CN103438825A - Device and method for measurement of angular spectrum scanning and lighting array type confocal annular microstructure - Google Patents
Device and method for measurement of angular spectrum scanning and lighting array type confocal annular microstructure Download PDFInfo
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Abstract
The invention discloses a device and method for measurement of an angular spectrum scanning and lighting array type confocal annular microstructure and belongs to the field of ultra-precise measurement of surface appearance of three-dimensional microstructures. The device for measurement of the angular spectrum scanning and lighting array type confocal annular microstructure comprises an angular spectrum scanning and lighting light path and a quasi confocal measurement light path. According to the device for measurement of the angular spectrum scanning and lighting array type confocal annular microstructure, light beams emitted by a concentric ring light source pass through an imaging lens, a beam splitter prism and a microobjective in sequence and then are transmitted to the surface of the measured microstructure sample in parallel, and an imaging part of the quasi confocal measurement light path is of a structure in which a pinhole array is matched with an image sensor. According to the method for measurement of the angular spectrum scanning and lighting array type confocal annular microstructure, tomographic images of all pixels under scanning and lighting of different angular spectrums are firstly obtained, then the axial coordinate of each pixel is judged by means of the confocal three-dimensional measurement principle, and finally the three-dimensional shape of the measured microstructure sample is obtained by fitting. The device and method for measurement of the angular spectrum scanning and lighting array type confocal annular microstructure have the advantages that a corresponding optimum lighting angle can be found for each part of the measured microstructure sample, signal detection strength is improved, background noise is lowered, and then measurement accuracy is improved and high-speed measurement is achieved.
Description
Technical field
A kind of angular spectrum scanning confocal annular microstructure measuring device of illumination array formula and method belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, by introducing the vibration mirror scanning technology, having obtained, converges the ability of illumination hot spot in the sample surfaces high-speed mobile, has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all parallel beam to be converged to sample surfaces by microcobjective thrown light on, when carrying out the three-dimensional sample measurement, height fluctuating due to sample self surface profile, to converging illuminating bundle, blocked, can cause some zone can't throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, and make measuring accuracy reduce, even can't measure.
Summary of the invention
In order to address the above problem, the invention discloses a kind of angular spectrum scanning confocal annular microstructure measuring device of illumination array formula and method, make the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Simultaneously accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor, can realize measuring at a high speed.
The object of the present invention is achieved like this:
The confocal annular microstructure measuring device of a kind of angular spectrum scanning illumination array formula, comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source, imaging len, Amici prism, diaphragm and microcobjective; The light beam sent from the donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is symmetrical by the micro-measuring structure sample surfaces to the circle moved with the Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, diaphragm, Amici prism, Guan Jing, pinhole array and imageing sensor; The symmetrical light beam reflected by the micro-measuring structure sample surfaces of the circle moved with the Three Degree Of Freedom objective table passes through microcobjective, diaphragm, Amici prism, Guan Jing successively, is imaged onto the pinhole array position, and by the imageing sensor imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, diaphragm and microcobjective;
Described donut light source is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with plane, diaphragm place; The front focal plane of Guan Jing is positioned at plane, pinhole array place; Pinhole array and imageing sensor pixel are close to, and the pin hole on pinhole array is identical with the pixel quantity of imageing sensor, the front and back, position are corresponding.
The above-mentioned confocal annular microstructure measuring device of a kind of angular spectrum scanning illumination array formula, described donut light source is LED array.
The semidiameter of adjacent two annulus of described donut light source is constant or is not constant.
The confocal annular microstructure measuring method of a kind of angular spectrum scanning illumination array formula comprises the following steps:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in the donut light source, circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defined between the different layers under identical angular spectrum illumination are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out and approach the quadruplicate enveloping curve of sinc function most, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
The above-mentioned confocal annular microstructure measuring method of a kind of angular spectrum scanning illumination array formula, described step c is specially:
Step c1: symmetrical by the micro-measuring structure sample by Three Degree Of Freedom objective table adjustment circle, make every one deck in the N layer be placed in successively the front focal plane of microcobjective;
Step c2: by lighting successively M annulus in the donut light source, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by following order:
Step c1, step c2;
Step c2, step c1;
Final M * N subtended angle spectrum the illumination image that forms.
Because the present invention is designed with illumination path, make the parallel circle symmetry that incides of illuminating bundle by the micro-measuring structure sample surfaces, and change the irradiating angle of illuminating bundle by the annulus of lighting the donut light source, and utilize confocal three-dimensional measurement principle, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample; This design makes the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Simultaneously accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor, can realize measuring at a high speed.
The accompanying drawing explanation
Fig. 1 is the confocal annular microstructure measuring device structural representation of angular spectrum scanning illumination array formula of the present invention.
Fig. 2 is the confocal annular microstructure measuring device angular spectrum scanning illumination path figure of angular spectrum scanning illumination array formula of the present invention.
Fig. 3 is the accurate confocal measurement index path of the angular spectrum scanning confocal annular microstructure measuring device of illumination array formula of the present invention.
Fig. 4 is the confocal annular microstructure measuring method process flow diagram of angular spectrum scanning illumination array formula of the present invention.
In figure: 1 donut light source, 2 imaging lens, 3 Amici prisms, 4 diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 pinhole array, 9 imageing sensors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to realize continuously changing or the incident angle of discrete change directional light by the micro-measuring structure sample surfaces and by scanning mechanism or other technological means with parallel beam illumination, this kind of description of lighting system in frequency domain is angular spectrum scanning illumination.
Confocal measurement method is: the method for utilizing some illumination, some thing and point to survey 3 optical conjugates realizes the measurement capability of optical axis direction, and then completes three-dimensional measurement.The accurate confocal measurement method of mentioning in this patent is: utilize angular spectrum scanning illumination to replace the some illumination, retention point thing and point are surveyed the method for 2 optical conjugates simultaneously.The method had both retained the three-dimensional measurement ability of confocal measurement, introduced angular spectrum scanning illumination simultaneously, improved signal strength detection, reduced ground unrest, and then improved measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the confocal annular microstructure measuring device structural representation of angular spectrum scanning illumination array formula of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source 1, imaging len 2, Amici prism 3, diaphragm 4 and microcobjective 5; The light beam sent from donut light source 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is symmetrical by the micro-measuring structure sample surfaces to the circle moved with Three Degree Of Freedom objective table 6; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, pinhole array 8 and imageing sensor 9; The symmetrical light beam reflected by the micro-measuring structure sample surfaces of the circle moved with Three Degree Of Freedom objective table 6 through microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, is imaged onto pinhole array 8 positions successively, and by imageing sensor 9 imagings;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, diaphragm 4 and microcobjective 5;
Described donut light source 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with diaphragm 4 planes, place; The front focal plane of pipe mirror 7 is positioned at pinhole array 8 planes, place; Pinhole array 8 is close to imageing sensor 9 pixels, and the pin hole on pinhole array 8 is identical with the pixel quantity of imageing sensor 9, the front and back, position are corresponding.
The confocal annular microstructure measuring device of above-mentioned angular spectrum scanning illumination array formula, described donut light source 1 is LED array, the left view of donut light source 1 has been drawn in the top of the donut light source 1 in Fig. 1; The semidiameter of adjacent two annulus of donut light source 1 is constant.
As shown in Figure 4, the method comprises the following steps the confocal annular microstructure measuring method process flow diagram of angular spectrum scanning illumination array formula of the present embodiment:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table 6, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in donut light source 1, circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defined between the different layers under identical angular spectrum illumination are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out and approach the quadruplicate enveloping curve of sinc function most, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
Wherein step c is specially:
Step c1: adjust circle by Three Degree Of Freedom objective table 6 symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective 5;
Step c2: by lighting successively M annulus in donut light source 1, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by: step c2, step c1 finally form M * N subtended angle spectrum illumination image.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the semidiameter of adjacent two annulus of described donut light source 1 is not constant, and its beneficial effect is can be to accurate adjustment more in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the confocal annular microstructure measuring method of described angular spectrum scanning illumination array formula, step c preferably two orders that recirculate is step c1, step c2, finally forms M * N subtended angle spectrum illumination image.Make the fastest step c2 of execution speed be placed on innermost layer, the slowest step c1 of execution speed is placed on outermost layer, and its beneficial effect is to reduce the used time of angular spectrum illumination image, improves circle symmetrical by the three-dimensional appearance reconstruct efficiency of micro-measuring structure sample.
Claims (5)
1. the confocal annular microstructure measuring device of angular spectrum scanning illumination array formula, is characterized in that: comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source (1), imaging len (2), Amici prism (3), diaphragm (4) and microcobjective (5); The light beam sent from donut light source (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is symmetrical by the micro-measuring structure sample surfaces to the circle mobile with Three Degree Of Freedom objective table (6); Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7), pinhole array (8) and imageing sensor (9); The circle symmetrical light beam that by micro-measuring structure sample surfaces reflected mobile with Three Degree Of Freedom objective table (6) passes through microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7) successively, be imaged onto pinhole array (8) position, and by imageing sensor (9) imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), diaphragm (4) and microcobjective (5);
Described donut light source (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with diaphragm (4) plane, place; The front focal plane of Guan Jing (7) is positioned at pinhole array (8) plane, place; Pinhole array (8) is close to imageing sensor (9) pixel, and the pin hole on pinhole array (8) is identical with the pixel quantity of imageing sensor (9), the front and back, position are corresponding.
2. a kind of angular spectrum according to claim 1 scans the confocal annular microstructure measuring device of illumination array formula, and it is characterized in that: described donut light source (1) is LED array.
3. a kind of angular spectrum according to claim 2 scans the confocal annular microstructure measuring device of illumination array formula, it is characterized in that: the semidiameter of adjacent two annulus of described donut light source (1) is constant or is not constant.
4. an angular spectrum scans the confocal annular microstructure measuring method of illumination array formula, it is characterized in that: said method comprising the steps of:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table (6), make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the donut quantity M in donut light source (1), circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Steps d, the angular spectrum illumination image defined between the different layers under identical angular spectrum illumination are tomographic map, axial envelope curve between the tomographic map of contrast same pixel under M angular spectrum illumination, pick out and approach the quadruplicate enveloping curve of sinc function most, according to confocal three-dimensional measurement principle, judge the axial coordinate of all pixels;
Step e, according to all pixels and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
5. a kind of angular spectrum according to claim 4 scans the confocal annular microstructure measuring method of illumination array formula, and it is characterized in that: described step c is specially:
Step c1: adjust circle by Three Degree Of Freedom objective table (6) symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective (5);
Step c2: by lighting successively M annulus in donut light source (1), form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by following order:
Step c1, step c2;
Step c2, step c1;
Final M * N subtended angle spectrum the illumination image that forms.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018205749A1 (en) * | 2017-05-10 | 2018-11-15 | 暨南大学 | Non-fluorescent imaging optical sectioning method and apparatus based on annular off-axis illumination focal plane conjugation |
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| CN1395127A (en) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | Confocal microscope |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| JP2006071784A (en) * | 2004-08-31 | 2006-03-16 | Tokyo Seimitsu Co Ltd | Confocal microscope, outside appearance inspecting device and semiconductor outside appearance inspecting device |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN102466471A (en) * | 2010-11-18 | 2012-05-23 | 三星电机株式会社 | Surface shape measuring apparatus |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1395127A (en) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | Confocal microscope |
| JP2006071784A (en) * | 2004-08-31 | 2006-03-16 | Tokyo Seimitsu Co Ltd | Confocal microscope, outside appearance inspecting device and semiconductor outside appearance inspecting device |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN102466471A (en) * | 2010-11-18 | 2012-05-23 | 三星电机株式会社 | Surface shape measuring apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018205749A1 (en) * | 2017-05-10 | 2018-11-15 | 暨南大学 | Non-fluorescent imaging optical sectioning method and apparatus based on annular off-axis illumination focal plane conjugation |
| US10642016B2 (en) | 2017-05-10 | 2020-05-05 | Jinan University | Non-fluorescent imaging optical sectioning method and device based on annular off-axis illumination focal plane conjugation |
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