CN102564343A - Detection device for surface-shape errors of solar trench type curved surface reflector - Google Patents

Detection device for surface-shape errors of solar trench type curved surface reflector Download PDF

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Publication number
CN102564343A
CN102564343A CN2011104492730A CN201110449273A CN102564343A CN 102564343 A CN102564343 A CN 102564343A CN 2011104492730 A CN2011104492730 A CN 2011104492730A CN 201110449273 A CN201110449273 A CN 201110449273A CN 102564343 A CN102564343 A CN 102564343A
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curved surface
optical reflector
beam splitter
face shape
self
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CN2011104492730A
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CN102564343B (en
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魏秀东
肖君
卢振武
任兰旭
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention provides a detection device for surface-shape errors of a solar trench type curved surface reflector, relating to the field of mirror surface detection, which solves the problems that the when the surface-shape errors of the trench type curved surface reflector are detected by the conventional detection device, the detection process is complicated and time-consuming and is not suitable for rapid and online detection, and the subsequent image processing is complicated. The device comprises a light source device, a self-calibration device and an image acquisition and processing device, wherein the light source device comprises a laser, a beam expander and a beam splitter group; light beams emitted from the laser are expanded by the beam expander, are split by the beam splitter group and are reflected; a test light beam split by the beam splitter group is projected on the curved surface reflector to be detected; a self-calibration light beam reflected by the beam splitter group is transmitted into the self-calibration device; the self-calibration device is used for calibrating the parallel degree of the test light beam projected to the curved surface reflector to be detected; and the image acquisition and processing device is used receiving light spot information reflected by the curved surface reflector to be detected and determining the surface-shape errors of the curved surface reflector to be detected. The detection device is easy to operate and has low cost.

Description

Solar groove type optical reflector of curved surface face shape error pick-up unit
Technical field
The present invention relates to the minute surface detection range, be specifically related to a kind of face shape error pick-up unit of solar groove type optical reflector of curved surface.
Background technology
In field of solar energy utilization,, need to adopt solar concentrator in order to improve the solar radiation energy flux density.Slot-type optical collector is that present field of solar energy utilization is used wider optically focused mode, has realized commercially producing in some countries (like Germany, Spain), still is in the starting stage in China.Slot-type optical collector is spliced by the multi-disc optical reflector of curved surface, and the surface figure accuracy of optical reflector of curved surface has determined the optically focused performance of slot-type optical collector, and is therefore most important to the detection of optical reflector of curved surface face shape error.For realizing mass, the standardized production of slot type optical reflector of curved surface, the detection method and the device of quick, the online detection slot type of a kind of ability optical reflector of curved surface face shape error need be provided.The face shape error of slot type optical reflector of curved surface representes that with certain some normal direction and this drift angle of putting desirable normal direction on the minute surface error is generally in the milliradian magnitude.
At present, the detection method of slot type optical reflector of curved surface face shape error mainly contains laser point by point scanning method, photogrammetry, reflecting grating Morie fringe detection method etc.Laser point by point scanning method is to utilize the tested optical reflector of curved surface of laser beam irradiation; Laser beam projects on the receiving screen that is positioned at the about 2 times of focal length places of optical reflector of curved surface, through the anti-normal direction that pushes away the measured point of the launching position of recording laser bundle on receiving screen after the reflection of curved surface reflective mirror; This method precision is higher; But the data acquisition that need put in a large number is very consuming time, is not suitable for quick, online detection slot type optical reflector of curved surface.Photogrammetry is on tested optical reflector of curved surface, to paste a large amount of monumented points earlier; Utilize camera these monumented points to be carried out to picture, find the solution the coordinate of monumented point, and simulate the three-dimensional picture of optical reflector of curved surface through the spatial relation of picture point, object point in different angles; This device is simpler; But need paste a large amount of monumented points in mirror surface, loaded down with trivial details and consuming time, also be not suitable for quick, online detection slot type optical reflector of curved surface.Reflecting grating Morie fringe detection method is to utilize camera to take the grid striped through tested optical reflector of curved surface reflection imaging; The picture of grid striped has carried the modulation intelligence of tested optical reflector of curved surface; Picture to the grid striped carries out Flame Image Process, and then the face shape information of the tested optical reflector of curved surface of inverting, and this method is a kind of good method that can realize fast detecting; But the positioning accuracy request to optical reflector of curved surface is higher, and subsequent image processing is comparatively complicated.
Summary of the invention
The present invention exists testing process loaded down with trivial details consuming time when solving existing detection to slot type optical reflector of curved surface face shape error; And be not suitable for problem quick, online detection; Exist simultaneously the subsequent image processing complicated problems, a kind of solar groove type optical reflector of curved surface face shape error pick-up unit is provided.
A kind of solar groove type optical reflector of curved surface face shape error pick-up unit, this device comprises light supply apparatus, self-calibrating device and IMAQ and treating apparatus; Said light supply apparatus comprises laser instrument, beam expanding lens and beam splitter group; IMAQ and treating apparatus comprise optical screen, camera and computing machine;
The light beam that said laser instrument sends expands Shu Houzai through beam splitter component bundle and reflection through beam expanding lens; Test beams behind beam splitter component bundle is projected on the tested optical reflector of curved surface; Self calibration light beam through the reflection of beam splitter group is incident to self-calibrating device, and said self-calibrating device is to being projected to the depth of parallelism calibration of the test beams on the tested optical reflector of curved surface; Said optical screen receives the facula information of tested optical reflector of curved surface reflection, and camera is gathered the facula information on the optical screen and facula information transferred in the computing machine, and computing machine is judged the face shape error of tested optical reflector of curved surface through the facula information that receives.
Beneficial effect of the present invention: solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention can be fast and accurately carries out online detection to the face shape of solar groove type optical reflector of curved surface; This device is to use the parallel sunshine of simulation of optical systems to incide on the tested optical reflector of curved surface; Use camera to take optical reflector of curved surface and project the hot spot on the focal plane; Hot spot is carried out Flame Image Process, and then judge whether the face shape error of tested optical reflector of curved surface conforms with request for utilization.This device is lower to the positioning accuracy request of tested optical reflector of curved surface, and Flame Image Process is simple, and accuracy of detection is higher, and detection speed is fast, can realize the online detection of tested optical reflector of curved surface in conjunction with scanning and governor motion, easy operating, and cost is lower.
Description of drawings
Fig. 1 is the structural drawing of the embodiment 1 of solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention;
Fig. 2 is the structural drawing of the embodiment 2 of solar groove type optical reflector of curved surface face shape error pick-up unit of the present invention.
Among the figure, 1, laser instrument, 2, beam expanding lens, 3, the beam splitter group, 4, the inclination beam splitter, 5, horizontal beam splitter; 6, beam splitter unit, 7, the self calibration light beam, 8, test beams, 9, f-θ lens, 10, ccd detector, 11, sliding beam; 12, guide rail, 13, tested optical reflector of curved surface, 14, up-down pole, 15, baffle plate, 16, camera, 17, tripod; 18, optical screen, 19, data line one, 20, data line two, 21, computing machine, 22, conveyer, 23, shutter.
Embodiment
Embodiment one, combination Fig. 1 explain this embodiment, and solar groove type optical reflector of curved surface face shape error pick-up unit comprises light supply apparatus, self-calibrating device and IMAQ and treating apparatus.
Described light supply apparatus comprises laser instrument 1, beam expanding lens 2 and beam splitter group 3; Described beam splitter group 3 is made up of a series of beam splitter unit 6, and (inclination beam splitter 4 and horizontal beam splitter 5) formed by two beam splitters in each beam splitter unit 6, and the angle of two beam splitters is 45 °.
The laser beam that 2 pairs of laser instruments 1 of beam expanding lens send expands bundle and collimation, is divided into the test beams 8 that a series of energy approximations equate and are parallel to each other through beam splitter group 3, and projects on the tested optical reflector of curved surface 13.Regulate the position and the inclination of each beam splitter unit 6 in the beam splitter group 3, the light beam that projects on the tested optical reflector of curved surface 13 is parallel to each other.The quantity of beam splitter unit 6 is by the opening size and the decision of measuring accuracy demand of tested optical reflector of curved surface 13 in the beam splitter group 3.Self-calibrating device receives by beam splitter group 3 beam reflected; Data acquisition and processing section comprise optical screen, camera and computing machine, and optical screen is at the desirable focal line place of tested optical reflector of curved surface, with the optical axis of tested optical reflector of curved surface at an angle; Camera is used to take the hot spot on the optical screen; Camera links to each other with computing machine through data line, and computing machine is used for the image of camera shooting and self-calibrating device IMAQ and treating apparatus are carried out Flame Image Process, and calculates the face shape error of tested optical reflector of curved surface.
Also comprise scanning and governor motion in this embodiment; Said scanning and governor motion comprise sliding beam 11, guide rail 12, up-down pole 14 and baffle plate 15; Said sliding beam 11 is used to install light supply apparatus and self-calibrating device; Guide rail 12 is used to install sliding beam 11, and laser instrument 1, beam expanding lens 2, beam splitter group 3 are fixed on the sliding beam 11 that is positioned on the guide rail 12, and are word order; Up-down pole 14 is used for the position of tested optical reflector of curved surface 13 and attitude are adjusted, and baffle plate 15 is used for fixing the position of tested optical reflector of curved surface 13.Wherein, The relative position of guide rail 12, up-down pole 14 and baffle plate 15 is fixing in advance; Geometric parameter decision by tested optical reflector of curved surface 13; Baffle plate 15 is in order to support an end of tested optical reflector of curved surface 13, and the adjustable height of up-down pole 14 is calculated by the geometric parameter of tested optical reflector of curved surface 13 in advance, makes the optical axis direction of direction and tested optical reflector of curved surface 13 of parallel sweep laser beam consistent; Sliding beam 11 moves along the focal line direction of tested optical reflector of curved surface 13, guarantees that scanning laser beam scans tested optical reflector of curved surface 13.
Self-calibrating device described in this embodiment is by f-θ lens 9, ccd detector 10 and data line 2 20; Laser beam is after beam splitter group 3; The self calibration light beam 7 that part is reflected converges on the ccd detector 10 through f-θ lens 9; If all beam splitter unit 6 beam reflected hot spots on ccd detector all overlap, prove that the test beams 8 that projects on the tested reflective mirror 13 is parallel to each other, otherwise; Must adjust the position and the inclination of beam splitter unit 6, overlap until the hot spot of all beam splitter unit 6 beam reflected on ccd detector 10.
Described IMAQ and processing section are made up of optical screen 18, camera 16, tripod 17, data line 1 and computing machine 21.Optical screen 18 is placed on the standard focal line place of tested optical reflector of curved surface 13; And with the optical axis direction of tested optical reflector of curved surface 13 (0~90 °) at an angle; In order to receive hot spot by tested optical reflector of curved surface 13 reflections; The size of optical screen 18 and angle of inclination need be designed according to the geometric parameter of tested optical reflector of curved surface 13, to guarantee to obtain all flares of tested optical reflector of curved surface 13.Camera 16 is used to gather the facula information on the optical screen 18, is supported the adjustment of go forward side by side line position and angle by tripod 17.When sliding beam 11 time along the focal line scanning direction of tested optical reflector of curved surface 13; Camera 16 can be taken a series of images; And through data line 1 image information is transferred to and calculates in 21, computing machine 21 is through to the processing of image information and then judge whether tested optical reflector of curved surface 13 is qualified.
Also comprise conveyer 22 in this embodiment, said tested optical reflector of curved surface 13 is placed on the production line conveying device 22, after conveyer 22 is delivered to the reservation position, stops.Up-down pole 14 is propped an end of tested optical reflector of curved surface 13; The lifting height of up-down pole 14 can calculate according to the geometric parameter of tested optical reflector of curved surface 13, guarantees consistent with the optical axis direction of tested optical reflector of curved surface 13 by the test beams 6 of beam splitter group 3 outgoing.The other end of tested optical reflector of curved surface 13 is stuck on the baffle plate 15, and test beams 8 incides on the tested optical reflector of curved surface 13 along the optical axis direction of tested optical reflector of curved surface 13, through tested optical reflector of curved surface 13 reflections and converge on the optical screen 18.Because there is certain face shape error in tested optical reflector of curved surface 13, makes that the hot spot on the optical screen 18 has certain spuious distribution.Test beams 8 is along with the motion of sliding beam 11 scans tested optical reflector of curved surface 13; Camera 16 is taken the facula information on the optical screens 18 and is sent computing machine 21 to through data line 1; Computing machine 21 judges through Flame Image Process whether tested optical reflector of curved surface is qualified, thereby reaches the purpose of on-line quick detection.
Embodiment two, combination Fig. 2 explain this embodiment; This embodiment is with the difference of embodiment one; This embodiment for the face shape error to tested optical reflector of curved surface 13 that can be quantitative is tested, need increase shutter 23 in each beam splitter unit 6, increasing shutter 23 on the basis of embodiment one in each beam splitter unit; When tested optical reflector of curved surface 13 being carried out the face shape error detection; When the hot spot on projecting optical screen departs from ideal position, can be with shutter 23 Close Alls, and from left to right open shutter 23 successively; Can find and depart from the pairing measured point of hot spot, and try to achieve the normal direction of measured point and the deviation of desirable normal direction by the bias of hot spot and the coordinate information of measured point.

Claims (9)

1. solar groove type optical reflector of curved surface face shape error pick-up unit, this device comprises light supply apparatus, self-calibrating device and IMAQ and treating apparatus; It is characterized in that;
Said light supply apparatus comprises laser instrument (1), beam expanding lens (2) and beam splitter group (3); IMAQ and treating apparatus comprise optical screen (18), camera (16) and computing machine (21);
The light beam that said laser instrument (1) sends expands Shu Houzai through beam splitter group (3) beam splitting and reflection through beam expanding lens (2); Test beams after beam splitter group (3) beam splitting is projected on the tested optical reflector of curved surface (13); Self calibration light beam through beam splitter group (3) reflection is incident to self-calibrating device, and said self-calibrating device is to being projected to the depth of parallelism calibration of the test beams on the tested optical reflector of curved surface (13); Said optical screen (18) receives the facula information of tested optical reflector of curved surface (13) reflection; Camera (16) is gathered the facula information on the optical screen (18) and facula information is transferred in the computing machine (21), and computing machine (21) is judged the face shape error of tested optical reflector of curved surface (13) through the facula information that receives.
2. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1; It is characterized in that; This device also comprises scanning and governor motion; Said scanning and governor motion comprise sliding beam (11), guide rail (12), up-down pole (14) and baffle plate (15), and said sliding beam (11) is used to install light supply apparatus and self-calibrating device, and guide rail (12) is used to install sliding beam (11); Up-down pole (14) is used for the position and the attitude of tested optical reflector of curved surface (13) are adjusted, and baffle plate (15) is used for fixing the position of tested optical reflector of curved surface (13).
3. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1 and 2 is characterized in that, said self-calibrating device comprises that self-calibrating device comprises f-θ lens (9) and ccd detector (10); Said self calibration light beam converges on the ccd detector (10) through f-θ lens (9).
4. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1 and 2; It is characterized in that; Said laser instrument (1), beam expanding lens (2) and beam splitter group (3) are fixed on the sliding beam (11) successively; Said beam splitter group (3) is made up of a plurality of beam splitters unit (6), and each beam splitter unit (6) is made up of two beam splitter groups (3).
5. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 4; It is characterized in that; Said two beam splitters are respectively inclination beam splitter (4) and horizontal beam splitter (5), and the angle of inclination beam splitter (4) and horizontal beam splitter (5) is 45 °.
6. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 4 is characterized in that, the quantity of said beam splitter unit (6) is by the opening size and the measuring accuracy decision of tested optical reflector of curved surface (13).
7. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 4; It is characterized in that, in each beam splitter unit (6), shutter (23) is set, when tested optical reflector of curved surface (13) being carried out the face shape error detection; When the facula information of the tested optical reflector of curved surface (13) that optical screen (18) upward obtains departs from normal place; With shutter (23) Close All, and open shutter (23) from left to right successively, obtain to depart from the pairing measured point of hot spot.
8. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1; It is characterized in that; Said IMAQ and treating apparatus also comprise tripod (17), and said camera (16) supports the adjustment of go forward side by side line position and angle through tripod (17).
9. solar groove type optical reflector of curved surface face shape error pick-up unit according to claim 1 is characterized in that, the optical axis angle scope of optical screen in said IMAQ and the treating apparatus (18) and tested optical reflector of curved surface (13) is at 0~90 °.
CN201110449273.0A 2011-12-29 2011-12-29 Detection device for surface-shape errors of solar trench type curved surface reflector Expired - Fee Related CN102564343B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102937422A (en) * 2012-10-30 2013-02-20 中广核太阳能开发有限公司 Surface type detection equipment and method of solar light collecting mirror surface
CN104697470A (en) * 2013-12-08 2015-06-10 首航节能光热技术股份有限公司 Solar trough type condenser splicing-angle detection device and detection method
CN104697446A (en) * 2013-12-09 2015-06-10 首航节能光热技术股份有限公司 Groove type condenser measuring instrument and measuring method thereof
CN105136430A (en) * 2015-08-13 2015-12-09 武汉圣普太阳能科技有限公司 Testing method and testing device for molded surface precision of trough type condenser
CN105465559A (en) * 2015-12-30 2016-04-06 中国科学院长春光学精密机械与物理研究所 Supporting and adjusting device of profile detecting system for solar groove type curved reflection mirror
CN107561016A (en) * 2017-08-17 2018-01-09 华北电力大学 A kind of system of laser acquisition gas concentration
CN108693635A (en) * 2018-04-13 2018-10-23 东华大学 The light conversion device and design method of automotive upholstery surface blemish on-line checking
CN111750800A (en) * 2019-03-28 2020-10-09 精工爱普生株式会社 Three-dimensional measuring device and robot system
CN115500582A (en) * 2022-08-17 2022-12-23 上海科技大学 Foot three-dimensional contour acquisition system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0384402A (en) * 1989-08-28 1991-04-10 Yokohama Haitetsuku Kk Device for measuring shape of curved surface
US5982481A (en) * 1996-10-01 1999-11-09 Mcdonnell Douglas Corporation Alignment system and method for dish concentrators
CN102095387A (en) * 2010-12-07 2011-06-15 南京航空航天大学 Optical rotation angle field detection device based on polarized beam splitting imaging and measurement method thereof
CN202024876U (en) * 2011-01-17 2011-11-02 东莞市康达机电工程有限公司 Light-focusing precision testing device for solar parabolic reflection plate
CN102243067A (en) * 2011-04-15 2011-11-16 中国科学院长春光学精密机械与物理研究所 Surface shape detection device for solar condensing mirror

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0384402A (en) * 1989-08-28 1991-04-10 Yokohama Haitetsuku Kk Device for measuring shape of curved surface
US5982481A (en) * 1996-10-01 1999-11-09 Mcdonnell Douglas Corporation Alignment system and method for dish concentrators
CN102095387A (en) * 2010-12-07 2011-06-15 南京航空航天大学 Optical rotation angle field detection device based on polarized beam splitting imaging and measurement method thereof
CN202024876U (en) * 2011-01-17 2011-11-02 东莞市康达机电工程有限公司 Light-focusing precision testing device for solar parabolic reflection plate
CN102243067A (en) * 2011-04-15 2011-11-16 中国科学院长春光学精密机械与物理研究所 Surface shape detection device for solar condensing mirror

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
许文斌等: "塔式太阳能定日镜子镜镜面形精度和聚光性能评价的新方法", 《仪器仪表学报》 *

Cited By (13)

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Publication number Priority date Publication date Assignee Title
CN102937422A (en) * 2012-10-30 2013-02-20 中广核太阳能开发有限公司 Surface type detection equipment and method of solar light collecting mirror surface
CN104697470A (en) * 2013-12-08 2015-06-10 首航节能光热技术股份有限公司 Solar trough type condenser splicing-angle detection device and detection method
CN104697446A (en) * 2013-12-09 2015-06-10 首航节能光热技术股份有限公司 Groove type condenser measuring instrument and measuring method thereof
CN105136430A (en) * 2015-08-13 2015-12-09 武汉圣普太阳能科技有限公司 Testing method and testing device for molded surface precision of trough type condenser
CN105465559A (en) * 2015-12-30 2016-04-06 中国科学院长春光学精密机械与物理研究所 Supporting and adjusting device of profile detecting system for solar groove type curved reflection mirror
CN107561016B (en) * 2017-08-17 2020-06-09 华北电力大学 System for detecting gas concentration by laser
CN107561016A (en) * 2017-08-17 2018-01-09 华北电力大学 A kind of system of laser acquisition gas concentration
CN108693635A (en) * 2018-04-13 2018-10-23 东华大学 The light conversion device and design method of automotive upholstery surface blemish on-line checking
CN108693635B (en) * 2018-04-13 2020-06-23 东华大学 Light ray converter for online detection of surface flaws of automotive interior parts and design method
CN111750800A (en) * 2019-03-28 2020-10-09 精工爱普生株式会社 Three-dimensional measuring device and robot system
CN111750800B (en) * 2019-03-28 2022-04-26 精工爱普生株式会社 Three-dimensional measuring device and robot system
CN115500582A (en) * 2022-08-17 2022-12-23 上海科技大学 Foot three-dimensional contour acquisition system
CN115500582B (en) * 2022-08-17 2024-03-22 上海科技大学 Foot three-dimensional contour acquisition system

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