CN103411559B - Based on the accurate confocal microstructure measuring method of angular spectrum scanning of matrix lamp - Google Patents
Based on the accurate confocal microstructure measuring method of angular spectrum scanning of matrix lamp Download PDFInfo
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Abstract
Angular spectrum based on matrix lamp scans accurate confocal microstructure measuring device and method belongs to ultraprecise three-dimensional microstructure measuring surface form field; This apparatus design has angular spectrum to scan illumination path, the light beam sent from LED array successively after imaging len, Amici prism, microcobjective, parallel radiation to tested microstructure sample surface, the angular spectrum illumination that the different LED correspondence in LED array is different; First the method obtains the tomographic map of all pixels under different angular spectrum scanning illumination, then utilizes confocal three-dimensional measurement principle, judges the axial coordinate of each pixel, finally simulate the three-dimensional appearance of tested microstructure sample; This design makes every part of tested microstructure sample can find corresponding optimal illumination angle, avoid the height of tested microstructure sample its own face profile some region caused that rises and falls cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Description
Technical field
Angular spectrum based on matrix lamp scans accurate confocal microstructure measuring device and method belongs to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and micro-optic technology three aspects, as typical apply such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology has three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brings the energy and raw-material saving, more promote the progress of modern science and technology, directly drive the development of related industry.Along with the develop rapidly of micro-processing technology, huge application prospect can will be had to the instrument that such sample carries out quick nondestructive three-dimensional values.
US Patent No. 3013467, first time discloses a kind of confocal imaging technology, this invention is by introducing pointolite, putting the confocal imaging technology of illumination and some detection 3 optical conjugates, obtain the axial detection ability to sample profile, coordinate moving and then realizing three-dimensional measurement of horizontal direction objective table.Chinese patent CN1395127A, discloses a kind of confocal micro-measurement system.This invention utilizes confocal technology, by introducing optical interference circuit in confocal optical path, obtaining highly sensitive interferometry signal, realizing the high-acruracy survey to sample axis.US Patent No. 6282020B1, discloses a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, by introducing vibration mirror scanning technology, obtaining and converging illumination spot in the ability of sample surfaces high-speed mobile, achieving quick confocal detection, improve measuring speed.But above-mentioned three kinds of methods are all parallel beam is converged to sample surfaces by microcobjective throw light on, when carrying out three-dimensional sample and measuring, because the height of sample its own face profile rises and falls, convergence illuminating bundle is blocked, some region can be caused cannot to throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, measuring accuracy is reduced, even cannot measure.
Summary of the invention
In order to solve the problem, the invention discloses a kind of angular spectrum based on matrix lamp accurate confocal microstructure measuring device of scanning and method, make every part of tested microstructure sample can find corresponding optimal illumination angle, avoid the height of tested microstructure sample its own face profile some region caused that rises and falls cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The object of the present invention is achieved like this:
Based on the accurate confocal microstructure measuring device of angular spectrum scanning of matrix lamp, comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: LED array, imaging len, Amici prism, the first diaphragm and microcobjective; The light beam sent from LED array is successively after imaging len, Amici prism, microcobjective, and parallel radiation is to the tested microstructure sample surface moved axially with objective table;
Described accurate confocal measurement light path comprises: objective table, microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, two-dimensional scanning mirrors, condenser lens, pin hole and detector; The light beam of the tested microstructure sample surface reflection moved axially with objective table is successively through microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, two-dimensional scanning mirrors, condenser lens, be imaged onto pin hole position, and by detector image-forming; Described two-dimensional scanning mirrors, in its place plane or plane in parallel, with orthogonal both direction for rotating shaft, carries out two-dimensional rotary;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, the first diaphragm and microcobjective;
Described LED array is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with the first diaphragm place plane; The front focal plane of Guan Jing and the back focal plane of scanning lens coincide with the second diaphragm place plane; Pin hole is positioned at the front focal plane of condenser lens, is close to detector.
The accurate confocal microstructure measuring device of the above-mentioned scanning of the angular spectrum based on matrix lamp, described LED array is the arrangement of horizontal vertical direction or arranges from the horizontal by 45 ° and 135 ° of both directions.
Described LED array is equidistantly arrangement or unequal-interval arrangement.
The accurate confocal microstructure measuring device of the above-mentioned scanning of the angular spectrum based on matrix lamp, deviates from the direction of beam propagation, is provided with joint spider or rzeppa joint at two-dimensional scanning mirrors.
Based on the accurate confocal microstructure measuring method of angular spectrum scanning of matrix lamp, comprise the following steps:
Step a, the thickness of tested microstructure sample is divided into N layer;
Step b, setting two-dimensional scanning mirrors have P locus;
The order interchangeable of described step a, step b;
Step c, according to the LED quantity M in LED array, the thickness layering N of tested microstructure sample, the locus P of two-dimensional scanning mirrors, form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Steps d, the angular spectrum illumination image defining under identical angular spectrum between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of P locus point;
Step e, according to P locus point and axial coordinate thereof, simulate the three-dimensional appearance of tested microstructure sample.
The accurate confocal microstructure measuring method of the above-mentioned scanning of the angular spectrum based on matrix lamp, described step c is specially:
Step c1: adjust tested microstructure sample by objective table, makes the every one deck in N layer be placed in the front focal plane of microcobjective successively;
Step c2: form M the angular spectrum illumination to tested microstructure sample by M the LED lighted successively in LED array;
Step c3: by adjusting P locus of two-dimensional scanning mirrors, realize the collection of detector to illumination image;
Described step c1, step c2, step c3 form three and recirculate, and circular order is from outside to inside followed successively by one in following order:
Step c1, step c2, step c3;
Step c1, step c3, step c2;
Step c2, step c1, step c3;
Step c2, step c3, step c1;
Step c3, step c1, step c2;
Step c3, step c2, step c1;
Final formation M × N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P.
Because the present invention is designed with illumination path, make illuminating bundle parallel incide tested microstructure sample surface, and changed the irradiating angle of illuminating bundle by the different LED lighted in LED array, and utilize confocal three-dimensional measurement principle, simulate the three-dimensional appearance of tested microstructure sample; This design makes every part of tested microstructure sample can find corresponding optimal illumination angle, avoid the height of tested microstructure sample its own face profile some region caused that rises and falls cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the accurate confocal microstructure measuring device structural representation of angular spectrum scanning that the present invention is based on matrix lamp.
Fig. 2 is the accurate confocal microstructure measuring device angular spectrum scanning illumination path figure of angular spectrum scanning that the present invention is based on matrix lamp.
Fig. 3 is the accurate confocal measurement index path of the angular spectrum accurate confocal microstructure measuring device of scanning that the present invention is based on matrix lamp.
Fig. 4 is the accurate confocal microstructure measuring method process flow diagram of angular spectrum scanning that the present invention is based on matrix lamp.
In figure: 1LED array, 2 imaging lens, 3 Amici prisms, 4 first diaphragms, 5 microcobjectives, 6 objective tables, 7 pipe mirrors, 8 second diaphragms, 9 scanning lenses, 10 two-dimensional scanning mirrors, 11 condenser lenses, 12 pin holes, 13 detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to throw light on tested microstructure sample surface and realize continuously changing by scanning mechanism or other technological means or the incident angle of discrete change directional light with parallel beam, this kind of lighting system description is in a frequency domain angular spectrum scanning illumination.
Confocal measurement method is: utilize a method throwing light on, put thing and put detection 3 optical conjugates to realize the measurement capability of optical axis direction, and then complete three-dimensional measurement.The accurate confocal measurement method mentioned in this patent is: utilize angular spectrum to scan illumination and replace some illumination, the method for retention point thing and some detection 2 optical conjugates simultaneously.The method had both remained the three-dimensional measurement ability of confocal measurement, introduced angular spectrum scanning illumination simultaneously, improved signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the accurate confocal microstructure measuring device structural representation of angular spectrum based on matrix lamp scanning of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: LED array 1, imaging len 2, Amici prism 3, first diaphragm 4 and microcobjective 5; The light beam sent from LED array 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is to the tested microstructure sample surface moved axially with objective table 6;
Described accurate confocal measurement light path comprises: objective table 6, microcobjective 5, first diaphragm 4, Amici prism 3, pipe mirror 7, second diaphragm 8, scanning lens 9, two-dimensional scanning mirrors 10, condenser lens 11, pin hole 12 and detector 13; The light beam of the tested microstructure sample surface reflection moved axially with objective table 6 is successively through microcobjective 5, first diaphragm 4, Amici prism 3, pipe mirror 7, second diaphragm 8, scanning lens 9, two-dimensional scanning mirrors 10, condenser lens 11, be imaged onto pin hole 12 position, and by detector 13 imaging; Described two-dimensional scanning mirrors 10, in its place plane or plane in parallel, with orthogonal both direction for rotating shaft, carries out two-dimensional rotary;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, first diaphragm 4 and microcobjective 5;
Described LED array 1 is equidistantly arranged for horizontal vertical direction, and is positioned at the object plane of imaging len 2, and the top of the LED array 1 in Fig. 1 depicts the left view of LED array 1; The back focal plane as plane and microcobjective 5 of imaging len 2 coincides with the first diaphragm 4 place plane; The front focal plane of pipe mirror 7 and the back focal plane of scanning lens 9 coincide with the second diaphragm 8 place plane; Pin hole 12 is positioned at the front focal plane of condenser lens 11, is close to detector 13.
The accurate confocal microstructure measuring device of the above-mentioned scanning of the angular spectrum based on matrix lamp, deviates from the direction of beam propagation, is provided with electronic joint spider, realize the control to two-dimensional scanning mirrors 10 locus at two-dimensional scanning mirrors 10.
As shown in Figure 4, the method comprises the following steps the accurate confocal microstructure measuring method process flow diagram of angular spectrum based on matrix lamp scanning of the present embodiment:
Step a, the thickness of tested microstructure sample is divided into N layer;
Step b, setting two-dimensional scanning mirrors 10 have P locus;
Step c, according to the LED quantity M in LED array 1, the thickness layering N of tested microstructure sample, the locus P of two-dimensional scanning mirrors 10, form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Steps d, the angular spectrum illumination image defining under identical angular spectrum between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of this locus point;
Step e, according to P locus point and axial coordinate thereof, simulate the three-dimensional appearance of tested microstructure sample.
Wherein step c is specially:
Step c1: adjust tested microstructure sample by objective table 6, makes the every one deck in N layer be placed in the front focal plane of microcobjective 5 successively;
Step c2: form M the angular spectrum illumination to tested microstructure sample by M the LED lighted successively in LED array 1;
Step c3: by adjusting P locus of two-dimensional scanning mirrors 10, realize the collection of detector 13 pairs of illumination images;
Described step c1, step c2, step c3 form three and recirculate, and circular order is from outside to inside followed successively by: step c1, step c3, step c2.
Specific embodiment two:
The present embodiment is different from specific embodiment one to be, in the described accurate confocal microstructure measuring device of the scanning of the angular spectrum based on matrix lamp, LED array 1 is the arrangement of horizontal vertical direction unequal-interval, and its beneficial effect is can in this direction to more accurate adjustment in certain illumination angle spectral limit.
Specific embodiment three:
The present embodiment is different from specific embodiment one to be, in the described accurate confocal microstructure measuring device of the scanning of the angular spectrum based on matrix lamp, LED array 1 is for equidistantly to arrange from the horizontal by 45 ° and 135 ° of both directions, and its beneficial effect is can in the evenly adjustment of this diagonal angle, direction spectrum.
Specific embodiment four:
The present embodiment is different from specific embodiment one to be, in the described accurate confocal microstructure measuring device of the scanning of the angular spectrum based on matrix lamp, LED array 1 is from the horizontal by 45 ° and the arrangement of 135 ° of both direction unequal-intervals, and its beneficial effect is can in this direction to more accurate adjustment in certain illumination angle spectral limit.
Specific embodiment five:
The present embodiment is different from specific embodiment one to be, in the described accurate confocal microstructure measuring method of the scanning of the angular spectrum based on matrix lamp, step c preferably three orders recirculated is step c3, step c1, step c2; Make the fastest step c2 of execution speed be placed on innermost layer, the slowest step c3 of execution speed is placed on outermost layer, can reduce the used time of angular spectrum illumination image, improves the three-dimensional appearance reconstruct efficiency of tested microstructure sample.
Claims (2)
1., based on the accurate confocal microstructure measuring method of angular spectrum scanning of matrix lamp, the device used comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: LED array (1), imaging len (2), Amici prism (3), the first diaphragm (4) and microcobjective (5); The light beam sent from LED array (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to the tested microstructure sample surface moved axially with objective table (6);
Described accurate confocal measurement light path comprises: objective table (6), microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), two-dimensional scanning mirrors (10), condenser lens (11), pin hole (12) and detector (13); The light beam of the tested microstructure sample surface reflection moved axially with objective table (6) is successively through microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), two-dimensional scanning mirrors (10), condenser lens (11), be imaged onto pin hole (12) position, and by detector (13) imaging; Described two-dimensional scanning mirrors (10), in its place plane or plane in parallel, with orthogonal both direction for rotating shaft, carries out two-dimensional rotary;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), the first diaphragm (4) and microcobjective (5);
Described LED array (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with the first diaphragm (4) place plane; The front focal plane of Guan Jing (7) and the back focal plane of scanning lens (9) coincide with the second diaphragm (8) place plane; Pin hole (12) is positioned at the front focal plane of condenser lens (11), is close to detector (13);
Described LED array (1) is for horizontal vertical direction arrangement or from the horizontal by 45 ° and 135 ° of both direction arrangements;
Described LED array (1) is equidistantly arrangement or unequal-interval arrangement;
Deviate from the direction of beam propagation at two-dimensional scanning mirrors (10), be provided with joint spider or rzeppa joint;
It is characterized in that: said method comprising the steps of:
Step a, the thickness of tested microstructure sample is divided into N layer;
Step b, total P the locus of setting two-dimensional scanning mirrors (10);
The order interchangeable of described step a, step b;
Step c, according to the LED quantity M in LED array (1), the thickness layering N of tested microstructure sample, the locus P of two-dimensional scanning mirrors (10), form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Steps d, the angular spectrum illumination image defining under identical angular spectrum between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of P locus point;
Step e, according to P locus point and axial coordinate thereof, simulate the three-dimensional appearance of tested microstructure sample.
2. the accurate confocal microstructure measuring method of the scanning of the angular spectrum based on matrix lamp according to claim 1, is characterized in that: described step c is specially:
Step c1: adjust tested microstructure sample by objective table (6), makes the every one deck in N layer be placed in the front focal plane of microcobjective (5) successively;
Step c2: form M the angular spectrum illumination to tested microstructure sample by M the LED lighted successively in LED array (1);
Step c3: by P locus of adjustment two-dimensional scanning mirrors (10), realize detector (13) to the collection of illumination image;
Described step c1, step c2, step c3 form three and recirculate, and circular order is from outside to inside followed successively by one in following order:
Step c1, step c2, step c3;
Step c1, step c3, step c2;
Step c2, step c1, step c3;
Step c2, step c3, step c1;
Step c3, step c1, step c2;
Step c3, step c2, step c1;
Final formation M × N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P.
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CN104765138B (en) * | 2015-04-17 | 2017-09-29 | 南京理工大学 | Multi-mode micro imaging system and its method based on LED array |
DE102017115658A1 (en) * | 2017-07-12 | 2019-01-17 | Carl Zeiss Microscopy Gmbh | Flickering at angle-variable illumination |
CN107479189B (en) * | 2017-08-14 | 2019-08-06 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation |
CN111208634B (en) * | 2020-01-18 | 2022-02-08 | 哈尔滨工业大学 | Super-resolution total internal reflection microscopic imaging device and method based on frequency spectrum synthesis |
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JP2001066124A (en) * | 1999-08-30 | 2001-03-16 | Anritsu Corp | Three-dimensional surface shape measuring device |
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