CN1316225C - Inner three-directional moire interferometer - Google Patents
Inner three-directional moire interferometer Download PDFInfo
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- CN1316225C CN1316225C CNB2005100279415A CN200510027941A CN1316225C CN 1316225 C CN1316225 C CN 1316225C CN B2005100279415 A CNB2005100279415 A CN B2005100279415A CN 200510027941 A CN200510027941 A CN 200510027941A CN 1316225 C CN1316225 C CN 1316225C
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Abstract
The present invention relates to an inner three-directional moire interferometer in the technical field of test, which comprises a laser, an extender lens, a collimating mirror, twelve total reflecting mirrors, a reflector, an adjustable working table, a phase-shift drive device, a camera, a computer and a bracket, wherein the laser, the extender lens, the collimating mirror, the total reflecting mirrors, the reflector and the phase-shift drive device are fixed on the bracket. The adjustable working table, the camera and the computer are independently arranged. Laser emitted by the laser reaches the collimating mirror after the beam is extended by the extender lens; the diverging light after the beam is extended is turned into parallel plane wave-front light by the collimating mirror, and irradiates on six total reflecting mirrors; six beams of light after passing through the six light-division total reflecting mirrors irradiate on the other six total reflecting mirrors to be totally reflected for the second time. When the present invention is combined with the bore-hole method to test residual stress, the error caused by position change brought by bore-hole can be eliminated. Furthermore, because three positive strain fields are obtained, the shearing strain does not need calculating. When the positive strain is calculated, the calculation is also along the normal direction of moire stripes, and the calculation error is decreased.
Description
Technical field
What the present invention relates to is a kind of instrument of technical field of measurement and test, specifically is a kind of inner three-directional moire interferometer.
Background technology
The moire interferometer of test in-plane displacement field, plane all is four input paths both at home and abroad at present, forms the displacement field of two orthogonal directions, u field on the promptly usually said horizontal direction and the v field on the vertical direction.
Find through literature search prior art, China Patent No. is: 200410000005.0, name is called: " multifunction three-dimensional displacement laser interferometry system ", this patent is in the test of in-plane displacement, be to adopt A, B, C, D four bundle light to be incident on the same area of tested structure symmetrically, be pasted with orthogonal grating on this zone with fixing angle.Every bundle is radiated on the grating will produce diffraction, adjust A, B, C, D four bundle coherent lights incide the test specimen surface more symmetrically with a certain equal angular, make theirs+1 ,-1 diffraction light propagates along the same direction on test specimen surface respectively, promptly propagates along the test specimen normal direction.A, B two restraint coherent lights+1 ,-1 diffraction light can produce interference in the space, just forms the staggered interference fringe of light and shade on the zone that they cross, and this striped is equivalent to a space grating.Its grating stack on test specimen surface and test specimen forms Moir é striped, the i.e. displacement field of horizontal direction: the u field, in like manner C, D two bundle coherent lights then can form the displacement field of vertical direction: the v field.This patent belongs to traditional moire interferometer, can only test this two in-plane displacement fields.
Summary of the invention
The present invention is directed to prior art can only test under the situation of two displacement fields, a kind of three independently displacement field inner three-directional moire interferometers of can testing in the face are provided, make it have the interior x direction of principal axis of test surfaces, y direction of principal axis and their three direction displacement fields of 45 ° of angles simultaneously: u field, v field and s field, the perhaps displacement field of wherein any one, two direction.
The present invention is achieved by the following technical solutions, the present invention includes: laser instrument, beam expanding lens, collimating mirror, 12 total reflective mirrors, catoptron, scalable worktable, phase shift drive unit, video camera, computing machine and supports.Its annexation is: laser instrument, beam expanding lens, collimating mirror, total reflective mirror, catoptron, phase shift drive unit are fixed on the same support, and scalable worktable, video camera and computing machine are separate units as image acquisition and treating apparatus then.Sending wavelength by the He-Ne laser instrument is after the laser of 6328 expands bundle through 40 * beam expanding lens, to arrive collimating mirror, and its diameter is Φ=206mm, focal distance f=600mm; Collimating mirror becomes expand diverging light behind the bundle into parallel equal diameter (the plane wave front light of Φ=206mm); It is radiated at six areas is 50 * 35mm
2Total reflective mirror on, the center of these six total reflective mirrors is installed on the circumference that diameter is 140mm, and is fixed on the collimating mirror mirror holder, they are divided into six bundle directions different collimation directional lights to original a branch of collimation directional light.The different collimation directional light of this six bundle direction is through reflex of other six total reflective mirrors, with inciding on the scalable worktable of symmetry in twos.Total reflective mirror is fixed on the support that supports collimating mirror, and the minute surface direction can be finely tuned.To guarantee six required beam optical paths suitable incident direction is arranged by the position of adjusting total reflective mirror; The position of scalable worktable can be regulated as required, the Installation and Debugging test specimen; Video camera obtains the vision signal of interference fringe; Computing machine, signals collecting and data processing.
Described phase shift drive unit has three, and size, specification is identical.Each is to be 20mm by an external diameter, and wall thickness is that piezoelectric ceramic tube and the power supply of 2mm formed.An end of piezoelectric ceramic tube links to each other with total reflective mirror, and the other end and support are fixed.The positive and negative electrode of power supply is connected on respectively on the inside and outside tube wall of piezoelectric ceramic tube.When mains voltage variations, piezoelectric ceramic tube is along its axial elongation or shortening, and mobile displacement is directly proportional with the variable quantity of voltage.Supply voltage is variable between 0--10V, and displacement resolution is 0.01 wavelength, and precision is ± 0.5%.
The present invention measures in the time of can realizing the high-precision real of displacement, and displacement measurement sensitivity can reach wavelength magnitude.System is furnished with phase changer, and the displacement measurement precision after handling through phase-shifting technique can reach nanometer scale.
The present invention can be in once loading three directions displacement field independently in the test plane, and present existing moire interferometer or similar displacement tester can only be tested two displacement fields at most.Calculating by each displacement field is changed can obtain a corresponding normal strain field, and such three displacement fields just can obtain three normal strain fields.For plane problem, the normal strain field of three directions has been arranged, just can determine its strain regime fully.Two direction moire interferometers in the face are to utilize two displacement fields to obtain two normal strain fields at present, to these two displacement field differential, try to achieve a shearing strain field again, to determine its strain regime.Though above-mentioned both can determine strain regime in theory, but in the actual test, owing to factors such as moving of tested thing, as when using the moire interference technology in conjunction with boring method test unrelieved stress, the error that the additional deformation that brings except boring produces, before the boring, the accurate reset issues of back test specimen is a main error sources, in addition, in boring procedure, test specimen has moving in various degree, before this mobile meeting has a strong impact on boring, the described displacement of latter two displacement field Moir é striped is not same point, and promptly causing has error when comparing the variation of two Moir é stripeds.
When testing unrelieved stress in conjunction with boring method with the present invention, can regulate Moir é striped after the boring according to the Moir é striped before the boring, with accurate location test specimen at the forward and backward same position that is in of boring, thereby eliminate the error that position change that boring brings causes.Simultaneously, be three displacement fields because six light path moire interferometers test, corresponding what obtain is three normal strain fields, and does not need to calculate shearing strain, when calculating normal strain, also is the normal direction along Moir é striped, has reduced the error of calculation.
Description of drawings
Fig. 1 structural representation of the present invention
Fig. 2 v of the present invention field and s field synoptic diagram
Fig. 3 phase shift driving device structure of the present invention synoptic diagram
Embodiment
As shown in Figure 1, the present invention includes: laser instrument 1, beam expanding lens 2, collimating mirror 3, total reflective mirror 4,5,4 ', 5 ', 4 ", 5 " and 6,7,6 ', 7 ', 6 ", 7 ", catoptron 8, scalable worktable 9, phase shift drive unit 10, video camera 11 and computing machine 12, support 13.Its annexation is: laser instrument 1, beam expanding lens 2, collimating mirror 3, total reflective mirror 4, total reflective mirror 5, total reflective mirror 6, total reflective mirror 7, catoptron 8, phase shift drive unit 10 are fixed on the same support 13, and 12 in scalable worktable 9, video camera 11 and computing machine independently are provided with as image acquisition and treating apparatus.Sending wavelength by laser instrument 1 is after the laser of 6328 expands bundle through beam expanding lens 2, arrive collimating mirror 3, diverging light after collimating mirror 3 is restrainted expansion becomes the plane wave front light of parallel equal diameter Φ=206mm, it be radiated at six total reflective mirrors 4,5 and 4 ', 5 ', on 4 ", 5 ", these six total reflective mirrors 4,5 and 4 ', 5 ', the centers of 4 ", 5 " is arranged on the circumference that diameter is 140mm, and be fixed on collimating mirror 3 mirror holders, they are divided into the different collimation directional light of six bundle directions to original a branch of collimation directional light.Other six removable total reflective mirrors 6,7 and 6 ', 7 ', the centers of 6 ", 7 " is also on same circumference, the diameter of circumference is the resolution scalable according to Moir é striped, they respectively with total reflective mirror 4,5 and 4 ', 5 ', be installed in face-to-face on the support 13 4 ", 5 ", be total reflective mirror 4 and 6, total reflective mirror 5 and 7, total reflective mirror 4 ' with 6 ', total reflective mirror 5 ' with 7 ', total reflective mirror 4 " with 6 ", total reflective mirror 5 " with 7 " face-to-face, and keep equidistant.Video camera 11 obtains the vision signal of interference fringe; Computing machine 12, signals collecting and data processing.
Described collimating mirror 3, its diameter are Φ=206mm, focal distance f=600mm.
Described total reflective mirror 4,5,4 ', 5 ', 4 ", 5 ", 6,7,6 ', 7 ', 6 ", 7 " and the area of catoptron 8 be 50 * 35mm
2
Described beam expanding lens 2 is 40 times and expands bundle.
As shown in Figure 3, described phase shift drive unit 10, have three, each all is to be 20mm by an external diameter, wall thickness is that piezoelectric ceramic tube 14 and the power supply 15 of 2mm formed, end of piezoelectric ceramic tube 14 and total reflective mirror 4,4 ', 4 " link to each other, the other end and support 13 are fixing, and the positive and negative electrode of power supply 15 is connected on respectively on the inside and outside tube wall of piezoelectric ceramic tube 14.Power supply 15 voltages are variable between 0--10V, and displacement resolution is 0.01 wavelength, and precision is ± 0.5%
As shown in Figure 2, total reflective mirror 4 and 5 two-beams can produce moire interference in the horizontal direction, form horizontal direction displacement field (u field), total reflective mirror 4 ' and 5 ', 4 " and 5 " then can produce moire interferences in vertical direction, 45 ° of directions respectively, form vertical direction, 45 ° of direction displacement fields (v field and s field).
The test specimen S that the surface is had three direction gratings is placed in the center of scalable worktable, adjusts the position of grating, makes its three directions be in level respectively, vertically reach their 45 ° of angle directions.The laser that sends from laser instrument, through expansion become behind bundle, the collimation diameter be the directional light of 206mm incide respectively total reflective mirror 4,5 and 4 ', 5 ', 4 ", 5 "; Through the bundle of six behind these six beam split total reflective mirrors light incide again removable total reflective mirror 6,7 and 6 ', 7 ', carry out the secondary total reflection 6 ", 7 ", adjust total reflective mirror 6,7 and 6 ', 7 ', position and the angle of 6 ", 7 ", make their center incide the same point on the test specimen on the scalable worktable 9 with identical angle (with the angle of test specimen normal to a surface direction), guarantee simultaneously theirs+1 or-1 order diffraction light is consistent with test specimen normal to a surface direction.Like this total reflective mirror 6,7+1 or-1 order diffraction light produces interference fringe in space stack, this interference fringe is equivalent to vignette grid, it is consistent with horizontal direction grating orientation on the test specimen, and stack generation Moir é striped, i.e. null field; In like manner, total reflective mirror 6 ', 7 ', can produce the null field of vertical direction, 45 ° of directions 6 ", 7 " respectively.When certain deformation takes place in test specimen, can drive its surperficial specimen grating one changes, and be in the total reflective mirror 6,7 and 6 in space ', 7 ', not change for 6 ", 7 ", be that the vignette grid do not change, when it is superimposed with the specimen grating that has changed, 45 ° of angle directions that can be respectively in level, vertically reach them all produce Moir é striped, and promptly produce three displacement fields: u field, v field and s field, these three displacement fields can be noted change in displacement, the distortion situation of test specimen.
Claims (9)
1, a kind of inner three-directional moire interferometer, comprise: laser instrument (1), beam expanding lens (2), collimating mirror (3), 12 total reflective mirrors (4,5,4 ', 5 ', 4 "; 5 " 6,7,6 ', 7 ', 6 "; 7 "), catoptron (8), scalable worktable (9), phase shift drive unit (10), video camera (11) and computing machine (12), support (13), it is characterized in that, laser instrument (1), beam expanding lens (2), collimating mirror (3), 12 total reflective mirrors (4,5,4 ', 5 ', 4 "; 5 " 6,7,6 ', 7 ', 6 "; 7 "), catoptron (8), phase shift drive unit (10) is fixed on the same support (13), scalable worktable (9), video camera (11) and computing machine (12) then independently are provided with as image acquisition and treating apparatus, after sending laser and expand bundle by laser instrument (1) through beam expanding lens (2), arrive collimating mirror (3), collimating mirror (3) becomes parallel plane wave front light to the diverging light that expands after restrainting, be radiated at first total reflective mirror (4), second total reflective mirror (5), the 3rd total reflective mirror (4 '), the 4th total reflective mirror (5 '), the 5th total reflective mirror (4 "); the 6th total reflective mirror (5 "), through these six total reflective mirrors (4,5,4 ', 5 ', 4 "; 5 ") bundle of six after beam split light incide movably the 7th total reflective mirror (6) again, the 8th total reflective mirror (7), the 9th total reflective mirror (6 '), the tenth total reflective mirror (7 '), the 11 total reflective mirror (6 "); (7 ") are carried out the secondary total reflection to the 12 total reflective mirror, first total reflective mirror (4), second total reflective mirror (5), the 3rd total reflective mirror (4 '), the 4th total reflective mirror (5 '), the 5th total reflective mirror (4 "); the 6th total reflective mirror (5 ") and the 7th total reflective mirror (6), the 8th total reflective mirror (7), the 9th total reflective mirror (6 '), the tenth total reflective mirror (7 '), the 11 total reflective mirror (6 "); (center of 7 ") is respectively on same circumference for the 12 total reflective mirror, first total reflective mirror (4) and the 7th total reflective mirror (6), second total reflective mirror (5) and the 8th total reflective mirror (7), the 3rd total reflective mirror (4 ') and the 9th total reflective mirror (6 '), the 4th total reflective mirror (5 ') and the tenth total reflective mirror (7 '), the 5th total reflective mirror (4 ") and the 11 total reflective mirror (6 "), the 6th total reflective mirror (5 ") and the 12 total reflective mirror (7 ") be arranged on face-to-face on the support (13), and keep equidistant, video camera (11) obtains the vision signal of interference fringe, transmits computing machine (12) and handles.
2, inner three-directional moire interferometer according to claim 1, it is characterized in that, first total reflective mirror (4), second total reflective mirror (5), the 3rd total reflective mirror (4 '), the 4th total reflective mirror (5 '), the 5th total reflective mirror (4 "); (5 ") are divided into the different collimation directional light of six bundle directions to original a branch of collimation directional light to the 6th total reflective mirror, incide movably the 7th total reflective mirror (6), the 8th total reflective mirror (7), the 9th total reflective mirror (6 '), the tenth total reflective mirror (7 '), the 11 total reflective mirror (6 "); (7 ") are carried out the secondary total reflection to the 12 total reflective mirror, adjust the 7th total reflective mirror (6), the 8th total reflective mirror (7), the 9th total reflective mirror (6 '), the tenth total reflective mirror (7 '), the 11 total reflective mirror (6 "); the 12 total reflective mirror (position of 7 ") and angle, same point on the test specimen on the scalable worktable (9) is incided with identical angle in the center that makes them, guarantee simultaneously theirs+1 or-1 order diffraction light is consistent with test specimen normal to a surface direction, the 5th total reflective mirror (4 "); the 6th total reflective mirror (5 "), the 11 total reflective mirror (6 "); (optical interference circuit of 7 ") group direction at 45, it forms the 3rd displacement field to the 12 total reflective mirror: the s field.
3, according to claim 1 or 2 described inner three-directional moire interferometers, it is characterized in that, described first total reflective mirror (4), second total reflective mirror (5), the 3rd total reflective mirror (4 '), the 4th total reflective mirror (5 '), the 5th total reflective mirror (4 "), the 6th total reflective mirror (5 "), its center is arranged on the circumference that diameter is 140mm, and is fixed on collimating mirror (3) mirror holder.
4, according to claim 1 or 2 described inner three-directional moire interferometers, it is characterized in that, described 12 total reflective mirrors (4,5,4 ', 5 ', 4 ", 5 ", 6,7,6 ', 7 ', 6 ", 7 ") and the area of catoptron (8) be 50 * 35mm
2
5, inner three-directional moire interferometer according to claim 1 is characterized in that, described collimating mirror (3), its diameter are φ=206mm, focal distance f=600mm.
6, inner three-directional moire interferometer according to claim 1 is characterized in that, described beam expanding lens (2) is 40 times of beam expanding lenss that expand bundle.
7, inner three-directional moire interferometer according to claim 1, it is characterized in that, described phase shift drive unit (10), have three, each all is made up of piezoelectric ceramic tube (14) and power supply (15), (4 ") link to each other, and the other end and support (13) are fixing, and the positive and negative electrode of power supply (15) is connected on respectively on the inside and outside tube wall of piezoelectric ceramic tube (14) with first total reflective mirror (4), the 3rd total reflective mirror (4 '), the 5th total reflective mirror in an end of piezoelectric ceramic tube (14).
8, inner three-directional moire interferometer according to claim 7 is characterized in that, described power supply (15) voltage is between 0--10V, and displacement resolution is 0.01 wavelength, and precision is ± 0.5%.
9, inner three-directional moire interferometer according to claim 7 is characterized in that, described piezoelectric ceramic tube (14), external diameter are 20mm, and wall thickness is 2mm.
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| CNB2005100279415A CN1316225C (en) | 2005-07-21 | 2005-07-21 | Inner three-directional moire interferometer |
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| CNB2005100279415A CN1316225C (en) | 2005-07-21 | 2005-07-21 | Inner three-directional moire interferometer |
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| CN1316225C true CN1316225C (en) | 2007-05-16 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101576374B (en) * | 2009-06-19 | 2011-05-25 | 南昌航空大学 | Mobile moire interferometer |
| CN101608904B (en) * | 2009-07-21 | 2011-09-14 | 清华大学 | Multifunction three-dimensional displacement and topography laser interferometry system |
| CN103033297B (en) * | 2012-12-10 | 2014-10-22 | 中国船舶重工集团公司第七一一研究所 | Analysis meter for residual stress distribution along depth |
| CN106052561B (en) * | 2016-08-05 | 2019-07-09 | 京东方科技集团股份有限公司 | Position sensor and including its conveyer and utilize its carry out position correction method |
| CN107389244A (en) * | 2017-08-01 | 2017-11-24 | 北京航空航天大学 | A kind of laser blind hole residual stress detection means and exploitation software |
| CN107907980B (en) * | 2017-12-06 | 2019-04-23 | 南京大学 | A kind of interferometer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1114746A (en) * | 1994-12-01 | 1996-01-10 | 天津大学 | Intelligent interference cloud testing instrument |
| CN1310333A (en) * | 2001-03-30 | 2001-08-29 | 中国科学院上海光学精密机械研究所 | Electronic holographic measuring method without direct light transmission and conjugate image |
| US6628399B1 (en) * | 1999-10-29 | 2003-09-30 | Holotech A.S. | Method and device real time non-destructive determination of residual stresses in objects by the optical holographic interferometry technique |
| CN1556371A (en) * | 2004-01-02 | 2004-12-22 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
-
2005
- 2005-07-21 CN CNB2005100279415A patent/CN1316225C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1114746A (en) * | 1994-12-01 | 1996-01-10 | 天津大学 | Intelligent interference cloud testing instrument |
| US6628399B1 (en) * | 1999-10-29 | 2003-09-30 | Holotech A.S. | Method and device real time non-destructive determination of residual stresses in objects by the optical holographic interferometry technique |
| CN1310333A (en) * | 2001-03-30 | 2001-08-29 | 中国科学院上海光学精密机械研究所 | Electronic holographic measuring method without direct light transmission and conjugate image |
| CN1556371A (en) * | 2004-01-02 | 2004-12-22 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
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