CN111412861A - Linear white light surface profile measuring method - Google Patents
Linear white light surface profile measuring method Download PDFInfo
- Publication number
- CN111412861A CN111412861A CN202010249008.7A CN202010249008A CN111412861A CN 111412861 A CN111412861 A CN 111412861A CN 202010249008 A CN202010249008 A CN 202010249008A CN 111412861 A CN111412861 A CN 111412861A
- Authority
- CN
- China
- Prior art keywords
- white band
- rectangular white
- rectangular
- measured
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a line white light surface contour measuring method.A slit diaphragm is arranged in an imaging light path, only one rectangular light bar irradiates on a sample to be measured through a slit, an image shot by a CCD camera under the action of the slit diaphragm only has a middle rectangular white band, and other parts are black. When an interference image generated during measurement of a measuring system is cut off by a slit diaphragm, only partial interference fringes are on a rectangular white band, and measured objects with different heights are measured, the interference fringes on the rectangular white band transversely translate along with different measured heights, the rectangular white band in a visual field is measured, a midpoint along the rectangular white band is taken as a reference point, the transverse movement amount of a coherent peak of the interference fringes in the rectangular white band is expressed as the height in the vertical direction, and tracking scanning measurement of a surface profile is realized by matching with an external shafting displacement platform.
Description
Technical Field
The invention relates to a novel line white light surface profile measuring method.
Background
In recent years, due to the demand of people on the complex optical surface, new optical processing and manufacturing technologies are rapidly developed, meanwhile, various application demands also put forward higher and higher demands on the surface shape precision of the optical element, and the measurement requirements of the parts are urgent.
The conventional point scanning measurement method is characterized in that the conventional point scanning measurement method is embodied in NANOMOS, L uphoscan, white light interferometer and other advanced high-precision measurement equipment, but the advanced equipment is very expensive in manufacturing cost and large in volume, and has certain limitations in the measurement of the large-curvature complex curved surface, the conventional point scanning measurement method is dependent on complex photoelectric matching measurement precision, the measurement system depends on large-area complex optical measurement systems, and the measurement system has low overall measurement precision and is capable of effectively improving the overall measurement precision of the large-curvature complex curved surface.
Disclosure of Invention
In view of the above problems, the present invention provides a novel line white light surface profile scanning measurement method to realize large curvature low frequency surface profile measurement. The technical scheme is as follows.
A line white light surface contour measuring method is based on the interference characteristic of white light interference, a slit diaphragm is arranged in an imaging light path, only one rectangular light bar irradiates on a measured sample through a slit, the light reflected by the measured sample returns to a field of view through an interference objective, the light reflected by a reference mirror in the interference objective interferes in the imaging light path, an interference image is received by a CCD camera, the image shot by the CCD camera under the action of the slit diaphragm only has a middle rectangular white band, the other parts are black, the interference image generated when a measuring system measures is cut off by the slit diaphragm, only partial interference fringes are formed on the rectangular white band, when measured objects with different heights are measured, the interference fringes on the rectangular white band transversely translate along with different measured heights, the rectangular white band in the field of view is measured, and the midpoint along the rectangular white band is taken as a reference point, the horizontal movement amount of the coherent peak of the interference fringe in the rectangular white band is represented as the height in the vertical direction, and the tracking scanning measurement of the surface profile is realized by matching with an external shafting displacement platform.
The measuring steps are as follows:
in a first step, the sample to be measured is positioned so that the best focus point is as close as possible to the reference point X of the rectangular white band being imagedi. Such an optimal focus point is determined as the point in the focusing algorithm with the largest axial response point.
In the second step, after the initial position is set, the sample is moved at a constant speed along the horizontal X-axis. When moving along the X axis, the position of the CCD camera is synchronously changed along the vertical Z axis. This linkage is performed in such a way that the best focus point of the curved surface is as close as possible to the reference point. The best focus point is obtained by using a focusing algorithm, and the surface profile of the tested sample is tracked in this way.
Third, while performing tracking, the CCD camera acquires a series of rectangular white band images of the corresponding field of view at a constant frame rate. The CCD camera triggers the reading of the position sensors of the X-axis, Y-axis and Z-axis displacement platforms, and a recording coordinate value point (X-axis) is obtained for each obtained rectangular white band imagei,Yi,Zi)。
Fourthly, solving the difference △ X of the horizontal and vertical coordinates of the pixel coordinates of the coherent peak point and the reference point of the interference fringei，△YiThen, according to the magnification β value of the objective lens, the coordinate of the best focus point in the measuring system corresponding to each frame length square white band image is recovered and calculated as (X)i+β△Xi，Yi+β△Yi，Zi). Thereby obtaining the profile of the measured sample and the profile of the standard sample.
The focusing algorithm of the first step and the second step comprises the following steps:
(1) obtaining the center line of the rectangular white band image: and scanning at equal intervals within a distance with the current Z-axis position as the center, wherein each scanning point acquires a rectangular white band image. And traversing each row of each rectangular white-band image to obtain a row of gravity centers taking the pixel gray value as weight. In order to eliminate the influence of background noise on the calculation of the center of gravity, a pixel gray value threshold value is set, which is half of the maximum value and the minimum value of a row of pixel gray values, and the center of gravity is calculated for the points of all pixel gray values exceeding the threshold value. After each row of pixels is calculated to obtain a pixel barycentric coordinate, performing least square straight line fitting on the barycentric coordinates, wherein the fitted straight line is regarded as the central line of the rectangular white-band image.
(2) Sampling pixel points on the fitted straight line, defining a rectangular white band image quality evaluation function as the square sum of the gray value differences of adjacent pixels on the central line of the fitted rectangular white band image, moving a CCD camera of a measurement system to the position of a Z-axis coordinate corresponding to the rectangular white band image with the maximum image quality evaluation function value after the first round of scanning, and carrying out the second round of scanning in a smaller range by taking the position as the center to obtain the final optimal focus point.
Drawings
FIG. 1 is a schematic diagram of a line white light surface profile measurement system.
The figure illustrates a CCD camera 1, a spectroscope 2, a 3L ED light source, a slit diaphragm 4, an interference objective lens 5, a measured object 6, an X-axis displacement platform 7 and a Z-axis displacement platform 8.
FIG. 2 is a schematic diagram of a rectangular white band image obtained by line white light surface profile measurement.
Detailed Description
The invention is described below with reference to the figures and examples.
The invention provides novel line white light surface profile scanning measurement, which utilizes the white light interference nano measurement accuracy characteristic to expand the white light interference measurement capability and realize the measurement of the low-frequency surface profile. A CCD camera of a measuring system is integrated on a high-precision shafting displacement platform, the shafting displacement platform controls the CCD camera to scan up and down in the measurable range relative to the surface height direction of a measured sample and drives the measured sample to move at a constant speed along the X-axis scanning direction, and the CCD camera automatically focuses at each measuring point to obtain a rectangular white band image. And planning a grid type scanning path to measure the surface of the measured sample, and realizing complete surface shape information measurement characterization. In the method, a CCD camera is responsible for acquiring a rectangular white band image on a measured object, and a motion system is responsible for driving the CCD camera of the measurement system to perform scanning motion along an X axis and vertical up-down directions at a constant speed.
The structure of the measuring system is shown in figure 1, an imaging light path of the measuring system is connected with a CCD camera 1, an interference objective lens 5 and an L ED light source 3, a slit diaphragm 4 is arranged in front of the light source, the CCD camera of the measuring system is arranged on a Z-axis displacement platform 8, and is driven by the Z-axis displacement platform to vertically scan, a measured sample 6 is stably fixed on the X-axis displacement platform, so that the measured sample is ensured not to shake in the measuring process, and the measured sample is carried by the X-axis displacement platform to horizontally scan.
The measurement system acquires the rectangular white-band image shown in fig. 2, scans, records and calculates the coordinate position of the interference image acquired by focusing each time, and realizes high-precision rapid measurement and evaluation characterization of the complete three-dimensional surface shape of the measured object 6. The line white light measurement flow used based on the data processing method provided by the invention is as follows:
(1) shafting displacement platform and CCD camera calibration
Firstly, a laser ranging sensor is adopted to calibrate the positioning precision of a motion platform, the driving pulse number of the displacement platform and an actual distance value measured by the laser ranging sensor are repeatedly obtained for multiple times, and the corresponding relation between a shafting displacement platform pulse control parameter and the actual distance value is calibrated so as to control the shafting displacement platform to perform motion control in subsequent measurement by a program. The novel line white light surface profile measurement is substantially based on the interference characteristic of white light interference, the position of a coherent peak is adopted to carry out coordinate point positioning measurement, the transverse movement of the coherent peak of interference fringes on a rectangular white band image represents the variable quantity of a vertical actual distance, so a CCD camera needs to be calibrated in the actual tracking scanning measurement process to obtain the actual size information corresponding to one pixel in the interference image, a standard grating scale plate (0.1 mm/scale) is adopted in the patent, a built measurement system is adopted to obtain a clearly focused photoetching plate image, a binarization image processing algorithm is adopted to extract the boundary information in the image obtained by the photoetching plate, then the number of pixels contained under one scale is calculated, and the corresponding relation between the pixels and the actual size is calibrated.
(2) And scanning the profile of the tested sample. Under the control of the high-precision shafting displacement platform, the measurement system drives the X-axis displacement platform to perform scanning motion along the X axis, and after the X-axis displacement platform moves to each sampling point, the horizontal motion of the displacement platform is stopped, and the vertical motion is performedAnd (4) moving focusing. During measurement, the setting of the scanning step length is needed to be noticed, and the accuracy of the measured automatic focusing is affected by the too large scanning step length. Suppose the region to be scanned is l in length1Width of l2The method comprises the steps of obtaining a × b data points in the detected area, controlling a measuring system to scan line by line, scanning the next line after scanning one line until the whole area is scanned, generating relative motion of an element to be detected and the measuring system in the X and Y horizontal coordinate axis directions at equal intervals under the control of a high-precision shafting displacement platform, triggering the X and Y axis position sensors to read data once when the element to be detected and the measuring system move once under the horizontal coordinate, and setting the data read by the X and Y axis position sensors at each position as X and Y axis position sensorsiAnd Yi. And simultaneously, enabling the displacement platform to control a CCD camera of the measuring system to move in the Z direction, searching for the optimal focusing position through a focusing algorithm, acquiring a rectangular white band image at the optimal focusing position, and recording the reading of the Z displacement platform at the moment. When the displacement platform controls the CCD camera to move in the Z direction, the rectangular white band images acquired at different positions have different definitions. Interference fringes are clearest on a rectangular white band image acquired at a focusing position, and fluctuation of pixel gray values acquired on a rectangular white band central line is largest. The grey values of the pixels of the rectangular white band image are more uniform at the unfocused positions. As shown in fig. 2, the rectangular white band image is focused, and the following autofocus algorithm is designed based on the characteristics of the focused rectangular white band image.
Firstly, obtaining the central line of a rectangular white band image. And scanning at equal intervals within a distance with the current Z-axis position as the center, wherein each scanning point acquires a rectangular white band image. And traversing each row of each rectangular white-band image to obtain a row of gravity centers taking the pixel gray value as weight. In order to eliminate the influence of background noise on the gravity center calculation, a pixel gray value threshold is set, and is half of the maximum value and half of the minimum value of the pixel gray values (each pixel gray value is in an interval of 0-255) in the row. The center of gravity calculation is performed for all points where the pixel gray value exceeds this threshold. After each row of pixels is calculated to obtain a pixel barycentric coordinate, the barycentric coordinates are subjected to least square straight line fitting, and the fitted straight line can be regarded as the central line of the rectangular white-band image.
And secondly, calculating an image quality evaluation function of each picture. Sampling pixel points on the fitted straight line, and defining a rectangular white band image quality evaluation function as the square sum of the gray value differences of adjacent pixels on the central line of the fitted rectangular white band image:
F＝∑(Ii-Ii-1)2
in the formula IiAnd the gray value of the ith pixel point on the fitted central line.
After the first scanning, the CCD camera of the measuring system is moved to the Z-axis coordinate position corresponding to the rectangular white-band image with the maximum image quality evaluation function value. And taking the position as a center, and performing the second round of scanning in a smaller range according to the method to obtain the final optimal focusing position.
(3) After scanning and scanning the contour of the tested sample, obtaining a rectangular white-band image at the optimal focusing position according to the automatic focusing algorithm at each scanning point, carrying out image processing on each rectangular white-band image obtained by scanning the contour of the tested sample, and solving out the pixel horizontal and vertical coordinate difference △ X between the center of the interference fringe and the reference pointi，△Yi. Since the fringes on the rectangular white band image are formed by white light interference, the position of the coherent peak can be calculated according to a fringe calculation algorithm of the white light interference. The gravity center method commonly used in the white light interference resolving algorithm is improved for image processing. The image processing algorithm is as follows:
firstly, obtaining the central line of a rectangular white band image. This step is the same as the first step in the previous autofocus algorithm.
And secondly, calculating the center of the interference fringe by a gravity center method. And sampling on the obtained central line. According to a gravity center method of white light interference fringe calculation, a difference calculation formula is defined:
mi＝(Ii-Ii-d)t
in the formula IiIs the gray value of the ith pixel point, d is the sampling interval, and t is the number of times of the power. And d is 5, and t is 4. Obtaining a set of difference values miThen, the center of gravity with the difference value as the weight is calculated, namely the horizontal coordinate X 'of the center of the interference fringe, and then the corresponding vertical coordinate Y' is calculated according to the straight line obtained by fitting. Taking the central pixel point of the rectangular white band image as a reference point, setting the horizontal and vertical coordinates of the rectangular white band image as X0And Y0The difference △ X between the center of the interference fringe and the abscissa of the reference pointi，△YiIs composed of
ΔXi＝X′-X0,ΔYi＝Y′-Y0
Then according to the magnification β obtained by calibrating the CCD camera and the read position data X of the X-axis and Y-axis position sensorsiAnd YiThen, the coordinate in the actual measurement system of the best focus point can be calculated as (X)i+β△Xi，Yi+β△Yi，Zi)。
Claims (3)
1. A line white light surface contour measuring method is based on interference characteristics of white light interference, a slit diaphragm is arranged in an imaging light path, only one rectangular light bar irradiates to a measured sample through the slit, light reflected by the measured sample returns to a view field through an interference objective lens, and interferes with light reflected by a reference mirror in the interference objective lens in the imaging light path, an interference image is received by a CCD camera, the image shot by the CCD camera under the effect of the slit diaphragm only has a middle rectangular white band, and other parts are black. When an interference image generated during measurement of a measuring system is cut off by a slit diaphragm, only partial interference fringes are on a rectangular white band, and measured objects with different heights are measured, the interference fringes on the rectangular white band transversely translate along with different measured heights, the rectangular white band in a visual field is measured, a midpoint along the rectangular white band is taken as a reference point, the transverse movement amount of a coherent peak of the interference fringes in the rectangular white band is expressed as the height in the vertical direction, and tracking scanning measurement of a surface profile is realized by matching with an external shafting displacement platform.
2. The measuring method according to claim 1, characterized in that the measuring step is:
in a first step, the sample to be measured is positioned so that the best focus point is as close as possible to the reference point X of the rectangular white band being imagedi(ii) a Such an optimal focus point is determined as the point in the focusing algorithm with the largest axial response point;
a second step of moving the sample at a constant speed along the horizontal X-axis after setting the initial position; when the CCD camera moves along the X axis, the position of the CCD camera synchronously changes along the vertical Z axis in a linkage manner; the linkage execution mode is to make the best focus point of the curved surface as close to the reference point as possible; using a focusing algorithm to obtain the optimal focusing point, and tracking the surface profile of the tested sample in such a way;
thirdly, when tracking is carried out, the CCD camera acquires a series of rectangular white band images of corresponding fields of view at a constant frame frequency; the CCD camera triggers the reading of the position sensors of the X-axis, Y-axis and Z-axis displacement platforms, and a recording coordinate value point (X-axis) is obtained for each obtained rectangular white band imagei,Yi,Zi)；
Fourthly, solving the difference △ X of the horizontal and vertical coordinates of the pixel coordinates of the coherent peak point and the reference point of the interference fringei，△YiThen, according to the magnification β value of the objective lens, the coordinate of the best focus point in the measuring system corresponding to each frame length square white band image is recovered and calculated as (X)i+β△Xi，Yi+β△Yi，Zi) (ii) a Thereby obtaining the profile of the measured sample and the profile of the standard sample.
3. The measurement method according to claim 2, wherein the focusing algorithm of the first and second steps comprises the steps of:
(1) obtaining the center line of the rectangular white band image: scanning at equal intervals within a distance taking the current Z-axis position as the center, wherein each scanning point acquires a rectangular white band image; traversing each row of each rectangular white-band image to obtain a row of gravity centers taking the pixel gray value as weight; in order to eliminate the influence of background noise on the gravity center calculation, a pixel gray value threshold value is set, the pixel gray value threshold value is half of the maximum value and the minimum value of a row of pixel gray values, and the gravity center calculation is carried out on the points of all pixel gray values exceeding the threshold value; after each row of pixels are calculated to obtain a pixel barycentric coordinate, performing least square method straight line fitting on the barycentric coordinates, wherein the fitted straight line is regarded as the central line of the rectangular white band image;
(2) sampling pixel points on the fitted straight line, defining a rectangular white band image quality evaluation function as the square sum of the gray value differences of adjacent pixels on the central line of the fitted rectangular white band image, moving a CCD camera of a measurement system to the position of a Z-axis coordinate corresponding to the rectangular white band image with the maximum image quality evaluation function value after the first round of scanning, and carrying out the second round of scanning in a smaller range by taking the position as the center to obtain the final optimal focus point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010249008.7A CN111412861B (en) | 2020-03-31 | 2020-03-31 | Linear white light surface profile measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010249008.7A CN111412861B (en) | 2020-03-31 | 2020-03-31 | Linear white light surface profile measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111412861A true CN111412861A (en) | 2020-07-14 |
| CN111412861B CN111412861B (en) | 2022-02-11 |
Family
ID=71489438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010249008.7A Active CN111412861B (en) | 2020-03-31 | 2020-03-31 | Linear white light surface profile measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111412861B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964198A (en) * | 2021-04-12 | 2021-06-15 | 天津大学 | Curved surface sample bus contour measuring system and method based on automatic focusing principle |
| CN113551881A (en) * | 2021-07-16 | 2021-10-26 | 中国科学院长春光学精密机械与物理研究所 | High-precision six-degree-of-freedom optical component performance testing method |
| CN114608481A (en) * | 2022-03-18 | 2022-06-10 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248833A (en) * | 1992-03-06 | 1993-09-28 | Ricoh Co Ltd | Method and apparatus for measuring surface of revolution |
| JP2812371B2 (en) * | 1991-04-10 | 1998-10-22 | 株式会社高岳製作所 | Surface profile measuring device |
| CN101266139A (en) * | 2008-04-30 | 2008-09-17 | 中北大学 | Microstructure appearance test method based on infrared white light interference technique |
| CN101324422A (en) * | 2007-06-12 | 2008-12-17 | 西安普瑞光学仪器有限公司 | Method and apparatus of fine distribution of white light interference sample surface shapes |
| WO2010058090A1 (en) * | 2008-11-24 | 2010-05-27 | Helsingin Yliopisto | Novel method and apparatus for forensic applications |
| CN101872064A (en) * | 2009-04-24 | 2010-10-27 | 陈亮嘉 | Linear multi-wavelength confocal microscope module and confocal microscopic method and system thereof |
| DE102011000213A1 (en) * | 2011-01-19 | 2012-07-19 | Universität Kassel | White-light interference microscope to determine surface topography of measurement object, is provided with illumination beam path between light source and measurement object |
| CN103344345A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Active white-light wave front testing device and testing method thereof |
| CN104019762A (en) * | 2014-06-10 | 2014-09-03 | 中国科学院高能物理研究所 | High-precision long-range surface shape detector for optical surface |
| US20160131474A1 (en) * | 2014-11-10 | 2016-05-12 | Mitutoyo Corporation | Non-contact surface-shape measurment method and apparatus using white light interferometer optical head |
| CN105783771A (en) * | 2016-03-04 | 2016-07-20 | 镇江超纳仪器有限公司（中外合资） | Method through white-light interference vertical scanning method nonlinear open-loop scanning |
| CN106595515A (en) * | 2016-11-25 | 2017-04-26 | 天津大学 | White light interference and laser scanning-based morphology measurement device |
| CN106643559A (en) * | 2017-03-06 | 2017-05-10 | 中国科学院光电技术研究所 | White light microscopic interference morphology reconstruction method based on mixing interference fringe |
| CN106767500A (en) * | 2016-11-25 | 2017-05-31 | 天津大学 | For the light path system of topography measurement |
| CN107702661A (en) * | 2017-09-19 | 2018-02-16 | 福建师范大学 | A kind of white light self-interference Surface testing instrument |
| CN109163672A (en) * | 2018-08-03 | 2019-01-08 | 广东工业大学 | A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm |
| CN110285771A (en) * | 2019-05-15 | 2019-09-27 | 淮阴师范学院 | Built-in three-dimension topography measurement module based on white light interference |
| CN110307805A (en) * | 2019-07-31 | 2019-10-08 | 北京航空航天大学 | A kind of white light interference system for three-dimensional surface shape measurement |
-
2020
- 2020-03-31 CN CN202010249008.7A patent/CN111412861B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2812371B2 (en) * | 1991-04-10 | 1998-10-22 | 株式会社高岳製作所 | Surface profile measuring device |
| JPH05248833A (en) * | 1992-03-06 | 1993-09-28 | Ricoh Co Ltd | Method and apparatus for measuring surface of revolution |
| CN101324422A (en) * | 2007-06-12 | 2008-12-17 | 西安普瑞光学仪器有限公司 | Method and apparatus of fine distribution of white light interference sample surface shapes |
| CN101266139A (en) * | 2008-04-30 | 2008-09-17 | 中北大学 | Microstructure appearance test method based on infrared white light interference technique |
| WO2010058090A1 (en) * | 2008-11-24 | 2010-05-27 | Helsingin Yliopisto | Novel method and apparatus for forensic applications |
| CN101872064A (en) * | 2009-04-24 | 2010-10-27 | 陈亮嘉 | Linear multi-wavelength confocal microscope module and confocal microscopic method and system thereof |
| DE102011000213A1 (en) * | 2011-01-19 | 2012-07-19 | Universität Kassel | White-light interference microscope to determine surface topography of measurement object, is provided with illumination beam path between light source and measurement object |
| CN103344345A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Active white-light wave front testing device and testing method thereof |
| CN104019762A (en) * | 2014-06-10 | 2014-09-03 | 中国科学院高能物理研究所 | High-precision long-range surface shape detector for optical surface |
| US20160131474A1 (en) * | 2014-11-10 | 2016-05-12 | Mitutoyo Corporation | Non-contact surface-shape measurment method and apparatus using white light interferometer optical head |
| CN105783771A (en) * | 2016-03-04 | 2016-07-20 | 镇江超纳仪器有限公司（中外合资） | Method through white-light interference vertical scanning method nonlinear open-loop scanning |
| CN106595515A (en) * | 2016-11-25 | 2017-04-26 | 天津大学 | White light interference and laser scanning-based morphology measurement device |
| CN106767500A (en) * | 2016-11-25 | 2017-05-31 | 天津大学 | For the light path system of topography measurement |
| CN106643559A (en) * | 2017-03-06 | 2017-05-10 | 中国科学院光电技术研究所 | White light microscopic interference morphology reconstruction method based on mixing interference fringe |
| CN107702661A (en) * | 2017-09-19 | 2018-02-16 | 福建师范大学 | A kind of white light self-interference Surface testing instrument |
| CN109163672A (en) * | 2018-08-03 | 2019-01-08 | 广东工业大学 | A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm |
| CN110285771A (en) * | 2019-05-15 | 2019-09-27 | 淮阴师范学院 | Built-in three-dimension topography measurement module based on white light interference |
| CN110307805A (en) * | 2019-07-31 | 2019-10-08 | 北京航空航天大学 | A kind of white light interference system for three-dimensional surface shape measurement |
Non-Patent Citations (2)
| Title |
|---|
| QINYUAN DENG等: "Spatial modulation assisted scanning white-light interferometry for noise suppression", 《IEEE PHOTONICS TECHNOLOGY LETTERS》 * |
| 邹文栋等: "用扫描白光干涉术检测合金韧窝断口微观三维形貌", 《光学精密工程》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964198A (en) * | 2021-04-12 | 2021-06-15 | 天津大学 | Curved surface sample bus contour measuring system and method based on automatic focusing principle |
| CN113551881A (en) * | 2021-07-16 | 2021-10-26 | 中国科学院长春光学精密机械与物理研究所 | High-precision six-degree-of-freedom optical component performance testing method |
| CN113551881B (en) * | 2021-07-16 | 2023-02-10 | 中国科学院长春光学精密机械与物理研究所 | High-precision six-degree-of-freedom optical assembly performance test method |
| CN114608481A (en) * | 2022-03-18 | 2022-06-10 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
| CN114608481B (en) * | 2022-03-18 | 2022-11-01 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111412861B (en) | 2022-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107121093B (en) | Gear measuring device and method based on active vision | |
| CN111412861A (en) | Linear white light surface profile measuring method | |
| Costa | Surface inspection by an optical triangulation method | |
| EP2654606B1 (en) | Motion blur compensation | |
| US5024529A (en) | Method and system for high-speed, high-resolution, 3-D imaging of an object at a vision station | |
| CN108986070B (en) | Rock crack propagation experiment monitoring method based on high-speed video measurement | |
| CN110411346B (en) | Method for quickly positioning surface micro-defects of aspheric fused quartz element | |
| CN109976391B (en) | Three-dimensional space vision servo positioning system and method for focus photosensitive element of optical focusing lens | |
| US8810799B2 (en) | Height-measuring method and height-measuring device | |
| CN110132374B (en) | Self-compensating laser liquid level measuring system | |
| CN112595385A (en) | Target height obtaining method and device | |
| WO1996012981A1 (en) | Autofocusing apparatus and method for high resolution microscope system | |
| CN112840199A (en) | Particle measurement device, calibration method, and measurement device | |
| Dupuis et al. | High-precision surface inspection: Uncertainty evaluation within an accuracy range of 15μm with triangulation-based laser line scanners | |
| CN103297799A (en) | Testing an optical characteristic of a camera component | |
| CN115278072B (en) | Automatic focusing method and system for Micro LED detection | |
| KR20060132579A (en) | Method of and apparatus for determining focus of an imaging system | |
| CN105783782B (en) | Surface curvature is mutated optical profilometry methodology | |
| CN114727095A (en) | Automatic focusing error calibration implementation method | |
| CN114034471A (en) | Method for measuring laser light path profile | |
| CN109883355B (en) | Method and device for automatically searching interference fringes | |
| Loranger et al. | A fast and accurate 3-D rangefinder using the Biris technology: the TRID sensor | |
| CN112710662A (en) | Generation method and device, generation system and storage medium | |
| JP2021124429A (en) | Scanning measurement method and scanning measurement device | |
| CN115574725B (en) | Steel plate size measurement method and system based on line structured light |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |