CN111664805A - Super spectral line scanning 3D measuring device and measuring method - Google Patents
Super spectral line scanning 3D measuring device and measuring method Download PDFInfo
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- CN111664805A CN111664805A CN201910168595.4A CN201910168595A CN111664805A CN 111664805 A CN111664805 A CN 111664805A CN 201910168595 A CN201910168595 A CN 201910168595A CN 111664805 A CN111664805 A CN 111664805A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
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Abstract
The invention mainly aims to provide a hyperspectral-based 3D measuring device, which realizes line scanning measurement on an object by adopting a linear light source and accelerates the scanning speed. In order to achieve the above object, the present invention provides an ultra-spectral line scanning 3D measuring device and a measuring method, including a light source 20, an optical head 30, a light detector 40, and a processor 50, wherein the optical head 30 is below the light detector 40, and the light source 20 is at one side of the optical head 30; the optical head 30 includes an objective lens 31 and a beam splitter 32, the light detector 40 includes a filter plate 41, a collimator lens 42, a grating 43, an imaging lens 44 and an area array sensor 45, and the processor 50 is connected to the light detector 40 through a signal cable 46 and the area array sensor 45.
Description
Technical Field
The invention relates to the technical field of 3D measurement, in particular to a hyperspectral-based 3D measurement method and device.
Technical Field
In the existing 3D measurement technology, there are mainly structured light 3D scanning, laser projection triangulation measurement, and spectral confocal measurement. The structured light 3D scanning technology is developed earlier, and the measurement efficiency is high due to surface measurement, but the precision is low, so that the method cannot be applied to high-precision measurement; in the laser projection triangulation measurement, because a triangular area needs to be formed, a shadow area is easily formed during measurement, the shadow area cannot be measured, the method cannot accurately measure the transparent material, and cannot measure a large arc surface; the recently developed high-precision measurement method of the spectral confocal measurement has high precision and overcomes the defects of the laser projection triangulation method, but the efficiency of the measurement is greatly reduced due to the point measurement, and the comprehensive scanning of the product cannot be rapidly completed.
Disclosure of Invention
The invention mainly aims to provide a hyperspectral confocal measuring device, which adopts a strip-shaped light source to realize line scanning measurement on an object and accelerate the scanning speed.
In order to achieve the above object, the present invention provides an ultra-spectral line scanning 3D measuring device and a measuring method, including a light source 20, an optical head 30, a light detector 40, and a processor 50, wherein the optical head 30 is below the light detector 40, and the light source 20 is at one side of the optical head 30;
wherein:
the light source 20 emits multi-color stripe light with various wavelengths, and the shape of the light is linear.
The optical head 30 comprises an objective lens 31 and a beam splitter 32, wherein the objective lens 31 converges light beams with multiple wavelengths at different positions, so that the light beams can form a complete focal line at different height positions;
the light detector 40 includes a filter plate 41, a collimating lens 42, a grating 43, an imaging lens 44, and an area array sensor 45;
the filter plate 41 is made of opaque material, and a slit is formed in the middle of the filter plate 41, so that light rays converged therein can pass through the slit;
the collimating lens 42 makes the light passing through the filter plate 41 uniformly irradiate the grating 43;
the grating 43 diffracts uniform light, and the deflection angles of the light with different wavelengths are different;
the imaging mirror 44 images the deflected light onto an area array sensor 45.
The processor 50 is connected with the area array sensor 45 of the light detector 40 through a signal cable 46;
the beam splitter 32 is installed between the objective lens 21 and the slit of the filter plate 41, and can reflect the polychromatic light beam emitted from the light source 20 to the objective lens 31 through the beam splitter 32, so that the light reflected by the object is transmitted to the filter plate through the beam splitter 32 along a coaxial line, and the purpose that the incident light and the reflected light of the objective lens are coaxial is achieved.
The hyper spectral line scanning 3D measuring device is characterized in that: the beam splitter 32 is a semi-transparent flat mirror and is placed at an angle of 45 degrees with the light source.
The hyper spectral line scanning 3D measuring device is characterized in that: the light source 20 adopts a white LED as a light source and emits linear scattered light; the wavelength of the white light W of a plurality of visible light beams with different wavelengths is about 450nm to 660nm from the blue wavelength range to the red wavelength range, the light source 30 is positioned at the side, and the light horizontally irradiates the beam splitter.
The hyper spectral line scanning 3D measuring device is characterized in that: the area array sensor 45 may be a CCD area array sensor or a CMOS area array sensor.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the measurement method specifically comprises the following steps:
first-step imaging L: placing the needed object 10 to be scanned below the objective lens 31, wherein the light source 20 horizontally irradiates the beam splitter 32, a part of light is reflected to the objective lens 31 through the beam splitter 32, and under the action of the objective lens 31, the light irradiates the surface of the object 10, and an image L is formed on the surface of the object 10;
the second step measures the position information of the imaging L and the spectral information of the corresponding position: reflected light with other wavelengths except the light of the imaging L on the surface of the object can be imaged in the direction of the filter plate (41) through the objective lens 31, according to the optical theory, only the reflected light F focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, the purpose of filtering the light except the light of the imaging L is achieved, and the position information of the imaging L is determined;
the collimating lens 42 makes the light penetrating through the filter plate 41 uniformly irradiate on the grating 43, the grating 43 makes the uniform light diffract, the specific structure of the grating 43 is not limited here, the deflection angles of the light with different wavelengths are different, the imaging lens 44 makes the deflected light image on the area array sensor to form a set of rough curves S, and the spectral information can be judged according to the position difference received by the area array sensor 45;
the third step: the signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 functions as a control unit and a calculation unit of the entire apparatus.
The fourth step: the processor 50 receives signals from the area array sensor 45 to calculate surface position information of the object 10 at the imaging area L to be measured and corresponding height information.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the fourth step is calculated as follows
(1) And calculating the pixel position. And fitting a curve formed by the pixel points according to the spectral transmission on the area array sensor (45). In the X direction, the number of pixels in the X direction can be determined according to the imaged area; in the Z direction, the reflected light is still impure and has light with other wavelengths after being filtered by the filter plate, so that when a pixel point in the Z direction is taken, a peak point of light intensity is found in the Z direction, and the pixel point is determined by the peak point;
(2) correcting the actual position: the positions of the pixel points and the actual coordinates are not in a linear relation no matter in the X direction or the Z direction, so that correction is needed, and the actual coordinates are determined according to a correction table; thus, the height (z) and transverse width (x) information of each point position of the projection line position on the surface of the object are determined.
(3) Linear scanning and splicing: moving the measuring device or moving the object to be measured, performing 3D measurement on the surface of the object in a line scanning mode, splicing all line scanning data to obtain length information (Y) of the object in the Y direction, and further obtaining a complete surface cloud point diagram, and fitting the cloud point diagram into a curved surface.
A measuring method of a hyper spectral line scanning 3D measuring device is characterized in that: the objective lens (31) can generate axial chromatic aberration compared with a common lens; specifically, the objective lens (31) converges incident light at various positions on the plane P, light with different wavelengths converges at horizontal lines L with different heights, and the heights of formed focal lines with the same wavelength are the same; the white light W contains visible light with a plurality of wavelengths, and the visible light is converged at mutually different focal lines L corresponding to the wavelengths under the action of the objective lens (31), so that the L are all in a plane P.
The measuring method of the hyper spectral line scanning 3D measuring device is characterized in that: the area array sensor (45) has X, Z two directions, wherein the X direction represents the position information along the measuring line L, and the Z direction represents the spectrum information of a certain position.
As described above, according to the present invention, by moving the measuring device or moving the object to be measured, 3D measurement is performed on the surface of the object in a line scanning manner, and the respective line scanning data are spliced to obtain a complete surface cloud point map from which a curved surface is fitted. 3D measurement of an object can be achieved with high accuracy.
Drawings
The invention will be further explained with reference to the drawings.
Fig. 1 is a schematic structural diagram of a hyper spectral line scanning 3D measurement apparatus and a measurement method according to the present invention.
Fig. 2 is a schematic view of objective scanning of the hyper spectral line scanning 3D measurement apparatus and the measurement method of the present invention.
Fig. 3 is a schematic diagram of an imaging optical path of a light detector in the hyper spectral line scanning 3D measuring device and the measuring method of the present invention.
FIG. 4 is a schematic diagram of the 3D measurement of the hyper spectral line scanning 3D measurement device and the measurement method according to the area array sensor signal.
FIG. 5 is a flow chart of a measuring method of the hyper spectral line scanning 3D measuring device of the present invention.
FIG. 6 is a flowchart of a hyper spectral line scanning 3D measurement apparatus and measurement method of the present invention.
Detailed Description
Examples of the present invention will now be described with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of the structure of a hyperspectral 3D measurement device of the invention.
The invention relates to a hyper spectral line scanning 3D measuring device and measurement, which comprises a light source 20, an optical head 30, a light detector 40 and a processor 50, wherein the optical head 30 is arranged below the light detector 40, and the light source 20 is arranged at one side of the optical head 30;
the light source 20 emits multi-color stripe light with various wavelengths, and the shape of the light is linear. The light source 20 adopts a white LED as a light source and emits linear scattered light; the wavelength of the white light W of a plurality of visible light beams with different wavelengths is about 450nm to 660nm from the blue wavelength range to the red wavelength range, the light source 30 is positioned at the side, and the light horizontally irradiates the beam splitter.
The optical head 30 includes an objective lens 31 and a beam splitter 32, wherein the objective lens 31 converges light beams with multiple wavelengths at different positions, so that the light beams can form a complete focal line at different height positions.
The beam splitter 32 is installed between the objective lens 31 and the filter plate 41, the thin slit of the filter plate 41 faces the objective lens 31, and the polychromatic light beam emitted from the light source 20 can be reflected to the objective lens 31 through the beam splitter 32, so that the light reflected by the object is transmitted to the filter plate through the beam splitter 32 along a coaxial line, and the purpose that the incident light and the reflected light of the objective lens are coaxial is achieved. The light source 20 emits light, a part of which is reflected to the objective lens 31 through the beam splitter 32, and the light irradiates the surface of the object under the action of the objective lens 31 to be imaged on the surface of the object. The beam splitter 32 is a semi-transparent flat mirror placed at an angle of 45 ° to the light source.
As shown in fig. 2, the objective lens 31 is more capable of generating axial chromatic aberration than a general lens. Specifically, the objective lens 31 converges incident light at various positions on the plane P, light of different wavelengths converges at horizontal lines L of different heights, and heights of formed focal lines of the same wavelength are the same. The white light W includes visible light with several wavelengths, and is converged at mutually different focal lines L corresponding to the wavelengths by the objective lens 22, so that L is in the plane P.
Visible light beams of several wavelengths in the white light W are separated from each other on the focal plane, and light of different wavelengths are imaged at different positions on the focal plane, respectively. Note that only a schematic of visible light imaging at four wavelengths is given in fig. 2.
If the surface height of the object 1 to be measured is different, the light wavelength of line imaging at different positions on the surface is different, and the color information reflects the height information of the surface of the object. In FIG. 2, the four wavelengths of light are shown as λ1、λ2、λ3、λ4The images of the four wavelengths in the focal plane P are respectively L1、L2、L3、L4Wherein imaging L2、L3Respectively at the high and low positions of the object 1, imaging L1、L4Then outside the object surface, a number L of images on the object surfacenAnd finally converge into a projection line L.
Meanwhile, the objective lens 31 condenses the visible light reflected by the image L focused on the object surface onto the filter plate 41 of the light detector 40. Specifically, the image L reflects the scattered light, the reflected light is converged by the objective lens 31, the reflected light F passes through the beam splitter 32, and a part of the reflected light F is transmitted to the filter plate 41.
The light meter 40 is for measuring positional information of the imaging L and spectral information of the corresponding position. The light detector 40 includes a filter plate 41, a collimator lens 42, a grating 43, an imaging lens 44, and an array sensor 45;
the filter plate 41 is made of opaque material, and a slit is formed in the middle of the filter plate 41 to allow the light rays converged therein to pass therethrough. Specifically, reflected light with other wavelengths besides the light of the imaging L is imaged in the direction of the filter plate 41 through the objective lens 31 on the surface of the object, and according to the optical theory, only the reflected light focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, and the purpose of filtering the light except the imaging L is achieved.
As shown in fig. 3, the collimating lens 42 allows the light transmitted through the filter plate 41 to be uniformly irradiated on the grating 43. The grating diffracts uniform light, the specific structure of the grating 43 is not limited, the deflection angles of light with different wavelengths are different, the imaging lens 44 images the deflected light on the area array sensor to form a set of rough curves S, and the spectral information can be judged according to the position difference received by the area array sensor 45.
As shown in fig. 4, the area array sensor 45 includes a plurality of light receiving elements in two directions, and each light receiving element can receive spectral information and positional information of the reflected light F. The area array sensor can adopt a CCD area array sensor or a CMOS area array sensor.
The area array sensor has X, Z two directions, wherein the X direction represents the position information along the measuring line L, the Z direction represents the spectrum information of a certain position, and the position imaged on the area array sensor depends on the wavelength and the position parameter of the reflected light F.
The signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 serves as a control section and a calculation section of the entire apparatus, and the processor 55 receives signals from the area array sensor 45 to calculate position information at the surface L of the object to be measured and corresponding height information.
As shown in fig. 5 and 6, a measurement method of a hyper spectral line scanning 3D measurement device specifically includes the following steps:
first-step imaging L: placing the needed object 10 to be scanned below the objective lens 31, wherein the light source 20 horizontally irradiates the beam splitter 32, a part of light is reflected to the objective lens 31 through the beam splitter 32, and under the action of the objective lens 31, the light irradiates the surface of the object 10, and an image L is formed on the surface of the object 10;
the second step measures the position information of the imaging L and the spectral information of the corresponding position: reflected light with other wavelengths except the light of the imaging L on the surface of the object can be imaged in the direction of the filter plate (41) through the objective lens 31, according to the optical theory, only the reflected light F focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, the purpose of filtering the light except the light of the imaging L is achieved, and the position information of the imaging L is determined;
the collimating lens 42 makes the light penetrating through the filter plate 41 uniformly irradiate on the grating 43, the grating 43 makes the uniform light generate diffraction, the specific structure of the grating 43 is not limited, the deflection angles of the light with different wavelengths are different, the imaging lens 44 makes the deflected light image on the area array sensor to form a set of rough curves S, and the spectral information can be judged according to the different positions received by the area array sensor 45;
the third step: the signals output by the area array sensor 45 are sent to the processor 50 via the signal cable 46. The processor 50 functions as a control unit and a calculation unit of the entire apparatus.
The fourth step: the processor 50 receives signals from the area array sensor 45 to calculate surface position information of the object 10 at the imaging area L to be measured and corresponding height information.
The fourth step is specifically calculated as follows:
(1) and calculating the pixel position. A curve formed by the pixel points is fitted according to the spectral transmission on the area array sensor 45. In the X direction, the number of pixels in the X direction can be determined according to the imaged area; in the Z direction, the reflected light is still impure and has light with other wavelengths after being filtered by the filter plate, so that when a pixel point in the Z direction is taken, a peak point of light intensity is found in the Z direction, and the pixel point is determined by the peak point;
(2) correcting the actual position: the positions of the pixel points and the actual coordinates are not in a linear relation no matter in the X direction or the Z direction, so that correction is needed, and the actual coordinates are determined according to a correction table; thus, the height (z) and transverse width (x) information of each point position of the projection line position on the surface of the object are determined.
(3) Linear scanning and splicing: moving the measuring device or moving the object to be measured, performing 3D measurement on the surface of the object in a line scanning mode, splicing all line scanning data to obtain length information (Y) of the object in the Y direction, and further obtaining a complete surface cloud point diagram, and fitting the cloud point diagram into a curved surface.
Further, in the above description, white light is used as light including a plurality of visible light beams for position measurement. The present invention is not limited thereto and may also be applicable to the use of other broadband light. For example, ultraviolet rays or infrared rays may have different wavelengths.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for a worker skilled in the art, several modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (8)
1. An ultra-spectral scanning 3D measuring device, which is characterized by comprising a light source (20), an optical head (30), a light detector (40) and a processor (50), wherein the optical head (30) is arranged below the light detector (40), and the light source (20) is arranged on one side of the optical head (30);
wherein:
the light source (20) emits multi-color strip light with multiple wavelengths, and the shape of the light is linear.
The optical head (30) comprises an objective lens (31) and a beam splitter (32), wherein the objective lens (31) enables light beams with multiple wavelengths to converge at different positions, so that the light beams can form a complete focal line at different height positions;
the light detector (40) comprises a filter plate (41), a collimating lens (42), a grating (43), an imaging lens (44) and an area array sensor (45);
the light filter plate (41) is made of opaque materials, and a slit is formed in the middle of the light filter plate (41) and can enable light rays converged at the slit to pass through;
the collimating lens (42) enables the light rays passing through the filter plate (41) to be uniformly irradiated on the grating (43);
the grating (43) diffracts uniform light, and the deflection angles of the light with different wavelengths are different;
the imaging mirror (44) images the deflected light on an area array sensor (45);
the processor (50) is connected with the area array sensor (45) of the light detector (40) through a signal cable (46);
the beam splitter (32) is arranged between the objective lens (21) and the slit of the filter plate (41), and can enable the polychromatic light beam emitted from the light source (20) to be reflected to the objective lens (31) through the beam splitter (32), so that the light reflected by the object is transmitted to the filter plate through the beam splitter (32) along the same axis, and the purpose that the incident light and the reflected light of the objective lens are coaxial is achieved.
2. The hyperspectral line scanning 3D measurement device according to claim 1, wherein: the beam splitter (32) is a semi-transparent plane mirror and is arranged at an angle of 45 degrees with the light source.
3. The hyperspectral line scanning 3D measurement device according to claim 1, wherein: the light source (20) adopts a white LED as a light source and emits linear scattered light; the wavelength of the white light W of a plurality of visible light beams with different wavelengths is about 450nm to 660nm from the blue wavelength range to the red wavelength range, the light source 30 is positioned at the side, and the light horizontally irradiates the beam splitter.
4. The hyperspectral line scanning 3D measurement device according to claim 1, wherein: the area array sensor (45) can adopt a CCD area array sensor or a CMOS area array sensor.
5. The measurement method of the hyper-spectral line scanning 3D measurement device according to claim 1, characterized in that: the measurement method specifically comprises the following steps:
first-step imaging L: placing a needed object (10) to be scanned below the objective lens (31), horizontally irradiating the beam splitter (32) by the light source (20), reflecting a part of light to the objective lens (31) through the beam splitter (32), irradiating the light to the surface of the object (10) under the action of the objective lens (31), and imaging L on the surface of the object (10);
the second step measures the position information of the imaging L and the spectral information of the corresponding position: reflected light with other wavelengths except the light of the imaging L on the surface of the object can be imaged in the direction of the filter plate (41) through the objective lens (31), according to the optical theory, only the reflected light F focused on the surface of the object can be focused on the filter plate 41, and a slit is arranged at the focusing position, so that the reflected light of the imaging L can pass through, the purpose of filtering other light except the imaging L is achieved, and the position information of the imaging L is determined;
the collimating lens (42) enables the light rays penetrating through the filter plate (41) to be uniformly irradiated on the grating (43), the grating (43) enables the uniform light rays to be diffracted, the specific structure of the grating (43) is not limited, the deflection angles of the light rays with different wavelengths are different, the imaging lens (44) enables the deflected light rays to be imaged on the area array sensor to form a set of rough curves S, and the spectral information of the light rays can be judged according to different positions received by the area array sensor (45);
the third step: the signals output by the area array sensor (45) are sent to the processor (50) via a signal cable (46). A processor (50) as a control unit and a calculation unit of the entire apparatus;
the fourth step: the processor (50) receives signals from the area array sensor (45) to calculate surface position information and corresponding height information of the object (10) at the imaging area L to be measured.
6. The measurement method of the hyper-spectral line scanning 3D measurement device according to claim 5, characterized in that: the fourth step is calculated as follows
(1) And calculating the pixel position. And fitting a curve formed by the pixel points according to the spectral transmission on the area array sensor (45). In the X direction, the number of pixels in the X direction can be determined according to the imaged area; in the Z direction, the reflected light is still impure and has light with other wavelengths after being filtered by the filter plate, so that when a pixel point in the Z direction is taken, a peak point of light intensity is found in the Z direction, and the pixel point is determined by the peak point;
(2) correcting the actual position: the positions of the pixel points and the actual coordinates are not in a linear relation no matter in the X direction or the Z direction, so that correction is needed, and the actual coordinates are determined according to a correction table; thus, the height (z) and transverse width (x) information of each point position of the projection line position on the surface of the object are determined.
(3) Linear scanning and splicing: moving the measuring device or moving the object to be measured, performing 3D measurement on the surface of the object in a line scanning mode, splicing all line scanning data to obtain length information (Y) of the object in the Y direction, and further obtaining a complete surface cloud point diagram, and fitting the cloud point diagram into a curved surface.
7. The measurement method of the hyper-spectral line scanning 3D measurement device according to claim 5, characterized in that: the objective lens (31) can generate axial chromatic aberration compared with a common lens; specifically, the objective lens (31) converges incident light at various positions on the plane P, light with different wavelengths converges at horizontal lines L with different heights, and the heights of formed focal lines with the same wavelength are the same; the white light W contains visible light with a plurality of wavelengths, and the visible light is converged at mutually different focal lines L corresponding to the wavelengths under the action of the objective lens (31), so that the L are all in a plane P.
8. The measurement method of the hyper-spectral line scanning 3D measurement device according to claim 5, characterized in that: the area array sensor (45) has X, Z two directions, wherein the X direction represents the position information along the measuring line L, and the Z direction represents the spectrum information of a certain position.
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| CN114018159A (en) * | 2021-11-03 | 2022-02-08 | 内蒙古第一机械集团股份有限公司 | Method for measuring width of optical camouflage paint film diffusion overlapping area |
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| CN114018159A (en) * | 2021-11-03 | 2022-02-08 | 内蒙古第一机械集团股份有限公司 | Method for measuring width of optical camouflage paint film diffusion overlapping area |
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