CN102155926A - Aspherical mirror vertex curvature radius measurement system and method - Google Patents
Aspherical mirror vertex curvature radius measurement system and method Download PDFInfo
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- 238000005259 measurement Methods 0.000 title claims abstract description 18
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- 238000001514 detection method Methods 0.000 claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims description 25
- 239000005338 frosted glass Substances 0.000 claims description 13
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims 1
- 238000000691 measurement method Methods 0.000 abstract description 4
- 238000004088 simulation Methods 0.000 abstract 2
- 238000000465 moulding Methods 0.000 abstract 1
- 244000144985 peep Species 0.000 abstract 1
- 239000011022 opal Substances 0.000 description 8
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 6
- 239000003205 fragrance Substances 0.000 description 5
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Abstract
The invention discloses an aspherical mirror vertex curvature radius measurement system and method, solving the problem that the aspherical mirror vertex curvature radius cannot be accurately measured by using the traditional device. The aspherical mirror vertex curvature radius measurement method is technically characterized in that a converging lens used for bearing large spherical aberration is combined with an auxiliary aplanatism compensating lens group to form an aplanat group used for positioning, an aspherical mirror is accurately positioned at the peep hole of the aplanat group, the aspherical mirror is moved to designated specific position by using a guide rail system to form a detection light path, the auxiliary aplanatism compensating lens group is removed, and the aspherical mirror vertex curvature radius measurement system is formed by the detection light path and a reference light path. In the optical design software such as ZEMAX software and the like, the aspherical mirror vertex curvature radius measurement system is modeled, and the value of the aspherical mirror vertex curvature radius is continuously changed until simulation stripes in a molding system and the wave aberration zernike coefficient of the simulation stripes are consistent with stripes in an experimental measurement system and the wave aberration zernike coefficient of the stripes. The aspherical mirror vertex curvature radius measurement method provides the accurate vertex curvature radius for the high-accuracy surface shape detection.
Description
Technical field
The present invention relates to a kind of measuring system and method for aspheric surface apex sphere radius-of-curvature.
Background technology
Non-spherical element can be eliminated advantages such as aberration, the image quality that improves optical system, mitigation system weight, raising system stability effectively, more and more is widely used.But because existing processing and detection level have limited the aspheric development of high precision.Each parameter of aspheric surface particularly apex sphere radius-of-curvature all is an important parameters in processing, detecting and debug, and image quality and system stability are had very big influence, influences more so in high-precision optical system such as etching system especially.As accompanying drawing 3 aspheric surfaces in the transmission optics model, aspheric surface apex sphere radius-of-curvature is along with shown in change curve Fig. 4 of side-play amount, aspheric surface apex sphere radius-of-curvature is more little sensitive more, high more to accuracy requirement, for example R is that the aspheric surface apex sphere radius-of-curvature of 400mm is when departing from 0.5mm, to the influence that system's wavefront brings 0.4874 λ, it is 10 that such precision is difficult to be applied in high-precision requirement
-3In the optical system of λ.Therefore aspheric surface will measure and verify whether the apex sphere radius-of-curvature is nominal value before being applied in High Definition Systems.So, what suitable method to measure aspheric surface apex sphere radius-of-curvature with? we know when detecting sphere curvature radius, parallel beam converges at its rear focus place through aplanat, only need to adjust the tested sphere centre of sphere and focus conjugation, then the light beam through spheric reflection returns this focus place formation vertical bar line through former road, by judging the shape localization sphere position of interference fringe, as long as therefore can accurately control the opal position of aplanasia compensating glass can accurately obtain sphere to the distance between the tested sphere position radius-of-curvature.Aspheric surface apex sphere radius-of-curvature is that than the difficulty that sphere detects aspheric surface has the characteristics of non-homocentric beam, use the method measurement aspheric surface of above-mentioned measurement sphere can not form the vertical bar line, but a lot of newton's circular fringeses are difficult to the aspheric position, the accurate location of shape by judging striped like this.In the secondary aberrationless point method commonly used, describe as Fig. 5 and embodiment, when real system is debug, be difficult to accurately measure each device pitch from, can only judge whether each device has good positioning by the shape of interference fringe, therefore can not find out of the influence of aspheric surface apex sphere radius-of-curvature deviation, this method energy measurement aspheric surface apex sphere radius-of-curvature not to system's wavefront.By last analysis as can be known, aspheric surface apex sphere radius-of-curvature is an important and relatively sensitiveer parameter, to measure its apex sphere radius-of-curvature accurately before applying to High Definition Systems, reduce influence to system as far as possible, therefore, need a kind of method of energy high-acruracy survey aspheric surface apex sphere radius-of-curvature.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of measuring system and method for aspheric surface apex sphere radius-of-curvature is provided.
The measuring system of aspheric surface apex sphere radius-of-curvature comprises laser instrument, collimating and beam expanding system, spectroscope, convergent lens, aspheric surface, imaging len, detector, reference surface, guide track system and rotation frosted glass; On same optical axis, be provided with laser instrument, collimating and beam expanding system, spectroscope, convergent lens and aspheric surface successively, the aspheric surface below is provided with guide track system, in a spectroscopical side, the vertical direction of optical axis is provided with reference surface, is provided with rotation frosted glass, imaging len and detector in turn at spectroscopical opposite side; Laser instrument produces directional light through collimating and beam expanding system, inject the aplanat group of forming by convergent lens, aplanasia compensating glass through spectroscope, by moving aspheric guide track system is installed, directional light is overlapped with tested aspheric summit through the aplanat back focus, use guide track system to move aspheric surface again to assigned address, remove the aplanasia compensating glass, utilization convergent lens and aspheric surface constitute the detection light path, interfere the formation interference fringe with the reference surface that moves into, after the modulation of rotation frosted glass, on detector, obtain interference fringe through imaging len again.
Described convergent lens and aplanasia compensating glass are formed the aplanat group, are provided with the aplanasia compensating glass of being made up of two lens between convergent lens and the aspheric surface, and wherein the aplanasia compensating glass is interference position reference face towards aspheric surface.
The measuring method of aspheric surface apex sphere radius-of-curvature is: the directional light of laser instrument after collimating and beam expanding system expands bundle is through behind the spectroscope, the positioned at intervals that detects between light path convergent lens and the aspheric surface is to finish by the Feisuo Precision Position Location System and the guide track system of utilization aplanat, be that the focus of aplanat group is when being positioned at tested aspheric summit, utilize guide track system to move tested aspheric surface to the detection position, remove aplanasia compensating glass group then, realize aspheric surface apex sphere radius of curvature measurement, measuring system is set up modeling, and the number of observation measuring system and modeling interference fringe, in modeling, constantly change aspheric apex sphere radius-of-curvature and make measuring system consistent, obtain the aspheric surface apex sphere radius-of-curvature of micron dimension with modeling striped and wave aberration zernike coefficient thereof.
Description of drawings
Fig. 1 is the measuring system structural representation of aspheric surface apex sphere radius-of-curvature;
Fig. 2 is that aspheric surface constitutes luxuriant and rich with fragrance assistant Precision Position Location System structural representation when the opal position;
Fig. 3 is a transmission-type aspheric optical system model;
Fig. 4 is aspheric surface apex sphere radius-of-curvature departure and wavefront deviation graph of relation;
Fig. 5 is that secondary does not have the index path that aberration point method is measured the aspheric curvature radius;
Fig. 6 is that aspheric surface constitutes the interferogram that forms when phenanthrene is helped Precision Position Location System in the opal position;
Fig. 7 is the process flow diagram of aspheric surface apex sphere curvature radius measurement method;
Fig. 8 is the interferogram that collects in the aspheric surface apex sphere radius of curvature measurement device;
Fig. 9 is the emulation interferogram of aspheric surface apex sphere radius of curvature measurement system in system modelling.
Embodiment
As shown in Figure 1, 2, the measuring system of aspheric surface apex sphere radius-of-curvature comprises laser instrument S1, collimating and beam expanding system S2, spectroscope S3, convergent lens S4, aspheric surface S6, imaging len S8, detector S9, reference surface S10, guide track system S11 and rotation frosted glass S12; On same optical axis, be provided with laser instrument S1, collimating and beam expanding system S2, spectroscope S3, convergent lens S4 and aspheric surface S6 successively, aspheric surface S6 below is provided with guide track system S11, side at spectroscope S3, the vertical direction of optical axis is provided with reference surface S10, is provided with rotation frosted glass S12, imaging len S8 and detector S9 in turn at the opposite side of spectroscope S3; Laser instrument S1 produces directional light through collimating and beam expanding system S2, inject by convergent lens S4 through spectroscope S3, the aplanat group that aplanasia compensating glass S5 forms, by moving the guide track system S11 that aspheric surface S6 is installed, directional light is overlapped with the summit of tested aspheric surface S6 through the aplanat back focus, use guide track system S11 to move aspheric surface S6 again to assigned address, remove aplanasia compensating glass S5, utilization convergent lens and aspheric surface constitute the detection light path, interfere the formation interference fringe with the reference surface S10 that moves into, after rotation frosted glass S12 modulation, on detector S9, obtain interference fringe through imaging len S8 again.
Described convergent lens S4 and aplanasia compensating glass S5 form the aplanat group, are provided with the aplanasia compensating glass S5 that is made up of two lens between convergent lens S4 and the aspheric surface S6, and wherein aplanasia compensating glass S5 is interference position reference face S7 towards the surface of aspheric surface S6
Laser instrument S1 produces directional light through collimating and beam expanding system S2 in the measuring system of aspheric surface apex sphere radius-of-curvature, inject the convergent lens S4 that bears big spherical aberration through spectroscope S3, distance between convergent lens S4 and the aspheric surface S6 is L1, light through convergent lens S4 reflects formation detection light beam through aspheric surface S6, reference beam with reference mirror S10 reflected back forms interference then, obtains interference fringe through imaging len S8 on detector S9 again after rotation frosted glass S12 modulation.The variation of interval L1 between convergent lens S4 and the tested aspheric surface S6 can have influence on the variation of fringe density, therefore needs accurately to locate the distance L 1 between convergent lens S4 and the tested aspheric surface S6.
Because convergent lens S4 is a big spherical aberration system, the focus that neither one is fixing is utilized the aplanasia compensating glass S5 of additional design, with convergent lens S4 combination back for the aplanat group of aplanasia function is arranged.The Feisuo Precision Position Location System of being made up of aplanat as shown in Figure 2, laser instrument S1 produces directional light through collimating and beam expanding system S2, through aplanat group post-concentration in opal, by the S11 of moving guide rail system, the summit of tested aspheric surface S6 is overlapped with the opal position, interfere the luxuriant and rich with fragrance assistant of formation interference fringe through the summit of aspheric surface S6 beam reflected and the reference beam of interfering position reference face S7 reflected back, after rotation frosted glass S12 modulation, on detector S9, obtain interference fringe through imaging len S8 again.Judge by the shape of observing interference fringe whether the summit of aspheric surface S6 overlaps with focus.Fig. 6 is the interferogram that aspheric surface forms when the formation precision positioning of opal position.
After carrying out the precision positioning of phenanthrene assistant between convergent lens S4 and the aspheric surface S6, can accurately obtain the distance L 0 between convergent lens S4 and the tested aspheric surface S6.In aspheric surface apex sphere radius-of-curvature detection system, convergent lens S4 and tested aspheric surface S6 distance should be L1, just can obtain the amount of movement Δ L=L1-L0 of guide track system S11 according to the value of L1 and L0.Guide track system S11 makes aspheric surface S6 to detection position L1 from the distance that opal position L0 moves Δ L, and this position is satisfied the light beam that returns from aspheric surface S6 and have best fringe density again behind convergent lens S4, is convenient to differentiate.Remove aplanasia compensating glass group S5 then, move into canonical reference level crossing S10 simultaneously, the light beam that returns with tested aspheric surface S6 forms aspheric surface apex sphere radius of curvature measurement system shown in Figure 1, obtains interference fringe as shown in Figure 8 on detector.
The measuring method of aspheric surface apex sphere radius-of-curvature is: behind the directional light process spectroscope S3 of laser instrument S1 after collimating and beam expanding system S2 expands bundle, the positioned at intervals that detects between light path convergent lens S4 and the aspheric surface S6 is to finish by Feisuo Precision Position Location System and the guide track system S11 that uses aplanat, be that the focus of aplanat group is when being positioned at the summit of tested aspheric surface S6, utilize guide track system S11 to move tested aspheric surface S6 to the detection position, remove aplanasia compensating glass group S5 then, realize aspheric surface S6 apex sphere radius of curvature measurement, measuring system is set up modeling, and the number of observation measuring system and modeling interference fringe, the apex sphere radius-of-curvature that constantly changes aspheric surface S6 in modeling makes measuring system consistent with modeling striped and wave aberration zernike coefficient thereof, obtains the aspheric surface apex sphere radius-of-curvature of micron dimension.
Fig. 7 is the process flow diagram of aspheric surface apex sphere curvature radius measurement method.Can bear big spherical aberration convergent lens S4 according to different aspheric surface S6 parameter designing; According to convergent lens S4 design aplanasia compensating glass S5, have the function of aplanat after both combinations, be called the aplanat group; Utilize aplanat and phenanthrene assistant type system such as Fig. 2 that aspheric guide track system S11 sets up realization precise interference location is installed, utilization guide track system S11 adjusts the interval between aplanat and the tested aspheric surface S6, when the even a slice look of striped, characterize and be positioned at the L0 position.Move tested aspheric surface S6 then to assigned address L1, constitute and detect light path.Remove aplanasia compensating glass S5, move into reference mirror S10, constitute reference path after light through spectroscope S3 is reflected by reference mirror S10, two-way light forms interferes.Fine setting aspheric surface S6 makes interference fringe be in annulus placed in the middle, and gathers interference fringe; In optical design software, measuring system is set up modeling, if aspheric surface apex sphere radius-of-curvature is a variable, change its value, observe change of interference fringes situation in the modeling, make consistently with the striped and the wave aberration zernike coefficient thereof that collect in the measuring system, this moment, aspheric surface apex sphere radius-of-curvature was the value that requires.
Embodiment
It is as follows that the present invention is applied to the measuring system case description of aspheric surface apex sphere radius-of-curvature.
The tested aspheric surface S6 of embodiment is a parabola, and bore is 159mm, and the nominal radius-of-curvature of apex sphere is 816 mm.
Fig. 5 is the index path that secondary aberrationless point method is measured the aspheric curvature radius, and it is the ZYGO GPI phase-shifting interferometer of 100mm that interferometer adopts bore, and standard lens adopts 100mm, F/3.3 with reference to spherical mirror, reference planes mirror S
REFPlane mirror for internal diameter 13mm, external diameter 149mm, the light process of interferometer outgoing is with reference to spherical mirror, a part is through reflecting back the formation reference path with reference to the spherical mirror rear surface, a part incides tested aspheric surface, reflex to the reference planes mirror through tested aspheric surface, return aspheric surface by the reference planes mirror reflection again, form through aspheric surface reflected back interferometer again and detect light path, reference path and the interference of detection light path form interference fringe.In this system, aspheric focus should overlap with the focus of reference spherical mirror in theory, the reference planes mirror should be placed on the position that bifocal overlaps, but be difficult to accurately each device of location during actual debuging, reference planes mirror and aspheric surface all will suitably be adjusted, be difficult to accurately to measure distance therebetween, can only judge whether aspheric focus overlaps with focus with reference to spherical mirror by the shape of interference fringe.But to this model modeling, when aspheric surface apex sphere radius-of-curvature deviation 0.1mm, 3 wavelength of system's Wavefront aberration bring very big influence to system's wavefront, but only judge that in real system interference fringe can not embody the influence to system in ZEMAX.The utilization secondary does not have aberration point method and has covered the influence of aspheric surface apex sphere radius-of-curvature to system, is difficult to accurately measure aspheric surface apex sphere radius-of-curvature.We have found a kind of method of accurate measurement aspheric surface apex sphere radius-of-curvature in experimentation, it is incorrect having detected nominal aspheric surface apex sphere radius-of-curvature, specifically describes as follows.
Fig. 1 aspheric surface apex sphere radius of curvature measurement system, laser instrument S1 produces directional light through collimating and beam expanding system S2, inject convergent lens S4 through spectroscope S3, the reference beam that reflects with reference mirror S10 reflected back through the aspheric surface of L1 position forms interference fringe again, through frosted glass S12 and imaging len S8, after detector S9 gathers striped.But convergent lens S4 does not have fixing focus, is difficult to the distance L 1 between definite convergent lens S4 and the aspheric surface S6.Light path layout as the luxuriant and rich with fragrance assistant of Fig. 2 Precision Position Location System among the present invention can play the precision positioning effect.Utilize one group of aplanasia compensating glass of additional design S5, with the aplanat group that has the aplanasia function after the convergent lens S4 combination.And the last one side of aplanat group is to interfere position reference face S7.Directional light is also adjusted on focus through aplanat group post-concentration and is overlapped with the summit of tested aspheric surface S6, and return along former road is reverse through the light beam on summit, light beam through the summit back reflection is interfered the luxuriant and rich with fragrance assistant of formation interference fringe with interfering position reference face S7, can observe interference fringe through frosted glass S12 and imaging len S8 on detector S9.By moving the guide track system S11 that aspheric surface S6 is installed, directional light is also adjusted on focus through aplanat group post-concentration overlapped with the summit of tested aspheric surface S6, on detector S9, can observe interference fringe.Observe the shape of striped, when focus overlaps with the summit of tested aspheric surface S6, interfere the luxuriant and rich with fragrance assistant of formation interference fringe with interfering position reference face S7, can observe the interference fringe of even a slice look shown in Figure 6 through the light beam of summit back reflection.When departed from the summit of focus and tested aspheric surface S6, striped will be crooked or be even a slice look, can characterize the position that is positioned at L0 whether by the shape of judging striped.The position that can calculate L0 by the optical design parameter is 116.86mm.
When definite aspheric surface adjustment position had been positioned at the position of L0, utilization can reach the guide track system S11 of micron dimension bearing accuracy, moves tested aspheric surface S6 as shown in Figure 1 to appointed positions L1, removes aplanasia compensating glass group S5 then.Repeatedly adjustment experience draws and has moderate fringe density when convergent lens S4 and tested aspheric surface S6 have distance L 1 for 951.6mm when measuring, aspheric surface S6 is when the opal position moves to the L1 position so, and the distance that guide track system S11 need move is 834.74mm.Move into canonical reference level crossing S10 this moment, makes the light beam and the canonical reference level crossing S10 that return from aspheric surface S6 form aspheric surface apex sphere radius of curvature measurement system such as Fig. 1, collecting and measuring system interferogram such as Fig. 8.System sets up modeling to aspheric surface apex sphere radius of curvature measurement, it is variable that aspheric surface apex sphere radius-of-curvature is set, in modeling, observing interference fringe makes it consistent with striped and the wave aberration zernike coefficient thereof gathered in the measuring system, interference fringe such as Fig. 9 in the modeling, the aspheric apex sphere radius-of-curvature that obtain this moment is 818.952mm, than nominal radius-of-curvature 816mm big 2.952mm, it is incorrect having detected nominal aspheric surface apex sphere radius-of-curvature 816mm, provides reliable aspheric surface apex sphere radius-of-curvature for follow-up aspheric surface detects.
Claims (3)
1. the measuring system of an aspheric surface apex sphere radius-of-curvature is characterized in that comprising laser instrument (S1), collimating and beam expanding system (S2), spectroscope (S3), convergent lens (S4), aspheric surface (S6), imaging len (S8), detector (S9), reference surface (S10), guide track system (S11) and rotation frosted glass (S12); On same optical axis, be provided with laser instrument (S1), collimating and beam expanding system (S2), spectroscope (S3), convergent lens (S4) and aspheric surface (S6) successively, aspheric surface (S6) below is provided with guide track system (S11), side at spectroscope (S3), the vertical direction of optical axis is provided with reference surface (S10), is provided with rotation frosted glass (S12), imaging len (S8) and detector (S9) in turn at the opposite side of spectroscope (S3); Laser instrument (S1) produces directional light through collimating and beam expanding system (S2), inject by convergent lens (S4) through spectroscope (S3), the aplanat group that aplanasia compensating glass (S5) is formed, by moving the guide track system (S11) that aspheric surface (S6) is installed, directional light is overlapped through the summit of aplanat back focus with tested aspheric surface (S6), use the mobile aspheric surface of guide track system (S11) (S6) to assigned address again, remove aplanasia compensating glass (S5), utilization convergent lens (S4) and aspheric surface (S6) constitute the detection light path, interfere the formation interference fringe with the reference surface (S10) that moves into, after rotation frosted glass (S12) modulation, on detector (S9), obtain interference fringe through imaging len (S8) again.
2. the measuring system of aspheric surface apex sphere radius-of-curvature according to claim 1, it is characterized in that described convergent lens (S4) and aplanasia compensating glass (S5) composition aplanat group, be provided with the aplanasia compensating glass of being made up of two lens (S5) between convergent lens (S4) and the aspheric surface (S6), wherein aplanasia compensating glass (S5) is interference position reference face S7 towards the surface of aspheric surface (S6).
3. one kind is used the measuring method of the aspheric surface apex sphere radius-of-curvature of system according to claim 1, it is characterized in that, behind the directional light process spectroscope (S3) of laser instrument (S1) after collimating and beam expanding system (S2) expands bundle, the positioned at intervals that detects between light path convergent lens (S4) and the aspheric surface (S6) is to finish by the Feisuo Precision Position Location System and the guide track system (S11) of utilization aplanat, be that the focus of aplanat group is when being positioned at the summit of tested aspheric surface (S6), utilize guide track system (S11) to move tested aspheric surface (S6) to the detection position, remove aplanasia compensating glass group (S5) then, realization is to the apex sphere radius of curvature measurement of aspheric surface (S6), measuring system is set up modeling, and the number of observation measuring system and modeling interference fringe, the apex sphere radius-of-curvature that constantly changes aspheric surface (S6) in modeling makes measuring system consistent with modeling striped and wave aberration zernike coefficient thereof, obtains the aspheric surface apex sphere radius-of-curvature of micron dimension.
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