CN205642307U - Long -range shape of face measuring apparatu - Google Patents
Long -range shape of face measuring apparatu Download PDFInfo
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- CN205642307U CN205642307U CN201620138630.XU CN201620138630U CN205642307U CN 205642307 U CN205642307 U CN 205642307U CN 201620138630 U CN201620138630 U CN 201620138630U CN 205642307 U CN205642307 U CN 205642307U
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- beam splitter
- area source
- long
- single hole
- range profile
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Abstract
The utility model provides a long -range shape of face measuring apparatu for carrying out the shape of face to the optical device's that awaits measuring surface and detect, is it including scanning optical head and f theta angle measure system, the scanning optical head includes area source, beam splitter, haplopore screen and planar mirror, the area source level is placed, the beam splitter sets up aslope the area source below, the haplopore screen is hugged closely the beam splitter bottom surface, planar mirror sets up aslope haplopore screen below and with the beam splitter constitutes type five prism structure's bireflectance face. The utility model discloses the system error that the measuring beam sideslip was introduced when measuring different angles has been reduced to measurement accuracy has been improved.
Description
Technical field
This utility model relates to high accuracy mirror shape detection field, particularly to a kind of long-range profile measuring instrument.
Background technology
Need to use length about about 1m, face shape error less than the elongated shape of 0.1 microradian, in high precision mirror surface in science and technology field such as large-scale astronomical telescope, extreme ultraviolet photolithographic, synchrotron radiation optics engineerings.Produce and use such high-precision optics to depend on high-precision surface testing technology.
Long-range profile instrument based on light pencil point by point scanning Cleaning Principle (Long Trace Profile, LTP) it is one of key instrument applying to this type of high-precision optical units test, the light pencil that its basic thought is introduced into a branch of fixed angle incident carries out point by point scanning on optical device under test, owing on optics, the normal direction of difference is different, then reflection light carries out angular surveying by the f-θ angle detection system of different angle reflection to long-range profile instrument, thus by recording the angle relative changing value of difference to obtain the face shape information of optics along scanning direction.
Although the operation principle of long-range profile instrument determines it can only carry out one-dimensional discrete point measurement, but compared with other detection means, long-range profile instrument has many advantages, such as: uses non-contact detecting pattern to avoid and treats photometry device optical face and cause damage during detection；Need not the optical reference element by large scale thus reduce construction input cost and decrease the error that may thus introduce；The scope of application is big, large scale, high-precision surface shape can be carried out detection etc..In more than 20 year of past, long-range profile instrument has obtained tremendous development, occurs in that the long-range profile instruments based on fine light beam scanning Cleaning Principle such as LTP-I, LTP-II, LTP-V, PP-LTP (pentaprism Long travel profile instrument), online LTP, multi-functional LTP, NOM (nanocomposite optical detector).Wherein NOM is one of current surface testing instrument that precision is the highest in the world.
Development along with science and technology, optical component surface shape accuracy of detection is had higher requirement by each application, in order to promote the power of test of long-range profile instrument, in tradition long-range profile instrument system, various systematic errors need to be revised or eliminate, in these systematic errors, topmost one is to cause owing to each optical element used in long-range profile instrument system is undesirable, undesirable mainly shows themselves in that 1, reflective optical devices exists face shape error compared with ideal optical components；2, refraction optical element refractive index is uneven.When carrying out angular surveying, the defect on these optical elements can cause measuring beam to deviate ideal orientation angulation error, and when measuring angle change, measuring beam can be traversing on these optical elements, thus introduces the angular error of diverse location on element.
If optical mirror plane is preferable in long-range profile instrument, measuring beam traversing, error will not be introduced；If it is the most traversing on same measuring beam certain optics in systems, then this optics to different angles measure point introduce error all as, during owing to utilizing long-range profile instrument to carry out surface testing, the only relative changes value of testing result is meaningful, so the same error introduced does not affects the relative increment of measurement result.But, preferable optical element is can not be getable, so optical element is the most in measurement system, measuring beam traversing amount on these optical elements is the biggest, it is possible to introduce bigger systematic error.
Fig. 1 shows the optical texture schematic diagram of existing pp-LTP, it includes LASER Light Source 1', fixing optical head, flying optical head and f-θ angle detection system, fixing optical head includes phase board 2', beam splitter 3' and plane mirror 4', flying optical head includes that pentaprism 5', f-θ angle detection system include FT (Fourier transformation) lens 7' and planar array detector 8'.When light beam is after pentaprism 5' impinges perpendicularly on minute surface 6' to be measured, if measurement point not level on minute surface 6' to be measured, reflection light will reflection angled with incident ray, if this angle is θ angle, then distance s in pentaprism 5' i.e. represents that θ is equal to the traversing amount that 0 ° of light beam of reflection when being not equal to 0 ° with θ produces on the reflecting surface of pentaprism 5'.As can be seen from Figure 1, measuring beam is that measurement point starts skew from minute surface 6' to be measured, so the point of measuring on minute surface 6' to be measured is the reference point that in pp-LTP, the traversing amount of each optical element calculates, thus for same deflection angle, the geometry light path that optics in system is measured a little on minute surface 6' to be measured is the most remote, the measuring beam traversing amount on this optics is the biggest, the most this traversing makes each optics in system introduce the error of difference.Transmission, reflective optical device used in measurement system are the most, and the traversing amount that measuring beam produces is the biggest, then the systematic error introduced is the biggest.
In order to reduce by the systematic error of traversing introducing, mainly having two kinds of approach, a kind of is to reduce the optical element quantity used in detecting system, and another kind is to reduce in the reference point and detecting system that traversing amount calculates the distance between each optical element.Thus a kind of such measurement apparatus is urgently provided.
Utility model content
The purpose of this utility model aims to provide a kind of high-precision long-range profile measuring instrument, traversing with caused by measuring beam during minimizing measurement angle difference, thus reduces systematic error.
For achieving the above object, this utility model is by the following technical solutions:
A kind of long-range profile measuring instrument, for the surface of optical device under test is carried out surface testing, it includes scanning optical head and f-θ angle detection system,
Described scanning optical head includes area source, beam splitter, single hole screen and plane mirror, described area source horizontal positioned, described beam splitter is arranged on below described area source obliquely, described single hole screen is close to described beam splitter bottom surface, and described plane mirror is arranged on below described single hole screen obliquely and constitutes the double-reflecting face of class pentaprism structure with described beam splitter.
Further, described scanning optical head also includes that housing, described area source, beam splitter, single hole screen and plane mirror are arranged in described housing.
Further, described f-θ angle detection system includes a Fourier transform lens and a planar array detector, described Fourier transform lens transmits to described planar array detector after being set to converge the light beam reflected from described plane mirror, and forms described measurement hot spot on described planar array detector.
Preferably, described area source is incoherent area source.
Preferably, this measuring instrument also includes that optical table and linear translation platform, described linear translation platform are positioned on described optical table, and described scanning optical head is arranged on described linear translation platform.
This utility model when measuring, equal light beam mirror at the shield aperture of single hole screen by the measuring beam of different angles that reflects from optical device under test surface, thus should be using the shield aperture central point of single hole screen as the calculating reference point of traversing amount of optical element each in detector.Point is measured for compared with the scheme of traversing amount calculating reference point with optical device under test with prior art, this utility model makes the distance between each optical element and reference point be greatly shortened by reference point is transferred to the shield aperture central point of single hole screen, thus decrease the measuring beam traversing amount on each optical element, and then reduce by the systematic error of traversing introducing.In addition, the refraction used in this utility model, reflective optical device only has beam splitter and plane mirror, but it is close to single hole screen due to beam splitter arrange, only it is in the beam splitter region at the shield aperture of single hole screen can be used, thus the light beam of different measuring point reflection is all by the same area through beam splitter on optical device under test, although this region can introduce error, but this error is identical for each measurement point, thus it is believed that beam splitter introduces identical error for the measured value of different angles, the relative variation of measurement result is not affected by the same error owing to introducing, so in this utility model beam splitter not contribution system error, the real only plane mirror introducing error, thereby reduce the number of optical elements introducing systematic error.
Accompanying drawing explanation
Fig. 1 is the optical texture schematic diagram of pp-LTP in prior art；
Fig. 2 a and 2b is area source direct reflection optics schematic diagram, and wherein, Fig. 2 a is that plane mirror is horizontal, and Fig. 2 b is that plane mirror is in obliquity；
Fig. 3 is the optical texture schematic diagram of a kind of long-range profile measuring instrument of the present utility model；
Fig. 4 a and 4b is the paths schematic diagram in scanning optical head of the present utility model, and wherein, Fig. 4 a is the index path being incident to optical device under test, and Fig. 4 b is the index path after optical device under test reflection.
Detailed description of the invention
Below in conjunction with the accompanying drawings, provide preferred embodiment of the present utility model, and be described in detail.
It is known that, as shown in Figure 2 a, if after an area source 100 is placed horizontally at hole 200, then the light beam that area source 100 sends can regard the light beam by plane mirror 300 minute surface, light source 100 imaging 100A being sent and being passed through aperture aberration 200A after plane mirror 300 reflects as by hole 200 part.From direct reflection principle, propagate along plane mirror 300 normal direction by hole 200 is inevitable with the light beam of aperture aberration 200A center after direct reflection, so being a branch of light pencil propagated along minute surface normal direction and have small divergence angle by the light beam in hole 200 after direct reflection, the size of its angle of divergence is determined to the distance plane mirror 300 minute surface by diameter and the hole 200 in hole 200.If there is Angulation changes in plane mirror 300, as shown in Figure 2 b, the position as 100A of area source 100 and the position of aperture aberration 200A also can change therewith, but the light beam that now area source 100 sends still can be regarded as after plane mirror 300 reflects and light source 100 imaging 100A be sent and passed through the light beam of aperture aberration 200A by plane mirror 300 minute surface, therefore direct reflection is returned the light beam in hole 200 and is still that a branch of light pencil propagated along minute surface normal direction and have small divergence angle.
Based on above-mentioned principle, this utility model provides a kind of high-precision long-range profile measuring instrument.In the embodiment shown in fig. 3, this measuring instrument includes scanning optical head (also referred to as flying optical head) 1, optical device under test 2, optical table 3, linear translation platform 4 and the f-θ angle detection system being made up of Fourier transform lens 10 and planar array detector 11.Wherein, optical table 3 uses optical table common in existing LTP to realize, linear translation platform 4 is horizontally placed on above optical table 3, and scanning optical head 1 is fixed on linear translation platform 4 and moves horizontally optical device under test 2 carries out horizontal sweep measurement (scanning direction is as shown by the arrows in Figure 3) with linear translation platform 4.
Referring to Fig. 3 again, in the present embodiment, scanning optical head 1 includes housing 12 and the area source 5 being arranged in housing 12, beam splitter 6, single hole screen 7, plane mirror 8 four part.Wherein, area source 5 horizontal positioned；Beam splitter 6 becomes 22.5 degree and is arranged on below area source 5 with area source；Single hole screen 7 is close to beam splitter 6 bottom surface；Plane mirror 8 is arranged on below single hole screen 7 and so constitutes the double-reflecting face of class pentaprism (also referred to as equivalence pentaprism) structure with beam splitter 6, and this double-reflecting face can be used for measuring beam carries out 90 ° of deflections.
When optical device under test 2 is carried out surface testing, the most as shown in fig. 4 a, the light beam that area source 5 sends is through after beam splitter 6, and the segment beam 13 through single hole screen 7 shield aperture 9 is projected onto on optical device under test 2.The most as shown in Figure 4 b, optical device under test 2 surface is reflected back light beam 14 to single hole screen 7, but shield aperture 9 part that light beam 14 only projects single hole screen 7 can pass through single hole screen 7.According to the direct reflection principle shown in Fig. 2 a and 2b, area source 5 outgoing and by the light beam 13 of single hole screen 7 can pass through after optical device under test 2 surface is reflected the light beam 14 of single hole screen the most a branch of along optical device under test 2 surface measurement point normal direction propagate and there is the light pencil at small divergence angle.After light pencil 14 is by single hole screen 7, it is close to the beam splitter 6 that single hole screen 7 places reflect, and again by arriving plane mirror 8 after single hole screen 7, plane mirror 8 again by incident light beam to be perpendicular on optical device under test 2 angle reflection of measurement point normal direction to f-θ angle detection system to carry out angular surveying.
Additionally, in this utility model, area source 5 is in the rear side of optical path, thus can be by area source 5 and the compactest placement of beam splitter 6, to reduce the dimensional requirement to area source 5, expands light path system range.
Compared with prior art, the utility model has the advantage of:
1, tradition long-range profile instrument, such as the pp-LTP of Fig. 1, needs light source 1' to have preferable directivity, and conventional laser does light source；And native system is to light source direction not requirement, area source 5 can use incoherent area source, so advantageously reduces the diffraction interference that laser introduces in communication process due to the impurity in air or shield aperture diffraction.
2, having multiple optics in tradition long-range profile instrument light path, as Fig. 1 includes pentaprism 5' and beam splitter 3', they have multiple optical surface, and themselves are again the transmissive bodies that refractive index is uneven, and these all can be because of measuring beam traversing introducing systematic error；And in native system flying optical head, the optical element causing measuring beam deviation ideal orientation only has beam splitter 6 and plane mirror 8, but owing to single hole screen 7 and beam splitter 6 are close to arrange, only it is in beam splitter 6 region at the shield aperture 9 of single hole screen 7 can be used, thus during whole measurement on optical device under test 2 light beam of different measuring point reflection all by the same area by beam splitter 6, although this region can introduce error, but this error is identical for each measurement point, thus it is believed that beam splitter 6 introduces identical error for the measured value of different angles, so the relative variation of measurement result is not affected by the systematic error that beam splitter 6 introduces, that is, beam splitter 6 not contribution system error, thereby reduce the number of optical elements introducing systematic error.
3, the tradition traversing zequin of long-range profile instrument is the measurement point on optical device under test, so the geometry light path being difficult between the calculating reference point by reducing traversing amount and system optics reaches to reduce the purpose of traversing amount；And in this utility model, each optical element is made by the calculating reference point of traversing amount being transferred to the shield aperture central point O of single hole screen 7, plane mirror 8 such as setting compact with single hole screen 7, and the distance between reference point is greatly shortened, thus decrease the measuring beam traversing amount on optical element, and then reduce by the systematic error of traversing introducing.
4, the optical texture of tradition long-range profile instrument can be attended by slight vibration during measuring, and vibration can cause measuring beam to produce deviation；And in this utility model, use area source 5, beam splitter 6, the measuring beam 14 that the optical texture that single hole screen 7 is constituted is obtained is a branch of light pencil with small divergence angle propagated with measurement point normal direction on optical device under test 2, under any vibrational state, the direction of described light pencil indicates the normal direction of measurement point on optical device under test 2 all the time, the class pentaprism double-reflecting face being simultaneously made up of beam splitter 6 and plane mirror 8 has stronger vibration resistance, so the optical texture that this utility model uses has the strongest vibration resistance for vibrating the vibration especially from linear translation platform 4.
5, in traditional long-range profile instrument based on LASER Light Source, owing to the direction drift of laser beam can introduce directivity error；And in this utility model, measuring beam through single hole screen 7 is a branch of light pencil 14 with small divergence angle propagated with measurement point normal direction on optical device under test 2, this light pencil 14 points to measurement point normal direction on optical device under test 2 all the time, so there is not the directivity error problem introduced because of light source outgoing beam angle drift in this utility model.
Above-described, preferred embodiment the most of the present utility model, it is not limited to scope of the present utility model, above-described embodiment of the present utility model can also make a variety of changes.The most every change simple, equivalent made according to claims of the present utility model and description and modification, fall within this utility model claims.The most detailed description of this utility model be routine techniques content.
Claims (5)
1. a long-range profile measuring instrument, for the surface of optical device under test is carried out surface testing, it includes scanning optical head and f-θ angle detection system, it is characterised in that
Described scanning optical head includes area source, beam splitter, single hole screen and plane mirror, described area source horizontal positioned, described beam splitter is arranged on below described area source obliquely, described single hole screen is close to described beam splitter bottom surface, and described plane mirror is arranged on below described single hole screen obliquely and constitutes the double-reflecting face of class pentaprism structure with described beam splitter.
Long-range profile measuring instrument the most according to claim 1, it is characterised in that described scanning optical head also includes that housing, described area source, beam splitter, single hole screen and plane mirror are arranged in described housing.
Long-range profile measuring instrument the most according to claim 1, it is characterized in that, described f-θ angle detection system includes a Fourier transform lens and a planar array detector, described Fourier transform lens transmits to described planar array detector after being set to converge the light beam reflected from described plane mirror, and forms measurement hot spot on described planar array detector.
Long-range profile measuring instrument the most according to claim 1, it is characterised in that described area source is incoherent area source.
Long-range profile measuring instrument the most according to claim 1, it is characterised in that this measuring instrument also includes that optical table and linear translation platform, described linear translation platform are positioned on described optical table, and described scanning optical head is arranged on described linear translation platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620138630.XU CN205642307U (en) | 2016-02-24 | 2016-02-24 | Long -range shape of face measuring apparatu |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620138630.XU CN205642307U (en) | 2016-02-24 | 2016-02-24 | Long -range shape of face measuring apparatu |
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| CN205642307U true CN205642307U (en) | 2016-10-12 |
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| CN201620138630.XU Withdrawn - After Issue CN205642307U (en) | 2016-02-24 | 2016-02-24 | Long -range shape of face measuring apparatu |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105737758A (en) * | 2016-02-24 | 2016-07-06 | 中国科学院上海应用物理研究所 | Long trace profile |
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2016
- 2016-02-24 CN CN201620138630.XU patent/CN205642307U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105737758A (en) * | 2016-02-24 | 2016-07-06 | 中国科学院上海应用物理研究所 | Long trace profile |
| CN105737758B (en) * | 2016-02-24 | 2018-05-04 | 中国科学院上海应用物理研究所 | A kind of long-range profile measuring instrument |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20161012 Effective date of abandoning: 20180504 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20161012 Effective date of abandoning: 20180504 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |