CN204479187U - Based on the collimated light beam detector of two pentaprism - Google Patents
Based on the collimated light beam detector of two pentaprism Download PDFInfo
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- CN204479187U CN204479187U CN201520149260.5U CN201520149260U CN204479187U CN 204479187 U CN204479187 U CN 204479187U CN 201520149260 U CN201520149260 U CN 201520149260U CN 204479187 U CN204479187 U CN 204479187U
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- collimated light
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Abstract
The utility model provides a kind of collimated light beam detector based on two pentaprism, comprises line slideway, fixing pentaprism, scanning pentaprism and the sub-device of beam reception process; Wherein, the length of described line slideway is not less than the maximum beamwidth of collimated light beam to be measured; Fixing pentaprism is placed on one end of line slideway, is used for reflecting the beamlet of certain position of collimated light beam adjacent edges, and scanning pentaprism can linearly slide, is used for reflecting the beamlet of tested other positions of collimated light beam; The sub-device of described beam reception process receives simultaneously and calculates the difference of the wavefront slope of two pentaprism reflection resulting bottle light beams.This device can ambient vibration and air turbulence are introduced in effective compensation measuring process systematic error, thus improves the measuring accuracy of collimated light beam.
Description
Technical field
The utility model relates to technical field of optical detection, is specifically related to a kind of collimated light beam detector based on two pentaprism.
Background technology
Along with the progress of manufacture level, optical elements of large caliber is towards more high precision, more heavy caliber future development.Aperture interferometer system detects effective instrument of optical elements of large caliber face shape error.High precision interferometer requires that its collimated light beam has very high collimation, has great importance so collimated light beam detects.
Conventional collimated light beam detection method has Shack-Hartmann method and shearing interference method.Wherein, when Shack-Hartmann method measures heavy caliber collimated light beam, need the optical match system that the bore of a particular design is suitable; Shearing interference method needs the shear plate of high precision that a bore is at least suitable with tested collimated light beam bore, high uniformity, and therefore the testing cost of Shack-Hartmann method and shearing interference method is very high.Patent ZL201120352084.7 adopts the method for single scanning pentaprism to measure heavy caliber collimated light beam, utilize the unchangeability of pentaprism one dimension corner, the longitudinal direction focusing in alignment procedure is converted into horizontal aligning, and therefore apparatus structure is simple, realize cost lower, there is important using value.But, in actual applications due to the impact of ambient vibration and air turbulence, the relative position between tested collimated light beam wavefront and guide rail is changed, thus introduces systematic error, reduce measuring accuracy.Prior art (patent ZL201120352084.7) can not compensate this systematic error.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, the utility model provides the collimated light beam detector based on two pentaprism, and this device can bucking-out system error, improves measuring accuracy.
The technical scheme that the utility model patent adopts is: based on the collimated light beam detector of two pentaprism, is made up of line slideway, fixing pentaprism, scanning pentaprism and the sub-device of beam reception process.Wherein, the length of described line slideway is not less than the maximum beamwidth of collimated light beam to be measured; Fixing pentaprism is placed on one end of line slideway, is used for reflecting the beamlet of certain position of collimated light beam adjacent edges, and scanning pentaprism can slide along this line slideway, is used for reflecting the beamlet of tested other positions of collimated light beam; The sub-device of described beam reception process receives simultaneously and calculates the difference of the wavefront slope of two pentaprism reflection resulting bottle light beams; Scanning pentaprism is made up of pentaprism and wedge-shaped mirrors, pentaprism two right-angle side plating anti-reflection films, first reflecting surface plating high-reflecting film, and the reflectivity of second reflecting surface is between 50% and 60%; The principal section of described wedge-shaped mirrors is a right-angle triangle, and its angle is respectively 90 degree, 22.5 degree and 67.5 degree, and the second reflecting surface of the face that wedge-shaped mirrors hypotenuse is corresponding and pentaprism glues together.
Compare with the pick-up unit of shearing interference method with traditional Shack-Hartmann method, the installation cost that the utility model provides is low, and measurement space scope is large.Compared with existing single scanning pentaprism method (patent ZL201120352084.7), the device that the utility model provides can ambient vibration and air turbulence are introduced in effective compensation measuring process systematic error, and measuring accuracy is higher.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the embodiment of collimated light beam detector of the present utility model;
Fig. 2 is the schematic diagram of scanning pentaprism of the present utility model;
Fig. 3 is the schematic diagram of the sub-device of beam reception process of the present utility model.
In figure: 1 is laser instrument, 2 is condenser lens, and 3 is collimation lens, and 4 is line slideway, 5 is fixing pentaprism, 6 is scanning pentaprism (6-a is pentaprism, and 6-b is wedge-shaped mirrors), and 7 be imaging len and 8 is CCD.
Embodiment
Fig. 1 is the structural representation of the pick-up unit of collimated light beam of the present utility model.Please refer to Fig. 1, in the present embodiment, collimated light beam to be measured is ultraviolet laser beams, and the device producing this ultraviolet laser beams comprises the laser instrument 1, condenser lens 2 and the collimation lens 3 that set gradually.The light beam that laser instrument 1 exports is focused lens 2 and focuses on, and after collimation lens 3 collimates, obtain collimated light beam, the back focus of condenser lens 2 overlaps with the front focus of collimation lens 3, and this collimation lens 3 is heavy caliber object lens.Wherein, the wavelength of described laser instrument 1 is 355nm, and power is greater than 20mw.The bore of heavy caliber collimator objective 3 is 610mm, and focal length is 3000mm; Its F number ratio of bore (focal length with) is about 4.9, and the F number of condenser lens 2 is less than the F number of heavy caliber collimator objective 3.
In the present embodiment, the pick-up unit of collimated light beam comprises line slideway 4, fixing pentaprism 5, scanning pentaprism 6, imaging len 7 and CCD 8.
Wherein, described line slideway 4 is arranged in the light path of collimated light beam to be measured, and this line slideway is arranged (namely perpendicular to the optical axis of heavy caliber collimator objective 3) perpendicular to the direction of illumination of collimated light beam.In the present embodiment, Lighting direction is decided to be X-direction, and line slideway 4 direction is set to Z-direction.
The length of described line slideway 4 is not less than the maximum beamwidth of collimated light beam to be measured.
Fixing pentaprism 5 is arranged on described line slideway 4, and be fixed on guide rail one end away from CCD, it can reflect the beamlet of collimated light beam edge attachments, and reflected light, through scanning pentaprism 6 and imaging len 7, arrives CCD 8.
Scanning pentaprism 6 slides on line slideway 4, and at each sliding position, it is by the beamlet of reflection collimated light beam in this position, and reflected light, through imaging len 7, arrives CCD 8.
As shown in Figure 2, it is made up of pentaprism 6-a and wedge-shaped mirrors 6-b in the principal section of scanning pentaprism 6, and two right-angle side plating anti-reflection films of pentaprism 6-a, first reflecting surface plating high-reflecting film, the reflectivity of second reflecting surface is between 50% and 60%.The principal section of wedge-shaped mirrors 6-b is a right-angle triangle, and its angle is respectively 90 degree, 22.5 degree and 67.5 degree.Second reflecting surface of the face that hypotenuse is corresponding and pentaprism 6-a glues together.
The sub-device of beam reception process that imaging len 7 and CCD 8 form as shown in Figure 3, imaging len 7 and CCD 8 are coaxially arranged, and CCD 8 is positioned at the focal plane place of imaging len 7, the focal length of imaging len 7 is f, CCD records the focal spot of two beamlets reflected by fixing pentaprism 5 and scanning pentaprism 6, the hot spot that energy is little is that the reflection of fixing pentaprism 5 obtains hot spot corresponding to beamlet, the hot spot that energy is large is that the reflection of scanning pentaprism 6 obtains hot spot corresponding to beamlet, the relative displacement of two spot center positions is d, then scanning pentaprism 6 reflection, to obtain the difference that the slope of beamlet and fixing pentaprism 5 reflect the slope obtaining beamlet be d/f.
Due to the impact of ambient vibration and air turbulence, the center of two hot spots all can drift about along equidirectional along with the time, but the relative position of two spot center keeps constant substantially.This illustrates and utilize two pentaprism method can the systematic error of compensate for ambient vibration and air turbulence introducing.
In above-mentioned device, the pentaprism length of side is greater than 10mm, and the distance of the scanning pentaprism 6 linearly each movement of guide rail 4 is less than 10mm.Fixing pentaprism 5 is concordant with the optical axis height of heavy caliber collimator objective 3 with the centre-height of the principal section of scanning pentaprism 6.Collimated light beam after heavy caliber collimator objective 3 is after being irradiated on pentaprism 5, and after two secondary reflections, vertical duction is by beam exit face outgoing, then through scanning pentaprism 6, arrives the sub-device of beam reception process.Meanwhile, collimated light beam is irradiated to after on scanning pentaprism 6, and after two secondary reflections, vertical duction is by beam exit face outgoing, arrives the sub-device of beam reception process.
Scanning pentaprism 6 scans the beamwidth of whole collimated light beam along line slideway 4, can obtain the slope distribution of whole this dimension of collimated light beam successively, just can obtain the wavefront distribution of collimated light beam in this dimension by integral and calculating.
Due in the above embodiments, laser instrument is ultraviolet laser, and the collimated light beam to be measured of generation is also ultraviolet light beam, therefore pentaprism and imaging len all need the material that employing ultraviolet permeability is higher, such as, melt quartz; CCD 8 also needs to be ultraviolet response enhancement mode, and especially near 355nm, the response of wave band strengthens.
Claims (1)
1. based on the collimated light beam detector of two pentaprism, it is characterized in that, comprise line slideway, fixing pentaprism, scanning pentaprism and the sub-device of beam reception process; Wherein, the length of described line slideway is not less than the maximum beamwidth of collimated light beam to be measured; Fixing pentaprism is placed on one end of line slideway, is used for reflecting the beamlet of certain position of collimated light beam adjacent edges, and scanning pentaprism can slide along this line slideway, is used for reflecting the beamlet of tested other positions of collimated light beam; The sub-device of described beam reception process receives simultaneously and calculates the difference of the wavefront slope of two pentaprism reflection resulting bottle light beams; Described scanning pentaprism is made up of pentaprism and wedge-shaped mirrors, pentaprism two right-angle side plating anti-reflection films, first reflecting surface plating high-reflecting film, and the reflectivity of second reflecting surface is between 50% and 60%; The principal section of described wedge-shaped mirrors is a right-angle triangle, and its angle is respectively 90 degree, 22.5 degree and 67.5 degree, and the second reflecting surface of the face that wedge-shaped mirrors hypotenuse is corresponding and pentaprism glues together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520149260.5U CN204479187U (en) | 2015-03-13 | 2015-03-13 | Based on the collimated light beam detector of two pentaprism |
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| CN201520149260.5U CN204479187U (en) | 2015-03-13 | 2015-03-13 | Based on the collimated light beam detector of two pentaprism |
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| CN204479187U true CN204479187U (en) | 2015-07-15 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107024284A (en) * | 2017-03-29 | 2017-08-08 | 西安工业大学 | The heavy caliber collimation wavefront error detection means and method of a kind of real-Time Compensation |
| CN107843414A (en) * | 2017-10-11 | 2018-03-27 | 长光卫星技术有限公司 | The wave-front detection method and system of heavy caliber system |
| CN114076574A (en) * | 2021-11-12 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Free-form surface measuring system |
-
2015
- 2015-03-13 CN CN201520149260.5U patent/CN204479187U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107024284A (en) * | 2017-03-29 | 2017-08-08 | 西安工业大学 | The heavy caliber collimation wavefront error detection means and method of a kind of real-Time Compensation |
| CN107843414A (en) * | 2017-10-11 | 2018-03-27 | 长光卫星技术有限公司 | The wave-front detection method and system of heavy caliber system |
| CN107843414B (en) * | 2017-10-11 | 2019-10-18 | 长光卫星技术有限公司 | The wave-front detection method and system of heavy caliber system |
| CN114076574A (en) * | 2021-11-12 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Free-form surface measuring system |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20160313 |