Super spectral line scanning 3D measuring device
Technical Field
The utility model relates to a 3D measures technical field, especially relates to a 3D measuring method and device based on hyperspectral spectrum.
Background
In the existing 3D measurement technology, there are mainly structured light 3D scanning, laser projection triangulation measurement, and spectral confocal measurement. The structured light 3D scanning technology is developed earlier, and the measurement efficiency is high due to surface measurement, but the precision is low, so that the method cannot be applied to high-precision measurement; in the laser projection triangulation measurement, because a triangular area needs to be formed, a shadow area is easily formed during measurement, the shadow area cannot be measured, the method cannot accurately measure the transparent material, and cannot measure a large arc surface; the recently developed high-precision measurement method of the spectral confocal measurement has high precision and overcomes the defects of the laser projection triangulation method, but the efficiency of the measurement is greatly reduced due to the point measurement, and the comprehensive scanning of the product cannot be rapidly completed.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a confocal measuring device based on hyperspectral, through adopting the bar light source, realize measuring the line scanning of object for scanning speed.
In order to achieve the above object, the present invention provides an ultra-spectral line scanning 3D measuring device and a measuring method, including a light source 20, an optical head 30, a light measuring device 40, and a processor 50, wherein the optical head 30 is below the light measuring device 40, and the light source 20 is on one side of the optical head 30;
wherein:
the light source 20 emits multi-color stripe light with various wavelengths, and the shape of the light is linear.
The optical head 30 comprises an objective lens 31 and a beam splitter 32, wherein the objective lens 31 converges light beams with multiple wavelengths at different positions, so that the light beams can form a complete focal line at different height positions;
the light detector 40 includes a filter plate 41, a collimating lens 42, a grating 43, an imaging lens 44, and an area array sensor 45;
the filter plate 41 is made of opaque material, and a slit is formed in the middle of the filter plate 41, so that light rays converged therein can pass through the slit;
the collimating lens 42 makes the light passing through the filter plate 41 uniformly irradiate the grating 43;
the grating 43 diffracts uniform light, and the deflection angles of the light with different wavelengths are different;
the imaging lens 44 images the deflected light on the area array sensor 45.
The processor 50 is connected with the area array sensor 45 of the light detector 40 through a signal cable 46;
the beam splitter 32 is installed between the objective lens 31 and the slit of the filter plate 41, and can reflect the polychromatic light beam emitted from the light source 20 to the objective lens 31 through the beam splitter 32, so that the light reflected by the object is transmitted to the filter plate through the beam splitter 32 along a coaxial line, and the purpose that the incident light and the reflected light of the objective lens 31 are coaxial is achieved.
The hyper spectral line scanning 3D measuring device is characterized in that: the beam splitter 32 is a semi-transparent flat mirror and is placed at an angle of 45 degrees with the light source.
The hyper spectral line scanning 3D measuring device is characterized in that: the light source 20 adopts a white LED as a light source and emits linear scattered light; the wavelength of the white light W of a plurality of visible light beams with different wavelengths is about 450nm to 660nm from the blue wavelength range to the red wavelength range, the light source 20 is positioned at the side, and the light horizontally irradiates the beam splitter.
The hyper spectral line scanning 3D measuring device is characterized in that: the area array sensor 45 may be a CCD area array sensor or a CMOS area array sensor.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the measurement method specifically comprises the following steps:
first-step imaging L: placing the needed object 10 to be scanned below the objective lens 31, wherein the light source 20 horizontally irradiates the beam splitter 32, a part of light is reflected to the objective lens 31 through the beam splitter 32, and under the action of the objective lens 31, the light irradiates the surface of the object 10, and an image L is formed on the surface of the object 10;
the second step measures the position information of the imaging L and the spectral information of the corresponding position: reflected light with other wavelengths except the light of the imaging L on the surface of the object can be imaged in the direction of the filter plate (41) through the objective lens 31, according to the optical theory, only the reflected light F focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, the purpose of filtering the light except the light of the imaging L is achieved, and the position information of the imaging L is determined;
the collimating lens 42 makes the light penetrating through the filter plate 41 uniformly irradiate on the grating 43, the grating 43 makes the uniform light diffract, the specific structure of the grating 43 is not limited here, the deflection angles of the light with different wavelengths are different, the imaging lens 44 makes the deflected light image on the area array sensor to form a set of rough curves S, and the spectral information can be judged according to the position difference received by the area array sensor 45;
the third step: the signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 functions as a control unit and a calculation unit of the entire apparatus.
The fourth step: the processor 50 receives signals from the area array sensor 45 to calculate surface position information of the object 10 at the imaging area L to be measured and corresponding height information.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the fourth step is calculated as follows
(1) And calculating the pixel position. A curve formed by the pixel points is fitted according to the spectral transmission on the area array sensor 45. In the X direction, the number of pixels in the X direction can be determined according to the imaged area; in the Z direction, the reflected light is still impure and has light with other wavelengths after being filtered by the filter plate, so that when a pixel point in the Z direction is taken, a peak point of light intensity is found in the Z direction, and the pixel point is determined by the peak point;
(2) correcting the actual position: the positions of the pixel points and the actual coordinates are not in a linear relation no matter in the X direction or the Z direction, so that correction is needed, and the actual coordinates are determined according to a correction table; thus, the height (z) and transverse width (x) information of each point position of the projection line position on the surface of the object are determined.
(3) Linear scanning and splicing: moving the measuring device or moving the object to be measured, performing 3D measurement on the surface of the object in a line scanning mode, splicing all line scanning data to obtain length information (Y) of the object in the Y direction, and further obtaining a complete surface cloud point diagram, and fitting the cloud point diagram into a curved surface.
A measuring method of a hyper spectral line scanning 3D measuring device is characterized in that: the objective lens 31 can generate axial chromatic aberration compared with a common lens; specifically, the objective lens 31 converges incident light at various positions on the plane P, light with different wavelengths converges at horizontal lines L with different heights, and the heights of formed focal lines with the same wavelength are the same; the white light W includes visible light with several wavelengths, and is converged at mutually different focal lines L corresponding to the wavelengths under the action of the objective lens 31, so that L is in the plane P.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the area array sensor 45 has X, Z two directions, wherein the X direction represents position information along the measurement line L, and the Z direction represents spectral information at a certain position.
As described above, according to the utility model discloses, through removing measuring device or removing the object that awaits measuring to the mode of line scanning carries out 3D to the object surface and measures, splices each line scanning data, thereby obtains complete surperficial cloud point picture, has looked into the curved surface according to these cloud point pictures. 3D measurement of an object can be achieved with high accuracy.
Drawings
The present invention will be further explained with reference to the accompanying drawings.
Fig. 1 is the utility model discloses hyper spectral line scans 3D measuring device's schematic structure.
Fig. 2 is the utility model discloses hyper spectral line scanning 3D measuring device objective line scanning schematic diagram.
Fig. 3 is the utility model discloses hyper spectral line scans 3D measuring device photometer formation of image light path schematic diagram.
Fig. 4 is the utility model discloses hyper spectral line scans 3D measuring device treater is according to the 3D measurement schematic diagram of area array sensor signal.
Fig. 5 is a flow chart of a measuring method of the hyper spectral line scanning 3D measuring device of the present invention.
Fig. 6 is a flowchart of the calculation method of the hyper spectral line scanning 3D measurement device and the measurement method processor of the present invention.
Detailed Description
Examples of the present invention will now be described with reference to the accompanying drawings.
Fig. 1 is the structure schematic diagram of the hyperspectral 3D measurement device of the present invention.
The utility model discloses a hyper spectral line scanning 3D measuring device and measurement includes a light source 20, an optical head 30, a light measuring device 40, a processor 50, the optical head 30 is under the light measuring device 40, the light source 20 is at one side of the optical head 30;
the light source 20 emits multi-color stripe light with various wavelengths, and the shape of the light is linear. The light source 20 adopts a white LED as a light source and emits linear scattered light; the wavelength of the white light W of a plurality of visible light beams with different wavelengths is about 450nm to 660nm from the blue wavelength range to the red wavelength range, the light source 20 is positioned at the side, and the light horizontally irradiates the beam splitter.
The optical head 30 includes an objective lens 31 and a beam splitter 32, wherein the objective lens 31 converges light beams with multiple wavelengths at different positions, so that the light beams can form a complete focal line at different height positions.
The beam splitter 32 is installed between the objective lens 31 and the filter plate 41, the thin slit of the filter plate 41 faces the objective lens 31, and the polychromatic light beam emitted from the light source 20 can be reflected to the objective lens 31 through the beam splitter 32, so that the light reflected by the object is transmitted to the filter plate through the beam splitter 32 along a coaxial line, and the purpose that the incident light and the reflected light of the objective lens are coaxial is achieved. The light source 20 emits light, a part of which is reflected to the objective lens 31 through the beam splitter 32, and the light irradiates the surface of the object under the action of the objective lens 31 to be imaged on the surface of the object. The beam splitter 32 is a semi-transparent flat mirror placed at an angle of 45 ° to the light source.
As shown in fig. 2, the objective lens 31 is more capable of generating axial chromatic aberration than a general lens. Specifically, the objective lens 31 converges incident light at various positions on the plane P, light of different wavelengths converges at horizontal lines L of different heights, and heights of formed focal lines of the same wavelength are the same. The white light W includes visible light with several wavelengths, and is converged at mutually different focal lines L corresponding to the wavelengths under the action of the objective lens 31, so that L is in the plane P.
Visible light beams of several wavelengths in the white light W are separated from each other on the focal plane, and light of different wavelengths are imaged at different positions on the focal plane, respectively. Note that only a schematic of visible light imaging at four wavelengths is given in fig. 2.
If the surface height of the object 1 to be measured is different, the light wavelength of line imaging at different positions on the surface is different, and the color information reflects the height information of the surface of the object. In FIG. 2, the four wavelengths of light are shown as λ1、λ2、λ3、λ4The images of the four wavelengths in the focal plane P are respectively L1、L2、L3、L4Wherein imaging L2、L3Respectively at the high and low positions of the object 1, imaging L1、 L4Then outside the object surface, a number L of images on the object surfacenAnd finally converge into a projection line L.
Meanwhile, the objective lens 31 condenses the visible light reflected by the image L focused on the object surface onto the filter plate 41 of the light detector 40. Specifically, the image L reflects the scattered light, the reflected light is converged by the objective lens 31, the reflected light F passes through the beam splitter 32, and a part of the reflected light F is transmitted to the filter plate 41.
The light meter 40 is for measuring positional information of the imaging L and spectral information of the corresponding position. The light detector 40 includes a filter plate 41, a collimator lens 42, a grating 43, an imaging lens 44, and an array sensor 45;
the filter plate 41 is made of opaque material, and a slit is formed in the middle of the filter plate 41 to allow the light rays converged therein to pass therethrough. Specifically, reflected light with other wavelengths besides the light of the imaging L is imaged in the direction of the filter plate 41 through the objective lens 31 on the surface of the object, and according to the optical theory, only the reflected light focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, and the purpose of filtering the light except the imaging L is achieved.
As shown in fig. 3, the collimating lens 42 allows the light transmitted through the filter plate 41 to be uniformly irradiated on the grating 43. The grating diffracts uniform light, the specific structure of the grating 43 is not limited, the deflection angles of the light with different wavelengths are different, the imaging lens 44 images the deflected light on the area array sensor to form a rough curve S, and the spectral information of the deflected light can be judged according to the position difference received by the area array sensor 45.
As shown in fig. 4, the area array sensor 45 includes a plurality of light receiving elements in two directions, and each light receiving element can receive spectral information and positional information of the reflected light F. The area array sensor can adopt a CCD area array sensor or a CMOS area array sensor.
The area array sensor has X, Z two directions, wherein the X direction represents the position information along the measuring line L, the Z direction represents the spectrum information of a certain position, and the position imaged on the area array sensor depends on the wavelength and the position parameter of the reflected light F.
The signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 serves as a control section and a calculation section of the entire apparatus, and the processor 55 receives signals from the area array sensor 45 to calculate position information at the surface L of the object to be measured and corresponding height information.
As shown in fig. 5 and 6, a measurement method of a hyper spectral line scanning 3D measurement device specifically includes the following steps:
first-step imaging L: placing the needed object 10 to be scanned below the objective lens 31, wherein the light source 20 horizontally irradiates the beam splitter 32, a part of light is reflected to the objective lens 31 through the beam splitter 32, and under the action of the objective lens 31, the light irradiates the surface of the object 10, and an image L is formed on the surface of the object 10;
the second step measures the position information of the imaging L and the spectral information of the corresponding position: reflected light with other wavelengths except the light of the imaging L on the surface of the object can be imaged in the direction of the filter plate (41) through the objective lens 31, according to the optical theory, only the reflected light F focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, the purpose of filtering the light except the light of the imaging L is achieved, and the position information of the imaging L is determined;
the collimating lens 42 makes the light penetrating through the filter plate 41 uniformly irradiate on the grating 43, the grating 43 makes the uniform light generate diffraction, the specific structure of the grating 43 is not limited, the deflection angles of the light with different wavelengths are different, the imaging lens 44 makes the deflected light image on the area array sensor to form a set of rough curves S, and the spectral information can be judged according to the different positions received by the area array sensor 45;
the third step: the signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 functions as a control unit and a calculation unit of the entire apparatus.
The fourth step: the processor 50 receives signals from the area array sensor 45 to calculate surface position information of the object 10 at the imaging area L to be measured and corresponding height information.
The fourth step is specifically calculated as follows:
(1) and calculating the pixel position. A curve formed by the pixel points is fitted according to the spectral transmission on the area array sensor 45. In the X direction, the number of pixels in the X direction can be determined according to the imaged area; in the Z direction, the reflected light is still impure and has light with other wavelengths after being filtered by the filter plate, so that when a pixel point in the Z direction is taken, a peak point of light intensity is found in the Z direction, and the pixel point is determined by the peak point;
(2) correcting the actual position: the positions of the pixel points and the actual coordinates are not in a linear relation no matter in the X direction or the Z direction, so that correction is needed, and the actual coordinates are determined according to a correction table; thus, the height (z) and transverse width (x) information of each point position of the projection line position on the surface of the object are determined.
(3) Linear scanning and splicing: moving the measuring device or moving the object to be measured, performing 3D measurement on the surface of the object in a line scanning mode, splicing all line scanning data to obtain length information (Y) of the object in the Y direction, and further obtaining a complete surface cloud point diagram, and fitting the cloud point diagram into a curved surface.
Further, in the above description, white light is used as light including a plurality of visible light beams for position measurement. The present invention is not limited thereto, and is also applicable to the use of other broadband lights. For example, ultraviolet rays or infrared rays may have different wavelengths.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for the skilled worker in this technical field, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.