CN104360463A - Three-distal coaxial illumination imaging optical system - Google Patents
Three-distal coaxial illumination imaging optical system Download PDFInfo
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- CN104360463A CN104360463A CN201410728564.7A CN201410728564A CN104360463A CN 104360463 A CN104360463 A CN 104360463A CN 201410728564 A CN201410728564 A CN 201410728564A CN 104360463 A CN104360463 A CN 104360463A
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- 238000005286 illumination Methods 0.000 title claims abstract description 58
- 238000003384 imaging method Methods 0.000 title claims abstract description 52
- 230000003287 optical effect Effects 0.000 title claims abstract description 42
- 230000005499 meniscus Effects 0.000 claims description 42
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- 238000001514 detection method Methods 0.000 description 8
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- 201000009310 astigmatism Diseases 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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Abstract
The invention relates to a three-distal coaxial illumination imaging optical system. A double-distal imaging optical system is composed of a front objective lens set and a rear objective lens set, and a double-distal coaxial illumination optical system is composed of a front objective lens, a beam splitter prism and an illumination objective lens set; an aperture diaphragm AS1 is positioned on an image space plane of the front objective lens set and an object space focal plane of the rear objective lens set, and an aperture diaphragm AS1 is positioned on an image space plane of the front objective lens set and an object space focal plane of the illumination objective lens set. The two double-distal systems are coupled into a three-distal system, so that the three-distal coaxial illumination imaging optical system has coaxial illumination and imaging functions. The view field of the imaging system can achieve 180mm, the imaging distortion is less than 0.1%; the full-view-field resolution achieves 2001p/mm, the imaging quality is uniform, the illumination system can realize the uniform illumination of the overall view field, and the defect of the uneven illumination of coaxial circular light can be avoided.
Description
technical field
The invention belongs to optical image technology, be particularly applied to the optical system of Machine Vision Detection of Large visual angle, high resolving power, low distortion, specifically three heart coaxial-illuminating imaging optical systems far away.
Background technology
With machine vision replace human eye carry out high precision, high speed photoelectricity automatic on-line detect be that one of topmost direction is developed in industrial on-line checkingi field in recent ten years.To focus or zoom lens carries out that formation method is simple, cost is low with traditional, but have lower column defects: 1, pattern distortion is comparatively large, especially can have a strong impact on measuring accuracy for distortion large during Large visual angle imaging; 2, to there being the image objects of certain depth can the side projection imaging of object, easily with need the image of detection faces to obscure, reduce measuring accuracy; 3, commonly to focus or the imaging of zoom lens out of focus can cause larger measuring error.
Telecentric beam path can overcome above shortcoming, is highly suitable for the application of machine vision automatic on-line detection field, thus gets more and more to the use of telecentric optical system in recent years.
Telecentric beam path is divided into object space telecentric beam path and telecentric beam path in image space, and aperture diaphragm is positioned over image space focal plane and object space focal plane by its principle exactly respectively, makes the chief ray of object space and image space all be parallel to optical axis.Combined by these two kinds of telecentric beam paths and just constitute two telecentric imaging light path, the aperture diaphragm position is namely the image space focal plane of front objective lens, is also the object space focal plane of rear objective lens.The chief ray of such image side is all parallel to optical axis, the advantage of the heart far away for object space and telecentric beam path in image space is combined, and object space distortion and image space distortion are all eliminated, and accuracy of detection is improved further.Telecentric beam path illumination exceptionally illumination and coaxial intraoral illumination two kinds of modes.Outer illumination realizes comparatively simple, but easily occurs illumination unevenness phenomenon, especially true for Large visual angle illumination.Coaxial intraoral illumination is owing to will utilize part light path, and design is comparatively complicated, and cost is high, and brightness is lower slightly, but homogeneity is fine, is requiring that higher detection occasion needs to use intraoral illumination.
Propose a kind of symmetrical expression double-telecentric projection optical system in Chinese patent 200710038508.0, its advantage is that resolution reaches 700lp/mm when enlargement ratio is-1, is applicable to the application of high precision field of lithography.Shortcoming is that whole system employs 18 eyeglasses, and resetting difficulty is comparatively large, and have employed the special glasss such as price SFPL51Y costly, and cost is higher.Visual field is 31.446mm, operating distance 29mm, is not suitable for Large visual angle and detects occasion.
Propose a kind of coaxial double-telecentric imaging optics system in Chinese patent 201010242686.7, its advantage uses less eyeglass to realize the two telecentric imaging of high magnification, distorts lower than 0.1%; Illuminator falls to penetrating coaxial Kohler illumination in adopting, and homogeneity is better; Kohler illumination field stop is variable, can control illumination field of view size.Shortcoming is that visual field only has 19.2mm, is not suitable for the detection of Large visual angle part; Kohler illumination structure is more complicated, debugs difficulty.
In US Patent No. 5715050, propose the two telecentric optics measuring system of a kind of coaxial-illuminating.The advantage of this system is that image face site error is low on measuring accuracy impact, but the enlargement ratio of this system is low, lighting area size can not control, therefore high measuring accuracy be can not obtain and its contrast images of also needing extra optical system to ensure after two telecentric imaging system, design cost and dress school difficulty added.
summary of the invention
The object of the invention is the defect overcoming prior art, there is provided three heart coaxial-illuminating imaging optical systems far away of Machine Vision Detection of a kind of Large visual angle, low range, high resolving power, coaxial intraoral illumination, realizing diameter is that testee within 180mm carries out high precision imaging and detection.
The technical scheme that the present invention realizes above-mentioned purpose is as follows: three heart coaxial-illuminating imaging optical systems far away, comprises and aperture diaphragm is positioned over image space focal plane and object space focal plane and the two telecentric imaging light paths formed, it is characterized in that: comprise pre-objective group G
1, Amici prism BS, rearmounted objective lens G
2with illumination objective lens group G
3, pre-objective group G
1with rearmounted objective lens G
2form two telecentric imaging optics system, pre-objective group G
1, Amici prism BS and illumination objective lens group G
3form two heart coaxial-illuminating optical system far away;
Aperture diaphragm AS
1be positioned at pre-objective group G
1image space focal plane on and rearmounted objective lens G
2object space focal plane on, thus make front objective lens G
1with rear objective lens G
2form two telecentric imaging light path.Aperture diaphragm AS
2be positioned at pre-objective group G
1image space focal plane on and illumination objective lens group G
3object space focal plane on, thus make front objective lens G
1with illumination objective lens group G
3form two telecentric light light path.
Described pre-objective group G
1, before from object plane to Amici prism BS, set gradually a positive biconvex lens L
1, a diverging meniscus lens L
2, a positive meniscus lens L
3, a diverging meniscus lens L
4with a diverging meniscus lens L
5, wherein positive meniscus lens L
3with diverging meniscus lens L
4form the two gummed group of positive bent moon.
Described Amici prism BS is that the two gummed of two right-angle prisms forms, reflection and transmission than being 1:1, be used for by send from lighting source, by illumination objective lens group G
3light reflection enter pre-objective group G
1, thus realize the Large visual angle Uniform Illumination to object plane; The light reflected from testee is through pre-objective group G
1rearmounted objective lens G is entered afterwards by Amici prism
2arrive the imaging of CCD target surface.
Described rearmounted objective lens G
2be made up of 6 lens, from Amici prism BS to CCD target surface, set gradually and become picture aperture diaphragm AS
1, a diverging meniscus lens L
6, a diverging meniscus lens L
7, a positive meniscus lens L
8, a positive biconvex lens L
9, a diverging meniscus lens L
10with a positive meniscus lens L
11, wherein positive biconvex lens L
9with diverging meniscus lens L
10form just two gummed group.
Described illumination objective lens group G
3be made up of, from aperture diaphragm AS 3 lens
2start to set gradually along optical axis to comprise a positive biconvex lens L
12, a diverging meniscus lens L
13with a positive plano-convex lens L
14, wherein positive biconvex lens L
12with diverging meniscus lens L
13form just two gummed group.
Described two telecentric imaging system are 1 with the use of target surface ", pixel is 4.5 μm × 4.5 μm area array CCD cameras.
The lighting source of described two telecentric light imaging systems is the LED area light source of diameter 7mm, and full filed illumination uniformity is within 10%.
Two telecentric imaging optics systems in the present invention, its object distance is 288.2mm, and true field is 175mm; Image distance is 23.58mm, and image space is 16mm, enlargement ratio is 0.0914 ×; Full filed image space imaging resolution reaches 200lp/mm, and distortion is less than 0.1%.
It is three telecentric systems that two two telecentric systems are coupled to form by the present invention, has coaxial-illuminating and imaging double action.Two telecentric illumination system is coupled with two telecentric imaging system by Amici prism BS, pre-objective group G
1be the public part of two telecentric imaging light path and two heart coaxial-illuminating light path far away, play the double action of illumination and imaging.
From imaging optical path, system visual field reaches 180mm, in two telecentric system, belong to Large visual angle; Image deformation is less than-0.1%; Full filed resolution reaches 200lp/mm, and image quality is even.From illumination path, adopt and two far intracardiacly fall to penetrating the homogenising illumination that coaxial-illuminating can realize whole visual field, avoid the defect of the illumination unevenness that coaxial annular optical illumination produces.
accompanying drawing explanation
Fig. 1: the present invention three heart coaxial-illuminating imaging optical system structural drawing far away;
Fig. 2: pre-objective group structural drawing;
Fig. 3: the aberration curve figure of pre-objective group;
Fig. 4: rearmounted objective lens structural drawing;
Fig. 5: the aberration curve figure of rearmounted objective lens;
Fig. 6: two telecentric imaging system structural drawing;
Fig. 7: the aberration curve figure of two telecentric imaging system;
Fig. 8: the MTF curve map of two telecentric imaging system;
Fig. 9: illumination objective lens group structural drawing;
Figure 10: two telecentric illumination system structural drawing;
Figure 11: two telecentric illumination system lighting quality analysis chart.
Embodiment
First according to true field D=175mm, resolution requirement is the requirement of 0.05mm, determine Phase Receiver device use 1 " CCD camera, pixel dimension is 4.5 μm × 4.5 μm, thus calculate enlargement ratio be β=16/175=0.0914 ×.Then according to enlargement ratio requirement, pre-objective group G is determined
1focal length is f'
1=45.5mm, rearmounted objective lens G
2focal length is f'
2=497mm.Respectively to pre-objective group G
1with rearmounted objective lens G
2carry out optical design respectively, pre-objective group G
1aperture diaphragm AS is placed at rear focus place
1, with rearmounted objective lens G
2focus in object space overlaps, and forms two telecentric beam path.
Pre-objective group G
1employing reverse optical path designs, as shown in Figure 2.Aperture diaphragm AS is from left to right followed successively by along optical axis
1, diverging meniscus lens L
5, diverging meniscus lens L
4, positive meniscus lens L
3, diverging meniscus lens L
2, positive biconvex lens L
1, wherein positive meniscus lens L
3with diverging meniscus lens L
4the two gummed group of composition.Incident parallel light field angle is 2 ω=20 °, and emergent ray chief ray is parallel to optical axis.Through aberration optimal design, pre-objective group G as seen from Figure 3
1spherical aberration in image planes, astigmatism, the curvature of field are within 0.5mm, and distortion is less than-0.2%.
Rearmounted objective lens G
2use forward light path design, structural drawing as shown in Figure 4.Aperture diaphragm AS is from left to right followed successively by along optical axis
1, diverging meniscus lens L
6, diverging meniscus lens L
7, positive meniscus lens L
8, positive biconvex lens L
9, diverging meniscus lens L
10with positive meniscus lens L
11, wherein positive biconvex lens L
9with diverging meniscus lens L
10form just two gummed group.Aperture diaphragm AS
1be positioned at object space focal plane place, incident parallel light field angle is 2 ω=20 °, and the chief ray of emergent ray is parallel to optical axis.Through aberration optimal design, rearmounted objective lens G as seen from Figure 5
2spherical aberration in image planes, astigmatism, the curvature of field are within 0.1mm, and distortion is less than-0.2%.
By pre-objective group G
1camera lens overturns, with rearmounted objective lens G
2at aperture diaphragm AS
1place connects, two telecentric imaging system shown in composition diagram 6.This system is afocal system, and incident light chief ray is parallel to optical axis, and emergent light chief ray is also parallel to optical axis, forms double telecentric structure.From the Aberration Analysis curve of Fig. 7, spherical aberration, astigmatism, the curvature of field are all within 0.1mm; Due to front objective lens G
1with rear objective lens G
2distortion contrary sign is equal, so resultant distortion is less than-0.1%, is less than the distortion of the common object space heart far away and telecentric structure.From the MTF curve of Fig. 8, full filed resolution reaches 200lp/mm, as long as the resolution of corresponding picture receiving device is higher than 100lp/mm, namely pixel dimension is less than 10 μm, and native system can be coordinated to use.
Illumination objective lens group G
3method for designing and rearmounted objective lens G
2design class seemingly, but due to illuminator less demanding to aberration, and consider cost factor, only have employed three lens, structure is as shown in Figure 9.Aperture diaphragm AS is from left to right followed successively by along optical axis
2, positive biconvex lens L
12, diverging meniscus lens L
13with positive plano-convex lens L
14, wherein positive biconvex lens L
12with diverging meniscus lens L
13form just two gummed group.Illumination objective lens group G
3with pre-objective group G
1at aperture diaphragm, place connects, two heart line illumination systems far away shown in composition Figure 10.This system is parallel to optical axis from the chief ray of illumination surface light source face emergent ray, and the chief ray of emergent ray is also parallel to optical axis, forms double telecentric structure.Figure 11 is the brightness analysis figure of illuminated object plane.Full filed brightness of illumination is all relatively more even as can be seen from Figure, and in X-axis and Y-axis, illumination uniformity is substantially within 10%, therefore can provide Uniform Illumination to whole object plane.
By the group G of pre-objective shown in Fig. 2
1camera lens overturns, with objective lens G rearmounted shown in Fig. 2
2at aperture diaphragm AS
1place connects, two telecentric imaging system shown in composition diagram 6.By the group G of pre-objective shown in Fig. 2
1camera lens overturns, by the group G of illumination objective lens shown in Fig. 9
3at aperture diaphragm place AS
2connect, two heart line illumination systems far away shown in composition Figure 10.Finally by telecentric imaging system two shown in Fig. 6, with heart line illumination systems far away two shown in Figure 10, combined by Amici prism BS, namely become the heart coaxial-illuminating imaging optical system far away of of the present invention three shown in Fig. 1.
Claims (7)
1. three heart coaxial-illuminating imaging optical systems far away, comprise and aperture diaphragm are positioned over image space focal plane and object space focal plane and the two telecentric imaging light paths formed, it is characterized in that: comprise pre-objective group G
1, Amici prism BS, rearmounted objective lens G
2with illumination objective lens group G
3, pre-objective group G
1with rearmounted objective lens G
2form two telecentric imaging optics system, pre-objective group G
1, Amici prism BS and illumination objective lens group G
3form two heart coaxial-illuminating optical system far away;
Aperture diaphragm AS
1be positioned at pre-objective group G
1image space focal plane on and rearmounted objective lens G
2object space focal plane on, aperture diaphragm AS
2be positioned at pre-objective group G
1image space focal plane on and illumination objective lens group G
3object space focal plane on.
2. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: described pre-objective group G
1, before from object plane to Amici prism BS, set gradually a positive biconvex lens L
1, a diverging meniscus lens L
2, a positive meniscus lens L
3, a diverging meniscus lens L
4with a diverging meniscus lens L
5, wherein positive meniscus lens L
3with diverging meniscus lens L
4form the two gummed group of positive bent moon.
3. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: described Amici prism BS is that the two gummed of two right-angle prisms forms, reflection and transmission than being 1:1, be used for by send from lighting source, by illumination objective lens group G
3light reflection enter pre-objective group G
1, thus realize the Large visual angle Uniform Illumination to object plane; The light reflected from testee is through pre-objective group G
1rearmounted objective lens G is entered afterwards by Amici prism BS
2arrive the imaging of CCD target surface.
4. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: described rearmounted objective lens G
2, from Amici prism BS to CCD target surface, set gradually and become picture aperture diaphragm AS
1, a diverging meniscus lens L
6, a diverging meniscus lens L
7, a positive meniscus lens L
8, a positive biconvex lens L
9, a diverging meniscus lens L
10with a positive meniscus lens L
11, wherein positive biconvex lens L
9with diverging meniscus lens L
10form just two gummed group.
5. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: described illumination objective lens group G
3, from aperture diaphragm AS
2start to set gradually along optical axis to comprise a positive biconvex lens L
12, a diverging meniscus lens L
13with a positive plano-convex lens L
14, wherein positive biconvex lens L
12with diverging meniscus lens L
13form just two gummed group.
6. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: described two telecentric imaging system are 1 with the use of target surface ", pixel is 4.5 μm × 4.5 μm area array CCD cameras.
7. according to claim 1 three heart coaxial-illuminating imaging optical systems far away, is characterized in that: the lighting source of described heart line illumination systems two far away is the LED area light source of diameter 7mm, and full filed illumination uniformity is within 10%.
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|---|---|---|---|
| CN201410728564.7A CN104360463B (en) | 2014-12-05 | 2014-12-05 | Three telecentricity coaxial-illuminating imaging optical systems |
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| CN104360463B CN104360463B (en) | 2016-08-24 |
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| CN105467809A (en) * | 2015-12-15 | 2016-04-06 | 重庆触视科技有限公司 | Distortion-proof 3D holographic projection apparatus |
| CN107193115A (en) * | 2017-07-25 | 2017-09-22 | 埃卫达智能电子科技（苏州）有限公司 | A kind of image bilateral telecentric optical system of near ultraviolet band |
| CN107894651A (en) * | 2017-12-18 | 2018-04-10 | 苏州灵猴机器人有限公司 | Machine Vision Detection camera lens |
| CN109307927A (en) * | 2018-11-16 | 2019-02-05 | 珠海博明软件有限公司 | A kind of double-view field doubly telecentric camera lens of built-in coaxial illumination |
| CN109425969A (en) * | 2017-08-28 | 2019-03-05 | 宁波舜宇车载光学技术有限公司 | Optical lens |
| CN109541802A (en) * | 2019-01-21 | 2019-03-29 | 上海理工大学 | A kind of double light path double telecentric optical system |
| CN109813223A (en) * | 2019-03-19 | 2019-05-28 | 泉州师范学院 | The device and method of optical detection is carried out to the two neighboring surface of object simultaneously |
| CN109991724A (en) * | 2019-04-16 | 2019-07-09 | 佛山科学技术学院 | A kind of doubly telecentric fixed-focus optical system |
| CN110381230A (en) * | 2018-04-13 | 2019-10-25 | 甘肃智呈网络科技有限公司 | A kind of binocular camera shooting device of preposition beam-splitting structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105467809A (en) * | 2015-12-15 | 2016-04-06 | 重庆触视科技有限公司 | Distortion-proof 3D holographic projection apparatus |
| CN107193115A (en) * | 2017-07-25 | 2017-09-22 | 埃卫达智能电子科技（苏州）有限公司 | A kind of image bilateral telecentric optical system of near ultraviolet band |
| CN109425969A (en) * | 2017-08-28 | 2019-03-05 | 宁波舜宇车载光学技术有限公司 | Optical lens |
| CN107894651A (en) * | 2017-12-18 | 2018-04-10 | 苏州灵猴机器人有限公司 | Machine Vision Detection camera lens |
| CN110381230A (en) * | 2018-04-13 | 2019-10-25 | 甘肃智呈网络科技有限公司 | A kind of binocular camera shooting device of preposition beam-splitting structure |
| CN109307927A (en) * | 2018-11-16 | 2019-02-05 | 珠海博明软件有限公司 | A kind of double-view field doubly telecentric camera lens of built-in coaxial illumination |
| CN109307927B (en) * | 2018-11-16 | 2024-02-20 | 珠海博明软件有限公司 | Built-in coaxial illumination's two telecentric lens of two visual fields |
| CN109541802A (en) * | 2019-01-21 | 2019-03-29 | 上海理工大学 | A kind of double light path double telecentric optical system |
| CN109813223A (en) * | 2019-03-19 | 2019-05-28 | 泉州师范学院 | The device and method of optical detection is carried out to the two neighboring surface of object simultaneously |
| CN109813223B (en) * | 2019-03-19 | 2024-04-26 | 泉州师范学院 | Device and method for simultaneously carrying out optical detection on two adjacent surfaces of object |
| CN109991724B (en) * | 2019-04-16 | 2023-11-28 | 佛山科学技术学院 | Double telecentric fixed-focus optical system |
| CN109991724A (en) * | 2019-04-16 | 2019-07-09 | 佛山科学技术学院 | A kind of doubly telecentric fixed-focus optical system |
| CN112985777A (en) * | 2021-02-26 | 2021-06-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | Modulation transfer function test system and test method of EMCCD assembly |
| CN113589468A (en) * | 2021-07-29 | 2021-11-02 | 江西晶浩光学有限公司 | Optical system, camera module and electronic equipment |
| CN113589468B (en) * | 2021-07-29 | 2023-06-06 | 江西晶浩光学有限公司 | Optical system, camera module and electronic equipment |
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