CN107843414B - The wave-front detection method and system of heavy caliber system - Google Patents
The wave-front detection method and system of heavy caliber system Download PDFInfo
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- CN107843414B CN107843414B CN201710940224.4A CN201710940224A CN107843414B CN 107843414 B CN107843414 B CN 107843414B CN 201710940224 A CN201710940224 A CN 201710940224A CN 107843414 B CN107843414 B CN 107843414B
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Abstract
The present invention relates to the wave-front detection methods and system of a kind of heavy caliber system, belong to technical field of optical detection, Wave-front measurement and the wavefront real-time detection for examining such as large-scale parallel light tube of equipment relevant to heavy caliber photo electric imaging system suitable for heavy caliber photo electric imaging system, this method and system use multiple pentaprisms, the mode that plane mirror is combined with straight guide, it can be to the characteristic for carrying out 90 ° of steerings with the direction of the light of any angle incidence using pentaprism, half-reflection and half-transmission plane mirror will be back to along original optical path by the transmitting light of the target surface of heavy caliber system, angle position measurement and processing unit are reflexed to by half-reflection and half-transmission plane mirror again, reconstruct to heavy caliber system wavefront is realized by angle position measurement and processing unit and obtains wavefront information, it to the unified of heavy caliber system while can sample, it reduces Influence of the environment to sampling precision, the high-precision for realizing heavy caliber system optics wavefront quickly detect.
Description
Technical field
The present invention relates to technical field of optical detection, a kind of wave-front detection method more particularly to heavy caliber system and are
System.
Background technique
Heavy caliber photo electric imaging system is mainly used for the remote observation apart from object and high-resolution imaging, received
The light wave issued from object is plane wave i.e. plane wave front, therefore during developing heavy caliber photo electric imaging system, right
System carries out integrated debugging and image quality evaluation period needs to establish the test equipment and benchmark for being directed to plane wave front.
Currently, the assessment of optical wavefront is still for bore is in 2 meters or more of heavy caliber photo electric imaging system
It is the technical problem in field, since the difficulty of manufacture large plano-optics mirror (face shape error is less than 10nmrms) is very big, because
This, those skilled in the art generally detect heavy caliber Opto-electrical Section using splicing test method and optical tilt scan testing methods
The optical wavefront of system, but both methods all has that detection efficiency is lower and higher cost.
Meanwhile in the received plane wave of simulation heavy caliber photo electric imaging system, a kind of general equipment is big both at home and abroad
Type (heavy caliber, long-focus) parallel light tube simulates distant object state by the collimated light beam that large-scale parallel light tube issues, by
Photo electric imaging system receives the parallel light wave that parallel light tube is launched, and observation is at image quality in the imaging focal plane of photo electric imaging system
Amount, to realize the image quality evaluation etc. of heavy caliber photo electric imaging system.Since large-scale parallel light tube is remote sensing optics, deep space exploration
Etc. the crucial test equipment and benchmark in high-accuracy heavy caliber photo electric imaging system development process, thus to its state calibration and
Wavefront real-time detection in use process is very necessary.
Summary of the invention
Based on this, it is necessary to for existing heavy caliber photo electric imaging system wave-front detection method there are low efficiency, at
This high problem, and lack asking for the effective means being measured in real time to the wavefront of large-scale parallel light tube in the prior art
Topic, provides the wave-front detection method and system of a kind of heavy caliber system.
To solve the above problems, the invention adopts the following technical scheme:
A kind of wave-front detection method of heavy caliber system, including following procedure:
At the focal plane of heavy caliber system place target surface, the transmitting light of the target surface successively pass through half-reflection and half-transmission plane mirror and
The heavy caliber system exit is to reflection unit；
Before the outgoing bore of the heavy caliber system is arranged in the reflection unit, and the reflection unit where plane with
The optical axis of the heavy caliber system is vertical, the reflection unit include at least three can relative rotation and overlap directly lead
Rail, and each straight guide mutually disperses, on each straight guide at least provided with two for the transmitting light into
The pentaprism being interspersed that row is turned back, each straight guide are provided with one in the end of the outgoing light direction of the pentaprism
Plane mirror, the emergent light of the pentaprism are back to after the reflection of the corresponding plane mirror along original optical path described
Half-reflection and half-transmission plane mirror；The mode that is interspersed of the pentaprism on each straight guide is identical, the side of being interspersed
Formula is that distance of the pentaprism on the length direction of the straight guide described in adjacent any two is equal, adjacent any two
Distance of a pentaprism in the width direction of the straight guide is equal, and pentaprism described in any two is described straight
It is interspersed on the length direction of guide rail and in the width direction of the straight guide；
The emergent light of the pentaprism returned along original optical path is reflexed to angle position and surveyed by the half-reflection and half-transmission plane mirror
Amount and processing unit；
The angle position measurement and processing unit obtain the target surface that each pentaprism is formed and return to picture, to each institute
The target surface for stating the whole pentaprism on straight guide is returned as carrying out data processing, obtains corresponding centroid position letter
Breath, and wavefront reconstruction is carried out according to the centroid position information, obtain the wavefront information of the heavy caliber system.
Correspondingly, the present invention also proposes a kind of Wave-front measurement system of heavy caliber system, including target surface, half-reflection and half-transmission plane
Mirror, reflection unit and angle position measurement and processing unit, the reflection unit include at least three can relative rotation and mutually
The straight guide of coincidence, and each straight guide mutually disperses, at least provided with two for institute on each straight guide
The pentaprism being interspersed that the transmitting light of target surface is turned back is stated, each straight guide is in the emergent light side of the pentaprism
To end be provided with a plane mirror, the mode that is interspersed of the pentaprism on each straight guide is identical, institute
Stating the mode of being interspersed is that distance of the pentaprism on the length direction of the straight guide described in adjacent any two is equal,
Distance of the pentaprism described in adjacent any two in the width direction of the straight guide is equal, and five described in any two
Prism is interspersed on the length direction of the straight guide and in the width direction of the straight guide；
The target surface is placed at the focal plane of heavy caliber system, and the transmitting light of the target surface successively passes through the half-reflection and half-transmission
Plane mirror and the heavy caliber system exit are to the reflection unit；
Before the outgoing bore of the heavy caliber system is arranged in the reflection unit, and the reflection unit where plane with
The optical axis of the heavy caliber system is vertical, and the emergent light of the pentaprism is after the reflection of the corresponding plane mirror along original
Optical path is back to the half-reflection and half-transmission plane mirror；
The emergent light of the pentaprism returned along original optical path is reflexed to the angle position by the half-reflection and half-transmission plane mirror
Set measurement and processing unit；
The angle position measurement and processing unit obtain the target surface that each pentaprism is formed and return to picture, to each institute
The target surface for stating the whole pentaprism on straight guide is returned as carrying out data processing, obtains corresponding centroid position letter
Breath, and wavefront reconstruction is carried out according to the centroid position information, obtain the wavefront information of the heavy caliber system.
The wave-front detection method and system of above-mentioned heavy caliber system are suitable for the Wave-front measurement of heavy caliber photo electric imaging system
And it is relevant to heavy caliber photo electric imaging system examine equipment such as large size parallel light tube wavefront real-time detection, this method and
System using multiple pentaprisms, plane mirror in such a way that straight guide combines, can be to any angle using pentaprism
The direction of incident light carries out the characteristic of 90 ° of steerings, will be returned by the transmitting light of the target surface of heavy caliber system along original optical path
Angle position measurement and processing unit are reflexed to half-reflection and half-transmission plane mirror, then by half-reflection and half-transmission plane mirror, is surveyed by angle position
Amount and processing unit realize the reconstruct to heavy caliber system wavefront and obtain wavefront information.Heavy caliber system proposed by the invention
Wave-front detection method and system sampled simultaneously by the multiple spot on heavy caliber system wavefront, can be to the complete of heavy caliber system
Bore is sampled simultaneously, is reduced influence of the environment to sampling precision, is realized the high-precision of heavy caliber system optics wavefront
Quickly detection, provides more quick, practical method and system for the real-time monitoring and calibration of heavy caliber system mode, and
Each straight guide in reflection unit of the present invention can overlap when not detecting wavefront, to make reflection unit to heavy caliber
System blocks minimum, and overall system architecture is simple, at low cost.
Detailed description of the invention
Fig. 1 is the side view of the Wave-front measurement system of heavy caliber system in one embodiment of the invention；
Fig. 2 is the structural schematic diagram of reflection unit；
Fig. 3 is the light path schematic diagram of pentaprism and plane mirror on any one straight guide；
Fig. 4 be provided with spill rectilinear orbit straight guide and the convex sliding block being embedded in spill rectilinear orbit it is transversal
Face schematic diagram；
Fig. 5 is that the cross section of straight guide and convex sliding block of the positioning device when being respectively spring leaf (a) or nut (b) shows
It is intended to；
Fig. 6 is the flow diagram of the wave-front detection method of another embodiment of the present invention Large diameter system.
Specific embodiment
Technical solution of the present invention is described in detail below in conjunction with attached drawing and preferred embodiment.
In one of the embodiments, as shown in Figure 1, the Wave-front measurement system of heavy caliber system include target surface 100, it is half anti-
Semitransparent mirror 200, reflection unit 300 and angle position measurement and processing unit 400, reflection unit 300 include at least three
Can relative rotation and the straight guide 310 that overlaps, and each straight guide 310 mutually disperses, and at least sets on each straight guide 310
It sets there are two for the pentaprism 320 being interspersed turned back to the transmitting light of target surface 100, each straight guide 310 is five
The end of the outgoing light direction of prism 320 is provided with a plane mirror 330.
The side view of the Wave-front measurement system of heavy caliber system shown in FIG. 1, which only includes three with reflection unit 300, directly leads
It is respectively provided with for two pentaprisms 320 and is illustrated on rail 310 and each straight guide 310.
Target surface 100 is placed at the focal plane of heavy caliber system, and the transmitting light of target surface 100 successively passes through half-reflection and half-transmission plane mirror
200 and heavy caliber system exit to reflection unit 300.When target surface 100 is placed at the focal plane of heavy caliber system, Ke Yitong
It crosses light pipe target target plate to be moved forward and backward near focal plane, assists the judgement of light pipe position of focal plane.
Fig. 2 show the structural schematic diagram of reflection unit 300, and Fig. 2 only includes three straight guides with reflection unit 300 here
310, the reflection unit 300 in the present invention is illustrated for pentaprism 320 there are two settings on each straight guide 310, three
Straight guide 310 can realize that relative rotation rotates around shaft (not shown in figure 1) or using devices such as turntables, Er Qiesan
Straight guide 310 can overlap, and playback as a guide rail, when reflection unit 300 includes four or more straight guides 310,
Its structure and so on.Before the outgoing bore of heavy caliber system is arranged in reflection unit 300, and 300 place plane of reflection unit
Vertical with the optical axis of heavy caliber system, i.e., each straight guide 310 is vertical with the optical axis of heavy caliber system；Fig. 3 is shown arbitrarily
The light path schematic diagram of pentaprism 320 and plane mirror 330 on one straight guide 310, from the figure 3, it may be seen that in the present embodiment, five ribs
The emergent light of mirror 320 is back to heavy caliber system along original optical path after the reflection of corresponding plane mirror 330, by heavy caliber
Half-reflection and half-transmission plane mirror 200 is eventually returned to after system.
The emergent light of the pentaprism 320 returned along original optical path is reflexed to angle position measurement by half-reflection and half-transmission plane mirror 200
And processing unit 400.
In the present embodiment, angle position measurement and processing unit 400 include Angle Measuring Equipment and and angel measuring instrument
Associated with processing equipment, such as computer, wherein Angle Measuring Equipment is also known as angel measuring instrument or angular instrument, can be to light
The deflection angle of line measures, after data processing the defocus of available target surface, inclination, bias and barycenter distribution etc.
Information, Angle Measuring Equipment obtain the target surface that each pentaprism 320 is formed and return to picture, to whole five on each straight guide 310
The target surface return picture of prism 320 measures and data processing, and the barycenter distribution feelings of picture are returned to the target surface that pentaprism 320 is formed
Condition is analyzed, and corresponding centroid position information is obtained, and processing equipment carries out wavefront reconstruction according to centroid position information, is obtained big
The wavefront information of bore system, while processing equipment analog goes out the skiodrome of heavy caliber system wavefront.
The Wave-front measurement system for the heavy caliber system that the present embodiment is proposed is suitable for the wave of heavy caliber photo electric imaging system
Preceding detection and the wavefront real-time detection for examining such as large-scale parallel light tube of equipment relevant to heavy caliber photo electric imaging system, should
System using multiple pentaprisms, plane mirror in such a way that straight guide combines, can be to any angle using pentaprism
The direction of incident light carries out the characteristic of 90 ° of steerings, will be returned by the transmitting light of the target surface of heavy caliber system along original optical path
Angle position measurement and processing unit are reflexed to half-reflection and half-transmission plane mirror, then by half-reflection and half-transmission plane mirror, is surveyed by angle position
Amount and processing unit realize the reconstruct to heavy caliber system wavefront and obtain wavefront information.The Wave-front measurement of above-mentioned heavy caliber system
System is sampled simultaneously by the multiple spot on heavy caliber system wavefront, to the unified of heavy caliber system while can be adopted
Sample reduces influence of the environment to sampling precision, and the high-precision for realizing heavy caliber system optics wavefront quickly detects, and is big mouth
The real-time monitoring of diameter system mode and calibration provide more quick, practical method and system, and each in reflection unit
A straight guide can overlap when not detecting wavefront, so that reflection unit be made to block minimum to heavy caliber system, be
Overall structure of uniting is simple, at low cost.
As a kind of specific embodiment, the mode that is interspersed of the pentaprism 320 on each straight guide 310 is identical,
The mode that is interspersed is that distance of the adjacent any two pentaprism 320 on the length direction of straight guide 310 is equal, phase
Distance of the adjacent any two pentaprism 320 in the width direction of straight guide 310 is equal, and any two pentaprism 320
It is interspersed on the length direction of straight guide 310 and in the width direction of straight guide 310.The present invention utilizes pentaprism 320
Light incident at any angle can be turned back 90 ° of characteristic, and cooperate plane mirror 330 with pentaprism 320, so that
The transmitting light of target surface 100 passes twice through the same pentaprism 320, eliminates the angular errors of pentaprism 320, when pentaprism 320
When being distributed in the side of 310 guide rail of straight guide, it also can be realized above-mentioned 90 ° and turn back, but this mode for being distributed in side
On the one hand it is unfavorable for arrangement of the pentaprism 320 on straight guide 310, the quantity and straight guide 310 for limiting pentaprism 320 are most
On the other hand smallization size is likely to require using half reflection and half transmission pentaprism, and use the meeting of half reflection and half transmission pentaprism
Cause the light intensity for being reflected back heavy caliber system by pentaprism 320 to become very little, even results in angle position measurement and processing dress
Measurement can not be acquired since light intensity is too small by setting, the present invention is by being interspersed to pentaprism, so that with always
Any two pentaprism 320 is not conllinear on guide rail 310, to avoid mutually blocking between pentaprism 320, improves wavefront inspection
The efficiency of survey, and the mode that is interspersed of the pentaprism 320 on each straight guide 310 is identical, is conducive to batch of straight guide 310
Amount manufacture and production, and then improve the production efficiency of reflection unit 300.
As a kind of specific embodiment, spill rectilinear orbit, each spill rectilinear orbit are provided on straight guide 310
It is fixedly connected at the top of interior to a multi-embedding convex sliding block, pentaprism 320 and convex sliding block, and convex sliding block is in positioning device
Under the action of can be fixed in any position of spill rectilinear orbit.As shown in Figure 4 and Figure 5, respectively it is provided with spill straight line rail
The cross-sectional view and positioning device of the straight guide in road and the convex sliding block being embedded in spill rectilinear orbit are respectively spring
The cross-sectional view of straight guide and convex sliding block when piece (a) or nut (b), Fig. 4 and Fig. 5 on straight guide 310 to set
Two spill rectilinear orbits are set, are embedded on each spill rectilinear orbit for a convex sliding block, since pentaprism 320 is
It is interspersed, therefore only includes a convex sliding block, in the actual process, straight guide in Fig. 4 and cross section shown in fig. 5
The quantity for the spill rectilinear orbit being arranged on 310 can be more than the quantity of the pentaprism 320 on the straight guide 310.Pentaprism 320
It the frame being had by itself and is fixedly connected at the top of convex sliding block.
In this specific embodiment, positioning device is for being fixed convex sliding block, and convex sliding block is in positioning device
Under the action of can be fixed in any position of spill rectilinear orbit, and can be realized by regulating positioning device to convex sliding block
Specific location adjusting, the spring leaf as shown in Fig. 5 (a) or Fig. 5 (b) institute can be used in the positioning device in present embodiment
Nut shown etc. is realized, in Fig. 5 (a), the top of arc-shaped spring piece is equipped with through-hole, and convex sliding block passes through the through-hole and spring leaf
It is in close contact, under the effect of elasticity, spring leaf and straight guide 310 push against, and under external force, spring leaf can be in straight guide
Staying at random location, so that convex sliding block be made to fix；In Fig. 5 (b), the protrusion side of convex sliding block is equipped with screw thread, and nut is logical
It crosses screw thread to connect with convex sliding block, and the diameter of nut is greater than the width at the most narrow place of spill rectilinear orbit, to utilize nut
It will be clamped between convex sliding block and straight guide 310, and then fixed convex sliding block.Positioning device in present embodiment can also be used
Existing common localization method is realized.
As a kind of specific embodiment, the angle of two straight guides 310 of arbitrary neighborhood is equal, thus realization pair
The unified uniform sampling of heavy caliber system exit bore advantageously ensures that the detection essence of the Wave-front measurement system of heavy caliber system
Degree.
As a kind of specific embodiment, pentaprism 320 is total reflection pentaprism, and the rib for being totally reflected pentaprism is a length of
20mm.In the present embodiment, the total reflection pentaprism of a length of 20mm of rib is the Wave-front measurement system of heavy caliber system in reality
Ideal pentaprism 320 during Wave-front measurement, the total reflection pentaprism can not only guarantee that the transmitting light of target surface passes through
Being totally reflected after pentaprism still has stronger light intensity, and the energy of light will not be made too low, and is totally reflected the size of pentaprism
It is smaller, be conducive to the introducing for limiting other errors, while ensure that the integrally-built compactedness of detection system.
In another embodiment, correspondingly the present invention also proposes the wave-front detection method of heavy caliber system a kind of, such as Fig. 6
Shown, this method includes following procedure:
S100 places target surface at the focal plane of heavy caliber system, and the transmitting light of the target surface successively passes through half-reflection and half-transmission plane
Mirror and the heavy caliber system exit are to reflection unit；
Before the outgoing bore of the heavy caliber system is arranged in reflection unit described in S200, and it is flat where the reflection unit
Face is vertical with the optical axis of the heavy caliber system, the reflection unit include at least three can relative rotation and overlap it is straight
Guide rail, and each straight guide mutually disperses, at least provided with two for the transmitting light on each straight guide
The pentaprism being interspersed turned back, each straight guide are provided in the end of the outgoing light direction of the pentaprism
The emergent light of one plane mirror, the pentaprism is back to institute along original optical path after the reflection of the corresponding plane mirror
State half-reflection and half-transmission plane mirror；
The emergent light of the pentaprism returned along original optical path is reflexed to reflection dress by half-reflection and half-transmission plane mirror described in S300
It sets；
Reflection unit described in S400 obtains the target surface that each pentaprism is formed and returns to picture, on each straight guide
The whole pentaprism the target surface return as carry out data processing, obtain corresponding centroid position information, and according to institute
It states centroid position information and carries out wavefront reconstruction, obtain the wavefront information of the heavy caliber system.
Specifically, in the present embodiment, as shown in Figure 1, being first placed on target surface 100 at the focal plane of heavy caliber system,
The transmitting light of target surface 100 successively passes through half-reflection and half-transmission plane mirror 200 and heavy caliber system exit to reflection unit 300.By target
It when face 100 is placed at the focal plane of heavy caliber system, can be moved forward and backward, be assisted near focal plane by light pipe target target plate
The judgement of light pipe position of focal plane.
Reflection unit 300 include at least three can relative rotation and the straight guide 310 that overlaps, and each straight guide
310 mutually disperse, and interlock at least provided with two for what is turned back to the transmitting light of target surface 100 on each straight guide 310
The pentaprism 320 of distribution, each straight guide 310 are provided with a plane mirror in the end of the outgoing light direction of pentaprism 320
330。
As shown in Fig. 2, three straight guides 310 can surround shaft (not shown in figure 1) or real using devices such as turntables
Existing relative rotation rotation, and three straight guides 310 can overlap is playbacked as a guide rail, when reflection unit 300 includes four
When more than item straight guide 310, structure and so on.Before the outgoing bore of heavy caliber system is arranged in reflection unit 300, and
300 place plane of reflection unit is vertical with the optical axis of heavy caliber system, i.e., optical axis of each straight guide 310 with heavy caliber system
Vertically；From the figure 3, it may be seen that in the present embodiment, the emergent light of pentaprism 320 edge after the reflection of corresponding plane mirror 330
Original optical path is back to heavy caliber system, and half-reflection and half-transmission plane mirror 200 is eventually returned to after heavy caliber system.
The emergent light of the pentaprism 320 returned along original optical path is reflexed to angle position measurement by half-reflection and half-transmission plane mirror 200
And processing unit 400.
In the present embodiment, angle position measurement and processing unit 400 include Angle Measuring Equipment and and angel measuring instrument
Associated with processing equipment, such as computer, wherein Angle Measuring Equipment is also known as angel measuring instrument or angular instrument, can be to light
The deflection angle of line measures, after data processing the defocus of available target surface, inclination, bias and barycenter distribution etc.
Information, Angle Measuring Equipment obtain the target surface that each pentaprism 320 is formed and return to picture, to whole five on each straight guide 310
The target surface return picture of prism 320 measures and data processing, and the barycenter distribution feelings of picture are returned to the target surface that pentaprism 320 is formed
Condition is analyzed, and corresponding centroid position information is obtained, and processing equipment carries out wavefront reconstruction according to centroid position information, is obtained big
The wavefront information of bore system, while processing equipment analog goes out the skiodrome of heavy caliber system wavefront.
The wave-front detection method for the heavy caliber system that the present embodiment is proposed is suitable for the wave of heavy caliber photo electric imaging system
Preceding detection and the wavefront real-time detection for examining such as large-scale parallel light tube of equipment relevant to heavy caliber photo electric imaging system, should
Method using multiple pentaprisms, plane mirror in such a way that straight guide combines, can be to any angle using pentaprism
The direction of incident light carries out the characteristic of 90 ° of steerings, will be returned by the transmitting light of the target surface of heavy caliber system along original optical path
Angle position measurement and processing unit are reflexed to half-reflection and half-transmission plane mirror, then by half-reflection and half-transmission plane mirror, is surveyed by angle position
Amount and processing unit realize the reconstruct to heavy caliber system wavefront and obtain wavefront information.The Wave-front measurement of above-mentioned heavy caliber system
Method is sampled simultaneously by the multiple spot on heavy caliber system wavefront, to the unified of heavy caliber system while can be adopted
Sample reduces influence of the environment to sampling precision, and the high-precision for realizing heavy caliber system optics wavefront quickly detects, and is big mouth
The real-time monitoring of diameter system mode and calibration provide more quick, practical method and system, and each in reflection unit
A straight guide can overlap when not detecting wavefront, so that reflection unit be made to block minimum to heavy caliber system, be
Overall structure of uniting is simple, at low cost.
As a kind of specific embodiment, the mode that is interspersed of the pentaprism 320 on each straight guide 310 is identical,
The mode that is interspersed is that distance of the adjacent any two pentaprism 320 on the length direction of straight guide 310 is equal, phase
Distance of the adjacent any two pentaprism 320 in the width direction of straight guide 310 is equal, and any two pentaprism 320
It is interspersed on the length direction of straight guide 310 and in the width direction of straight guide 310.The present invention utilizes pentaprism 320
Light incident at any angle can be turned back 90 ° of characteristic, and cooperate plane mirror 330 with pentaprism 320, so that
The transmitting light of target surface 100 passes twice through the same pentaprism 320, eliminates the angular errors of pentaprism 320, when pentaprism 320
When being distributed in the side of 310 guide rail of straight guide, it also can be realized above-mentioned 90 ° and turn back, but this mode for being distributed in side
On the one hand it is unfavorable for arrangement of the pentaprism 320 on straight guide 310, the quantity and straight guide 310 for limiting pentaprism 320 are most
On the other hand smallization size is likely to require using half reflection and half transmission pentaprism, and use the meeting of half reflection and half transmission pentaprism
Cause the light intensity for being reflected back heavy caliber system by pentaprism 320 to become very little, even results in angle position measurement and processing dress
Measurement can not be acquired since light intensity is too small by setting, the present invention is by being interspersed to pentaprism, so that with always
Any two pentaprism 320 is not conllinear on guide rail 310, to avoid mutually blocking between pentaprism 320, improves wavefront inspection
The efficiency of survey, and the mode that is interspersed of the pentaprism 320 on each straight guide 310 is identical, is conducive to batch of straight guide 310
Amount manufacture and production, and then improve the production efficiency of reflection unit 300.
As a kind of specific embodiment, spill rectilinear orbit, each spill rectilinear orbit are provided on straight guide 310
It is fixedly connected at the top of interior to a multi-embedding convex sliding block, pentaprism 320 and convex sliding block, and convex sliding block is in positioning device
Under the action of can be fixed in any position of spill rectilinear orbit.As shown in Figure 4 and Figure 5, since pentaprism 320 is to be interspersed
, therefore be only arranged on straight guide 310 in the actual process comprising a convex sliding block in Fig. 4 and cross section shown in fig. 5
The quantity of spill rectilinear orbit can be more than the quantity of the pentaprism 320 on the straight guide 310.Pentaprism 320 passes through itself
It the frame having and is fixedly connected at the top of convex sliding block.
In this specific embodiment, positioning device is for being fixed convex sliding block, and convex sliding block is in positioning device
Under the action of can be fixed in any position of spill rectilinear orbit, and can be realized by regulating positioning device to convex sliding block
Specific location adjusting, the spring leaf as shown in Fig. 5 (a) or Fig. 5 (b) institute can be used in the positioning device in present embodiment
Nut shown etc. is realized, in Fig. 5 (a), the top of arc-shaped spring piece is equipped with through-hole, and convex sliding block passes through the through-hole and spring leaf
It is in close contact, under the effect of elasticity, spring leaf and straight guide 310 push against, and under external force, spring leaf can be in straight guide
Staying at random location, so that convex sliding block be made to fix；In Fig. 5 (b), the protrusion side of convex sliding block is equipped with screw thread, and nut is logical
It crosses screw thread to connect with convex sliding block, and the diameter of nut is greater than the width at the most narrow place of spill rectilinear orbit, to utilize nut
It will be clamped between convex sliding block and straight guide 310, and then fixed convex sliding block.Positioning device in present embodiment can be used existing
The common localization method having is realized.
As a kind of specific embodiment, the angle of two straight guides 310 of arbitrary neighborhood is equal, thus realization pair
The unified uniform sampling of heavy caliber system exit bore advantageously ensures that the detection essence of the wave-front detection method of heavy caliber system
Degree.
As a kind of specific embodiment, pentaprism 320 is total reflection pentaprism, and the rib for being totally reflected pentaprism is a length of
20mm.In the present embodiment, the total reflection pentaprism of a length of 20mm of rib is the wave-front detection method of heavy caliber system in reality
Ideal pentaprism 320 during Wave-front measurement, the total reflection pentaprism can not only guarantee that the transmitting light of target surface passes through
Being totally reflected after pentaprism still has stronger light intensity, and the energy of light will not be made too low, and is totally reflected the size of pentaprism
It is smaller, be conducive to the introducing for limiting other errors, while ensure that the integrally-built compactedness of detection system.
The concrete methods of realizing of the wave-front detection method of heavy caliber system of the present invention, the wavefront with above-mentioned heavy caliber system
Implementation method described in detection system embodiment is identical, and details are not described herein again.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (8)
1. a kind of wave-front detection method of heavy caliber system, which is characterized in that including following procedure:
Target surface is placed at the focal plane of heavy caliber system, the transmitting light of the target surface successively passes through half-reflection and half-transmission plane mirror and described
Heavy caliber system exit is to reflection unit；
Before the outgoing bore of the heavy caliber system is arranged in the reflection unit, and the reflection unit where plane with it is described
The optical axis of heavy caliber system is vertical, the reflection unit include at least three can relative rotation and the straight guide that overlaps, and
Each straight guide mutually disperses, at least provided with two for turning back to the transmitting light on each straight guide
The pentaprism being interspersed, it is anti-that each straight guide in the end of the outgoing light direction of the pentaprism is provided with a plane
Mirror is penetrated, the emergent light of the pentaprism is back to described half anti-half along original optical path after the reflection of the corresponding plane mirror
Saturating plane mirror；The mode that is interspersed of the pentaprism on each straight guide is identical, and the mode that is interspersed is phase
Distance of the pentaprism on the length direction of the straight guide described in adjacent any two is equal, described in adjacent any two
Distance of the pentaprism in the width direction of the straight guide is equal, and pentaprism described in any two is in the straight guide
It is interspersed on length direction and in the width direction of the straight guide；
The half-reflection and half-transmission plane mirror by the emergent light of the pentaprism returned along original optical path reflex to angle position measurement and
Processing unit；
The angle position measurement and processing unit obtain the target surface that each pentaprism is formed and return to picture, to each described straight
The target surface of the whole pentaprism on guide rail is returned as progress data processing, obtains corresponding centroid position information, and
Wavefront reconstruction is carried out according to the centroid position information, obtains the wavefront information of the heavy caliber system.
2. the wave-front detection method of heavy caliber system according to claim 1, which is characterized in that
Spill rectilinear orbit is provided on the straight guide, an extremely multi-embedding convex is sliding in each spill rectilinear orbit
It is fixedly connected at the top of block, the pentaprism and the convex sliding block, and the convex sliding block can under the action of positioning device
It is fixed in any position of the spill rectilinear orbit.
3. the wave-front detection method of heavy caliber system according to claim 1 or 2, which is characterized in that
The angle of two straight guides of arbitrary neighborhood is equal.
4. the wave-front detection method of heavy caliber system according to claim 1 or 2, which is characterized in that
The pentaprism be total reflection pentaprism, and it is described total reflection pentaprism a length of 20mm of rib.
5. a kind of Wave-front measurement system of heavy caliber system, which is characterized in that including target surface, half-reflection and half-transmission plane mirror, reflection dress
Set with angle position measurement and processing unit, the reflection unit include at least three can relative rotation and overlap directly lead
Rail, and each straight guide mutually disperses, at least provided with two for the hair to the target surface on each straight guide
The pentaprism being interspersed that light is turned back is penetrated, each straight guide is set in the end of the outgoing light direction of the pentaprism
It is equipped with a plane mirror, the mode that is interspersed of the pentaprism on each straight guide is identical, described to be interspersed
Mode is that distance of the pentaprism on the length direction of the straight guide described in adjacent any two is equal, and adjacent is any
Distance of two pentaprisms in the width direction of the straight guide is equal, and pentaprism described in any two is described
It is interspersed on the length direction of straight guide and in the width direction of the straight guide；
The target surface is placed at the focal plane of heavy caliber system, and the transmitting light of the target surface successively passes through the half-reflection and half-transmission plane
Mirror and the heavy caliber system exit are to the reflection unit；
Before the outgoing bore of the heavy caliber system is arranged in the reflection unit, and the reflection unit where plane with it is described
The optical axis of heavy caliber system is vertical, and the emergent light of the pentaprism is after the reflection of the corresponding plane mirror along original optical path
It is back to the half-reflection and half-transmission plane mirror；
The emergent light of the pentaprism returned along original optical path is reflexed to the angle position and surveyed by the half-reflection and half-transmission plane mirror
Amount and processing unit；
The angle position measurement and processing unit obtain the target surface that each pentaprism is formed and return to picture, to each described straight
The target surface of the whole pentaprism on guide rail is returned as progress data processing, obtains corresponding centroid position information, and
Wavefront reconstruction is carried out according to the centroid position information, obtains the wavefront information of the heavy caliber system.
6. the Wave-front measurement system of heavy caliber system according to claim 5, which is characterized in that
Spill rectilinear orbit is provided on the straight guide, an extremely multi-embedding convex is sliding in each spill rectilinear orbit
It is fixedly connected at the top of block, the pentaprism and the convex sliding block, and the convex sliding block can under the action of positioning device
It is fixed in any position of the spill rectilinear orbit.
7. the Wave-front measurement system of heavy caliber system according to claim 5 or 6, which is characterized in that
The angle of two straight guides of arbitrary neighborhood is equal.
8. the Wave-front measurement system of heavy caliber system according to claim 5 or 6, which is characterized in that
The pentaprism be total reflection pentaprism, and it is described total reflection pentaprism a length of 20mm of rib.
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| CN201710940224.4A CN107843414B (en) | 2017-10-11 | 2017-10-11 | The wave-front detection method and system of heavy caliber system |
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|---|---|---|---|---|
| CN101476880A (en) * | 2009-02-05 | 2009-07-08 | 范勇 | Surface shape detection apparatus and method for large-bore plane optical element |
| CN102507155A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Device for detecting wave front of large-aperture optical system |
| CN102840964A (en) * | 2012-08-27 | 2012-12-26 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber long-focus collimator focal point real-time monitoring system |
| CN204479187U (en) * | 2015-03-13 | 2015-07-15 | 浙江师范大学 | Based on the collimated light beam detector of two pentaprism |
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2017
- 2017-10-11 CN CN201710940224.4A patent/CN107843414B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101476880A (en) * | 2009-02-05 | 2009-07-08 | 范勇 | Surface shape detection apparatus and method for large-bore plane optical element |
| CN102507155A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Device for detecting wave front of large-aperture optical system |
| CN102840964A (en) * | 2012-08-27 | 2012-12-26 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber long-focus collimator focal point real-time monitoring system |
| CN204479187U (en) * | 2015-03-13 | 2015-07-15 | 浙江师范大学 | Based on the collimated light beam detector of two pentaprism |
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Denomination of invention: Wavefront Detection Method and System for Large Aperture Systems Granted publication date: 20191018 Pledgee: Jilin credit financing guarantee Investment Group Co.,Ltd. Pledgor: Changguang Satellite Technology Co.,Ltd. Registration number: Y2024220000032 |
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