CN105259645B - A kind of big visual field is undistorted, and object lens are compared in contracting - Google Patents
A kind of big visual field is undistorted, and object lens are compared in contracting Download PDFInfo
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- CN105259645B CN105259645B CN201510828114.XA CN201510828114A CN105259645B CN 105259645 B CN105259645 B CN 105259645B CN 201510828114 A CN201510828114 A CN 201510828114A CN 105259645 B CN105259645 B CN 105259645B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/06—Panoramic objectives; So-called "sky lenses" including panoramic objectives having reflecting surfaces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/006—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element at least one element being a compound optical element, e.g. cemented elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/08—Anamorphotic objectives
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Abstract
A kind of big visual field is undistorted to contract than object lens, is related to Liar field, meets the demand for carrying out Precision measurement to large-size workpiece in industrial detection, overcomes technical deficiency of the existing contracting than object lens.The object lens include the object plane being arranged successively along optical axis, the first lens to the 4th lens, diaphragm, the 5th lens to the 9th lens, image planes；At glued mirror, the light that the object plane issues successively reaches image planes and is imaged through the first lens, the second lens, the third lens, the 4th lens, diaphragm, glued mirror, the 7th lens, the 8th lens, the 9th lens for 5th lens and the 6th lens group.The present invention uses less glass lens quantity, optimize and sufficiently corrects various imaging aberrations, the smallest lens parameter of calibre adjustable simultaneously, to meet the needs of different lighting sources, contracting can reach 750mm than the object plane size of object lens, full filed distorts less than 0.012%, the composite can be widely applied to large format, high speed, high-precision automated optical detection equipment.
Description
Technical field
The present invention relates to Liar technical fields, and in particular to object lens are compared in a kind of undistorted contracting of big visual field.
Background technique
With the development of industrial technology, in detection fields such as biology, heredity, medical treatment, industry, to detection accuracy, detection speed
The requirement of degree, detecting size is continuously improved, thus to automatic optics inspection (AIO) equipment and contracting than object lens requirement also increasingly
Height, especially can satisfy the contracting of big workpiece (size be greater than 700mm), big visual field, undistorted Precision measurement demand than object lens, from
For designing and manufacturing, be all it is very difficult, there is presently no widely applied examples.
Any automated optical detection equipment for Precision measurement requires corresponding Liar, in conjunction with detector at
Picture, processing are realized and are detected to the collection such as feature, spectrum of sample and the position to workpiece, shape and profile equal error.
Currently, being all to be mounted on X/Y translation platform, using small field of view Liar to the office of workpiece on automated optical detection equipment
Portion's area is imaged, and object lens are then moved, and to entire workpiece or sample timesharing, segmentation, local tomography, is then spliced with software
It is compared at a biggish image, then with normal data, provides detection error and report, or using multiple object lens to work
Part and sample are detected, but the difference between each object lens can be also brought directly in detection error, while multiple object lens
All there is very big uncertainty in inconsistency and adjustment, this is worthless for Precision measurement.
Currently, existing contracting can only carry out contracting ratio than object lens to smaller object plane, general workpiece size is both less than 200mm, right
It is completely unappeasable for detecting in large-size workpiece (size is greater than 700mm)；In addition, if to guarantee good at image quality
Amount, it will usually which more eyeglass is set, and number of lenses is generally all at 15 or more, this is to the adjustment and test all bands contracted than object lens
Come greatly difficult.
Summary of the invention
In order to meet the needs of carrying out Precision measurement to large-size workpiece in industrial detection, overcome existing contracting than object lens
Technical deficiency, the present invention provides a kind of big undistorted contractings of visual field to be optimized and be filled using less glass lens quantity than object lens
The just various imaging aberrations in branch school, contracting reach 750mm than the object plane size of object lens, and full filed distorts less than 0.012%, object plane and picture
Face is all plane, can be widely applied to large format, high speed, high-precision automated optical detection equipment, powers on mainly for industry
Object lens are compared in the contracting of detection device of road plate, tin cream, steel mesh.
Used technical solution is as follows in order to solve the technical problem by the present invention:
A kind of big undistorted contracting of visual field of the invention is than object lens, including object plane, the first lens, the being arranged successively along optical axis
Two lens, the third lens, the 4th lens, diaphragm, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens and
Image planes；5th lens and the 6th lens group at glued mirror, the light that the object plane issues successively through the first lens, second thoroughly
Mirror, the third lens, the 4th lens, diaphragm, glued mirror, the 7th lens, the 8th lens, the 9th lens reach image planes and are imaged；
Entire contracting is divided into front lens group and rear lens group, first lens to the 4th lens group than object lens by the diaphragm
At front lens group, the focal power of the front lens group according to it is positive and negative, just, just combine, the focal length proportionate relationship of the front lens group
Are as follows: (6.8~7.2): (- 0.85~-1.22): (0.9~1.2): (1.85~2.15)；The gluing mirror, the 7th lens, the 8th
Lens and the 9th lens form rear lens group, and the focal power of the rear lens group is according to negative, positive, positive and negative combination, the rear lens
The focal length proportionate relationship of group are as follows: (- 0.9~-1.1): (1.5~1.7): (3.6~4): (- 1.25~-1.55)；Pass through front lens
Group and rear lens group correction system high aberration and balance aberration, correct system color difference by the cemented surface of glued mirror；
The object plane and image planes contract relative to entire than object lens total conjugated, and conjugate distance is contracting than the 6~8 of objective focal length
Times, the contracting of the object plane and image planes is 0.25~0.4 than multiplying power.
Further, than distortion less than 0.012%, the size of the object plane is 750mm for the contracting of the object plane and image planes.
It further, further include the plate optical filter being arranged between the 6th lens and the 7th lens, for choosing difference
Spectral coverage.
Further, the combined focal length proportionate relationship of the front lens group are as follows: (6.8~7.3): (- 0.9~-1.1):
(1.4~1.6).
Further, the combined focal length ratio of the rear lens group are as follows: (- 0.9~-1.1): (1.1~1.3): (- 1.25
~-1.55).
Further, the object plane and image planes are each perpendicular to optical axis, and the object plane and image planes are plane.
Further, first lens, the third lens, the 5th lens, the 8th lens and the 9th lens are all made of weight fire
Stone glass or lanthanum flint glass are made.
Further, second lens, the 4th lens, the 6th lens and the 7th lens are all made of K9 glass or K3 glass
It is made.
Further, first lens, the second lens, the third lens, the 4th lens, the 7th lens, the 8th lens,
Nine lens are single mirror.
The beneficial effects of the present invention are:
Firstly, contracting of the invention has the characteristics that big visual field, distortionless than object lens, and object plane size reaches 750mm, mesh
Preceding similar contracting not yet occurs than object lens.
Secondly, lens numbers than object lens, under conditions of keeping big object plane, are reduced to minimum, greatly by contracting of the invention
Facilitate processing, detection and adjustment, and development and production cost can decline to a great extent.
Third, contracting distort than the full filed of object lens less than 0.012%, and design passes letter nearly diffraction limit, and image quality is excellent,
As shown in Figure 4.
4th, contracting is industrially applied than object lens, can be according to the variation of lighting source, the smallest lens of appropriate adjustment bore
Parameter increases optical filter, can be obtained excellent image quality, avoids with wide spectrum contracting than adding in design caused by object lens
The problem of difficulty in work is significantly increased and number of lenses substantially increases, system adjustment reliability decrease.
Detailed description of the invention
Fig. 1 be a kind of big undistorted contracting of visual field of the invention than object lens structural schematic diagram (illumination spectrum spectral coverage 500nm~
600nm)。
Fig. 2 is a kind of index path of big undistorted contracting of visual field of the invention than object lens.
Fig. 3 is a kind of biography letter curve graph of big undistorted contracting of visual field of the invention than object lens.
Fig. 4 is a kind of distortion figure of big undistorted contracting of visual field of the invention than object lens.
Fig. 5 is a kind of point range figure of big undistorted contracting of visual field of the invention than object lens.
Fig. 6 is schematic diagram of structural changes (illumination spectrum of the contracting of blue light spectral coverage shown in specific embodiment two than object lens
Spectral coverage 450nm~480nm).
Fig. 7 is biography letter curve graph of the contracting of blue light spectral coverage shown in specific embodiment two than object lens.
Fig. 8 is distortion figure of the contracting of blue light spectral coverage shown in specific embodiment two than object lens.
Fig. 9 is point range figure of the contracting of blue light spectral coverage shown in specific embodiment two than object lens.
Figure 10 is structural schematic diagram of the contracting than object lens for increasing plate optical filter.
In figure: 1, the first lens, the 2, second lens, 3, the third lens, the 4, the 4th lens, the 5, the 5th lens, the 6, the 6th thoroughly
Mirror, the 7, the 7th lens, the 8, the 8th lens, the 9, the 9th lens, 10, image planes, 11, optical axis, 12, diaphragm, 13, object plane, 14, plate filter
Mating plate.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
As shown in Figure 1, a kind of big undistorted contracting of visual field of the invention is than object lens, it mainly include object plane 13, common optical axis setting
Nine pieces of lens (nine pieces of lens are respectively the first lens 1, the second lens 2, the third lens 3, the 4th lens 4, the 5th lens 5,
Six lens 6, the 7th lens 7, the 8th lens 8, the 9th lens 9), diaphragm 12, image planes 10 and optical axis 11.Object plane 13 and image planes 10 are divided
Not Wei Yu optical axis 11 left end and right end, object plane 13 and image planes 10 are all perpendicular to optical axis 11, and object plane 13 and image planes 10
It is all plane.Nine pieces of lens and diaphragm 12 are arranged between object plane 13 and image planes 10, that is to say, that the 1~the 9th lens of the first lens
9 are set gradually from left to right along optical axis 11, and 1 front end of the first lens is object plane 13 of the contracting than object lens, and 9 rear end of the 9th lens is contracting
Than the image planes 10 of object lens, wherein diaphragm 12 is arranged between the 4th lens 4 and the 5th lens 5.The 5th lens 5 in nine pieces of lens
Glued mirror, the first lens 1, the second lens 2, the third lens 3, the 4th lens 4, the 7th lens the 7, the 8th are constituted with the 6th lens 6
Lens 8, the 9th lens 9 are all single mirrors.
Entire contracting is divided into front lens group and rear lens group than object lens by diaphragm 12, and the first lens 1, the second lens 2, third are saturating
Mirror 3 and the 4th lens 4 form front lens group, the focal power of front lens group according to it is positive and negative, just, just combine i.e. the first lens 1, the
The focal power of two lens 2, the third lens 3 and the 4th lens 4 is respectively positive and negative, just, just, the proportionate relationship of front lens group focal length
About are as follows: (6.8~7.2): (- 0.85~-1.22): (0.9~1.2): (1.85~2.15), i.e. the focal length f of the first lens 11’、
The focal length f of second lens 22', the focal length f of the third lens 33' and the 4th lens 4 focal length f4' proportionate relationship about are as follows: f1’:
f2’:f3’:f4'=(6.8~7.2): (- 0.85~-1.22): (0.9~1.2): (1.85~2.15), the light focus of front lens group
Degree is mainly reflected in Negative-Positive-Negative structure, and the combined focal length proportionate relationship of front lens group is about are as follows: (6.8~7.3): (- 0.9~-
1.1): (1.4~1.6).
Glued mirror (the glued mirror being made of the 5th lens 5 and the 6th lens 6), the 7th lens 7, the 8th lens 8 and the 9th
Lens 9 form rear lens group, and the focal power of rear lens group is glued mirror, the 7th lens the 7, the 8th according to negative, positive, positive and negative combination
The focal power of lens 8 and the 9th lens 9 is respectively negative, positive, positive and negative, and the proportionate relationship of rear lens group focal length is about are as follows: (- 0.9~-
1.1): (1.5~1.7): (3.6~4): (- 1.25~-1.55), i.e., glued mirror (are made of the 5th lens 5 and the 6th lens 6
Glued mirror) focal length f5-6', the focal length f of the 7th lens 77', the focal length f of the 8th lens 88' and the 9th lens 9 focal length f9'
Proportionate relationship is about are as follows: f5-6’:f7’:f8’:f9'=(- 0.9~-1.1): (1.5~1.7): (3.6~4): (- 1.25~-
1.55), the focal power of rear lens group is mainly reflected in Negative-Positive-Negative structure, and the combined focal length ratio of rear lens group is about are as follows: (- 0.9
~-1.1): (1.1~1.3): (- 1.25~-1.55).
A kind of big undistorted contracting of visual field of the invention than object lens optical path as shown in Fig. 2, the light that object plane 13 issues, passes through
First lens 1, the second lens 2, the third lens 3, the 4th lens 4, diaphragm 12, the 5th lens 5, the 6th lens 6, the 7th lens 7,
8th lens 8, the 9th lens 9 reach image planes 10 and are imaged.Two groups of front and back lens all just have the independent basic aberration of correction
The function of parameter and variable, therefore contracting can control minimum than the number of lenses of object lens, the combination of the two groups of lens in front and back is main
It is correction system high aberration and balance aberration；In the glued mirror close to diaphragm 12, (the 5th lens 5 and the 6th lens 6 are constituted
Glued mirror) cemented surface, be mainly used for correction system color difference.
Object plane 13 and image planes 10 contract relative to entire than object lens total conjugated, and conjugate distance about contracts than the 6~8 of objective focal length
Times, the contracting of object plane 13 and image planes 10 than multiplying power between 0.25~0.4, while object plane 13 and image planes 10 contracting than distortion be less than
0.012%, the size maximum of object plane 13 is up to 750mm.
The 1~the 9th lens 9 of first lens are all made of using the glass material in Chinese glass library: the first lens 1, third
Lens 3, the 5th lens 5, the 8th lens 8 and the 9th lens 9 are all made of dense flint glass or lanthanum flint glass；Second lens
2, the 4th lens 4, the 6th lens 6, the 7th lens 7 are all made of conventional crown glass, mainly K9 glass and K3 glass.
As a further improvement of the present invention, in order to adapt to different occasions and different lighting source demands, while expanding contracting
Than the application of object lens, changed according to the spectrum of application and lighting source in actual industrial, in structure size minimum
The 6th lens 6 and the 7th lens 7 between be arranged plate optical filter 14, for choosing different spectral coverages, as shown in Figure 10.First
Lens 1~the 9th lens 9 surface coating can be wide spectrum membrane system, under different lighting conditions, using the flat of different membrane systems
Plate optical filter 14 adjusts in conjunction with the geometric parameter of the 4th lens 4, the 5th lens 5 and the 6th lens 6, can reach photo-quality imaging, this
Sample contracting is more constant than the basic structure of object lens, expands application, has greatly saved cost, is conducive to the big batch to contract than object lens
Production.
Specific embodiment one
As shown in Figure 1, the undistorted contracting of the big visual field of present embodiment is than object lens, the focal power of front lens group according to it is positive and negative,
Just, it just combines, the focal length f of the first lens 1 in front lens group1'=1044.398, the focal length f of the second lens 22'=-
150.678, the focal length f of the third lens 33'=148.985, the focal length f of the 4th lens 44'=308.634；The light focus of rear lens group
Glued mirror (the glued mirror that fiveth lens 5 and sixth lens 6 is made of) of the degree according to negative, positive, positive and negative combination, in rear lens group
Focal length f5-6'=- 155.869, the focal length f of the 7th lens 77'=254.602, the focal length f of the 8th lens 88'=568.440,
The focal length f of 9th lens 99'=- 217.106.
In present embodiment, the first lens 1, the third lens 3 and the 8th lens 8 are all made of dense flint glass and are made；5th
Lens 5 and the 9th lens 9 are all made of lanthanum flint glass and are made；Second lens 2 and the 4th lens 4 are all made of K9 glass and are made；The
Six lens 6 and the 7th lens 7 are all made of K3 glass and are made.
Contracting that the big visual field of present embodiment is undistorted is 302mm, image space relative aperture F#=5, illumination than the focal length of object lens
Spectrum is between 500nm~600nm, and by entirely contracting than object lens total conjugated, conjugate distance is for object plane 13 and image planes 10
1946mm, the size of object plane 13 are 750mm, and the size of image planes 10 is 240mm, and the contracting of object plane 13 and image planes 10 is than multiplying power
0.32.As shown in figure 3, biography letter MTF >=0.35 (@110lp/mm) of the undistorted contracting of the big visual field of present embodiment than object lens.Such as
Shown in Fig. 4, contracting that the big visual field of present embodiment is undistorted is than the contracting in the entire visual field of object lens than distortion less than 0.012%.Such as
Shown in Fig. 5, the big visual field of present embodiment is undistorted contracting than object lens point range size less than 5.8 μm.
Specific embodiment two
As a further improvement of the present invention, become according to the spectrum of application and lighting source in actual industrial
Change, the geometric parameter or glass material of the smallest 4th lens 4 of appropriate adjustment bore, the 5th lens 5 and the 6th lens 6, and its
The parameter of his lens and position do not need to carry out any modification, can be obtained outstanding different spectral coverage contracting than object lens, to meet not
With the demand of lighting condition.
As shown in fig. 6, the undistorted contracting of big visual field in present embodiment is than object lens, the focal power of front lens group according to just,
Negative, positive, positive combination, the focal length f of the first lens 1 in front lens group1'=1044.398, the focal length f of the second lens 22'=-
150.678, the focal length f of the third lens 33'=148.985, the focal length f of the 4th lens 44'=292.907；The light focus of rear lens group
Glued mirror (the glued mirror that fiveth lens 5 and sixth lens 6 is made of) of the degree according to negative, positive, positive and negative combination, in rear lens group
Focal length f5-6'=- 149.466, the focal length f of the 7th lens 77'=254.602, the focal length f of the 8th lens 88'=568.440,
The focal length f of 9th lens 99'=- 217.106.
Compared with specific embodiment one, the Parameters variation in present embodiment is embodied in: f4'=308.634 →
292.907, f5-6'=- 155.869 → -149.466.
In present embodiment, the first lens 1 and the third lens 3 are all made of dense flint glass and are made；5th lens the 5, the 8th
Lens 8 and the 9th lens 9 are all made of lanthanum flint glass and are made；Second lens 2 and the 7th lens 7 are all made of K9 glass and are made；The
Four lens 4 and the 6th lens 6 are all made of K3 glass and are made.
Contracting that the big visual field of present embodiment is undistorted is 292.7mm, image space relative aperture F#=5 than the focal length of object lens, is shone
Bright spectrum is between 450nm~480nm, and by entirely contracting than object lens total conjugated, conjugate distance is for object plane 13 and image planes 10
1899mm, the size of object plane 13 are 750mm, and the size of image planes 10 is 240mm, and the contracting of object plane 13 and image planes 10 is than multiplying power
0.32.As shown in fig. 7, biography letter MTF >=0.35 (@110lp/mm) of the undistorted contracting of the big visual field of present embodiment than object lens.Such as
Shown in Fig. 8, contracting that the big visual field of present embodiment is undistorted is than the contracting in the entire visual field of object lens than distortion less than 0.012%.Such as
Shown in Fig. 9, the big visual field of present embodiment is undistorted contracting than object lens point range size less than 5.8 μm.
Claims (7)
1. a kind of big visual field is undistorted, object lens are compared in contracting, which is characterized in that including be arranged successively along optical axis (11) object plane (13), the
One lens (1), the second lens (2), the third lens (3), the 4th lens (4), diaphragm (12), the 5th lens (5), the 6th lens
(6), the 7th lens (7), the 8th lens (8), the 9th lens (9) and image planes (10)；5th lens (5) and the 6th lens
(6) glued mirror is formed, the light that the object plane (13) issues is successively through the first lens (1), the second lens (2), the third lens
(3), the 4th lens (4), diaphragm (12), glued mirror, the 7th lens (7), the 8th lens (8), the 9th lens (9) reach image planes
(10) it is imaged；
Entire contracting is divided into front lens group and rear lens group than object lens by the diaphragm (12), and first lens (1) to the 4th are thoroughly
Mirror (4) forms front lens group, the focal power of the front lens group according to it is positive and negative, just, just combine, the focal length of the front lens group
Proportionate relationship are as follows: (6.8~7.2): (- 0.85~-1.22): (0.9~1.2): (1.85~2.15)；The gluing mirror, the 7th
Lens (7), the 8th lens (8) and the 9th lens (9) form rear lens group, the focal power of the rear lens group according to it is negative, positive,
Positive and negative combination, the focal length proportionate relationship of the rear lens group are as follows: (- 0.9~-1.1): (1.5~1.7): (3.6~4): (-
1.25~-1.55)；System high aberration and balance aberration are corrected by front lens group and rear lens group, passes through the glue of glued mirror
Conjunction face corrects system color difference；
The object plane (13) and image planes (10) contract relative to entire than object lens total conjugated, and conjugate distance is contracting than the 6 of objective focal length
~8 times, the contracting of the object plane (13) and image planes (10) is 0.25~0.4 than multiplying power.
2. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that the object plane (13) and picture
Than distortion less than 0.012%, the size of the object plane (13) is 750mm for the contracting in face (10).
3. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that further include being arranged the 6th
Plate optical filter (14) between lens (6) and the 7th lens (7), for choosing different spectral coverages.
4. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that the object plane (13) and picture
Face (10) is each perpendicular to optical axis (11), and the object plane (13) and image planes (10) are plane.
5. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that first lens (1),
The third lens (3), the 5th lens (5), the 8th lens (8) and the 9th lens (9) are all made of dense flint glass or lanthanum flint glass
It is made.
6. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that second lens (2),
4th lens (4), the 6th lens (6) and the 7th lens (7) are all made of K9 glass or K3 glass is made.
7. object lens are compared in a kind of big undistorted contracting of visual field according to claim 1, which is characterized in that first lens (1),
Second lens (2), the third lens (3), the 4th lens (4), the 7th lens (7), the 8th lens (8), the 9th lens (9) are list
Mirror.
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| CN107608059B (en) * | 2017-11-08 | 2023-06-23 | 湖南戴斯光电有限公司 | Micro-distortion high-resolution large-view-field optical lens |
| JP6858466B2 (en) * | 2018-12-29 | 2021-04-14 | カンタツ株式会社 | Imaging lens |
| CN109709660B (en) * | 2018-12-31 | 2021-10-01 | 诚瑞光学(苏州)有限公司 | Image pickup optical lens |
| JP6653456B1 (en) * | 2019-05-24 | 2020-02-26 | パナソニックＩｐマネジメント株式会社 | Imaging device |
| CN111796407A (en) * | 2020-07-09 | 2020-10-20 | 孝感华中精密仪器有限公司 | Multi-groove multi-guide wide-spectrum continuous zoom lens |
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| CN103969795A (en) * | 2014-04-30 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Space target imaging optical system |
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