CN104019762A - High-precision long-range surface shape detector for optical surface - Google Patents
High-precision long-range surface shape detector for optical surface Download PDFInfo
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Abstract
The invention discloses a high-precision long-range surface shape detector for an optical surface. The high-precision long-range surface shape detector for the optical surface comprises a first optical head, a reference mirror and a second optical head. The first optical head is used for scanning optical elements to be detected, the reference mirror is fixedly arranged on the side wall of the first optical head, the second optical head projects reference beams to the reference mirror and detects the reference beams reflected by the reference mirror, and the first optical head and the second optical head are different in precision level. According to the high-precision long-range surface shape detector for the optical surface, the first optical head and the second optical head are adopted, the first optical head scans and detects the optical elements to be detected, the second optical head carries out error detection of scanning motion of the first optical head, the precision, the detecting ranges and the beam widths of the two optical heads are set according to different detecting needs and levels, the optical elements to be detected can be detected more accurately, and the high-precision long-range surface shape detector for the optical surface is not prone to being interfered by external environments.
Description
Technical field
The present invention relates to Optical Surface detector, especially relevant with the structure of the Optical Surface detector of high precision, long-range.
Background technology
In the fields such as scientific research, infotech, Aero-Space, national defense industry, astronomical sight, synchrotron radiation optics engineering field especially, all needs the optical element of high surface figure accuracy (1 nanometer scale, 10 receive radian magnitude).The process technology of high-precision optical element like this depends on high-precision shape detection technique largely.
The long-range profile detector generally using at present all carries out measurement of angle based on f-θ optical system, even if light pencil incident Fourier transform (FT) lens also utilize linear array or the position of planar array detector detection focal spot pattern on lens focal plane, this positional information has reflected incident beam angle information, and the relationship of the two is:
Δd＝f*Δθ，
Wherein Δ d is pattern position displacement on detector, and f is the focal length of lens, and Δ θ is incident beam angle variable quantity.
Light beam is before incident FT lens, first rectilinear translation scans optical element surface to be measured and after this surface reflection, is entered FT lens, so folded light beam angle changes delta θ is 2 times of angle changes delta α of Sample Scan point in scanning process: Δ d=2f* Δ α is
obtain thus the angle of surperficial diverse location to be measured and recover its face shape.
Long-range profile detector is roughly divided into two large classes:
One class is the long-range profile instrument (Long Trace Profiler, hereinafter to be referred as LTP) of the f-θ system based on narrow laser beam.LTP changes above-mentioned light pencil into the relevant light pencil of two bundles being formed by beam of laser beam splitting, can on detector, obtain interference pattern to replace focal spot pattern, this contributes to improve Measurement Resolution and suppresses some extra interference effects that a plurality of optical surfaces produce.LTP is divided into again LTP II and pp-LTP.
Another kind of is nanocomposite optical detector (Nanometre Optical Metrology, hereinafter to be referred as NOM) based on f-θ autocollimator, above-mentioned light pencil be autocollimator by limitting light aperture to produce, and return to autocollimator and detect.Utilize white light LEDs autocollimator can eliminate preferably light source directivity error, can eliminate extra interference again.But because the intensity of light source is limited, what limit light aperture will be opened could obtain good signal to noise ratio (S/N ratio) greatlyr, has caused the decline of instrument spatial resolution.
Owing to will carrying out high precision long-range (conventionally reaching 1m) scanning, detect, long-range profile detector is a kind of relatively large experiment test instrument, comprises its all annexes, and reach tens square meters total occupation of land.
In the world, just carried out the research work that contactless shape detected as far back as 1975, what adopted at that time is the measuring method on surface to be measured by Laser Focusing, and measuring accuracy is lower, and is not suitable for the optical element having compared with deep camber.Nineteen eighty-two, Von Bieren proposes the beam-interferometer based on wavefront interference technique, has greatly improved measuring accuracy and the scope of application.Yet its two bundles coherent light light path is not etc., and Stimulated Light and the impact of environment labile factor are very large.The Peter Z.Takacs of U.S. BNL in 1989 and the money heath of Hefei NSRL have proposed on this basis the beam interference profile instrument based on aplanatism spectrophotometric unit and have named LTP, have realized the high-acruracy survey to optical surface shape.The spacing that LTP can adjust twin-beam easily changes the above space periodic of interference fringe of CCD, but because scanner head adopts the direct Scan Architecture of light pen, surface shape measurement precision is subject to the impact of guide precision very large; For this reason, instrument selection the high but complicated in mechanical structure of precision, air-float guide rail that cost is higher.The S.C.Irick of LBL in 1992 and W.R.Mckinny have proposed LTP II, adopt reference mirror compensation technique, proofread and correct laser beam in light pen interferometer and point to the measuring error that instability causes; Simultaneously also partial correction the inhomogeneous and impact of air-flow on measuring accuracy of air themperature; In addition the improvement of optical head structure, is inhibited most scanning motion errors.
The optical texture of LTP II as shown in Figure 1, LASER Light Source 1 becomes through phase board 2 light beam that two halves light differs half-wavelength, through beam splitter 3, be divided into two bundles again, a branch of is measuring beam, throws to optical element to be measured 4 surfaces, through reflexing to FT lens 7, measuring beam angle information is converted to focal spot positional information on planar array detector 8; Another bundle is reference beam, after reaching 5 reflections of cottonrose hibiscus prism, throwing to the clinoplane catoptron 6 that is fixed on optical table returns through reaching cottonrose hibiscus prism 5 through reflection, through FT lens 7, with reference to beam angle information, be converted to focal spot positional information on planar array detector 8 again, the effect that reaches cottonrose hibiscus prism 5 is by light source 1 directive property error and scanning motion error is synthetic together measures by same reference path.
Nineteen ninety-five S.N.Qian etc. continue development LTP, ppLTP (pentaprism Long Trace Profiler-pentaprism long-range profile instrument) has been proposed, use small and exquisite flexibly pentagonal prism scanning to replace the entire scan of light pen interferometer optics head, make equally most scanning motion errors be inhibited; And utilize laser fiber collimation technique to improve the directive property of laser beam in interferometer.PpLTP has all been set up in the laboratories such as the BNL of the U.S., gondola Elettra.
PpLTP optical texture as shown in Figure 2, LASER Light Source p1 becomes through phase board p2 the light beam that two halves light differs half-wavelength, through beam splitter p3, be divided into two bundles again, a branch of is measuring beam, throw to pentaprism p5 and throw to optical element p6 to be measured surface and return through pentaprism p5 through reflection through two secondary reflections, through FT lens p7, measuring beam angle information is converted to the upper focal spot positional information of planar array detector p8 again, the effect of pentaprism p5 is to make outgoing beam and incident beam keep fixed angle, not affected by the scanning motion pitch error of pentaprism p5 own, therefore ppLTP does not arrange scanning motion reference path, another bundle is for light source directivity reference beam, throws to plane mirror p4 and with reference to beam angle information, is converted to the upper focal spot positional information of planar array detector p8 through reflexing to FT lens p7.
By BESSY-II in 2004, set up NOM device, scan mechanism is identical with ppLTP, is all to utilize the insensitive characteristic of pentaprism to rotation error.System architecture comprises: pentaprism, autocollimator, Guang Lan.Utilize white light LEDs autocollimator can eliminate preferably light source directivity error, can eliminate extra interference again.But because the intensity of light source is limited, what limit light aperture will be opened could obtain good signal to noise ratio (S/N ratio) greatlyr, has caused the decline of instrument spatial resolution.NOM optical texture as shown in Figure 3, optical head N100 is for being fixed on autocollimator on optical table bearing, the collimated light beam producing is through pentaprism N5 deflection, again through limit light aperture N6, throw to optical element N300 to be measured and be reflected and return, through limit light aperture N6, pentaprism N5, change to autocollimator N100 detection angles.Pentaprism N5 and adjustable limit light aperture N6 together form N200 scanning motion part; Autocollimator N100 inside comprises white LED light source N1, through limit optical slits N2 restriction, as light source, through beam splitter prism N3, by lens N4 collimation, launches for parallel beam; Returning beam converges and beam splitter prism N3 reflection through lens N4, and focal spot is positioned on planar array detector N7; By detecting focal spot position, change to reflect the angle change information of optical element to be measured.The effect of pentaprism N5 is to make outgoing beam and incident beam keep fixed angle, not affected by the scanning motion pitch error of pentaprism N5 own, so NOM does not arrange scanning motion reference path; The light source of autocollimator N100 is that slit stably limits, so NOM does not arrange light source directivity reference beam yet.
Existing long-range profile detector performance be limited to the following aspects:
1, because the large lateral shift of light path on the imperfect optical element of instrument internal reduces measuring accuracy;
The optical element that instrument internal is used is undesirable (exist aberration, face shape error, refractive index inhomogeneous etc.) always, the diverse location, different angles incident light that causes optical element be corresponding different additive error all, therefore the generation of light pencil on optical element is significantly during lateral shift, by lowering apparatus measuring accuracy.
And light path produces lateral shift and has two kinds of reasons: the one, beam angle changes sweeps the light beam of long light path on optical element, and the 2nd, be connected and fixed that the light path of element and scanning motion element is not parallel causes the lateral shift of light beam on optical element with scanning motion direction.Of great impact for ppTLP and two kinds of factors of NOM.For LTP II, for reference beam and measuring beam are separated on detector, require tilt reference light beam, cause more serious the second lateral shift.
2, because significantly changing the instrument causing, optical path length is difficult to demarcate calibration;
The problems referred to above can utilize standard angle generation equipment demarcate calibration and be eased in theory, yet the nominal data of each incident angle on each lateral position of the necessary acquisition of calibration instrumental optics element, because the lateral position under same incident angle is determined by optical path length, therefore when optical path length tilts and significantly changes, must demarcate the nominal data of different incidence angles degree (space two-dimensional angle) under different light path lengths, this is a three-dimensional demarcation, due to the excessive and very difficult realization of scalar quantity.In addition, when completing calibrated measurement application, must accurately provide in real time optical path length to change to utilize nominal data, this be also not easy to realize.All there is the problem that is difficult to demarcate calibration in existing shape detecting instrument.
3, be applicable to the optical surface angular range that detects less;
For existing ppLTP and NOM, because optical path length is larger, when measuring the optical surface of polarizers of big angle scope, the lateral shift of its measuring beam causes very greatly larger error, is not therefore suitable for the surface shape measurement of polarizers of big angle scope.
The reference measure precision of 4, scanning motion error and light source directivity error is lower.
Existing LTP all utilizes same optical head to complete optical surface and measures and reference measure, but the measuring characteristic of the two has very big difference.Optical surface is measured and is required to have larger measurement range, and reference measure only requires interior very among a small circle measurement; Optical surface is measured and is required to utilize light pencil to realize high spatial resolution, and reference measure does not have this requirement.The optical head of wide-measuring range, high-space resolution must be take sacrifice in measurement accuracy as cost.Existing LTP reference measure is introduced optical surface and is measured same optical head detection, causes the reduction of scanning motion error and the light source directivity error reference measure precision of LTP.
Summary of the invention
For problems of the prior art, object of the present invention is for providing the high precision long-range Optical Surface that a kind of accuracy of detection is high, antijamming capability is strong detector.
For achieving the above object, the invention provides following technical scheme:
A kind of high precision long-range Optical Surface detector, comprise the first optical head, reference mirror and the second optical head, described the first optical head is used for scanning optical element to be measured, described reference mirror is fixedly installed on the sidewall of described the first optical head, described the second optical head is to described reference mirror projection reference beam, and detecting the reference beam that described reference mirror reflects, described the first optical head is different from the accuracy class of described the second optical head.
Further, described optical element to be measured is arranged on an optical table, and described the first optical head is arranged at described optical table top, and described the second optical head is fixedly installed.
Further, described optical element to be measured is horizontally disposed with, and described the first optical head approaches described optical element setting to be measured, and along continuous straight runs carries out scanning motion, and described reference mirror vertically arranges.
Further, the f-θ system that described the first optical head is narrow laser beam, comprise laser instrument, coupled lens, optical fiber, collimation lens, phase board, beam splitter, plane mirror, Fourier transform lens and planar array detector, described laser instrument passes through coupled lens successively, optical fiber, collimation lens and phase board are to described beam splitter projecting beam, described beam splitter is projected to described plane mirror by a described light beam part, and then the reflection by described beam splitter and by described Fourier transform lens to described planar array detector, another part is projected to described light source component to be measured, and then the reflection by described beam splitter and by described Fourier transform lens to described planar array detector.
Further, the light beam of the relatively described beam splitter projection of described plane mirror is obliquely installed.
Further, described the first optical head is an autocollimator.
Further, described the second optical head is an autocollimator.
Further, the f-θ system that described the second optical head is narrow laser beam as above.
Further, described reference mirror is plane mirror.
The present invention compared with prior art, in the present invention, adopt the first optical head and the second optical head, the first optical head carries out scanning survey optical element to be measured, the second optical head carries out the scanning motion error-detecting of the first optical head, two optical heads arrange precision, measurement range and width of light beam according to different detection demands and grade, thereby can measure more accurately optical element to be measured, and not be subject to external environmental interference.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention is described in further detail:
Fig. 1 is existing LTP II optical texture schematic diagram;
Fig. 2 is existing ppLTP optical texture schematic diagram;
Fig. 3 is existing NOM optical texture schematic diagram;
Fig. 4 is high precision long-range Optical Surface detector structural representation of the present invention.
Embodiment
The exemplary embodiments that embodies feature & benefits of the present invention will describe in detail in the following description.Be understood that the present invention can have various variations on different embodiment, it neither departs from the scope of the present invention, and explanation wherein and accompanying drawing be when the use that explain in itself, but not in order to limit the present invention.
As shown in Figure 4, high precision long-range Optical Surface detector of the present invention, comprises the first optical head 100, reference mirror 300 and the second optical head 200.Wherein, the first optical head 100 is for scanning optical element 400 to be measured, reference mirror 300 is fixedly installed on the sidewall of the first optical head 100, the second optical head 200 is to reference mirror 300 projection reference beams, and reference beam 600, the first optical heads 100 that detect reference mirror 300 reflections are different from the accuracy class of the second optical head 200.
In the present invention, optical element 400 to be measured is arranged in an optical table (not shown), and the first optical head 100 is arranged at optical table top side, and the second optical head 200 is fixedly installed.Optical element 400 to be measured is horizontally disposed with, and the first optical head 100 approaches optical element to be measured 400 and arranges, and along continuous straight runs carries out scanning motion, and reference mirror 300 vertically arranges.
In the present invention, the first optical head 100 can be an autocollimator, also can be the f-θ system of narrow laser beam.As shown in Figure 4, in the present embodiment, the f-θ system that the first optical head 100 is narrow laser beam.Specifically, the first optical head 100 comprises laser instrument 101, coupled lens 102, optical fiber 103, collimation lens 104, phase board 105, beam splitter 106, plane mirror 107, Fourier transform lens 108 and planar array detector 109, and laser instrument 101, coupled lens 102, optical fiber 103, collimation lens 104, phase board 105, beam splitter 106, plane mirror 107, Fourier transform lens 108 and planar array detector 109 are all placed in housing 110.Laser instrument 101 passes through coupled lens 102, optical fiber 103, collimation lens 104 and phase board 105 successively to beam splitter 106 projecting beams 500, beam splitter 106 is projected to plane mirror 107 by light beam 500 parts, and then pass through the reflection of beam splitter 106 and pass through Fourier transform lens 108 to planar array detector 109, another part is projected to light source component 400 to be measured, and then passes through the reflection of beam splitter 106 and pass through Fourier transform lens 108 to planar array detector 109.The light beam 500 of relative beam splitter 106 projections of plane mirror 107 is obliquely installed.
In the present invention, the second optical head 200 can be an autocollimator, also can be the f-θ system of narrow laser beam as above.In the present embodiment, as shown in Figure 4, the second optical head is autocollimator.In the present embodiment, reference mirror 300 is plane mirror.
In the present embodiment, the first optical head 100 is that the f-θ of the narrow laser beam of built-in light source directive property reference path measures optical head, LASER Light Source enters optical fiber 103 through coupled lens 102 and through collimation lens 104, collimates as the first optical head 100 light sources, through phase board 105, become the light beam that two halves light differs half-wavelength, through beam splitter 106, be divided into two bundles again, a branch of is measuring beam, throws to optical element to be measured 400 surfaces, through reflexing to Fourier transform (FT) lens 108, measuring beam angle information is converted to focal spot positional information on planar array detector 109; Another bundle is light source directivity reference beam, and throwing to the plane mirror 107 that is fixed on the first optical head 100 inside is converted to focal spot positional information on planar array detector 108 through reflexing to Fourier transform (FT) lens 108 with reference to beam angle information.The second optical head 200 adopts high precision angle pencil of ray autocollimator among a small circle, and along the vertical throwing of scanning motion direction to the reference mirror 300 that is fixed on the first optical head 100, reflected light is back to autocollimator parameter the first optical head 100 scanning motion errors.
Compared with prior art, beneficial effect of the present invention is:
1, significantly reduce the lateral shift of light path on the imperfect optical element of instrument internal, thereby improved measuring accuracy.Comprise particularly the following aspects:
1) the low lateral shift of measuring beam.Compare with existing ppLTP and NOM, the optical path length of detector of the present invention is very short, and this has significantly reduced measuring beam angle in scanning process and has changed the lateral shift causing.In addition, the optical path length of detector of the present invention is almost (it changes is only minute surface height change to be measured) of fixing, and has so almost eliminated the measuring beam lateral shift that optical path length changes in scanning process of tilting.
2) the low lateral shift of light source directivity reference beam.Light source directivity reference beam is completely restricted in the first optical head 100 inside, is similarly very short regular length light path, and this light path lateral shift is little of ignoring completely on accuracy of instrument impact.
3) the low lateral shift of scanning motion reference beam.Because the second optical head 200 has been exclusively used in the reference measure of scanning motion, therefore reference beam is non-inclined design, completely parallel with scanning motion direction, to compare with the tilt reference beam design of LTP II like this, the lateral shift of scanning motion reference beam is eliminated substantially completely.
2, instrument is easy to demarcate calibration;
All optical path lengths in the present invention's the first optical head 100 are substantially fixing, are easy to demarcate calibration.Although the second optical head 200 optical path lengths change, and owing to being that non-diagonal beam does not almost have lateral shift, need not consider optical path length variable effect while therefore calibrating, and are easy to calibration.
3, the optical surface applicable to polarizers of big angle scope detects;
In the present invention, optical path is very short, and it is very little that same measuring point angle changes the lateral shift causing, and therefore can be used for detecting the optical surface of polarizers of big angle scope.
The reference measure precision of 4, scanning motion error and light source directivity error is high.
In the present invention, light source directivity reference path is completely enclosed within the first optical head 100 inside, and optical path length is very short and fixing, and without lateral shift and be not vulnerable to the instable impact of environment, thereby light source directivity measuring accuracy significantly improves.The non-dip sweeping motion reference light beam of the present invention's the second optical head 200 has been eliminated lateral shift substantially completely, and this light beam is used angle pencil of ray simultaneously, be not vulnerable to environment instability and lateral shift impact, thereby scanning motion measuring accuracy significantly improves.
Technical scheme of the present invention is disclosed as above by preferred embodiment.Those skilled in the art should recognize in the situation that do not depart from change and the retouching that scope and spirit of the present invention that the appended claim of the present invention discloses are done, within all belonging to the protection domain of claim of the present invention.
Claims (9)
1. a high precision long-range Optical Surface detector, it is characterized in that, comprise the first optical head, reference mirror and the second optical head, described the first optical head is used for scanning optical element to be measured, described reference mirror is fixedly installed on the sidewall of described the first optical head, described the second optical head projects reference beam to described reference mirror, and detects the reference beam of described reference mirror reflection, and described the first optical head is different from the accuracy class of described the second optical head.
2. high precision long-range Optical Surface detector as claimed in claim 1, is characterized in that, described optical element to be measured is arranged on an optical table, and described the first optical head is arranged at described optical table top, and described the second optical head is fixedly installed.
3. high precision long-range Optical Surface detector as claimed in claim 2, it is characterized in that, described optical element to be measured is horizontally disposed with, and described the first optical head approaches described optical element setting to be measured, and along continuous straight runs carries out scanning motion, described reference mirror vertically arranges.
4. the high precision long-range Optical Surface detector as described in as arbitrary in claim 1-3, it is characterized in that, the f-θ system that described the first optical head is narrow laser beam, comprise laser instrument, coupled lens, optical fiber, collimation lens, phase board, beam splitter, plane mirror, Fourier transform lens and planar array detector, described laser instrument passes through coupled lens successively, optical fiber, collimation lens and phase board are to described beam splitter projecting beam, described beam splitter is projected to described plane mirror by a described light beam part, and then the reflection by described beam splitter and by described Fourier transform lens to described planar array detector, another part is projected to described light source component to be measured, and then the reflection by described beam splitter and by described Fourier transform lens to described planar array detector.
5. high precision long-range Optical Surface detector as claimed in claim 4, is characterized in that, the light beam of the relatively described beam splitter projection of described plane mirror is obliquely installed.
6. the high precision long-range Optical Surface detector as described in as arbitrary in claim 1-3, is characterized in that, described the first optical head is an autocollimator.
7. the high precision long-range Optical Surface detector as described in as arbitrary in claim 1-3, is characterized in that, described the second optical head is an autocollimator.
8. the high precision long-range Optical Surface detector as described in as arbitrary in claim 1-3, is characterized in that the f-θ system that described the second optical head is narrow laser beam as described in claim 4.
9. the high precision long-range Optical Surface detector as described in as arbitrary in claim 1-3, is characterized in that, described reference mirror is plane mirror.
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| CN106767675A (en) * | 2017-02-06 | 2017-05-31 | 重庆理工大学 | The optimization method of the f theta measuring systems based on light pencil |
| CN106767675B (en) * | 2017-02-06 | 2019-04-02 | 重庆理工大学 | The optimization method of f-theta measuring system based on light pencil |
| CN108180865A (en) * | 2017-12-28 | 2018-06-19 | 长春长光精密仪器集团有限公司 | A kind of test device of heavy-calibre planar minute surface shape |
| CN110296666A (en) * | 2018-03-23 | 2019-10-01 | 泓邦科技有限公司 | Three-dimensional measuring device |
| CN110296666B (en) * | 2018-03-23 | 2021-04-20 | 泓邦科技有限公司 | Three-dimensional measuring device |
| CN110702030A (en) * | 2019-11-14 | 2020-01-17 | 中科院南京天文仪器有限公司 | Compensation type scanning device and method for online detection of rotationally symmetric mirror surface shape |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN112762857A (en) * | 2021-01-20 | 2021-05-07 | 西安应用光学研究所 | Large-caliber plane mirror surface shape online detection method |
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