optical detection device |
| CN112729128A (en) * | 2019-10-28 | 2021-04-30 | 阿丹电子企业股份有限公司 | Optical volume measuring device |
| CN114815280A (en) * | 2022-06-29 | 2022-07-29 | 深圳市信润富联数字科技有限公司 | Method and system for multi-faceted focused imaging |
| CN114894712A (en) * | 2022-03-25 | 2022-08-12 | 业成科技（成都）有限公司 | Optical measurement equipment and correction method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510393A (en) * | 2002-12-16 | 2004-07-07 | Ckd株式会社 | Measuring devices |
| CN1534272A (en) * | 2003-03-31 | 2004-10-06 | ������������ʽ���� | Non-contact 3-D shape testing method and its device |
| JP2005214787A (en) * | 2004-01-29 | 2005-08-11 | Olympus Corp | Three-dimensional shape measuring apparatus |
| CN1900651A (en) * | 2006-07-27 | 2007-01-24 | 西安交通大学 | Three dimension object contour phase measuring method based on double frequency color strip projection |
| CN1982841A (en) * | 2005-12-14 | 2007-06-20 | 株式会社高永科技 | 3d shape measuring apparatus and method thereof |
| CN101189487A (en) * | 2005-03-11 | 2008-05-28 | 形创有限公司 | Auto-referenced system and apparatus for three-dimensional scanning |
| JP2009180689A (en) * | 2008-02-01 | 2009-08-13 | Nikon Corp | Three-dimensional shape measuring apparatus |
| CN101960253A (en) * | 2008-02-26 | 2011-01-26 | 株式会社高永科技 | Apparatus and method for measuring a three-dimensional shape |
| CN101986098A (en) * | 2010-09-21 | 2011-03-16 | 东南大学 | Tricolor raster projection-based Fourier transform three-dimensional measuring method |
| JP4924042B2 (en) * | 2007-01-11 | 2012-04-25 | オムロン株式会社 | Three-dimensional shape measuring apparatus, calibration method thereof, program, and computer-readable recording medium |
-
2012
- 2012-07-20 CN CN201210252608.4A patent/CN103575234B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510393A (en) * | 2002-12-16 | 2004-07-07 | Ckd株式会社 | Measuring devices |
| CN1534272A (en) * | 2003-03-31 | 2004-10-06 | ������������ʽ���� | Non-contact 3-D shape testing method and its device |
| JP2005214787A (en) * | 2004-01-29 | 2005-08-11 | Olympus Corp | Three-dimensional shape measuring apparatus |
| CN101189487A (en) * | 2005-03-11 | 2008-05-28 | 形创有限公司 | Auto-referenced system and apparatus for three-dimensional scanning |
| CN1982841A (en) * | 2005-12-14 | 2007-06-20 | 株式会社高永科技 | 3d shape measuring apparatus and method thereof |
| CN1900651A (en) * | 2006-07-27 | 2007-01-24 | 西安交通大学 | Three dimension object contour phase measuring method based on double frequency color strip projection |
| JP4924042B2 (en) * | 2007-01-11 | 2012-04-25 | オムロン株式会社 | Three-dimensional shape measuring apparatus, calibration method thereof, program, and computer-readable recording medium |
| JP2009180689A (en) * | 2008-02-01 | 2009-08-13 | Nikon Corp | Three-dimensional shape measuring apparatus |
| CN101960253A (en) * | 2008-02-26 | 2011-01-26 | 株式会社高永科技 | Apparatus and method for measuring a three-dimensional shape |
| CN101986098A (en) * | 2010-09-21 | 2011-03-16 | 东南大学 | Tricolor raster projection-based Fourier transform three-dimensional measuring method |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105093800A (en) * | 2014-05-05 | 2015-11-25 | 徐平 | Multi-view stereoscopic camera with automatic gathering function |
| CN105892043A (en) * | 2014-12-15 | 2016-08-24 | 德律科技股份有限公司 | Optical system |
| CN105892043B (en) * | 2014-12-15 | 2018-06-12 | 德律科技股份有限公司 | Optical system |
| CN106323194A (en) * | 2015-06-29 | 2017-01-11 | 株式会社三丰 | Object-forming machine, cross-section measurement apparatus, and cross-section measurement method |
| CN107850423A (en) * | 2015-07-09 | 2018-03-27 | 佳能株式会社 | For measurement apparatus, system and the manufacture method of the shape for measuring destination object |
| CN105526872A (en) * | 2016-01-11 | 2016-04-27 | 浣石 | Three-dimensional motion measurement system based on digital image measurement |
| CN105526872B (en) * | 2016-01-11 | 2018-04-13 | 广州大学 | Three Dimensional Motion Measurement System based on digital picture measurement |
| CN105890547B (en) * | 2016-06-03 | 2019-03-12 | 浙江汉振智能技术有限公司 | Instrument for measuring three-dimensional profile |
| CN105890547A (en) * | 2016-06-03 | 2016-08-24 | 杭州汉振科技有限公司 | Three-dimensional profile measurement instrument |
| CN109631792A (en) * | 2017-10-09 | 2019-04-16 | 和全丰光电股份有限公司 | Non-contact surface profile scan device |
| CN108278945A (en) * | 2017-12-28 | 2018-07-13 | 洛阳轴承研究所有限公司 | A kind of the pocket hole measurement tooling and measurement method of retainer |
| CN110531563A (en) * | 2018-05-24 | 2019-12-03 | 视锐光科技股份有限公司 | Dot matrix projector structure and the method for capturing image using dot matrix projector structure |
| CN110940293A (en) * | 2018-09-21 | 2020-03-31 | 日月光半导体制造股份有限公司 | Apparatus and method for measuring bending |
| CN112179271A (en) * | 2019-07-04 | 2021-01-05 | 和硕联合科技股份有限公司 | Optical detection device |
| CN110542392A (en) * | 2019-09-06 | 2019-12-06 | 深圳中科飞测科技有限公司 | Detection equipment and detection method |
| CN112729128A (en) * | 2019-10-28 | 2021-04-30 | 阿丹电子企业股份有限公司 | Optical volume measuring device |
| CN111649697A (en) * | 2020-07-03 | 2020-09-11 | 东北大学 | Metal strip shape detection method based on stereo vision of linear array camera |
| CN111649697B (en) * | 2020-07-03 | 2022-02-11 | 东北大学 | Metal strip shape detection method based on stereo vision of linear array camera |
| CN114894712A (en) * | 2022-03-25 | 2022-08-12 | 业成科技（成都）有限公司 | Optical measurement equipment and correction method thereof |
| CN114894712B (en) * | 2022-03-25 | 2023-08-25 | 业成科技（成都）有限公司 | Optical measuring equipment and correction method thereof |
| CN114815280A (en) * | 2022-06-29 | 2022-07-29 | 深圳市信润富联数字科技有限公司 | Method and system for multi-faceted focused imaging |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103575234B (en) | 2016-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103575234A (en) | Three-dimensional image measuring device | |
| TWI460394B (en) | Three-dimensional image measuring apparatus | |
| EP3531066B1 (en) | Three-dimensional scanning method including a plurality of lasers with different wavelengths, and scanner | |
| CN111750806B (en) | Multi-view three-dimensional measurement system and method | |
| CN101960253B (en) | Apparatus and method for measuring a three-dimensional shape | |
| US20130271573A1 (en) | Method and apparatus for determining the 3d coordinates of an object | |
| CN101308012A (en) | Double monocular white light three-dimensional measuring systems calibration method | |
| US20150085108A1 (en) | Lasergrammetry system and methods | |
| US9423242B2 (en) | Board-warping measuring apparatus and board-warping measuring method thereof | |
| CN109978960B (en) | High-precision screen-camera pose calibration method based on photogrammetry | |
| CN103712573A (en) | Method for correcting space matching of area array imaging sensors in two-channel interferometry | |
| TWI460637B (en) | Optical touch system and optical detecting method for touch position | |
| CN102549377A (en) | Flat bed scan module, flat bed scan system, jig for measuring alignment errors of a flat bed scan module, and method for measuring alignment errors of a flat bed scan module using same | |
| CN106657992A (en) | Device and method for adaptively detecting and adjusting double-camera-axis | |
| CN103795935B (en) | A kind of camera shooting type multi-target orientation method and device based on image rectification | |
| CN111872544A (en) | Calibration method and device for laser light-emitting indication point and galvanometer coaxial vision system | |
| CN104197846B (en) | A kind of mirror displacements measuring method of feature based pattern reflection | |
| CN106840029A (en) | A kind of reflective object surface profiling device high and method | |
| CN106289086A (en) | A kind of for optical indicia dot spacing from the double camera measuring method of Accurate Calibration | |
| CN103676487A (en) | Workpiece height measuring device and correcting method thereof | |
| CN110044266B (en) | Photogrammetry system based on speckle projection | |
| CN113624158B (en) | Visual dimension detection system and method | |
| WO2022050279A1 (en) | Three-dimensional measurement device | |
| CN110806181A (en) | High-precision optical extensometer and measuring method based on color camera | |
| US20120056999A1 (en) | Image measuring device and image measuring method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |