CN102937421B - Real-time detection method of symmetrical optical non-spherical face of rotary shaft - Google Patents
Real-time detection method of symmetrical optical non-spherical face of rotary shaft Download PDFInfo
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- CN102937421B CN102937421B CN 201210421308 CN201210421308A CN102937421B CN 102937421 B CN102937421 B CN 102937421B CN 201210421308 CN201210421308 CN 201210421308 CN 201210421308 A CN201210421308 A CN 201210421308A CN 102937421 B CN102937421 B CN 102937421B
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Abstract
The invention provides a real-time detection method of a symmetrical optical non-spherical face of a rotary shaft, which utilizes optical design software to simulate wave aberration of the symmetrical optical non-spherical face of the rotary shaft relative to the closest spherical face, and utilizes a digital wave-front interferometer to utilize a spherical face lens to directly measure the wave aberration of the symmetrical optical non-spherical face of the rotary shaft relative to a lens reference face; two pixels correspond to each other through some arithmetical operations; and a difference method operation is carried out to obtain residual difference distribution between a non-spherical face actual surface shape and a theoretical surface shape, so as to realize the real-time detection of the symmetrical optical non-spherical face of the rotary shaft. The real-time detection method has the advantages of rapidness, accuracy, wide detection range and the like, and has a wide market prospect. The detection method can detect the maximum non-spherical face degree and the non-spherical face gradient of the non-spherical face depending on the resolution ratio of a CCD (Charge Coupled Device) in the digital wave-front interferometer.
Description
Technical field
The invention belongs to the advanced optical length of schooling makes and the detection technique field.
Background technology
The axisymmetry optical aspherical surface mainly comprises axisymmetry quadric surface and axisymmetry high-order curved surface.The detection of high-precision optical non-spherical element face shape mainly adopts the interference detection technique.In this technology, the face shape that aberrationless point detects and zero compensation interferes detection technique to be widely used in the aspheric surface polishing stage is detected.
So-called aberrationless point detects and refers to according to Fermat principle, light passes to more in addition from a bit, through repeatedly refraction or reflection arbitrarily, its light path is maximum value or minimum value, that is to say that light path is definite value, on optics, such point is become to the aberrationless point, utilize aberrationless point to detect aspheric method and be called the aberrationless detection.
This type of aberrationless point detecting method has certain disadvantages, and is in particular in that aberrationless point detects mainly for detection of the axisymmetry quadric surface, can not detect the axisymmetry high-order curved surface; Aberrationless point detects generally needs standard sphere or sphere to form autocollimation detection light path, and light path is adjusted complicated, consuming time.
Zero compensation interference detection technique refers to utilizes optical design software, as ZEMAX, CODE V etc., design a kind of optical system with the certain wave aberration, be referred to as zero compensation machine, the design of zero compensation machine wherein is based on desirable aspheric, the check light beam via the digital wavefront interferometer outgoing to compensator, light beam, is again got back to interferometer, thereby is realized the detection of non-spherical element face shape to be checked again through tested aspheric surface reflection through compensator after compensator.
This type of zero compensation detection not only can detect the axisymmetry secondary aspherical and also can detect the axisymmetry high order aspheric surface.But this detection method also has certain shortcoming, be in particular in for the non-spherical element of coplanar shape not, need the different compensator of design, simultaneously in order to obtain high-precision measurement result, requirement, when the design compensation device, enables correction asphere wavefront difference well on the one hand, requires on the other hand the thickness of each element of compensator, radius-of-curvature, the tolerances such as airspace, concentricity are distributed rationally.The error of compensator very easily produces ghost image like this, and cause the appearance of diffraction ring, and wherein reflected light and the reference light of some element occur mutually to interfere due to compensator, thereby some pseudo-interference fringes appear on image planes, because phase shifts occurs for these pseudo-interference fringes and detection light simultaneously, therefore very large on the testing result impact.The precision of compensator not only is subject to the impact of design result, the impact that also can be debug, and the detection of compensator self precision is also a difficult problem.Compensation detects light path and adjusts complicated, consuming time.
The present invention has not only overcome the aberrationless point can not detect the axisymmetry high order aspheric surface, also overcome compensator specificity in the check of traditional zero compensation, debug complexity, the shortcoming such as consuming time, do not needed the standard mirror, there is the advantages such as quick, that accurate, sensing range is wide, there are wide market outlook.This detection method can detect the resolution that aspheric maximum aspherical degree and aspherical degree gradient depend on CCD in digital wavefront interferometer.
Technical solution of the present invention is:
A kind of real-time detection method of axisymmetry optical aspherical surface, it is characterized in that: utilize optical design software, as ZEMAX, CODE V etc., simulate axisymmetry optical aspherical surface (quadric surface or high-order curved surface) with respect to the wave aberration that approaches most sphere, be called theoretical wave aberration, by this wave aberration, under polar coordinates, utilize zernike polynomial expression (get front 36 or 37 all can) to carry out matching, make x=rcos α, y=rsin α, be converted into the form under rectangular coordinate by the zernike equation under polar coordinates; Use digital wavefront interferometer (as zygo, wyko, fisba, esdi etc.) to utilize the sphere camera lens directly to measure the wave aberration of axisymmetry optical aspherical surface with respect to the camera lens reference surface, be called actual wave aberration.Discrete three-dimensional matrice for actual wave aberration (x, y, z) means, x, and y means the position of pixel, z means the rise of respective pixel position wave aberration.Three-dimensional matrice according to actual wave aberration, determine the valid pixel on actual corrugated, to theoretical wave aberration, the zernike polynomial expression under rectangular coordinate system carries out the pixel division on this basis, by the theoretical wave aberration of zernike polynomial repressentation be converted into matrix (x ', y ', z ') form, guarantee identical with the distribution of actual wave aberration valid pixel, by the matrix unification of the matrix of actual wave aberration and theoretical wave aberration under the same coordinate system, make the pixel of two wave aberrations corresponding one by one, then the rise of two wave aberrations is done to poor method computing, be Δ z=z '-z, can obtain the residual distribution of the actual face shape of aspheric surface and theoretical face shape, thereby realize the real-time detection to the axisymmetry optical aspherical surface.
Digital wavefront interferometer is measured the unified wave aberration of optical aspherical surface to be measured, and removes position (position), tilt (tilt), and out of focus (focus) equal error.
The present invention has not only overcome the aberrationless point can not detect the axisymmetry high order aspheric surface, also overcome compensator specificity in the check of traditional zero compensation, debug complexity, the shortcoming such as consuming time, do not needed the standard mirror, there is the advantages such as quick, that accurate, sensing range is wide, there are wide market outlook.This detection method can detect the resolution that aspheric maximum aspherical degree and aspherical degree gradient depend on CCD in digital wavefront interferometer.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention will be further described.
Fig. 1 is fundamental diagram of the present invention.
Fig. 2 is that quadric surface of the present invention is with respect to the most approaching relatively wave aberration figure of sphere.
Fig. 3 is that quadric surface of the present invention detects index path.
Fig. 4 is the wave aberration figure of quadric surface of the present invention with respect to the camera lens reference surface.
Fig. 5 is the residual distribution figure of the present invention's actual quadric surface face shape and theoretical face shape.
Embodiment
A kind of real-time detection method of axisymmetry optical aspherical surface, utilize optical design software, as ZEMAX, CODE V etc., simulate axisymmetry optical aspherical surface (quadric surface or high-order curved surface) with respect to the wave aberration that approaches most sphere, be called theoretical wave aberration, by this wave aberration, under polar coordinates, utilize zernike polynomial expression (get front 36 or 37 all can) to carry out matching, make x=rcos α, y=rsin α, be converted into the form under rectangular coordinate by the zernike equation under polar coordinates; Use digital wavefront interferometer (as zygo, wyko, fisba, esdi etc.) to utilize the sphere camera lens directly to measure the wave aberration of axisymmetry optical aspherical surface with respect to the camera lens reference surface, be called actual wave aberration.Discrete three-dimensional matrice for actual wave aberration (x, y, z) means, x, and y means the position of pixel, z means the rise of respective pixel position wave aberration.Three-dimensional matrice according to actual wave aberration, determine the valid pixel on actual corrugated, to theoretical wave aberration, the zernike polynomial expression under rectangular coordinate system carries out the pixel division on this basis, by the theoretical wave aberration of zernike polynomial repressentation be converted into matrix (x ', y ', z ') form, guarantee identical with the distribution of actual wave aberration valid pixel, by the matrix unification of the matrix of actual wave aberration and theoretical wave aberration under the same coordinate system, make the pixel of two wave aberrations corresponding one by one, then the rise of two wave aberrations is done to poor method computing, be Δ z=z '-z, can obtain the residual distribution of the actual face shape of aspheric surface and theoretical face shape.
Digital wavefront interferometer can be measured the unified wave aberration of optical aspherical surface to be measured, and needs to remove position (position), tilt (tilt), and out of focus (focus) equal error.
Utilize optical design software, as ZEMAX, CODE V etc., carry out the autocollimation detection to the axisymmetry aspheric surface and carry out emulation, obtains aspheric surface with respect to the wave aberration that approaches most sphere, as shown in Figure 2.
Utilize digital wavefront interferometer 1 to detect aspheric surface to be checked, light path as shown in Figure 3; Thereby obtain the wave aberration of axisymmetry optical aspherical surface 3 to be measured with respect to camera lens reference surface 2, remove position (position), tilt (tilt), out of focus (focus) equal error, as shown in Figure 4.
By the matrix unification of the matrix of actual wave aberration and theoretical wave aberration under the same coordinate system, make the pixel of two wave aberrations corresponding one by one, then the rise of two wave aberrations is done to poor method computing, i.e. Δ z=z '-z, can obtain the residual distribution of the actual face shape of aspheric surface and theoretical face shape.
Claims (1)
1. the real-time detection method of an axisymmetry optical aspherical surface, it is characterized in that: utilize optical design software to simulate the axisymmetry optical aspherical surface with respect to the wave aberration that approaches most sphere, be called theoretical wave aberration, by this wave aberration, under polar coordinates, utilize the zernike polynomial expression to carry out matching, make x=rcos α, y=rsin α, be converted into the form under rectangular coordinate by the zernike equation under polar coordinates, use digital wavefront interferometer to utilize the sphere camera lens directly to measure the wave aberration of axisymmetry optical aspherical surface with respect to the camera lens reference surface, be called actual wave aberration, discrete three-dimensional matrice for actual wave aberration (x, y, z) means, x, and y means the position of pixel, z means the rise of respective pixel position wave aberration, three-dimensional matrice according to actual wave aberration, determine the valid pixel on actual corrugated, to theoretical wave aberration, the zernike polynomial expression under rectangular coordinate system carries out the pixel division on this basis, the theoretical wave aberration of zernike polynomial repressentation is converted into to matrix (x', y', z') form, guarantee identical with the distribution of actual wave aberration valid pixel, by the matrix unification of the matrix of actual wave aberration and theoretical wave aberration under the same coordinate system, make the pixel of two wave aberrations corresponding one by one, then the rise of two wave aberrations is done to poor method computing, be Δ z=z'-z, obtain the residual distribution of the actual face shape of aspheric surface and theoretical face shape, thereby realize the real-time detection to the axisymmetry optical aspherical surface.
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| CN201310412055.9A CN103471521B (en) | 2012-10-29 | 2012-10-29 | The real-time detection method of optical aspherical surface fast and accurately |
| CN 201210421308 CN102937421B (en) | 2012-10-29 | 2012-10-29 | Real-time detection method of symmetrical optical non-spherical face of rotary shaft |
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| CN 201210421308 CN102937421B (en) | 2012-10-29 | 2012-10-29 | Real-time detection method of symmetrical optical non-spherical face of rotary shaft |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103196391A (en) * | 2013-04-16 | 2013-07-10 | 北京理工大学 | Quick surface shape detection method of annular concave aspheric surface near to paraboloid |
| CN103234480A (en) * | 2013-04-16 | 2013-08-07 | 北京理工大学 | Rapid surface shape detection method for circular convex aspheric surfaces |
| CN104070418B (en) * | 2014-06-30 | 2016-08-24 | 中国科学院长春光学精密机械与物理研究所 | Axial symmetry surface shape of optical aspheric surface On-line Measuring Method |
| CN105547183B (en) * | 2015-12-21 | 2017-11-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of method of adjustment for resetting tested aspherical space position |
| CN108225187B (en) * | 2018-01-29 | 2020-01-14 | 清华大学深圳研究生院 | Wavefront sensing-based aspheric lens error detection method |
| CN109029288B (en) * | 2018-07-25 | 2020-10-16 | 中国科学院光电技术研究所 | Reflective large-gradient aspheric surface and free-form surface detection device and method based on DMD wave-front sensing technology |
| CN110220477B (en) * | 2019-06-19 | 2020-09-29 | 昆明北方红外技术股份有限公司 | Detection device and method for measuring optical aspheric reflector surface shape by infrared interferometer |
| CN110703434B (en) * | 2019-10-15 | 2024-04-12 | 南通大学 | Method for determining annular aperture quadric surface asphericity gradient |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1885097A (en) * | 2005-06-22 | 2006-12-27 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting aspherical detection optical system by computer |
| JP2007064965A (en) * | 2005-08-03 | 2007-03-15 | Pentax Corp | Method of measuring wave aberration of optical element, and method of correcting wave aberration |
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| JP2003322587A (en) * | 2002-04-30 | 2003-11-14 | Canon Inc | Surface shape measuring instrument |
| CN1746648A (en) * | 2005-10-31 | 2006-03-15 | 中国科学院光电技术研究所 | Heavy-calibre deep type aspherical mirror detecting system |
| CN101285734A (en) * | 2008-05-28 | 2008-10-15 | 中国科学院光电技术研究所 | Fan-shaped off-axis aspheric surface splicing measurement system |
| CN101504276A (en) * | 2009-03-09 | 2009-08-12 | 中国科学院光电技术研究所 | Large-caliber optical mirror face Ronchi grating quantitative detector |
| CN102155926A (en) * | 2011-03-09 | 2011-08-17 | 浙江大学 | System and method for measuring curvature radius of aspheric vertex sphere |
| CN102353342A (en) * | 2011-06-13 | 2012-02-15 | 苏州大学 | Free-curved-surface-type detecting system |
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| CN103471521B (en) | 2015-10-21 |
| CN103471521A (en) | 2013-12-25 |
| CN102937421A (en) | 2013-02-20 |
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