CN107505121B - The angle measuring device and method of electro-optic crystal light pass surface normal and the optical axis of crystal - Google Patents
The angle measuring device and method of electro-optic crystal light pass surface normal and the optical axis of crystal Download PDFInfo
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- CN107505121B CN107505121B CN201710917302.9A CN201710917302A CN107505121B CN 107505121 B CN107505121 B CN 107505121B CN 201710917302 A CN201710917302 A CN 201710917302A CN 107505121 B CN107505121 B CN 107505121B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
Abstract
A kind of the angle measuring device and method of electro-optic crystal light pass surface normal and the optical axis of crystal, main element in the device includes: linearly polarized light laser, the first lens, aperture, the second lens, spectroscope, plane mirror, receiving screen, the third lens, one-dimensional precise electricity driving displacement platform, the 4th lens, linear polarizer, the 5th lens, image detector and computer, and it is 1 that adjustment optical path, which must use Digital Optoelectronic Autocollimator and one piece of depth of parallelism, " parallel plate glass etc..The present invention realizes the contactless non-destructive testing of electro-optic crystal to be measured, overcomes that the crystal in existing method is also easy to produce scratch, measuring device is difficult to build and is difficult to a series of problems, such as analyzing with conoscopic interference figure.The present invention replaces the third lens and the 4th lens of different F numbers, can measure to the electro-optic crystal of different-thickness.The data redundancy that the present invention measures is fine, is compared with the data of existing X-ray crystal orientation device measurement, relative error is 30 " within.
Description
Technical field
The present invention relates to optical measurement and detection field, especially a kind of electro-optic crystal light pass surface normal direction and crystal light
The measuring device and method of the angle of axis direction.
Background technique
In electro-optic crystal is usually used in optical modulator and light opens the light device, during processing because of it, usually along perpendicular to
The direction of its optical axis is cut, so the measurement of its optical axis direction is just particularly important.Dead axle error decides that cutting misses
Difference, with the increase of cutting error, during use, light energy loss can increase rapidly electro-optic crystal, transfer efficiency
Therefore it is lower.Therefore, it to measure with considerable accuracy for electro-optic crystal optical axis direction.Seen general method is on the market
It is measured using " X-ray crystal orientation device ", this method is based on Bragg diffraction principle, and when measurement need to be by electro-optic crystal to be measured
It tightly adsorbing on the steel plate, this can generate scratch to the surface of high-accuracy optical crystal, the beam quality of transmitted light beam is influenced,
The structural parameters that whether have the crystal are also limited in crystal library simultaneously.
In patent of invention " electro-optic crystal Z axis deflecting angle measuring device and measuring method (CN105066910A) ", although
Inventor be again based on the method for conoscopic interference figure realize measurement, but inventor do not make clear it is anti-described in the device
Penetrate how mirror is put in adjustment, it, can if the incidence angle of the reflecting mirror glazed thread and angle of reflection are not 90 °
It can slightly affect the measurement accuracy of electro-optic crystal Z axis deflecting angle to be measured.
Summary of the invention
The present invention propose the angle in a kind of electro-optic crystal light pass surface normal direction and optical axis of crystal direction measuring device and
Method realizes the contactless non-destructive testing of electro-optic crystal, overcomes the crystal in existing method and is also easy to produce scratch, measuring device
It is difficult to build and is difficult to a series of problems, such as analyzing with conoscopic interference figure.The third lens and the 4th lens for replacing different F numbers, can be right
The electro-optic crystal of different-thickness measures.The data redundancy of measurement is fine, with the measurement of existing X-ray crystal orientation device
Data are compared, and relative error is 30 " within.
Technical solution of the invention is as follows:
A kind of measuring device of electro-optic crystal light pass surface normal and optical axis of crystal angle, comprising: laser, the first lens,
Aperture, the second lens, spectroscope, receiving screen, plane mirror, the third lens, one-dimensional precise electricity driving displacement platform, electricity to be measured
Luminescent crystal, the 4th lens, linear polarizer, the 5th lens, image detector and computer；It is characterized in that the laser is
Linearly polarized light laser, the laser direction issued along the linearly polarized light laser is successively first lens, aperture
Incident light is divided into reflected light and transmitted light by diaphragm, the second lens and spectroscope, the spectroscope, on the reflection light direction
The plane mirror is placed, which is reflected into light on the receiving screen again；In the transmitted light
Direction is sequentially placed the third lens, electro-optic crystal to be measured, the 4th lens, linear polarizer, the 5th lens and the image detection
Device, the third lens are fixed on the one-dimensional precise electricity driving displacement platform, the analyzing direction of the linear polarizer
It is mutually perpendicular to the direction of vibration of the linearly polarized light laser emitting light；The output end of the image detector with it is described
The input terminal of computer be connected, the spectroscope, receiving screen, plane mirror and the safe graceful Green of electro-optic crystal to be measured composition
Type interference system；The third lens are identical with the bore of the 4th lens, focal length is identical, and are strictly conjugated in optical path, institute
The relationship of the thickness d of the F number of the third lens and the 4th lens stated and the electro-optic crystal to be measured are as follows: 2F≤d≤3F；It is described
Linearly polarized light laser outgoing beam, the first lens, the second lens, the third lens and the 4th same optical axis of lens；Described
The third lens can be removed by the one-dimensional precise electricity driving displacement platform and move into optical path, and the third lens are described every time
One-dimensional precise electricity driving displacement platform move into optical path after all in same position.
Using the method for above-mentioned measuring device measurement electro-optic crystal light pass surface normal and optical axis of crystal angle, including following step
It is rapid:
1) first lens, second are sequentially placed thoroughly in the laser outbound course of the linearly polarized light laser
Mirror, spectroscope and one piece are used for the parallel plate glass of adjustment optical path, and the depth of parallelism of the parallel plate glass is 1 ", tilt 44 °
It is placed to 46 °, it reflects the light onto the side of optical path；The receiving screen is placed on the reflection light direction；Pass through
Front, back, left, right, up, down mobile first lens and the second lens and pitching and the beat direction for adjusting them simultaneously,
Shearing interference fringes are observed on the receiving screen, when number of interference fringes is minimum, by first lens and second
Lens are fixed, then the aperture is moved to the focal point of first lens, and the effect of the aperture is filter
Fall the stray light outside first lens focus；Then, the parallel plate glass and receiving screen are removed into optical path, this
When, the transmitted light of the spectroscope output is uniform circular collimated light beam；
2) place Digital Optoelectronic Autocollimator in spectroscopical transmission light direction, and with the computer phase
Even, the precision of the Digital Optoelectronic Autocollimator is 1 ", adjust pitching and the beat side of the Digital Optoelectronic Autocollimator
To making the center of spectroscopical transmitted light hot spot just and in the Digital Optoelectronic Autocollimator in-built CCD image planes
The center of the spider graticule of centre is overlapped；
3) plane mirror is placed on spectroscopical reflection light direction, the plane mirror is by light
Reflection is reached through the spectroscope on the receiving screen；The spectroscope and the Digital Optoelectronic Autocollimator it
Between place the parallel plate glass；The linearly polarized light laser is closed, the Digital Optoelectronic Autocollimator is opened
Built-in laser light source, emergent light be cross pronged shape, pitching and beat side by adjusting the parallel plate glass
To making the reflected light of the rear surface of the parallel plate glass formed spider in the Digital Optoelectronic Autocollimator
As being overlapped with the cross cross wires in the Digital Optoelectronic Autocollimator in-built CCD image planes center；At this point, the parallel flat glass
The front surface of glass is strictly perpendicular to the optical axis of optical path, and because the depth of parallelism of the parallel plate glass is 1 ", thus it is described flat
The front surface of row plate glass is also strictly perpendicular to the optical axis of optical path；Secondly, passing through the pitching of plane mirror described in adjustment
With beat direction, interference fringe is observed on the receiving screen, when number of interference fringes is minimum, the plane mirror
On light incidence angle and angle of reflection be 90 °；
4) the F number and the thickness d of the electro-optic crystal to be measured of the selection the third lens and the 4th lens should meet
Relationship 2F≤d≤3F；The Digital Optoelectronic Autocollimator and the computer are removed into optical path, the spectroscope with
The third lens and the 4th lens, the third lens are sequentially placed between the parallel plate glass to be fixed on
On the one-dimensional precise electricity driving displacement platform, pass through the front, back, left, right, up, down mobile the third lens and the 4th lens
And adjust their pitching and beat direction simultaneously, observe interference fringe on the receiving screen, when number of interference fringes most
When few, the third lens are strictly conjugated with the 4th lens, at this time by the third lens and the described the 4th
Lens are fixed；
5) parallel plate glass is removed into optical path, is recorded using the one-dimensional precise electricity driving displacement platform described
The third lens position, and after being denoted as position A, the third lens are translated out into optical path along guide rail；Described one-dimensional
The electro-optic crystal to be measured is placed between electric precise displacement platform and the 4th lens, by adjusting the electricity to be measured
The pitching of luminescent crystal and beat direction, observe interference fringe on the receiving screen, described when number of interference fringes is minimum
The light pass surface of electro-optic crystal to be measured and the optical axis of optical path between angle be 90 °, the electro-optic crystal to be measured is fixed；
6) linear polarizer, the 5th lens and the image are sequentially placed on the transmission light direction of the 4th lens
Detector, the output end of the image detector is connected with the input terminal of the computer, and the 5th lens are
Imaging len enables j=1；
7) after the third lens being moved to record position A along guide rail with the one-dimensional precise electricity driving displacement platform,
At this point, forming conoscopic interference figure on the photosurface of the image detector；
8) by computer described in the conoscopic interference figure input, which is connected the image detector described in image
The method of logical regional barycenter line finds the position of the black spider intersection point of conoscopic interference figure, which is the electric light to be measured
The position of dew point of the optical axis of crystal on the image detector photosurface, the position coordinates are denoted as Nj, as j=4, jump
Step 10) is gone to, is otherwise entered step 9)；
9) the third lens are translated out into optical path along guide rail with the one-dimensional precise electricity driving displacement platform, it is described to
Electro-optic crystal is surveyed perpendicular to 90 ° of optical axis rotation of optical path, and enables j=j+1, return step 7)；
10) above-mentioned calculated 4 dew points (N1, N are fitted using multi-point fitting circle algorithm2、N3And N4) position institute
Locus circle, the radius of the locus circle isUnit is pixel, enables k=1；
11) rim ray of the electro-optic crystal to be measured is incident on to kth width conoscopic interference figure measurement obtained above
With the light pass surface normal direction of the electro-optic crystal to be measured respectively two dew points on the image detector away from
FromUnit is pixel；The focal length f of measurement the 4th lens, unit is millimeter；Measurement penetrates the 4th lens
Spot radiusUnit is millimeter；Under the operation wavelength of the linearly polarized light laser, the electro-optic crystal to be measured
O optical index measured value be no, the measured value of air refraction is nair, as k=4, jump to step 13), otherwise into
Enter step 12)；
12) parameter of above-mentioned measurement is substituted into following equation and calculates angle thetak:
And k=k+1 is enabled, return step 11)；
13) 4 angle (θ for obtaining above-mentioned solution1、θ2、θ3And θ4) substitute into following equation calculating angle thetaaxis:
The light pass surface normal of the electro-optic crystal to be measured as measured and the angle theta of the optical axis of crystalaxis。
Technical effect of the invention is as follows:
The present invention utilizes conoscopic interference principle, realizes the contactless non-destructive testing of electro-optic crystal to be measured, overcomes existing
Crystal in all multi-methods is also easy to produce scratch, measuring device is difficult to build and a series of difficult point such as is difficult to analyze with conoscopic interference figure
Problem.Meanwhile the present invention uses Digital Optoelectronic Autocollimator and one piece of depth of parallelism for 1 " parallel plate glass to the system into
Row assistant resetting, ensured electro-optic crystal light pass surface to be measured and measuring beam optical axis exact vertical it is incident.Light is bored in analysis
In terms of interference pattern striped, the present invention proposes to look for the optical axis of crystal in detector photosurface with the method for image connectivity regional barycenter line
The round method of upper dew point position, multi-point fitting looks for the optical axis of optical path dew point position and new light on detector photosurface
Trace following method calculates electro-optic crystal light pass surface normal and the angle of the optical axis of crystal etc..
Detailed description of the invention
Fig. 1 is the angle measuring device schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal of the present invention
Fig. 2 is the angle measuring device Method of Adjustment schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal
Fig. 3 is the angle measuring device Method of Adjustment schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal
Fig. 4 is the angle measuring device Method of Adjustment schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal
Fig. 5 is the angle measuring device Method of Adjustment schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal
Fig. 6 is the angle measuring device Method of Adjustment schematic diagram of electro-optic crystal light pass surface normal and the optical axis of crystal
Fig. 7 is the theoretical calculation explanatory diagram of the angle measurement method of electro-optic crystal light pass surface normal and the optical axis of crystal of the present invention
Specific embodiment
Fig. 1 is the angle measuring device schematic diagram of electro-optic crystal light pass surface normal of the present invention and the optical axis of crystal, as seen from the figure,
The measuring device of electro-optic crystal light pass surface normal and optical axis of crystal angle of the present invention, comprising: laser 1, the first lens 2, aperture
Diaphragm 3, the second lens 4, spectroscope 5, receiving screen 6, plane mirror 7, the third lens 8, one-dimensional precise electricity driving displacement platform 9, to
Survey electro-optic crystal 10, the 4th lens 11, linear polarizer 12, the 5th lens 13, image detector 14 and computer 15；Described swashs
Light device is linearly polarized light laser 1, and the laser direction issued along the linearly polarized light laser 1 is successively described first thoroughly
Mirror 2, aperture 3, the second lens 4 and spectroscope 5, which is divided into reflected light and transmitted light for incident light, described
The plane mirror 7 is placed on reflection light direction, which is reflected into light on the receiving screen 6 again；
The third lens 8, electro-optic crystal to be measured 10, the 4th lens 11, linear polarizer are sequentially placed in the transmission light direction
12, the 5th lens 13 and image detector 14, the third lens 8 are fixed on the one-dimensional precise electricity driving displacement platform 9
On, the analyzing direction of the linear polarizer 12 and the direction of vibration of 1 emergent light of linearly polarized light laser are mutually perpendicular to；
The output end of the image detector 14 is connected with the input terminal of the computer 15.The spectroscope 5, receiving screen 6,
Plane mirror 7 and electro-optic crystal to be measured 10 form safe graceful Green's type interference system；The third lens 8 and the 4th lens 11
Bore is identical, focal length is identical, the third lens 8 and the 4th lens 11 are strictly conjugated in optical path, and the third is saturating
The relationship of the thickness d of the F number of mirror 8 and the 4th lens 11 and the electro-optic crystal to be measured 10 are as follows: 2F≤d≤3F；The line
The outgoing beam of polarized light laser 1, the first lens 2, the second lens 4, the third lens 8 and the same optical axis of the 4th lens 11；It is described
The third lens 8 can be removed and be moved into optical path by the one-dimensional precise electricity driving displacement platform 9, and the third lens 8 are each
It is moved into after optical path by the one-dimensional precise electricity driving displacement platform 9 all in same position.
Using the method for above-mentioned measuring device measurement electro-optic crystal light pass surface normal and optical axis of crystal angle, including following step
It is rapid:
1) first lens referring to fig. 2, are sequentially placed in the laser outbound course of the linearly polarized light laser 1
2, the second lens 4, spectroscope 5 and one piece are used for the parallel plate glass 16 of adjustment optical path, the parallel plate glass 16
The depth of parallelism be 1 ", inclination 44 ° to 46 ° placement, it reflects the light onto the side of optical path；It is placed on the reflection light direction
The receiving screen 6；By mobile first lens 2 in front, back, left, right, up, down and the second lens 4 and adjust it simultaneously
Pitching and beat direction, observe Shearing interference fringes on the receiving screen 6, when number of interference fringes is minimum, will
First lens 2 and the second lens 4 are fixed, then the aperture 3 is moved to the focus of first lens 2
Place, the effect of the aperture 3 is the stray light filtered outside 2 focus of the first lens；Then, by the parallel flat
Glass 16 and receiving screen 6 remove optical path, at this point, the transmitted light that the spectroscope 5 exports is uniform circular collimated light beam；
2) referring to Fig. 3, the digital photoelectricity for debugging device is placed certainly in the transmission light direction of the spectroscope 5
Collimator 17, and be connected with computer 15, the precision of the Digital Optoelectronic Autocollimator 17 is 1 "；By adjusting the number
The pitching of word photoelectric auto-collimator 17 and beat direction, make the center of the transmitted light hot spot of the spectroscope 5 just with it is described
17 in-built CCD image planes center of Digital Optoelectronic Autocollimator spider graticule center be overlapped；
3) plane mirror 7 referring to fig. 4, is placed on the reflection light direction of the spectroscope 5, the plane is anti-
Mirror 7 is penetrated to reflect light through on the spectroscope 5 described in you to the receiving screen 6；In the spectroscope 5 and the number
The parallel plate glass 16 is placed between photoelectric auto-collimator 17；The linearly polarized light laser 1 is closed, described in opening
Digital Optoelectronic Autocollimator 17 built-in laser light source, emergent light is cross pronged shape, parallel is put down by adjusting described
The pitching of glass sheet 16 and beat direction make the reflected light of the rear surface 16b of the parallel plate glass 16 in the number
Formed spider picture and the ten of the 17 in-built CCD image planes center of Digital Optoelectronic Autocollimator in word photoelectric auto-collimator 17
Word cross wires is overlapped；At this point, the front surface of the parallel plate glass 16 is strictly perpendicular to the optical axis of optical path, and because described is put down
The depth of parallelism of row plate glass 16 is 1 ", therefore the front surface 16a of the parallel plate glass 16 is also strictly perpendicular to optical path
Optical axis；Secondly, pitching and beat direction by plane mirror 7 described in adjustment, are observed dry on the receiving screen 6
Striped is related to, when number of interference fringes is minimum, the incidence angle and angle of reflection of the light on the plane mirror 7 are 90 °；
4) referring to Fig. 5, the Digital Optoelectronic Autocollimator 17 and the computer 15 are removed into optical path, described
It is sequentially placed the third lens 8 and the 4th lens 11 between spectroscope 5 and the parallel plate glass 16, described the
The thickness of the F number (i.e. the ratio between the focal length of lens and lens diameter) of three lens 8 and the 4th lens 11 and the electro-optic crystal to be measured 10
Spend the relationship of d are as follows: 2F≤d≤3F；The third lens 8 are fixed on the one-dimensional precise electricity driving displacement platform 9, are passed through
The mobile the third lens 8 in front, back, left, right, up, down and the 4th lens 11 and the pitching and the beat side that adjust them simultaneously
To, interference fringe is observed on the receiving screen 6, when number of interference fringes is minimum, the third lens 8 and described
4th lens 11 are strictly conjugated, at this time that the third lens 8 and the 4th lens 11 are fixed；
5) referring to Fig. 6, the parallel plate glass 16 is removed into optical path, uses the one-dimensional precise electricity driving displacement platform
9 record the position of the third lens 8, and after being denoted as position A, the third lens 8 are translated out optical path along guide rail；
The electro-optic crystal to be measured 10 is placed between the one-dimensional precise electricity driving displacement platform 9 and the 4th lens 11, is led to
Pitching and the beat direction for crossing the adjustment electro-optic crystal to be measured 10, observe interference fringe on the receiving screen 6, when
When number of interference fringes is minimum, the angle between the light pass surface of electro-optic crystal to be measured 10 and the optical axis of optical path is 90 °；
6) referring to Fig. 1, the linear polarizer 12, the are sequentially placed on the transmission light direction of the 4th lens 11
Five lens 13 and image detector 14, by the input terminal phase of the output end of the image detector 14 and the computer 15
Even, the 5th lens 13 are imaging len, enable j=1；
7) the third lens 8 are moved into record position A along guide rail with the one-dimensional precise electricity driving displacement platform 9
Afterwards, at this point, forming conoscopic interference figure on the photosurface of the image detector 14；
8) by computer 15 described in the conoscopic interference figure input, which uses the image detector 14 described in
The method of image connectivity regional barycenter line finds the position of the black spider intersection point of conoscopic interference figure, the position be it is described to
The position of dew point of 10 optical axis of electro-optic crystal on 14 photosurface of image detector is surveyed, which is denoted as Nj,
As j=4, step 10) is jumped to, is otherwise entered step 9)；
9) the third lens 8 are translated out into optical path along guide rail with the one-dimensional precise electricity driving displacement platform 9, it is described
Electro-optic crystal 10 to be measured enables j=j+1 perpendicular to 90 ° of optical axis rotation of optical path, return step 7)；
10) above-mentioned calculated 4 dew points (N1, N are fitted using multi-point fitting circle algorithm2、N3And N4) position institute
Locus circle, the radius of the locus circle isUnit is pixel, enables k=1；
11) referring to Fig. 7, the electro-optic crystal to be measured 10 is incident on to kth width conoscopic interference figure measurement obtained above
Rim ray and the electro-optic crystal to be measured 10 light pass surface normal direction respectively on the image detector 14
The distance of two dew pointsUnit is pixel；The focal length f of measurement the 4th lens 11, unit is millimeter；Measurement is saturating
Cross the spot radius of the 4th lens 11Unit is millimeter；Under the operation wavelength of the linearly polarized light laser 1,
The measured value of the o optical index of the electro-optic crystal to be measured 10 is no, the measured value of air refraction is nair, as k=4,
Step 13) is jumped to, is otherwise entered step 12)；
12) parameter of above-mentioned measurement is substituted into following equation and calculates angle thetak:
And k=k+1 is enabled, return step 11)；
13) 4 angle (θ for obtaining above-mentioned solution1、θ2、θ3And θ4) substitute into following equation calculating angle thetaaxis:
The light pass surface normal of the electro-optic crystal to be measured 10 as measured and the angle theta of the optical axis of crystalaxis。
Experiment shows that the present invention using conoscopic interference principle, realizes the contactless non-destructive testing of electro-optic crystal to be measured, gram
Take that the crystal in existing all multi-methods is also easy to produce scratch, measuring device is difficult to build and one system such as is difficult to analyze with conoscopic interference figure
The difficulties of column.The third lens and the 4th lens for replacing different F numbers, can measure the electro-optic crystal of different-thickness.
Meanwhile using the result data of apparatus of the present invention and method measurement, repeatability is good, and surveys with existing X-ray crystal orientation device
The data of amount are compared, and relative error is 30 " within.
Claims (2)
1. the angle measuring device of a kind of electro-optic crystal light pass surface normal and the optical axis of crystal, comprising: laser (1), the first lens
(2), aperture (3), the second lens (4), spectroscope (5), receiving screen (6), plane mirror (7), the third lens (8), one
Tie up electric precise displacement platform (9), electro-optic crystal to be measured (10), the 4th lens (11), linear polarizer (12), the 5th lens (13),
Image detector (14) and computer (15)；It is characterized by:
The laser (1) is linearly polarized light laser (1), along the laser side that the linearly polarized light laser (1) issues
To being successively first lens (2), aperture (3), the second lens (4) and spectroscope (5), which will enter
It penetrates light and is divided into reflected light and transmitted light, the plane mirror (7), the plane reflection are placed on the reflection light direction
Mirror (7) again reaches light reflection on the receiving screen (6) through the spectroscope (5)；The transmission light direction according to
The third lens described in secondary placement (8), electro-optic crystal to be measured (10), the 4th lens (11), linear polarizer (12), the 5th lens
(13) it is fixed on the one-dimensional precise electricity driving displacement platform (9) with image detector (14), the third lens (8),
The direction of vibration of the analyzing direction of the linear polarizer (12) and described linearly polarized light laser (1) emergent light mutually hangs down
Directly；The output end of the image detector (14) is connected with the input terminal of the computer (15)；The spectroscope
(5), receiving screen (6), plane mirror (7) and the safe graceful Green's type interference system of electro-optic crystal to be measured (10) composition；Described
Three lens (8) are identical with the bore of the 4th lens (11), focal length is identical and is strictly conjugated in optical path, the third lens
(8) and the relationship of the thickness d of the F number of the 4th lens (11) and the electro-optic crystal to be measured (10) are as follows: 2F≤d≤3F；It is described
Linearly polarized light laser (1) outgoing beam, the first lens (2), the second lens (4), the third lens (8) and the 4th lens
(11) same to optical axis；The third lens (8) can be removed and be moved into optical path by the one-dimensional precise electricity driving displacement platform (9), and
The third lens (8) are moved into after optical path all by the one-dimensional precise electricity driving displacement platform (9) in same position every time, with flat
Row degree be 1 " parallel plate glass (16) to plane mirror (7), the third lens (8), the 4th lens (11) and electric light to be measured
Crystal (10) carries out pose adjustment.
2. using the method for measuring device described in claim 1 measurement electro-optic crystal light pass surface normal and optical axis of crystal angle,
It is characterized in that method includes the following steps:
1) first lens (2), second are sequentially placed thoroughly in the laser outbound course of the linearly polarized light laser (1)
Mirror (4), spectroscope (5) and one piece be used for adjustment optical path parallel plate glass (16), the parallel plate glass (16) it is parallel
Degree is 1 ", 44 ° to 46 ° placements are tilted, it reflects the light onto the side of optical path；Described in being placed on the reflection light direction
Receiving screen (6)；It adjusts by front, back, left, right, up, down mobile first lens (2) and the second lens (4) and simultaneously
Shearing interference fringes are observed on the receiving screen (6), when number of interference fringes is minimum in their pitching and beat direction
When, first lens (2) and the second lens (4) are fixed, then the aperture (3) is moved to described first
The focal point of lens (2), the effect of the aperture (3) are the stray lights filtered outside described the first lens (2) focus；So
Afterwards, the parallel plate glass (16) and receiving screen (6) are removed into optical path, at this point, the transmission that the spectroscope (5) exports
Light is uniform circular collimated light beam；
2) the spectroscope (5) transmission light direction place Digital Optoelectronic Autocollimator (17), and with the computer
(15) it is connected, the precision of the Digital Optoelectronic Autocollimator (17) is 1 ", adjust the Digital Optoelectronic Autocollimator (17)
Pitching and beat direction, make the center of the transmitted light hot spot of the spectroscope (5) just with the digital photoelectric auto
The center of the spider graticule in straight instrument (17) in-built CCD image planes center is overlapped；
3) plane mirror (7), the plane mirror (7) are placed on the reflection light direction of the spectroscope (5)
Light reflection is reached on the receiving screen (6) through the spectroscope (5)；In the spectroscope (5) and the number
The parallel plate glass (16) is placed between word photoelectric auto-collimator (17)；The linearly polarized light laser (1) is closed,
The built-in laser light source of the Digital Optoelectronic Autocollimator (17) is opened, emergent light is cross pronged shape, by adjusting institute
The pitching for the parallel plate glass (16) stated and beat direction make the rear surface (16b) of the parallel plate glass (16)
Reflected light formed spider picture and Digital Optoelectronic Autocollimator in the Digital Optoelectronic Autocollimator (17)
(17) the cross cross wires in in-built CCD image planes center is overlapped；At this point, the front surface exact vertical of the parallel plate glass (16)
In the optical axis of optical path, and because the depth of parallelism of the parallel plate glass (16) is 1 ", therefore the parallel plate glass (16)
Rear surface (16a) be also strictly perpendicular to the optical axis of optical path；Secondly, by the pitching of plane mirror (7) described in adjustment and
Interference fringe is observed on the receiving screen (6) in beat direction, when number of interference fringes is minimum, the plane reflection
The incidence angle and angle of reflection of light on mirror (7) are 90 °；
4) thickness d of the F number and the electro-optic crystal to be measured (10) of the selection the third lens (8) and the 4th lens (11)
Relationship 2F≤d≤3F should be met；The Digital Optoelectronic Autocollimator (17) and the computer (15) are removed into optical path,
The third lens (8) and the 4th are sequentially placed between the spectroscope (5) and the parallel plate glass (16) thoroughly
Mirror (11), the third lens (8) are fixed on the one-dimensional precise electricity driving displacement platform (9), by it is forward and backward, left,
It is right, move up and down the third lens (8) and the 4th lens (11) and while adjust their pitching and beat direction,
Interference fringe is observed on the receiving screen (6), when number of interference fringes is minimum, the third lens (8) and described
4th lens (11) are strictly conjugated, at this time that the third lens (8) and the 4th lens (11) are fixed；
5) parallel plate glass (16) is removed into optical path, is recorded using the one-dimensional precise electricity driving displacement platform (9)
The position of the third lens (8), and after being denoted as position A, the third lens (8) are translated out into optical path along guide rail；?
The electro-optic crystal to be measured is placed between the one-dimensional precise electricity driving displacement platform (9) and the 4th lens (11)
(10), the pitching by adjusting the electro-optic crystal to be measured (10) and beat direction are observed on the receiving screen (6)
Interference fringe, when number of interference fringes is minimum, between the light pass surface of electro-optic crystal to be measured (10) and the optical axis of optical path
Angle is 90 °, and the electro-optic crystal to be measured (10) is fixed；
6) linear polarizer (12), the 5th lens are sequentially placed on the transmission light direction of the 4th lens (11)
(13) and image detector (14), by the input terminal of the output end of the image detector (14) and the computer (15)
It is connected, the 5th lens (13) are imaging len, enable j=1；
7) the third lens (8) are moved into record position A along guide rail with the one-dimensional precise electricity driving displacement platform (9)
Afterwards, at this point, forming conoscopic interference figure on the photosurface of the image detector (14)；
8) conoscopic interference figure is inputted the computer (15), the computer (15) by the image detector (14) described in
The position of the black spider intersection point of conoscopic interference figure is found with the method for image connectivity regional barycenter line, which is described
The position of dew point of electro-optic crystal (10) optical axis to be measured on described image detector (14) photosurface, position coordinates note
For Nj, as j=4, step 10) is jumped to, is otherwise entered step 9)；
9) the third lens (8) are translated out into optical path along guide rail with the one-dimensional precise electricity driving displacement platform (9), it is described
Electro-optic crystal (10) to be measured enables j=j+1 perpendicular to 90 ° of optical axis rotation of optical path, return step 7)；
10) 4 dew points (N1, N in above-mentioned calculated 4 width conoscopic interference figure are fitted using multi-point fitting circle algorithm2、N3With
N4) position where locus circle, the radius of the locus circle isUnit is pixel, enables k=1；
11) rim ray of the electro-optic crystal to be measured (10) is incident on to kth width conoscopic interference figure measurement obtained above
Two on the image detector (14) go out respectively with the light pass surface normal direction of the electro-optic crystal to be measured (10)
The distance of dew pointUnit is pixel；The focal length f of measurement the 4th lens (11), unit is millimeter；Measurement is through institute
The spot radius for the 4th lens (11) statedUnit is millimeter；Under the operation wavelength of the linearly polarized light laser (1),
The measured value of the o optical index of the electro-optic crystal to be measured (10) is no, the measured value of air refraction is nair, work as k=4
When, step 13) is jumped to, is otherwise entered step 12)；
12) parameter of above-mentioned measurement is substituted into following equation and calculates angle thetak:
And k=k+1 is enabled, return step 11)；
13) 4 angle (θ for obtaining above-mentioned solution1、θ2、θ3And θ4) substitute into following equation calculating angle thetaaxis:
The light pass surface normal of the electro-optic crystal to be measured (10) as measured and the angle theta of the optical axis of crystalaxis。
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| CN109798849B (en) * | 2019-02-14 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Frequency doubling crystal dead axle error measuring device and measuring method |
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| CN111208089B (en) * | 2020-01-13 | 2020-09-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring defects in long-distance rough end face crystal body |
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