CN1556371A - Multifunction tridimension displacement laser interference measuring system - Google Patents
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Abstract
The measuring system is composed of laser, image collection camera system, spectrum coupler, 3D interference optical system, and 6D adjustable loading frame. The measuring system provides functions of real time measurement in u, v, w three displacement fields with high accuracy in sensitivity of wavelength magnitude, possessing two measuring modes: gradation interference and electronic speckle interference. Adjustment in six degrees of freedom is realized by 6D adjustable loading frame so as to implement loading experiments of one-way pulling and pressing, and bending at three points providing features of easy of use, compact structure and high precision. Moreover, there is phase shift system. Measuring precision reaches to nano magnitude when phase shift technique is applied.
Description
Technical field
The present invention relates to the three-D displacement laser interferometry system of a kind of deformation of member and displacement measurement, belong to optical measurement mechanics, construction material, the deformation of member and displacement measurement technical field.
Background technology
The displacement lasers interferometer measuration system of using in the prior art belongs to the bulk structure of temporarily building more on experiment table at present, can't be applicable to on-the-spot deformation of member measurement.At this situation, released some portable commercial laser interferometry systems both at home and abroad, comprise moire interferometer and speckle interferometer.More famous moire interferometer has the two-dimentional moire interferometer of Photomechanics Co. and the intelligent moire interferometer of University Of Tianjin (Chinese patent application 94118741.1), both do not have the difference of essence on measuring principle, all adopted D.Post and B.Han works " High SensitivityMoir é " (SPRINGER-VERLAG at them, 1994) twin-beam and four beam path set forth in, can realize u, the measurement of two displacement fields of v, wherein the major technique feature of intelligent interference cloud testing instrument is two stepper motors of configuration on the catoptron in light path, has realized that grid are frequently by micro-processor controlled small step distance, the automatic adjusting of adjusting and initial moire and carrier wave moire on a large scale.Famous speckle interferometer comprises the electronic speckle interferometer of Chinese University of Science and Technology's development and the multifunctional digital speckle interferometer of Xi'an Communications University's development etc.These several interferometers all are furnished with video camera and image card, and the image that collects carries out data processing by computing machine.But preceding two kinds of devices are only applicable to moir and can only realize u in the face, the measurement of two displacement fields of v, both only are applicable to speckle interferometry the back, they all can't realize measuring simultaneously u, v, the measurement of two kinds of patterns of moir and Electronic Speckle Pattern Interferometry to displacement more can't be realized in w three-D displacement field.
Summary of the invention
The purpose of this invention is to provide a kind of multifunction three-dimensional displacement laser interferometry system, both can realize body surface three-dimensional displacement field (in-plane displacement u, v and acoplanarity displacement w) real-time measurement, can realize simultaneously moire interference and two kinds of displacement measurement patterns of electronic speckle pattern interferometry again, easy to use, and highly sensitive, compact conformation.
Technical scheme of the present invention is as follows:
A kind of multi-functional triple motion laser interferometry system, contain laser instrument, image acquisition camera system and the loading frame of placing test specimen, it is characterized in that: this system also comprises light splitting coupler and three-dimensional interference light path system, described light splitting coupler contains the light that laser instrument is sent and is divided into two spectroscopes and three on-off controllers of three tunnel, the light path of wherein measuring the u field displacement is successively by one of them spectroscope, behind u field switch controller and the u field fiber optic splitter, two laser couplers and two collimating mirrors of dividing two-way to enter respectively in the three-dimensional interference light path system collimate, and incide the test specimen surface more respectively behind collimation after mirror reflects; The light path of measuring the v field displacement is successively by behind another spectroscope, v field switch controller and the v field fiber optic splitter, the branch two-way enters two other laser couplers in the three-dimensional interference light path system respectively, behind two catoptrons and two collimating mirrors, incide the test specimen surface through mirror reflects respectively more respectively; After the light path of measuring the w field displacement incides another collimating mirror in the three-dimensional interference light path system by w field switch controller and w field fiber coupler successively, behind an Amici prism, be divided into two-beam, wherein a branch of light directly sees through this Amici prism and incides on the catoptron, arrive the image acquisition camera system through this Amici prism again after the reflection, another light beam arrives test specimen after this Amici prism reflection, pass Amici prism and arrive the image acquisition camera system behind the optical grating reflection on test specimen surface.
In the technical scheme of the present invention, it is characterized in that: in the light path of described measurement u field displacement, be provided with u field fiber coupler between u field switch controller and the u field fiber optic splitter; In the light path of described measurement v field displacement, be provided with v field fiber coupler between v field switch controller and the v field fiber optic splitter; In the light path of described measurement w field displacement, be provided with w field fiber coupler between w field switch controller and the w field fiber coupler.
Technical characterictic of the present invention also is: the back of one of them catoptron in two catoptrons in the light path of described measurement u field displacement is provided with u field piezoelectric ceramics phase-shifter; The back of one of them catoptron in described two catoptrons in the light path of described measurement v field displacement is provided with v field piezoelectric ceramics phase-shifter; The back of the described catoptron in the light path of described measurement w field displacement is provided with w field piezoelectric ceramics phase-shifter.
In light splitting coupler of the present invention, described spectroscope, fiber coupler and on-off controller all are encapsulated in magazine, and are provided with the filtering hole in the entrance port of the laser beam of this box.Laser couplers, catoptron, collimation lens and Amici prism described in the described three-dimensional interference light path system all is encapsulated in the camera bellows.
Loading frame of the present invention adopts the sextuple load frame of regulating, and it is made up of universal stage six parts in universal stage, pitching platform and the vertical plane in loading frame, elevating translational platform, accurate translation stage, the face; In the described vertical plane universal stage by screw retention on the pitching platform; Accurate translation stage by the ball steel wire continuously the crack guide rail be connected in the vertical plane on the universal stage, the elevating translational platform links to each other with accurate translation stage by means of the dovetail groove guide rail, universal stage links to each other with the elevating translational platform with the rack-and-pinion latch mechanism by slide block mechanism in the face, loading frame by screw retention in face on the universal stage; Described test specimen upper end is connected with straight-line screw rod, and the lower end connects force transducer.
Laser instrument described in the present invention, light splitting coupler, three-dimensional interference light path system, image acquisition camera system, the sextuple load frame of regulating all are installed on the worktable; Described three-dimensional interference light path system is fixed on the worktable by three lifting supports, and described laser instrument and light splitting coupler are positioned at the same side of three-dimensional interference light path system; Sextuple adjusting load frame and image acquisition camera system are installed in the left and right sides of three-dimensional interference light path system respectively by the dovetail groove guide rail on the worktable.
The present invention compared with prior art, have the following advantages and the high-lighting effect: displacement measurement when this measuring system can realize the high-precision real of u, v, three displacement fields of w, displacement measurement sensitivity can reach wavelength magnitude, and can realize moire interference and two kinds of displacement measurement patterns of electronic speckle pattern interferometry respectively.The present invention is easy to use, and compact conformation adopts the sextuple adjusting that the load frame can be realized six-freedom degree (along x, y, three translations of z axle and rotation) of regulating.Three translation precision reach 0.1 millimeter, and rotation precision reaches 10 ', make native system can realize tension and compression, three-point bending loading experiment simultaneously.Can use the grating frequency scope is 500 lines per millimeters-3000 lines per millimeters, and has following performance parameter:
Displacement measurement sensitivity: u ﹠amp in the face; The v field is that 0.417 μ m is 0.316 μ m from face w field;
Test zone: 4～50mm;
Enlargement factor: 0.5X～100X
Striped resolution: 100/mm
Measure range of strain: 10 μ ε～10% ε
Description of drawings
Fig. 1 is measurement light path system schematic of the present invention (contains and measure v field displacement light path).
Fig. 2 measures u field displacement light path synoptic diagram for the present invention.
Fig. 3 measures w field displacement light path synoptic diagram for the present invention.
Fig. 4 is a sextuple structural representation of regulating the load frame of the present invention.
Embodiment
Further specify concrete structure of the present invention and embodiment below in conjunction with accompanying drawing:
As shown in Figure 1, multifunction three-dimensional displacement laser interferometry system of the present invention mainly is made up of with the light splitting coupler 2, three-dimensional interference light path system 3, image acquisition camera system 4, the sextuple load frame 5 of regulating that form three displacement fields laser instrument 1, may command beam split, all is installed on the work top.Three-dimensional interference light path system 3 is integrated in the camera bellows, is fixed on the work top by three lifting supports, makes system's miniaturization.Laser instrument 1 and light splitting coupler 2 fastened screw retention are positioned at the same side of three-dimensional interference light path system 3 on worktable.Sextuple regulate the both sides, front and back that load frame 5 and image acquisition camera system 4 are installed in the three-dimensional interference light path system respectively, they can be on the dovetail groove guide rail on the worktable linear slide, the conversion front and back position.
Light splitting coupler 2 of the present invention contains the light that laser instrument 1 is sent and is divided into three tunnel two spectroscopes 7,8 and on-off controller 15,16,17, the light path of wherein measuring the u field displacement is successively by behind spectroscope 7, on-off controller 15, the fiber optic splitter 14, the branch two-way enters the laser couplers 41 and 42 in the three-dimensional interference light path system 3 respectively, through collimating mirror 26 and 27 collimations, and after catoptron 44 and 45 reflections, incide test specimen 40 surfaces; The light path of measuring the v field displacement is reflected into through catoptron 24,25 behind catoptron 20,21 and collimating mirror 22,23 collimations again and is mapped to test specimen 40 surfaces successively by entering the laser couplers 18 and 19 in the three-dimensional interference light path system 3 behind spectroscope 8, on-off controller 16 and the fiber optic splitter 13 respectively; After the light path of measuring the w field displacement incides collimating mirror 28 in the three-dimensional interference light path system by switch 17, fiber coupler 12 successively, behind Amici prism 29, be divided into two-beam, wherein a branch of light directly sees through Amici prism 29 and incides catoptron 30, arrives image acquisition camera system 4 through this Amici prism 29 again after the reflection; Another light beam arrives test specimen 40 after Amici prism 29 reflections, pass Amici prism 29 and arrive image acquisition camera system 4 behind the optical grating reflection on test specimen surface.
Optical device in the light splitting coupler 2, it is spectroscope 7,8, fiber coupler 9,10,11,12, fiber optic splitter 13,14 and on-off controller 15,16,17 all are encapsulated in the box, and be provided with filtering hole 6 in the entrance port of the laser beam of this box, box by screw retention on work top.The light beam that laser instrument 1 sends is through being divided into five bundle optical fiber beams behind the light splitting coupler 2.Wherein light beam forms displacement components u field measurement twin-beam by spectroscope 7, fiber coupler 9, fiber optic splitter 14 backs, and light beam forms displacement v field measurement twin-beam by spectroscope 8, fiber coupler 10, fiber optic splitter 13 backs.Form acoplanarity displacement w field measurement light beam by spectroscope 8, fiber coupler 11, fiber coupler 12 backs.Be provided with on-off controller 15,16,17 in the light splitting coupler, can control the use of u, v, three displacement fields measurements of w light path respectively.
Optical device in the three-dimensional interference light path system 3, promptly laser couplers 18,19,41,42,12, catoptron 20,21,24,25,44,45,30, collimation lens 22,23,26,27,28, and Amici prism 29 all is encapsulated in the camera bellows.Wherein laser couplers 18, catoptron 20,25, and collimation lens 23 is fixed on the top in the camera bellows, on the symmetric position (bottom of casing) laser couplers 19, catoptron 21,24 are arranged respectively therewith, and collimation lens 22, these optical elements are used for measuring v field displacement (as shown in Figure 1).Be fixed with laser couplers 42, catoptron 45 and collimation lens 27 on the wall of left side in the casing, on the position of symmetry laser couplers 41, catoptron 44, collimation lens 26 are arranged respectively on its right side wall, these optical elements are used for measuring u field displacement (as shown in Figure 2); On the center line, laser couplers 12, collimation lens 28, Amici prism 29, catoptron 30 are installed successively before and after camera bellows, these optical elements are used for measuring the displacement (as shown in Figure 3) of w field.
Sextuple load frame 5 (as the Fig. 4) that regulate are by (the model: GCM-1101M), pitching platform 38 (model: (model: GCM-1101M) universal stage 39 is formed GCM-190) and in the vertical plane by six parts of universal stage 37 in loading frame 34, elevating translational platform 35 (model GCM-150104M), accurate translation stage 36 (model GCM-125301AM), the face.In the described vertical plane universal stage 39 by screw retention on pitching platform 38; Accurate translation stage 36 by the ball steel wire continuously the crack guide rail be connected in the vertical plane on the universal stage 39; Elevating translational platform 35 links to each other with accurate translation stage 36 by means of dovetail groove guide rail 48; Universal stage 37 links to each other with elevating translational platform 35 with the rack-and-pinion latch mechanism by slide block mechanism in the face; Loading frame 34 by screw retention in face on the universal stage 37.Pitching platform 38 links to each other with the worktable base plate with adjusting screw(rod) by set screw (lower end is spherical).Rotary screw 46 can change the angle of pitch of pitching platform; The interior universal stage 39 of vertical plane is connected on the pitching platform 38 by trip bolt, and the effect of universal stage is interior rotation of vertical plane of minute adjustment test specimen in the vertical plane, reaches the Rigid Body in Rotation With that zeroing field and elimination produce in the imposed load process.Accurate translation stage 36 by the ball steel wire continuously the crack guide rail be connected in the vertical plane on the universal stage 39, can drive by micrometer screw mandrel 47, for translation stage provides rectilinear motion, the displacement resolution of motion can reach 0.001mm.Elevating translational platform 35 links to each other with accurate translation stage 36 by means of dovetail groove guide rail 48, and translation stage can slide before and after line slideway.Universal stage 37 links to each other with smooth groove guide rail on the elevating translational platform 35 by slide block mechanism in the face, realize lifting and all around translation (with respect to test specimen) by the rack-and-pinion on the guide rail, it is long to have shift motion, speed is fast, move characteristics such as steady, precision is 0.1mm, can regulate easily test specimen up and down and all around move and reach the centering purpose, satisfy the requirement of moire interference to the adjustment of test specimen position.Micrometer screw mandrel 49 on the universal stage 37 can provide 360 ° manual rotation, make test specimen in tested surface, obtain accurately trickle angular setting, precision can reach ± and 10 ", can apply carrier wave (or eliminating carrier wave), zeroing easily and eliminate the Rigid Body in Rotation With that in the imposed load process, produces.Loading frame 34 is fixed in the face on the universal stage 37 by trip bolt.The test specimen upper end connects straight-line screw rod 50, and screw rod is fixed in the top of loading frame, and the lower end connects force transducer 51.Loading frame can provide experiments such as unidirectional tension and compression, are curved, simple bending at 3.
Image acquisition camera system 4 is used for gathering in real time the moire pattern picture.Form with Three Degree Of Freedom fixed support by CCD with level and vertical.Directly import computing machine by the image of CCD collection and carry out data processing.
Adopt the present invention can be achieved as follows two kinds of displacement measurement patterns, its measuring process is as follows:
1) moir measurement pattern: this moment, the test specimen surface need be manufactured with holographic grating, and frequency is 500 lines per millimeters-3000 lines per millimeters.
When measuring the v field displacement (as Fig. 1), v field measurement light path switch 16 is opened, and laser beam arrives laser couplers 18 and 19 behind fiber coupler 10 and fiber optic splitter 13, arrive catoptron 20,21 behind the beam expander respectively.Behind collimating mirror 22 collimations, after catoptron 24 reflections, incide test specimen surface 40 through 20 beam reflected; Simultaneously, after catoptron 21 beam reflected are by collimating mirror 23 collimations, after catoptron 25 reflections, incide test specimen surface 40.Two incident lights and specimen grating generation diffraction, two ± 1 order diffraction light wave are interfered formation interference cloud testing bar graph mutually, and by image acquisition camera system 4 input computing machines.The Y direction face internal strain information that has comprised test specimen on this interference fringe picture, but the in-plane displacement on Measuring Object surface and strain.When measuring the u field displacement, principle and measurement v field displacement identical (as Fig. 2).U field measurement switch 15 is opened, and laser beam divides two-way to arrive laser couplers 41 and 42 respectively through fiber coupler 9 and fiber optic splitter 14.The diffusion light of being sent by two laser couplers 41,42 is respectively through inciding behind collimating mirror 26,27 collimations on two catoptrons 44 and 45 perpendicular to surface level, after changing direction, two bundle reflected light incide test specimen 40 surfaces, and at specimen grating surface generation diffraction, two ± 1 order diffraction light wave is interfered formation moire fringes figure mutually, and is imaged on the image acquisition camera system 4.When measuring the w field displacement, need to use safe graceful/Green's optical interference circuit measures (as Fig. 3), but the acoplanarity displacement information on the interference fringe picture quantitative measurment test specimen surface that forms by reverberation light of launching on the specimen grating surface and reference light interference.In the measurement, need w field displacement switch 17 is opened, u field and v field measurement switch 15,16 are closed.At this moment, laser expands by fiber coupler 11,12 backs and becomes collimated light after bundle incides collimating mirror 28, collimated light is divided into two-beam after by Amici prism 29, wherein, a branch of light directly sees through Amici prism 29 and incides on the catoptron 30, this light beam reflects arrival camera system 4 once more through Amici prism 29 after 30 reflections, as reference light; An other light beam arrives test specimen 40 from Amici prism 29 reflections, and the test specimen reflected light passes Amici prism 29 backs and arrives camera system 4, as reverberation light; This two-beam interferes acoplanarity displacement traces such as this interference fringe representative after arriving camera system.
2) electronic speckle method measurement pattern:
When the applying electronic speckle method is measured, can adopt the light path identical with off-surface displacement measurement with the moire interference in-plane displacement, different is that the test specimen surface need not to make grating.When measuring in-plane displacement, two bundle collimated lights are radiated at test specimen 40 surfaces, form speckle and realize electronic speckle pattern interferometry on image acquisition camera system 4, and obtain the electronic speckle pattern interferometry fringe field of real-time in-plane displacement.When measuring acoplanarity displacement, use/Green graceful to interfere identical light path with Thailand, the appliance computer program can be handled the stack of two speckle fields, obtains the electronic speckle pattern interferometry fringe field of real-time acoplanarity displacement.
The present invention has also assembled three piezoelectric ceramics phase-shifters 31,32 and 33 respectively in the measurement light path of u, v, w displacement field.Catoptron 20 in the light path of described measurement u field displacement or 21 back are provided with phase-shifter 31; Catoptron 44 in the light path of described measurement v displacement field or 45 back are provided with phase-shifter 32; The back of the catoptron 30 in the light path of described measurement w displacement field is provided with phase-shifter 33.The phase shift of interference fringe can be controlled by the input voltage of regulating phase-shifter 31,32,33, and input voltage is by computer regulated.Can reach nanometer scale through the displacement measurement precision after the phase-shifting technique processing.
Claims (7)
1. multi-functional triple motion laser interferometry system, contain laser instrument (1), image acquisition camera system (4) and the loading frame (5) of placing test specimen, it is characterized in that: this system also comprises light splitting coupler (2) and three-dimensional interference light path system (3), described light splitting coupler contains the light that laser instrument is sent and is divided into two spectroscopes (7 of three tunnel, 8) and three on-off controllers (15,16,17), the light path of wherein measuring the u field displacement is successively by a spectroscope (7), behind u field switch controller (15) and the u field fiber optic splitter (14), the branch two-way enters two laser couplers (41 in the three-dimensional interference light path system respectively, 42), two collimating mirrors (26,27) behind the collimation, more respectively through catoptron (44,45) incide test specimen (40) surface after the reflection; The light path of measuring the v field displacement is successively by behind another spectroscope 8, v field switch controller (16) and the v field fiber optic splitter (13), the branch two-way enters two laser couplers (18,19) in addition in the three-dimensional interference light path system respectively, behind two catoptrons (20,21) reflection and collimating mirror (22,23) collimation, be reflected into through catoptron (24,25) again and be mapped to test specimen (40) surface respectively; After the light path of measuring the w field displacement incides collimating mirror (28) in the three-dimensional interference light path system by w field switch controller (17), w field fiber coupler (12) successively, be divided into two-beam through an Amici prism (29), wherein a branch of light directly sees through Amici prism (29) and incides on the catoptron (30), arrive image acquisition camera system (4) through Amici prism (29) again after the reflection, another light beam arrives test specimen (40) after Amici prism (29) reflection, pass prism 29 and arrive image acquisition camera system (4) behind the optical grating reflection on test specimen surface.
2. according to the described triple motion laser interferometry system of claim 1, it is characterized in that: the catoptron (20) in the light path of described measurement u field displacement or the back of (21) are provided with piezoelectric ceramics phase-shifter phase (31); The catoptron (44) in the light path of described measurement v field displacement or the back of (45) are provided with piezoelectric ceramics phase-shifter (32); The back of the catoptron (30) in the light path of described measurement w field displacement is provided with piezoelectric ceramics phase-shifter (33).
3. according to the described triple motion laser interferometry system of claim 1, it is characterized in that: in the light path of described measurement u field displacement, between u field switch controller (15) and u field fiber optic splitter (14), be provided with fiber coupler (9); In the light path of described measurement v field displacement, between v field switch controller (16) and v field fiber optic splitter (13), be provided with fiber coupler (10); In the light path of described measurement w field displacement, between w field switch controller (17) and w field fiber coupler (12), be provided with fiber coupler (11).
4. according to claim 1,2 or 3 described triple motion laser interferometry systems, it is characterized in that: the spectroscope in the described light splitting coupler (2) (7,8), fiber coupler (9,10,11) and on-off controller (15,16,17) are encapsulated in magazine, and are provided with filtering hole (6) in the entrance port of the laser beam of this box.
5. according to claim 1,2 or 3 described triple motion laser interferometry systems, it is characterized in that: the laser couplers in the described three-dimensional interference light path system (3) (18,19,41,42,12), catoptron (20,21,24,25,44,45,30), collimation lens (22,23,26,27,28) and Amici prism (29) are encapsulated in the camera bellows.
6. according to the described triple motion laser interferometry system of claim 1, it is characterized in that: described loading frame (5) adopts the sextuple load frame of regulating, and it is made up of universal stage (39) six parts in universal stage (37), pitching platform (38), the vertical plane in loading frame (34), elevating translational platform (35), accurate translation stage (36), the face; In the described vertical plane universal stage (39) by screw retention on pitching platform (38), accurate translation stage (36) by the ball steel wire continuously the crack guide rail be connected on the universal stage in the vertical plane (39), elevating translational platform (35) links to each other with accurate translation stage (36) by means of the dovetail groove guide rail, and universal stage (37) links to each other with elevating translational platform (35) with the rack-and-pinion latch mechanism by slide block mechanism in the face; Loading frame 34 by screw retention in face on the universal stage 37; Described test specimen (40) upper end connects straight-line screw rod, and the lower end connects force transducer.
7. according to claim 1 or 6 described triple motion laser interferometry systems, it is characterized in that: described laser instrument (1), light splitting coupler (2), three-dimensional interference light path system (3), three-dimensional regulation camera system (4), the sextuple load frame (5) of regulating all are installed on the worktable; Described three-dimensional interference light path system (3) is fixed on the worktable by three lifting supports, and described laser instrument (1) and light splitting coupler (2) are positioned at the same side of three-dimensional interference light path system (3); Sextuple adjusting load frame 5 and image acquisition camera system 4 are installed in the left and right sides of three-dimensional interference light path system (3) respectively by the dovetail groove guide rail on the worktable.
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| CN1316225C (en) * | 2005-07-21 | 2007-05-16 | 上海交通大学 | Inner three-directional moire interferometer |
| CN100362316C (en) * | 2006-03-08 | 2008-01-16 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional electronic speckle interferometer |
| CN100374817C (en) * | 2006-03-07 | 2008-03-12 | 中国船舶重工集团公司第七一一研究所 | Portable acoplane displacement measuring device |
| CN100405005C (en) * | 2006-09-29 | 2008-07-23 | 山东师范大学 | Method for measuring three-dimensional deformation of objects utilizing space carrier frequency electronic speckle interference |
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