CN205505988U - Long -range optical surface shape of face detector - Google Patents
Long -range optical surface shape of face detector Download PDFInfo
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- CN205505988U CN205505988U CN201620138629.7U CN201620138629U CN205505988U CN 205505988 U CN205505988 U CN 205505988U CN 201620138629 U CN201620138629 U CN 201620138629U CN 205505988 U CN205505988 U CN 205505988U
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Abstract
The utility model provides a long -range optical surface shape of face detector, including removing the optical head, it includes tail optical fiber, beam splitter, haplopore screen, fourier transform lens and area array detector to move the optical head, it sets up to passing through to remove the optical head the tail optical fiber is with the light beam outgoing of input, so that the light beam sees through it on the surface, passes through to incide the optical device that awaits measuring behind the beam splitter again optical device's the surface reflection of awaiting measuring returns the beam splitter, and pass through the light beam that the beam splitter made the partial reflection return sees through the screen hole reflection of haplopore screen extremely fourier transform lens, the light beam of this reflection passes through fourier transform lens follows the perpendicular to the surperficial direction that corresponds the normal line of measuring point of the optical device that awaits measuring reflects extremely the area array detector is in at last form measurement light spot on the area array detector. The utility model discloses the system error that the measuring beam sideslip was introduced when measuring different angles has been reduced to measurement accuracy has been improved.
Description
Technical field
This utility model relates to high accuracy mirror shape detection field, particularly to a kind of long-range Optical Surface detector.
Background technology
A length of about 1m, face shape error are the core optical elements in the science and technology field such as large-scale astronomical telescope, extreme ultraviolet photolithographic, synchrotron radiation optics engineering, free-electron laser less than the large scale of 0.1 microradian, high-precision high-quality optical reflecting mirror.The quality of this kind of optical mirror plane determines the quality of corresponding science and technology field light beam.Long-range profile instrument based on sequential scanning method (Long Trace Profile is called for short LTP) is one of key instrument applying to this type of large scale, high-precision optical element surface testing.Existing long-range profile instrument carries out point by point scanning by introducing the incident measuring beam of a branch of fixed angle on optical device under test, then measures the angle value reflecting light beam at difference on optical device under test, it is achieved the surface testing to optical device under test.
Owing to long-range profile instrument uses non-cpntact measurement pattern, the reflecting surface of optical device under test will not be caused damage during measuring, and its certainty of measurement is high, the accurate detection of large-size mirror face shape can be realized.Therefore, in the past more than 20 year, long-range profile instrument achieves huge development, occurs in that the Long travel profile instruments based on fine light beam scanning Cleaning Principle such as LTP-I, LTP-II, LTP-V, PP-LTP (pentaprism Long travel profile instrument), online LTP, multi-functional LTP, NOM (nanocomposite optical detector).Wherein NOM is one of current surface testing instrument that precision is the highest in the world.
Along with the development of science and technology, optical component surface shape detection is had higher requirement by each application.In order to promote the power of test of long-range profile instrument, need its various systematic errors are modified or are eliminated.In these systematic errors, a topmost class is to cause owing to optical element used in long-range profile instrument light path system is undesirable, and optical element is undesirable mainly shows themselves in that 1) there is face shape error compared with ideal optical components in reflective optical devices；2) refraction optical element refractive index is uneven.When utilizing long-range profile instrument to carry out angular surveying, these reflections, refraction optical element will cause measuring beam to deviate preferable direction, thus introduce measurement error, and the error that same optical element introduces in different measuring position is different.Therefore, when measuring angle and changing, measuring beam will occur traversing on these optical elements, thus cause same optical element can introduce different errors when measuring angle difference.
When using Long travel profile instrument that minute surface to be measured is detected, the most angled relative variation is meaningful, if the error that each optical element introduces when measuring different angles is identical or difference is the least, for the relative changing value of angle, this kind of systematic error can be ignored.But when reality is measured, measuring beam is traversing by producing on the most each optics of change along with measurement angle.Pp-LTP as shown in Figure 1, it includes LASER Light Source 1', fixing optical head, flying optical head and f-θ angle detection system, fixing optical head includes phase board 2', beam splitter 3' and plane mirror 4', flying optical head includes that pentaprism 5', f-θ angle detection system include FT (Fourier transformation) lens 7' and planar array detector 8'.When light beam is after pentaprism 5' impinges perpendicularly on minute surface 6' to be measured, if measurement point not level on minute surface 6' to be measured, reflection light will reflection angled with incident ray, if this angle is θ angle, then distance s in pentaprism 5' i.e. represents that θ is equal to the traversing amount that 0 ° of light beam of reflection when being not equal to 0 ° with θ produces on the reflecting surface of pentaprism 5'.As can be seen from Figure 1, measuring beam is that measurement point starts skew from minute surface 6' to be measured, so the point of measuring on minute surface 6' to be measured is the reference point that in pp-LTP, the traversing amount of each optical element calculates, thus for same deflection angle, the geometry light path that optics in system is measured a little on minute surface 6' to be measured is the most remote, the measuring beam traversing amount on this optics is the biggest, the most this traversing makes each optics in system introduce the error of difference.Transmission, reflective optical device used in measurement system are the most, and the traversing amount that measuring beam produces is the biggest, then the systematic error introduced is the biggest.
Knowable to above-mentioned analysis, reduce in detector and mainly had two kinds of approach by the systematic error of traversing introducing, a kind of is to reduce in detecting system the optical element quantity used, and another kind is to reduce in the reference point and detecting system that traversing amount calculates the distance between each optical element.Based on such theory, it would be highly desirable to provide the detecting system that a kind of systematic error reduces.
Utility model content
The purpose of this utility model aims to provide a kind of high-precision long-range Optical Surface detector, traversing with caused by measuring beam during minimizing measurement angle difference, thus reduces systematic error.
For realizing object above, this utility model by the following technical solutions:
A kind of long-range Optical Surface detector, for the surface of optical device under test is carried out surface testing, it includes flying optical head,
Described flying optical head includes tail optical fiber, beam splitter, single hole screen, Fourier transform lens and planar array detector, wherein, described flying optical head is set to the beam exit of input by described tail optical fiber, so that light beam is through on the surface inciding optical device under test after described beam splitter, surface through described optical device under test is reflected back described beam splitter again, and make the light beam of partially reflective time reflex to described Fourier transform lens through the shield aperture of described single hole screen by described beam splitter, the light beam of this reflection reflexes to described planar array detector through the direction of the normal that described Fourier transform lens edge is perpendicular to described optical device under test surface measurement point, last formation on described planar array detector measures hot spot.
Preferably, described single hole screen is close to the bottom surface of described Fourier transform lens.
Preferably, the beam exit point of described tail optical fiber overlaps through the central point of described beam splitter transmission imaging with the shield aperture of described single hole screen through the picture point of described beam splitter reflection imaging.
Further, described flying optical head also includes that housing, described tail optical fiber, beam splitter, single hole screen, Fourier transform lens and planar array detector are arranged in described housing.
Further, this detector also includes fixing optical head and plane mirror, described plane mirror is fixed on described flying optical head, and described fixing optical head is set to project reference beam to described plane mirror, and detects the light beam reflected through described plane mirror.
Preferably, described fixing optical head is autocollimator or f-θ angle detection system.
Further, this detector also includes optical fiber and light source, and described optical fiber is connected between the incidence end of described tail optical fiber and described light source.
Further, described light source is incoherent light source.
Preferably, this detector also includes that optical table and linear translation platform, described linear translation platform are positioned on described optical table, and described flying optical head is arranged on described linear translation platform.
In sum, during measurement of the present utility model, the measuring beam of different angles all reflexes to planar array detector by the shield aperture of single hole screen and forms measurement hot spot, thus the shield aperture central point of single hole screen is the calculating reference point of the traversing amount of each optical element in detector.Point is measured for compared with the scheme of traversing amount calculating reference point with optical device under test with prior art, this utility model makes the distance between each optical element and reference point be greatly shortened by reference point is transferred to the shield aperture central point of single hole screen, thus decrease the measuring beam traversing amount on each optical element, and then reduce by the systematic error of traversing introducing.nullIn addition，The refraction used in this utility model、Reflective optical device only has beam splitter and Fourier transform lens，But it is close to single hole screen due to Fourier transform lens arrange，Only it is in the Fourier transform lens region at the shield aperture of single hole screen can be used，Thus during whole measurement on optical device under test the light beam of different measuring point reflection all by by the same area of Fourier transform lens，Although this region can introduce error，But this error is identical for each measurement point，Thus it is believed that Fourier transform lens introduces identical error for the measured value of different angles，So the relative variation of measurement result is not affected by the systematic error that Fourier transform lens introduces，That is，The real only beam splitter introducing error in this utility model，Thereby reduce the number of optical elements introducing systematic error.
Accompanying drawing explanation
Fig. 1 is the optical texture schematic diagram of pp-LTP in prior art；
Fig. 2 a and 2b is point source direct reflection optics schematic diagram, and wherein, Fig. 2 a is that plane mirror is horizontal, and Fig. 2 b is that plane mirror is in obliquity；
Fig. 3 is the optical texture schematic diagram of a kind of long-range Optical Surface detector of the present utility model；
Fig. 4 a and 4b is paths schematic diagram of the present utility model, and wherein, Fig. 4 a is the index path being incident to optical device under test, and Fig. 4 b is the index path after optical device under test reflection.
Detailed description of the invention
Below in conjunction with the accompanying drawings, provide preferred embodiment of the present utility model, and be described in detail.
It is known that as shown in Figure 2 a, if a point source 100 is positioned over the center in hole 200, then the light beam that point source 100 sends can regard, after plane mirror 300 reflects, the light beam sent light source 100 imaging 100A by plane mirror 300 minute surface as.From direct reflection principle, propagate along plane mirror 300 normal direction by the light beam of center, hole 200 is inevitable after direct reflection, so being a branch of cone-shaped beam propagated along minute surface normal direction and have small divergence angle by the light beam in hole 200 after direct reflection, the size of its angle of divergence is determined to the distance plane mirror 300 minute surface by diameter and the hole 200 in hole 200.If there is Angulation changes in plane mirror 300, as shown in Figure 2 b, the position as 100A of point source 100 also can change therewith, but the light beam that this point light sources 100 sends still can regard, after plane mirror 300 reflects, the light beam sent light source 100 imaging 100A by plane mirror 300 minute surface as, therefore direct reflection is returned the light beam in hole 200 and is still that a branch of cone-shaped beam propagated along minute surface normal direction and have small divergence angle.
Based on above-mentioned principle, this utility model provides a kind of high-precision long-range Optical Surface detector.In the embodiment shown in fig. 3, this detector includes flying optical head 1, optical device under test 2, optical table 3, linear translation platform 4, light source 5, fixing optical head 6 and plane mirror 7.
As shown in Figure 3, optical table 3 of the present utility model uses optical table common in existing LTP to realize, wherein, linear translation platform 4 is horizontally placed on above optical table 3, and flying optical head 1 is fixed on linear translation platform 4 and moves horizontally optical device under test 2 carries out horizontal sweep measurement (scanning direction is as shown by the arrows in Figure 3) with linear translation platform 4；Light source 5 arranges to reduce its heating impact on measuring away from optical table 3；Fixing optical head 6 is fixed on a sidewall of optical table 3, plane mirror 7 is fixed on housing 14 outer wall of flying optical head 1, wherein fix optical head 6 relative with plane mirror 7 and put, for projecting reference beam to plane mirror 7 and detecting this reference beam light beam after plane mirror 7 reflects, and then revise the flying optical head 1 kinematic error during measuring.In the art, the scheme using fixing optical head 6 and plane mirror 7 to revise flying optical head 1 kinematic error belongs to known technology, does not repeats them here its operation principle.Additionally, the fixing optical head 6 in this utility model can use existing autocollimator or f-θ angle detection system to realize, the fixing optical head 6 that figure 3 illustrates is autocollimator.
Referring to Fig. 3 again, flying optical head 1 of the present utility model includes housing 14 and the tail optical fiber 8 being arranged in housing 14, beam splitter 9, single hole screen 10, Fourier transform lens 11 and planar array detector 12.Wherein, planar array detector 12 is arranged on above Fourier transform lens 11, single hole screen 10 is close to the bottom surface of Fourier transform lens 11, beam splitter 9 be arranged on below single hole screen 10 and with single hole screen 10 as close possible to, to reduce the traversing amount of light beam on beam splitter 9, tail optical fiber 8 is horizontally set on the side of beam splitter 9.By position and the angle of appropriately configured each optical element, the beam exit point making tail optical fiber 8 reflects the picture point of imaging and the shield aperture 13 (as shown in Figs. 4a and 4b) of single hole screen 10 through beam splitter 9, central point coincidence through beam splitter 9 transmission imaging, then according to the simple geometry optical theory of this area, the light beam of tail optical fiber 8 outgoing can regard the light beam of the shield aperture 13 central point O outgoing from single hole screen 10 as.
When optical device under test 2 is carried out surface testing, the most as shown in fig. 4 a, the light beam that light source 5 sends first passes through in the tail optical fiber 8 that optical fiber 15 travels to flying optical head 1, then forms light beam 16 and incide the surface of optical device under test 2 from tail optical fiber 8 outgoing and through beam splitter 9；The most as shown in Figure 4 b, optical device under test 2 is reflected back light beam 17 to beam splitter 9, and light beam 17 is then passed through the shield aperture 13 of single hole screen 10 after through beam splitter 9 and arrives Fourier transform lens 11.From Such analysis, the light beam of tail optical fiber 8 outgoing can regard the light beam of the shield aperture central point O outgoing from single hole screen 10 as, and according to the direct reflection principle shown in Fig. 2 a and 2b, from the light beam 16 of the shield aperture 13 central point O outgoing of single hole screen 10 after optical device under test 2 surface is reflected, by the most a branch of taper light pencil 17 that measurement point normal direction is propagated along optical device under test 2 surface of the segment beam 17 of shield aperture 13.This taper light pencil 17 converges to form measurement hot spot on planar array detector 12 finally by the Fourier transform lens 11 being close to setting with single hole screen 10, i.e. can be used for recording the surficial inclination of optical device under test 2.
Compared with prior art, the utility model has the advantage of:
1, tradition long-range profile instrument such as pp-LTP needs light source 1' to have preferable directivity, and conventional laser does light source；And native system is to light source direction not requirement, light source 5 can use incoherent light source, such that it is able to reduce the laser diffraction impact on angular surveying.
2, the tradition traversing zequin of long-range profile instrument is the measurement point on optical device under test, so the geometry light path being difficult between the calculating reference point by reducing traversing amount and system optics reaches to reduce the purpose of traversing amount；And during measurement of the present utility model, measurement hot spot is formed owing to the measuring beam of different angles all reflexes to planar array detector 12 by the shield aperture 13 of single hole screen 10, thus the central point O of single hole screen 10 shield aperture 13 is the traversing amount calculating reference point of each optics in system, point is measured for compared with the scheme of traversing amount calculating reference point with optical device under test with prior art, this utility model makes each optical element by reference point is transferred to the shield aperture central point O of single hole screen 10, beam splitter 9 such as setting compact with single hole screen 10, and the distance between reference point is greatly shortened, thus decrease the measuring beam traversing amount on optical element, and then reduce by the systematic error of traversing introducing.
3, tradition long-range profile instrument light path there is multiple optics, as Fig. 1 includes pentaprism 5' and beam splitter 7', they have multiple optical surface, and themselves are again the transmissive bodies that refractive index is uneven, and these all can cause because of measuring beam traversing introducing systematic error；nullAnd in this utility model，The optical element causing measuring beam deviation ideal orientation only has beam splitter 9 and Fourier transform lens 11，But owing to single hole screen 10 and Fourier transform lens 11 are close to arrange，Only it is in Fourier transform lens 11 region at the shield aperture 13 of single hole screen 10 can be used，Thus during whole measurement on optical device under test 2 light beam of different measuring point reflection all by the same area by Fourier transform lens 11，Although this region can introduce error，But this error is identical for each measurement point，Thus it is believed that Fourier transform lens 11 introduces identical error for the measured value of different angles，So the relative variation of measurement result is not affected by the systematic error that Fourier transform lens 11 introduces，That is，The real only beam splitter 9 introducing error in this utility model，Thereby reduce the number of optical elements introducing systematic error.
4, in traditional long-range profile instrument based on LASER Light Source, owing to the direction drift of laser beam can introduce directivity error；And in this utility model, measuring beam through single hole screen 10 is a branch of taper light pencil 17 with small divergence angle propagated with measurement point normal direction on optical device under test 2, this taper light pencil 17 points to measurement point normal direction on optical device under test 2 all the time, so there is not directivity error problem in this utility model.
5, usual, high-frequency information refers to the high fdrequency component of height relief on minute surface to be measured, and record when measuring with LTP is the meansigma methods in hot spot, so hot spot is the least, average region is the least, and high-frequency information is the most, and tradition LTP spot diameter is at several millimeters.And in this utility model, owing to measuring beam is taper light pencil 17, visible spot size on optical device under test 2 is necessarily smaller than shield aperture 13 size of single hole screen 10, such as, during shield aperture 13 a diameter of 1mm, on optical device under test 2, measuring beam spot diameter is about 0.5mm, it is clear that the spot diameter of 0.5mm can obtain more high-frequency information, is thus advantageous to carry out high frequency measurement.
Above-described, preferred embodiment the most of the present utility model, it is not limited to scope of the present utility model, above-described embodiment of the present utility model can also make a variety of changes.The most every change simple, equivalent made according to claims of the present utility model and description and modification, fall within claims of the present utility model.The most detailed description of this utility model be routine techniques content.
Claims (9)
1. a long-range Optical Surface detector, for the surface of optical device under test is carried out surface testing, it includes flying optical head, it is characterised in that
Described flying optical head includes tail optical fiber, beam splitter, single hole screen, Fourier transform lens and planar array detector, described flying optical head is set to the beam exit of input by described tail optical fiber, so that light beam is through on the surface inciding optical device under test after described beam splitter, surface through described optical device under test is reflected back described beam splitter again, and make the light beam of partially reflective time reflex to described Fourier transform lens through the shield aperture of described single hole screen by described beam splitter, the light beam of this reflection reflexes to described planar array detector through the direction of the normal that described Fourier transform lens edge is perpendicular to described optical device under test surface measurement point, last formation on described planar array detector measures hot spot.
Long-range Optical Surface detector the most according to claim 1, it is characterised in that described single hole screen is close to the bottom surface of described Fourier transform lens.
Long-range Optical Surface detector the most according to claim 1, it is characterised in that the beam exit point of described tail optical fiber overlaps through the central point of described beam splitter transmission imaging with the shield aperture of described single hole screen through the picture point of described beam splitter reflection imaging.
Long-range Optical Surface detector the most according to claim 1, it is characterised in that described flying optical head also includes that housing, described tail optical fiber, beam splitter, single hole screen, Fourier transform lens and planar array detector are arranged in described housing.
Long-range Optical Surface detector the most according to claim 1, it is characterized in that, this detector also includes fixing optical head and plane mirror, described plane mirror is fixed on described flying optical head, described fixing optical head is set to project reference beam to described plane mirror, and detects the light beam reflected through described plane mirror.
Long-range Optical Surface detector the most according to claim 5, it is characterised in that described fixing optical head is autocollimator or f-θ angle detection system.
Long-range Optical Surface detector the most according to claim 1, it is characterised in that this detector also includes optical fiber and light source, and described optical fiber is connected between the incidence end of described tail optical fiber and described light source.
Long-range Optical Surface detector the most according to claim 7, it is characterised in that described light source is incoherent light source.
Long-range Optical Surface detector the most according to claim 1, it is characterised in that this detector also includes that optical table and linear translation platform, described linear translation platform are positioned on described optical table, and described flying optical head is arranged on described linear translation platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201620138629.7U CN205505988U (en) | 2016-02-24 | 2016-02-24 | Long -range optical surface shape of face detector |
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| CN201620138629.7U CN205505988U (en) | 2016-02-24 | 2016-02-24 | Long -range optical surface shape of face detector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758333A (en) * | 2016-02-24 | 2016-07-13 | 中国科学院上海应用物理研究所 | Long-trace optical surface profile detector |
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2016
- 2016-02-24 CN CN201620138629.7U patent/CN205505988U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758333A (en) * | 2016-02-24 | 2016-07-13 | 中国科学院上海应用物理研究所 | Long-trace optical surface profile detector |
| CN105758333B (en) * | 2016-02-24 | 2018-06-19 | 中国科学院上海应用物理研究所 | A kind of long-range Optical Surface detector |
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