CN206019600U - A kind of system on detection non-spherical lens transmission corrugated - Google Patents
A kind of system on detection non-spherical lens transmission corrugated Download PDFInfo
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- CN206019600U CN206019600U CN201620854085.4U CN201620854085U CN206019600U CN 206019600 U CN206019600 U CN 206019600U CN 201620854085 U CN201620854085 U CN 201620854085U CN 206019600 U CN206019600 U CN 206019600U
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- spherical lens
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- transmission corrugated
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Abstract
This utility model is related to field of optical detection, more particularly to a kind of system on detection non-spherical lens transmission corrugated.A kind of system on detection non-spherical lens transmission corrugated, which includes striped generating meanss, beam condensing unit, light-dividing device, first imaging device, second imaging device, striped generating meanss produce bar graph, bar graph is located at the focal position of beam condensing unit, incident illumination after processing through optically focused can be divided into reflected light and transmitted light by light-dividing device, first imaging device and the second imaging device one of both are arranged in transmitted light light path, another one is arranged in reflected light light path, first imaging device and the second imaging device carry analytic function or the picture of formation are uploaded to high in the clouds and be analyzed to obtain the information on non-spherical lens transmission corrugated.A kind of system on detection non-spherical lens transmission corrugated of the present utility model has the advantages that fast and flexible is used.
Description
【Technical field】
This utility model is related to field of optical detection, more particularly to a kind of system on detection non-spherical lens transmission corrugated.
【Background technology】
The lens of composition optical lens are divided to face shape mainly two big class, spherical lenss and non-spherical lens.And in
In high-grade camera lens, most crucial part is non-spherical lens, and the quality mark of non-spherical lens the technical merit of camera lens.Aspheric
Face lens can revise the spherical aberration brought in collimation and focusing system by spherical lenss, and therefore, non-spherical lens is saturating with sphere
Mirror is compared, and its precision is higher, image is apparent, and a piece of non-spherical lens can substitute 2～3 spherical lenss.
Non-spherical lens is the key point of optical lenses industry development, the manufacture of its correlation and detection technique also just into
How the research emphasis in camera lens field, while being also the high technological difficulties as the exploitation of matter camera lens, lift the system of China's camera lens industry
Make level the correlation technique with detection is manufactured it is necessary to stretch into research non-spherical lens.
The batch micro operations of resin non-spherical lens (bore is in below 100nm) mainly adopt Precise Injection Moulding Technique, and
The batch micro operations of glass aspheric lenses (bore is in below 50nm) are mainly using hot compression molding technology, and this two classes aspheric surface
The manufacture of lens (based on axial symmetry lens) is all the accuracy of detection of non-spherical lens premised on high-precision detection technique
It is to restrict the technical bottleneck that non-spherical lens is produced with efficiency.The detection of non-spherical lens predominantly detects its transmission wavefront
Distortion, typically requires its precision in sub-wavelength magnitude；Simultaneously because often processing a large amount of size and dimensions not in manufacturing at the scene
Same non-spherical lens, this are accomplished by a kind of flexibly quick detecting system to realize the detection of polytype lens, and which detects
Motility and detection speed should be able to meet the requirement of the manufacturing；Due to being high precision test, will necessarily noise vibrated
Impact, this requires that optical de-tection means are fairly simple, systematic error minimize.Therefore, outstanding detecting system will be protected
The key point of card non-spherical lens batch production.
【Utility model content】
For the problem that flexibly can not be used that the system on existing detection non-spherical lens transmission corrugated is present, this practicality is new
Type provides a kind of system on detection non-spherical lens transmission corrugated.
This utility model solves the scheme of technical problem and is to provide a kind of system on detection non-spherical lens transmission corrugated, its
Using as a comparison detecting the transmission corrugated of non-spherical lens, the detection non-spherical lens transmission corrugated is with reference to lens
System institute striped generating meanss, beam condensing unit, light-dividing device, the first imaging device, the second imaging device, striped generating meanss are produced
Bar graph, bar graph are located at the focal position of beam condensing unit, and the incident illumination after processing through optically focused can be divided into instead by light-dividing device
Light and transmitted light is penetrated, the first imaging device and the second imaging device one of both are arranged in transmitted light light path, another one is arranged
In reflected light light path, non-spherical lens to be detected and transmitted light light path and reflected light light path is separately positioned on reference to lens
In, the first imaging device and the second imaging device carry analytic function or the picture of formation are uploaded to high in the clouds and be analyzed
To obtain the information on non-spherical lens transmission corrugated.
Preferably, first imaging device be disposed with transmitted light light path the first microcobjective, with reference to lens,
Second microcobjective, the first imageing sensor, the second imaging device be disposed with reflected light light path the 3rd microcobjective,
Non-spherical lens, the 4th microcobjective, the second imageing sensor, the first microcobjective and the 3rd microcobjective model, performance one
Cause, the second microcobjective and the 4th microcobjective model, performance are consistent, the first imageing sensor and the second image sensing type
Number, performance consistent.
Preferably, reference objective lenses are arranged at the focal position of the first microcobjective, and non-spherical lens is arranged on the 3rd and shows
At the focal position of speck mirror.
Preferably, the second microcobjective is arranged at the focal position with reference to lens, and the 4th microcobjective is arranged on aspheric
At the focal position of face lens.
Preferably, first imaging device further includes that the first aperture diaphragm, the second imaging device are further included
Three aperture diaphragms, the first aperture diaphragm are arranged between light-dividing device and the first microcobjective, and the 3rd aperture diaphragm is arranged on point
Between electro-optical device and the 3rd microcobjective, the first aperture diaphragm and the 3rd aperture diaphragm model, performance are consistent.
Preferably, first imaging device further includes that first mirror, first mirror are arranged on the second microcobjective
And first between imageing sensor, the second imaging device further includes that second mirror, second mirror are arranged on the 4th micro- thing
Between mirror and the second imageing sensor, first mirror and second mirror-type number, performance are consistent.
Preferably, first imaging device further includes that the second aperture diaphragm, the second aperture diaphragm are arranged on first
Between cylinder mirror and the second microcobjective, the second imaging device further includes that the 4th aperture diaphragm, the 4th aperture diaphragm are arranged on
Between second mirror and the 4th microcobjective, the second aperture diaphragm is consistent with the 4th aperture diaphragm model, performance.
Preferably, the first imageing sensor is arranged at the focal position of first mirror, and the second imageing sensor is arranged on
At the focal position of second mirror.
Preferably, the light pass surface of light-dividing device and incident illumination angle at 45 °.
Preferably, the system on the detection non-spherical lens transmission corrugated further includes analytical equipment, analytical equipment with
First imageing sensor and the electrical connection of the second imageing sensor.
Compared with prior art, the system on a kind of detection non-spherical lens transmission corrugated of the present utility model, which includes bar
Stricture of vagina generating meanss, beam condensing unit, light-dividing device, the first imaging device, the second imaging device, striped generating meanss produce striped
Figure, bar graph are located at the focal position of beam condensing unit, and the incident illumination after processing through optically focused can be divided into reflected light by light-dividing device
And transmitted light, the first imaging device and the second imaging device one of both be arranged in transmitted light light path, and another one is arranged on instead
Penetrate in light light path, the first imaging device and the second imaging device carry analytic function or the picture of formation is uploaded to high in the clouds and carry out
Relative analyses are obtaining the information on non-spherical lens transmission corrugated.A kind of detection non-spherical lens transmission corrugated of the present utility model
System have the advantages that fast and flexible is used.
【Description of the drawings】
Fig. 1 is a kind of modular structure schematic diagram of the system on detection non-spherical lens transmission corrugated of the present utility model.
【Specific embodiment】
In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and enforcement
Example, is further elaborated to this utility model.It should be appreciated that specific embodiment described herein is only in order to solving
This utility model is released, is not used to limit this utility model.
Fig. 1 is refer to, a kind of system 10 on detection non-spherical lens transmission corrugated of the present invention includes striped generating meanss
1st, beam condensing unit 3, light-dividing device 4, the first imaging device 5, the second imaging device 6, analytical equipment 9.Striped generating meanss 1 can be produced
The one-dimensional or two-dimentional periodic stripe of life, and the phase place of striped and cycle are adjustable, its optical stripe for producing is preferably phase shift
Bar graph, is optimal with four-step phase-shifting, and striped generating meanss 1 are preferably automatically controlled spatial light modulator.Striped generating meanss 1 are produced
Striped Fig. 2 be located at the focal position of beam condensing unit 3 and sentence and guarantee that light can form directional light after beam condensing unit 3.Optically focused
Device 3 can be realized light focusing and make up the problem of bright deficiency, and beam condensing unit 3 is preferably achromatic condenser, it is also possible to
It is Abbe condenser, shake-up condenser lenss or other beam condensing units 3.The directional light sent from beam condensing unit 3 is irradiated to light splitting
On device 4 and the device 4 that is split is divided into reflected light light path a and transmitted light light path b, the light pass surface of light-dividing device 4 and incident illumination into
45° angle, in transmitted light light path b, the light intensity of transmitted light is consistent with the light intensity magnitude of reflected light in reflected light light path a.Light-dividing device 4
Can be cubic type spectroscope, or plane spectroscope, the present invention is done exemplary using cubic type spectroscope
Illustrate, here is not limited.The material of light-dividing device 4 is preferably K9 optical glass.It is provided with the direction of transmitted light light path b
First imaging device 5, is provided with the second imaging device 6, the first imaging device 5 and the second imaging device 6 in reflected light light path a
Can each self-forming bar graph 2 picture.Analytical equipment 9 is electrically connected with the first imaging device 5 and the second imaging device 6, analysis dress
Putting 9 can carry out phase analysis respectively for the picture of 6 each self-forming of the first imaging device 5 and the second imaging device, then pass through phase place
Change is calculated slope of wave surface with the relation of transmitted light angle change, and then it is poor then poor to slope of wave surface to obtain slope of wave surface
It is integrated to obtain aberration profile situation, so as to carry out wave-front reconstruction to obtain the information on transmission corrugated.
First imaging device 5 is to be disposed with the first aperture diaphragm 51, first along the direction of transmitted light light path b micro-
Object lens 53, refer to lens 55, the second microcobjective 56,57, first mirror 58 of the second aperture diaphragm and the first imageing sensor
59, the effect of the first aperture diaphragm 51 is to ensure that the picture that the first microcobjective 53 is formed is apparent, brightness is higher, the first micro- thing
Mirror 53 can produce the spatial fringe of striped 2 as 7, and spatial fringe is projected with reference on lens 55 as 7.It is arranged on reference to lens 55
The spatial fringe of the striped Fig. 2 for ensureing that the first microcobjective 53 is produced is sentenced as 7 can be with the focal position of the first microcobjective 53
Project with reference on lens 55, i.e. spatial fringe is as 7 and with reference to being provided with apart from d between lens 55, and d>0.Through with reference to thoroughly
Spatial fringe after the modulation of mirror 55 sequentially passes through imaging after the second microcobjective 56,57, first mirror 58 of the second aperture diaphragm as 7
On the first imageing sensor 59, the first imageing sensor 59 by the picture formed after modulating with reference to lens 55 and can be detected
Light intensity data pass to analytical equipment 9.Second microcobjective 56 is arranged on the focal position with reference to lens 55 and sentences guarantee light
Can form directional light after the second microcobjective 56, the effect of the second aperture diaphragm 57 be the picture for being formed first mirror 58 more
Clearly, brightness is higher, first mirror 58 and the second microcobjective 56 with the use of the color that can correct the second microcobjective 56
Difference and aberration.Analytical equipment 9 can carry out phase extraction to the picture that the first imageing sensor 59 is gathered, and then pass through phase place change
The slope with reference to 55 transmission corrugated of lens is calculated with the relation of transmitted light angle change.First imageing sensor 59 is CCD
Imageing sensor, or cmos image sensor or other imageable imageing sensors, the present invention are passed using ccd image
Sensor is exemplary illustrated to do, and here is not limited.As the variant embodiment of the present invention, the first aperture diaphragm 51, the second hole
Footpath diaphragm 57 and first mirror 58 can be omitted.
Second imaging device 6 shows in the 3rd aperture diaphragm the 61, the 3rd that is disposed with the direction of reflected light light path a
Speck mirror 63, non-spherical lens 65 to be detected, the 4th microcobjective 66,67, second mirror 68 of the 4th aperture diaphragm and
Two imageing sensors 69.The effect of the 3rd aperture diaphragm 61 be to ensure that the 3rd microcobjective 63 formed picture is apparent, brightness more
Height, the 3rd microcobjective 63 can produce the spatial fringe of striped 2 as 7, and spatial fringe is projected on non-spherical lens 65 as 7.
Non-spherical lens 65 to be detected is arranged on the focal position of the 3rd microcobjective 63 and sentences and ensures that the 3rd microcobjective 63 is produced
The spatial fringe of striped Fig. 2 can project on non-spherical lens 65 to be detected as 7, i.e., spatial fringe as 7 with to be detected
Non-spherical lens 65 between be provided with apart from d, and d>0.Spatial fringe after non-spherical lens 65 to be detected is modulated
The second imageing sensor 69 is imaged on after the 4th microcobjective 66,67, second mirror 68 of the 4th aperture diaphragm are sequentially passed through as 7
On, the second imageing sensor 69 can be by the picture formed after non-spherical lens 65 to be detected is modulated and the light intensity number for detecting
According to passing to analytical equipment 9.4th microcobjective 66 is arranged on the focal position of non-spherical lens 65 to be detected and sentences guarantee light
Line can form directional light after the 4th microcobjective 66, and the effect of the 4th aperture diaphragm 67 is the picture for being formed second mirror 68
Apparent, brightness is higher, second mirror 68 and the 4th microcobjective 66 with the use of the 4th microcobjective 66 can be corrected
Aberration and aberration.Analytical equipment 9 can carry out phase extraction to the picture that the second imageing sensor 69 is gathered, and then be become by phase place
The relation of change and reflected light angle change is calculated the slope on 65 transmission corrugated of non-spherical lens to be detected, then by be checked
The 65 transmission slope of wave surface of non-spherical lens of survey obtains aspheric surface to be detected with the comparison with reference to 55 transmission slope of wave surface of lens
Lens 65 are poor relative to the slope of wave surface with reference to lens 55, then slope of wave surface difference is integrated to obtain aspheric surface to be detected
Lens 65 are relative to the aberration profile situation with reference to lens 55, then the reconstruction for carrying out 65 transmission corrugated of non-spherical lens to be detected
To obtain the information on 65 transmission corrugated of non-spherical lens to be detected.The second imageing sensor 69 in reflected light light path a and thoroughly
The first imageing sensor 59 that penetrates in light light path b can either synchronously or asynchronously by the picture formed in respective light path and the light intensity number for monitoring
According to passing to analytical equipment 9.As the variant embodiment of the present invention, the 3rd aperture diaphragm 61, the 4th aperture diaphragm 67 and second
Mirror 68 can be omitted.Can be the globe lenss or plane phase of the non-spherical lens 65 close to be detected of standard with reference to lens 55
Object, adopts exemplary illustrated to do for the plane phase object of standard with reference to lens 55 in the present invention, and here is not limited.
When with reference to the plane phase object that lens 55 are standard, carry out on the 65 transmission corrugated of non-spherical lens to be detected to first piece
Just by the information Store on the transmission corrugated of the reference lens 55 for detecting in data base during detection, in detection process afterwards
Only non-spherical lens 65 need to be changed, and without also close non-spherical lens to be detected will be replaced with reference to lens 55 every time
65 globe lenss, and only the picture formed in 65 place light path of non-spherical lens to be detected need to be tested and analyzed, then
It is analyzed with the corrugated information in data base with reference to lens 55, to realize flexibly quick use.
3rd aperture diaphragm 61 is completely the same with 51 model of the first aperture diaphragm, performance, the 3rd microcobjective 63 and first
53 model of microcobjective, performance are completely the same, and the 4th microcobjective 66 is completely the same with 56 model of the second microcobjective, performance,
4th aperture diaphragm 67 is completely the same with 57 model of the second aperture diaphragm, performance, second mirror 68 and first 58 model of mirror, property
Can be completely the same, the second imageing sensor 69 is completely the same with 59 model of the first imageing sensor, performance.
A kind of principle of system 10 on the 65 transmission corrugated of detection non-spherical lens of the present invention is：
When spatial fringe projects non-spherical lens 65 to be detected or refers on lens 55 as 7, aspheric to be detected
Face lens 65 or the transmitted light caused with reference to lens 55 or reflected light angle change value are △ θ, resulting fringe phase change
Turn to
Wherein p be fringe period, d be fringe spatial as 7 to non-spherical lens 65 to be detected or with reference to lens 55 away from
From.
The direction that is propagated with the light in every light path is as x directions, vertical with x directions for y directions, striped generating meanss 1
Light intensity I (x, y) of phase shift striped Fig. 2 of generation is represented by x directions and y directions
Wherein,It is the initial phase in x directions,It is the initial phase in y directions, a and b is constant, spatial fringe picture
After 7 are transmitted to non-spherical lens 65 to be detected or refer on lens 55, the light distribution of phase shift striped Fig. 2 is changed into
WithPhase place change component after modulate for non-spherical lens 65 to be detected or with reference to lens 55,Can be obtained by producing at least three width phase shift striped Fig. 2 in the x direction by striped generating meanss 1,Can be with
Obtained by producing at least three width phase shift striped Fig. 2 in y-direction by striped generating meanss 1.Adopt in x side in the present invention
To with y directions on produce four width phase shift striped Fig. 2, using above-mentioned computing formula 3. and by spatial phase-shifting method or multifrequency time sequence
Row method carries out Phase- un- wrapping process and can obtain the phase place on 65 transmission corrugated of non-spherical lens to be detected and with reference to lens 55
The phase place on transmission corrugated.Further according to above-mentioned computing formula 1. can obtain non-spherical lens 65 to be detected and with reference to lens 55 each
From the transmitted light or reflected light angle change value △ θ that causexWith △ θy, and angle change is approximately transmission corrugated in x directions and y
The partial derivative in direction, is expressed as
Slope information so as to obtain non-spherical lens 65 to be detected and with reference to 55 respective transmission corrugated of lens, namely
Non-spherical lens 65 to be detected is obtained poor relative to the slope of wave surface with reference to lens 55.
Therefore, by 65 transmission corrugated of non-spherical lens to be detected relative to reference to 55 transmission corrugated of lens corrugated
Slope differences are integrated, it is possible to obtain 65 transmission corrugated of non-spherical lens to be detected is relative to reference to 55 transmission corrugated of lens
Aberration profile situation, so non-spherical lens 65 to be detected is carried out wavefront aberrations analysis with rebuild its transmission corrugated so as to
Transmitted wave surface information to non-spherical lens 65 to be detected.
Used as the variant embodiment of the present invention, analytical equipment 9 can be omitted, and the first imageing sensor 59 and the second image are passed
The picture formed in sensor 69 can be analyzed process or the first imageing sensor 59 and the second figure can be automatically uploaded to high in the clouds
As coming with analytic function in sensor 59.
Position as the variant embodiment of the present invention, the first imaging device 5 and the second imaging device 6 can be exchanged, i.e.,
First imaging device 5 is arranged in reflected light light path a, and the second imaging device 6 is arranged in transmitted light light path b.
The method that the present invention also provides a kind of 65 transmission corrugated of detection non-spherical lens, involved structure in the present embodiment
And label is with reference to a kind of structure of the system 10 on 65 transmission corrugated of detection non-spherical lens and label in first embodiment.
Fig. 1 is refer to, a kind of system 10 on detection non-spherical lens transmission corrugated of the present invention includes striped generating meanss
1st, beam condensing unit 3, light-dividing device 4, the first imaging device 5, the second imaging device 6, analytical equipment 9.Striped generating meanss 1 can be produced
The one-dimensional or two-dimentional periodic stripe of life, and the phase place of striped and cycle are adjustable, its optical stripe for producing is preferably phase shift
Bar graph, is optimal with four-step phase-shifting, and striped generating meanss 1 are preferably automatically controlled spatial light modulator.Striped generating meanss 1 are produced
Striped Fig. 2 be located at the focal position of beam condensing unit 3 and sentence and guarantee that light can form directional light after beam condensing unit 3.Optically focused
Device 3 can be realized light focusing and make up the problem of bright deficiency, and beam condensing unit 3 is preferably achromatic condenser, it is also possible to
It is Abbe condenser, shake-up condenser lenss or other beam condensing units 3.The directional light sent from beam condensing unit 3 is irradiated to light splitting
On device 4 and the device 4 that is split is divided into reflected light light path a and transmitted light light path b, the light pass surface of light-dividing device 4 and incident illumination into
45° angle, in transmitted light light path b, the light intensity of transmitted light is consistent with the light intensity magnitude of reflected light in reflected light light path a.Light-dividing device 4
Can be cubic type spectroscope, or plane spectroscope, the present invention is done exemplary using cubic type spectroscope
Illustrate, here is not limited.The material of light-dividing device 4 is preferably K9 optical glass.It is provided with the direction of transmitted light light path b
First imaging device 5, is provided with the second imaging device 6, the first imaging device 5 and the second imaging device 6 in reflected light light path a
Can each self-forming bar graph 2 picture.Analytical equipment 9 is electrically connected with the first imaging device 5 and the second imaging device 6, analysis dress
Putting 9 can carry out phase analysis respectively for the picture of 6 each self-forming of the first imaging device 5 and the second imaging device, then pass through phase place
Change is calculated slope of wave surface with the relation of transmitted light angle change, and then it is poor then poor to slope of wave surface to obtain slope of wave surface
It is integrated to obtain aberration profile situation, so as to carry out wave-front reconstruction to obtain the information on transmission corrugated.
First imaging device 5 is to be disposed with the first aperture diaphragm 51, first along the direction of transmitted light light path b micro-
Object lens 53, refer to lens 55, the second microcobjective 56,57, first mirror 58 of the second aperture diaphragm and the first imageing sensor
59, the effect of the first aperture diaphragm 51 is to ensure that the picture that the first microcobjective 53 is formed is apparent, brightness is higher, the first micro- thing
Mirror 53 can produce the spatial fringe of striped 2 as 7, and spatial fringe is projected with reference on lens 55 as 7.It is arranged on reference to lens 55
The spatial fringe of the striped Fig. 2 for ensureing that the first microcobjective 53 is produced is sentenced as 7 can be with the focal position of the first microcobjective 53
Project with reference on lens 55, i.e. spatial fringe is as 7 and with reference to being provided with apart from d between lens 55, and d>0.Through with reference to thoroughly
Spatial fringe after the modulation of mirror 55 sequentially passes through imaging after the second microcobjective 56,57, first mirror 58 of the second aperture diaphragm as 7
On the first imageing sensor 59, the first imageing sensor 59 by the picture formed after modulating with reference to lens 55 and can be detected
Light intensity data pass to analytical equipment 9.Second microcobjective 56 is arranged on the focal position with reference to lens 55 and sentences guarantee light
Can form directional light after the second microcobjective 56, the effect of the second aperture diaphragm 57 be the picture for being formed first mirror 58 more
Clearly, brightness is higher, first mirror 58 and the second microcobjective 56 with the use of the color that can correct the second microcobjective 56
Difference and aberration.Analytical equipment 9 can carry out phase extraction to the picture that the first imageing sensor 59 is gathered, and then pass through phase place change
The slope with reference to 55 transmission corrugated of lens is calculated with the relation of transmitted light angle change.First imageing sensor 59 is CCD
Imageing sensor, or cmos image sensor or other imageable imageing sensors, the present invention are passed using ccd image
Sensor is exemplary illustrated to do, and here is not limited.As the variant embodiment of the present invention, the first aperture diaphragm 51, the second hole
Footpath diaphragm 57 and first mirror 58 can be omitted.
Second imaging device 6 shows in the 3rd aperture diaphragm the 61, the 3rd that is disposed with the direction of reflected light light path a
Speck mirror 63, non-spherical lens 65 to be detected, the 4th microcobjective 66,67, second mirror 68 of the 4th aperture diaphragm and
Two imageing sensors 69.The effect of the 3rd aperture diaphragm 61 be to ensure that the 3rd microcobjective 63 formed picture is apparent, brightness more
Height, the 3rd microcobjective 63 can produce the spatial fringe of striped 2 as 7, and spatial fringe is projected on non-spherical lens 65 as 7.
Non-spherical lens 65 to be detected is arranged on the focal position of the 3rd microcobjective 63 and sentences and ensures that the 3rd microcobjective 63 is produced
The spatial fringe of striped Fig. 2 can project on non-spherical lens 65 to be detected as 7, i.e., spatial fringe as 7 with to be detected
Non-spherical lens 65 between be provided with apart from d, and d>0.Spatial fringe after non-spherical lens 65 to be detected is modulated
The second imageing sensor 69 is imaged on after the 4th microcobjective 66,67, second mirror 68 of the 4th aperture diaphragm are sequentially passed through as 7
On, the second imageing sensor 69 can be by the picture formed after non-spherical lens 65 to be detected is modulated and the light intensity number for detecting
According to passing to analytical equipment 9.4th microcobjective 66 is arranged on the focal position of non-spherical lens 65 to be detected and sentences guarantee light
Line can form directional light after the 4th microcobjective 66, and the effect of the 4th aperture diaphragm 67 is the picture for being formed second mirror 68
Apparent, brightness is higher, second mirror 68 and the 4th microcobjective 66 with the use of the 4th microcobjective 66 can be corrected
Aberration and aberration.Analytical equipment 9 can carry out phase extraction to the picture that the second imageing sensor 69 is gathered, and then be become by phase place
The relation of change and reflected light angle change is calculated the slope on 65 transmission corrugated of non-spherical lens to be detected, then by be checked
The 65 transmission slope of wave surface of non-spherical lens of survey obtains aspheric surface to be detected with the comparison with reference to 55 transmission slope of wave surface of lens
Lens 65 are poor relative to the slope of wave surface with reference to lens 55, then slope of wave surface difference is integrated to obtain aspheric surface to be detected
Lens 65 are relative to the aberration profile situation with reference to lens 55, then the reconstruction for carrying out 65 transmission corrugated of non-spherical lens to be detected
To obtain the information on 65 transmission corrugated of non-spherical lens to be detected.The second imageing sensor 69 in reflected light light path a and thoroughly
The first imageing sensor 59 that penetrates in light light path b can either synchronously or asynchronously by the picture formed in respective light path and the light intensity number for monitoring
According to passing to analytical equipment 9.As the variant embodiment of the present invention, the 3rd aperture diaphragm 61, the 4th aperture diaphragm 67 and second
Mirror 68 can be omitted.Can be the globe lenss or plane phase of the non-spherical lens 65 close to be detected of standard with reference to lens 55
Object, adopts exemplary illustrated to do for the plane phase object of standard with reference to lens 55 in the present invention, and here is not limited.
When with reference to the plane phase object that lens 55 are standard, carry out on the 65 transmission corrugated of non-spherical lens to be detected to first piece
Just by the information Store on the transmission corrugated of the reference lens 55 for detecting in data base during detection, in detection process afterwards
Only non-spherical lens 65 need to be changed, and without also close non-spherical lens to be detected will be replaced with reference to lens 55 every time
65 globe lenss, and only the picture formed in 65 place light path of non-spherical lens to be detected need to be tested and analyzed, then
It is analyzed with the corrugated information in data base with reference to lens 55, to realize flexibly quick use.
3rd aperture diaphragm 61 is completely the same with 51 model of the first aperture diaphragm, performance, the 3rd microcobjective 63 and first
53 model of microcobjective, performance are completely the same, and the 4th microcobjective 66 is completely the same with 56 model of the second microcobjective, performance,
4th aperture diaphragm 67 is completely the same with 57 model of the second aperture diaphragm, performance, second mirror 68 and first 58 model of mirror, property
Can be completely the same, the second imageing sensor 69 is completely the same with 59 model of the first imageing sensor, performance.
A kind of principle of system 10 on the 65 transmission corrugated of detection non-spherical lens of the present invention is：
When spatial fringe projects non-spherical lens 65 to be detected or refers on lens 55 as 7, aspheric to be detected
Face lens 65 or the transmitted light caused with reference to lens 55 or reflected light angle change value are △ θ, resulting fringe phase change
Turn to
Wherein p be fringe period, d be fringe spatial as 7 to non-spherical lens 65 to be detected or with reference to lens 55 away from
From.
The direction that is propagated with the light in every light path is as x directions, vertical with x directions for y directions, striped generating meanss 1
Light intensity I (x, y) of phase shift striped Fig. 2 of generation is represented by x directions and y directions
Wherein,It is the initial phase in x directions,It is the initial phase in y directions, a and b is constant, spatial fringe picture
After 7 are transmitted to non-spherical lens 65 to be detected or refer on lens 55, the light distribution of phase shift striped Fig. 2 is changed into
WithPhase place change component after modulate for non-spherical lens 65 to be detected or with reference to lens 55,Can be obtained by producing at least three width phase shift striped Fig. 2 in the x direction by striped generating meanss 1,Can be with
Obtained by producing at least three width phase shift striped Fig. 2 in y-direction by striped generating meanss 1.Adopt in x side in the present invention
To with y directions on produce four width phase shift striped Fig. 2, using above-mentioned computing formula 3. and by spatial phase-shifting method or multifrequency time sequence
Row method carries out Phase- un- wrapping process and can obtain the phase place on 65 transmission corrugated of non-spherical lens to be detected and with reference to lens 55
The phase place on transmission corrugated.Further according to above-mentioned computing formula 1. can obtain non-spherical lens 65 to be detected and with reference to lens 55 each
From the transmitted light or reflected light angle change value △ θ that causexWith △ θy, and angle change is approximately transmission corrugated in x directions and y
The partial derivative in direction, is expressed as
Slope information so as to obtain non-spherical lens 65 to be detected and with reference to 55 respective transmission corrugated of lens, namely
Non-spherical lens 65 to be detected is obtained poor relative to the slope of wave surface with reference to lens 55.
Therefore, by 65 transmission corrugated of non-spherical lens to be detected relative to reference to 55 transmission corrugated of lens corrugated
Slope differences are integrated, it is possible to obtain 65 transmission corrugated of non-spherical lens to be detected is relative to reference to 55 transmission corrugated of lens
Aberration profile situation, so non-spherical lens 65 to be detected is carried out wavefront aberrations analysis with rebuild its transmission corrugated so as to
Transmitted wave surface information to non-spherical lens 65 to be detected.
Used as the variant embodiment of the present invention, analytical equipment 9 can be omitted, and the first imageing sensor 59 and the second image are passed
The picture formed in sensor 69 can be analyzed process or the first imageing sensor 59 and the second figure can be automatically uploaded to high in the clouds
As coming with analytic function in sensor 59.
Position as the variant embodiment of the present invention, the first imaging device 5 and the second imaging device 6 can be exchanged, i.e.,
First imaging device 5 is arranged in reflected light light path a, and the second imaging device 6 is arranged in transmitted light light path b.
The method that the present invention also provides a kind of 65 transmission corrugated of detection non-spherical lens, involved structure in the present embodiment
And label is with reference to a kind of structure of the system 10 on 65 transmission corrugated of detection non-spherical lens and label in first embodiment.
Compared with prior art, a kind of system on detection non-spherical lens transmission corrugated of the present utility model includes that striped is sent out
Generating apparatus, beam condensing unit, light-dividing device, the first imaging device, the second imaging device, striped generating meanss produce bar graph, bar
Stricture of vagina figure is located at the focal position of beam condensing unit, and the incident illumination after processing through optically focused can be divided into reflected light and transmission by light-dividing device
Light, the first imaging device and the second imaging device one of both are arranged in transmitted light light path, and another one is arranged on reflected light light
Lu Shang, non-spherical lens to be detected and is separately positioned in transmitted light light path and reflected light light path with reference to lens, the first one-tenth
As device and the second imaging device carry analytic function or by the picture of formation be uploaded to high in the clouds be analyzed non-to obtain
The information on spherical lenss transmission corrugated.A kind of system on detection non-spherical lens transmission corrugated of the present utility model has quick spirit
The advantage that work is used.
Preferred embodiment of the present utility model is the foregoing is only, not in order to limit this utility model, all at this
Any modification that is made within the principle of utility model, equivalent and improvement etc. all should include protection domain of the present utility model
Within.
Claims (10)
1. a kind of system on detection non-spherical lens transmission corrugated, its using with reference to lens as a comparison detecting non-spherical lens
Transmission corrugated, it is characterised in that：The system on the detection non-spherical lens transmission corrugated includes striped generating meanss, optically focused dress
Put, light-dividing device, the first imaging device, the second imaging device, striped generating meanss produce bar graph, bar graph be located at optically focused dress
At the focal position that puts, the incident illumination after processing through optically focused can be divided into reflected light and transmitted light, the first imaging dress by light-dividing device
Put and be arranged in transmitted light light path with the second imaging device one of both, another one is arranged in reflected light light path, to be detected
Non-spherical lens and it is separately positioned in transmitted light light path and reflected light light path with reference to lens, the first imaging device and the second one-tenth
It is analyzed to obtain non-spherical lens transmitted wave as device carries analytic function or the picture of formation is uploaded to high in the clouds
The information in face.
2. the system on detection non-spherical lens transmission corrugated as claimed in claim 1, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：First imaging device is disposed with transmitted light light path
First microcobjective, refer to lens, the second microcobjective, the first imageing sensor, the second imaging device is in reflected light light path
Be disposed with the 3rd microcobjective, non-spherical lens, the 4th microcobjective, the second imageing sensor, the first microcobjective and
3rd microcobjective model, performance are consistent, and the second microcobjective and the 4th microcobjective model, performance are consistent, and the first image is passed
Sensor and the second imageing sensor model, performance are consistent.
3. the system on detection non-spherical lens transmission corrugated as claimed in claim 2, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：Reference objective lenses are arranged at the focal position of the first microcobjective, non-
Spherical lenss are arranged at the focal position of the 3rd microcobjective.
4. the system on detection non-spherical lens transmission corrugated as claimed in claim 2, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：Second microcobjective is arranged at the focal position with reference to lens, the
Four microcobjectives are arranged at the focal position of non-spherical lens.
5. the system on detection non-spherical lens transmission corrugated as claimed in claim 2, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：First imaging device further includes the first aperture diaphragm, the
Two imaging devices further include that three aperture diaphragms, the first aperture diaphragm are arranged between light-dividing device and the first microcobjective,
3rd aperture diaphragm is arranged between light-dividing device and the 3rd microcobjective, the first aperture diaphragm and the 3rd aperture diaphragm model,
Performance is consistent.
6. the system on detection non-spherical lens transmission corrugated as claimed in claim 2, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：First imaging device further includes first mirror, first
Mirror is arranged between the second microcobjective and the first imageing sensor, and the second imaging device further includes second mirror, and second
Cylinder mirror is arranged between the 4th microcobjective and the second imageing sensor, and first mirror and second mirror-type number, performance are consistent.
7. the system on detection non-spherical lens transmission corrugated as claimed in claim 6, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：First imaging device further includes the second aperture diaphragm, the
Two aperture diaphragms are arranged between first mirror and the second microcobjective, and the second imaging device further includes the 4th aperture light
Door screen, the 4th aperture diaphragm are arranged between second mirror and the 4th microcobjective, the second aperture diaphragm and the 4th aperture diaphragm type
Number, performance consistent.
8. the system on detection non-spherical lens transmission corrugated as claimed in claim 6, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：First imageing sensor is arranged at the focal position of first mirror,
Second imageing sensor is arranged at the focal position of second mirror.
9. the system on detection non-spherical lens transmission corrugated as claimed in claim 1, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：The light pass surface of light-dividing device and incident illumination angle at 45 °.
10. the system on detection non-spherical lens transmission corrugated as claimed in claim 1, which is using coming with reference to lens as a comparison
The transmission corrugated of detection non-spherical lens, it is characterised in that：The system on the detection non-spherical lens transmission corrugated is further wrapped
Analytical equipment is included, analytical equipment is electrically connected with the first imageing sensor and the second imageing sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620854085.4U CN206019600U (en) | 2016-08-09 | 2016-08-09 | A kind of system on detection non-spherical lens transmission corrugated |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620854085.4U CN206019600U (en) | 2016-08-09 | 2016-08-09 | A kind of system on detection non-spherical lens transmission corrugated |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111537203A (en) * | 2020-05-27 | 2020-08-14 | 电子科技大学 | Optical lens wavefront measuring method using phase measurement deflection technology |
| EP4113168A4 (en) * | 2020-03-20 | 2023-04-26 | Huawei Technologies Co., Ltd. | Ranging system and vehicle |
-
2016
- 2016-08-09 CN CN201620854085.4U patent/CN206019600U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4113168A4 (en) * | 2020-03-20 | 2023-04-26 | Huawei Technologies Co., Ltd. | Ranging system and vehicle |
| CN111537203A (en) * | 2020-05-27 | 2020-08-14 | 电子科技大学 | Optical lens wavefront measuring method using phase measurement deflection technology |
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