CN209477512U - A kind of laser-processing system optical path calibrating device - Google Patents
A kind of laser-processing system optical path calibrating device Download PDFInfo
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- CN209477512U CN209477512U CN201920110686.8U CN201920110686U CN209477512U CN 209477512 U CN209477512 U CN 209477512U CN 201920110686 U CN201920110686 U CN 201920110686U CN 209477512 U CN209477512 U CN 209477512U
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Abstract
The utility model relates to field of laser processing, and in particular to a kind of laser-processing system optical path calibrating device, comprising: processing laser light source, processing light path system, laser processing pedestal and laser processing fixture further include calibration laser light source and calibration light path system.It processes laser light source and issues processing laser, it processes light path system and establishes processing optical path between processing laser light source and laser processing pedestal, laser machine pedestal and the fixed workpieces processing of laser processing fixture, it calibrates laser light source and issues laser of the wavelength in visible light, calibration light path system establishes calibration optical path between calibration laser light source and laser processing pedestal.The utility model passes through setting calibration light path system, and each component is used cooperatively in device, the processing light path system for establishing laser-processing system of auxiliary system commissioning staff's fast accurate reduces the difficulty of laser-processing system calibration, improves laser-processing system calibration efficiency and machining accuracy.
Description
[technical field]
The utility model relates to field of laser processing, more particularly to a kind of laser-processing system optical path calibrating device.
[background technique]
With the development of laser processing technology, the more complicated multiplicity of laser-processing system light path design, laser-processing system
Middle optical path required precision is higher.In laser-processing system, due to the inevitable hardware position occurred in equipment installation and operation
Change or offset are set, causes processing light path system error even mistake occur, can not even be processed so as to cause mismachining tolerance.
In order to solve optical path offset and error problem, currently used light path calibration mode is included using laser light source
Indicate light, by consumptive materials such as the supplementary instruments such as power meter or light-sensitive papers, optical path is calibrated paragraph by paragraph by hand.This method is to calibration people
Member's technical level is more demanding, and process is tedious, takes a long time, optical path precision be also limited by eye recognition and manual operations and
It can not further increase.
In consideration of it, how to overcome defect present in the prior art, simplify calibration procedure, improve calibration efficiency and precision,
It is the art urgent problem to be solved.
[utility model content]
Aiming at the above defects or improvement requirements of the prior art, the utility model solves laser-processing system light path calibration
Difficulty is high, process is tedious, takes a long time, the problem that risk is big.
The utility model embodiment adopts the following technical scheme that
The utility model provides a kind of laser-processing system optical path calibrating device, comprising: processing laser light source, processing optical path
System, laser processing pedestal and laser processing fixture, the processing laser light source issue processing laser, process light path system by one
Group light propagation medium composition establishes processing optical path between processing laser light source and laser processing pedestal, processing optical path emergent light
Focal plane is parallel with laser processing base upper surface, and laser processing base upper surface is parallel to the horizontal plane, and laser processing fixture will
Workpieces processing is fixed between processing light path system emergent light and laser processing base upper surface, which is characterized in that further includes school
Quasi- laser light source and calibration light path system, specific: the calibration laser light source issues calibration laser, the calibration optical maser wavelength
In visible light；The calibration light path system is made of one group of light propagation medium, in calibration laser light source and laser processing
Calibration optical path is established between pedestal, the focal plane for calibrating optical path emergent light is parallel with the processing focal plane of optical path emergent light.
It preferably, include cylindrical lens L1 in the processing light path system, it is specific: to process and swash in the processing light path system
For light through the cylindrical lens L1, emergent light is irradiated to the laser processing fixture perpendicular to the laser processing base upper surface
On fixed workpieces processing.
It preferably, further include diaphragm A3 and diaphragm A4 in the processing light path system, it is specific: the diaphragm A3 and diaphragm
Optical path between A4 is parallel to processing light path system emergent light focal plane, and processing laser passes through diaphragm in the processing light path system
After A3 and diaphragm A4, it is irradiated on the cylindrical lens L1.
Preferably, specific: described including diaphragm A1, diaphragm A2 and prismatic lens group B1 in the calibration light path system
The diaphragm A1 and diaphragm A2 is located at the two sides prismatic lens group B1, and optical path is parallel to processing light between diaphragm A1 and diaphragm A2
Road emergent light focal plane；The calibration light path system alignment laser passes through the prismatic lens group B1 after the diaphragm A1,
For refraction light after the prismatic lens group B1 perpendicular to the laser processing base upper surface, transmitted light passes through the diaphragm
The center A2, reflected light pass through the center the diaphragm A1.
It preferably, further include CCD-C1, the CCD-C1 is located on laser processing pedestal, the calibration light path system outgoing
Light is directly or indirectly radiated on the sensor devices of CCD-C1.
It preferably, further include one or more attenuators, one or more of attenuators are located in calibration light path system.
It preferably, further include CCD-C2, the CCD-C2 is located on laser processing pedestal, the processing light path system outgoing
Light is directly or indirectly radiated on the sensor devices of CCD-C2.
It preferably, further include one or more attenuators, one or more of attenuators are located in processing light path system.
It preferably, further include linear motor, the diaphragm A4 and prismatic lens group B1 are fixed on linear motor, described straight
The motion mode of line motor is horizontal rectilinear motion.
Preferably, one or more of reflecting mirrors are located in the processing light path system or calibration light path system.
Compared with prior art, the beneficial effect of the utility model embodiment is: laser provided by the utility model adds
Work system light path calibrating installation, by the calibration light path system of addition auxiliary, using visible light optical path to sightless processing light
Road system is calibrated.By the laser-processing system optical path calibrating device, can it is convenient, fast and accurately to processing optical path
System is calibrated, and the installation effectiveness of laser-processing system is improved, and improves the machining accuracy of laser-processing system, is reduced because artificial
The waste of time caused by calibration and precision are inadequate.
The utility model provides a kind of laser-processing system optical path calibrating device, and its object is to pass through setting calibration light
Each component is used cooperatively in road system and device, and the processing light path system for establishing laser-processing system of fast accurate mentions
High laser-processing system working efficiency and machining accuracy.
[Detailed description of the invention]
It, below will be in the utility model embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Required attached drawing is briefly described.It should be evident that drawings described below is only the one of the utility model
A little embodiments for those of ordinary skill in the art without creative efforts, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 2 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 3 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 4 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 5 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 6 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model；
Fig. 7 is another laser-processing system optical path calibrating device structural schematic diagram provided by the embodiment of the utility model.
[specific embodiment]
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to explain this
Utility model is not used to limit the utility model.
The utility model is a kind of architecture of specific function system, therefore mainly illustrates each knot in a particular embodiment
The function logic relationship of structure mould group, does not limit particular hardware embodiment.
As long as in addition, technical characteristic involved in the various embodiments of the present invention described below each other it
Between do not constitute conflict and can be combined with each other.Below just with reference to drawings and examples in conjunction with being described in detail the utility model.
Embodiment 1:
With the development of laser processing technology, the more complicated multiplicity of laser-processing system light path design, laser-processing system
Middle optical path required precision is higher, and existing light path calibration mode is more demanding to calibration personnel technical level, and process is numerous
It is trivial, take a long time, optical path precision it is limited.In order to solve foregoing problems, the utility model proposes a kind of laser-processing system optical paths
Calibrating installation, the device are used cooperatively by each component in setting calibration light path system and device, and it is difficult to reduce light path calibration
Degree simplifies light path calibration step, reduces the light path calibration time, improves laser processing precision.
Illustrate the structure of the present embodiment laser-processing system optical path calibrating device, laser-processing system light below with reference to Fig. 1
Road calibrating installation structure is as follows:
Laser-processing system optical path calibrating device provided in this embodiment includes: processing laser light source 1, processing light path system
2, pedestal 3, laser processing fixture 4, calibration laser light source 5 and calibration light path system 6 are laser machined.
Process laser light source 1, processing light path system 2, laser processing pedestal 3 and the laser processing composition laser processing of fixture 4
System.Workpieces processing is fixed on laser processing 3 upper surface of pedestal by laser processing fixture 4, and processing laser light source 1 issues processing and swashs
Light, the processed light path system 2 of processing laser form processing optical path, process focal plane and the laser processing of 2 emergent light of light path system
3 upper surface of pedestal is parallel, i.e., processing 2 emergent light of light path system is vertical with laser processing 3 upper surface of pedestal, processes optical path emergent light
It is irradiated to workpieces processing surface and completes processing.
It calibrates laser light source 5 and calibration light path system 6 forms light path calibration system.It calibrates laser light source 5 and issues to calibrate and swash
Light, the calibrated light path system 6 of calibration laser form calibration optical path, calibrate emergent light focal plane and the laser processing of light path system 6
The upper surface of pedestal 3 is parallel, i.e. the emergent light of calibration light path system 6 is vertical with laser processing 3 upper surface of pedestal, and calibration optical path goes out
It penetrates illumination and is mapped to workpieces processing surface or laser processing 3 upper surface of pedestal.It is visible for calibrating the calibration laser that laser light source 5 issues
Light, therefore it is all visible to calibrate laser optical path.
After laser processing and calibration system hardware are installed, the emergent light of optical path and the emergent light of processing optical path are calibrated
In parallel, and the relative position of two optical paths is always maintained at fixation in the case where light path system hardware deviation does not occur.
When laser-processing system is not processed, processing laser light source issues included visible instruction light, makes to process light
Road is visible.At this point, adjusting processing optical path as reference system using calibration optical path, the calibration to processing optical path is completed.Due to two
All as it can be seen that the calibration for therefore processing optical path is more efficient and convenient, technical difficulty is lower for optical path.
When laser-processing system is processed, the laser that processing laser light source is issued is black light.At this point, can supervise
Survey processing 2 emergent light of light path system and calibrate 6 emergent light of light path system relative position, if processing 2 emergent light of light path system with
It calibrates 6 emergent light relative position of light path system to change, then it represents that offset occurs in a certain component in processing light path system 2.According to
The facula position offset that processing optical path emergent light is irradiated relative to calibration optical path emergent light, can conveniently accurately judgement processing
Optical path departure, faster to the positioning parts of offset accurate, calibration is also more convenient accurate.
In practical application scene, calibration light path system 6 can also be calibrated according to the characteristic of workpiece.Such as processing
Part be optical fiber when, laser processing fixture 4 on place remove coat optical fiber, if calibration 6 emergent light of light path system beat optical fiber just
It is middle to generate apparent interference fringe, then illustrate to calibrate that laser optical path 6 is accurate, the emergent light using calibration laser optical path 6 is to adding
The emergent light of work laser optical path 2 is calibrated.Narrow meshed barn door can also be placed between calibration laser optical path 6 and optical fiber, if
The light returned by fiber reflection then illustrates to calibrate laser optical path 6 accurately again by the aperture on barn door.In calibration laser optical path
6 accurately under the premise of, if calibration laser optical path 6 emergent light beat laser processing fixture 4 fixed optical fiber center generation it is bright
Aobvious interference fringe illustrates that fiber position is accurate, if not occurring interference fringe, illustrates fiber position inaccuracy, needs to adjust
Fiber position or laser processing fixture 4 are arranged.This method, which can be convenient, accurately judges that the workpieces processing position processed is
It is no accurate, processing mistake and error caused by workpieces processing position deviation are prevented, laser processing precision is improved.
In practical application scene, for different converted products, technique requirement, system mechanics structure etc., laser is processed
Light source 1, processing light path system 2, laser processing pedestal 3, laser processing fixture 4, calibration laser light source 5 and calibration light path system 6
It can be realized using different particular hardware equipment.In embodiments of the present invention, it is as follows that several typical cases are simply enumerated:
Process laser light source 1 can according to processing technology select ultraviolet laser, infrared laser, CO2 laser, picosecond swash
Light device etc..Calibration laser light source 5 selects the laser that can issue visible light, such as HE-NE laser, semiconductor laser.
Other optical devices, such as converted products can be set according to converted products and the difference of technique in processing light path system 2
When for fiber grating, grating mask plate is set between processing light path system 2 and workpieces processing, processes the emergent light of light path system 2
Optical fiber is processed through grating mask plate.
The workpieces processing fixed on laser processing fixture 4 can be solid in laser processing 3 upper surface of pedestal according to process requirement
It is fixed motionless, or moved at a predetermined velocity according to desired trajectory, such as moved along a straight line along a direction with constant speed.
Embodiment 2:
In laser-processing system, due to installing Machine Design and equipment, processing laser light source and laser processing
Optical path between pedestal is not generally possible to as straight line, but a complicated broken line by multiple optical devices, needs to it
In carries out complicated fine calibration one by one per the optical path between adjacent two optical device, just can ensure that processing light path system 2 out
Penetrate the upper surface that light focus plane is parallel to laser processing pedestal 3.Calibration procedure is complicated, takes a long time.
In actual use scene, particular optical device can be increased in the latter end of processing light path system 2 according to actual needs
Part, utilizes the optical characteristics of particular optical device, it is ensured that only needs adjustment member light path system i.e. and can guarantee processing light path system 2
Upper surface of the emergent light perpendicular to laser processing pedestal 3, the direction of assisted calibration personnel adjustment processing 2 emergent light of light path system,
Keep light path calibration more convenient accurate.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 2: column is arranged in the latter end of processing light path system
Lens L1 processes the processing laser in light path system 2, after column prism L1 refraction, irradiates the upper table to laser processing pedestal 3
Face.As long as at this point, ensuring by the emergent light of column prism L1 perpendicular to the upper surface for laser machining pedestal 3.If emergent light
Out of plumb then only needs the position of adjustable column prism L1 or angle emergent light can be adjusted to vertical.
In actual use scene, calibration personnel can be according to the suitable mode of the selections such as device structure, requirement on machining accuracy
Judge the emergent light of column prism L1 whether perpendicular to the upper surface for laser machining pedestal 3.It is simply enumerated in the embodiment of the present invention several
The vertical judgment mode of kind emergent light:
(1) in certain specific embodiments of the utility model, if processing laser light source issues included visible instruction
Light.Narrow meshed barn door is set between column prism L1 and the upper surface of laser processing pedestal 3, and narrow meshed barn door keeps water
It is flat, aperture face column prism L1 light-emitting window and suitable distance is kept with light-emitting window.It is set in laser processing 3 upper surface of pedestal sharp
The parallel reflecting mirror in 3 upper surface of light processing base, if visible instruction light can accurately pass through the aperture on barn door, and through reflecting
The reflected light of mirror can accurately pass through the aperture on barn door again, then illustrate the emergent light of column prism L1 perpendicular to laser processing
3 upper surface of pedestal.
(2) in the certain specific embodiments of the present invention, if processing laser light source issues sightless processing laser.In column
Heat-sensitive paper is set between prism L1 and laser processing 3 upper surface of pedestal, and heat-sensitive paper keeps horizontal.Temperature-sensitive is moved along vertical track
Paper illustrates the emergent light of column prism L1 perpendicular to sharp if the trace position that processing laser leaves on heat-sensitive paper remains unchanged
3 upper surface of light processing base.Further, narrow meshed barn door can also be set between column prism L1 and heat-sensitive paper, made
It is irradiated on light-sensitive paper again after the aperture that the emergent light of column prism L1 passes through barn door, further increases calibration accuracy.
In the present embodiment, position and angle by adjusting column prism L1 can guarantee the emergent light of processing light path system
Perpendicular to the upper surface of laser processing pedestal 3, calibration process is simple and fast, and can guarantee certain required precision.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 3: diaphragm A3 is arranged in processing light path system 2
With diaphragm A4, the processing laser in light path system 2 is processed after diaphragm A3 and diaphragm A4, is irradiated on column prism L1.Diaphragm A3
Optical path between diaphragm A4 is parallel to processing 2 emergent light focal plane of light path system, that is, is parallel to the upper table of laser processing pedestal 3
Face.According to the optical characteristics of column prism, as long as being emitted angle for 90 degree of column prism, as long as can after selecting incident light and reflecting
It can guarantee that incident optical path after diaphragm A3 and diaphragm A4 is parallel to the upper surface of laser processing pedestal 3, that is, can guarantee through column
Upper surface of the emergent light of prism L1 perpendicular to laser processing pedestal 3.
In actual use scene, calibration personnel can be according to the suitable mode of the selections such as device structure, requirement on machining accuracy
Judge whether the optical path between diaphragm A3 and diaphragm A4 is parallel to the upper surface of laser processing pedestal 3.It is simple in the embodiment of the present invention
Enumerate the parallel judgment mode of several optical paths:
(1) if processing laser light source issues included visible instruction light.The position fixed aperture A3, moves horizontally diaphragm A4,
If illustrating between diaphragm A3 and diaphragm A4 it can be seen that instruction light is constant across the facula position that diaphragm A3 is irradiated on diaphragm A4
Optical path is horizontal, i.e. optical path between diaphragm A3 and diaphragm A4 is parallel with the laser processing upper surface of pedestal 3.If it can be seen that instruction light is worn
It crosses the hot spot that diaphragm A3 is irradiated on diaphragm A4 to be not fixed, then adjusts the angle of diaphragm A3 incident light, optical path is made to reach requirement.
(2) if processing laser light source issues sightless processing laser.Light-sensitive paper can be enclosed on the surface diaphragm A4, utilize light
Trace position on quick paper judges whether optical path reaches requirement.
The above calibrating mode by setting diaphragm A3 and diaphragm A4, for quickly determine and check process optical path provide according to
According to having locked the optical path between diaphragm A3 and diaphragm A4 using the optical characteristics of diaphragm, and further limit with zygostyle prism L1
The emergent light angle of processing light path system, increases the stability of optical path, improves optical path precision.In light path calibration, only
The incident light angle that diaphragm A3 need to be calibrated reduces the difficulty of light path calibration, reduces the time of light path calibration needs, improves
Light path calibration efficiency.
Embodiment 3:
In laser processing and calibration system, due to installing Machine Design and equipment, the hard of light path system is calibrated
Part position also will appear offset, so that the emergent light angle for calibrating light path system and position is changed, leads to not correctly judge
Light path system precision is processed, processing light path system can not be calibrated.In order to solve foregoing problems, one is present embodiments provided
The calibrating installation of kind of calibration light path system, can with it is convenient it is accurate judge whether calibration light path system deviation occurs, and occurring
Convenient calibration light path system can be accurately re-established when deviation.
In actual use scene, particular optical device can be increased in the latter end of calibration light path system 6 according to actual needs
Part provides convenient and fast judgment method using the optical characteristics of particular optical device for calibration optical path precision, and ensure only to need to adjust
Part light path system is that can guarantee the emergent light of calibration light path system 6 perpendicular to the upper surface for laser machining pedestal 3, assisted calibration
Personnel adjust the direction of calibration 6 emergent light of optical path, make to calibrate optical path foundation and adjustment is more convenient accurate.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 4: prism is arranged in calibration light path system latter end
Lens group B1, prismatic lens group B1 have the function transmitted, reflected to incident light, reflected, wherein transmitted light and incident light
Direction is identical on the same line, and reflected light is contrary on the same line with incident light, refraction light and incident light, transmission
Light, reflected light are all vertical.Diaphragm A1 and diaphragm A 2 is set in prismatic lens group B1 opposite two sides, is calibrated in light path system
Calibration laser is irradiated on prismatic lens group B1 after diaphragm A1, and diaphragm A2 and the center diaphragm A1 are located at same level with always
On line.According to the optical characteristics of prismatic lens group B1, as long as guaranteeing that the optical path between diaphragm A1 and diaphragm A2 is parallel to laser processing
The upper surface of pedestal 3 can ensure that and pass through prismatic lens group B1 and irradiate vertical to the emergent light for laser machining 3 upper surface of pedestal
In laser processing 3 upper surface of pedestal.
In actual use scene, calibration personnel can be according to the suitable mode of the selections such as device structure, requirement on machining accuracy
Judge whether the emergent light between diaphragm A1 and diaphragm A2 is parallel to the upper surface of laser processing pedestal 3.In the embodiment of the present invention
Simply enumerate the parallel judgment mode of several optical paths:
Since the transmitted light and reflected light of prismatic lens group B1 are located along the same line, in diaphragm A1 and diaphragm A2
In the case that angle setting degree is fixed, as long as judging that the transmission hot spot of prismatic lens group B1 is located at the center diaphragm A2, prismatic lens group B1
Flare be located at the center of diaphragm A1, then diaphragm A1 and the center diaphragm A2 will necessarily be on the same line.
(1) in the certain specific embodiments of the present invention, diaphragm A1 or diaphragm A2 or prismatic lens group B1 are moved horizontally, if
Facula position on diaphragm A1 and diaphragm A2 is constant, then illustrates that the optical path between diaphragm A1 and diaphragm A2 is horizontal.
(2) in the certain specific embodiments of the present invention, it is arranged between diaphragm A1 and prismatic lens group B1 narrow meshed
Barn door, the aperture that the reflected light of prismatic lens group B1 passes through barn door are radiated at the center diaphragm A1, move horizontally barn door, if
Facula position is constant on diaphragm A1, illustrates that the optical path between A1 and prismatic lens group B1 is horizontal, i.e. between diaphragm A1 and diaphragm A2
Optical path is horizontal.Narrow meshed barn door can also be placed between diaphragm A2 and prismatic lens group B1, by determining diaphragm
Optical path between A2 and prismatic lens group is horizontal, to confirm that diaphragm A1 and your optical path of diaphragm A2 bracket are horizontal.
The present embodiment is by setting diaphragm A1, diaphragm A2 and prismatic lens group B1, quickly to determine and checking calibration optical path
Foundation is provided, has locked the optical path between diaphragm A1 and diaphragm A2 using the optical characteristics of diaphragm and prismatic lens group, and match
It closes prismatic lens group B1 and defines the emergent light angle of calibration light path system, increase the stability of optical path, improve optical path essence
Degree.In light path calibration, it is only necessary to calibrate the optical path between diaphragm A1, diaphragm A2 and prismatic lens group B1, reduce light path calibration
Difficulty, reduce light path calibration needs time, improve light path calibration efficiency.
Embodiment 4:
In laser processing and calibration system, it is necessary to the outgoing of emergent light and calibration light path system to processing light path system
Optical position is confirmed that if not only precision is low, time-consuming using visually being confirmed, but also there are certain risk.In order to
Foregoing problems are solved, the utility model proposes a kind of laser-processing system optical path calibrating device, which passes through setting ccd image
Sensor carries out automatic and accurate positioning to outgoing optical position using CCD software kit, improves the precision and calibration effect of light path calibration
Rate reduces light path calibration difficulty and risk.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 5: CCD- is arranged on laser processing pedestal 3
The sensor devices of C1, CCD-C1 and the emergent light towards calibration light path system 6, can real time inspection school in the software kit of CCD-C1
The emergent light facula position of quasi- light path system 6.If the emergent light hot spot of calibration light path system 6 is held in a predetermined position, illustrate
Calibrate light path system 6 accurately, it at this time can be according to emergent light facula position the going out to processing light path system 2 of calibration light path system 6
Light is penetrated to be calibrated.If the emergent light facula position of calibration light path system 6 is out of position, can be according to the opposite side of deviation
Position and distance are adjusted calibration light path system 6.
In embodiments of the present invention, in certain specific embodiments, if workpiece is optical fiber, laser optical path will can also be calibrated
6 emergent light is radiated at optical fiber, identifies the emergent light of calibration laser optical path 6 after optical fiber diffraction using CCD-C1 software kit
Whether the diffraction fringe of formation, automatic identification workpiece position are accurate.The method increase the accuracy of workpiece position identification
And speed, improve the processing efficiency and machining accuracy of system of processing.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 5: CCD- is arranged on laser processing pedestal 3
The sensor devices of C2, CCD-C2 and the emergent light towards processing light path system 2, in the software kit of CCD-C2 can real time inspection add
The emergent light facula position of work light path system 2, and carried out with the 6 emergent light facula position of calibration light path system obtained in CCD-C1
Compare.If the emergent light hot spot and the emergent light hot spot relative position of calibration light path system 6 of processing light path system 2 remain unchanged,
Then illustrate to process light path system 2 accurately, i.e., the Working position on workpiece is accurate.If processing the emergent light hot spot of light path system 2
Position and the emergent light hot spot relative position of calibration light path system 6 change, then can be according to the position and distance of change to processing light
Road system 2 is adjusted.
The present embodiment is reduced by setting ccd image sensor, the position of automatic identification light path system emergent light and variation
The difficulty of manual identified, reduces light path system prover time, improves light path system calibration accuracy, and can be according to light
The direction of spot positional shift and distance carry out more rapidly accurately positioning and adjustment to the optical device that needs are calibrated, and improve light
Road calibration efficiency.
In practical application scene, the optical maser wavelength that CCD-C2 can be issued according to processing laser light source 1, selection is subjected to
The type of black light intuitively shows black light in CCD software kit, it such as uses and is selected when ultraviolet laser
Industrial ultraviolet CCD.The precision that sightless processing laser optical path can be monitored while processing, improves the essence of laser processing
Degree.
Attenuator can be increased in processing light path system 2 and/or calibration light path system 6 in practical application scene, reduced
The energy of laser light incident CCD, preventing light ray energy image exposure excessively causes facula position to identify incorrect or even light ray energy
Too strong damage CCD.Influence of the attenuator to processing technology in order to prevent said that attenuator should be placed in processing in light path system 2
After the processed workpiece of laser into the optical path between CCD-C2.
Embodiment 5:
In laser processing and calibration system, therefore, to assure that certain section or a few sections of optical path levels, if using manual mode school
Standard, not only complex procedures, but also take a long time, precision is relatively low.In order to solve foregoing problems, the utility model proposes one kind to swash
The linear motor of horizontal movement is arranged by the specific position in optical path, is utilized for light system of processing optical path calibrating device, the device
The mechanical property of linear motor makes certain optical devices carry out horizontal movement, improves the precision and calibration efficiency of light path calibration, drops
Low light path calibration difficulty and risk.
In embodiments of the present invention, in certain specific embodiments, such as Fig. 6: diaphragm A4 and prismatic lens group B1 are fixed
On motor, diaphragm A4 and prismatic lens group B1 is enable to carry out horizontal reciprocating movement with linear motor.When linear motor moves
When, if the emergent light hot spot through diaphragm A3 is always held at the center diaphragm A4, illustrate the optical path between diaphragm A3 and diaphragm A4
It is horizontal.If transmitted light hot spot of the emergent light through diaphragm A1 again through prismatic lens group B1 is always held at the center diaphragm A2, say
Optical path between Mingguang City door screen A1 and diaphragm A2 is horizontal.
In the present embodiment, by the mechanical property for the linear motor being horizontally mounted, it is ensured that optical device when light path calibration
Motion profile keep horizontal, the troublesome operation and error generated when avoiding the mobile optical device of manual levelling reduces school
Quasi- difficulty, improves calibration efficiency and precision.
In embodiments of the present invention, in certain specific embodiments, diaphragm, screen, band can also be increased on linear motor
The optical devices such as the barn door of aperture carry out more accurate calibration to relevant light paths.
Embodiment 6:
In laser processing and calibration system, due to plant machinery structure and processing technology, 1 He of laser light source is processed
The laser that calibration laser light source 5 is issued can not generally be irradiated to laser processing 3 upper surface of pedestal along straight line, and need
It processes light path system 2 and calibrates and form the optical path that complicated broken line is constituted in light path system 6.In the practical application of the utility model
In, actually available optical path system can be set up by the way that multiple reflecting mirrors are arranged in processing light path system 2 and calibration light path system 6
System.
In embodiments of the present invention, in certain specific embodiments, it can refer to the light channel structure such as Fig. 7:
Process laser light source 1 is specially 266nm ultraviolet laser in the present embodiment, what 266nm ultraviolet laser issued
Processing laser becomes the horizontal optical path by diaphragm A3 and the center diaphragm A4 after reflecting mirror M3, reflecting mirror M4 are reflected twice,
It is refracted into column prism L1 using reflecting mirror M5, by column prism L1 vertical irradiation in laser processing 3 upper surface of pedestal.
Calibrate laser light source 5 in the present embodiment be specially He-Ne laser, He-Ne laser issue calibration laser,
After reflecting mirror M1, reflecting mirror M2 are reflected twice, become the horizontal optical path by diaphragm A1 and the center diaphragm A2, and enter prism
Lens group B1, using prismatic lens group B1 refraction vertical irradiation in laser processing 3 upper surface of pedestal.
In the present embodiment, by the way that multiple reflecting mirrors are arranged in light path system, set up and add according to system of processing actual demand
Work light path system 2 and calibration light path system 6, enable a system to complete processing and calibration.And can by adjusting mirror angle and
Position easily adjusts processing laser and calibrates the direction of laser, simple and quick to calibrate to light path system.
In embodiments of the present invention, in certain specific embodiments, in processing light path system 2 and in calibration light path system 6
Reflecting mirror, also can be used that optical fiber, column prism, lens etc. are other to be made to process laser and calibrate the optics that pass through of laser orientation
Device.
Claims (10)
1. a kind of laser-processing system optical path calibrating device, comprising: processing laser light source, processing light path system, laser processing bottom
Seat and laser processing fixture, the processing laser light source issue processing laser, process light path system by one group of light propagation medium group
At foundation processing optical path, the focal plane of processing optical path emergent light add with laser between processing laser light source and laser processing pedestal
Work base upper surface is parallel, and laser processing base upper surface is parallel to the horizontal plane, and workpieces processing is fixed on by laser processing fixture
It processes between light path system emergent light and laser processing base upper surface, which is characterized in that further include calibration laser light source and school
Quasi- light path system, specific:
The calibration laser light source issues calibration laser, and the calibration optical maser wavelength is in visible light；
The calibration light path system is made of one group of light propagation medium, establishes school between calibration laser light source and laser processing pedestal
Quasi-optical road, the focal plane for calibrating optical path emergent light are parallel with the processing focal plane of optical path emergent light.
2. laser-processing system optical path calibrating device according to claim 1, which is characterized in that in the processing light path system
It is specific including cylindrical lens L1:
Laser is processed in the processing light path system through the cylindrical lens L1, emergent light is perpendicular to table on the laser processing pedestal
Face, and be irradiated on the fixed workpieces processing of the laser processing fixture.
3. laser-processing system optical path calibrating device according to claim 2, which is characterized in that in the processing light path system
It further include diaphragm A3 and diaphragm A4, specific:
Optical path between the diaphragm A3 and diaphragm A4 is parallel to processing light path system emergent light focal plane, the processing optical path system
Laser is processed in system after diaphragm A3 and diaphragm A4, is irradiated on the cylindrical lens L1.
4. laser-processing system optical path calibrating device according to claim 1, which is characterized in that in the calibration light path system
It is specific including diaphragm A1, diaphragm A2 and prismatic lens group B1:
The diaphragm A1 and diaphragm A2 is located at the two sides prismatic lens group B1, and optical path is parallel between diaphragm A1 and diaphragm A2
In processing optical path emergent light focal plane；
The calibration light path system alignment laser passes through the prismatic lens group B1 after the diaphragm A1, passes through the prism
For refraction light after lens group B1 perpendicular to the laser processing base upper surface, transmitted light passes through the center the diaphragm A2, reflection
Light passes through the center the diaphragm A1.
5. laser-processing system optical path calibrating device according to claim 1, which is characterized in that further include CCD-C1, specifically
:
The CCD-C1 is located on laser processing pedestal, and the calibration light path system emergent light is directly or indirectly radiated at CCD-C1
Sensor devices on.
6. laser-processing system optical path calibrating device according to claim 5, which is characterized in that also wrapped in calibration light path system
Include one or more attenuators.
7. according to the laser-processing system optical path calibrating device of claim 5 or 6, which is characterized in that it further include CCD-C2, tool
Body:
The CCD-C2 is located on laser processing pedestal, and the processing light path system emergent light is directly or indirectly radiated at CCD-C2
Sensor devices on.
8. laser-processing system optical path calibrating device according to claim 7, which is characterized in that also wrapped in processing light path system
Include one or more attenuators.
9. according to the laser-processing system optical path calibrating device of claim 3 or 4, which is characterized in that it further include linear motor,
It is specific:
The diaphragm A4 and prismatic lens group B1 are fixed on linear motor, and the motion mode of the linear motor is horizontal linear
Movement.
10. laser-processing system optical path calibrating device according to claim 1, which is characterized in that further include one or more
Reflecting mirror, specific:
One or more of reflecting mirrors are located in the processing light path system or calibration light path system.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110842350A (en) * | 2019-10-25 | 2020-02-28 | 惠州市多杰实业有限公司 | Processing method of high-precision laser copper component |
| CN114815281A (en) * | 2022-04-12 | 2022-07-29 | 哈尔滨工程大学 | High-precision schlieren system light path adjusting device and using method thereof |
| CN114894084A (en) * | 2022-02-16 | 2022-08-12 | 深圳市深视智能科技有限公司 | Laser transmitter calibration system and calibration method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110842350A (en) * | 2019-10-25 | 2020-02-28 | 惠州市多杰实业有限公司 | Processing method of high-precision laser copper component |
| CN110842350B (en) * | 2019-10-25 | 2021-10-29 | 惠州市多杰实业有限公司 | Processing method of high-precision laser copper component |
| CN114894084A (en) * | 2022-02-16 | 2022-08-12 | 深圳市深视智能科技有限公司 | Laser transmitter calibration system and calibration method |
| CN114815281A (en) * | 2022-04-12 | 2022-07-29 | 哈尔滨工程大学 | High-precision schlieren system light path adjusting device and using method thereof |
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