CN103335607A - Large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device and inspection method - Google Patents
Large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device and inspection method Download PDFInfo
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- CN103335607A CN103335607A CN2013102695848A CN201310269584A CN103335607A CN 103335607 A CN103335607 A CN 103335607A CN 2013102695848 A CN2013102695848 A CN 2013102695848A CN 201310269584 A CN201310269584 A CN 201310269584A CN 103335607 A CN103335607 A CN 103335607A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 66
- 239000002184 metal Substances 0.000 title claims abstract description 66
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- 238000007689 inspection Methods 0.000 title abstract description 12
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Abstract
The invention relates to a large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device and an inspection method. The invention provides a large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device and an inspection method which are convenient to inspect and have obvious inspection effects.
Description
Technical field
The invention belongs to the optical detection field, relate to a kind of verifying attachment of optical component surface shape and based on the method for inspection of this verifying attachment to optical component surface shape, relate in particular to a kind of heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment and the method for inspection.
Background technology
Laser fusion is with the inertial confinement fusion of high energy short pulse strong laser as drive source, driving indirectly in the fusion, laser at first incides the target cavity wall and produces X ray and plasma, and X ray burns pellet, compressed fuel is realized fusion, and X ray is the direct drive source of fusion.Incident laser pulse is a train pulse, the laser pulse of follow-up incident at first meets with plasma before arriving the target cavity wall, plasma has scattering process to incident laser, quite a few laser energy is scattered out the target chamber, the laser energy that arrives the target cavity wall is weakened, blocked the entrance of laser as plasma." blocking up " causes laser to the transformation efficiency of X ray significantly to reduce, and can have a strong impact on the compression effectiveness of fusion fuel.
The backscattering diagnostic system is one of key equipment of research " blocking up " problem, and it is by collecting the plasma scattered light and its energy, spectrum, time response measurement being studied the mechanism of laser plasma interactions.This system needs development, and " diameter is
Endoporus is
Annular off-axis ellipsoidal mirror " and " diameter is
Off-axis paraboloidal mirror " be used for the collection of scattered light, the former is installed on diameter
The spheroid target chamber in, the latter is installed on outside the spheroid.The material of catoptron is selected and version is the emphasis that designs: because of lightweight, demand cheaply, two catoptrons all adopt the import aluminum alloy materials, and machining property is good; The annular ellipsoidal mirror is big because of size, if one design just can't enter the spheroid target chamber, thereby adopts the form of pintongs splicing, not only is easy to enter the spheroid installation, and is convenient to optionally partial dismantling to get rid of the influence of local strong jamming light.But, be the difficult point of catoptron development from processing and the detection of axle speculum.
The difficulty of processing is mainly derived from catoptron from axle amount big (ellipsoidal mirror is from axle 1.4m, and parabolic lens is from axle 3.8m), can't adopt carrousel processing, can only adopt the system of milling.It is very meticulous to mill operation processed: rough mill, thermal treatment, moulding are milled, thermal treatment, finish-milling, but finish-milling rear surface smooth finish is still lower, also has the trickle tool marks processed of milling; Workpiece is wanted mirror-polishing then: underhand polish, polishing, and the plating nickel on surface cure process, underhand polish polishing again, surface aluminize high-reflecting film and diaphragm finally reach mirror effect.
The checkout equipment of aspheric mirror is commonly used contourgraph and knife.Contourgraph is to draw the minute surface profile by the pointwise contact measurement to minute surface, and this method is very directly perceived, can measure the error condition of every bit; But measure very consuming timely, damage minute surface easily, equipment price is also expensive.Knife also is a kind of very effective optical element checkout equipment, as can be seen the aberration situation of minute surface existence; But it obviously is unnecessary detecting aberration for the scattered light of low precision is collected mirror, causes cost waste.In addition, if detect after catoptron reaches minute surface, in case minute surface face shape has problem, will begin to do over again from the finish-milling operation.Therefore, if can find a kind of from the intermediate link of development just can detection faces shape low cost, intuitively, equipment easily, just can reduce the risk of doing over again, efficient is developed in raising.
Summary of the invention
In order to solve the above-mentioned technical matters that exists in the background technology, the invention provides a kind of check and test effect tangible heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment and method of inspection be convenient to.
Technical solution of the present invention is: the invention provides a kind of heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment, its special character is: two groups or more the dot laser unit that described heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment comprise pedestal and be arranged on the pedestal and can carry out at pedestal arbitrarily angled adjustment.
Above-mentioned dot laser unit is two groups when above, and described dot laser unit comprises the central point laser element and around the periphery dot laser unit that is arranged on central point laser element outside.
Above-mentioned periphery dot laser unit is inner ring periphery dot laser unit and around the periphery dot laser unit, outer ring that is arranged on outside, inner ring periphery dot laser unit.
Above-mentioned dot laser unit comprises ball and socket joint seat, sphere joint and dot laser; Described ball and socket joint seat is arranged on the pedestal; Described dot laser is arranged on the ball and socket joint seat by the sphere joint.
A kind of method of heavy caliber metal off-axis ellipsoidal mirror face shape being tested based on aforesaid heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment, its special character is: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, the laser that the dot laser in two groups or more the dot laser unit is launched converges a common focus, and described this focus is the light beam convergent point;
2) the light beam convergent point in the step 1) is placed the first focus place of heavy caliber metal off-axis ellipsoidal mirror to be measured, make the laser of the dot laser emission in the difference laser element be incident on the diverse location of heavy caliber metal off-axis ellipsoidal mirror to be checked and reflect;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser in the dot laser unit; If the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflection can not be assembled the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is unusual.
A kind of based on aforesaid heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment to the method that heavy caliber metal off-axis paraboloidal mirror face shape is tested, it is characterized in that: said method comprising the steps of:
1) adjusts the position of dot laser unit on pedestal, laser that the dot laser in two groups or more the dot laser unit launches and the optical axis of heavy caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) laser of the dot laser in difference laser element emission is incident on the diverse location of heavy caliber metal off-axis paraboloidal mirror to be checked and reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser in the dot laser unit; If the focus place to heavy caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is normal; If reflection can not be assembled to the focus place of heavy caliber metal off-axis paraboloidal mirror to be checked, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is unusual.
Advantage of the present invention is:
The invention provides a kind of heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment and the method for inspection, this device is made of a large amount of rotating dot lasers, can simulation points light source and parallel beam, satisfy the detection light source demand of ellipsoidal mirror and parabolic lens; Light source of the present invention disperses, and can clearly find out that the incoming position of each Shu Jiguang on minute surface reaches the converged position at the focus place, detects very directly perceived; It requires low to detection faces smooth finish, even minute surface still can judge principal reflection light position according to " the center speck " of strip scattering hot spot when having the turnning and milling tool marks, can carry out face shape to the metallic mirror surface of finish-milling and simple polishing and detect; Single detects the situation that can reflect whole shape.Device provided by the present invention has that detection speed is fast, cost is low, directly perceived, can advantage such as control from the intermediate link of development, through with the contrast test of other checkout equipment, show that this device is reliable.
Description of drawings
Fig. 1 is that (wherein, Fig. 1 a is the structural representation of facing of provided by the present invention shape verifying attachment for the structural representation of provided by the present invention shape verifying attachment; Fig. 1 b is that the A-A of Fig. 1 a is to cut-open view);
Synoptic diagram when Fig. 2 is based on device provided by the present invention laser beam is assembled;
Synoptic diagram when Fig. 3 is based on device provided by the present invention ellipsoidal mirror is detected;
Synoptic diagram when Fig. 4 is based on device provided by the present invention parabolic lens is detected;
Wherein:
1-pedestal 2-ball and socket joint seat 3-sphere joint; The 4-dot laser.
Embodiment
The invention provides a kind of heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment, two groups or more the dot laser unit that this device comprises pedestal 1 and is arranged on the pedestal 1 and can carries out at pedestal 1 arbitrarily angled adjustment, when the dot laser unit is more than two groups the time, the dot laser unit comprises the central point laser element and around the periphery dot laser unit that is arranged on central point laser element outside.
Periphery dot laser unit is inner ring periphery dot laser unit and around the periphery dot laser unit, outer ring that is arranged on outside, inner ring periphery dot laser unit.
For example shown in Fig. 1 (Fig. 1 a and Fig. 1 b), verifying attachment provided by the present invention is to be formed by 19 " dot laser 4 " arrays, 1 of central distribution (central point laser element), inner ring (inner ring periphery dot laser unit) evenly distributes 6, and outer ring (periphery dot laser unit, outer ring) evenly distributes 12.The dot laser unit comprises ball and socket joint seat 2, sphere joint 3 and dot laser 4; Ball and socket joint seat 2 is arranged on the pedestal 1; Dot laser 4 is arranged on the ball and socket joint seat 2 by sphere joint 3.Each " dot laser 4 " is installed in one " sphere joint 3 ", and " sphere joint 3 " is fixed on " pedestal 1 " by " ball and socket joint seat 2 ", and laser instrument can freely rotate around " sphere joint 3 ".The number of laser array and spread geometry can be decided according to shape and the size of concrete detected object.
Because each " dot laser 4 " all can freely rotate around sphere joint 3, so the beam shape of whole laser beams device can freely change.When being used for the optical element detection, can adjust the shape of laser beam according to the optical characteristics of element to be checked.
If any rotation all do not take place in each " dot laser 4 ", the laser beam device emergent light parallel beam that several light are formed of serving as reasons then; If the light beam of all laser instruments is converged at the place ahead a bit (as Fig. 2), then device can be simulated a pointolite that sends some light.
If element to be checked is ellipsoidal reflector, because the light beam that sends from focus of ellipsoidal mirror reflects post-concentration in another focus of ellipsoidal mirror through ellipsoidal mirror, characteristic adopts pointolite to detect ellipsoidal mirror accordingly, make it to converge at the place ahead a bit (as shown in Figure 2) by each laser instrument of adjusting laser beam device, the maximum subtended angle of convergent beam can be decided according to the subtended angle of element to be checked.Based on this, referring to Fig. 3, based on the method that verifying attachment provided by the present invention is tested to heavy caliber metal off-axis ellipsoidal mirror face shape, this method may further comprise the steps:
1) adjust the position of dot laser unit on pedestal 1, common focus of laser convergence that the dot laser 4 in two groups or more the dot laser unit is launched, this focus is the light beam convergent point;
2) the light beam convergent point in the step 1) is placed the first focus place of heavy caliber metal off-axis ellipsoidal mirror to be measured, make the laser of dot laser 4 emissions in the difference laser element be incident on the diverse location of heavy caliber metal off-axis ellipsoidal mirror to be checked and reflect;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser 4 in the dot laser unit; If the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflection can not be assembled the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is unusual.
If element to be checked is parabolic lens, optical characteristics according to parabolic lens, the light beam parallel with axis of symmetry will be assembled in parabolic lens focal point F place (as shown in Figure 4) after the parabolic lens reflection, and each laser instrument of adjusting laser beam device accordingly makes it outgoing beam and is parallel to each other to simulate bigbore parallel beam.
Referring to Fig. 4, based on the method that verifying attachment provided by the present invention is tested to heavy caliber metal off-axis paraboloidal mirror face shape, this method may further comprise the steps:
1) adjusts the position of dot laser unit on pedestal 1, laser that the dot laser 4 in two groups or more the dot laser unit launches and the optical axis of heavy caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) laser of the emission of the dot laser 4 in the difference laser element is incident on the diverse location of heavy caliber metal off-axis paraboloidal mirror to be checked and reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser 4 in the dot laser unit; If the focus place to heavy caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is normal; If reflection can not be assembled to the focus place of heavy caliber metal off-axis paraboloidal mirror to be checked, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is unusual.
Claims (6)
1. a heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment is characterized in that: two groups or more the dot laser unit that described device comprises pedestal and is arranged on the pedestal and can carries out at pedestal arbitrarily angled adjustment.
2. heavy caliber metal off-axis ellipsoidal mirror according to claim 1 or parabolic minute surface shape verifying attachment, it is characterized in that: described dot laser unit is two groups when above, and described dot laser unit comprises the central point laser element and around the periphery dot laser unit that is arranged on central point laser element outside.
3. heavy caliber metal off-axis ellipsoidal mirror according to claim 2 or parabolic minute surface shape verifying attachment is characterized in that: described periphery dot laser unit is inner ring periphery dot laser unit and around the periphery dot laser unit, outer ring that is arranged on outside, inner ring periphery dot laser unit.
4. according to claim 1 or 2 or 3 described heavy caliber metal off-axis ellipsoidal mirrors or parabolic minute surface shape verifying attachment, it is characterized in that: described dot laser unit comprises ball and socket joint seat, sphere joint and dot laser; Described ball and socket joint seat is arranged on the pedestal; Described dot laser is arranged on the ball and socket joint seat by the sphere joint.
One kind based on the arbitrary claim of claim 1-4 described heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment to the method that heavy caliber metal off-axis ellipsoidal mirror face shape is tested, it is characterized in that: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, common focus of laser convergence that the dot laser in two groups or more the dot laser unit is launched, described this focus is the light beam convergent point;
2) the light beam convergent point in the step 1) is placed the first focus place of heavy caliber metal off-axis ellipsoidal mirror to be measured, make the laser of the dot laser emission in the difference laser element be incident on the diverse location of heavy caliber metal off-axis ellipsoidal mirror to be checked and reflect;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser in the dot laser unit; If the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflection can not be assembled the second focus place to heavy caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of heavy caliber metal off-axis ellipsoidal mirror to be checked is unusual.
One kind based on the arbitrary claim of claim 1-4 described heavy caliber metal off-axis ellipsoidal mirror or parabolic minute surface shape verifying attachment to the method that heavy caliber metal off-axis paraboloidal mirror face shape is tested, it is characterized in that: said method comprising the steps of:
1) adjusts the position of dot laser unit on pedestal, laser that the dot laser in two groups or more the dot laser unit launches and the optical axis of heavy caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) laser of the dot laser in difference laser element emission is incident on the diverse location of heavy caliber metal off-axis paraboloidal mirror to be checked and reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of heavy caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser in the dot laser unit; If the focus place to heavy caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is normal; If reflection can not be assembled to the focus place of heavy caliber metal off-axis paraboloidal mirror to be checked, then the face shape of heavy caliber metal off-axis paraboloidal mirror to be checked is unusual.
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| CN201310269584.8A CN103335607B (en) | 2013-06-28 | 2013-06-28 | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104359424A (en) * | 2014-10-09 | 2015-02-18 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
| CN106989693A (en) * | 2017-05-12 | 2017-07-28 | 中国工程物理研究院激光聚变研究中心 | A kind of off-axis ellipsoidal mirror surface shape detection apparatus and its detection method |
| CN107991064A (en) * | 2017-12-14 | 2018-05-04 | 中国科学院西安光学精密机械研究所 | Anti-stray light interference near-back scattering light measuring system |
| CN108168701A (en) * | 2017-12-14 | 2018-06-15 | 中国科学院西安光学精密机械研究所 | Full-aperture back scattered light measurement system for bundled targeting laser |
| CN110118645A (en) * | 2019-04-19 | 2019-08-13 | 西北核技术研究所 | A kind of optical property integrated evaluating method of semielliptical reflecting surface |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359424A (en) * | 2014-10-09 | 2015-02-18 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
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| CN106989693A (en) * | 2017-05-12 | 2017-07-28 | 中国工程物理研究院激光聚变研究中心 | A kind of off-axis ellipsoidal mirror surface shape detection apparatus and its detection method |
| CN106989693B (en) * | 2017-05-12 | 2022-10-21 | 中国工程物理研究院激光聚变研究中心 | Off-axis ellipsoidal mirror surface shape detection device and detection method thereof |
| CN107991064A (en) * | 2017-12-14 | 2018-05-04 | 中国科学院西安光学精密机械研究所 | Anti-stray light interference near-back scattering light measuring system |
| CN108168701A (en) * | 2017-12-14 | 2018-06-15 | 中国科学院西安光学精密机械研究所 | Full-aperture back scattered light measurement system for bundled targeting laser |
| CN107991064B (en) * | 2017-12-14 | 2024-01-30 | 中国科学院西安光学精密机械研究所 | Near back scattering light measuring system resistant to stray light interference |
| CN108168701B (en) * | 2017-12-14 | 2024-04-12 | 中国科学院西安光学精密机械研究所 | Full-aperture back-scattered light measurement system for clustered targeting laser |
| CN110118645A (en) * | 2019-04-19 | 2019-08-13 | 西北核技术研究所 | A kind of optical property integrated evaluating method of semielliptical reflecting surface |
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| CN103335607B (en) | 2015-12-02 |
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