CN101813558A - Device for measuring modulation transfer function of optical system and method thereof - Google Patents

Device for measuring modulation transfer function of optical system and method thereof Download PDF

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Publication number
CN101813558A
CN101813558A CN 201010159687 CN201010159687A CN101813558A CN 101813558 A CN101813558 A CN 101813558A CN 201010159687 CN201010159687 CN 201010159687 CN 201010159687 A CN201010159687 A CN 201010159687A CN 101813558 A CN101813558 A CN 101813558A
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transfer function
target
optical system
modulation transfer
knife edge
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陈新华
周建康
陈宇恒
季轶群
沈为民
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Suzhou University
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Suzhou University
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Abstract

The invention discloses a device for measuring a modulation transfer function of an optical system and a method thereof. A target generator of the device comprises a knife edge target (4), a light source (1) and an electrical machine (3), wherein the electrical machine drives the knife edge target (4), so that an inclined angle beta is formed between the arrangement direction of a knife edge pixel (12) of the knife edge target (4) and that of a pixel (13) of an area array detector, and the inclined angle meets the following condition: ds=d sin beta, wherein the ds is a sampling distance, and the d is the size of the edge length of the pixel of the area array detector. When measuring, the modulation transfer function, the electrical machine drives the knife edge target (4) to rotate at the angle of beta to perform image data collecting and data processing so as to obtain modulation transfer function of the optical system to be measured. The invention adopts the knife edge target to realize an oversampling technology and improve the sampling rate, thereby being capable of measuring the modulation transfer function of the optical system to be measured without a relay amplifying system, being capable of measuring the maximum frequency which is higher than the Nyquist frequency of the area array detector, simplifying a measuring system, and avoiding complex assembling and correcting work when manufacturing apparatuses.

Description

A kind of device and method of measuring modulation transfer function of optical system
Technical field
The present invention relates to a kind of devices and methods therefor of measuring modulation transfer function of optical system.
Background technology
Modulation transfer function has reflected the frequency response characteristic of optical system or electro-optical system, is the important performance indexes of quantitative evaluation optical system or electro-optical system image quality.
Early stage modulation transfer function is measured and is adopted scanning method, promptly utilizes single-element detector to scan on image planes and finishes measurement.Maturation along with planar array detectors such as CCD, CMOS, image Fourier analysis method is mainly adopted in the measurement of modulation transfer function at present, promptly adopt pin hole, slit etc. as target, utilize CCD or CMOS planar array detector to survey to utilize Computer Analysis to handle after the image planes light distribution and finish measurement.Compare with scanning method, image Fourier analysis method need not scanning mechanism, and it is fast to have a measuring speed, installs advantages such as simple.
Because detectors such as CCD or CMOS are the discrete type device, according to sampling thheorem, aliasing can take place in the image spectrum that surpasses the Nyquist frequency of planar array detector, when therefore utilizing the direct reception of planar array detector optical system imaging to be measured to measure modulation transfer function, the highest frequency that can measure is subject to the Nyquist frequency of planar array detector, can't measure the modulating transfer function value that optical lens to be measured is higher than Nyquist frequency place.
In order to address this problem, adopting the relaying amplification system to treat photometry system imaging when modulation transfer function is measured at present before planar array detector amplifies, improve the sample frequency of the image planes place planar array detector of optical system to be measured, thereby can measure the modulating transfer function value that optical lens to be measured is higher than Nyquist frequency place.
Adopt the relaying amplification system to have following problem: the picture element of (1) relaying amplification system can directly have influence on the measuring accuracy of modulation transfer function; (2) need demarcate the parameters such as enlargement factor of relay system are strict, calibrated error can be brought the increase of modulation transfer function measuring error; (3) powerful relaying amplification system can make the energy on the detector pixel weaken, and has reduced signal to noise ratio (S/N ratio); (4) increase of adopting the relaying amplification system can bring surveying instrument volume and cost.
Therefore, be necessary to provide a kind of measurement mechanism and measuring method of modulation transfer function, can not use the relaying amplification system, can treat the modulating transfer function value that the photometry camera lens is higher than Nyquist frequency place yet and measure, promptly the highest frequency of Ce Lianging is not subjected to the restriction of detector Nyquist frequency.
Summary of the invention
The object of the invention provides a kind of simple in structure, is convenient to make good function expansibility, and the method and the device of the high measurement modulation transfer function of optical system of sampling rate.
For achieving the above object, the technical solution used in the present invention is: a kind of device of measuring modulation transfer function of optical system, and it comprises: target generator, focus planardetector, linear motion platform, detector driving and video acquisition module and data handling system; Described target generator comprises knife edge target, light source and motor, and the motor-driven knife edge target makes the edge of a knife picture of knife edge target and the pixel orientation of planar array detector form angle β, and this angle satisfies condition: d s=dsin β, wherein, d sBe sampling interval, d is the size dimension of the pixel of planar array detector.
Described knife edge target is hilted broadsword mouth target or double-pole mouth target.
Described planar array detector is CCD planar array detector or CMOS planar array detector.
The present invention also provides a kind of method of measuring modulation transfer function of optical system, comprises the steps:
(1) optical system to be measured is placed between target generator and the focus planardetector, and make the optical axis of optical system to be measured and the optical axis coincidence of target generator;
(2) the angle β of the pixel orientation of the edge of a knife picture of setting knife edge target and planar array detector, this angle satisfies d s=dsin β, wherein, d sBe sampling interval, d is the size dimension of the pixel of planar array detector, and the motor-driven knife edge target is rotated the β angle;
(3) linear motion platform makes detector be positioned at the image planes place of optical system to be measured along the optical axis direction mobile detector;
(4) gather the view data that detector is exported,, obtain modulation transfer function of optical system to be measured through data processing.
Described data processing comprises the steps:
(1) edge of a knife that detector is collected carries out interpolation processing as intensity profile, and obtaining sampling interval is d sThe edge of a knife as the intensity profile curve, carry out smoothing processing again, obtain the edge spread function of optical system to be measured, after differential is handled, obtain line spread function;
(2) line spread function is carried out Fourier transform, the result is carried out modulo operation, obtain initial modulating transfer function value;
(3) the initial modulating transfer function value that step 2 is obtained is removed the influence of the modulating transfer function value of proving installation itself, obtains the modulating transfer function value of optical system to be measured.
Compared with prior art, the present invention has following characteristics:
1, the present invention adopts knife edge target to realize oversampling technique, improved sampling rate, therefore, need not to adopt the relaying amplification system can measure the modulation transfer function of optical system to be measured, measurable highest frequency is higher than the Nyquist frequency of planar array detector, simplify measuring system, avoided assembling and calibration operation complicated in the instrument manufacture process.
2, the present invention adopts the edge of a knife as target, and the specification that need change target when measuring with the slit target with the use pin hole according to the optical parametric of different camera lenses to be measured is compared, and need not to change target during measurement, and the stability of measuring system is high.Can adopt double-pole mouth target among the present invention simultaneously, only need one-shot measurement, can obtain the OTF value of optical system meridian to be measured and sagitta of arc direction.
3, the present invention can rotate knife edge target by motor, adjusts the angle between knife edge target and the orientation of planar array detector pixel, changes sampling rate according to measuring needs.
4, the present invention is simple in structure, and good function expansibility not only can be measured the modulation transfer function of optical system, modulation transfer function that can also the measuring light electric system.
Description of drawings
The structural representation of a kind of modulation transfer function measurement device that Fig. 1 provides for the embodiment of the invention;
The edge of a knife picture of a kind of modulation transfer function measurement device knife edge target that Fig. 2 provides for the embodiment of the invention and the relative position relation synoptic diagram of planar array detector pixel;
The flow chart of data processing figure of a kind of modulation transfer function measurement method that Fig. 3 provides for the embodiment of the invention;
The knife edge target synoptic diagram of a kind of modulation transfer function measurement device that Fig. 4 provides for the embodiment of the invention;
Among the figure: 1, light source; 2, optical filter; 3, motor; 4, knife edge target; 5, target generator; 6, collimator objective; 7, optical system to be measured; 8, linear motion platform; 9, focus planardetector; 10, detector drives and video acquisition module; 11, data handling system (computing machine); 12, the edge of a knife picture of knife edge target; 13, the pixel of planar array detector.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described:
Embodiment one: referring to accompanying drawing 1, the structural representation of the modulation transfer function measurement device that it provides for present embodiment, this device comprises target generator 5, linear motion platform 8, focus planardetector 9, detector drives and video acquisition module 10, data handling system (computing machine) 11, the optical system 7 of tested modulation transfer function.
Target generator 5 is used to the modulation transfer function test that specific edge of a knife target is provided, and it comprises light source 1, optical filter 2, motor 3, knife edge target 4, collimator objective 6.Wherein, knife edge target places the focus place of collimator objective, and light source is used to the target that throws light on, by changing different optical filters, but the output wavelength of conversion target generator.Motor can drive target and rotate around its center, and the angle of rotation is accurately controlled by motor.
Focus planardetector 9 is used for surveying the light distribution of optical system to be measured to the knife edge target imaging of target generator, and detector surface is vertical with the optical axis of target generator.Focus planardetector adopts CCD planar array detector or CMOS planar array detector, the pixel of planar array detector, and its pixel dimension is d.
Referring to accompanying drawing 2, it is the edge of a knife of a kind of modulation transfer function measurement device knife edge target of providing of present embodiment and the relative position relation synoptic diagram of planar array detector pixel; When rotational angle is 0 °, the edge of a knife of knife edge target as 12 with the angle of the orientation of planar array detector pixel 13 be 0 °.Rotate target, can adjust the angle β of the edge of a knife and the orientation of detector pixel, during measurement, the size of this angle satisfies d s=dsin β, wherein, d sBe sampling interval, d is the pixel dimension of planar array detector.
Linear motion platform 8 is used to drive focus planardetector and moves along optical axis direction, makes detector be positioned at the focus place of optical system to be measured.
The focal plane drives and video acquisition module 10 comprises two parts: focal plane driving circuit and video capture circuit.The focal plane driving circuit provides required power supply of focus planardetector operate as normal and drive control signal, and video capture circuit carries out operations such as pre-service, buffer memory to detector output signal, and image data transmission is to data handling system (computing machine) 11 the most at last.
Data handling system receives view data, handles, and man-machine interface is provided.The functional module that computer software mainly comprises and function is as follows separately:
(1) parameter is provided with module
Measurement mechanism and tested parameter of optical system are provided with.Systematic parameter mainly comprises: parameters such as illumination wavelengths, collimator objective focal length; Tested optical system parameter mainly comprises: parameters such as the focal length of tested camera lens, f number.
(2) target motor and platform motor movement control module
According to the numerical value of setting, the rotational angle of control target motor and the displacement of linear motion platform.
(3) detector image collection and display module
Gather and show the image of detector output, and can regulate the brightness of image, contrast etc.
(4) MTF calculates and MTF curve display module
According to the mtf value of algorithm computation optical system to be measured and show the MTF curve, specific algorithm is described in the calculation process of following steps four.
(5) demonstration of test result, preservation and print module
The proving installation that utilizes present embodiment to provide, the measuring method of measuring modulation transfer function is as follows:
Step 1 places optical system 7 to be measured between target generator and the focus planardetector, and makes the optical axis of optical system to be measured and the optical axis coincidence of target generator.
Step 2, the angle β of the setting edge of a knife and the orientation of planar array detector pixel, and drive motor rotates target.
As shown in Figure 2, as 12 and the angle β of the orientation of planar array detector pixel 13 and the pixel dimension d of planar array detector, utilize formula (1) to determine sampling interval d according to the edge of a knife s
d S＝dsinβ
Step 3 drives the linear platform motor, along the optical axis direction mobile detector, makes that the edge of a knife picture that is obtained on the detector is the most clear, and can think that detector is positioned at the image planes place of optical system to be measured this moment.
Step 4 is gathered the view data that detector is exported, and 3 algorithm flow calculates modulation transfer function of optical system to be measured with reference to the accompanying drawings.Concrete calculation process is as follows:
The edge of a knife that detector is collected carries out interpolation as intensity profile, and to obtain sampling interval be d sThe edge of a knife as the intensity profile curve, and carry out smoothing processing, obtain the edge spread function (ESF) of optical system to be measured, and carry out differential, obtain line spread function (LSF);
Line spread function is carried out Fourier transform, and the result is carried out modulo operation, obtain modulating transfer function value MTF RThe modulating transfer function value that obtain this moment is not the modulating transfer function value of optical system to be measured, also needs to revise by following calculating:
MTF T ( f ) = MTF R ( f ) MTF E ( f )
In the formula, MTF EBe the modulation transfer function of proving installation itself, remove MTF EInfluence after, finally obtain the modulating transfer function value MTF of optical system to be measured T
Referring to accompanying drawing 4, it is the pattern of each knife edge target in the present embodiment, wherein, (a) is hilted broadsword mouth target, is double-pole mouth target (b) and (c).When utilizing (a) target to measure, one-shot measurement can only obtain the modulating transfer function value of the unified direction of optical system to be measured, if will obtain the modulating transfer function value of another direction, carries out one-shot measurement again after need utilizing motor with the target half-twist.Utilize (b) and (c) when measuring, need one-shot measurement only can obtain the modulating transfer function value of optical system meridian to be measured and sagitta of arc both direction simultaneously, helps quick measurement.

Claims (5)

1. device of measuring modulation transfer function of optical system, it comprises: target generator (5), focus planardetector (9), linear motion platform (8), detector drive and video acquisition module (10) and data handling system (11); It is characterized in that: described target generator comprises knife edge target (4), light source (1) and motor (3), motor-driven knife edge target (4), make the edge of a knife picture (12) of knife edge target and pixel (13) the orientation formation angle β of planar array detector, this angle satisfies condition: d s=dsin β, wherein, d sBe sampling interval, d is the size dimension of the pixel of planar array detector.
2. a kind of device of measuring modulation transfer function of optical system according to claim 1 is characterized in that: described knife edge target is hilted broadsword mouth target or double-pole mouth target.
3. a kind of device of measuring modulation transfer function of optical system according to claim 1 is characterized in that: described planar array detector is CCD planar array detector or CMOS planar array detector.
4. a method of measuring modulation transfer function of optical system is characterized in that comprising the steps:
(1) optical system to be measured (7) is placed between target generator (5) and the focus planardetector (9), and make the optical axis of optical system to be measured and the optical axis coincidence of target generator;
(2) set the edge of a knife picture (12) of knife edge target and the angle β of pixel (13) orientation of planar array detector, this angle satisfies d s=dsin β, wherein, d sBe sampling interval, d is the size dimension of the pixel of planar array detector, and motor-driven knife edge target (4) is rotated the β angle;
(3) linear motion platform (8) makes detector be positioned at the image planes place of optical system to be measured along the optical axis direction mobile detector;
(4) gather the view data that detector is exported, handle, obtain modulation transfer function of optical system to be measured through data handling system.
5. a kind of method of measuring modulation transfer function according to claim 4, it is characterized in that: described data processing comprises the steps:
(1) edge of a knife that detector is collected carries out interpolation processing as intensity profile, and obtaining sampling interval is d sThe edge of a knife as the intensity profile curve, carry out smoothing processing again, obtain the edge spread function of optical system to be measured, after differential is handled, obtain line spread function;
(2) line spread function is carried out Fourier transform, the result is carried out modulo operation, obtain initial modulating transfer function value;
(3) the initial modulating transfer function value that step 2 is obtained is removed the influence of the modulating transfer function value of proving installation itself, obtains the modulating transfer function value of optical system to be measured.
CN 201010159687 2010-04-29 2010-04-29 Device for measuring modulation transfer function of optical system and method thereof Pending CN101813558A (en)

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CN102607810A (en) * 2012-03-23 2012-07-25 中国科学院长春光学精密机械与物理研究所 Method for detecting CCD (Charge Coupled Device) camera transfer function by using novel target
CN102721530A (en) * 2012-06-05 2012-10-10 中国电子科技集团公司第四十一研究所 Double-edge scanning measurement method for infrared focal plane array (IRFPA) modulation transfer function (MTF) and device thereof
CN102735429A (en) * 2012-06-13 2012-10-17 中国科学院长春光学精密机械与物理研究所 Equipment for CCD (Charge Coupled Device) modulation transfer function test and testing method of equipment
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