CN105571834A - Measuring device of quantum efficiency of CCD device - Google Patents
Measuring device of quantum efficiency of CCD device Download PDFInfo
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- CN105571834A CN105571834A CN201510980812.1A CN201510980812A CN105571834A CN 105571834 A CN105571834 A CN 105571834A CN 201510980812 A CN201510980812 A CN 201510980812A CN 105571834 A CN105571834 A CN 105571834A
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- light
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- integrating sphere
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Abstract
The invention brings forward a measuring device of the quantum efficiency of a CCD device. The measuring device comprises a light source, a monochromator, an integrating sphere, a beam expander, adjustable diaphragms, a darkroom, a standard detector, a CCD driving circuit, a picoammeter, and a master control computer; the CCD device and the standard detector are arranged in the darkroom; an output port of the monochromator is focused and amplified, collected to an optical fiber bundle, and injected to the integrating sphere; a light outlet of the integrating sphere is additionally provided with the beam expander, light is collected via the beam expander, and the light after collection and collimation enters the darkroom and is projected to the detected CCD or the standard detector via the adjustable diaphragm; and data acquisition is performed via the CCD driving circuit and the picoammeter, and data is transmitted to the master control computer for processing. According to the measuring device, the light outlet of the integrating sphere is additionally provided with the beam expander system so that the uniformity of the light source is improved, the effect of collecting and collimating the light is achieved, and the utilization rate of light energy is increased.
Description
Technical field
The present invention relates to technical field of measurement and test, particularly a kind of CCD device quantum efficiency measuring device.
Background technology
CCD device is one of imageing sensor be most widely used in optical imaging field, and quantum efficiency is an important basic parameter of CCD device.Accurate Calibration mainly has the meaning of two aspects: contribute to the improvement that production technology was chosen, designed to device research and production process in which materials on the one hand, on the other hand, contribute to CCD device and better apply.
Realize the accurate measurement of CCD device quantum efficiency, key is the acquisition of the monochromatic uniform source of light of face battle array.Should ensure that luminous energy uniform vertical is radiated on the photosurface of detector, ensure that light source has enough intensity again, reach certain signal to noise ratio (S/N ratio).
In existing technology, the even light of monochromator+diffusion sheet produce scheme due to homogeneity poor, generally do not adopt in the test of Visible-light CCD, majority all adopts the scheme of monochromator+integrating sphere.And the bore of integrating sphere all reaches about 50cm, opening diameter is also at more than 10cm, measured device often requires to be placed on the homogeneity that outside integrating sphere light-emitting window 8 times of distances, guarantee is higher, requires that light can impinge perpendicularly on detector photosurface substantially simultaneously; A larger optics camera bellows also will be designed between measured device and integrating sphere.
Make a general survey of above measurement scheme, the even light of monochromator+diffusion sheet produce scheme due to homogeneity poor, generally do not adopt in the test of Visible-light CCD, other substantially all adopts the scheme of monochromator+integrating sphere.The benefit of integrating sphere uniform source to reach higher homogeneity, in above scheme, the bore of integrating sphere all reaches about 50cm, opening diameter is also at more than 10cm, and measured device often requires to be placed on and could to obtain preferably evenly light effect outside integrating sphere light-emitting window 8 times of distances, a larger optics camera bellows between measured device and integrating sphere, also to be designed.
Above scheme no doubt can meet the measurement of large area array CCD, but has following shortcoming simultaneously:
The first, volume is too huge, not easily moves and operates, and can bring some inconvenience to test;
The second, it is more weak that monochromator itself goes out luminous energy, can be very large by bigbore integrating sphere decay, and tested CCD distance product bulb separation is comparatively far away, and luminous energy weakens further, has the inadequate situation of signal to noise ratio (S/N ratio) occur when the CCD that test performance is a bit weaker;
3rd, when testing, standard detector and tested CCD need to detect in turn in identical position, but according to current actual test case, sometimes not only need to test CCD nude film, but also need to test the CCD camera debug, due to the obstruction of the shell mechanism of CCD camera, not easily determine the particular location of CCD photosurface, especially on the direction with perpendicular to integrating sphere exiting surface, can be there is certain deviation in the placement location of standard detector and CCD photosurface, bring certain error to measurement result.
Summary of the invention
For overcoming the deficiencies in the prior art, the present invention proposes a kind of CCD device quantum efficiency measuring device of improvement, and the program adopts the integrating sphere of small volume, increases beam expanding lens device at integrating sphere light-emitting window place.
Technical scheme of the present invention is achieved in that
A kind of CCD device quantum efficiency measuring device, comprising: light source, monochromator, integrating sphere, beam expanding lens, adjustable diaphragm, darkroom, standard detector, CCD driving circuit, Pi Anbiao, main control computer, be placed in darkroom by CCD device and standard detector;
Monochromator delivery outlet converges in fibre bundle after focusing on and amplifying, and is then injected in integrating sphere;
Integrating sphere light-emitting window place increases beam expanding lens, and light, by converging after beam expanding lens, after the light after converging collimation enters darkroom, projects on tested CCD or standard detector through adjustable diaphragm; Carry out data acquisition respectively by CCD driving circuit and Pi Anbiao and be sent to the enterprising row relax of main control computer.
Alternatively, described integrating sphere diameter is 100 ~ 150mm, and output bore is 10 ~ 15mm.
Alternatively, described integrating sphere diameter is 100mm, and output bore is 10mm.
Alternatively, the light-emitting window plane of described integrating sphere is the incident object plane of beam expanding lens.
Alternatively, the F number of described beam expanding lens is 2.5, F number is beam expanding lens system focal length and light-emitting window diameter ratio.
Alternatively, the light-emitting window diameter of described beam expanding lens is 50mm.
Alternatively, described beam expanding lens system focal length is 250mm.
Alternatively, described standard detector selects circular detector, and area is 100mm
2.
Alternatively, the position of described adjustable diaphragm is near the light-emitting window of beam expanding lens.
Alternatively, install circular adjustable diaphragm additional at the light-emitting window place of beam expanding lens, radius is respectively each one of 1mm, 2mm, 3mm, 4mm, 5mm.
The invention has the beneficial effects as follows:
(1) integrating sphere light-emitting window place increases beam expanding lens system, has both improve the homogeneity of light source, serves again the effect of convergence and collimated ray, improves the efficiency of light energy utilization;
(2) add diaphragm, can arrange different diaphragm bores, the hot spot choosing middle uniformity coefficient higher is tested, and improves measuring accuracy;
(3) beam expanding lens is to the collimation of light beam and diaphragm to the restriction of light beam, and can eliminate the impact that a part of tested CCD and standard detector alignment error bring, the light beam after collimation also can ensure that light all enters in tested CCD and standard detector.Both improve the debugging difficulty that measuring accuracy again reduces system;
(4) volume in integrating sphere and darkroom is all less, has simplified system, has saved space.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to use to required in embodiment or description of the prior art below
accompanying drawingbe briefly described, apparently, in the following describes
accompanying drawingonly some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, can also according to these
accompanying drawingobtain other
accompanying drawing.
fig. 1for CCD device quantum efficiency measuring device of the present invention structural representation
figure;
fig. 2for beam expanding lens structure of the present invention
figure.
Embodiment
Below in conjunction with in the embodiment of the present invention
accompanying drawing, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
For the measurement of CCD device quantum efficiency, key is the acquisition of even monochromatic source, the scheme of current general employing monochromator+integrating sphere, but has the shortcomings such as the serious and system debug difficulty of systems bulky, luminous energy decay is large simultaneously.For overcoming the deficiencies in the prior art, the present invention proposes a kind of CCD device quantum efficiency measuring device of improvement, and the program adopts the integrating sphere of small volume, increases beam expanding lens device at integrating sphere light-emitting window place
as Fig. 1shown in, CCD device quantum efficiency measuring device of the present invention mainly comprises: light source, monochromator, integrating sphere, beam expanding lens, adjustable diaphragm, darkroom, standard detector, CCD driver element, Pi Anbiao, main control computer.For eliminating parasitic light to the impact of measurement result, CCD device and standard detector are placed in darkroom.
Light source adopts the xenon lamp of 500W, and monochromator delivery outlet converges in fibre bundle after focusing on and amplifying, and is then injected in integrating sphere; Integrating sphere diameter is Φ 100mm, exports bore and is designed to Φ 10mm.Integrating sphere light-emitting window place increases beam expanding lens system, light is by converging after beam expanding lens system, add the luminous energy projected on measured device, light angle of divergence after beam expanding lens is very little on the other hand, be similar to directional light, near normal can be irradiated on the photosurface of measured device and standard detector, reduce the impact of device surface reflection.After light after converging collimation enters darkroom, project on tested CCD or standard detector through a diaphragm.The position of diaphragm is near the light-emitting window of beam expanding lens, during test, distance diaphragm should be closer as far as possible under the prerequisite ensureing position consistency for tested CCD and standard detector, carries out data acquisition and be sent to the enterprising row relax of main control computer respectively by CCD driving circuit and Pi Anbiao.
Above-mentioned integrating sphere diameter can be designed as 100 ~ 150mm, exports bore and can be designed as 10 ~ 15mm.Preferably, in the present invention, integrating sphere diameter is 100mm, and output bore is 10mm, reduces the bore of integrating sphere, decreases the decay of integrating sphere to luminous energy.
The present invention increases beam expanding lens system at integrating sphere light-emitting window place, has both improve the homogeneity of light source, serves again the effect of convergence and collimated ray, improves the efficiency of light energy utilization.The introducing of beam expanding lens collimates light, makes beam divergence angle within 3 degree.The emergent light angle of divergence is less, be similar to directional light, can not only ensure that light impinges perpendicularly on the photosurface of tested CCD and standard detector substantially, and, at different distance place, beam expanding lens front, illuminance gap is little, if standard detector and tested CCD photosurface have certain site error on the direction being parallel to light, also less on the impact of test result; Measured device can be made so as far as possible near beam expanding lens light-emitting window simultaneously, reduce the length in darkroom, save space.
Beam expanding lens system structure
as Fig. 2shown in, the light-emitting window plane of integrating sphere is the incident object plane of beam expanding lens.It is beam expanding lens system focal length and light-emitting window diameter ratio that F number is designed to 2.5, F number, and the ability of F number less collection luminous flux is larger.The light-emitting window intended diameter of beam expanding lens system is 50mm, and to ensure that Uniform Illumination area reaches 25mm × 25mm, homogeneity can reach more than 99%.Beam expanding lens system focal length is 250mm, and the angle of divergence of light source is about 2.86 °.
Because the light source after converging is round symmetrical parallel beam, and diaphragm shape is circular hole diaphragm, so standard detector selects circular detector at this, area is 100mm
2.
Circular iris is installed additional at the light-emitting window place of beam expanding lens, and the aperture of the diaphragm comprises different size, radius is respectively each one of 1mm, 2mm, 3mm, 4mm, 5mm, comprises the type of different size, can select according to the size of measured device with the measuring accuracy needed.Light beam after convergence is higher the closer to center homogeneity, if need higher precision, when measured device area is less simultaneously, can select the diaphragm that aperture is less; Otherwise then select the diaphragm that aperture is larger.During actual test, should be radiated at completely on tested CCD and standard detector by the light of diaphragm.
The diaphragm selected should be less than the size of tested CCD and standard detector, only need during test to ensure that hot spot is radiated on the photosurface of tested CCD and standard detector completely, both positions can strictly overlap, and reduce system debug difficulty during test.
The present invention increases beam expanding lens system at integrating sphere light-emitting window place, has both improve the homogeneity of light source, serves again the effect of convergence and collimated ray, improves the efficiency of light energy utilization; Add diaphragm, can arrange different diaphragm bores, the hot spot choosing middle uniformity coefficient higher is tested, and improves measuring accuracy; Beam expanding lens is to the collimation of light beam and diaphragm to the restriction of light beam, and can eliminate the impact that a part of tested CCD and standard detector alignment error bring, the light beam after collimation also can ensure that light all enters in tested CCD and standard detector.Both improve the difficulty of test that measuring accuracy again reduces system; The volume in integrating sphere and darkroom is all less, has simplified system, has saved space.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a CCD device quantum efficiency measuring device, it is characterized in that, comprise: light source, monochromator, integrating sphere, beam expanding lens, adjustable diaphragm, darkroom, standard detector, CCD driving circuit, Pi Anbiao, main control computer, be placed in darkroom by CCD device and standard detector;
Monochromator delivery outlet converges in fibre bundle after focusing on and amplifying, and is then injected in integrating sphere;
Integrating sphere light-emitting window place increases beam expanding lens, and light, by converging after beam expanding lens, after the light after converging collimation enters darkroom, projects on tested CCD or standard detector through adjustable diaphragm; Carry out data acquisition respectively by CCD driving circuit and Pi Anbiao and be sent to the enterprising row relax of main control computer.
2. CCD device quantum efficiency measuring device as claimed in claim 1, it is characterized in that, described integrating sphere diameter is 100 ~ 150mm, and output bore is 10 ~ 15mm.
3. CCD device quantum efficiency measuring device as claimed in claim 2, it is characterized in that, described integrating sphere diameter is 100mm, and output bore is 10mm.
4. CCD device quantum efficiency measuring device as claimed in claim 1, it is characterized in that, the light-emitting window plane of described integrating sphere is the incident object plane of beam expanding lens.
5. CCD device quantum efficiency measuring device as claimed in claim 4, it is characterized in that, the F number of described beam expanding lens is 2.5, F number is beam expanding lens system focal length and light-emitting window diameter ratio.
6. CCD device quantum efficiency measuring device as claimed in claim 4, it is characterized in that, the light-emitting window diameter of described beam expanding lens is 50mm.
7. CCD device quantum efficiency measuring device as claimed in claim 4, it is characterized in that, described beam expanding lens system focal length is 250mm.
8. CCD device quantum efficiency measuring device as claimed in claim 1, it is characterized in that, described standard detector selects circular detector, and area is 100mm
2.
9. CCD device quantum efficiency measuring device as claimed in claim 1, is characterized in that, the position of described adjustable diaphragm is near the light-emitting window of beam expanding lens.
10. CCD device quantum efficiency measuring device as claimed in claim 9, it is characterized in that, install circular adjustable diaphragm additional at the light-emitting window place of beam expanding lens, radius is respectively each one of 1mm, 2mm, 3mm, 4mm, 5mm.
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| CN201510980812.1A CN105571834A (en) | 2015-12-24 | 2015-12-24 | Measuring device of quantum efficiency of CCD device |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105929351A (en) * | 2016-06-03 | 2016-09-07 | 中国电力科学研究院 | Test apparatus and test method of sensitivity of ultraviolet imager |
| CN106768317A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The caliberating device and method of a kind of single-photon detector detection efficient |
| CN106768855A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The spectral responsivity measurement apparatus and method of a kind of heavy caliber radiometer |
| CN108848375A (en) * | 2018-09-17 | 2018-11-20 | 西安远望图像技术有限公司 | Camera properties test device based on EMVA1288 standard |
| CN110186655A (en) * | 2019-06-25 | 2019-08-30 | 西安工业大学 | Imaging detection distance test system based on simulated target and optical energy attenuation device |
| CN111157225A (en) * | 2019-08-21 | 2020-05-15 | 南京理工大学 | Labview-based EMCCD chip full-performance parameter testing method |
| WO2020135540A1 (en) * | 2018-12-26 | 2020-07-02 | 深圳市太赫兹科技创新研究院有限公司 | Quantum yield measurement method |
| CN111537202A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | LED-based high-brightness low-stray-light monochromatic tunable light source system |
| CN112985777A (en) * | 2021-02-26 | 2021-06-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | Modulation transfer function test system and test method of EMCCD assembly |
| CN114295565A (en) * | 2021-12-28 | 2022-04-08 | 上海集成电路装备材料产业创新中心有限公司 | Method, apparatus, device and medium for determining quantum efficiency of image sensor |
| CN116295820A (en) * | 2023-05-19 | 2023-06-23 | 中国科学院长春光学精密机械与物理研究所 | Cascade integrating sphere light source |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105929351A (en) * | 2016-06-03 | 2016-09-07 | 中国电力科学研究院 | Test apparatus and test method of sensitivity of ultraviolet imager |
| CN105929351B (en) * | 2016-06-03 | 2019-06-04 | 中国电力科学研究院 | Test device and the test method of ultraviolet imager sensitivity |
| CN106768317A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The caliberating device and method of a kind of single-photon detector detection efficient |
| CN106768855A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The spectral responsivity measurement apparatus and method of a kind of heavy caliber radiometer |
| EP3421953A4 (en) * | 2016-11-14 | 2019-10-23 | The 41st Institute of China Electronics Technology Group Corporation | Measurement device and method for spectral responsivity of large-aperture radiometer |
| CN108848375A (en) * | 2018-09-17 | 2018-11-20 | 西安远望图像技术有限公司 | Camera properties test device based on EMVA1288 standard |
| CN108848375B (en) * | 2018-09-17 | 2024-03-12 | 西安远望图像技术有限公司 | Camera performance testing device based on EMVA1288 standard |
| WO2020135540A1 (en) * | 2018-12-26 | 2020-07-02 | 深圳市太赫兹科技创新研究院有限公司 | Quantum yield measurement method |
| CN110186655B (en) * | 2019-06-25 | 2024-02-20 | 西安工业大学 | Imaging detection distance testing system based on simulation target and optical energy attenuator |
| CN110186655A (en) * | 2019-06-25 | 2019-08-30 | 西安工业大学 | Imaging detection distance test system based on simulated target and optical energy attenuation device |
| CN111157225A (en) * | 2019-08-21 | 2020-05-15 | 南京理工大学 | Labview-based EMCCD chip full-performance parameter testing method |
| CN111537202A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | LED-based high-brightness low-stray-light monochromatic tunable light source system |
| CN112985777A (en) * | 2021-02-26 | 2021-06-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | Modulation transfer function test system and test method of EMCCD assembly |
| CN114295565A (en) * | 2021-12-28 | 2022-04-08 | 上海集成电路装备材料产业创新中心有限公司 | Method, apparatus, device and medium for determining quantum efficiency of image sensor |
| CN114295565B (en) * | 2021-12-28 | 2023-08-08 | 上海集成电路装备材料产业创新中心有限公司 | Method, apparatus, device and medium for measuring quantum efficiency of image sensor |
| CN116295820A (en) * | 2023-05-19 | 2023-06-23 | 中国科学院长春光学精密机械与物理研究所 | Cascade integrating sphere light source |
| CN116295820B (en) * | 2023-05-19 | 2023-08-08 | 中国科学院长春光学精密机械与物理研究所 | Cascade integrating sphere light source |
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Application publication date: 20160511 |