CN105737759A - Long trace profile measurement device - Google Patents
Long trace profile measurement device Download PDFInfo
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- CN105737759A CN105737759A CN201610101564.3A CN201610101564A CN105737759A CN 105737759 A CN105737759 A CN 105737759A CN 201610101564 A CN201610101564 A CN 201610101564A CN 105737759 A CN105737759 A CN 105737759A
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- area source
- beam splitter
- optical head
- hole screen
- measurement apparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
A long trace profile measurement device provided by the present invention is used to carry out the profile detection on the surface of a to-be-tested optical device and comprises a mobile optical head, and the mobile optical head comprises a surface light source, a single-hole screen, a beam splitter, a Fourier transform lens and an area array detector. The beam splitter is attached to the upper surface of the single-hole screen tightly, and the single-hole screen is arranged at one side of the surface light source and has an inclined angle with the surface light source, so that a light beam in the normal direction of the surface light source can pass a screen hole part of the single-hole screen. The beam splitter reflects to the surface of the to-be-tested optical device vertically, the Fourier transform lens is arranged above the beam splitter horizontally, and the area array detector is arranged above the Fourier transform lens horizontally. The long trace profile measurement device of the present invention enables a system error introduced by the lateral movement of a measurement light beam when different angles are measured to be reduced, thereby improving the measurement precision.
Description
Technical field
The present invention relates to high accuracy mirror shape detection field, particularly to a kind of long-range profile measurement apparatus.
Background technology
Need to use length in fields such as synchrotron radiation, large-scale astronomical telescope, extreme ultraviolet photolithographics and be about about 1m, face shape error lower than the elongated shape of 0.1 microradian, high accuracy mirror surface, x-ray to be focused on the hot spot of nanoscale.This kind of mirror shape quality for focusing on directly determines the quality of x-ray hot spot, so that it is accurately measured.Long-range profile instrument (LongTraceProfile is called for short LTP) is one of key instrument for detecting this large scale, high accuracy mirror shape.
The optical system that long-range face type instrument is made up of precison optical component itself, its operation principle is to incide on optical device under test by the reference beam of a branch of specific incident direction, by measuring the angle value of difference place reflection light beam on optical device under test, thus realizing the surface testing to optical device under test.Owing to long-range profile instrument adopts non-cpntact measurement pattern, the reflecting surface of optical device under test will not be caused damage in measurement process, and its certainty of measurement is high, the accurate detection of large-size mirror face shape can be realized.Therefore, in the past more than 20 year, long-range profile instrument achieves huge development, occurs in that LTP-I, LTP-II, LTP-V, PP-LTP (pentaprism Long travel profile instrument), online LTP, multi-functional LTP, NOM (nanocomposite optical detector) etc. are based on the Long travel profile instrument of fine light beam scanning Cleaning Principle.Wherein NOM is one of surface testing instrument that precision is the highest in the world at present.
Along with the development of science and technology, mirror shape detection is had higher requirement by each application.In order to promote the power of test of long-range profile instrument, it is necessary to its various systematic errors are modified or eliminate.In these systematic errors, a topmost class is to introduce due to the fine difference between optical element and ideal optical components used in the light path system of long-range profile instrument own, this main manifestations both ways:
1) the reflective optical devices face shape in light path system and ideally-reflecting optical component surface shape fine difference and transmission optical component refractive index is uneven can introduce systematic error, because when measuring beam incides on non-ideal optical element, non-ideal optical element can cause that the direction of outgoing beam produces small deviation with desirable exit direction, thus introducing angle measurement error；
2) light beam being reflected back by optical device under test can produce on each optical element traversing along with the change measuring angle in systems, thus introducing in measurement system the error at difference place on same optical element.
Fig. 1 illustrates the optical texture schematic diagram of existing pp-LTP, it includes LASER Light Source 1', fixing optical head, flying optical head and f-θ angle detection system, fixing optical head includes phase board 2', beam splitter 3' and plane mirror 4', flying optical head includes pentaprism 5', f-θ angle detection system and includes FT (Fourier transformation) lens 7' and planar array detector 8'.After light beam impinges perpendicularly on minute surface 6' to be measured from pentaprism 5', if measurement point is out-of-level on minute surface 6' to be measured, reflection light will reflection angled with incident ray, if this angle is θ angle, then namely the distance s on pentaprism 5' represents that θ is equal to the traversing amount that 0 ° of light beam of reflection when being not equal to 0 ° with θ produces on the reflecting surface of pentaprism 5'.As can be seen from Figure 1, measuring beam is that measurement point starts skew from minute surface 6' to be measured, so the point of measuring on minute surface 6' to be measured is the reference point that in pp-LTP, the traversing gauge of each optical element is calculated, thus for same deflection angle, the geometry light path that optics in system is measured a little on minute surface 6' to be measured is more remote, the measuring beam traversing amount on this optics is more big, this just traversing makes each optics in system introduce the error of difference.Transmission, reflective optical device used in measurement system are more many, and the traversing amount that measuring beam produces is more big, then the systematic error introduced is more big.
Desirable optical element is can not be getable, in order to reduce in detector the systematic error by traversing introducing, two kinds of approach are mainly had from above-mentioned analysis is known, a kind of is reduce the optical element quantity used in detection system, another kind is to reduce in the reference point and detection system that traversing gauge calculates the distance between each optical element, thus urgently provides a kind of such measurement apparatus.
Summary of the invention
The purpose of the present invention aims to provide a kind of high-precision long-range profile measurement apparatus, with by reduce measure angle difference time measuring beam cause traversing, thus reducing systematic error.
For achieving the above object, the present invention is by the following technical solutions:
A kind of long-range profile measurement apparatus, for the surface of optical device under test is carried out surface testing, it includes flying optical head,
Described flying optical head includes area source, single hole screen, beam splitter, Fourier transform lens and planar array detector, described area source is vertically arranged, described beam splitter is close to the upper surface of described single hole screen, described single hole screen is arranged on described area source side and at an angle with described area source, the size of this angle makes area source normal direction light beam reflex to optical device under test surface by single hole screen shield aperture part beam splitter, described Fourier transform lens is horizontally set on above described beam splitter, described planar array detector is horizontally set on above described Fourier transform lens.
Further, described flying optical head also includes housing, and described area source, single hole screen, beam splitter, Fourier transform lens and planar array detector are arranged in described housing.
Further, this measurement apparatus also includes fixing optical head and plane mirror, described plane mirror is fixed on described flying optical head, and described fixing optical head is set to project reference beam to described plane mirror, and detects the light beam reflected through described plane mirror.
Preferably, described fixing optical head is autocollimator or f-θ angle detection system.
Preferably, described area source is incoherent area source.
Further, this measurement apparatus also includes optical table and linear translation platform, and described linear translation platform is positioned on described optical table, and described flying optical head is arranged on described linear translation platform.
Preferably when described area source is vertically arranged, the angle of inclination of described single hole screen and described area source is 45 °.
The present invention is when measuring, by shield aperture each through single hole screen of the measuring beam of different angles that reflects from optical device under test surface, thus the calculating reference point being traversing amount of optical element each in measurement apparatus with the shield aperture central point of single hole screen, and then it is believed that measuring beam is the shield aperture from single hole screen starts skew.Point is measured for compared with the scheme of traversing amount calculating reference point with optical device under test with prior art, the present invention makes the distance between each optical element and reference point be greatly shortened by reference point is transferred to the shield aperture central point of single hole screen, thus decreasing the measuring beam traversing amount on each optical element, and then reduce by the systematic error of traversing introducing.nullIn addition，The refraction used in the present invention、Reflective optical device only has beam splitter and Fourier transform lens，But it is close to single hole screen due to beam splitter to arrange，The beam splitter region at the shield aperture place being only in single hole screen can be used to，Thus the light beam of different measuring point reflection is all by by the same area of beam splitter on optical device under test，Although this region can introduce error，But this error is identical for each measurement point，Thus it is believed that beam splitter introduces identical error for the measured value of different angles，So the relative variation of measurement result is not affected by the systematic error that beam splitter introduces，Only the relative variation of measurement result is meaningful to the face shape characterizing optical device under test，That is，Beam splitter is contribution system error not，The real only Fourier transform lens introducing error in the present invention，Thereby reduce the number of optical elements introducing systematic error in measurement apparatus.
Accompanying drawing explanation
Fig. 1 is the optical texture schematic diagram of pp-LTP in prior art；
Fig. 2 a and 2b is area source direct reflection optics schematic diagram, and wherein, Fig. 2 a is that plane mirror is horizontal, and Fig. 2 b is that plane mirror is in obliquity；
Fig. 3 is the optical texture schematic diagram of a kind of long-range profile measurement apparatus of the present invention；
Fig. 4 a and 4b is the paths schematic diagram of the present invention, and wherein, Fig. 4 a is the index path being incident to optical device under test, and Fig. 4 b is the index path after optical device under test reflection.
Detailed description of the invention
Below in conjunction with accompanying drawing, provide presently preferred embodiments of the present invention, and be described in detail.
It is known that, as shown in Figure 2 a, if after an area source 100 is placed horizontally at hole 200, then the light beam that area source 100 sends can regard, after plane mirror 300 reflects, the light beam by plane mirror 300 minute surface, light source 100 imaging 100A being sent and being passed through aperture aberration 200A by hole 200 part as.From direct reflection principle, propagate along plane mirror 300 normal direction by hole 200 is inevitable with the light beam of aperture aberration 200A center after direct reflection, so being a branch of light pencil propagated along minute surface normal direction and have small divergence angle by the light beam in hole 200 after direct reflection, the size of its angle of divergence is determined to the distance plane mirror 300 minute surface by diameter and the hole 200 in hole 200.If there is Angulation changes in plane mirror 300, as shown in Figure 2 b, the position as 100A of area source 100 and the position of aperture aberration 200A also can change therewith, but the light beam that now area source 100 sends still can be regarded as after plane mirror 300 reflects and by plane mirror 300 minute surface light source 100 imaging 100A sent and pass through the light beam of aperture aberration 200A, therefore direct reflection is returned the light beam in hole 200 and is still that a branch of light pencil propagated along minute surface normal direction and have small divergence angle.
Based on above-mentioned principle, the invention provides a kind of high-precision long-range profile measurement apparatus.In the embodiment shown in fig. 3, this measurement apparatus includes flying optical head 1, optical device under test 2, optical table 3, linear translation platform 4, plane mirror 11 and fixing optical head 12.
As shown in Figure 3, the optical table 3 of the present invention adopts optical table common in existing LTP to realize, wherein, linear translation platform 4 is horizontally placed on above optical table 3, and flying optical head 1 is fixed on linear translation platform 4 and moves horizontally optical device under test 2 carries out horizontal sweep measurement (scanning direction is as shown by the arrows in Figure 3) with linear translation platform 4；Fixing optical head 12 is fixed on a sidewall of optical table 3, plane mirror 11 is fixed on housing 10 outer wall of flying optical head 1, wherein fix optical head 12 to be oppositely arranged with plane mirror 11, for projecting reference beam to plane mirror 11 and detecting this reference beam light beam after plane mirror 11 reflects, and then correction flying optical head 1 vibrates the kinematic error impact caused in measurement process.In the art, adopt the scheme that flying optical head 1 kinematic error revised by fixing optical head 12 and plane mirror 11 to belong to known technology, do not repeat them here its operation principle.Additionally, the fixing optical head 12 in the present invention can adopt existing autocollimator or f-θ angle detection system to realize, the fixing optical head 12 that figure 3 illustrates is autocollimator.
Referring to Fig. 3 again, the flying optical head 1 of the present invention includes housing 10 and installs area source 5 in the housing 10, single hole screen 6, beam splitter 7, Fourier transform lens 8 and planar array detector 9.Wherein, area source 5 is vertically arranged, and single hole screen 6 is arranged on area source 5 side and is 45° angle with area source, and beam splitter 7 is close to the upper surface of single hole screen 6, Fourier transform lens 8 is horizontally set on above beam splitter 7, and planar array detector 9 is horizontally set on above Fourier transform lens 8.Simple geometry optical theory according to this area is it can be seen that the light beam of area source 5 outgoing can regard beam splitter as to the area source imaging 5A light beam sent after beam splitter 7 reflects.It will be clear that single hole screen can also other angles be arranged with area source.Because placement is close to by beam splitter and single hole screen, need, with beam splitter, the light beam coming from area source normal direction is reflexed to optical mirror plane to be measured, if area source is vertically placed, then single hole screen best angle is 45 °, if but area source has certain inclination, then single hole screen also should have certain inclination, as long as single hole screen angle adjustment can reflex to optical device under test surface to holding surface light source normal direction light beam.
When optical device under test 2 is carried out surface testing, first as shown in fig. 4 a, the shield aperture 13 of single hole screen 6 of first passing through the segment beam that area source 5 sends incides on the beam splitter 7 after single hole screen 6, then is reflected to form light beam 14 by beam splitter 7 and incide the surface of optical device under test 2；Then as shown in Figure 4 b, light beam 15 is reflected back from optical device under test 2.Direct reflection principle according to Fig. 2 a and 2b, light beam 14 is reflected back through optical device under test 2 surface and passes through light beam 15 necessarily a branch of light pencil that measurement point normal direction is propagated along optical device under test 2 surface of single hole screen 6, this light pencil 15 is the measuring beam of system, this measuring beam forms measurement hot spot by converging to through Fourier transform lens 8 after beam splitter 7 on planar array detector 9, can record the angle change value on optical device under test 2 surface according to the position of centre of gravity delta data of this measurement hot spot.
Compared with prior art, it is an advantage of the current invention that:
1, the light path system that the present invention adopts advantageously reduces the measuring beam traversing amount on each optical element.Specifically, the tradition traversing zequin of long-range profile instrument is the measurement point on optical device under test, so being difficult to reach to reduce the purpose of traversing amount by reducing the geometry light path between the calculating reference point of traversing amount and system optics；And in the present invention, owing to the measuring beam of different angles reflexes to planar array detector 9 each through the shield aperture 13 of single hole screen 6 and forms measurement hot spot, thus the traversing amount calculating reference point of the central point O of single hole screen 6 shield aperture 13 is in system each optics, point is measured for compared with the scheme of traversing amount calculating reference point with optical device under test with prior art, the present invention makes each optical element by reference point is transferred to the shield aperture central point O of single hole screen 6, such as the Fourier transform lens 8 with the compact setting of single hole screen 10, and the distance between reference point is greatly shortened, thus decreasing the measuring beam traversing amount on optical element, and then reduce by the systematic error of traversing introducing.
2, the light path system that the present invention adopts decreases the optical element producing error.Specifically, having multiple optics in tradition long-range profile instrument light path, include pentaprism 5' and beam splitter 3' such as Fig. 1, they have multiple optical surface, and themselves be again the transmissive body that refractive index is uneven, these all can cause because of the traversing introducing systematic error of measuring beam；nullAnd in the present invention，The optical element causing measuring beam deviation ideal orientation only has beam splitter 7 and Fourier transform lens 9，But owing to setting is close to by single hole screen 6 and beam splitter 7，Beam splitter 7 region at shield aperture 13 place being only in single hole screen 6 can be used to，Thus in whole measurement process on optical device under test 2 light beam of different measuring point reflection all by the same area by beam splitter 7，Although this region can introduce error，But this error is identical for each measurement point，Thus it is believed that beam splitter 7 introduces identical error for the measured value of different angles，So the relative variation of measurement result is not affected by the systematic error that beam splitter 7 introduces，And should be appreciated that，Only the relative variation of measurement result is meaningful to characterizing optical device under test face shape，That is，The real only Fourier transform lens 9 introducing error in the present invention，Thereby reduce the number of optical elements introducing systematic error.
3, tradition long-range profile instrument, such as pp-LTP, it is necessary to light source 1' has good directivity, and conventional laser does light source；And native system is to light source direction not requirement, area source 5 can adopt incoherent area source, so advantageously reduces laser in communication process due to the diffraction light interference of the impurity in air or the introducing of shield aperture diffraction.
4, traditional based in the long-range profile instrument of LASER Light Source, owing to the direction drift of laser beam can introduce directivity error；And in the present invention, measuring beam through single hole screen 6 is a branch of light pencil 15 with small divergence angle propagated with measurement point normal direction on optical device under test 2, this light pencil 15 points to measurement point normal direction on optical device under test 2 all the time, so being absent from directivity error problem in the present invention.
Above-described, it is only presently preferred embodiments of the present invention, is not limited to the scope of the present invention, the above embodiment of the present invention can also make a variety of changes.Namely every claims according to the present patent application and description are made change simple, equivalent and modification, fall within the claims of the present invention.The not detailed description of the present invention be routine techniques content.
Claims (7)
1. a long-range profile measurement apparatus, for the surface of optical device under test is carried out surface testing, it includes flying optical head, it is characterised in that
Described flying optical head includes area source, single hole screen, beam splitter, Fourier transform lens and planar array detector, described beam splitter is close to the upper surface of described single hole screen, described single hole screen is arranged on described area source side and at an angle with described area source, this angle is configured such that area source normal direction light beam can pass through single hole screen shield aperture part beam splitter vertical reflection to optical device under test surface, described Fourier transform lens is horizontally set on above described beam splitter, and described planar array detector is horizontally set on above described Fourier transform lens.
2. long-range profile measurement apparatus according to claim 1, it is characterised in that described flying optical head also includes housing, and described area source, single hole screen, beam splitter, Fourier transform lens and planar array detector are arranged in described housing.
3. long-range profile measurement apparatus according to claim 1, it is characterized in that, this measurement apparatus also includes fixing optical head and plane mirror, described plane mirror is fixed on described flying optical head, described fixing optical head is set to project reference beam to described plane mirror, and detects the light beam reflected through described plane mirror.
4. long-range profile measurement apparatus according to claim 3, it is characterised in that described fixing optical head is autocollimator or f-θ angle detection system.
5. long-range profile measurement apparatus according to claim 1, it is characterised in that described area source is incoherent area source.
6. long-range profile measurement apparatus according to claim 1, it is characterised in that this measurement apparatus also includes optical table and linear translation platform, and described linear translation platform is positioned on described optical table, and described flying optical head is arranged on described linear translation platform.
7. the angle of inclination of long-range profile measurement apparatus according to claim 1, it is characterised in that when described area source is vertically arranged, described single hole screen and described area source is 45 °.
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| CN110702030A (en) * | 2019-11-14 | 2020-01-17 | 中科院南京天文仪器有限公司 | Compensation type scanning device and method for online detection of rotationally symmetric mirror surface shape |
| CN110926367A (en) * | 2019-12-17 | 2020-03-27 | 重庆理工大学 | Long-range optical surface shape detection device and detection method |
| CN110940298A (en) * | 2019-12-17 | 2020-03-31 | 重庆理工大学 | Autocollimator |
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