CN1534272A - Non-contact 3-D shape testing method and its device - Google Patents

Non-contact 3-D shape testing method and its device Download PDF

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Publication number
CN1534272A
CN1534272A CNA2004100332272A CN200410033227A CN1534272A CN 1534272 A CN1534272 A CN 1534272A CN A2004100332272 A CNA2004100332272 A CN A2004100332272A CN 200410033227 A CN200410033227 A CN 200410033227A CN 1534272 A CN1534272 A CN 1534272A
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dimensional
contact
record
focus
shape
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CN100507441C (en
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吉田博行
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Mitutoyo Corp
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Mitutoyo Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré

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  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze the contrast of a grating image deformed in accordance with the shape of the object and thereby obtain the shape thereof. The method enables measurement of a three-dimensional shape over a large measurement range in a short time in a non-contact manner by successively shifting the focus on the projection and the imaging sides to enlarge the measurement range in the direction of depth.

Description

Non-contact three-dimensional process for measuring shape and device
Technical field
The present invention relates to a kind of limit makes the phase-shifts limit observe the raster graphic that projects to determination object from other direction that is different from projecting direction, resolve the contrast of the raster image that is out of shape by the shape of determination object with this, obtain the non-contact three-dimensional process for measuring shape and the device of shape thus.Relate in particular to be applicable to based on the digitized CAD of design shape exploitation and be used to manufacture experimently with the noncontact digitizer of the form accuracy assessment (reverse engineering design) of bulk article, can carry out non-contact three-dimensional process for measuring shape and the device that noncontact is measured to the 3D shape of big measurement ranges such as the big automobile of material object at short notice.
Background technology
As at short notice 3D shape being carried out the technology that noncontact is measured, open shown in the record in flat 10-246612 communique (patent documentation 1), No. 5175601 instructions of United States Patent (USP) (patent documentation 2), No. 5319445 instructions of United States Patent (USP) (patent documentation 3) as the spy, a kind of not moire technique of Ah's topography that utilized is arranged, it to determination object, measures 3D shape according to the raster image that is out of shape by the height profile of each one of determination object with raster-like graphic projection.This moire technique has two kinds of grating photography type and entity grating types, in grating photography type, as shown in Figure 1, projection is used and is observed 2 grating G1 of usefulness, G2 is configured to before projecting lens L1 and the imaging lens system L2, by lens L1 grating G1 is projected to determination object, scioptics L2, make grid stroke imaging on a grating G2 of being out of shape according to body form, distance h 1 in distance reference field regulation, h2, h3, ... the position on form the striped level line, in the entity grating type, as shown in Figure 2,1 big grating G of configuration on reference field, collocation point light source S on the position of projecting lens L1, an eye e is observed in configuration on the position of imaging lens system L2, makes based on the shade of the light source S of grating G to fall on the determination object, the shade of the grating G that formation is out of shape according to body form, by grating G, observe this phenomenon by observing eye e, observe the moire fringe that shade produced thus by this grating G and deformed grating.The spy opens 2002-267429 communique (patent documentation 4) title to the applicable phase-shifts method of entity grating type moire technique in addition.
On the other hand, " based on the surface configuration instrumentation of phase place that has adopted the raster graphic sciagraphy and Contrast Detection " that 6 people such as the refined benevolence in ridge, hall submit to (accurate engineering meeting will, the accurate engineering meeting of civic organization, put down in January, 12, No. the 1st, the 66th volume, P132-136 (non-patent literature 1)) in the literary composition, put down in writing a kind of phase-shifts and combined noncontact process for measuring shape of raster graphic projection of making shown in Figure 3.
This method adopts following process to measure shape.
(1) such as with illuminating lamp 10, the grating filter 12 that is configured to projecting lens 14 fronts is thrown light on,, raster graphic projected to measure object 8 thus from the position of the focal position that is different from image pickup optical system (imaging lens system 20).
(2), make grating filter 12 to laterally moving shown in the arrow A (phase-shifts), and the deep or light variation of pixel of the image that will be obtained by imaging apparatus 22 by imaging lens system 20 is converted to sine wave shape by pattern displacement mechanism 16.
(3) by the phase-shifts amount of each equal intervals, produce a plurality of images.
(4) calculate the phase place and the contrast of each pixel.
(5) position of measuring object 8 is progressively moved to short transverse (or focus direction etc.), repeat (2)～(4).Measure minimum the moving 2 times in position of object 8.
(6) obtain focal position, and obtain fringe order with each pixel maximum-contrast.
Phase place when (7) selecting each pixel to be in maximum-contrast is obtained PHASE DISTRIBUTION.
(8) phase differential of calculating and reference phase.
(9) utilize phase differential and fringe order, come the distance (highly) of compute depth direction.
Yet in patent documentation 1～4, as shown in Figure 4, owing to when phase change 2 π, just repeat same output, thereby only by phase-shifts, what can not specificly appear before one's eyes out is which bar line of projection grating, can not determine the progression of striped.Thereby measurement range be defined to A, B, C, D ... any one, when making measurement range be in 1 fringe order with after interior, grating will enlarge at interval, the mensuration precise decreasing.Otherwise, guarantee high precision at interval if dwindle grating, then the measurement range of depth direction will be dwindled.Exist in addition with the pixel of focusing and compare, its focus is the problem points such as mensuration precise decreasing of burnt pixel partially.
On the other hand, in non-patent literature 1, under the less occasion of determination step number, owing to when asking the Gaussian function coupling of being carried out when calculating maximum-contrast error can take place, thereby the precision that is in the point between step and the step will descend.Although can reduce this error by increasing mobile number of times, minute will increase simultaneously.In addition owing to move to measure object, perhaps portable lighting optical system and image pickup optical system, thereby device will become complicated.In addition, though the measurement range of depth direction can enlarge by increasing number of steps, existing has problem points such as restriction to minute and device aspect.
Summary of the invention
The present invention is intended to solve above-mentioned existing in the past problem, and its problem is: with the simple formation of Miniaturizable, enlarge the measurement range of depth direction, realize high-precision measuring in whole measurement range.
The present invention utilizes a kind of limit to make the phase-shifts limit observe the raster graphic that projects to determination object from other direction that is different from projecting direction, resolve the contrast of the raster image that is out of shape by the shape of determination object with this, obtain the non-contact three-dimensional process for measuring shape of shape thus, the projection side and the focus of shooting side are shifted continuously, enlarge the measurement range of depth direction, solve above-mentioned problem with this.
This limit of the present invention makes the phase-shifts limit observe the raster graphic that projects to determination object from other direction that is different from projecting direction, resolve the contrast of the raster image that is out of shape by the shape of determination object with this, the non-contact three-dimensional shape measuring apparatus that obtains shape thus has the limit makes focus and phase-shifts, and the limit projects to raster graphic the unit of determination object; The limit makes focus shift, and the unit of the view data of the figure that projects to determination object is imported on the limit; The view data of being imported is handled, and made the unit of three-dimensional plot, solve above-mentioned problem thus.
The unit that makes above-mentioned three-dimensional plot in addition comprises from focus center and decides fringe order, launches phase place, and calculates the unit of the absolute value of phase place; The unit of the three-dimensional position of the intersection point of the grating face of calculating fringe order and the table polar curve of camera point.
In addition, the unit that has the distortion (distortion) of proofreading and correct projection optical system and image pickup optical system.
In addition projection optical system and image pickup optical system are equipped in the shift mechanism, and drive by Z-direction.
In the present invention, for the decision of the fringe order that makes grating becomes possibility, and keeping the high-precision measurement range that enlarges depth direction simultaneously, the focusing displacement is made up.
According to the present invention, obtain the fringe order of raster graphic from focus center, launch phase place, and obtain the absolute value of the degree of depth (Z) direction, focus is shifted continuously, thereby can keeps high precision, significantly enlarge the measurement range of depth direction simultaneously.In addition because the phase place when focusing by each pixel is calculated D coordinates value, thereby can under the state of all measuring point focusings, obtain coordinate figure, also can carry out high-precision mensuration in the XY direction.
Description of drawings
By consulting the following invention description of having added accompanying drawing, can more know analogy above-mentioned purpose of the present invention, characteristic and advantage and other purpose and advantage, the same reference numeral in the accompanying drawing is represented identical or similar part.
Fig. 1 is the index path of the measuring principle of the traditional optical grating projection type moire technique of expression.
Fig. 2 is the index path of the measuring principle of the traditional entity grating type moire technique of expression.
Fig. 3 is the oblique view of expression based on the noncontact measuring shape method principle of traditional raster graphic projection+phase-shifts.
Fig. 4 is the index path with invention.
Fig. 5 is the oblique view of expression measuring principle of the present invention.
Fig. 6 is the process flow diagram of expression based on mensuration process of the present invention.
Fig. 7 is the timing diagram of the deep or light waveform example of certain pixel among expression the present invention.
Fig. 8 is the index path of expression with the relation of invention focus and phase place.
Fig. 9 is that expression is with the oblique view of invention grating face with the intersection point of table polar curve.
Figure 10 is the process flow diagram of expression with invention view data input process.
Figure 11 is the accompanying drawing of expression with the scan method of invention pixel.
Figure 12 is expression makes process with the invention three-dimensional plot a process flow diagram.
Figure 13 is the process flow diagram of expression with the process of removing one example of invention skew composition and fluctuation composition.
Figure 14 is the process flow diagram of expression with other example of the process of removing of invention skew composition and fluctuation composition.
Figure 15 is the process flow diagram of expression with invention focus center computation process.
Figure 16 is the process flow diagram of expression with invention phase calculation process.
Figure 17 is the accompanying drawing of expression with the invention detailed content.
Figure 18 is the process flow diagram of expression with invention phase unwrapping process.
Figure 19 is the process flow diagram of expression with invention three-dimensional position computation process.
Figure 20 is the oblique view of expression with invention distortion correction principle.
Figure 21 is the accompanying drawing that expression specific embodiment system constitutes.
Figure 22 is the sectional view of the formation of the mensuration head that adopted among the embodiment of expression.
Figure 23 is the drawing in side sectional elevation along the XXIII-XXIII line of Figure 22.
Figure 24 is an oblique view of measuring state among the expression embodiment.
Figure 25 is the accompanying drawing that object is measured in expression.
Figure 26 is the accompanying drawing of the optical grating projection image of expression when having adopted the infinitely-great pin hole optical system of the depth of focus.
Figure 27 is the accompanying drawing of the optical grating projection image of expression actual optical system.
Figure 28 is the accompanying drawing of focus center image that expression makes the process of three-dimensional plot.
Figure 29 is the accompanying drawing of expression with the invention phase image.
Figure 30 is expression launches phase image with invention a accompanying drawing.
Figure 31 is the accompanying drawing of expression with invention three-dimensional plot example images.
Figure 32 is the accompanying drawing of expression with invention error profile image example.
Figure 33 is the accompanying drawing of the formation of the embodiment that carried in the presentation video mensuration machine.
Embodiment
Following with reference to accompanying drawing, preferred forms of the present invention is elaborated.
Fig. 5 represents to be used to implement the integral body formation of device of the present invention.
Present embodiment with the same device of conventional example shown in Figure 3 in, also be provided with the 1st focus shift mechanism 18, it moves grating filter 12 by making grating filter 12 in each the pattern displacement mechanism 16 that transversely moves by constant speed shown in the arrow A by constant speed on the fore-and-aft direction shown in the arrow B; The 2nd focus shift mechanism 24, it moves imaging apparatuss 22 such as video camera equally by constant speed on the fore-and-aft direction shown in the arrow B, projecting lens 15 and imaging lens system 21 are all constituted as the side telecentric optical system, even thereby focus shift, the camera point on the mensuration object 8 that is write down in the pixel does not change yet.
The 1st focus shift mechanism 18 of above-mentioned grating filter 12 usefulness and the 2nd focus shift mechanism 24 of imaging apparatus 22 usefulness are controlled as same moved further.
Corresponding with the phase-shifts amount of above-mentioned grating filter 12, decide the shooting timing of imaging apparatus 22.Illuminating lamp 10 is regularly lighted according to this shooting.This illuminating lamp 10 can adopt such as xenon flash lamp and halogen lamp.
The processing that the present invention relates to is undertaken by process shown in Figure 6.That is, at first in step 100, the limit makes focus and phase-shifts by constant speed, and the view data of measuring object 8 is imported on the limit continuously.Fig. 7 represents the deep or light waveform example of certain pixel.By data input time of producing 128 images such as 30fps video camera (imaging apparatus 22) be 4.3 seconds.Here, the time t of transverse axis is corresponding with the shooting number.
Next enter step 200, in computing machine, the data of being imported are handled, make three-dimensional plot.That is, because focus center and phase place have relation shown in Figure 8, thereby in step 210, decide fringe order from focus center, carry out phase place by 0～2 π → 0～n π and connect (being called expansion), and calculate the absolute value of phase place.In addition as shown in Figure 9, because the table polar curve of the grating face of fringe order and shooting face is obtained from known parameters such as camera position, focal length, picture centre with in the absolute phase that step 210 is obtained, thereby in step 220, (u, camera point three-dimensional position v) calculates as the picture coordinate with the three-dimensional position of this intersection point.By integral image is carried out this calculating, make three-dimensional plot.
Specifically, the input of the view data in the above-mentioned steps 100 is undertaken by process shown in Figure 10.That is,, the focus shift mechanism 18,24 of projection optical system and image pickup optical system is moved to initial position at first in step 102.
Next in step 104, illuminating lamp 10 is lighted, with the graphic projection of grating filter 12 to measuring on the object 8.
Next in step 106, the focus shift mechanism 18,24 of projection optical system and image pickup optical system is shown below, V moves by constant speed.
z f＝V·t+z 0 ...(1)
Next enter step 108, pattern displacement mechanism 16 is shown below, ω moves by constant speed.
φ＝ω·t+φ 0 ...(2)
Next enter step 110, judge whether reached necessary shooting number K.When shooting number i reaches K, finish this process at this point.
On the other hand, under the occasion of shooting number i, enter step 112, make a video recording,, pass on image to the storer of computing machine in step 114 less than necessity shooting number K, in step 116 standby, until the Phase advance of grating till setting 2 π/n.
When in above-mentioned steps 200, making three-dimensional plot, as shown in figure 11, to whole pixels of image, the pixel in the upper left corner is made as (u, v)=(0,0), at first be the pixel of the 1st row to v=0, u=0 to u=w from left end, enforcement is then implemented above-mentioned processing to this delegation of v=1 from the processing till the three-dimensional position calculating 4. of being drawn to of deep or light waveform, ends until reaching this behavior of last v=h, carry out same enforcement repeatedly, thereby finish the calculating of all pixel three-dimensional positions of image.
Specifically, as shown in figure 12, behind the deep or light waveform of step 250 extraction image coordinate, enter step 260, remove the skew composition and the fluctuation composition of deep or light waveform.Removing the skew composition of deep or light waveform and the purpose of fluctuation composition in this step 260 is: when getting rid of the skew composition of deep or light waveform, get rid of based on inclined to one side Jiao near the catoptrical incident the object camera point and shift into the branch fluctuation based on the illumination change of surrounding environment.But the variation of supposing fluctuation is compared with the deep or light variation based on phase-shifts, is very slowly.
Specifically, as shown in figure 13, calculate the differentiated waveform of deep or light waveform, can remove skew and fluctuation composition thus in step 262.That is, if with i open the shooting number image coordinate (u, deep or light waveform is v) represented with following formula:
Gi＝A(i)sin{(2πi/n)+φ}+B+ε(i) ...(3)
(amplitude of A (i)=waveform change here, B=skew, ε (i)=fluctuation composition), then differentiated waveform can become following formula, thereby can remove skew and fluctuation composition.
[several 1]
g i = A cos { ( 2 i + 1 ) π n + φ } - - - ( 4 )
Here,
Figure A20041003322700122
In addition because discrete data is carried out differential, thereby the Phase advance π/n of differentiated waveform.
The skew composition of deep or light waveform and removing of composition of fluctuation also can be shown in the variation of Figure 14 in the step 260 in addition, in step 264, the off-set value of deep or light waveform under certain phase-shifts amount is removed as near the mean value of the deep or light value of (front and back) ± π it.
That is, (the then skew among the i+fluctuation composition B+ ε (i) will become following formula (4a) for u, deep or light waveform v), remove the deep or light waveform g of skew and fluctuation composition if come the presentation video coordinate with above-mentioned formula (3) iBecome following formula (4b).
B + ϵ ( i ) = Σ j = i - n i + n - 1 G j - - - ( 4 a )
g i = G i - Σ j = i - n i + n - 1 G j - - - ( 4 b )
Under this occasion, the phase place of the deep or light waveform after removing is not offset.
The step 260 of Figure 12 enters step 270 after finishing, and calculates focus center (Fig. 8 (1)).The focus center computation purpose of this step 270 is: be the decision fringe order, and calculate the degree of depth of the Z-direction of focusing.That is, if the phase-shifts of hypothesis optical grating projection is spaced apart 2 π/n (n is an integer) here, just then become the correlation curve of focus every the deep or light variation of n data, the summit of correlation curve is that deep or light value reaches maximum position and just becomes focus center.Thereby can regard correlation curve as normal distribution curve, and obtain the summit by statistical computation.
Figure 15 represents concrete processing procedure.Here, to square waveform every the deep or light change curve of n data (the j bar is extracted waveform out), obtain frequency mean value respectively, additional weight coefficient based on the pairing coefficient of peak height of extracting waveform out (area than) averages to handle and obtains.
The step 270 of Figure 12 enters step 290 after finishing, and the phase place (Fig. 8 (2)) of calculating focus center (π～π).The purpose of the phase calculation of this step 290 is to calculate the phase place of raster graphic projected fringe.Here, owing to sneaked near the reflected light of camera point in the waveform of off-focal part, thereby can increase the weight of the data that approach focus center, obtain phase place.
That is, if the phase-shifts of hypothesis raster graphic projection is spaced apart 2 π/n (n is an integer) here, then the differentiated waveform value every the n data will become normal distribution curve, expression phase place 2 π i/n (here, i=0,1 ..., n-1) the focusing correlation curve in.The apex height of the correlation curve of each phase place and focus center is proportional in addition.The area that the Central Line surrounded (≈ is every the summation of the differentiated waveform value of n data) by correlation curve and deep or light value is proportional with the apex height of correlation curve., shown in the concrete processing procedure among Figure 16, multiply each other for this reason, in step 300, carry out Fourier integral, obtain phase place thus with the main ripple mj that in step 292, obtains.Promptly, because in π/8～(15 π)/8 scopes, every π/4 correlation curve of 8 phase places is arranged just, thereby obtain the area that the Central Line surrounded, thereby obtain the formed sine wave of interval area (Fourier integral) by each phase place shown in Figure 17 by this each curve and deep or light value.Main ripple and this sinusoidal wave phase differential are obtained as φ.(u v) implements said process to whole pixel.
The step 290 of Figure 12 enters step 310 after finishing, and launches phase place, near the phase place of the fringe order of focus center, calculates absolute phase (Fig. 8 (3)) as.The purpose of the phase unwrapping in this step 310 is: obtain the striped near focus center, to calculate absolute phase.Figure 18 represents concrete processing procedure.That is, in (2) of Fig. 8,, calculate which fringe order that it is equivalent to grating from the left end counting.Therefore, the φ focus of step 322 becomes the roughly value (value of the phase place that approaches to launch) of expansion.In the formula in this external step 324, exp (i φ) is-π～+ correct phase between the π, to the 2nd on the right, obtain angle (the decimal angle of φ-φ focus), because the decimal angle of φ focus=(2 π * progression)+φ focus, thereby obtain correct phase place by φ unwrap=(2 π * progression)+φ.
The step 310 of Figure 12 enters step 330 after finishing, and calculates the three-dimensional position (Fig. 8 (4)) of actual some Pi, returns step 240 then.Three-dimensional position computation purpose in this step 330 is to calculate the three-dimensional position of the point of being made a video recording.Figure 19 represents concrete processing procedure.
When in the step 220 of Fig. 6, calculating three-dimensional position, under the necessary situation, measure the distortion (distortion) of head in step 400 and proofread and correct, to realize high precision int.
Specifically, because projection optical system and image pickup optical system have distortion shown in Figure 20, thereby proofread and correct by the camera mode formula of having considered this distortion.
Be used for from by producing the distortion coordinate (u that known raster graphic obtains in advance Dist, v Dist), obtain former pin hole coordinate (x Pin, y Pin) camera mode formula example as follows.
x dist＝(u dist-u 0)/f u，y dist＝(v dist-v 0)/f v ...(5)
x pin＝x dist+(g 1+g 3)x dist 2+g 4x disty dist+g 1y dist 2
+(k 1r 2+k 2r 4)x dist ...(6)
y pin＝x dist+g 2x dist 2+g 3x disty dist+(g 2+g 4)y dist 2
+(k 1r 2+k 2r 4)y dist ...(7)
Here, r 2=x Dist 2+ y Dist 2
On the other hand, be to proofread and correct distortion, for from pin hole coordinate (x based on photographic lens Pin, y Pin) ask and calculate distortion coordinate (u Dist, v Dist) calculating, can obtain by calculating based on the convergence of Newton method.Specifically carry out by the following method.
(1) initial value is set
(x dist，y dist)＝(x pin，y pin) ...(8)
(2) Error Calculation
Coordinate figure (x will distort Dist, y Dist) be converted to pin hole coordinate figure (x Temp, y Temp), calculate error (x with the pin hole coordinate figure of desiring to obtain Err, y Err).
(x err，y err)＝(x temp，y temp)·(x pin，y pin) ...(9)
(3) correction is calculated
(x pin/x dist)＝1+2(g 1+g 3)x dist+g 4y dist+k 1(3x dist 2+y dist 2)
+k 2(5x dist 4+6x dist 2y dist 2+y dist 4) ...(10)
(x pin/y dist)＝g 4x dist+2g 1y dist+2k 1x disty dist
+4k 2(x dist 3y dist+x disty dist 3) ...(11)
(y pin/x dist)＝2g 2x dist+g 3y dist+2k 1x disty dist
+4k 2(x dist 3y dist+x disty dist 3) ...(12)
(y pin/y dist)＝1+g 3y dist+2(g 2+g 4)y dist+k 1(x dist 2+3y dist 2)
+k 2(x dist 4+6x dist 2y dist 2+5y dist 4) ...(13)
[several 2]
( x diff , y diff ) = ( x err ( ∂ x pin ∂ x dist ) + y err ( ∂ y pin ∂ x dist ) , y err ( ∂ y pin ∂ y dist ) + x err ( ∂ x pin ∂ y dist ) ) - - - ( 14 )
Here, since less based on the 2nd the amount of influence, and, also can omit the 2nd in order to reduce calculated amount, calculate by following formula.
(4) correction of distortion coordinate figure
(x dist，y dist)＝(x dist，y dist)-(x diff，y diff) ...(16)
(5) convergence is judged
Such as, if (x Diff＜ε), and (y Diff＜ε), then finish convergence and calculate.Otherwise just return (2), revise coordinate figure.
Here, f u, f vBe focal length (X-axis, Y-axis), u 0, v 0Be the linear dimensions at presentation video center, k 1, k 2Be coefficient of radial distortion, g 0, g 1, g 2, g 3It is the distortion parameter of the distortion factor of expression orthogonal directions.
According to inventor's test, at above-mentioned camera mode ε=1 * e -8Occasion under, its convergence number of times average out to 1.5 times is to the maximum 6 times.
Relevant distortion correction is documented in the following document.
Juyang?Weng，“Camera?Calibration?with?Distortion?Modelsand?Accuracy?Evaluation”IEEE?Trans.Patt.Anal.MachingIntell.Vol.14，no.4，pp965-980。
Zhengyou?Zhang，“A?Flexible?New?Technique?for?CameraCalibration”Dec.2.1998，MSR-TR-98-71。
In step 342～354 of Figure 19, restrain computation purpose by the Newton-Raphson method and be:, thereby will remove this influence because distortion is non-linear.
Like this, by the distortion of correcting lens optical system and shift mechanism system, can improve the mensuration precision of XY direction.According to purposes, also can omit distortion correction in addition.
Figure 21 represents that the system of specific embodiment constitutes.
Present embodiment constitutes: comprise Projection Division with projection grating figure and the mensuration of the image pickup part of making a video recording from different viewpoints 40; Calculate the computing machine (PC) 50 of three-dimensional plot from the view data of being made a video recording; The cable 60 that connects above-mentioned parts.
Specifically, shown in Figure 22 (sectional view of watching from the top) and Figure 23 (along the drawing in side sectional elevation of the XXIII-XXIII line of Figure 22), said determination head 40 has the pattern displacement mechanism 16 that grating filter 12 is moved by constant speed; The illuminating lamp 10 that is used for the projection grating figure; Be used for imaging apparatus (video camera) 22 that the raster graphic of institute's projection is made a video recording; The 1st focus shift mechanism 18 that the focus of projection optical system is moved by constant speed; The 2nd focus shift mechanism 24 that the focus of image pickup optical system is moved by constant speed; Even be intended to focus shift, projecting lens 15B and imaging lens system 21 that the camera point on the object that is write down in the pixel does not also change with picture side telecentric optical system; Detect the shift amount of grating filter 12, generate camera control panel 42 at the shooting timing signal of video camera 22; Make the drive unit of pattern displacement mechanism 16 and the synchronization-moving control circuit of drive unit of focus shift mechanism 18,24 (omitting diagram); The projector control panel 44 that when shooting, illuminating lamp 10 is lighted.Among the figure, the 46th, such as manual iris, the 48th, cooling fan.
Here, projection optical system (15) and image pickup optical system (21) are as the purpose as the side heart far away: even focus shift, the camera point on the mensuration object 8 that is write down in the pixel does not change yet.
Aforementioned calculation machine 50 has frame grabber 52, and it is caught from measuring the image of 40 imaging apparatus 22 inputs; The motion control board 54 of 40 shift mechanism 16,18,24 is measured in control; Software (omitting diagram), it is used for control and measures 40, have the limit and make focus and the phase place limit input consecutive image that is shifted simultaneously, and the function of passing on to the primary memory of computing machine 50, the live function of the image suitable with a measurement range of measuring 40 and the function of setting the depth range of measuring of showing; Software (omitting diagram), it is used to make three-dimensional plot, has the function of calculating focus center from the deep or light waveform that makes the amplitude change by focus shift, calculate near the function of the deep or light waveform phase of focus center, utilize the focus center data to launch the function of phase place, consider the distortion of optical system, come the function of the coordinate on the correcting image, obtain pixel with imaging apparatus 22 and be the intersection point of the grating face of the table polar curve of starting point and raster graphic projection, calculating projects to the function of the three-dimensional position of pixel, the consecutive image that regeneration is imported makes and can confirm the function that view data is normally imported, the function that shows the three-dimensional plot that is made, the function of preserving the point group data of three-dimensional plot by CAD forms such as IGES.
Figure 23 represents to be come measuring object (being automobile here) 8 states of measuring by present embodiment.
Below, the number of will making a video recording is made as 128, and the mensuration example that the interval of projection side and shooting side is set at 500mm is explained.Here, enlarged at interval after, fringe order will narrow down at interval, resolving power is improved.Here, if suppose that measuring object 8 is the full scale automobiles that are equivalent to of shape shown in Figure 25, measurement range is directions X 4000mm * Y direction 3000mm * Z direction 2000mm, distance to the object center is 4800mm, picture size is 320 * 240 pixels, then under the occasion of the infinitely-great pin hole optical system of the depth of focus, as shown in figure 26, can clearly carry out raster graphic projection and shooting from front to back.On the other hand, because the depth of focus of actual optical system is limited, thereby as shown in figure 27, the drop shadow spread of raster graphic is limited by the focal position.
Next, Figure 28 to Figure 31 represents to make the process of three-dimensional plot.Only the three-dimensional plot of obtaining from the focus center image under the full-scale degree of depth form of expression shown in Figure 28 (a), under the 200mm degree of depth form of expression at interval shown in Figure 28 (b), under this occasion, phase image will be as shown in figure 29, launching phase image will be as shown in figure 30, the final three-dimensional plot image that is obtained will be shown in Figure 31 (a) under the full-scale degree of depth form of expression, will be shown in Figure 31 (b) under the 200mm degree of depth form of expression at interval.Though be difficult to see clearly from figure, especially under the occasion of 200mm degree of depth performance at interval, Figure 31 (b) compares with Figure 28 (b), can obtain smooth shape.
Figure 30 has represented to add the data determination resultant error of the noise contribution of imagination actual machine.Because tire is not reflective, thereby will imbed in the noise, reduces precision, but, can obtain high-precision measurement result other parts.
In the above-described embodiments with automobile as determination object, but the kind of determination object is not to be defined in this.Light source also is not limited to xenon flash lamp and halogen lamp.
Next, the embodiment to the determining image machine is explained.This embodiment can adopt following method: promptly, (1) in statu quo uses the image pickup optical system (mensuration optical system) of determining image machine, and append projection optical system, perhaps (2) do not use the image pickup optical system of determining image machine, but as shown in figure 33, the mensuration 40 of having assembled image pickup optical system and projection optical system and the image pickup optical system of above-mentioned determining image machine are installed to the Z axle of determining image machine side by side, drive by the Z axle of determining image machine and carry out pattern displacement and focus shift.
In the embodiment of Figure 33, pattern displacement mechanism and focus shift mechanism can be substituted by the guiding mechanism 60 of Z-direction.In focus shift, same with existing determining image machine, measure 40 from Z-direction, getting off to carry out.Because raster graphic comes projection from oblique, thereby move up and down, project to the raster graphic of measuring object 8 and just produce and move and phase-shifts by measuring 40.Focus shift speed and phase-shifts speed are set by the angular adjustment or the grating adjusting at interval of projection optical system.
Among the figure, the 6th, mounting is measured the platform of object 8, and the 11st, light-emitting component, 15,21 is respectively both sides heart projecting lens far away and imaging lens system, the 45th, illumination control circuit, the 62nd, the Z spindle guide is to the transmission motor of mechanism, and the 64th, control the motion control unit of this transmission motor 62.
In method (2), be not limited to the determining image machine, also can be installed to three-dimensional measurement machine (the three-dimensional measurement machine of the type that its Z axle can be driven by constant speed by motor) and use.Under any one occasion,, thereby only need moving of Z-direction just can because raster graphic comes projection from oblique.
In the above description, pattern displacement mechanism and focus shift mechanism all move by constant speed, as long as but can grasp the shift position, also can move not according to constant speed.
Although more than introduced some preferential embodiment, it should be understood that under the prerequisite that does not break away from the claim scope, can carry out multiple change and correction to it.
Whole herein with reference in the content of the Japanese patent application No.2003-96712 of registration on March 31st, 2003, comprise instructions, accompanying drawing and claim.

Claims (21)

1. non-contact three-dimensional process for measuring shape, be that a kind of limit makes the phase-shifts limit observe the raster graphic that projects to determination object from other direction that is different from projecting direction, resolve the contrast of the raster image that is out of shape by the shape of determination object with this, thereby obtain the non-contact three-dimensional process for measuring shape of shape, it is characterized in that:
The projection side and the focus of shooting side are shifted continuously, have enlarged the measurement range of depth direction.
2. the non-contact three-dimensional process for measuring shape of record in the claim 1 is characterized in that: comprise
The limit makes focus and phase place be shifted by certain speed, and the step of the view data of said determination object is imported on the limit continuously;
In computing machine, handle the data of being imported, make the step of three-dimensional plot.
In the claim 2 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
The above-mentioned step that makes three-dimensional plot comprises
Decide fringe order from focus center, launch phase place and calculate the step of phase place absolute value;
The step of the three-dimensional position of the intersection point of the grating face of calculating fringe order and the table polar curve of camera point.
In the claim 3 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
The above-mentioned step that makes three-dimensional plot also comprises
Extract the step of the deep or light waveform of image coordinate out;
Remove the step of the skew composition and the fluctuation composition of this deep or light waveform;
Calculate the step of focus center;
Calculate the step of the phase place of focus center.
In the claim 4 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
Above-mentioned step of removing the skew composition of deep or light waveform and the composition that fluctuates is used to calculate the differentiated waveform of deep or light waveform.
In the claim 4 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
The step of the above-mentioned skew composition of removing deep or light waveform and fluctuation composition is used near certain phase-shifts amount to above-mentioned deep or light waveform ± and the deep or light value of π averages processing.
In the claim 4 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
The step of aforementioned calculation focus center is used for respectively square waveform every the deep or light change curve of n data is obtained frequency mean value, and additional weight coefficient based on the pairing coefficient of peak height of extracting waveform out averages to handle and obtains.
In the claim 4 record the non-contact three-dimensional process for measuring shape, it is characterized in that:
The step of the phase place of aforementioned calculation focus center is used for taking advantage of with main phase of wave and carrying out Fourier integral, obtains phase place thus.
9. non-contact three-dimensional shape measuring apparatus, be that a kind of limit makes the phase-shifts limit observe the raster graphic that projects to determination object from other direction that is different from projecting direction, resolve the contrast of the raster image that is out of shape by the shape of determination object with this, thereby obtain the non-contact three-dimensional shape measuring apparatus of shape, it is characterized in that: have
The limit makes focus and phase-shifts, and the limit projects to raster graphic the unit of determination object;
The limit makes focus shift, and the unit of the view data of the figure that projects to determination object is imported on the limit;
The view data of being imported is handled, and made the unit of three-dimensional plot.
In the claim 9 record the non-contact three-dimensional shape measuring apparatus, it is characterized in that:
Above-mentioned three-dimensional plot makes the unit and comprises
Decide fringe order from focus center, launch phase place and calculate the unit of the absolute value of phase place;
The unit of the three-dimensional position of the intersection point of the grating face of calculating fringe order and the table polar curve of camera point.
11. the non-contact three-dimensional shape measuring apparatus of record is characterized in that: also have in the claim 9
Proofread and correct the unit of the distortion of projection optical system and image pickup optical system.
12. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Projection optical system and image pickup optical system are equipped in the shift mechanism, and drive by Z-direction.
13. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Above-mentioned graphic projection unit comprises
The pattern displacement mechanism that grating filter is moved in the horizontal;
The 1st focus shift mechanism, it makes grating filter move at fore-and-aft direction by this pattern displacement mechanism.
14. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Above-mentioned view data input block comprises
Make imaging apparatus in the 2nd focus shift mechanism that fore-and-aft direction moves.
15. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
The projecting lens of above-mentioned graphic projection unit and the imaging lens system of above-mentioned view data input block all constitute picture side telecentric optical system.
16. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Make the 1st focus shift mechanism that grating filter moves and make the 2nd focus shift mechanism that imaging apparatus moves by driven in synchronism with above-mentioned graphic projection unit with above-mentioned view data input block.
17. the non-contact three-dimensional shape measuring apparatus of record is characterized in that: also have in the claim 9
Lighting unit, itself and corresponding the lighting of phase-shifts amount of above-mentioned projecting figure.
18. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Above-mentioned graphic projection unit and view data input block are integrated in measuring head.
19. the non-contact three-dimensional shape measuring apparatus of record in claim 9 or 10 is characterized in that:
Above-mentioned three-dimensional plot makes the unit and is made of computing machine,
This computing machine has
Frame grabber, it is caught from the image of the imaging apparatus input of measuring head;
The motion control board of the shift mechanism of head is measured in control;
Software, it is used for control and measures head, have the limit and make focus and the phase place limit input consecutive image that is shifted simultaneously, and function, the live function of the image suitable with the measurement range of measuring head and the function of setting the depth range of measuring of showing of passing on to the primary memory of computing machine;
Software, it is used to make three-dimensional plot, has the function of calculating focus center from the deep or light waveform of amplitude change by focus shift, calculate near the function of the deep or light waveform phase of focus center, utilize the focus center data to launch the function of phase place, the function that the distortion of consideration optical system comes the coordinate on the correcting image, obtain pixel with imaging apparatus and be the intersection point of the grating face of the table polar curve of starting point and raster graphic projection, calculating projects to the function of the three-dimensional position of pixel, the consecutive image that regeneration is imported makes and can confirm the function that view data is normally imported, the function that shows the three-dimensional plot that is made, preserve the function of the point group data of three-dimensional plot by the CAD form.
20. the non-contact three-dimensional shape measuring apparatus of record in the claim 9 is characterized in that:
Above-mentioned view data input block utilizes the image pickup optical system of determining image machine.
21. the non-contact three-dimensional shape measuring apparatus of record in the claim 18 is characterized in that:
The image pickup optical system of said determination head and determining image machine is installed to the Z axle of this determining image machine side by side, and pattern displacement and focus shift are driven by the Z axle of determining image machine carries out.
CNB2004100332272A 2003-03-31 2004-03-31 Non-contact 3-D shape testing method and its device Expired - Fee Related CN100507441C (en)

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