CN103438825B - A kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method - Google Patents
A kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method Download PDFInfo
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Abstract
A kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method belong to ultraprecise three-dimensional microstructure measuring surface form field; This device comprises angular spectrum scanning illumination path, and the light beam sent from donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is surperficial to tested microstructure sample; Comprise accurate confocal measurement light path, imaging moiety adopts pinhole array to coordinate the structure of imageing sensor; First the method obtains the tomographic map of all pixels under different angular spectrum scanning illumination, then utilizes confocal three-dimensional measurement principle, judges the axial coordinate of each pixel, finally simulate the three-dimensional appearance of tested microstructure sample; This design makes every part of tested microstructure sample can find corresponding optimal illumination angle, improves signal strength detection, reduces ground unrest, and then improves measuring accuracy; Realize measuring at a high speed simultaneously.
Description
Technical field
A kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and micro-optic technology three aspects, as typical apply such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology has three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brings the energy and raw-material saving, more promote the progress of modern science and technology, directly drive the development of related industry.Along with the develop rapidly of micro-processing technology, huge application prospect can will be had to the instrument that such sample carries out quick nondestructive three-dimensional values.
US Patent No. 3013467, first time discloses a kind of confocal imaging technology, this invention is by introducing pointolite, putting the confocal imaging technology of illumination and some detection 3 optical conjugates, obtain the axial detection ability to sample profile, coordinate moving and then realizing three-dimensional measurement of horizontal direction objective table.Chinese patent CN1395127A, discloses a kind of confocal micro-measurement system.This invention utilizes confocal technology, by introducing optical interference circuit in confocal optical path, obtaining highly sensitive interferometry signal, realizing the high-acruracy survey to sample axis.US Patent No. 6282020B1, discloses a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, by introducing vibration mirror scanning technology, obtaining and converging illumination spot in the ability of sample surfaces high-speed mobile, achieving quick confocal detection, improve measuring speed.But above-mentioned three kinds of methods are all parallel beam is converged to sample surfaces by microcobjective throw light on, when carrying out three-dimensional sample and measuring, because the height of sample its own face profile rises and falls, convergence illuminating bundle is blocked, some region can be caused cannot to throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, measuring accuracy is reduced, even cannot measure.
Summary of the invention
In order to solve the problem, the invention discloses a kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method, make every part of the symmetrical tested microstructure sample of circle can find corresponding optimal illumination angle, avoid height some region caused that rises and falls of the symmetrical tested microstructure sample its own face profile of circle cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor simultaneously, can realize measuring at a high speed.
The object of the present invention is achieved like this:
The confocal annular microstructure measurement device of a kind of angular spectrum scanning illumination array formula, comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source, imaging len, Amici prism, diaphragm and microcobjective; The light beam sent from donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is to the symmetrical tested microstructure sample surface of circle with the movement of Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, diaphragm, Amici prism, Guan Jing, pinhole array and imageing sensor; The light beam of the symmetrical tested microstructure sample surface reflection of the circle with the movement of Three Degree Of Freedom objective table, successively through microcobjective, diaphragm, Amici prism, Guan Jing, is imaged onto pinhole array position, and by imageing sensor imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, diaphragm and microcobjective;
Described donut light source is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with diaphragm place plane; The front focal plane of Guan Jing is positioned at pinhole array place plane; Pinhole array and imageing sensor pixel are close to, and the pin hole on pinhole array is identical with the pixel quantity of imageing sensor, corresponding before and after position.
The above-mentioned confocal annular microstructure measurement device of a kind of angular spectrum scanning illumination array formula, described donut light source is LED array.
The semidiameter of adjacent two annulus of described donut light source is constant or is not constant.
The confocal annular microstructure measuring method of a kind of angular spectrum scanning illumination array formula, comprises the following steps:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, adjustment Three Degree Of Freedom objective table, make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in donut light source, the thickness layering N of the symmetrical tested microstructure sample of circle, forms M × N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
The above-mentioned confocal annular microstructure measuring method of a kind of angular spectrum scanning illumination array formula, described step c is specially:
Step c1: by the symmetrical tested microstructure sample of Three Degree Of Freedom objective table adjustment circle, make the every one deck in N layer be placed in the front focal plane of microcobjective successively;
Step c2: by lighting M annulus in donut light source successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Described step c1, step c2 form two and recirculate, and circular order is from outside to inside followed successively by one in following order:
Step c1, step c2;
Step c2, step c1;
Final formation M × N subtended angle spectrum illumination image.
Because the present invention is designed with illumination path, parallel the inciding of illuminating bundle is made to justify symmetrical tested microstructure sample surface, and the irradiating angle of illuminating bundle is changed by the annulus lighting donut light source, and utilize confocal three-dimensional measurement principle, simulate the three-dimensional appearance of the symmetrical tested microstructure sample of circle; This design makes every part of the symmetrical tested microstructure sample of circle can find corresponding optimal illumination angle, avoid height some region caused that rises and falls of the symmetrical tested microstructure sample its own face profile of circle cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor simultaneously, can realize measuring at a high speed.
Accompanying drawing explanation
Fig. 1 is the confocal annular microstructure measurement device structural representation of angular spectrum of the present invention scanning illumination array formula.
Fig. 2 is angular spectrum of the present invention scanning illumination array formula confocal annular microstructure measurement device angular spectrum scanning illumination path figure.
Fig. 3 is the accurate confocal measurement index path of the angular spectrum of the present invention scanning confocal annular microstructure measurement device of illumination array formula.
Fig. 4 is the confocal annular microstructure measuring method process flow diagram of angular spectrum of the present invention scanning illumination array formula.
In figure: 1 donut light source, 2 imaging lens, 3 Amici prisms, 4 diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 pinhole array, 9 imageing sensors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to throw light on tested microstructure sample surface and realize continuously changing by scanning mechanism or other technological means or the incident angle of discrete change directional light with parallel beam, this kind of lighting system description is in a frequency domain angular spectrum scanning illumination.
Confocal measurement method is: utilize a method throwing light on, put thing and put detection 3 optical conjugates to realize the measurement capability of optical axis direction, and then complete three-dimensional measurement.The accurate confocal measurement method mentioned in this patent is: utilize angular spectrum to scan illumination and replace some illumination, the method for retention point thing and some detection 2 optical conjugates simultaneously.The method had both remained the three-dimensional measurement ability of confocal measurement, introduced angular spectrum scanning illumination simultaneously, improved signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the confocal annular microstructure measurement device structural representation of angular spectrum scanning illumination array formula of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source 1, imaging len 2, Amici prism 3, diaphragm 4 and microcobjective 5; The light beam sent from donut light source 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is to the symmetrical tested microstructure sample surface of circle with Three Degree Of Freedom objective table 6 movement; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, pinhole array 8 and imageing sensor 9; The light beam of the symmetrical tested microstructure sample surface reflection of the circle with Three Degree Of Freedom objective table 6 movement, successively through microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, is imaged onto pinhole array 8 position, and by imageing sensor 9 imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, diaphragm 4 and microcobjective 5;
Described donut light source 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with diaphragm 4 place plane; The front focal plane of pipe mirror 7 is positioned at pinhole array 8 place plane; Pinhole array 8 and imageing sensor 9 pixel are close to, and the pin hole on pinhole array 8 is identical with the pixel quantity of imageing sensor 9, corresponding before and after position.
The confocal annular microstructure measurement device of above-mentioned angular spectrum scanning illumination array formula, described donut light source 1 is LED array, and the top of the donut light source 1 in Fig. 1 depicts the left view of donut light source 1; The semidiameter of adjacent two annulus of donut light source 1 is constant.
As shown in Figure 4, the method comprises the following steps the confocal annular microstructure measuring method process flow diagram of angular spectrum scanning illumination array formula of the present embodiment:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, adjustment Three Degree Of Freedom objective table 6, make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in donut light source 1, the thickness layering N of the symmetrical tested microstructure sample of circle, forms M × N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
Wherein step c is specially:
Step c1: adjust the symmetrical tested microstructure sample of circle by Three Degree Of Freedom objective table 6, make the every one deck in N layer be placed in the front focal plane of microcobjective 5 successively;
Step c2: by lighting M annulus in donut light source 1 successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Described step c1, step c2 form two and recirculate, and circular order is from outside to inside followed successively by: step c2, step c1, finally form M × N subtended angle spectrum illumination image.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the semidiameter of adjacent two annulus of described donut light source 1 is not constant, and its beneficial effect is can to more accurate adjustment in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the described confocal annular microstructure measuring method of angular spectrum scanning illumination array formula, step c preferably two orders recirculated is step c1, step c2, finally forms M × N subtended angle spectrum illumination image.Make the fastest step c2 of execution speed be placed on innermost layer, the slowest step c1 of execution speed is placed on outermost layer, and its beneficial effect is the used time that can reduce angular spectrum illumination image, improves the three-dimensional appearance reconstruct efficiency of the symmetrical tested microstructure sample of circle.
Claims (2)
1. the confocal annular microstructure measuring method of angular spectrum scanning illumination array formula, the device used comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source (1), imaging len (2), Amici prism (3), diaphragm (4) and microcobjective (5); The light beam sent from donut light source (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to the symmetrical tested microstructure sample surface of circle with Three Degree Of Freedom objective table (6) movement; Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7), pinhole array (8) and imageing sensor (9); The light beam of the symmetrical tested microstructure sample surface reflection of the circle with Three Degree Of Freedom objective table (6) movement is successively through microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7), be imaged onto pinhole array (8) position, and by imageing sensor (9) imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), diaphragm (4) and microcobjective (5);
Described donut light source (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with diaphragm (4) place plane; The front focal plane of Guan Jing (7) is positioned at pinhole array (8) place plane; Pinhole array (8) and imageing sensor (9) pixel are close to, and the pin hole on pinhole array (8) is identical with the pixel quantity of imageing sensor (9), corresponding before and after position;
Described donut light source (1) is LED array;
The semidiameter of described adjacent two annulus of donut light source (1) is constant or is not constant;
It is characterized in that: said method comprising the steps of:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, adjustment Three Degree Of Freedom objective table (6), make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in donut light source (1), the thickness layering N of the symmetrical tested microstructure sample of circle, forms M × N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
2. the confocal annular microstructure measuring method of a kind of angular spectrum scanning illumination array formula according to claim 1, is characterized in that: described step c is specially:
Step c1: by the symmetrical tested microstructure sample of Three Degree Of Freedom objective table (6) adjustment circle, make the every one deck in N layer be placed in the front focal plane of microcobjective (5) successively;
Step c2: by lighting M annulus in donut light source (1) successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Described step c1, step c2 form two and recirculate, and circular order is from outside to inside followed successively by one in following order:
Step c1, step c2;
Step c2, step c1;
Final formation M × N subtended angle spectrum illumination image.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1395127A (en) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | Confocal microscope |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN102466471A (en) * | 2010-11-18 | 2012-05-23 | 三星电机株式会社 | Surface shape measuring apparatus |
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| JP2006071784A (en) * | 2004-08-31 | 2006-03-16 | Tokyo Seimitsu Co Ltd | Confocal microscope, outside appearance inspecting device and semiconductor outside appearance inspecting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1395127A (en) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | Confocal microscope |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN102466471A (en) * | 2010-11-18 | 2012-05-23 | 三星电机株式会社 | Surface shape measuring apparatus |
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