CN102564343B - Detection device for surface-shape errors of solar trench type curved surface reflector - Google Patents

Detection device for surface-shape errors of solar trench type curved surface reflector Download PDF

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Publication number
CN102564343B
CN102564343B CN201110449273.0A CN201110449273A CN102564343B CN 102564343 B CN102564343 B CN 102564343B CN 201110449273 A CN201110449273 A CN 201110449273A CN 102564343 B CN102564343 B CN 102564343B
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curved surface
optical reflector
beam splitter
self
face shape
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CN102564343A (en
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魏秀东
肖君
卢振武
任兰旭
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention provides a detection device for surface-shape errors of a solar trench type curved surface reflector, relating to the field of mirror surface detection, which solves the problems that the when the surface-shape errors of the trench type curved surface reflector are detected by the conventional detection device, the detection process is complicated and time-consuming and is not suitable for rapid and online detection, and the subsequent image processing is complicated. The device comprises a light source device, a self-calibration device and an image acquisition and processing device, wherein the light source device comprises a laser, a beam expander and a beam splitter group; light beams emitted from the laser are expanded by the beam expander, are split by the beam splitter group and are reflected; a test light beam split by the beam splitter group is projected on the curved surface reflector to be detected; a self-calibration light beam reflected by the beam splitter group is transmitted into the self-calibration device; the self-calibration device is used for calibrating the parallel degree of the test light beam projected to the curved surface reflector to be detected; and the image acquisition and processing device is used receiving light spot information reflected by the curved surface reflector to be detected and determining the surface-shape errors of the curved surface reflector to be detected. The detection device is easy to operate and has low cost.

Description

Solar groove type optical reflector of curved surface face shape error pick-up unit
Technical field
The present invention relates to minute surface detection field, be specifically related to a kind of face shape error pick-up unit of solar groove type optical reflector of curved surface.
Background technology
In field of solar energy utilization, in order to improve solar radiation energy flux density, need to adopt solar concentrator.Slot-type optical collector is the wider optically focused mode of current field of solar energy utilization application, in some countries (as Germany, Spain), has realized and has commercially produced , China still in the starting stage.Slot-type optical collector is spliced by multi-disc optical reflector of curved surface, and the surface figure accuracy of optical reflector of curved surface has determined the optically focused performance of slot-type optical collector, therefore most important to the detection of optical reflector of curved surface face shape error.For realizing mass, the standardized production of slot type optical reflector of curved surface, need to provide a kind of detection method and device that can detect fast, online slot type optical reflector of curved surface face shape error.The face shape error of slot type optical reflector of curved surface represents with certain some normal direction and this drift angle of putting desirable normal direction on minute surface, and error is generally in milliradian magnitude.
At present, the detection method of slot type optical reflector of curved surface face shape error mainly contains laser point by point scanning method, photogrammetry, reflecting grating Morie fringe detection method etc.Laser point by point scanning method is to utilize the tested optical reflector of curved surface of laser beam irradiation, laser beam is after optical reflector of curved surface reflection, project on the receiving screen that is positioned at approximately 2 times of focal length places of optical reflector of curved surface, the anti-normal direction that pushes away measured point of launching position by recording laser bundle on receiving screen, the method precision is higher, but need to carry out the data acquisition of a large amount of points, very consuming time, be not suitable for detecting fast, online slot type optical reflector of curved surface.Photogrammetry is first on tested optical reflector of curved surface, to paste a large amount of monumented points, utilize camera, in different angles, these monumented points are carried out to imaging, by the spatial relation of picture point, object point, solve the coordinate of monumented point, and simulate the three-dimensional picture of optical reflector of curved surface, this device is simpler, but need to paste a large amount of monumented points in mirror surface, loaded down with trivial details and consuming time, be also not suitable for fast, detect online slot type optical reflector of curved surface.Reflecting grating Morie fringe detection method is to utilize camera to take grid striped through tested optical reflector of curved surface reflection imaging, the picture of grid striped has carried the modulation intelligence of tested optical reflector of curved surface, the picture of grid striped is carried out to image processing, and then the face shape information of the tested optical reflector of curved surface of inverting, the method is a kind of good method that can realize fast detecting, but the positioning accuracy request to optical reflector of curved surface is higher, and follow-up image is processed comparatively complicated.
Summary of the invention
The present invention exists testing process loaded down with trivial details consuming time while solving the existing detection to slot type optical reflector of curved surface face shape error, and be not suitable for quick, the online problem detecting, exist simultaneously follow-up image is processed to complicated problem, a kind of solar groove type optical reflector of curved surface face shape error pick-up unit is provided.
A solar groove type optical reflector of curved surface face shape error pick-up unit, this device comprises light supply apparatus, self-calibrating device and image acquisition and treating apparatus; Described light supply apparatus comprises laser instrument, beam expanding lens and beam splitter group; Image acquisition and treating apparatus comprise optical screen, camera and computing machine;
The light beam that described laser instrument sends also reflects through beam splitter component bundle after beam expanding lens expands again, test beams after beam splitter component bundle is projected on tested optical reflector of curved surface, self calibration light beam through the reflection of beam splitter group is incident to self-calibrating device, and described self-calibrating device is to being projected to the depth of parallelism calibration of the test beams on tested optical reflector of curved surface; Described optical screen receives the facula information of tested optical reflector of curved surface reflection, facula information on collected by camera optical screen also transfers to facula information in computing machine, computing machine judges the face shape error of tested optical reflector of curved surface by the facula information receiving, described self-calibrating device comprises that self-calibrating device comprises f-θ lens and ccd detector; Described self calibration light beam converges on ccd detector through f-θ lens.
Beneficial effect of the present invention: solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention can detect the face shape of solar groove type optical reflector of curved surface fast and accurately online; This device is to use the parallel sunshine of simulation of optical systems to incide on tested optical reflector of curved surface, use camera to take optical reflector of curved surface and project the hot spot on focal plane, hot spot is carried out to image processing, and then judge whether the face shape error of tested optical reflector of curved surface conforms with request for utilization.This device is lower to the positioning accuracy request of tested optical reflector of curved surface, and image is processed simple, and accuracy of detection is higher, and detection speed is fast, can realize the online detection of tested optical reflector of curved surface in conjunction with scanning and governor motion, easy operating, and cost is lower.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the embodiment 1 of solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention;
Fig. 2 is the structural drawing of the embodiment 2 of solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention.
In figure, 1, laser instrument, 2, beam expanding lens, 3, beam splitter group, 4, inclination beam splitter, 5, horizontal beam splitter, 6, beam splitter unit, 7, self calibration light beam, 8, test beams, 9, f-θ lens, 10, ccd detector, 11, sliding beam, 12, guide rail, 13, tested optical reflector of curved surface, 14, lifting pole, 15, baffle plate, 16, camera, 17, tripod, 18, optical screen, 19, data line one, 20, data line two, 21, computing machine, 22, conveyer, 23, shutter.
Embodiment
Embodiment one, in conjunction with Fig. 1, present embodiment is described, solar groove type optical reflector of curved surface face shape error pick-up unit, comprises light supply apparatus, self-calibrating device and image acquisition and treating apparatus.
Described light supply apparatus comprises laser instrument 1, beam expanding lens 2 and beam splitter group 3; Described beam splitter group 3 is comprised of a series of beam splitter unit 6, and each beam splitter unit 6 forms (inclination beam splitter 4 and horizontal beam splitter 5) by two beam splitters, and the angle of two beam splitters is 45 °.
The laser beam that 2 pairs of laser instruments 1 of beam expanding lens send expands and collimates, and is divided into the test beams 8 that a series of energy approximations equate and are parallel to each other, and projects on tested optical reflector of curved surface 13 through beam splitter group 3.Regulate position and the inclination of each beam splitter unit 6 in beam splitter group 3, the light beam projecting on tested optical reflector of curved surface 13 is parallel to each other.In beam splitter group 3, the quantity of beam splitter unit 6 is determined by opening size and the measuring accuracy demand of tested optical reflector of curved surface 13.Self-calibrating device receives the light beam by 3 reflections of beam splitter group, data acquisition and processing section comprise optical screen, camera and computing machine, optical screen is at the desirable focal line place of tested optical reflector of curved surface, with the optical axis of tested optical reflector of curved surface at an angle, camera is for taking the hot spot on optical screen, camera is connected with computing machine by data line, and computing machine carries out image processing for image that camera is taken and self-calibrating device image acquisition and treating apparatus, and calculates the face shape error of tested optical reflector of curved surface.
In present embodiment, also comprise scanning and governor motion, described scanning and governor motion comprise sliding beam 11, guide rail 12, lifting pole 14 and baffle plate 15, described sliding beam 11 is for installing light supply apparatus and self-calibrating device, guide rail 12 is for installing sliding beam 11, laser instrument 1, beam expanding lens 2, beam splitter group 3 are fixed on the sliding beam 11 being positioned on guide rail 12, and be word order, lifting pole 14 is for the position of tested optical reflector of curved surface 13 and attitude are adjusted, and baffle plate 15 is for the position of fixing tested optical reflector of curved surface 13.Wherein, the relative position of guide rail 12, lifting pole 14 and baffle plate 15 is fixing in advance, geometric parameter by tested optical reflector of curved surface 13 determines, baffle plate 15 is in order to support one end of tested optical reflector of curved surface 13, the adjustable height of lifting pole 14 is calculated by the geometric parameter of tested optical reflector of curved surface 13 in advance, make the direction of parallel sweep laser beam consistent with the optical axis direction of tested optical reflector of curved surface 13, sliding beam 11 moves along the focal line direction of tested optical reflector of curved surface 13, guarantees that scanning laser beam scans tested optical reflector of curved surface 13.
Self-calibrating device described in present embodiment is by f-θ lens 9, ccd detector 10 and data line 2 20, laser beam is after beam splitter group 3, the self calibration light beam 7 that part is reflected converges on ccd detector 10 through f-θ lens 9, if the hot spot of the light beam of all beam splitters unit 6 reflections on ccd detector all overlaps, the test beams 8 that proof projects on tested reflective mirror 13 is parallel to each other, otherwise, must adjust position and the inclination of beam splitter unit 6, until the hot spot of the light beam of all beam splitters unit 6 reflections on ccd detector 10 overlaps.
Described image acquisition and processing section are comprised of optical screen 18, camera 16, tripod 17, data line 1 and computing machine 21.Optical screen 18 is placed on the standard focal line place of tested optical reflector of curved surface 13, and with the optical axis direction of tested optical reflector of curved surface 13 (0~90 °) at an angle, in order to receive the hot spot by tested optical reflector of curved surface 13 reflections, the size of optical screen 18 and angle of inclination need to be designed according to the geometric parameter of tested optical reflector of curved surface 13, to guarantee to obtain all flares of tested optical reflector of curved surface 13.Camera 16, for gathering the facula information on optical screen 18, is supported the adjustment of go forward side by side line position and angle by tripod 17.When sliding beam 11 is along the focal line scanning direction of tested optical reflector of curved surface 13 time, camera 16 can be taken a series of images, and by data line 1 by image transmission to calculating in 21, computing machine 21 is by the processing of image information and then judge that whether tested optical reflector of curved surface 13 qualified.
In present embodiment, also comprise conveyer 22, described tested optical reflector of curved surface 13 is placed in production line conveying device 22, after conveyer 22 is delivered to reservation position, stops.Lifting pole 14 is propped one end of tested optical reflector of curved surface 13, the lifting height of lifting pole 14 can calculate according to the geometric parameter of tested optical reflector of curved surface 13, guarantees consistent with the optical axis direction of tested optical reflector of curved surface 13 by the test beams 6 of beam splitter group 3 outgoing.The other end of tested optical reflector of curved surface 13 is stuck on baffle plate 15, and test beams 8 incides on tested optical reflector of curved surface 13 along the optical axis direction of tested optical reflector of curved surface 13, through tested optical reflector of curved surface 13, reflects and converges on optical screen 18.Because tested optical reflector of curved surface 13 exists certain face shape error, make the hot spot on optical screen 18 have certain spuious distribution.Test beams 8 is along with the motion of sliding beam 11 scans tested optical reflector of curved surface 13, camera 16 is taken the facula information on optical screen 18 and sends computing machine 21 to by data line 1, computing machine 21 is processed and is judged that whether tested optical reflector of curved surface is qualified by image, thereby reaches the object of on-line quick detection.
Embodiment two, in conjunction with Fig. 2, present embodiment is described, the difference of present embodiment and embodiment one is, present embodiment increases shutter 23 on the basis of embodiment one in each beam splitter unit 6, for the face shape error to tested optical reflector of curved surface 13 that can be quantitative is tested, need in each beam splitter unit, increase shutter 23, when tested optical reflector of curved surface 13 being carried out to face shape error detection, when the hot spot on projecting optical screen departs from ideal position, can be by shutter 23 Close Alls, and from left to right open successively shutter 23, can find and depart from the corresponding measured point of hot spot, and try to achieve the normal direction of measured point and the deviation of desirable normal direction by the bias of hot spot and the coordinate information of measured point.

Claims (8)

1. solar groove type optical reflector of curved surface face shape error pick-up unit, this device comprises light supply apparatus, self-calibrating device and image acquisition and treating apparatus; It is characterized in that;
Described light supply apparatus comprises laser instrument (1), beam expanding lens (2) and beam splitter group (3); Image acquisition and treating apparatus comprise optical screen (18), camera (16) and computing machine (21);
The light beam that described laser instrument (1) sends also reflects through beam splitter group (3) beam splitting after beam expanding lens (2) expands again, test beams after beam splitter group (3) beam splitting is projected on tested optical reflector of curved surface (13), self calibration light beam through beam splitter group (3) reflection is incident to self-calibrating device, and described self-calibrating device is to being projected to the depth of parallelism calibration of the test beams on tested optical reflector of curved surface (13); Described optical screen (18) receives the facula information of tested optical reflector of curved surface (13) reflection, camera (16) gathers the facula information on optical screen (18) and facula information is transferred in computing machine (21), and computing machine (21) judges the face shape error of tested optical reflector of curved surface (13) by the facula information receiving; Described self-calibrating device comprises that self-calibrating device comprises f-θ lens (9) and ccd detector (10); Described self calibration light beam converges on ccd detector (10) through f-θ lens (9).
2. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1, it is characterized in that, this device also comprises scanning and governor motion, described scanning and governor motion comprise sliding beam (11), guide rail (12), lifting pole (14) and baffle plate (15), described sliding beam (11) is for installing light supply apparatus and self-calibrating device, guide rail (12) is for installing sliding beam (11), lifting pole (14) is for adjusting position and the attitude of tested optical reflector of curved surface (13), baffle plate (15) is for the position of fixing tested optical reflector of curved surface (13).
3. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1 and 2, it is characterized in that, described laser instrument (1), beam expanding lens (2) and beam splitter group (3) are fixed on sliding beam (11) successively, described beam splitter group (3) is comprised of a plurality of beam splitters unit (6), and each beam splitter unit (6) is comprised of two beam splitter groups (3).
4. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 3, it is characterized in that, described two beam splitters are respectively inclination beam splitter (4) and horizontal beam splitter (5), and the angle of inclination beam splitter (4) and horizontal beam splitter (5) is 45 °.
5. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 3, is characterized in that, the quantity of described beam splitter unit (6) is determined by opening size and the measuring accuracy of tested optical reflector of curved surface (13).
6. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 3, it is characterized in that, in each beam splitter unit (6), shutter (23) is set, when tested optical reflector of curved surface (13) being carried out to face shape error detection, when the facula information of the upper tested optical reflector of curved surface (13) obtaining of optical screen (18) departs from normal place, by shutter (23) Close All, and open successively from left to right shutter (23), obtain and depart from the corresponding measured point of hot spot.
7. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1, it is characterized in that, described image acquisition and treating apparatus also comprise tripod (17), and described camera (16) supports the adjustment of go forward side by side line position and angle by tripod (17).
8. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1, is characterized in that, the optical axis angle scope of optical screen in described image acquisition and treating apparatus (18) and tested optical reflector of curved surface (13) is at 0~90 °.
CN201110449273.0A 2011-12-29 2011-12-29 Detection device for surface-shape errors of solar trench type curved surface reflector Expired - Fee Related CN102564343B (en)

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CN105465559B (en) * 2015-12-30 2017-10-31 中国科学院长春光学精密机械与物理研究所 Solar groove type optical reflector of curved surface Surface inspection system supporting and adjusting device
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