CN108759713A - Face shape three-dimension measuring system based on ray tracing - Google Patents
Face shape three-dimension measuring system based on ray tracing Download PDFInfo
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- CN108759713A CN108759713A CN201810491830.7A CN201810491830A CN108759713A CN 108759713 A CN108759713 A CN 108759713A CN 201810491830 A CN201810491830 A CN 201810491830A CN 108759713 A CN108759713 A CN 108759713A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention discloses a kind of face shape three-dimension measuring systems of ray tracing, including light source, shaping and collimation lens, micro reflector array DMD, TIR prism, lens group, sample to be tested, camera lens and detector C CD containing precise motion mechanism, the present invention has the following advantages：(1) present invention can be accurately controlled the position of incident ray using micro reflector array DMD device and light source.(2) present invention uses the positioning of high-precision motion guide rail and controller as detector.(3) present invention is arranged by the scan path of incident light.(4) present invention can measure the information between a plurality of types of samples, including the face shape and wavefront information of the wavefront information of transmission sample, reflected sample and two surfaces of plating semi-transparent semi-reflecting film transmission sample.
Description
Technical field
The present invention relates to technical field of high-precision measurement, more particularly to a kind of face shape three-dimensional measurement system of ray tracing
System.
Background technology
The measurement of optical surface has become the fields such as Aeronautics and Astronautics, medical instrument, communication system and MEMS
Critical issue.High-acruracy survey is the important guarantee of optical surface processing quality.For optical element, the tolerance of measurement surface
It is required that micron even nanometer scale need to be reached.However, the face shape complexity with optical element increases, current optical element is
Through from traditional plane and spherical optics element, being extended to optical aspherical surface and freeform optics surface.In particular for wide at present
The freeform optics surface of general application either its processing efficiency or cost of manufacture cannot all be compared with traditional spherical surface, wherein most
Urgent problem to be solved is exactly the Precision measurement of face shape.General measurement method is divided into contact type measurement and non-contact measurement.
Contact type measurement has prodigious vertical measurement range, and vertical direction dynamic ratio is high, can obtain rough surface
The integrated informations such as degree, percent ripple, form error and some other shape characteristic.But contact type measurement can be because measuring the excessive damage of pressure
Hinder measuring surface, or even causes the deformation and abrasion that detect needle.There are point-to-point measurement, slow-footed features for this method simultaneously, no
Conducive to the acquisition of progress quick three-dimensional face graphic data.
For traditional contact-type 3 D measuring technique, non-contact optical three-dimensional measurement technology has non-contact
Property, advantage with high accuracy, can be to avoid causing to damage to testee, therefore is more suitable for the measurement of optical surface.It is common non-
The measurement method of contact optical surface includes：Laser interferance method, projection grating mensuration, reflecting grating mensuration, Shack-
Hartmann wave front aberrations sensor, scanning confocal microscope method and White Light Interferometer etc..But current non-contact optical
It is difficult the optical surface for measuring deep camber, big slope and face shape complex free to measure.And the result of non-contact measurement with
It is actual design a model between also be difficult to be compared and analyze.
Invention content
Technical problem present in for the above-mentioned prior art, the purpose of the present invention is overcome the deficiencies in the prior art, knots
Closing light design a model use ray tracing it is theoretical, a kind of face shape three-dimension measuring system of ray tracing is provided.
To achieve the purpose of the present invention, the present invention provides a kind of face shape three-dimension measuring systems of ray tracing, including light
Source, shaping and collimation lens, micro reflector array DMD, TIR prism, lens group, sample to be tested, camera lens and contain precise motion
The detector C CD of mechanism,
Based on ray tracing principle and light field expression method, the wavefront information of transmission sample is obtained；
Diagram system is built, removes sample to be tested first, profit is computerizedd control light source and micro reflector array DMD, will
Incident ray carries out structure light coding, is moved along chief ray direction by precise motion mechanism controls detector C CD, obtains incident
Position, angle and the intensity signal of light complete system calibrating；
Sample to be tested is placed measuring position, light source and micro reflector array DMD is controlled, incident ray is scanned control
Scanning light can also be arranged with point by point scanning in system, the distribution of the incident ray and scan mode according to tested surface shape feature
Structure；
Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD, complete sample
Product measure；
According to calibration information and metrical information, emergent light slope is rebuild as actual wavefront information, is obtained to be measured
The wavefront of transmission sample.
The present invention also provides the face shape three-dimension measuring systems of another ray tracing, including light source, shaping and collimation
Lens, micro reflector array DMD, TIR prism, Amici prism, lens group and the detector C CD containing precise motion mechanism,
Based on ray tracing principle and light field expression method, the wavefront information knead dough shape information of reflected sample is obtained；
Diagram system is built, standard reflection mirror is placed into sample to be tested position first, profit is computerizedd control light source and micro-
Incident ray is carried out structure light coding by reflection mirror array DMD, by precise motion mechanism controls detector C CD along chief ray
Direction is moved, and position, angle and the intensity signal of incident ray are obtained, and completes system calibrating；
Standard reflection mirror is removed measuring position, sample to be tested is placed, controls light source and micro reflector array DMD, will enter
It penetrates light and is scanned control, the distribution of the incident ray and scan mode can be with point by point scannings, can also be according to tested surface shape
The structure of feature setting scanning light；
Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD, complete sample
Product measure；
The wavefront knead dough shape of reflected sample to be measured is obtained according to calibration information and metrical information；
The emergent light slope in out of phase face is used to rebuild for actual wavefront information, using the incidence of identical light
The position and angle of light and emergent light calculate the face shape information of sample to be tested according to reflection law.
The present invention also provides the face shape three-dimension measuring systems of another ray tracing, including light source, shaping and collimation
Lens, micro reflector array DMD, TIR prism, Amici prism, lens group, camera lens, the detector containing precise motion mechanism
CCD1 and detector C CD2 containing precise motion mechanism,
Based on ray tracing principle and light field expression method, the face shape and location information in two faces of transmission sample are obtained；
Diagram system is built, sample to be tested position is placed to the standard parallel plate of plating semi-transparent semi-reflecting film first, utilizes meter
Calculation machine controls light source and micro reflector array DMD, and incident ray is carried out structure light coding, is visited by precise motion mechanism controls
It surveys device CCD1 and CCD2 to move along chief ray direction respectively, obtains position, angle and the intensity signal of incident ray, complete system
Calibration；
Sample to be tested is placed measuring position, light source and micro reflector array DMD is controlled, incident ray is scanned control
Scanning light can also be arranged with point by point scanning in system, the distribution of the incident ray and scan mode according to tested surface shape feature
Structure；
Position, angle and the light intensity letter of emergent ray are obtained by precise motion mechanism controls detector C CD1 and CCD2
Breath is completed sample and is measured；Wherein first detector C CD1 can use the incident light of identical light and the position of emergent light and angle
The face shape information in first face of sample to be tested is calculated according to reflection law, second detector C CD2 can use the incidence of identical light
The position and angle of light and emergent light calculate sample to be tested second according to the law of refraction, the face shape in first face and element refractive index
The face shape information in a face.
The present invention has the following advantages due to taking the technical solution：
(1) present invention can be accurately controlled the position of incident ray using micro reflector array DMD device and light source.It adopts
The angle of incident ray can be accurately controlled with suitable optical lens.It is possible thereby to meet the more of the incident light of ray tracing
Kind demand, is effectively improved the scope of application of measuring system.
(2) present invention uses the positioning of high-precision motion guide rail and controller as detector.Made using high resolution CCD
For detector.When combined, acquisition ray position, the i.e. position of light field principle characterization emergent ray, angle can be measured
And light intensity, effectively obtain more metrical informations.
(3) present invention is arranged by the scan path of incident light, can accurate trace each light incidence and outgoing
Information increases the measurement range of light, increases the measurement slope and curvature range of optical element thus, is suitable for more face shape
Complicated optical element.
(4) present invention can measure a plurality of types of samples, include the face shape of the wavefront information of transmission sample, reflected sample
Information between two surfaces of wavefront information and plating semi-transparent semi-reflecting film transmission sample.
Description of the drawings
Fig. 1 is the schematic diagram of the ray tracing systematic survey transmission sample of the present invention.
Fig. 2 is the schematic diagram of the ray tracing systematic survey reflected sample of the present invention.
Fig. 3 is the schematic diagram of the ray tracing systematic survey plating semi-transparent semi-reflecting film transmission sample of the present invention.
In Fig. 1,1- light sources, 2- shapings and collimation lens, 3- micro reflector array DMD, 4-TIR prism, 5- lens groups, 6-
Sample to be tested, 7- camera lenses, 8- contain the detector C CD of precise motion mechanism；
In Fig. 2,1- light sources, 2- shapings and collimation lens, 3- contain precise motion mechanism detector C CD, 4- lens group,
5- emits sample, 6- Amici prisms, 7-TIR prisms, 8- micro reflector arrays DMD；
In Fig. 3,1- light sources, 2- shapings and collimation lens, 10- micro reflector array DMD, 9-TIR prism, 8- are divided rib
Mirror, 4- lens groups, 5- plate the detection that standard parallel plate sample, 6- camera lenses, the 7- of semi-transparent semi-reflecting film contain precise motion mechanism
Device CCD1 and 3- contain the detector C CD2 of precise motion mechanism.
Specific implementation mode
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein
Specific embodiment be only used to explain the present invention, be not intended to limit the present invention.
It should be noted that term used herein above is merely to describe specific implementation mode, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
Be also intended to include plural form, additionally, it should be understood that, when in the present specification using belong to "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, component or module, component and/or combination thereof.
It should be noted that term " first " in the description and claims of this application and above-mentioned attached drawing, "
Two " etc. be for distinguishing similar object, without being used to describe specific sequence or precedence.It should be appreciated that using in this way
Data can be interchanged in the appropriate case, so that presently filed embodiment described herein for example can be in addition to herein
Sequence other than those of diagram or description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Be to cover it is non-exclusive include, for example, containing the process of series of steps or unit, method, system, product or equipment not
Those of be necessarily limited to clearly to list step or unit, but may include not listing clearly or for these processes, side
The intrinsic other steps of method, product or equipment or unit.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.
The present invention is based on light modulation element DMD device, high-precision motion controller and image acquisition technologies, can increase
The measurement slope and curvature range of optical element are suitable for the optical element of more face shape complexity.
Embodiment 1
Referring to Fig. 1, a kind of face shape three-dimension measuring system measurement transmission sample of ray tracing of the invention, including light source,
Shaping and collimation lens, micro reflector array DMD, TIR prism, lens group, sample to be tested, camera lens and contain precise motion mechanism
Detector C CD.The system is based on ray tracing principle and light field expression method, obtains the wavefront information of transmission sample.
Diagram system is built, removes sample to be tested first, profit is computerizedd control light source and micro reflector array DMD, will
Incident ray carries out structure light coding, is moved along chief ray direction by precise motion mechanism controls detector C CD, obtains incident
Position, angle and the intensity signal of light complete system calibrating；Sample to be tested is placed measuring position, controls light source and micro- anti-
Penetrate lens array DMD, incident ray be scanned control, the distribution of the incident ray and scan mode can with point by point scanning,
The structure of scanning light can be set according to tested surface shape feature；Emergent light is obtained by precise motion mechanism controls detector C CD
Position, angle and the intensity signal of line are completed sample and are measured；According to calibration information and metrical information, again by emergent light slope
It is configured to actual wavefront information, obtains the wavefront of transmission sample to be measured.
Structure setting and propagation path：When measurement, light source is vertically set on above shaping and collimation lens, shaping and standard
Be TIR prism below straight lens, the left side of TIR prism is micro reflector array DMD, right side be followed successively by lens group, camera lens and
CCD, wherein transmission sample are placed between lens group and camera lens；
Light is sent out from light source, passes through shaping successively and collimation lens is micro-, reflection mirror array DMD, TIR prism, lens group, thoroughly
Penetrate sample, camera lens, CCD.
Embodiment 2
Referring to Fig. 2, a kind of face shape three-dimension measuring system measurement reflected sample of ray tracing of the invention, including light source,
Shaping and collimation lens, micro reflector array DMD, TIR prism, Amici prism, lens group, sample to be tested and contain precise motion
The detector C CD of mechanism.The system be based on ray tracing principle and light field expression method, obtain reflected sample wavefront information and
Face shape information.
Diagram system is built, standard reflection mirror is placed into sample to be tested position first, profit is computerizedd control light source and micro-
Incident ray is carried out structure light coding by reflection mirror array DMD, by precise motion mechanism controls detector C CD along chief ray
Direction is moved, and position, angle and the intensity signal of incident ray are obtained, and completes system calibrating；Measuring, position removal standard is anti-
Mirror is penetrated, sample to be tested is placed, light source and micro reflector array DMD is controlled, incident ray is scanned control, the incident ray
Distribution and scan mode can with point by point scanning, can also according to tested surface shape feature be arranged scanning light structure；Pass through precision
Motion controls position, angle and the intensity signal that detector C CD obtains emergent ray, completes sample and measures；According to calibration
Information and metrical information obtain the wavefront knead dough shape of reflected sample to be measured；It is rebuild using the emergent light slope in out of phase face
It is to be measured according to reflection law calculating using the incident light of identical light and the position of emergent light and angle for actual wavefront information
The face shape information of sample.
Structure setting and propagation path：When measurement, light source is vertically set on above shaping and collimation lens, shaping and standard
It is TIR prism below straight lens, the left side of TIR prism is micro reflector array DMD, and right side is followed successively by Amici prism, lens group,
It is CCD above Amici prism, wherein transmitting sample is placed on the right side of lens group.
Light is sent out from light source, pass through successively shaping and collimation lens is micro-, reflection mirror array DMD, TIR prism, Amici prism,
Lens group, reflected sample, the light of reflection is by Amici prism, CCD.
Embodiment 3
Referring to Fig. 3, a kind of face shape three-dimension measuring system of ray tracing of the invention measures the face in two faces of transmission sample
Shape and location information, including light source, shaping and collimation lens, micro reflector array DMD, TIR prism, Amici prism, lens group,
Sample to be tested, camera lens, the detector C CD1 containing precise motion mechanism and the detector C CD2 containing precise motion mechanism.This is
System is based on ray tracing principle and light field expression method, obtains the face shape and location information in two faces of transmission sample.
Diagram system is built, sample to be tested position is placed to the standard parallel plate of plating semi-transparent semi-reflecting film first, utilizes meter
Calculation machine controls light source and micro reflector array DMD, and incident ray is carried out structure light coding, is visited by precise motion mechanism controls
It surveys device CCD1 and CCD2 to move along chief ray direction respectively, obtains position, angle and the intensity signal of incident ray, complete system
Calibration；Sample to be tested is placed measuring position, light source and micro reflector array DMD is controlled, incident ray is scanned control,
The knot of scanning light can also be arranged with point by point scanning in the distribution of the incident ray and scan mode according to tested surface shape feature
Structure；Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD1 and CCD2, are completed
Sample measures；Wherein first detector C CD1 can be with the incident light of identical light and the position of emergent light and angle according to reflection
Law calculates the face shape information in first face of sample to be tested, the incident light and outgoing that second detector C CD2 can be with identical light
The position of light and angle calculate the face in second face of sample to be tested according to the law of refraction, the face shape in first face and element refractive index
Shape information.
Structure setting and propagation path：When measurement, light source is vertically set on above shaping and collimation lens, shaping and standard
Be TIR prism below straight lens, the left side of TIR prism is micro reflector array DMD, right side be followed successively by Amici prism, lens group,
Camera lens and CCD2, are CC above Amici prism, 1, wherein transmitting sample is placed between lens group and camera lens.
Light is sent out from light source, pass through successively shaping and collimation lens is micro-, reflection mirror array DMD, TIR prism, Amici prism,
Lens group, sample, camera lens, CCD2 pass through lens group, Amici prism, CCD2 from the light of electromagnetic radiation.
The above is only a preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (3)
1. a kind of face shape three-dimension measuring system of ray tracing, which is characterized in that including light source, shaping and collimation lens, micro- anti-
Lens array DMD, TIR prism, lens group, sample to be tested, camera lens and the detector C CD containing precise motion mechanism are penetrated,
Based on ray tracing principle and light field expression method, the wavefront information of transmission sample is obtained；
Diagram system is built, removes sample to be tested first, profit is computerizedd control light source and micro reflector array DMD, will be incident
Light carries out structure light coding, is moved along chief ray direction by precise motion mechanism controls detector C CD, obtains incident ray
Position, angle and intensity signal, complete system calibrating；
Sample to be tested is placed measuring position, light source and micro reflector array DMD is controlled, incident ray is scanned control,
The knot of scanning light can also be arranged with point by point scanning in the distribution of the incident ray and scan mode according to tested surface shape feature
Structure；
Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD, are completed sample and are surveyed
Amount；
According to calibration information and metrical information, emergent light slope is rebuild as actual wavefront information, transmission to be measured is obtained
The wavefront of sample.
2. a kind of face shape three-dimension measuring system of ray tracing, which is characterized in that including light source, shaping and collimation lens, micro- anti-
Lens array DMD, TIR prism, Amici prism, lens group and the detector C CD containing precise motion mechanism are penetrated,
Based on ray tracing principle and light field expression method, the wavefront information knead dough shape information of reflected sample is obtained；
Diagram system is built, standard reflection mirror is placed into sample to be tested position first, profit is computerizedd control light source and micro- reflection
Incident ray is carried out structure light coding by lens array DMD, by precise motion mechanism controls detector C CD along chief ray direction
It is mobile, position, angle and the intensity signal of incident ray are obtained, system calibrating is completed；
Standard reflection mirror is removed measuring position, sample to be tested is placed, light source and micro reflector array DMD is controlled, by incident light
Line is scanned control, and the distribution of the incident ray and scan mode can be with point by point scannings, can also be according to tested surface shape feature
The structure of scanning light is set；
Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD, are completed sample and are surveyed
Amount；
The wavefront knead dough shape of reflected sample to be measured is obtained according to calibration information and metrical information；
Use the emergent light slope in out of phase face to rebuild as actual wavefront information, using identical light incident light and
The position of emergent light and angle calculate the face shape information of sample to be tested according to reflection law.
3. a kind of face shape three-dimension measuring system of ray tracing, which is characterized in that including light source, shaping and collimation lens, micro- anti-
It penetrates lens array DMD, TIR prism, Amici prism, lens group, camera lens, the detector C CD1 containing precise motion mechanism and contains essence
The detector C CD2 of close motion,
Based on ray tracing principle and light field expression method, the face shape and location information in two faces of transmission sample are obtained；
Diagram system is built, sample to be tested position is placed to the standard parallel plate of plating semi-transparent semi-reflecting film first, utilizes computer
Light source and micro reflector array DMD are controlled, incident ray is subjected to structure light coding, passes through precise motion mechanism controls detector
CCD1 and CCD2 is moved along chief ray direction respectively, obtains position, angle and the intensity signal of incident ray, completes system mark
It is fixed；
Sample to be tested is placed measuring position, light source and micro reflector array DMD is controlled, incident ray is scanned control,
The knot of scanning light can also be arranged with point by point scanning in the distribution of the incident ray and scan mode according to tested surface shape feature
Structure；
Position, angle and the intensity signal of emergent ray are obtained by precise motion mechanism controls detector C CD1 and CCD2, it is complete
It is measured at sample；Wherein first detector C CD1 can be with the incident light of identical light and the position of emergent light and angle according to anti-
Penetrate the face shape information that law calculates sample to be tested first face, second detector C CD2 with the incident light of identical light and can go out
The position and angle for penetrating light calculate second face of sample to be tested according to the law of refraction, the face shape in first face and element refractive index
Face shape information.
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| CN201810491830.7A CN108759713B (en) | 2018-05-22 | 2018-05-22 | Surface shape three-dimensional measurement system based on ray tracing |
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| CN201810491830.7A CN108759713B (en) | 2018-05-22 | 2018-05-22 | Surface shape three-dimensional measurement system based on ray tracing |
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| Publication number | Publication date |
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| CN108759713B (en) | 2021-04-06 |
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