CN102519611A - Light path sharing axial shear digital wave surface interferometer - Google Patents
Light path sharing axial shear digital wave surface interferometer Download PDFInfo
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- CN102519611A CN102519611A CN2011104401411A CN201110440141A CN102519611A CN 102519611 A CN102519611 A CN 102519611A CN 2011104401411 A CN2011104401411 A CN 2011104401411A CN 201110440141 A CN201110440141 A CN 201110440141A CN 102519611 A CN102519611 A CN 102519611A
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Abstract
A light path sharing axial shear digital wave surface interferometer relates to an optical interferometer wave surface detection device, which solves the problem that the interferometer is complex in electronic control and mechanical systems and high in development cost, have difficulty in guaranteeing using conditions of long light paths or testing environments and have great difficulty in achieving high testing accuracy. The interferometer uses a novel light sharing path shear interference light path structure and particularly comprises a semiconductor laser, a bind expanding lens, a spatial filter, a collimating lens, a shear ratio control lens, an imaging system, a first polaroid, a second polaroid and a gluing prism. The light sharing path axial shear digital wave surface interferometer adopts a coaxial light path sharing mode, enables the light path sharing interference system to be provided with advantages of being capable of producing mutual common-mode rejection towards changes of vibration, temperature and air current, and can obtain stable interference fringes under low vibration isolation conditions and constant temperature conditions. Therefore, the digital wave surface light path sharing axial shear interference light path with noiseproof features is applicable to real-time detection and monitoring of optical system wave aberration under long light path conditions.
Description
Technical field
The present invention relates to a kind of optical interdferometer corrugated pick-up unit, be specifically related to a kind of light path radial shear digital wavefront interferometer altogether.
Background technology
Interferometer is a kind of according to the interference of light principle, is the optical testing instrument of measurement unit with the light wavelength.Many precision measurement work all are to rely on interference of light method to realize, for the solution of some test assignment, and interferometric method or even unique feasible Perfected process.
Classical optical interference instrument is main with the ray machine type, the control information that can only observe qualitatively, comprised in the artificial judgment interferogram.Modern interferometer is the precision optics detecting instrument that on the basis of classical interferometer, grows up.Its essential characteristic is the last word of optics, electronics, precision optical machinery and control, computer science that adopted LASER Light Source and integrated application, based on the above characteristic digital wavefront interferometer that is otherwise known as.Compare with classical interferometer, have application prospect widely, major advantage is that resolution is high, antijamming capability is strong, measuring accuracy is high, easy to operate etc.
In numerous evaluations and detection method of high-precision optical system; The optical interference detection technique has precision, objective, the evaluation characteristic that quantizes; Because as measurement unit, therefore the detection for the optical system wavefront distortion has high precision to test result with wavelength.The wave aberration sensitivity of interferometry simultaneously is high, can reflect the slight error debug and the microdeformation of minute surface clearly, and its test result can also be set up mathematical model with the Zernike polynomial expression, further the imbalance of analytic system.And modern laser interferometer is as one of the most accurate testing tool; Integrate contemporary state-of-the-art technology; Extensively adopt the newest fruits in the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can realize check quickly and accurately optical element and system.
Process at optics of today, debug, in the test experience chamber; From the Design and Machining of ordinary optical part, check large-scale aspheric optical system processing; The large space optical system, survey of deep space is telescopical debugs, proofreaies and correct and test; Interferometer has become a kind of easy operating, reliable, high precision, intelligentized test verification device, and it is in the production in enormous quantities of optical element and system and immeasurable effect is arranged in X-ray inspection X.And in the metrology and measurement field, interference technique and interferometer are more in occupation of irreplaceable status.
According to principle of work, the optical wave-front interferometer can be divided into static interferometer and phase-shift type interferometer.Phase shifting interferometer adopt phase shifting device that optical reference plane is carried out 4 step phase shifts, and COMPREHENSIVE CALCULATING finally records the face type error of optical wave-front at the interferogram of different phase shifts position according to " phase shift algorithm principle ".Change light channel structure owing to need carry out the phase shifting movement, so the phase-shift type interferometer is harsh to the test environment requirement, often can't be applied to the optical detection under the long light path condition.Owing to automatically controlled, the mechanical system more complicated of phase shifting interferometer, its development cost is higher in addition.Static interferometer need not phase shift mechanism, only the striped in the single width interferogram is distributed and calculates the face type error that just can obtain corrugated to be measured, is applicable to the service condition that long light path or test environment are difficult to guarantee.But by standard lens, the systematic error that reasons such as light path arrangement are introduced makes static interferometer be difficult to the measuring accuracy that reaches higher.
Summary of the invention
In order to solve the problem that exists in the prior art; The invention provides a kind of light path radial shear digital wavefront interferometer altogether, this interferometer has higher measuring accuracy, can be applicable to the optical digital corrugated interference detecting instrument that the optical interference of overlength light path detected, had concurrently simultaneously compact profile and uses dirigibility.
The technical scheme that technical solution problem of the present invention is adopted is following:
Be total to light path radial shear digital wavefront interferometer, this interferometer comprises: semiconductor laser, beam expanding lens, spatial filter, collimating mirror, shearing are than control mirror, imaging system; It is characterized in that this interferometer also comprises: first polaroid, second polaroid and cemented prism; Said semiconductor laser sends laser as light source; Expand Shu Huiju through beam expanding lens; Converge light source through behind the spatial filter; The energy distribution of outgoing hot spot is even, is to go into to inject first polaroid behind the directional light via the collimating mirror collimation, forms the more weak polarized light S light of output intensity and light intensity polarized light P light by force; Said S light goes into to inject cemented prism; After the left side reflection through beam-splitting surface; Transmit cemented prism and form superfine directional light light as a reference, after said directional light went into to inject system under test (SUT), the focus diverging through system under test (SUT) after the system under test (SUT) reflection became spherical wave; Said spherical wave goes into to inject cemented prism through shearing than forming directional light behind the control mirror, via reflecting and transmit cemented prism in the right side of cemented prism mirror body and beam-splitting surface; Said P light goes into to inject cemented prism, through after the left side transmission of beam-splitting surface, reflects cemented prism; Through shearing than behind the control mirror with system under test (SUT) after diverging become spherical wave as test light; Said spherical wave reflects to form directional light after going into to inject system under test (SUT), and said directional light goes into to inject cemented prism; After the left side transmission via beam-splitting surface, transmit cemented prism; The beam intensity ratio that said S light and P light are regulated both after through second polaroid is through being received by external system after the imaging system.
The invention has the beneficial effects as follows: the present invention adopts coaxial light path form altogether; The variation that common light path interference system is had vibration, air temperature and current can produce the advantage of common mode inhibition each other, can when vibration isolation condition and constant temperature hang down, also can obtain stable interference fringe.Therefore the digital corrugated that has noiseproof feature is total to real-time detection and the monitoring that light path radial shear interference light path comparatively is suitable for optical system wavefront aberration under the long light path condition; And with conventional shearing interferometer mutually specific volume and weight obviously reduce, have high portability.
Description of drawings
Fig. 1 the present invention is the structure principle chart of light path radial shear digital wavefront interferometer altogether.
Fig. 2 the present invention is the front view of light path radial shear digital wavefront interferometer altogether.
Fig. 3 the present invention is the AA sectional view of light path radial shear digital wavefront interferometer front view altogether.
Among the figure: 1, power source of semiconductor laser, 2, semiconductor laser, 3, beam expanding lens, 4, spatial filter; 5, collimating mirror, 6, first polaroid, 7, polaroid rotation thumb wheel, 8, shear than regulating runner; 9, second polaroid, 10, cemented prism, 11, shear, 12, CCD than the control mirror.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is explained further details.
As shown in Figure 1, be total to light path radial shear digital wavefront interferometer, this interferometer comprises: semiconductor laser 2, beam expanding lens 3, spatial filter 4, collimating mirror 5, shearing are than control mirror 11, imaging system; This interferometer also comprises: first polaroid 6, second polaroid 9 and cemented prism 10; Said semiconductor laser 2 sends laser as light source; Expand Shu Huiju through beam expanding lens 3; Converge light through behind the spatial filter 4; The energy distribution of outgoing hot spot is even, is to go into to inject first polaroid 6 behind the directional light via collimating mirror 5 collimations, forms the more weak polarized light S light of output intensity and light intensity polarized light P light by force; Said S light goes into to inject cemented prism 10; After the left side reflection through beam-splitting surface; Transmit cemented prism 10 and form superfine directional light light as a reference, after said directional light went into to inject system under test (SUT), the focus diverging through system under test (SUT) after the system under test (SUT) reflection became spherical wave; Said spherical wave forms directional lights than control mirror 11 backs and goes into to inject cemented prism 10 through shearing, via reflecting and transmit cemented prism 10 in the right side of cemented prism 10 mirror bodies and beam-splitting surface; Said P light goes into to inject cemented prism 10, through after the left side transmission of beam-splitting surface, reflects cemented prism 10; Become spherical wave as test light through shearing than diverging behind control mirror 11 backs and the system under test (SUT); Said spherical wave reflects to form directional light after going into to inject system under test (SUT), and said directional light goes into to inject cemented prism 10; After the left side transmission via beam-splitting surface, transmit cemented prism 10; The beam intensity ratio that said S light and P light are regulated both through second polaroid, 9 backs is through being received by external system after the imaging system.
External system comprises: visual receiving system, CCD 12 receivers and computer processing system; Said visual receiving system can directly observe interference fringe through naked eyes; Handle and calculate by computer processing system after said CCD 12 receivers receive interference image.
Fig. 2 and Fig. 3 are for being total to light path radial shear digital wavefront interferometer specific embodiment.The optical-mechanical system of this shearing interferometer adopts the double-decker design as shown in Figures 2 and 3; Anterior layer is arranged the main optical path structure of interferometer; Comprise semiconductor laser 2, beam expanding lens 3, spatial filter 4, collimating mirror 5, first polaroid (P1) 6, cemented prism 10 and shear ratio control mirror 11; Semiconductor laser 2, beam expanding lens 3, spatial filter 4, collimating mirror 5 and first polaroid 6 from left to right are arranged in order; The left side of layer box body before being fixed on, it is the semiconductor laser of 630nm that semiconductor laser 2 adopts wavelength, has higher coherence and lower calorific value; Need not heat radiation, semiconductor laser 2 is integrated in the interferometer housing with power source of semiconductor laser 1 jointly.Get into cemented prism 10 behind the beam projecting; Cemented prism 10 is connected with shearing than control mirror 11; Cemented prism 10 is made up of an isosceles right-angle triangle prism and a parallelogram prism; Wherein an edge gluing of the hypotenuse of isosceles right triangle and parallelogram prism forms cemented surface, and both form a right-angled trapezium.Before the main optical path structure, having designed relative aperture is the shearing ratio control mirror relative aperture coupling mirror group of F4-F20; Can select to shear relative aperture through regulating to shear according to demand than control mirror 11 than adjusting runner 8; When carrying out the wave aberration detection of different optical system it is switched; Switch rotating disk and realize switching the location, realize different shearing ratios, expanded the usable range of instrument greatly through elastic steel ball.
Like Fig. 3 and shown in Figure 4, be adjustable polarizer assembly at the rear side of main optical path structure, comprise second polaroid (P2) 9 and polaroid rotation thumb wheel 7 and CCD 12.Second polaroid 9 is fixed in the picture frame in the polaroid rotation thumb wheel 7; Thumb wheel links to each other with a rotating shaft; Just drive second polaroid 9 when the rotatory polarization sheet rotates thumb wheel 7 like this around its primary optical axis rotation, make primary optical axis produce different angles with the light intensity direction of vibration of S light and P light, second polaroid 9 can be regulated the relative light intensity between light and the S light; Promptly regulate extinction ratio, its purpose is to regulate the beam intensity ratio between reference light and the test light and obtains the good interference fringe of contrast.
Detector is the colored low-light (level) CCD 12 of 2048 * 1536 pixels, and CCD 12 links to each other with the photomicrograph object lens of its front end, to the striped imaging of interference region, handles calculating by computer processing system.
Through to the optimization of whole light path of interferometer and mechanical structure system with arrange; The monnolithic case of system is of a size of 142mm * 46mm * 78mm; Under the prerequisite that guarantees measuring accuracy; Its physical dimension and construction weight are far smaller than traditional Fizeau, Twyman-Green type interferometer, compare based on the shearing interferometer of Mach-Zehnder light channel structure with routine, and its antijamming capability, physical dimension, weight also tool have great advantage.
Foregoing invention has been developed principle prototype, and through comparison test and relevant data processing and clearing, the measuring accuracy of the common light path radial-shear interferometer among the present invention is superior to λ/20 (RMS, Root mean square, root-mean-square value, λ=630nm).
Claims (4)
1. be total to light path radial shear digital wavefront interferometer, this interferometer comprises: semiconductor laser (2), beam expanding lens (3), spatial filter (4), collimating mirror (5), shearing are than control mirror (11), imaging system; It is characterized in that this interferometer also comprises: first polaroid (6), second polaroid (9) and cemented prism (10); Said semiconductor laser (2) sends laser as light source; Expand Shu Huiju through beam expanding lens (3); Converge light through behind the spatial filter (4); The energy distribution of outgoing hot spot is even, is to go into to inject first polaroid (6) behind the directional light via collimating mirror (5) collimation, forms the more weak polarized light S light of output intensity and light intensity polarized light P light by force; Said S light goes into to inject cemented prism (10); After the left side reflection through beam-splitting surface; Transmit cemented prism (10) and form superfine directional light light as a reference, after said directional light went into to inject system under test (SUT), the focus diverging through system under test (SUT) after the system under test (SUT) reflection became spherical wave; Said spherical wave forms directional light than control mirror (11) back and goes into to inject cemented prism (10) through shearing, via reflecting and transmit cemented prism (10) in the right side of cemented prism (10) mirror body and beam-splitting surface; Said P light goes into to inject cemented prism (10), through after the left side transmission of beam-splitting surface, reflects cemented prism (10); Become spherical wave as test light through shearing than diverging behind control mirror (11) back and the system under test (SUT); Said spherical wave reflects to form directional light after going into to inject system under test (SUT), and said directional light goes into to inject cemented prism (10); After the left side transmission via beam-splitting surface, transmit cemented prism (10); The beam intensity ratio that said S light and P light are regulated both through second polaroid (9) back is through being received by external system after the imaging system.
2. light path radial shear digital wavefront interferometer altogether as claimed in claim 1 is characterized in that said external system comprises: visual receiving system, CCD (12) receiver and computer processing system; Said visual receiving system can directly observe interference fringe through bore hole; Said CCD (12) receiver is handled and is calculated by computer processing system after receiving the image of interference fringe.
3. light path radial shear digital wavefront interferometer altogether as claimed in claim 1 is characterized in that, said cemented prism (10) is formed polarization spectroscope by an isosceles right-angle triangle prism and parallelogram prism gummed.
4. light path radial shear digital wavefront interferometer altogether as claimed in claim 3 is characterized in that an edge gluing of the hypotenuse of said isosceles right triangle and parallelogram prism forms cemented surface, and both form a right-angled trapezium.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698022A (en) * | 2013-12-09 | 2014-04-02 | 西南技术物理研究所 | Wavefront measurement method of lateral shear interferometer |
| CN104346985A (en) * | 2014-11-05 | 2015-02-11 | 南昌航空大学 | Multifunctional digital light splitting interferometer |
| CN109060316A (en) * | 2018-10-09 | 2018-12-21 | 上海乾曜光学科技有限公司 | The discrete zooming system of interferometer |
| CN109458948A (en) * | 2018-11-23 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of contiguous concatenation microscopy survey method and system |
| CN111928879A (en) * | 2020-08-26 | 2020-11-13 | 南京英特飞光电技术有限公司 | Polarized Mach-Zehnder interference system with output |
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| US5410532A (en) * | 1989-08-29 | 1995-04-25 | Asahi Kogaku Kogyo Kabushiki Kaisha | Method for a adjusting a beam splitter in an optical recording and reproducing apparatus |
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| US4653921A (en) * | 1985-09-09 | 1987-03-31 | Lockheed Missiles & Space Company, Inc. | Real-time radial shear interferometer |
| US5410532A (en) * | 1989-08-29 | 1995-04-25 | Asahi Kogaku Kogyo Kabushiki Kaisha | Method for a adjusting a beam splitter in an optical recording and reproducing apparatus |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698022A (en) * | 2013-12-09 | 2014-04-02 | 西南技术物理研究所 | Wavefront measurement method of lateral shear interferometer |
| CN104346985A (en) * | 2014-11-05 | 2015-02-11 | 南昌航空大学 | Multifunctional digital light splitting interferometer |
| CN109060316A (en) * | 2018-10-09 | 2018-12-21 | 上海乾曜光学科技有限公司 | The discrete zooming system of interferometer |
| CN109458948A (en) * | 2018-11-23 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of contiguous concatenation microscopy survey method and system |
| CN109458948B (en) * | 2018-11-23 | 2021-05-18 | 中国科学院长春光学精密机械与物理研究所 | Method and system for detecting adjacent splicing mirrors |
| CN111928879A (en) * | 2020-08-26 | 2020-11-13 | 南京英特飞光电技术有限公司 | Polarized Mach-Zehnder interference system with output |
| CN111928879B (en) * | 2020-08-26 | 2021-12-07 | 南京英特飞光电技术有限公司 | Polarized Mach-Zehnder interference system with output |
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Application publication date: 20120627 |