CN104019762B - High-precision long-range surface shape detector for optical surface - Google Patents
High-precision long-range surface shape detector for optical surface Download PDFInfo
- Publication number
- CN104019762B CN104019762B CN201410253989.7A CN201410253989A CN104019762B CN 104019762 B CN104019762 B CN 104019762B CN 201410253989 A CN201410253989 A CN 201410253989A CN 104019762 B CN104019762 B CN 104019762B
- Authority
- CN
- China
- Prior art keywords
- optical head
- optical
- reference mirror
- light
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a high-precision long-range surface shape detector for an optical surface. The high-precision long-range surface shape detector for the optical surface comprises a first optical head, a reference mirror and a second optical head. The first optical head is used for scanning optical elements to be detected, the reference mirror is fixedly arranged on the side wall of the first optical head, the second optical head projects reference beams to the reference mirror and detects the reference beams reflected by the reference mirror, and the first optical head and the second optical head are different in precision level. According to the high-precision long-range surface shape detector for the optical surface, the first optical head and the second optical head are adopted, the first optical head scans and detects the optical elements to be detected, the second optical head carries out error detection of scanning motion of the first optical head, the precision, the detecting ranges and the beam widths of the two optical heads are set according to different detecting needs and levels, the optical elements to be detected can be detected more accurately, and the high-precision long-range surface shape detector for the optical surface is not prone to being interfered by external environments.
Description
Technical field
The present invention relates to Optical Surface detector, especially with high accuracy, the Optical Surface detector of long-range
Structure is relevant.
Background technology
In the fields such as scientific research, information technology, Aero-Space, national defense industry, astronomical observation, especially synchrotron radiation
Optical engineering field, is required to the optical element of high surface figure accuracy (1 nanometer scale, 10 receive radian magnitude).So high accuracy
The process technology of optical element largely depend on high-precision surface testing technology.
The long-range profile detector commonly using at present is based on f- θ optical system and carries out angular surveying, even if light pencil
Incident Fourier transformation (ft) lens simultaneously utilize linear array or planar array detector to detect the position of focal spot pattern on lens focal plane,
This positional information reflects incident beam angle information, and the relationship of the two is:
δ d=f* δ θ,
Wherein δ d is pattern position displacement on detector, and f is the focal length of lens, and δ θ changes for incident beam angle
Amount.
Before incident ft lens, first rectilinear translation scans optical element surface to be measured and is reflected from the surface laggard light beam
Enter ft lens, therefore the reflected beams angle change δ θ is 2 times: the δ of the angle change δ α of Sample Scan point in scanning process
D=2f* δ α isThus obtain the angle of surface to be measured diverse location and recover its face shape.
Long-range profile detector is roughly divided into two big class:
One class be the f- θ system based on narrow laser beam long-range profile instrument (long trace profiler, hereinafter referred to as
ltp).Above-mentioned light pencil is changed to the light pencil relevant by two bundles of beam of laser beam splitting by ltp, then can obtain on the detector
To interference pattern to replace focal spot pattern, this some volume being favorably improved Measurement Resolution and suppressing multiple optical surfaces to produce
External interference affects.Ltp is divided into ltp ii and pp-ltp again.
Another kind of be nanocomposite optical detector based on f- θ autocollimator (nanometre optical metrology,
Hereinafter referred to as nom), that is, above-mentioned light pencil passes through to limit light aperture generation for autocollimator, and returns autocollimator detection.Using white
Light led autocollimator can preferably eliminate light source directivity error, can eliminate excessive interference again.But due to the intensity of light source
Limited, the bigger decline that could obtain preferable signal to noise ratio, cause instrument space resolution ratio to be opened of limit light aperture.
Due to will carry out high accuracy long-range (generally reaching 1m) Scanning Detction, long-range profile detector is a kind of relatively large
Experiment test instrument, including its all annex, total occupation of land reaches tens square meters.
In the world, just carried out the research work of contactless surface testing early in 1975, used at that time and will swash
Light focuses on the measuring method on surface to be measured, and certainty of measurement is relatively low, and is not suitable for the optical element having greater curvature.1982
Year, von bieren proposes the beam-interferometer based on wavefront interference technique, substantially increases certainty of measurement and the scope of application.
But its two bundles coherent light light path, Stimulated Light and the impact of environment destabilizing factor are very big.The peter of U.S. bnl in 1989
The money heath of z.takacs and Hefei nsrl proposes the beam interference face shape based on aplanatism spectrophotometric unit on this basis
Instrument simultaneously names ltp it is achieved that high-acruracy survey to optical surface profile.The spacing that ltp can easily adjust dual-beam changes ccd
The space periodic of upper interference fringe, but because probe adopts the direct Scan Architecture of light pen, surface shape measurement precision is subject to guide precision
Impact very big；For this reason, instrument selection high precision but complicated in mechanical structure, relatively costly air-float guide rail.Lbl's in 1992
S.c.irick and w.r.mckinny proposes ltp ii, using reference mirror compensation technique, corrects laser light in light pen interferometer
The measure error that Shu Zhixiang unstability causes；Also partial correction air themperature is uneven and air-flow is to certainty of measurement simultaneously
Impact；In addition the improvement of optical head structure, makes the scanning motion error of the overwhelming majority be inhibited.
The optical texture of ltp ii is as shown in figure 1, LASER Light Source 1 is changed into, through phase board 2, the light that two semi-gloss differ half-wavelength
Bundle, then be divided into two bundles through beam splitter 3, a branch of for measuring beam, throw to optical element 4 surface to be measured reflected to ft lens 7 will
Measuring beam angle information is converted to focal spot positional information on planar array detector 8；Another restraint as reference beam, through reaching cottonrose hibiscus prism 5
Throw after reflection and return through reaching cottonrose hibiscus prism 5 to the clinoplain speculum 6 being fixed on optical table is reflected, then will through ft lens 7
Reference beam angle information is converted to focal spot positional information on planar array detector 8, and the effect reaching cottonrose hibiscus prism 5 is to point to light source 1
Property error and scanning motion error estimate formula are together measured by same reference path.
Nineteen ninety-five s.n.qian etc. continues development ltp it is proposed that ppltp (pentaprism long trace
Profiler- pentaprism long-range profile instrument), replace the whole of light pen interferometer optics head using flexibly compact pentagonal prism scanning
Swept-volume, equally makes most scanning motion errors be inhibited；And improve interferometer using laser fiber collimation technique
The directive property of middle laser beam.The laboratories such as the bnl of the U.S., the elettra of Italy all establish ppltp.
Ppltp optical texture is as shown in Fig. 2 LASER Light Source p1 is changed into, through phase board p2, the light that two semi-gloss differ half-wavelength
Bundle, then be divided into two bundles through beam splitter p3, a branch of for measuring beam, throw and throw to optical element to be measured through two secondary reflections to pentaprism p5
P6 surface is reflected to be returned through pentaprism p5, then is converted to measuring beam angle information on planar array detector p8 through ft lens p7
Focal spot position information, the effect of pentaprism p5 is to make outgoing beam keep fixed angle with incident beam, is not subject to pentaprism p5 originally
Body scanning motion pitch error affects, and therefore ppltp is not provided with scanning motion reference path；Another bundle is joined for light source directivity
Examine light beam, throw and be converted to reference beam angle information on planar array detector p8 to ft lens p7 to plane mirror p4 is reflected
Focal spot position information.
Nom device was established by bessy-ii in 2004, scan mechanism is identical with ppltp, be all using pentaprism to turn
The insensitive characteristic of dynamic error.System architecture includes: pentaprism, autocollimator, light bar.Permissible using white light led autocollimator
Preferably eliminate light source directivity error, excessive interference can be eliminated again.But because, limited by the intensity of light source, limit light aperture is to be opened
The bigger decline that could obtain preferable signal to noise ratio, cause instrument space resolution ratio.Nom optical texture is as shown in figure 3, light
Learning head n100 is to be fixed on autocollimator on optics table mount, and the collimated light beam of generation deflects through pentaprism n5, then passes through
Limit light aperture n6, throws to optical element n300 to be measured and is returned by reflection, through limit light aperture n6, pentaprism n5 to autocollimator
N100 detection angles change.Pentaprism n5 and adjustable limit light aperture n6 together constitutes with n200 scanning motion part；Auto-collimation
Comprise white light LED light source n1 inside instrument n100, limit as light source through limit optical slits n2, accurate through lens n4 after beam splitter prism n3
Directly launch for collimated light beam；Returning beam converges through lens n4 and beam splitter prism n3 reflection, and focal spot is located at planar array detector
On n7；To reflect the angle change information of optical element to be measured by detecting that focal spot position changes.The effect of pentaprism n5 is to make
Outgoing beam keeps fixed angle with incident beam, is not affected by pentaprism n5 scanning motion pitch error itself, therefore nom does not have
There is setting scanning motion reference path；The light source of autocollimator n100 stably limits for slit, and therefore nom is also not provided with light
Source directive property reference beam.
Existing long-range profile detector performance be limited to the following aspects:
1st, due to light path, the big lateral displacement on the non-ideal optical element of instrument internal reduces certainty of measurement；
(there is aberration, face shape error, refractive index uneven etc. in what the optical element that instrument internal is used was always undesirable
Deng), cause the diverse location of optical element, different angle incident light all to correspond to different additive errors, therefore light pencil is in light
Learn element on generation significantly lateral displacement when, by lowering apparatus certainty of measurement.
And light path produces lateral displacement and has two kinds of reasons: one is that beam angle change makes the light beam of long light-path in optical element
Upper sweeping, two is that the be connected light path of element and scanning motion element not parallel causes light beam in optics with scanning motion direction
Lateral displacement on element.Two kinds of factors of pptlp and nom are created a great impression.For ltp ii, in order that reference beam with
Measuring beam separately, then requires tilt reference light beam, causes more serious second lateral displacement on the detector.
2nd, it is difficult to demarcate calibration because optical path length significantly changes the instrument causing；
The problems referred to above can carry out demarcating calibration using standard angle generation equipment in theory and be eased, but calibration
The nominal data of each incident angle on each lateral position of instrumental optics element must be obtained, due to same incident angle
Under lateral position determined by optical path length, therefore when optical path length tilt and significantly change when it is necessary to demarcate different light paths long
The nominal data of the lower incidence angles degree (space two-dimensional angle) of degree, this is a three-dimensional demarcation, due to scalar quantity excessive and
Difficult to realize.In addition, when completing calibrated measurement application it is necessary to accurately provide optical path length change to demarcate to utilize in real time
Data, this is also be not easily accomplished.Existing surface testing instrument all there is a problem of being difficult to demarcate calibration.
3rd, the optical surface angular range being applied to detection is less；
For existing ppltp and nom, because optical path length is larger, when measuring the optical surface of polarizers of big angle scope, its survey
The lateral displacement of amount light beam causes larger error greatly very much, is not therefore suitable for the surface shape measurement of polarizers of big angle scope.
4th, the reference measure precision of scanning motion error and light source directivity error is relatively low.
Existing ltp all completes optical surface measurement and reference measure using same optical head, but the measuring characteristic of the two has
Very big difference.Optical surface measurement request has larger measurement range, and reference measure is then only required to the measurement in the range of very little；
Optical surface measurement request realizes high spatial resolution using light pencil, and reference measure does not then have this requirement.Wide-measuring range,
The optical head of high-space resolution must be with sacrifice in measurement accuracy as cost.It is same that existing ltp reference measure introduces optical surface measurement
One optical head detection, causes the scanning motion error of ltp and the reduction of light source directivity error reference measure precision.
Content of the invention
For problems of the prior art, the purpose of the present invention is for providing a kind of accuracy of detection height, antijamming capability
Strong high accuracy long-range Optical Surface detector.
For achieving the above object, the following technical scheme of present invention offer:
A kind of high accuracy long-range Optical Surface detector, including the first optical head, reference mirror and the second optical head, institute
State the first optical head and be used for scanning optical element to be measured, described reference mirror is fixedly installed on the side wall of described first optical head,
Described second optical head projects reference beam to described reference mirror, and detects the reference beam of described reference mirror reflection, and described the
One optical head is different from the accuracy class of described second optical head.
Further, described optical element to be measured is arranged on an optical table, and described first optical head is arranged at described light
Learn above platform, described second optical head is fixedly installed.
Further, described optical element to be measured is horizontally disposed with, and described first optical head sets close to described optical element to be measured
Put, and be scanned in the horizontal direction moving, described reference mirror is vertically arranged.
Further, described first optical head is the f- θ system of narrow laser beam, including laser instrument, coupled lens, optical fiber, standard
Straight lens, phase board, beam splitter, plane mirror, Fourier transform lens and planar array detector, described laser instrument passes sequentially through
, to described beam splitter projecting beam, described beam splitter is a part of by described light beam for coupled lens, optical fiber, collimation lens and phase board
It is projected to described plane mirror, then pass through reflecting and passing through described Fourier transform lens to described of described beam splitter again
Planar array detector, another part is projected to described light source component to be measured, then passes through reflecting and passing through institute of described beam splitter again
State Fourier transform lens to described planar array detector.
Further, the light beam of the relatively described beam splitter projection of described plane mirror is obliquely installed.
Further, described first optical head is an autocollimator.
Further, described second optical head is an autocollimator.
Further, described second optical head is the f- θ system of narrow laser beam as above.
Further, described reference mirror is plane mirror.
The present invention compared with prior art, adopts the first optical head and the second optical head in the present invention, the first optical head enters
Row scanning survey optical element to be measured, the second optical head carries out the scanning motion error-detecting of the first optical head, two optical head roots
Precision, measurement range and width of light beam are set according to different detection demands and grade such that it is able to more accurate measurement
Optical element to be measured, and be difficult by external environmental interference.
Brief description
Below in conjunction with the accompanying drawings the present invention is described in further detail:
Fig. 1 is existing ltp ii optical texture schematic diagram；
Fig. 2 is existing ppltp optical texture schematic diagram；
Fig. 3 is existing nom optical texture schematic diagram；
Fig. 4 is the high accuracy long-range Optical Surface detector structural representation of the present invention.
Specific embodiment
Embody feature of present invention will describe in detail in the following description with the exemplary embodiments of advantage.It should be understood that this
Invention can have various changes in different embodiments, and it neither departs from the scope of the present invention, and therein explanation and
Accompanying drawing is inherently illustrated as being used, and is not used to limit the present invention.
As shown in figure 4, the high accuracy long-range Optical Surface detector of the present invention, including the first optical head 100, reference
Mirror 300 and the second optical head 200.Wherein, the first optical head 100 is used for scanning optical element 400 to be measured, and reference mirror 300 is fixing
It is arranged on the side wall of the first optical head 100, the second optical head 200 projects reference beam to reference mirror 300, and detects reference mirror
The reference beam 600 of 300 reflections, the first optical head 100 is different from the accuracy class of the second optical head 200.
In the present invention, optical element 400 to be measured is arranged in an optical table (not shown), the first optical head 100
It is arranged at side above optical table, the second optical head 200 is fixedly installed.Optical element 400 to be measured is horizontally disposed with, the first optical head
100 are arranged close to optical element 400 to be measured, and are scanned in the horizontal direction moving, and reference mirror 300 is vertically arranged.
In the present invention, the first optical head 100 can be an autocollimator, alternatively the f- θ system of narrow laser beam.As Fig. 4
Shown, in the present embodiment, the first optical head 100 is the f- θ system of narrow laser beam.Specifically, the first optical head 100 includes laser
Device 101, coupled lens 102, optical fiber 103, collimation lens 104, phase board 105, beam splitter 106, plane mirror 107, Fu Li
Leaf transformation lens 108 and planar array detector 109, laser instrument 101, coupled lens 102, optical fiber 103, collimation lens 104, phase board
105th, beam splitter 106, plane mirror 107, Fourier transform lens 108 and planar array detector 109 are placed in housing 110.
Laser instrument 101 passes sequentially through coupled lens 102, optical fiber 103, collimation lens 104 and phase board 105 to beam splitter 106 projection light
Bundle 500, light beam 500 part is projected to plane mirror 107 by beam splitter 106, then passes through the reflection of beam splitter 106 more simultaneously
By Fourier transform lens 108 to planar array detector 109, another part is projected to light source component 400 to be measured, then passes through again
The reflecting and pass through Fourier transform lens 108 to planar array detector 109 of beam splitter 106.Plane mirror 107 beam splitter relatively
The light beam 500 of 106 projections is obliquely installed.
In the present invention, the second optical head 200 can be an autocollimator, the f- θ of narrow laser beam alternatively as above
System.In the present embodiment, as shown in figure 4, the second optical head is autocollimator.In the present embodiment, reference mirror 300 is plane reflection
Mirror.
In the present embodiment, the first optical head 100 is the f- θ measurement light of the narrow laser beam of built-in light source directive property reference path
Learn head, the coupled lens of LASER Light Source 102 enter optical fiber 103, and collimated lens 104 collimate as the first optical head 100 light again
Source, is changed into, through phase board 105, the light beam that two semi-gloss differ half-wavelengths, then is divided into two bundles through beam splitter 106, a branch of for measuring light
Bundle, throw to optical element 400 surface to be measured reflected to Fourier transformation (ft) lens 108 by measuring beam angle information change
For focal spot positional information on planar array detector 109；Another restraint as light source directivity reference beam, throw to being fixed on the first optical head
Plane mirror 107 within 100 is reflected to be converted to face by reference beam angle information to Fourier transformation (ft) lens 108
Focal spot positional information on array detector 108.Second optical head 200 adopts the angle pencil of ray autocollimator of high accuracy small range, and edge is swept
Retouch the direction of motion vertically to throw to the reference mirror 300 being fixed on the first optical head 100, reflected light is back to autocollimator parameter first
Optical head 100 scanning motion error.
Compared with prior art, the beneficial effects of the present invention is:
1st, significantly reduce lateral displacement on the non-ideal optical element of instrument internal for the light path, thus improve measurement
Precision.Specifically comprise the following aspects:
1) the low lateral displacement of measuring beam.Compared with existing ppltp and nom, the optical path of detector of the present invention is long
Degree is very short, and this significantly reduces the lateral displacement that in scanning process, measuring beam angle change causes.In addition, detector of the present invention
Optical path length be almost fixing (its change is only minute surface height change to be measured), so almost eliminate inclination
The lateral displacement of measuring beam optical path length change in scanning process.
2) the low lateral displacement of light source directivity reference beam.Light source directivity reference beam is completely restricted in the first light
Learn inside 100, be similarly very short regular length light path, this light path lateral displacement little on accuracy of instrument impact to can be complete
Ignore.
3) the low lateral displacement of scanning motion reference beam.Because the second optical head 200 is exclusively used in completing scanning motion
Reference measure, therefore refers to light beam and designs for non-inclined, is substantially parallel with scanning motion direction, so the inclination with ltp ii
Reference beam design is compared, and the lateral displacement of scanning motion reference beam substantially completely eliminates.
2nd, instrument is easy to demarcate calibration；
All optical path lengths in the present invention the first optical head 100 are substantially stationary to be calibrated it is easy to demarcate.Second optical head
Although 200 optical path length changes, due to being that non-diagonal beam does not almost have lateral displacement, without consideration light path when therefore calibrating
Length change impact is it is easy to calibrate.
3rd, it is applicable to the optical surface detection of polarizers of big angle scope；
In the present invention, optical path is very short, the lateral displacement very little that same measuring point angle change causes, and therefore can be used for
The optical surface of detection polarizers of big angle scope.
4th, the reference measure high precision of scanning motion error and light source directivity error.
In the present invention, light source directivity reference path is completely enclosed within inside the first optical head 100, optical path length very short and
Fixing, no lateral displacement and be not easily susceptible to the instable impact of environment, thus light source directivity certainty of measurement is greatly improved.
The non-inclined scanning motion reference beam of the present invention the second optical head 200 substantially completely eliminates lateral displacement, this light beam simultaneously
Using angle pencil of ray, it is not easily susceptible to environment unstability and lateral displacement impact, thus scanning motion certainty of measurement is greatly improved.
Technical scheme is disclosed as above by preferred embodiment.Artisan will appreciate that not taking off
The change made in the case of scope and spirit of the present invention disclosed in from appended claims of the invention and retouching, all belong to
Within the scope of the claims of the present invention.
Claims (8)
1. a kind of high accuracy long-range Optical Surface detector is it is characterised in that include the first optical head, reference mirror and second
Optical head, described first optical head is used for scanning optical element to be measured, and described reference mirror is fixedly installed on described first optical head
Side wall on, described second optical head projects reference beam to described reference mirror, and detects the reference light of described reference mirror reflection
Bundle, described first optical head is different from the accuracy class of described second optical head, and described first optical head is the f- θ of narrow laser beam
System, saturating including laser instrument, coupled lens, optical fiber, collimation lens, phase board, beam splitter, plane mirror, Fourier transformation
Mirror and planar array detector, described laser instrument passes sequentially through coupled lens, optical fiber, collimation lens and phase board and throws to described beam splitter
Irradiating light beam, a described light beam part is projected to described plane mirror by described beam splitter, then passes through described beam splitter again
Reflect and pass through described Fourier transform lens to described planar array detector, another part is projected to described optical element to be measured,
Then again by the transmission of described beam splitter and by described Fourier transform lens to described planar array detector, described second light
Learn head vertically to throw to the described reference mirror being fixed on described first optical head along scanning motion direction.
2. high accuracy long-range Optical Surface detector as claimed in claim 1 is it is characterised in that described treat photometry unit
Part is arranged on an optical table, and described first optical head is arranged above described optical table, and described second optical head is fixed
Setting.
3. high accuracy long-range Optical Surface detector as claimed in claim 2 is it is characterised in that described treat photometry unit
Part is horizontally disposed with, and described first optical head is arranged close to described optical element to be measured, and is scanned in the horizontal direction moving, institute
State reference mirror to be vertically arranged.
4. high accuracy long-range Optical Surface detector as claimed in claim 1 is it is characterised in that described plane mirror
The light beam of relatively described beam splitter projection is obliquely installed.
5. described high accuracy long-range Optical Surface detector as arbitrary in claim 1-3 is it is characterised in that described second
Optical head is an autocollimator.
6. described high accuracy long-range Optical Surface detector as arbitrary in claim 1-3 is it is characterised in that described second
Optical head is the f- θ system of described narrow laser beam.
7. described high accuracy long-range Optical Surface detector as arbitrary in claim 1-3 is it is characterised in that described reference
Mirror is plane mirror.
8. a kind of high accuracy long-range Optical Surface detector is it is characterised in that include the first optical head, reference mirror and second
Optical head, described first optical head is used for scanning optical element to be measured, and described reference mirror is fixedly installed on described first optical head
Side wall on, described second optical head projects reference beam to described reference mirror, and detects the reference light of described reference mirror reflection
Bundle, described first optical head is different from the accuracy class of described second optical head, and described first optical head is an autocollimator, institute
State the second optical head vertically to throw to the described reference mirror being fixed on described first optical head along scanning motion direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410253989.7A CN104019762B (en) | 2014-06-10 | 2014-06-10 | High-precision long-range surface shape detector for optical surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410253989.7A CN104019762B (en) | 2014-06-10 | 2014-06-10 | High-precision long-range surface shape detector for optical surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104019762A CN104019762A (en) | 2014-09-03 |
| CN104019762B true CN104019762B (en) | 2017-01-18 |
Family
ID=51436646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410253989.7A Active CN104019762B (en) | 2014-06-10 | 2014-06-10 | High-precision long-range surface shape detector for optical surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104019762B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6465345B2 (en) * | 2014-12-26 | 2019-02-06 | 株式会社荏原製作所 | Method and apparatus for measuring surface properties of polishing pad |
| CN105674913B (en) * | 2016-02-24 | 2018-03-30 | 中国科学院上海应用物理研究所 | A kind of long-range Optical Surface detecting system |
| CN105737759B (en) * | 2016-02-24 | 2018-06-29 | 中国科学院上海应用物理研究所 | A kind of long-range profile measuring device |
| CN105758333B (en) * | 2016-02-24 | 2018-06-19 | 中国科学院上海应用物理研究所 | A kind of long-range Optical Surface detector |
| CN105737758B (en) * | 2016-02-24 | 2018-05-04 | 中国科学院上海应用物理研究所 | A kind of long-range profile measuring instrument |
| CN106767675B (en) * | 2017-02-06 | 2019-04-02 | 重庆理工大学 | The optimization method of f-theta measuring system based on light pencil |
| CN108180865A (en) * | 2017-12-28 | 2018-06-19 | 长春长光精密仪器集团有限公司 | A kind of test device of heavy-calibre planar minute surface shape |
| CN110296666B (en) * | 2018-03-23 | 2021-04-20 | 泓邦科技有限公司 | Three-dimensional measuring device |
| CN110702030B (en) * | 2019-11-14 | 2021-03-09 | 中科院南京天文仪器有限公司 | Compensation type scanning device and method for online detection of rotationally symmetric mirror surface shape |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN112762857B (en) * | 2021-01-20 | 2022-09-06 | 西安应用光学研究所 | Large-caliber plane mirror surface shape online detection method |
| CN116593129B (en) * | 2023-05-05 | 2024-07-23 | 中国科学院高能物理研究所 | High-precision wavefront detection method and device based on double-edge scanning |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004093452A (en) * | 2002-09-02 | 2004-03-25 | Canon Inc | Three-dimensional shape measuring device and method |
| KR20090023301A (en) * | 2007-08-29 | 2009-03-04 | 한국전광(주) | Long trace profiler system for three dimensional surface measuring |
| CN101476880A (en) * | 2009-02-05 | 2009-07-08 | 范勇 | Surface shape detection apparatus and method for large-bore plane optical element |
| CN103278106A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院高能物理研究所 | High-accuracy high-spatial resolution long range profile detection system |
| CN103292728A (en) * | 2013-05-16 | 2013-09-11 | 中国科学院高能物理研究所 | High-precision long-range surface shape detecting system and method |
-
2014
- 2014-06-10 CN CN201410253989.7A patent/CN104019762B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004093452A (en) * | 2002-09-02 | 2004-03-25 | Canon Inc | Three-dimensional shape measuring device and method |
| KR20090023301A (en) * | 2007-08-29 | 2009-03-04 | 한국전광(주) | Long trace profiler system for three dimensional surface measuring |
| CN101476880A (en) * | 2009-02-05 | 2009-07-08 | 范勇 | Surface shape detection apparatus and method for large-bore plane optical element |
| CN103278106A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院高能物理研究所 | High-accuracy high-spatial resolution long range profile detection system |
| CN103292728A (en) * | 2013-05-16 | 2013-09-11 | 中国科学院高能物理研究所 | High-precision long-range surface shape detecting system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104019762A (en) | 2014-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104019762B (en) | High-precision long-range surface shape detector for optical surface | |
| CN107228638B (en) | The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously | |
| CN105424322A (en) | Self-calibration optical axis parallelism detector and detection method | |
| CN104748835B (en) | Amount of interference detaches laser interference vialog nonlinearity erron modification method and device | |
| CN109579780A (en) | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method | |
| JP5486379B2 (en) | Surface shape measuring device | |
| CN110082071B (en) | Device and method for measuring optical parallel difference of right-angle prism | |
| CN104391291A (en) | Fine particle laser radar system with adjustable focal position and self-calibration method | |
| CN105737759B (en) | A kind of long-range profile measuring device | |
| CN109470176A (en) | High-precision three-dimensional angle measurement method and device based on double grating | |
| CN103727892A (en) | Calibration apparatus, calibration method, and measurement apparatus | |
| CN109883362A (en) | A kind of straight line degree measurement system based on grating interference principle | |
| CN106767395A (en) | One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method | |
| CN109387161A (en) | Auto-collimation system | |
| CN114252028B (en) | Compact four-facula two-dimensional corner detection device combined with laser triangulation method | |
| CN116164673A (en) | Straightness interferometry method based on optical interference principle | |
| CN106017864A (en) | Testing device and testing method for characteristic parameters of swing mirror | |
| CN113639675B (en) | Method and device for measuring nanoradian-level three-dimensional angle based on deformable mirror compensation | |
| CN109579744A (en) | Trailing type three-dimensional photoelectric auto-collimation method and apparatus based on grating | |
| CN105758333B (en) | A kind of long-range Optical Surface detector | |
| CN109579782A (en) | A kind of big working distance auto-collimation three-dimensional perspective measuring device of high-precision and method | |
| CN105737758B (en) | A kind of long-range profile measuring instrument | |
| CN107024284B (en) | A kind of the heavy caliber collimation wavefront error detection device and method of real-time compensation | |
| CN106908004B (en) | A kind of distance measurement system and its application based on vectorial field | |
| CN113639665B (en) | High-stability nanoradian magnitude angle measurement method and device based on drift amount feedback |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |