TWI357973B - Apparatus and method for simulataneous confocal fu - Google Patents

Description

13.57973 49θτ 11. -Θ~ι- 年月日日修正 replacement page IX, invention description: [Technical field of the invention] The present invention relates to an optical measurement method and apparatus, and more particularly to a method for simultaneously capturing multiple complex arrays A method and apparatus for measuring confocal micromorphology of an image having different focus positions to analyze the topography of the object to be tested. -· [Prior Art] In the 1C industry, the semiconductor industry, the LCD industry, or the photoelectric measurement industry, it is often necessary to perform measurements such as surface roughness and flatness of wafers, and gold domes in the flip chip process. Measurement of block size and coplanarity, measurement of wafer coplanarity, detection of PCB defects, detection of terminal madness and IC process detection, measurement of microstructure and surface morphology of micro-optical components, etc. The quality of the product serves as the basis for controlling the process. In conventional techniques, the means for measuring the characteristics of the above products is a common Φ focal measurement technique. A confocal measurement method and apparatus disclosed in U.S. Patent Application Publication No. 2006/0232790, which utilizes detection light to be projected onto an object to be tested, and is then collected by the optical component. Object scattering and reflected object light. The subject light is then focused onto the photodetector. Finally, the information of the focus position is established according to the optical signal received by the photodetector, and the distance of the object to be tested is determined according to the information of the focus position. Another conventional technique, such as the confocal sensor disclosed in US Pat. No. 2004/0051879, which utilizes a pair of photo sensors to sense the intensity of light scattered by the object to be tested, and then proceeds. Analyze to get the position of the object to be tested 5 1357973

P-day correction replacement page. The principle of the confocal measurement technique described above is based on the optical vertical scanning measurement method to obtain optical slice images of different depths, and the reflection of the defocus signal by the pinhole (Pinhole), the reflected light outside the focus area Filtering with the scattered light, retaining the focus surface information, and reconstructing the optical slice image obtained by different depths by the computer, the three-dimensional spatial image information of the object to be tested can be obtained. It can be known from the above method that the current confocal measurement system uses the vertical scanning method to obtain the three-dimensional contour data, which will cause the measurement efficiency and rate to be poor in the measurement and the interference of the on-line measurement environment vibration problem, resulting in The amount of Lu test results is not accurate. In summary, there is a need for a confocal micromorphology measurement method and apparatus to solve the problems associated with conventional techniques. SUMMARY OF THE INVENTION The present invention provides a method for measuring confocal micromorphology, which divides the object light to be reflected into a complex array of light groups, and changes the focus position of each of the sub-test objects in the light group, and then At the same time, the image of each light group is captured, and the image information is parsed to obtain the topographical features of the object to be tested. The invention provides a confocal micro-morphology measuring device, which uses a beam splitting module to divide the object light reflected by the object to be tested into a complex array of light groups, and changes each channel in the light group by using refractive elements of different thicknesses. The sub-measurement light focuses the position, and then captures the image corresponding to each light group, and analyzes it to obtain the topographical features of the object to be tested, and completes the global three-dimensional wheeling measurement accurately and quickly. 1357973 丰月 曰条正换页 The present invention provides a method for measuring the topography, which is made using _ , . The light projection pattern and the intensity of the light source, and by the characteristics of the brain, such as highlighting, high, and analysis, to compensate for the lack of measurement of the f-signal and spatial analysis? 4 4 吏 The confocal micro-morphology measuring device can Adapt to the application of various different objects to be tested. In an embodiment, the present invention provides a confocal micromorphology measurement method comprising the steps of: (4) projecting a modulated light source onto an object to be tested; and (b) measuring the object to be detected by the object to be tested. Light beam splitting to form a complex array of light groups 'each-light (four) has a plurality of publications light; (6) respectively change the focus position of the sub-measurement light of each light group; and (4) sub-measure light obtained according to step (6) The topography of the object to be tested is reconstructed. In another embodiment, the present invention further provides a confocal micromorphology quantity-a light source modulating portion that is capable of projecting-modulating a light source in a light splitting portion, which can form a measuring object reflected by the object to be tested. a plurality of light groups 'each light group has a plurality of tracks == focus position adjustment portion, which can respectively modulate the plurality of light groups, and the plurality of track object light causes each of the sub-meters to have different light隹 ί Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' : : : : 'The system is electrically connected to the plurality of light source modulating portions, and the button and the control unit can receive the plurality of shirt images to analyze the topographical features of the object to be tested. In a real example, the light source modulation unit uses a light array reflection single "digital micro-mirror device (7 1357973 ΓΨί 曰 correction replacement page DMD). [Embodiment] In order to enable the reviewing committee to have a further understanding and understanding of the features, objects and functions of the present invention, the detailed structure of the device of the present invention and the concept of the design are explained below so that the reviewing committee can The detailed description of the features of the present invention is as follows: Please refer to FIG. 1A, which is a schematic flow chart of an embodiment of the method for measuring confocal micromorphology of the present invention. The confocal micromorphology measurement method includes the following steps: First, step 20 is performed to project a modulated light source onto a sample to be tested. The object to be tested may be a test object having a step height, that is, surfaces 901 to 903 having different heights on the object to be tested. In this embodiment, the modulated light source may have a light and dark pattern, and the pattern of the modulated light source may be determined as needed. For example, as shown in Fig. 2A and Fig. 2B, the modulation light source pattern of Fig. 2A is a checkerboard pattern, while Fig. 2B is a sine wave pattern. The pattern of the modulated light source can be arbitrarily transformed as needed, for example, changing the width, period, and contrast of the encoded stripe to improve the resolution and efficiency, and thus is not limited to FIG. 2A or FIG. The modulated light source that is incident on the object to be tested forms a test object light through reflection of the object to be tested. Then, through step 21, the object light reflected by the object to be tested is split to form a complex array of light groups, each light group having a plurality of track object light. In this step, the way of splitting light can be divided into a plurality of tracked object light by means of the arrangement of the beamsplitters. Next, step 22 is performed to change the sub-measurement light of each light group. 13.57973 1〇〇· ιί. ο 1 -- Years, months, and days. The manner in which the focus position is changed in this step is a way of deflecting the light path. In the embodiment, the manner of deflecting the optical path may be such that each of the sub-test objects in each group passes through a deflecting plate of a different thickness to change the focus position of the maternal sub-measurement light. Finally, in step 23, a shape characteristic of the object to be tested is reconstructed according to the image obtained by deflecting the object light. Next, the detailed process of step 22 will be described. Please refer to FIG. 3, which is a schematic flowchart of the embodiment of the reconstructed topography of the present invention.

Reconstructing the topography feature first takes step 230 to capture an image corresponding to each of the deflected objects. Since each light group has a plurality of track deflecting objects, and each of the sub-deflecting object lights can form a sub-image, in each of the light group images, there are a plurality of sub-images, and each of the sub-images The focus position of the image is not the same. That is to say, there are sub-images with different focus positions in the same group image. Then, step 231 is performed to obtain a focus index value of one of the corresponding images of the server. In this step, since each sub-image has a different focus position, the captured image sharpness is different, so each sub-image can be obtained by a == corresponding focus index value / / rule There are many algorithms for obtaining the focus index value, for example: autocorrelation function F5 or F4 at v〇Ua; 寅 algorithm, the example system uses Vollath's F4 algorithm, such as the formula, and the method. In addition to using the correlation coefficient method A L〇eiiicient

Correlation) ’ can also take advantage of the image difference

Differentiation) ‘For example: Thresholded Absolute Gradient or squared gradient, etc. Gray value peak-to-valley depth method (D-printing ^ 9 1357973 Γ^τι: Month day correction replacement page

Peaks and Valleys), for example: image threshold content or image power, Image Contrast, for example, image variation (Variance) or Normalization also implements Norma 1 i zed variance 'Histogram', such as: gray range algorithm or gray scale entropy algorithm, frequency domain method (Frequency-domain Analysis), for example, Laplacian, or other effective spatial frequency distribution identification method to know the focus index value. · · iy£ where FV〇„4 represents the depth of focus, I(X,y) is the brightness value of the position, ^ and off represent the image size ^Γwidth after the focus index value is obtained, then the focus of the corresponding image Refers to the value of the operation: two steps 232, according to each of the per-light group images have three sub-images 匕 1 standard curve ° the next process. As shown in Figure 4, where (4) ~ (4) every two columns to illustrate the fit Schematic diagram of the structure light stripe image of the curve. Among them, the different focus positions of the graph system represent the sub-images (a) to (4) of the image through step 21 of each channel, and the figure 4 (&) is the block level. The image produced by the height of the sub-measurement light is not shown in Fig. 4. (b) is the image obtained by the block gauge p (4) at the position close to the = focus position. Figure 4 (5) shows the block height of the block at a slightly bifocal position. Figure 4 (4) is the block image height in the image obtained from the location of the distance, the image obtained by the position can be obtained by a set of images obtained by A, ,, and heart, according to the focus Indicator 1357973, ιυυ. π. οι The year of the month is replacing the page value for Gaussian curve fitting to shape FIG five focus most of the response curve 233 after the step of obtaining the peak of the response curve of the focus example: Figure IV Α to FIG four D mathematical model of each of an image represented by the following formula (2M5):

Ae3^2 -(2) =Ae^Zi+l~c^2 -(3) I k+2 =AeB{Zk+2~C)1 -(4) 7々+3 =AeB{ZM~C) 2 -(5) where I represents brightness, Z represents depth of focus, C represents the position of the peak of the Gaussian equation curve, and A represents the magnitude of the peak, and B is the parameter that affects the width of the Gaussian equation curve. Since the Gaussian equation is used in a nonlinear mathematical model, the equations of equations (2) through (5) are followed by natural logarithms, which are converted into linear mathematical models, as shown in the following equations (6) to (9):

In/, =\nA + B(zk-C)2 (6) \nIk+l=\nA + B(zk+lC)2 (7) ln h+2 = In /4 + B(zk+2 - C)2 (8) h+3 = In ^ + B{zk+l - C)2 -(9) Solve three unknowns using four equations, evaluate them by means of the least squares method, find the best solution, and find The peak value C of the reaction curve whose total square error E is as shown in the following equation (10): k + 2 2 E = £ [ln /, . - In 5 (z (-C) 2 ... (10) / = ^ -1 100. llT-e^-- Year, month and day correction replacement hundred

dE dE _ dE - let stone, 沅, yuan = 〇, can obtain three equations, the simultaneous solution can solve the optimal values of parameters A, B and C, and the value of c is the peak value of the reaction curve. It can be found from Fig. 4 that the captured image undergoes two processes of defocusing-focusing-defocusing, and after evaluating the image sequence of Fig. 4 through the focus function evaluation, the focus index curve can be obtained as shown in Fig. 5. The peak value is the actual height value of the sample to be just. The marks (a), (b), (c) and (d) in Figure 5 represent the focus index values of Figures 4(a) to (d) and the focus fitted by the four-point fit. Deep response curve. From the correct focus response curve, the correct depth of the object to be tested can be obtained, and the concept of standard deviation in statistics is used as the basis for evaluating the depth response curve. Next, the implementation device using the above method will be described. Please refer to Figure 6. 'This figure is a schematic diagram of an embodiment of the confocal micromorphology measuring device of the present invention. In the present embodiment, the confocal micromorphology measuring device 3 includes a light source modulating portion 30, a light splitting portion 31, a focus position adjusting portion 32, an image capturing portion 33, and a processing and control unit 34. The light source modulating unit 30 is electrically connected to the processing and control unit 34. The light source modulating unit 30 can project a modulated light source 91 on a sample to be tested. In the embodiment, the light source modulating portion 30 further includes a light source body 300, a light array reflecting unit 301, and a lens group 302. The light source body 300 can project a diffused light source onto the light array reflecting unit 3〇1. The light array reflecting unit 301 reflects the light source projected by the light source body 3 to form a reflecting light source. In this embodiment, the light array reflecting unit 301 can be selected as a micro mirror element (digital miciO-mirror device, 12 1357973

DMD) is a digital modulation element such as a liquid crystal on siiiCC n, LC0S. The light source projected by the light source body 300 can be modulated by the aforementioned elements to form a checkerboard or sinusoidal pattern as shown in Fig. 2A or Fig. 2B.

Further, as shown in Fig. 7A, the figure is a schematic view of another embodiment of the light source modulation section of the present invention. In this embodiment, the light array reflecting unit 301 of FIG. 6 is replaced by a grating structure 303. The light source projected by the light source body is passed through the grating structure 303 to form a structured light source, and then the structured light source is modulated by the lens group 302. To form the modulated light source. A checkerboard or sinusoidal pattern as shown in Fig. 2A or Fig. 2B can also be produced by the embodiment of Fig. 7. In addition to the foregoing two methods, whether reflective or transmissive, to form a modulated light source, the grating structure may not be used for a relatively obvious object to be tested (such as a grain or a thick seam). 3 and the light array reflecting unit 301, but as shown in FIG. 7B, the light source emitted from the light source body 300 is directly penetrated through the lens group 302 to form the modulated light source and projected onto the object to be tested through the microscope objective. The lens group 302 is modulatable to form a modulated light source. In the present embodiment, the lens group 302 is composed of a plurality of convex lenses 3020 and 3023 and biasing elements 3021 and 3022. The lens 3020 is a plano-convex lens and the lens 3023 is a lenticular lens. The polarized elements 3021 and 3022 are linear polarized elements. When the light reduces the diffusion angle of the projection through the plano-convex lens 3 0 2 0, then the light intensity is adjusted by the line polarizer 3 〇 21 and the line bias pole 3022 so that the generated image has good contrast and strength, and finally the lenticular lens is used. 3023 then collimates the light to form a modulated light source 91. In addition, between the object to be tested 90 and the lens group 302, there is 13 13357973

100. li. 0 X-year and day correction replaces the I-splitting unit 35, which directs the modulated light source into a microscope objective 36 and projects onto the object to be tested 90. In this embodiment, the beam splitting unit 35 is a beam splitter. The object to be tested 90 is disposed on one of the multi-dimensional movement platforms 37, and the platform 37 is electrically connected to the processing and control unit 34. The carrying platform 37 can receive the control signals of the processing and control unit 34 for multi-dimensional position adjustment motion. The portion of the object to be reflected by the object to be tested 90 is referred to as the object light, and passes through the microscope objective 36 and then returns to the beam splitting unit 35. At this time, the object light 92 carries the focus information of the object to be tested 90, and the object light 92 is measured. The beam splitting element 38 changes the size of the light beam, and then enters the spectroscopic portion 31 to perform the step of splitting light. The attenuating element 38 described above can be a lens. The light splitting portion 31 is configured to split the light of the object reflected by the object to be detected to form a plurality of light groups 93 and 94, each of which has a plurality of track light. As shown in FIG. 8B, the figure is a schematic diagram of the light splitting portion of the present invention. In the embodiment, the light splitting portion 31 further has a light splitting module 310 and a light splitting element 311. The beam splitting module 310 is configured to split the reflected light of the object to be tested to form a plurality of tracked object light. The beam splitting element 311 is configured to split the plurality of track sub-meters into mutually orthogonal light groups 93 and 94. A further polarizing element 312 is formed between the beam splitting module 310 and the beam splitting element 311, which is a linear polarizer. The beam splitting module 310 has a first beam splitting unit 313 and a second beam splitting unit 314. The first beam splitting unit 313 has a polarizing beam splitter 3130 and a right angle mirror 3131, which can split the object light into two sub-objects light 95 and 96 which are polarized to 45 degrees. The unit 314 also has a polarizing beam splitter 3140 and a right angle mirror 3141. The two paths 14 separated by the first beam splitting unit 313 can be replaced by 13.57973 100. 11. 〇ι-- The 95 and 96 light are subdivided into four sub-objects to measure light 970~973. Finally, the linear polarizer 312 is used to convert the polarity of the four beams into a sub-object of 45 degrees. The polarizing beam splitter 3130 of the first beam splitting unit 313 is vertically aligned with the right angle mirror 3131, and the polarizing beam splitter 3140 of the second beam splitting unit 314 is horizontally aligned with the right angle mirror 3141. The beam splitting element can split the aforementioned four sub-measured object light into two mutually orthogonal light groups 93 and 94, each of which has four sub-test light. The two light groups 93 and 94 that have been split are called into the focus position adjusting portion 32. The focus position adjusting portion 32 further has two refractive elements 320 and 321 which respectively correspond to the light groups 93 and 94. The refracting elements 320 and 321 in the focus position adjusting portion 32 respectively modulate the focus positions of the plurality of sub-test objects of the plurality of light groups. As shown in FIG. 8B, the refractive element 32 is exemplified by a plurality of refractive regions 32〇〇32〇3 having different thicknesses for respectively corresponding to each of the associated light groups 93 and 94. Light. In this embodiment, each of the refractive elements 320 and 321 has a plurality of refractive regions 32 〇〇 32 32 〇 3 corresponding to the sub-test light in the optical group, and each of the refracting regions 3200 〜 3203 The thickness is not the same. For example, the light group (10) is taken as an example. Since the light group 93 has four sub-objects, the refractive element 32〇 is designed to have four refractive regions of 3 wins and 32 〇 3, each of which is refracted. The area/mother is measured by a sub-measurement light. By adjusting the thickness of the refractive elements 32 〇 and 32, the focus position of the light of each track is changed. The refraction = the part is a transparent material 'where the transparent material can be ::r' but not limited thereto. In addition, the refractive index of the refractive element = and the corresponding thickness can be adjusted as needed. 1357973 r朵.p'日条正正^ Returning to Figure 6, the image capturing unit 33 captures each of the light groups 93 and 94 to form a plurality of images. Each image has a plurality of images. Each of them corresponds to a sub-image of the multi-channel deflected object light. In the embodiment, the image capturing unit 33 has two image capturing units 330 and 331 corresponding to the light groups 93 and 94 to capture images of the light group. The image capturing units 330 and 331 can be selected as a charge couple device (CCD) or a Complementary Metal-Oxide-Semiconductor (CMOS). Since each light group has four deflected object light, and the focus position of each deflected object light is not the same, the image captured by the two image capture unit has four sub-images, each of which has four sub-images. A sub-image corresponds to the deflection of each object. By adjusting the linear polarizer 315 and the linear polarizer 312, the light intensity of the 2x2 image is the same, and the vertical pitch of the four beams can be adjusted and controlled by the shift misalignment of the polarizer 3131 right angle mirror 3131. The horizontal spacing of the four beams of light can be adjusted by the displacement misalignment of the polarizing beam splitter 314 〇 right angle mirror 314.1, and the focus position of the measuring light is changed by the adjustment of the refractive elements 320 and 321 of different thicknesses. The sensing units 330 and 331 simultaneously acquire images of different planes. The processing and control unit 34' is electrically connected to the carrying platform 37 carrying the object to be tested, the light source modulating portion 3A, and the image capturing portion 33. The processing and control unit 34 can receive the plurality of images to resolve the topographical features of the object to be tested. As for the analysis of the topography of the object to be tested, the surface features of the object to be tested can be analyzed by using the process shown in FIG. 3, and the image capturing units 330 and 331 are respectively measured by the two image capturing units. The different height images of the sample to be tested, thereby reconstructing the three-dimensional wheel of the sample to be tested, 1357973, helium 11. Ο l - • Fengyue 7 correction replaces the topography of the page, and its knot is shown in Figure 9. Please refer to FIG. 10 and FIG. 11 , wherein FIG. 10 is a schematic diagram of another embodiment of the confocal micromorphology measuring device of the present invention; and FIG. 11 is a schematic diagram of the light splitting portion of the embodiment of FIG. . The basic element in this embodiment is the same as the embodiment shown in Fig. 6, and the difference is mainly in the design of the beam splitting section. When the object light 92 changes its beam size through the mask 39 (Field Aperture), it is incident on the spectroscopic portion 31 to perform the process of splitting light. The polarization of the light is rotated by the linear polarizer 318. The linearly polarized light of 45 degrees passes through the first beam splitting unit 316. The first beam splitting unit has a pair of polarizing beamsplitters 3160 and 3161 and a right-angle mirror 3162. After passing through the first beam splitting unit 316, the object light is split into two bundles by one beam, and the polarities of the two beams are converted into linear polarized light of 45 degrees by the linear polarizing plate 315. Referring to FIG. 10 and FIG. 11 simultaneously, the polarized light passing through the linear polarizer 315 is then passed through the second beam splitting unit 317, which also has a pair of polarizing beamsplitters 3170 and 3171 and a right-angle mirror 3172. Rear. The polarizing beam splitter 3170, the polarizing beam splitter 3171 and the right angle mirror 3172 divide the two beams into four beams, and then convert the polarities of the four beams into 45-degree linear polarized light via the linear polarizing plate 312. The beam is split by the beam splitting element 311 to the image sensing unit and 331. Since the measurement light passes through the spectroscopic portion 31, the positions of the polarizing beamsplitters 3160, 3161, 3170, and 3171 in the first and second optical units 317 and the right-angle mirrors 3162 and 3172 are different. After the optical path is different, the focus position of the light source is different, so the image sensing sheets 7L 330 and 331 can simultaneously obtain different focus positions 17 1357973 ——--- The image of the year and month is replacing 1 . In order to enable the two image sensing units 330 and 331 to measure different depths of focus change, the refractive elements 320 and 321 of different thicknesses are placed in the optical paths of the image sensing units 330 and 331 by adjusting the refractive elements. The thickness of 320 and 321 causes the focus position of the measuring object to change (as shown in FIG. 8B), and the image sensing units 330 and 331 simultaneously obtain images of different depths of focus change, and measure the shape of different positions. Information, in order to instantly reconstruct the three-dimensional shape of the object to be tested. The polarizing beamsplitters 3160 and 3161 and the right-angle mirror 3162 in FIG. 10 and FIG. 11 are horizontally aligned; and the polarizing beamsplitters 3170 and 3171 and the right-angle mirror 3172 are vertically aligned, so that the image of the light output of the object is 2x2 distribution. By adjusting the polarity of the measuring object light by the linear polarizing plates 318, 315 and 312, the light intensity of the 2x2 image is the same, and the horizontal spacing of the four beams can be adjusted and controlled by the movement misalignment of the right angle mirror 3162. The vertical spacing of the four beams of light can be adjusted by the displacement of the right-angle mirror 3172. By adjusting the thicknesses 320 and 321, the focus position of the object light is changed, so that the image sensing unit 330 and the shirt image are sensed. The measuring unit 331 simultaneously acquires images of two different depths of focus change. The above description is only an embodiment of the present invention, and when it is not possible to change by 2 = turtle circumference, that is, the equivalent of the patent application scope of the present invention will remain unchanged. The gist of the present invention is also considered to be a further implementation of the present invention without departing from the scope of the present invention. In view of the above, the confocal microtopography measurement method provided by the present invention can accurately and quickly complete the global three-dimensional contour measurement to meet the 'requirement' and thereby improve the competitiveness of the industry and drive the surrounding 13.57973.狮. ίί· oi Revised the development of the replacement page industry, Cheng has already met the requirements for applying for inventions as stipulated in the invention patent law. Therefore, the application for invention patents is submitted according to law. Please ask the review committee to allow time for the benefit. Examine and grant the patent as a prayer. 1357973 : 侃 ❹仏 ❹仏 ❹仏 正 正 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 Figure 1 B is the intention of the object to be tested. 2A and 2B are schematic diagrams of the modulation light source of the present invention. FIG. 3 is a schematic flow chart of an embodiment of a reconstructed topography feature of the present invention. Figure 4 (aMd) is a schematic diagram of structured light stripe images at different focus positions. Figure 5 is a schematic diagram of the focused reaction curve according to Figure 4. ® Figure 6 is a schematic diagram of an embodiment of the confocal micromorphology measuring device of the present invention. Fig. 7A is a schematic view showing another embodiment of the light source modulation unit of the present invention. Fig. 7B is a schematic view showing still another embodiment of the light source modulation unit of the present invention. Figure 8A is a schematic view of the light splitting portion of the present invention. Figure 8B is a schematic view of a refractive element of the present invention. Figure IX is a schematic diagram of the results of three-dimensional contour topography analysis. Figure 10 is a schematic diagram of another embodiment of the confocal micromorphology measuring device of the present invention. Figure 11 is a schematic view showing the light splitting portion of the embodiment of Figure 10. [Main component symbol description] 2 - Confocal micromorphology measurement method 20~23_Step 3-Confocal micromorphology measuring device 20 1357973 Rat I1. Month 01

The beam is replacing I 30 - the light source modulation section 300 - the light source body 30, the light array reflection unit 3 0 2 - the lens group 3020, 3023 - the convex lens 3021, the 3022-polar element 303 - the grating structure 31 - the beam splitting section 310 - the beam splitting Module 311 - Beam splitting element 312 - Polarizing element 313 - First beam splitting unit 3130 - Polarizing beam splitter 3131 - Right angle mirror 314 - Second beam splitting unit 3140 - Polarizing beam splitter 3141 - Right angle mirror 315 - Linear offset Pole piece 316 - First beam splitting unit 3160 - Polarizing beam splitter 3161 - Polarizing beam splitter 3162 - Right angle mirror 317 - Second beam splitting unit 21 1357973 ' m. ιι. 04-- '. Year, month, and day are replacing 1 3170 - polarized beam splitter 3171 - polarized beam splitter 3172 - right angle mirror 318 - polarized beam splitter 32 - focus position adjusting portion 320, 321 - refractive element 3200 ~ 3203 - refractive region 33 - Image capturing unit 330, 331 - image capturing unit 34 - processing and control unit 35 - beam splitting unit 36 - microscope objective 37 - carrying platform 38 - contracting element 39 - mask 90 - object to be tested 901 ~ 903 - surface 91- Modulation source 92- Measure light 93, 94-light group 95, 96-sub-object light 22

Claims (2)

i (XWW replacement page, patent application scope: A confocal micromorphology measurement method, which comprises the following steps: (a) projecting a modulated light source onto a test object; (b) reflecting by the test object Measuring light splitting to form a complex array of light groups, each light group having a plurality of test object lights; (c) respectively changing the focus position of the sub-test light of each light group; and (d) according to the steps (c) obtaining the sub-object light to reconstruct a topographical feature of the object to be tested, wherein the step (d) further comprises the following steps: (dl) extracting each sub-measure light having a different focus position Corresponding image; (d2) obtaining a focus index value of each corresponding image; (d3) fitting a focus index curve according to a focus index value of each corresponding image; and (d4) finding the focus index curve The method of measuring a confocal micromorphology according to the first aspect of the invention, wherein the modulated light source has a light and dark pattern. Step (c) t change The method of focusing the position is to respectively pass each of the sub-test objects in each light group through a deflecting plate of different thickness to change the focus position of each sub-measurement light. A confocal micro-morphology measuring device, including A light source modulating portion that projects a modulated light source to a test object 23 m to replace a page-light splitting portion, which is capable of splitting the light of the object reflected by the object to be detected to form a plurality of light groups Each of the light groups has a plurality of tracked object light; a focus position adjusting portion that respectively modulates the plurality of track object light of the plurality of light groups such that each of the sub-objects has different focus positions; The image capturing unit respectively captures each light group to form a plurality of images, each of which has a plurality of sub-images respectively corresponding to the sub-measurement light; and a processing and control unit coupled to the light source The modulation unit and the image capturing unit are electrically connected, and the processing and control unit can receive the plurality of images to parse the topographical features of the object to be tested. 5. As described in claim 4 a light micro-morphology measuring device, wherein the light source modulating portion further comprises: a light source body; a light array reflecting unit that reflects the light source projected by the light source body to form a reflecting light source; a lens group The reflected light source can be modulated to form the modulated light source; and a microscope objective can direct the modulated light source to the object to be tested. 6. Confocal micromorphology as described in claim 5 The measuring device further has a light splitting unit, which can guide the modulated light source to enter a 24 1357973 ΐ〇〇 11. 11. 修正 月 修正 替换 替换 替换 替换 修正 修正 7. 7. 7. 7. 7. 7. 7. 7. 7. 7. 7. 7. 7. The confocal micro-morphology measuring device according to claim 5, wherein the light array reflecting unit is a digital micro-mirror device (DMD) or a Shiyuki liquid crystal element (1 iquid crystal The confocal micro-morphology measuring device according to claim 5, wherein the lens group is composed of a plurality of convex lenses and a plurality of polarizing elements. 9. The confocal micro-morphology measuring device according to claim 4, wherein the light source modulating portion further comprises: a light source body; a grating structure that allows the light source projected by the light source body to penetrate And forming a structured light source; a lens group modulating the structured light source to form the modulated light source; and a microscope objective for guiding the modulated light source to the object to be tested. 10. The confocal micro-morphology measuring device of claim 4, wherein the light source modulating portion further comprises: a light source body; a lens group modulating a light source emitted by the light source body to form the light source A modulated light source; and a microscope objective that directs the modulated light source to the object to be tested. 25 1357973 雠· lUlii 月月日条正正页11. The confocal micromorphology measuring device according to claim 4, wherein the image capturing portion further has a plurality of image capturing components, respectively Corresponding to the plurality of light groups. 12. The confocal micro-morphology measuring device according to claim 4, wherein the spectroscopic portion further comprises: a spectroscopic module, wherein the reflected light of the object to be tested is split to form a plurality of sub-meters And a light splitting component that splits the plurality of tracked object light into mutually orthogonal groups of light. Spring 13. The confocal micro-morphology measuring device according to claim 12, wherein the beam splitting module and the beam splitting element further have a polarizing element. 14. The confocal micro-morphology measuring device of claim 12, wherein the spectroscopic module further comprises: a first beam splitting unit that splits the object light into two sub-meters; A second beam splitting unit that splits the two sub-meters into four detectors. 15. The confocal micro-morphology measuring device of claim 14, wherein the first beam splitting unit and the second beam splitting unit further have a polarizing element. 16. The confocal micromorphology measuring device of claim 14, wherein the first beam splitting unit and the second beam splitting unit each have a polarizing beam splitter and a right angle mirror. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Each has a pair of polarizing beamsplitters and a right-angle mirror. 18. The confocal microtopography measuring apparatus according to claim 17, wherein the pair of polarizing beams and the right angle mirror of the first beam splitting unit are horizontally aligned, and the second beam splitting unit is The polarizing beamsplitters and the right angle mirrors are placed in vertical alignment. 19. The confocal micro-morphology measuring device of claim 17, wherein the first beam splitting unit further has a polarizing element and a mask adjacent to one side of the object to be tested. 20. The confocal micromorphology measuring device according to claim 4, wherein the focus position adjusting portion further has a plurality of refractive elements respectively corresponding to the plurality of light groups, each of the refractive elements There are a plurality of refractive regions having different thicknesses to respectively correspond to each of the sub-components in the associated light group. 21. The confocal micromorphology measuring device of claim 20, wherein the refractive element is a transparent material. 22. The confocal micromorphology measuring device of claim 21, wherein the transparent material is one of a glass and a polymer material. 23. The confocal microtopography measuring device according to claim 4, wherein the object to be tested is further disposed on a carrying platform capable of multi-dimensional movement, the carrying platform and the processing and control unit Electrical connection. 24. Confocal microscopic topography measurement device as described in claim 4 of the patent scope 27 1357973 100. It Oil- The year and month are replacing the page, where the modulated light source has a light and dark pattern. 28