CN112985777A - Modulation transfer function test system and test method of EMCCD assembly - Google Patents

Modulation transfer function test system and test method of EMCCD assembly Download PDF

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Publication number
CN112985777A
CN112985777A CN202110214936.4A CN202110214936A CN112985777A CN 112985777 A CN112985777 A CN 112985777A CN 202110214936 A CN202110214936 A CN 202110214936A CN 112985777 A CN112985777 A CN 112985777A
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transfer function
modulation transfer
emccd
knife edge
image
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戴放
沈吉
常维静
那启跃
王仕鑫
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China North Industries Group Corp No 214 Research Institute Suzhou R&D Center
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China North Industries Group Corp No 214 Research Institute Suzhou R&D Center
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0292Testing optical properties of objectives by measuring the optical modulation transfer function

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Abstract

The invention discloses a modulation transfer function test system of an EMCCD assembly, which comprises a uniform monochromatic optical module, a rotating target, a double telecentric optical system, an EMCCD assembly to be tested and an upper computer which are sequentially connected. The homogeneous monochromatic light module consists of a bromine tungsten lamp light source, a monochromator, an optical fiber and an integrating sphere, and the homogeneous monochromatic light required by the test is output; the uniform monochromatic light output by the integrating sphere irradiates the rotating target, and the target image is displayed on the photosensitive surface of the EMCCD to be detected after passing through the double telecentric optical system; the EMCCD assembly to be tested is connected with an upper computer, and target images required by testing are collected through an upper computer program. And carrying out region selection on the collected knife edge target image, calculating a knife edge fitting slope, an edge response function and a line diffusion function, and further calculating to obtain a fitting curve of MTF and an MTF value at the Nyquist frequency. The system has simple control process and high stability, and can be used for evaluating the imaging performance of the EMCCD assembly.

Description

Modulation transfer function test system and test method of EMCCD assembly
Technical Field
The invention relates to the technical field of EMCCD, in particular to a system and a method for testing a modulation transfer function of an EMCCD assembly.
Background
The EMCCD, electron multiplying CCD, is a high-end photoelectric detection product with extremely high sensitivity in the detection field. The EMCCD realizes the controllable avalanche gain of signal charges by designing cascaded multiplication shift registers on a signal transfer horizontal path, and realizes the function of CCD charge multiplication.
The imaging quality of the photoelectric imaging system directly affects the definition of images observed by human eyes, so that it is very important to measure the imaging quality of the photoelectric imaging system through objective indexes. The indexes for evaluating the quality of the photoelectric imaging system are many, and mainly comprise an identification rate method, a star point inspection, a Modulation Transfer Function (MTF) and the like. Since the modulation transfer function quantitatively represents a large amount of image quality information provided by the star point in a function form, and also comprises the image quality information represented by the discrimination rate, and the modulation transfer function can be accurately and objectively and directly measured, the MTF is known as an index for objectively, comprehensively and accurately evaluating the imaging performance of the photoelectric imaging system, and has become a research focus in the military and civil fields of all countries.
There are many methods for testing the modulation transfer function, such as the pinhole method, the slit method, the conventional knife edge method, and the oblique knife edge method. The pinhole method and the slit method have higher requirements on a light source and a target, the inclined knife edge method is simple in test method, and the system is simple and convenient to build, so that the method is most used. However, the method has some problems, such as perspective distortion caused by the traditional lens in the process of presenting the inclined knife edge target on the photosensitive surface of the imaging chip, and in the focusing process, the imaging result is affected because the image formed is not clear due to improper focusing. The invention is achieved accordingly.
Disclosure of Invention
In view of the above technical problems, the present invention aims to: the system and the method for testing the modulation transfer function of the EMCCD assembly are simple in control process and high in stability, and can be used for evaluating the imaging performance of the EMCCD assembly.
The technical scheme of the invention is as follows:
the utility model provides a modulation transfer function test system of EMCCD subassembly, includes even monochromatic module, two telecentric optical system and rotatory target, the even monochromatic light of even monochromatic module output shines on rotatory target, through two telecentric optical system, makes the image of target present on the photosurface of EMCCD subassembly, the host computer is connected to the EMCCD subassembly, two telecentric optical system are including the first objective, aperture diaphragm and the second objective that set gradually, the aperture diaphragm sets up on the object space focal plane of the image space focal plane of first objective and second objective.
In the preferred technical scheme, the uniform monochromatic light module comprises a bromine tungsten lamp light source, a monochromator, an optical fiber and an integrating sphere, wherein the optical fiber is connected with the monochromator and the integrating sphere.
In a preferred technical scheme, a test program is arranged in the upper computer, and the test program comprises:
the control module is used for controlling the action of an instrument in the test system;
the image acquisition module is used for controlling the EMCCD assembly to be tested to acquire an inclined knife edge target image required by the test;
and the image processing module is used for calculating the modulation transfer function of the EMCCD component and the modulation transfer function value at the Nyquist frequency based on the acquired inclined knife edge target image.
In a preferred technical solution, the method for calculating a modulation transfer function of the image processing module includes:
preprocessing an image of the inclined knife edge target acquired by the imaging system, and filtering noise of the image;
selecting a knife edge area for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle of the knife edge;
projecting each line of pixels of the selected area to a first line of pixels along the direction of the knife edge;
solving an edge line diffusion function curve according to the over-sampled edge diffusion function curve;
and carrying out Hanning window adding processing on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function to obtain a modulation transfer function of the imaging system.
In a preferred technical solution, after obtaining the modulation transfer function of the imaging system, the method further includes: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
The invention also discloses a method for testing the modulation transfer function of the EMCCD assembly, which comprises the following steps:
s01: turning on a light source of a bromine tungsten lamp, and outputting monochromatic light required by the test by adjusting a monochromator;
s02: the optical fiber is connected with the monochromator and the integrating sphere, and outputs uniform monochromatic light to irradiate the rotating target, so that the rotating target is controlled to rotate to the inclined knife edge target position;
s03: connecting an EMCCD assembly to be tested with an upper computer, and collecting an inclined knife edge target image as a test material through an upper computer program;
s04: and calculating to obtain a modulation transfer function of the EMCCD component and a modulation transfer function value at the Nyquist frequency based on the acquired knife edge target image.
In a preferred technical solution, the method for calculating the modulation transfer function in step S04 includes:
preprocessing an image of the inclined knife edge target acquired by the imaging system, and filtering noise of the image;
selecting a knife edge area for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle of the knife edge;
projecting each line of pixels of the selected area to a first line of pixels along the direction of the knife edge;
solving an edge line diffusion function curve according to the over-sampled edge diffusion function curve;
and carrying out Hanning window adding processing on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function to obtain a modulation transfer function of the imaging system.
In a preferred technical solution, after obtaining the modulation transfer function of the imaging system, the method further includes: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
Compared with the prior art, the invention has the advantages that:
1. the invention adopts a double telecentric optical system, combines the advantages of an object-side telecentric optical system and an image-side telecentric optical system, and can avoid the measurement errors generated by the two methods, thereby ensuring the measurement precision. The MTF curve of the EMCCD component and the MTF value at the nyquist frequency can be calculated. The imaging performance of the EMCCD component to be tested can be accurately judged according to the MTF value.
2. The invention has simple control process and high stability.
Drawings
The invention is further described with reference to the following figures and examples:
FIG. 1 is a schematic diagram of an object-side telecentric optical system of a conventional telecentric optical system;
FIG. 2 is a schematic diagram of an image-side telecentric optical system of a conventional telecentric optical system;
FIG. 3 is a schematic diagram of a double telecentric optical system of the present invention;
FIG. 4 is a block diagram of a modulation transfer function test system for an EMCCD assembly of the present invention;
fig. 5 is a flow chart of a modulation transfer function calculation method of the EMCCD component of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
As shown in fig. 4, a modulation transfer function testing system of an EMCCD component includes a uniform monochromatic light module, a double telecentric optical system 6, a rotating target 5, and an upper computer 7, the uniform monochromatic light output by the uniform monochromatic light module irradiates the rotating target 5, and the image of the target is displayed on the photosensitive surface of the EMCCD component through the double telecentric optical system 6, and the EMCCD component is connected to the upper computer 7. As shown in fig. 3, the double telecentric optical system 6 includes a first objective lens 61, an aperture stop 62, and a second objective lens 63, which are arranged in this order, and the aperture stop 62 is arranged on the image-side focal plane of the first objective lens 61 and the object-side focal plane of the second objective lens 63.
In a preferred embodiment, as shown in fig. 4, the uniform monochromatic light module includes a light source 1 of a tungsten bromide lamp, a monochromator 2, an optical fiber 3 and an integrating sphere 4, the optical fiber 3 connects the monochromator 2 and the integrating sphere 4, and the uniform monochromatic light required by the experiment is generated by the integrating sphere 4.
As shown in fig. 3, the double telecentric optical system is designed based on the traditional telecentric optical system, and combines the advantages of the object-side telecentric optical system and the image-side telecentric optical system, so that perspective distortion caused by the traditional lens can be avoided, and the measurement errors generated by the two methods can be avoided, thereby ensuring the measurement accuracy.
The traditional telecentric optical system is divided into an object-side telecentric optical system and an image-side telecentric optical system. In an object-side telecentric optical system, in order to eliminate or reduce measurement errors caused by parallax, an aperture stop is disposed on an image-side focal plane of an objective lens, and only an object-side chief ray is imaged through an image-side focal point where the aperture stop is located, as shown in fig. 1, so that all rays can be regarded as coming from infinity. The design of the optical path ensures that the principal ray of the light beam emitted by each point on the object does not change along with the movement of the position of the object, namely, the magnification of the obtained image does not change along with the change of the object distance within a certain object distance range.
In the image-side telecentric optical system shown in fig. 2, the aperture stop is placed on the object focal plane of the lens, and the chief rays of the light beam entering the lens all pass through the object focal point where the center of the aperture stop is located, and then the chief rays are parallel to the optical axis on the image side. Therefore, the change of the position of the image plane does not influence the imaging size of the optical system, namely, the change of the image distance does not influence the size of the image. When the object to be measured is a moving object which changes in real time, a large error occurs in the object-side telecentric optical path and the image-side telecentric optical path.
As shown in fig. 4, a test program is provided in the upper computer 7, and the test program includes:
the control module 8 is used for controlling the action of instruments in the test system; for example, the monochromator 2 is controlled to output monochromatic light with different wavelengths; controlling the rotary target 5 to rotate and switching to different target positions;
the image acquisition module 9 is used for controlling the EMCCD assembly to be tested to acquire an inclined knife edge target image required by the test;
and the image processing module 10 is used for calculating and obtaining a modulation transfer function of the EMCCD assembly and a modulation transfer function value at the Nyquist frequency based on the acquired inclined knife edge target image.
In a preferred embodiment, as shown in fig. 5, the method for calculating the modulation transfer function of the image processing module includes:
preprocessing an image of an inclined knife edge target acquired by an imaging system, and filtering out noise 11 of the image;
selecting a knife edge area 12 for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle 13 of the knife edge;
projecting 14 each row of pixels of the selected area to the first row of pixels along the direction of the knife edge;
calculating an edge line diffusion function curve 15 according to the oversampled edge diffusion function (ESF) curve;
and carrying out Hanning window adding treatment 16 on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function (LSF) to obtain a modulation transfer function 17 of the imaging system.
In a preferred embodiment, obtaining the modulation transfer function 17 of the imaging system further comprises: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
In the specific implementation, an upper computer program is compiled by adopting Labview, and the upper computer program can control each instrument in the test system, such as controlling a monochromator to output monochromatic light with different wavelengths, controlling a rotary target to rotate to a knife edge target position, and controlling a Cameralink board card to acquire a test target image. According to the acquired digital image, the image information is analyzed and processed through a Matlab node in Labview, and the MTF curve of the device is obtained through calculation. And judging the imaging performance of the EMCCD component to be tested according to the MTF value.
In another embodiment, the invention also discloses a method for testing the modulation transfer function of the EMCCD component, which comprises the following steps:
s01: turning on a light source 1 of a bromine tungsten lamp, and outputting monochromatic light required by the test by adjusting a monochromator 2;
s02: the optical fiber 3 is connected with the monochromator 2 and the integrating sphere 4, outputs uniform monochromatic light to irradiate the rotating target 5, and controls the rotating target 5 to rotate to the inclined knife edge target position;
s03: connecting an EMCCD assembly to be tested with an upper computer 7, and collecting an inclined knife edge target image as a test material through an upper computer program;
s04: and calculating to obtain a modulation transfer function of the EMCCD component and a modulation transfer function value at the Nyquist frequency based on the acquired knife edge target image.
As shown in fig. 5, the method for calculating the modulation transfer function in step S04 includes:
preprocessing an image of an inclined knife edge target acquired by an imaging system, and filtering out noise 11 of the image;
selecting a knife edge area 12 for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle 13 of the knife edge;
projecting 14 each row of pixels of the selected area to the first row of pixels along the direction of the knife edge;
calculating an edge line diffusion function curve 15 according to the oversampled edge diffusion function (ESF) curve;
and carrying out Hanning window adding treatment 16 on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function (LSF) to obtain a modulation transfer function 17 of the imaging system.
In a preferred embodiment, obtaining the modulation transfer function 17 of the imaging system further comprises: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.

Claims (8)

1. The utility model provides a modulation transfer function test system of EMCCD subassembly, its characterized in that, includes even monochromatic optical module, two telecentric optics and rotatory target, the even monochromatic light of even monochromatic optical module output shines on rotatory target, through two telecentric optics, makes the image of target present on the photosurface of EMCCD subassembly, the EMCCD subassembly connects the host computer, two telecentric optics are including the first objective, aperture diaphragm and the second objective that set gradually, the aperture diaphragm sets up on the object space focal plane of the image space focal plane of first objective and second objective.
2. The modulation transfer function testing system of the EMCCD assembly of claim 1, wherein the uniform monochromatic light module comprises a bromotungsten lamp light source, a monochromator, an optical fiber and an integrating sphere, the optical fiber connecting the monochromator and the integrating sphere.
3. The system for testing the modulation transfer function of the EMCCD assembly according to claim 1, wherein a test program is provided in the upper computer, the test program including:
the control module is used for controlling the action of an instrument in the test system;
the image acquisition module is used for controlling the EMCCD assembly to be tested to acquire an inclined knife edge target image required by the test;
and the image processing module is used for calculating the modulation transfer function of the EMCCD component and the modulation transfer function value at the Nyquist frequency based on the acquired inclined knife edge target image.
4. The system for testing the modulation transfer function of an EMCCD assembly of claim 3, wherein the method for calculating the modulation transfer function of the image processing module comprises:
preprocessing an image of the inclined knife edge target acquired by the imaging system, and filtering noise of the image;
selecting a knife edge area for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle of the knife edge;
projecting each line of pixels of the selected area to a first line of pixels along the direction of the knife edge;
solving an edge line diffusion function curve according to the over-sampled edge diffusion function curve;
and carrying out Hanning window adding processing on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function to obtain a modulation transfer function of the imaging system.
5. The system for testing the modulation transfer function of an EMCCD assembly of claim 4, further comprising, after obtaining the modulation transfer function of the imaging system: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
6. A method for testing the modulation transfer function of an EMCCD assembly is characterized by comprising the following steps:
s01: turning on a light source of a bromine tungsten lamp, and outputting monochromatic light required by the test by adjusting a monochromator;
s02: the optical fiber is connected with the monochromator and the integrating sphere, and outputs uniform monochromatic light to irradiate the rotating target, so that the rotating target is controlled to rotate to the inclined knife edge target position;
s03: connecting an EMCCD assembly to be tested with an upper computer, and collecting an inclined knife edge target image as a test material through an upper computer program;
s04: and calculating to obtain a modulation transfer function of the EMCCD component and a modulation transfer function value at the Nyquist frequency based on the acquired knife edge target image.
7. The method for testing the modulation transfer function of the EMCCD assembly according to claim 6, wherein the method for calculating the modulation transfer function in step S04 includes:
preprocessing an image of the inclined knife edge target acquired by the imaging system, and filtering noise of the image;
selecting a knife edge area for calculation;
solving the edge position of the knife edge of each row in the selected area;
calculating the inclination angle of the knife edge;
projecting each line of pixels of the selected area to a first line of pixels along the direction of the knife edge;
solving an edge line diffusion function curve according to the over-sampled edge diffusion function curve;
and carrying out Hanning window adding processing on the edge line diffusion function, and carrying out Fourier transform, B-spline fitting and modulus taking on the edge line diffusion function to obtain a modulation transfer function of the imaging system.
8. The method for testing the modulation transfer function of the EMCCD assembly according to claim 7, further comprising, after obtaining the modulation transfer function of the imaging system: and performing discrete Fourier transform on the edge line diffusion function curve after the Hanning window is added to obtain discrete data of the modulation transfer function of the imaging system, and performing B-spline fitting and modulus taking on the obtained discrete modulation transfer function data to obtain a continuous modulation transfer function curve of the imaging system.
CN202110214936.4A 2021-02-26 2021-02-26 Modulation transfer function test system and test method of EMCCD assembly Pending CN112985777A (en)

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100044555A1 (en) * 2006-08-18 2010-02-25 Kyocera Corporation Image Pickup Apparatus and Method for Manufacturing the Same
CN101813558A (en) * 2010-04-29 2010-08-25 苏州大学 Device for measuring modulation transfer function of optical system and method thereof
CN202472096U (en) * 2012-03-16 2012-10-03 新朔光电科技股份有限公司 Dual-telecentric continuous zoom imaging device
CN103913293A (en) * 2014-03-12 2014-07-09 华北水利水电大学 Optical transfer model measuring method in coding structured light system
CN104360463A (en) * 2014-12-05 2015-02-18 桂林电子科技大学 Three-distal coaxial illumination imaging optical system
CN105571834A (en) * 2015-12-24 2016-05-11 中国电子科技集团公司第四十一研究所 Measuring device of quantum efficiency of CCD device
CN106441159A (en) * 2016-12-07 2017-02-22 西京学院 Optical fine measurement method based on parallel imaging
CN106768890A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 For the gray scale cosine distribution optical target analogue means of modulation transfer function detection
CN108195565A (en) * 2017-12-28 2018-06-22 长春长光精密仪器集团有限公司 A kind of imaging sensor transmission function test device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100044555A1 (en) * 2006-08-18 2010-02-25 Kyocera Corporation Image Pickup Apparatus and Method for Manufacturing the Same
CN101813558A (en) * 2010-04-29 2010-08-25 苏州大学 Device for measuring modulation transfer function of optical system and method thereof
CN202472096U (en) * 2012-03-16 2012-10-03 新朔光电科技股份有限公司 Dual-telecentric continuous zoom imaging device
CN103913293A (en) * 2014-03-12 2014-07-09 华北水利水电大学 Optical transfer model measuring method in coding structured light system
CN104360463A (en) * 2014-12-05 2015-02-18 桂林电子科技大学 Three-distal coaxial illumination imaging optical system
CN105571834A (en) * 2015-12-24 2016-05-11 中国电子科技集团公司第四十一研究所 Measuring device of quantum efficiency of CCD device
CN106441159A (en) * 2016-12-07 2017-02-22 西京学院 Optical fine measurement method based on parallel imaging
CN106768890A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 For the gray scale cosine distribution optical target analogue means of modulation transfer function detection
CN108195565A (en) * 2017-12-28 2018-06-22 长春长光精密仪器集团有限公司 A kind of imaging sensor transmission function test device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈一鸣: "电子倍增CCD成像系统调制传递函数测量及优化方法", 《中国优秀硕士学位论文全文数据库 信息科技辑(月刊)》 *

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Application publication date: 20210618