CN102721530B - A kind of double knife edges scanning survey method of infrared focal plane array modulation transfer function and device thereof - Google Patents
A kind of double knife edges scanning survey method of infrared focal plane array modulation transfer function and device thereof Download PDFInfo
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Abstract
A kind of double knife edges scanning survey method of infrared focal plane array modulation transfer function and special purpose device thereof.This method chooses the adjustable double knife edges of logical optical width as target, knife edge scanning is realized by double-paraboloid mirror reflection 1: 1 imaging optical system and three-dimensional precise displacement mechanism, obtain edge of a knife spread function ESF (x), then differentiate is carried out to edge of a knife spread function ESF (x) and obtain line spread function LSF (x), finally carry out discrete Fourier transform (DFT) and obtain MTF.Present invention employs double knife edges scan mode and three the Fermi functions carry out matching, overcome the defect of fitting of a polynomial.The method applicability is strong, measuring accuracy is high, can cover short-wave infrared, medium-wave infrared, LONG WAVE INFRARED three wave bands.
Description
Technical field
The present invention relates to a kind of double knife edges scanning survey method and special purpose device thereof of infrared focal plane array modulation transfer function.
Background technology
Infrared focal plane array (IRFPA) modulation transfer function (MTF) is: within the scope of nyquist frequency, under the modulation effect of irradiation of sine space frequency, and the degree of modulation of IRFPA output signal and the ratio of irradiation signal madulation degree.MTF is the function of spatial frequency.
For IRFPA, traditional MTF measuring method has: contrast method and scanning method.Contrast method is by measuring IRFPA for the response of sinusoidal pattern (or bar target), and obtained by the ratio of the contrast of thing under different space frequency and picture, it is a kind of direct measuring method.According to definition, MTF is the contrast transfer coefficient of IRFPA offset of sinusoidal pattern, therefore only the contrast of the thing of the sinusoidal pattern recorded and picture need be divided by and can be obtained MTF.If the contrast of getting thing is 1, then the contrast of its picture just equals MTF.Contrast method can utilize interfere laser instrument formed Young fringe realize, but due to laser instrument export be single wavelength, the mtf value recorded can not reflect the multispectral MTF characteristic of tested IRFPA, and thus laser methods applicability is not strong.Contrast method also can utilize white noise target, and after the output of white noise target, input noise power spectrum being divided by, evolution is to obtain MTF, although white noise target comprises various frequency, this method measuring accuracy is very limited, there is the weakness that applicability is not strong equally.Generally, limited than the measuring accuracy of degree method, applicability is poor, thus domestic and international all fewer.
Scanning method adopts targeted scans to move, and by measuring IRFPA to the response of echo signal, then carry out Fourier transform to obtain MTF, it is a kind of indirect measurement method.According to the difference of used target, the indirect method of measurement can be divided into pointolite scanning method, slit scan method etc.The respond packet of IRFPA to target light signal contains MTF information.If target is a pointolite, the response of IRFPA is point spread function (PSF-PointSpreadFunction); If target is a slit, the response of IRFPA is a line spread function (LSF-LineSpreadFunction).Integral operation is carried out to line spread function and can obtain edge of a knife spread function (ESF-EdgeSpreadFunction).
During actual measurement, desirable pointolite can not obtain, and is usually similar to small-sized infrared little luminous point.Little luminous point target is approaching impulse function, and the MTF recorded also needs to add modifying factor correction.If the size of infrared little luminous point is greater than the size of IRFPA pixel, then the light distribution of little luminous point must be stated comprehensively, to calculate the radiant quantity be irradiated on pixel, can bring extreme difficulties like this to correction.In long wave infrared region, because diffraction effect is relatively more remarkable, the size of little luminous point is difficult to accomplish less than 30 μm.The size of a lot of IRFPA pixel has been less than 30 μm × 30 μm at present, and from the development trend of IRFPA, pixel dimension can be more and more less, and the infrared little luminous point that will obtain from now on close to IRFPA pixel dimension is difficult especially.Therefore there is larger limitation in pointolite method.
The thinking of slit scan method is the desirable line source of simulation one, inputs the thing of a δ (x), then carry out Fourier transform to the transform LSF (x) exported, obtain MTF after asking mould to tested IRFPA.
When entrance slit is finite width, the Fourier transform of transform is also not equal to optical transfer function OTF, but a difference modifying factor.The MTF that slit scan method records is:
In formula: f-spatial frequency; F [L ' (x)]-as the Fourier transform of luminance function;
B-slit width.
When slit width is tending towards 0, modifying factor is tending towards 1; And when slit width increases, modifying factor increases for the impact of MTF result.Therefore ideally, slit does the smaller the better.But during practical application, if slit is too little, will be very weak by its light intensity, cause signal to noise ratio (S/N ratio) very low.In addition too small slit also can bring the impact of diffraction effect, especially in long wave infrared region.This is the problem of a contradiction, can only take the way of trading off.Can find out, also there is larger limitation in Narrow slit.
Pointolite scanning method, slit scan method use the anti-system of Offner tri-or Cassegrain system to carry out imaging to target usually.There is serious astigmatism outward at axle in the anti-system of Offner tri-, is only suitable for point-to-point imaging, and the F number of system is difficult to accomplish to be less than 2.Convex reflecting mirror in Cassegrain system is very large to the central obscuration of concave mirror, and there is serious coma outward at axle in system, the optical system identical with other F number is compared, and the amplitude that the MTF of Cassegrain system declines compared with diffraction limit is much bigger.
Pointolite scanning method, slit scan method work under requiring focusing mode, focus on whether well directly affect MTF measurement result.And desirable focus state is difficult to realize, existing MTF measuring method does not adopt and focuses computing technique, cannot eliminate the impact that out of focus is brought.
For the knife edge scanning curve of similar Spline smoothing, traditional curve-fitting method is fitting of a polynomial.It is originally that vibration appears in smooth bright border or dark side that this approximating method often causes on scanning curve, and it is suitable only for data corresponding to knife-edge, is not too applicable to from knife-edge data point slightly at a distance and the data point of height luminance part.Therefore there is the shortcoming that can not make full use of edge of a knife two ends brightness uniformity data point in fitting of a polynomial.
Summary of the invention
For above-mentioned shortcoming, the invention provides a kind of double knife edges scanning survey method and device of infrared focal plane array modulation transfer function, overcome the defect of contrast method, pointolite scanning method and slit scan method.
An object of the present invention is achieved through the following technical solutions:
A kind of infrared focal plane array modulation transfer function measurement method based on double knife edges scanning.This method chooses double knife edges as target, moved by knife edge scanning and obtain edge of a knife spread function ESF (x), then differentiate is carried out to edge of a knife spread function ESF (x) and obtain line spread function LSF (x), finally carry out discrete Fourier transform (DFT) and obtain MTF.Judgement cannot be carried out the external interference (as mechanical vibration, interference of stray light, electrical noise interference etc.) in scanning process and got rid of when considering and only use single-edge scanning, sweep test efficiency is not high yet, present invention employs double knife edges scan mode.Because more responsive to noise ratio, the traditional disposal route of differentiating adopted first adopts fitting of a polynomial to edge of a knife spread function, present invention employs three the Fermi functions and carry out matching, overcome the defect of fitting of a polynomial.Present invention employs in addition and focus computing technique, eliminate the impact that out of focus is brought preferably.
The present invention provides a kind of infrared focal plane array modulation transfer function measurement method based on double knife edges scanning and special purpose device, overcome the defect of contrast method, pointolite scanning method and slit scan method, testing efficiency doubles than single-edge scanning method, be conducive to judging measured device leveling degree and by external interference situation, knife edge scanning data fitting method is proposed, eliminate the impact that edge of a knife out of focus is brought, improve infrared focal plane array modulation transfer function measuring accuracy.Double knife edges scanning method overcomes the defect that contrast method measuring accuracy is low, applicability is not high.Compare with slit scan method with pointolite scanning method, the emittance of double knife edges scanning method is larger, and does not need to carry out target MTF correction.Compared with single-edge scanning method, the testing efficiency of double knife edges scanning method improves 1 times, be conducive to judging measured device leveling degree and by external interference situation.
The present invention devises total-reflection type 1: 1 edge of a knife imaging optical system based on double-paraboloid mirror, and this system has the advantage of little F number, broadband imaging, is more suitable for the test needs of knife-edge scanning than Offner system and inverse Cassegrain system.The present invention proposes the knife edge scanning cubic fitting model based on three the Fermi functions, overcoming that traditional fitting of a polynomial easily causes originally is that smooth bright border and dark side occur vibration, can not make full use of the deficiency of edge of a knife two ends brightness uniformity data point, reaches higher fitting precision.Present invention employs and focus computing technique, obtain the measurement result under the accurate focus state of the edge of a knife, solve the difficult problem that existing MTF measuring technology cannot eliminate out of focus impact.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, specific embodiments of the invention are described in further detail.
Fig. 1 is double knife edges scanning method MTF measurement mechanism theory diagram of the present invention
Fig. 2 is reflective 1: 1 edge of a knife imaging optical system index path based on double-paraboloid mirror of the present invention
Fig. 3 is that area-of-interest of the present invention selects schematic diagram
Fig. 4 is double knife edges scanning curve schematic diagram of the present invention
Fig. 5 is three the Fermi function matching schematic diagram of the present invention
Fig. 6 is ESF, LSF and MTF curve synoptic diagram of the present invention
1-extend blackbody, 2-controller, 3-optical filter, 4-double knife edges, 5-imaging optical system, 6-infrared focal plane array to be measured, 7-data acquisition system (DAS), 8-direct current biasing source, 9-three-D displacement platform, 10-clock drive source, 11-computing machine (containing TT&C software).
Embodiment
Below with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail; Should be appreciated that preferred embodiment only in order to the present invention is described, instead of in order to limit the scope of the invention.
The present invention gives a kind of infrared focal plane array modulation transfer function measurement method based on double knife edges scanning.This method chooses double knife edges as target, moved by knife edge scanning and obtain edge of a knife spread function ESF (x), then differentiate is carried out to edge of a knife spread function ESF (x) and obtain line spread function LSF (x), finally carry out discrete Fourier transform (DFT) and obtain MTF.Present invention employs double knife edges scan mode.Because more responsive to noise ratio, the traditional disposal route of differentiating adopted first adopts fitting of a polynomial to edge of a knife spread function, present invention employs three the Fermi functions and carry out matching, overcome the defect of fitting of a polynomial.Present invention employs in addition and focus computing technique, eliminate the impact that out of focus is brought preferably.
The object of the invention is to provide a kind of infrared focal plane array modulation transfer function measurement method based on double knife edges scanning and special purpose device, overcome the defect of contrast method, pointolite scanning method and slit scan method, testing efficiency doubles than single-edge scanning method, be conducive to judging measured device leveling degree and by external interference situation, knife edge scanning data fitting method is proposed, eliminate the impact that edge of a knife out of focus is brought, improve infrared focal plane array modulation transfer function measuring accuracy.This device comprises: controller, extend blackbody, optical filter, parallel placement and the adjustable double knife edges of logical optical width, based on total-reflection type 1: 1 imaging optical system of double-paraboloid mirror, infrared focal plane array to be measured, can X, Y, the three-dimensional movement of Z-direction precision displacement table, hyperchannel programmable DC bias source, hyperchannel programmable clock drive source, low noise amplifier, at a high speed, high-resolution data acquisition system (DAS) and TT&C software.
The wide spectral infrared radiation that extend blackbody sends is impinged upon pair of parallel placement after mating plate after filtration and on the adjustable edge of a knife of logical optical width, is imaged on the photosurface of tested IRFPA by edge of a knife picture by total-reflection type 1: 1 imaging optical system based on double-paraboloid mirror.The index path of edge of a knife imaging optical system is see Fig. 2.Tested IRFPA be fixed on can X, Y, three-dimensional movement of Z-direction precision displacement table on, utilize the leveling of work stage, adjust rotation knob by its leveling and the straight flange of edge of a knife picture be adjusted to vertical with work stage direction of scanning.Each road direct current biasing and clock drive signals are transferred to the best, give full play to the performance of tested infrared focal plane array.The output signal of tested IRFPA is first amplified by low noise amplifier, and then gathered by high speed, high-resolution data acquisition system (DAS), image data delivers to computing machine, then by graphic restoration technology by the display of edge of a knife image on the computer screen.Double knife edges is led to optical width suitably tune up, perform manual focusing, photosurface is moved on within 3 times of focal depth ranges, select the region of one piece of uniform illumination as automatic focusing region, three-D displacement platform, tested IRFPA and data acquisition system (DAS) is allowed to form a closed-loop system, then use comprehensive dynamically focus technique accurately to focus, obtain edge of a knife picture clearly.After automatic focusing completes, regulate edge of a knife width, make illumination pixel width be about 10 pixels.Select the rectangular area simultaneously comprising two edges of a knife as area-of-interest (see Fig. 3), control bit moving stage moves do stepping on the direction perpendicular to edge of a knife picture, make edge of a knife picture do half step distance scanning relative to the photosensitive unit of tested IRFPA, on each scanning position of data acquisition system, in area-of-interest, the signal of each pixel exports.For ensureing the computational accuracy of MTF, the number of scan points on each pixel is not less than 64.TT&C software extracts two complete two inswept row (or two row) pixels of the edge of a knife in area-of-interest by certain algorithm, obtains the knife edge scanning data of this two row (or two row) pixel.Scan-data (see Fig. 4) in two row (or two row) knife edge scanning extracting data symmetric positions, the symmetry of double knife edges scanning curve is utilized to judge the leveling degree of measured device (if necessary, test after measured device again leveling), simultaneously analyze judge in scanning process with or without the external interference such as mechanical vibration, parasitic light, electrical noise (if any, manage eliminate or reduce these disturb after rescan test).By following formula, three the Fermi function matchings (having 10 fitting coefficients, see Fig. 5) are carried out to edge of a knife scan-data, obtains edge of a knife spread function (ESF).
Differentiate is carried out to edge of a knife spread function (ESF) and obtains line spread function (LSF).The MTF that discrete Fourier transform (DFT) obtains multiple pixel is carried out to line spread function (LSF).Near focal plane, choose multiple (as 10) focal position carry out knife edge scanning as above, obtain many MTF curves under different focus state, finally calculate the area value that these MTF curves comprise, 2 rank polynomial expressions are adopted to carry out matching to these area values, utilize the maximum method of MTF area to calculate position of focal plane accurately, obtain MTF curve corresponding to accurate position of focal plane by interpolation arithmetic.The last MTF deducting edge of a knife imaging optical system itself from the actual MTF recorded.
Claims (5)
1. the double knife edges scanning survey method of an infrared focal plane array modulation transfer function, it is characterized in that, the process employs double knife edges scan mode, by total-reflection type 1: 1 imaging optical system based on double-paraboloid mirror, edge of a knife picture is imaged on the photosurface of tested infrared focal plane array, edge of a knife spread function have employed three the Fermi functions and carries out matching, and employing focuses computing technique, to eliminate the impact that out of focus is brought.
2. the double knife edges scanning survey method of a kind of infrared focal plane array modulation transfer function as claimed in claim 1, it is characterized in that: described double knife edges scan mode chooses double knife edges as target, moved by knife edge scanning and obtain edge of a knife spread function ESF (x), then differentiate is carried out to edge of a knife spread function ESF (x) and obtain line spread function LSF (x), finally carry out discrete Fourier transform (DFT) and obtain MTF.
3. the double knife edges scanning survey method of a kind of infrared focal plane array modulation transfer function as claimed in claim 2, it is characterized in that: near focal plane, choose multiple focal position carry out knife edge scanning as above, obtain many MTF curves under different focus state, finally calculate the area value that these MTF curves comprise, 2 rank polynomial expressions are adopted to carry out matching to these area values, utilize the maximum method of MTF area to calculate position of focal plane accurately, obtain MTF curve corresponding to accurate position of focal plane by interpolation arithmetic.
4. the double knife edges scanning and measuring apparatus of an infrared focal plane array modulation transfer function, it is characterized in that, this device comprises: controller, extend blackbody, optical filter, parallel placement and the adjustable double knife edges of logical optical width, based on total-reflection type 1: 1 imaging optical system of double-paraboloid mirror, infrared focal plane array to be measured, can X, Y, the three-dimensional movement of Z-direction precision displacement table, hyperchannel programmable DC bias source, hyperchannel programmable clock drive source, low noise amplifier, at a high speed, high-resolution data acquisition system (DAS) and TT&C software;
This device carries out double knife edges scanning survey in the following manner: double knife edges scan mode is that the wide spectral infrared radiation that sends of extend blackbody impinges upon pair of parallel placement after mating plate and on the adjustable edge of a knife of logical optical width after filtration, by total-reflection type 1: 1 imaging optical system based on double-paraboloid mirror, edge of a knife picture is imaged on the photosurface of tested IRFPA, tested IRFPA is fixed on three-D displacement platform, work stage is by its leveling and be adjusted to by the straight flange of edge of a knife picture vertical with work stage direction of scanning, the output signal of tested IRFPA is first amplified by low noise amplifier, then by high speed, high-resolution data acquisition system (DAS) gathers, image data delivers to computing machine, again by graphic restoration technology by the display of edge of a knife image on the computer screen, select the region of one piece of uniform illumination as automatic focusing region, allow three-D displacement platform, tested IRFPA and data acquisition system (DAS) form a closed-loop system, then comprehensive dynamically focus technique is used accurately to focus, obtain edge of a knife picture clearly, on each scanning position of data acquisition system, in area-of-interest, the signal of each pixel exports, TT&C software extracts two complete two inswept row or two row pixels of the edge of a knife in area-of-interest by certain algorithm, obtain the knife edge scanning data of these two row or two row pixels,
After automatic focusing completes, regulate edge of a knife width, illumination pixel width is made to be 10 pixels, select the rectangular area simultaneously comprising two edges of a knife as area-of-interest, control bit moving stage moves do stepping on the direction perpendicular to edge of a knife picture, make edge of a knife picture do half step distance scanning relative to the photosensitive unit of tested IRFPA, on each scanning position of data acquisition system, in area-of-interest, the signal of each pixel exports.
5. the double knife edges scanning and measuring apparatus of a kind of infrared focal plane array modulation transfer function as claimed in claim 4, it is characterized in that, scan-data on two row or two row knife edge scanning extracting data symmetric positions, utilize the symmetry of double knife edges scanning curve to judge the leveling degree of measured device, analyze simultaneously and judge in scanning process with or without mechanical vibration, parasitic light, electrical noise external interference.
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| CN107024339B (en) * | 2017-04-21 | 2023-10-20 | 小艾帮帮（杭州）科技有限公司 | Testing device and method for head-mounted display equipment |
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