CN101833018B - Scanning probe surface measurement system and measurement method based on optical fiber sensor - Google Patents
Scanning probe surface measurement system and measurement method based on optical fiber sensor Download PDFInfo
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Abstract
The invention provides a scanning probe surface measurement system and a measurement method based on an optical fiber sensor. The system comprises an optical fiber displacement sensing unit, an optical fiber alignment unit, a micro-cantilever probe unit, a three-dimensional scanning unit and a system control unit, wherein the optical fiber displacement sensing unit is used for detecting the optical power of a receiving fiber which is incident by a transmission fiber and converting the optical power into electrical signals to be inputted into the system control unit; the micro-cantilever probe unit is used for adjusting the position of a microprobe on the surface of a sample by changing the position of the elastic micro-cantilever or elastic deformation and driving a micro-plate probe to generate vertical displacement to change the optical power of the incident receiving fiber; the three-dimensional scanning unit is used for carrying out three-dimensional mobile scanning by the sample; and the system control unit is used for monitoring or controlling the motion of the unit and carrying out data processing on the position of the received electrical signals and the microprobe on the surface of the sample to obtain the surface structure of the sample. The invention has the advantages of simple structure, few optical elements and good stability, and can detect surfaces with super precision and high resolution and in a large range.
Description
Technical field
The present invention relates to the surface detection technique field, particularly relate to a kind of scanning probe surface measurement system and measuring method thereof based on Fibre Optical Sensor.
Background technology
The high integration of electronic product and high performance development trend and MEMS (micro electro mechanical system) (MicroElectro Mechanical Systems, MEMS) technology and application development, superfinish and microstructure detection are proposed more and more higher requirement, thereby driven developing rapidly of superfinish micro-nano measuring technique.At present, the micro-nano measuring technique can be divided into contact and contactless two classes, and contact detecting method comprises inductance type, piezoelectric type, photo-electric etc., and non-contact detection method comprises optical method, electronic method etc.Superfinish measuring method commonly used comprises traditional optical interferometry, scan-probe measurement, capacitive displacement measurement, sweep electron microscopic measure etc.
Present measuring method can reach the dust class resolution ratio for roughness measurement, as laser interferance method, ellipsometry, scattering method etc.But owing to limited by the Rayleigh diffraction limit, the superfinish that the lateral resolution of Systems for optical inspection has limited horizontal nanometer scale resolution detects.
In addition, scanning tunnel microscope (Scanning Tunneling Microscope, STM) with atomic force microscope (Atomic Force Microscopy, AFM) effects on surface detects vertical, lateral resolution can reach nano-precision, but the composition of its system, structure are very complicated, expensive, and measurement range is less, generally only have several microns to tens microns, and very high to requirements such as measurement environment; Simultaneously, utilize scanning tunnel microscope can only observe conducting sample.
In a word, need the urgent technical matters that solves of those skilled in the art to be exactly: how a kind of sample surfaces measurement scheme can be provided, and system architecture is simple, and when guaranteeing measurement range, realizes the detection demand of high-resolution superfinish.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of scanning probe surface measurement system and measuring method thereof based on Fibre Optical Sensor, this simple in measurement system structure, and can realize high resolving power, the detection of superfinish on a large scale.
In order to address the above problem, the invention discloses a kind of scanning probe surface measurement system based on Fibre Optical Sensor, comprising:
The method using in optic fiber displacement sensor unit comprises launching fiber and receives optical fiber, incides the luminous power that receives optical fiber for detection of launching fiber, and converts described luminous power to electric signal and be input to system control unit;
The optical fiber align unit is used for according to the supervision of system control unit, launching fiber and reception optical fiber being carried out the axle aligning;
The micro-cantilever probe unit comprises band gauge head microprobe, and described band gauge head microprobe comprises: the elasticity micro-cantilever, respectively with end microplate gauge head connected vertically and a microprobe of elasticity micro-cantilever, described microplate gauge head is at launching fiber and receive between optical fiber; Described micro-cantilever probe unit is used for the control according to system control unit, by changing position or the elastic deformation of elasticity micro-cantilever, the position of adjustment microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Three-dimensional scanning unit is used for the control according to system control unit, makes sample do three-dimensional motion scan;
System control unit, be used for the motion of axle alignment function, microprobe and the three-dimensional scanning unit of optical fiber align unit is monitored or controls, and the position on sample surfaces is carried out data by industrial computer and is processed to the electric signal that receives and microprobe, obtains the surface structure of sample.
Preferably, described method using in optic fiber displacement sensor unit also comprises:
LASER Light Source is used for output light;
Optical fiber collimator is used for carrying out shaping by the light beam to LASER Light Source output, is coupled in launching fiber;
Photodetector is used for producing corresponding voltage by the light that receives optical fiber output is carried out opto-electronic conversion;
The A/D capture card be used for to gather the voltage of photodetector output, and changes by A/D the electric signal that will obtain and be input to system control unit.
Preferably, described optical fiber align unit comprises:
Five dimension alignment tools are used for the launching fiber of fixed fiber displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle and aim at;
Fiber fixed frame is for the reception optical fiber of fixed fiber displacement sensing unit;
The microimaging head is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are taken;
Video frequency collection card be used for to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
Preferably, described micro-cantilever probe unit also comprises:
Signal generator is used for the control according to system control unit, to high frequency piezoelectric blocks output drive signal;
The high frequency piezoelectric blocks is used for producing telescopic displacement or vibrating according to predetermined frequency, amplitude according to described driving signal;
The other end of described elasticity micro-cantilever is fixed on the high frequency piezoelectric blocks, and the elasticity micro-cantilever drives microprobe generation perpendicular displacement according to the motion of high frequency piezoelectric blocks.
Preferably, described elasticity micro-cantilever carries out contactless vertical movement according to the perpendicular displacement drive microplate gauge head of microprobe with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
Preferably, described three-dimensional scanning unit comprises:
The 3-D scanning platform is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, Y, three directions of Z;
The high voltage stabilizing source is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
Preferably, described system control unit comprises:
System control interface is used for to the control signal of signal generator and high voltage stabilizing source output industrial computer, and receives the electric signal of A/D capture card and the vision signal of video frequency collection card;
Monitor is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are carried out visual monitor;
Industrial computer for generation of control signal, and carries out data to the flat scanning position of the electric signal that receives, perpendicular displacement that microprobe produces and sample and processes, and obtains the surface structure of sample.
Preferably, the mode of operation of described measuring system comprises: contact, contactless and rap formula.
In addition, the invention also discloses a kind of scanning probe surface measurement method based on Fibre Optical Sensor, comprising:
According to the supervision of system control unit, by the optical fiber align unit to launching fiber with receive optical fiber and carry out axle and aim at;
According to the control of system control unit, make sample do three-dimensional motion scan; Adjust simultaneously the position of elasticity micro-cantilever by the micro-cantilever probe unit, change the position of microprobe on sample surfaces, and drive the microplate gauge head and produce perpendicular displacement, change and incide the luminous power that receives optical fiber;
Incide the luminous power that receives optical fiber by method using in optic fiber displacement sensor unit inspection launching fiber, and convert described luminous power to electric signal and be input to system control unit;
Position on sample surfaces is carried out data by industrial computer and is processed to the electric signal that receives and microprobe in system control unit, obtains the surface structure of sample.
Preferably, the mode of operation of described measuring method comprises: contact, contactless and rap formula.
Compared with prior art, the present invention has the following advantages:
A kind of scanning probe surface measurement system and measuring method thereof based on Fibre Optical Sensor that the present invention proposes, change by the different distance of microprobe at sample surfaces, drive the microplate gauge head and produce vertical change in displacement, the luminous power (corresponding electric signal) that detects is changed, analyze thereby detect the structure that obtains on sample surfaces.The present invention has avoided conventional optical systems to build required complex optical path and many discrete optical device, and optic fibre light path is simple in structure, optical device is few, and Optical Fiber Transmission is subjected to the impact of air turbulence lower, good stability.
Further, by the vertical vibration displacement of method using in optic fiber displacement sensor unit measurement microprobe, on the one hand, utilize the nanoscale needle point of microprobe, obtain the lateral resolution of nanometer scale, on the other hand, based on optical fiber light intensity displacement sensing, realize the longitudinal frame of nanometer scale precision.Method using in optic fiber displacement sensor combines with band gauge head microprobe, and measuring system resolution, precision are improved, and measurement range is adjustable, can reach tens microns.
In addition, utilizing five dimension alignment tools and machine vision modes can realize that optical fiber is contactless aims at; Measuring system of the present invention can work in contact, contactless and rap under three kinds of patterns of formula, can realize high resolving power, the detection system of super fine surface roughness, profile and characteristic surface dimension on a large scale.
Description of drawings
Fig. 1 is the structural drawing of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention;
Fig. 2 is the principle schematic of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention;
Fig. 3 is the process flow diagram of a kind of scanning probe surface measurement embodiment of the method based on Fibre Optical Sensor of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
With reference to Fig. 1, show the structural drawing of a kind of scanning probe surface measurement system embodiment one based on Fibre Optical Sensor of the present invention, comprising:
Method using in optic fiber displacement sensor unit 100 comprises launching fiber 101 and receives optical fiber 102, incides the luminous power that receives optical fiber for detection of launching fiber, and converts described luminous power to electric signal and be input to system control unit;
Optical fiber align unit 200 is used for according to the supervision of system control unit 500, launching fiber 101 and reception optical fiber 102 being carried out the axle aligning;
Micro-cantilever probe unit 300, comprise band gauge head microprobe, described band gauge head microprobe comprises: elasticity micro-cantilever 3011, respectively with end microprobe 3012 connected vertically and a microplate gauge head 3013 of elasticity micro-cantilever 3011, described microplate gauge head 3013 is at launching fiber 101 and receive between optical fiber 102; The control that described micro-cantilever probe unit 300 is used for according to system control unit 500, by changing position or the elastic deformation of elasticity micro-cantilever 3011, the position of adjustment microprobe 3012 on sample surfaces, and it is vertical to drive 3013 generations of microplate gauge head, changes and incides the luminous power that receives optical fiber 102;
Three-dimensional scanning unit 400 is used for the control according to system control unit 500, makes sample do three-dimensional motion scan;
Further, in a preferred embodiment of the invention, as shown in Figure 1, above-mentioned unit is by forming with lower component:
Described method using in optic fiber displacement sensor unit 100 also comprises:
LASER Light Source 103 is used for output light;
A/D capture card 106 be used for to gather the voltage of photodetector output, and changes by A/D the electric signal that will obtain and be input to system control unit.
Described optical fiber align unit 200 comprises:
Five dimension alignment tools 201 are used for the launching fiber of fixed fiber displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle and aim at;
Fiber fixed frame 202 is for the reception optical fiber of fixed fiber displacement sensing unit;
Video frequency collection card 204 be used for to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
Described micro-cantilever probe unit 300 also comprises:
High frequency piezoelectric blocks 303 is used for producing telescopic displacement or vibrating according to predetermined frequency, amplitude according to described driving signal;
The other end of described elasticity micro-cantilever 3011 is fixed on described high frequency piezoelectric blocks 303, and the elasticity micro-cantilever drives microprobe 3012 generation perpendicular displacements according to the motion of high frequency piezoelectric blocks.
Wherein, described microprobe carries out contactless vertical movement by elasticity micro-cantilever drive microplate gauge head with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
Described three-dimensional scanning unit 400 comprises:
3-D scanning platform 401 is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, Y, three directions of Z;
High voltage stabilizing source 402 is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
Described system control unit 500 comprises:
The specific implementation process of this system is as follows:
In method using in optic fiber displacement sensor unit 100, the light of LASER Light Source 103 outputs is coupled in launching fiber 101 after optical fiber collimator 104 carries out beam shaping; Launching fiber 101 is fixed on five dimension alignment tools 201 of optical fiber align unit 200; Receive on the fiber fixed frame 202 that optical fiber 102 is fixed in optical fiber align unit 200; The light output end of launching fiber 101 (being the right side in the present embodiment) and the relative position relation that receives optical fiber 102 light inlet end faces (being the left side in the present embodiment) can by optical fiber align unit 200 five dimension alignment tool 201 is accurate adjusts, to guarantee both to obtain optimum optically-coupled effect, the adjusting of described five dimension alignment tools comprises: the translation of X, Y, Z direction, and the rotation of X, Y-direction, wherein the Z direction is the axial direction of launching fiber and incident optical.Receive the light of optical fiber 102 conduction, output, receive and light intensity is carried out light-to-current inversion by photodetector 105, produce the voltage corresponding with light intensity (or luminous power); The output voltage of photodetector 105 through A/D capture card 106, is digital signal with analog signal conversion, and the control interface 501 by system control unit 500 collects in industrial computer 503, measures subsequent treatment for superfinish the Z-direction data source is provided.
In optical fiber align unit 200, the launching fiber 101 in five dimension alignment tool 201 fixed fiber displacement sensing unit 100, and the locus of minute adjustment launching fiber 103 right sides; Fiber fixed frame 202 is used for the reception optical fiber 102 of fixed fiber displacement sensing unit 100; Operating distance and the enlargement factor of microimaging 203 are adjustable; Launching fiber 101 right sides and the relative position relation that receives optical fiber 102 left sides in method using in optic fiber displacement sensor unit 100, realize visual imaging through microimaging 203 and video frequency collection card 204, carry out real time monitoring by the display 502 in system control unit 500, and match with the minute adjustment of five dimension alignment tools 201, realize that the close-loop feedback of launching fiber 101 right sides and reception optical fiber 102 left side relative space position is controlled.
In micro-cantilever probe unit 300, band gauge head microprobe is rigidly secured on high frequency piezoelectric blocks 303; Band gauge head microprobe comprises elasticity micro-cantilever 3011 (horizontal positioned), microplate gauge head 3013 (vertically placement, its bottom is connected with an end of elasticity micro-cantilever) and microprobe 3012 (vertically place, its top is connected with an end of elasticity micro-cantilever) three parts; Microplate gauge head 3013 launching fiber 101 right sides and receiving between optical fiber 102 left sides in method using in optic fiber displacement sensor unit 100 can contactlessly be moved vertically relative to both doing; In the systematic survey process, microprobe 3012 and sample upper surface can carry out contact, contactless or rap three kinds of different working modes; Elasticity micro-cantilever 3013 is made by having certain flexible material, can bend under external force (elastic deformation) or vibrate, and its left end is connected with microplate gauge head 3013, microprobe 3012, and right-hand member is fixed on high frequency piezoelectric blocks 303; High frequency piezoelectric blocks 303 is driven by the output voltage signal of signal generator 302, produces telescopic displacement or vibrates according to predetermined frequency, amplitude, produces the relative displacement of up and down along the space Z-direction with gauge head microprobe 3012 thereby make.
In three-dimensional scanning unit 400, sample to be measured is fixed on 3-D scanning platform 401, and does accurate translation scan with 3-D scanning platform 401 in space X, Y, three directions of Z; The driving voltage of 3-D scanning platform 401 is by high voltage stabilizing source 402 outputs.
In system control unit 500, system control interface 501 is connected with the interface in A/D capture card 106, video frequency collection card 204, signal generator 302, high voltage stabilizing source 402 in other unit respectively; By launching fiber 103 right sides and the visualization display that receives optical fiber 104 left side relative positions in 502 pairs of monitors optical fiber align unit, and carry out system by industrial computer 503 and control and Measurement and Data Processing.
As shown in Figure 2, be the principle schematic of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention.Wherein, form band gauge head microprobe 301 by elasticity micro-cantilever, microprobe and microplate gauge head.In measuring process, LASER Light Source 101 output power W
0, after optical fiber collimator 104 shapings, be coupled to launching fiber 101, power W
outBand gauge head microprobe 301 and sample surfaces are with contact, contactless or the different mode such as rap and interact, and 3-D scanning platform 401 drives samples when XOY surface level interscan campaign, the different distance changes delta H of microprobe 3012 and sample surfaces.
Wherein, in contact mode (contact mode) scanning survey, 3-D scanning platform 401 drives sample in XOY surface level interscan campaign, keep microprobe 3012 to contact with sample surfaces, under repulsive force between atom and the 3011 elastic-restoring force effects of elasticity micro-cantilever, the different distance changes delta H of microprobe 3012 and sample surfaces makes microplate gauge head 3013 produce displacement Z in vertical plane, and Δ H and Δ Z are linear.
In contactless (non-contact mode) scanning survey, microprobe 3012 keeps certain distance (because microprobe does not contact with sample with sample surfaces, therefore in measuring process, sample surfaces can not be damaged), due to long effect apart from the atom attractive force between both, the different distance changes delta H of microprobe 3012 and sample surfaces, make microplate gauge head 3013 produce displacement Z in vertical plane, Δ H and Δ Z are nonlinear relationship.
Rap in formula (tapping mode) scanning survey, microprobe 3012 vibrates with certain amplitude and frequency sinusoidal (or cosine) under the driving of high frequency piezoelectric blocks 303, as vibrating by Asin (ω t) mode, the different distance changes delta H of microprobe 3012 and sample surfaces, the vibration amplitude that causes microprobe 3012 changes, due to atomic effect, change thereby make microplate gauge head 3011 produce displacement Z in vertical plane, Δ H and Δ Z are nonlinear relationship.
In contact, contactless or rap any one pattern of formula, the perpendicular displacement change Delta Z of microplate gauge head 3011 will cause to receive optical fiber 102 received power changes delta W, through photodetector 105, optical power change will be converted to relevant voltage changes delta U.Utilize measuring system to set up sample surfaces and Fibre Optical Sensor relation, in conjunction with piezoelectric scanning in the XOY face, can realize the measurement of sample surfaces 3 D super precision.
According to a kind of scanning probe surface measurement system based on Fibre Optical Sensor that the embodiment of the present invention proposes, its workflow is as follows:
Step (1), mechanical splice LASER Light Source 103 and optical fiber collimator 104, and open LASER Light Source 103, first carry out preheating;
Step (2) is fixed in launching fiber 101 and reception optical fiber 102 on five dimension alignment tools 201 and fiber fixed frame 202 respectively;
Step (3) is adjusted operating distance and the enlargement factor of microimaging 203, and it is clear to make launching fiber 101 and receive the opposing end surface view field imaging of optical fiber 102;
Step (4), the accurate five dimension alignment tools 201 of adjusting utilize the visual feedback of microimaging that monitor 502 shows 203, make launching fiber 101 right sides and reception optical fiber 102 left sides are parallel, the center is coaxial;
Step (5) is adjusted the locus of micro-cantilever probe unit 300 Elastic micro-cantilevers 3011, and it is at launching fiber 101 and receive between optical fiber 102 both ends of the surface, and parallel with both ends of the surface on vertical direction;
Step (6) is further adjusted elasticity micro-cantilever 3011 at the relative position of vertical direction, is alignd with the optical fiber axle center in its top, and surveys the initial position of sample surfaces as it;
Step (7) connects signal generator 302, controls output signal, drives high frequency piezoelectric blocks 303 and drives microprobe 3012 vibrations;
Step (8) is positioned over sample on 3-D scanning platform 401, adjusts sample in the position of vertical direction, reaches and elasticity micro-cantilever 3011 interacting states;
Step (9) records the current location point by the sample surfaces elevation information of method using in optic fiber displacement sensor feedback;
Step (10) connects high voltage stabilizing source 402, and the output control signal drives 3-D scanning platform 401 in the XOY plane interscan;
Step (11) utilizes XOY plane interscan position data, the surface elevation information that method using in optic fiber displacement sensor feeds back and the electric signal that receives to carry out the data processing, realizes the superfinish three-dimensional measurement.
At specific embodiment, the unit of described measuring system can be selected following configuration:
(1) LASER Light Source is selected green glow, output power 500mW; Photodetector is selected Model 840 type light power meters, and highest resolution reaches 10pW;
(2) multimode optical fiber of 62 μ m fibre cores of launching fiber and reception optical fiber select tape joint and tail optical fiber;
(3) microprobe is selected the MADOTR4-10 type of VEECO company, material: silicon nitride (SiliconNitride); Elasticity coefficient: 0.06～0.58N/m, needle type radius (Tip Radius): 10nm, needle point height (Tip Height): 2～3.5 μ m;
(4) a microimaging parameter---image resolution ratio: 1600 * 1200; Camera lens: Dual Axis 27 * and 100 *; Focusing range: 10mm arrives infinite distance (infinity), manual mode; Frame frequency: be greatly 30f/s; Enlargement factor: 20 * to 200 *.
According to above configuration, the key technical indexes of this measuring system can reach:
(1) sensing range＜50 μ m;
(2) detection sensitivity: 2nm/1nW.That is, when the height change 2nm of sample surfaces, luminous power be changed to 1nW.
The measuring system measurement range that the embodiment of the present invention proposes can reach tens microns, and can realize the nanometer scale resolution of vertical and horizontal.
With reference to Fig. 3, show the process flow diagram of a kind of scanning probe surface measurement embodiment of the method based on Fibre Optical Sensor of the present invention, comprising:
Step 33 incides the luminous power that receives optical fiber by method using in optic fiber displacement sensor unit inspection launching fiber, and converts described luminous power to electric signal and be input to system control unit;
In the preferred embodiments of the present invention, the mode of operation of described measuring method comprises: contact, contactless and rap formula.
Between each embodiment of each embodiment in this instructions, identical similar part is mutually referring to getting final product.For embodiment of the method, because it is substantially similar to system embodiment, so description is fairly simple, relevant part gets final product referring to the part explanation of system embodiment.
Above to a kind of scanning probe surface measurement system and measuring method based on Fibre Optical Sensor provided by the present invention, be described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (10)
1. the scanning probe surface measurement system based on Fibre Optical Sensor, is characterized in that, comprising:
The method using in optic fiber displacement sensor unit comprises launching fiber and receives optical fiber, incides the luminous power that receives optical fiber for detection of launching fiber, and converts described luminous power to electric signal and be input to system control unit;
The optical fiber align unit is used for according to the supervision of system control unit, launching fiber and reception optical fiber being carried out the axle aligning;
The micro-cantilever probe unit comprises band gauge head microprobe, and described band gauge head microprobe comprises: the elasticity micro-cantilever, respectively with end microplate gauge head connected vertically and a microprobe of elasticity micro-cantilever, described microplate gauge head is at launching fiber and receive between optical fiber; Described micro-cantilever probe unit is used for the control according to system control unit, by changing position or the elastic deformation of elasticity micro-cantilever, the position of adjustment microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Three-dimensional scanning unit is used for the control according to system control unit, makes sample do three-dimensional motion scan;
System control unit, be used for the motion of axle alignment function, microprobe and the three-dimensional scanning unit of optical fiber align unit is monitored or controls, and the position on sample surfaces is carried out data by industrial computer and is processed to the electric signal that receives and microprobe, obtains the surface structure of sample.
2. the system as claimed in claim 1, is characterized in that, described method using in optic fiber displacement sensor unit also comprises:
LASER Light Source is used for output light;
Optical fiber collimator is used for carrying out shaping by the light beam to LASER Light Source output, is coupled in launching fiber;
Photodetector is used for producing corresponding voltage by the light that receives optical fiber output is carried out opto-electronic conversion;
The A/D capture card be used for to gather the voltage of photodetector output, and changes by A/D the electric signal that will obtain and be input to system control unit.
3. the system as claimed in claim 1, is characterized in that, described optical fiber align unit comprises:
Five dimension alignment tools are used for the launching fiber of fixed fiber displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle and aim at;
Fiber fixed frame is for the reception optical fiber of fixed fiber displacement sensing unit;
The microimaging head is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are taken;
Video frequency collection card be used for to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
4. the system as claimed in claim 1, is characterized in that, described micro-cantilever probe unit also comprises:
Signal generator is used for the control according to system control unit, to high frequency piezoelectric blocks output drive signal;
The high frequency piezoelectric blocks is used for producing telescopic displacement or vibrating according to predetermined frequency, amplitude according to described driving signal;
The other end of described elasticity micro-cantilever is fixed on the high frequency piezoelectric blocks, and the elasticity micro-cantilever drives microprobe generation perpendicular displacement according to the motion of high frequency piezoelectric blocks.
5. system as claimed in claim 4, is characterized in that,
Described elasticity micro-cantilever carries out contactless vertical movement according to the perpendicular displacement drive microplate gauge head of microprobe with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
6. the system as claimed in claim 1, is characterized in that, described three-dimensional scanning unit comprises:
The 3-D scanning platform is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, Y, three directions of Z;
The high voltage stabilizing source is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
7. the system as claimed in claim 1, is characterized in that, described system control unit comprises:
System control interface is used for to the control signal of signal generator and high voltage stabilizing source output industrial computer, and receives the electric signal of A/D capture card and the vision signal of video frequency collection card;
Monitor is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are carried out visual monitor;
Industrial computer for generation of control signal, and carries out data to the flat scanning position of the electric signal that receives, perpendicular displacement that microprobe produces and sample and processes, and obtains the surface structure of sample.
8. the system as claimed in claim 1, is characterized in that,
The mode of operation of described measuring system comprises: contact, contactless and rap formula.
9. the scanning probe surface measurement method based on Fibre Optical Sensor, is characterized in that, comprising:
According to the supervision of system control unit, by the optical fiber align unit to launching fiber with receive optical fiber and carry out axle and aim at;
According to the control of system control unit, make sample do three-dimensional motion scan; Adjust simultaneously the position of elasticity micro-cantilever by the micro-cantilever probe unit, change the position of microprobe on sample surfaces, and drive the microplate gauge head and produce perpendicular displacement, change and incide the luminous power that receives optical fiber;
Incide the luminous power that receives optical fiber by method using in optic fiber displacement sensor unit inspection launching fiber, and convert described luminous power to electric signal and be input to system control unit;
Position on sample surfaces is carried out data by industrial computer and is processed to the electric signal that receives and microprobe in system control unit, obtains the surface structure of sample.
10. method as claimed in claim 9, is characterized in that,
The mode of operation of described measuring method comprises: contact, contactless and rap formula.
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| CN101957179B (en) * | 2010-08-27 | 2012-02-01 | 清华大学 | Optical fiber displacement measurement system and method |
| JP5870576B2 (en) * | 2011-09-22 | 2016-03-01 | オムロン株式会社 | Optical measuring device |
| CN105021128B (en) * | 2015-07-02 | 2017-09-26 | 哈尔滨工业大学 | Probe method for sensing and device based on beam-scanning confocal Detection Techniques |
| CN105043255B (en) * | 2015-07-02 | 2018-01-26 | 哈尔滨工业大学 | Combination socle beam probe method for sensing and device based on fiber exit optical detection |
| CN107422139A (en) * | 2017-04-07 | 2017-12-01 | 广东精点数据科技股份有限公司 | A kind of rotor rotational frequency measuring method and system |
| CN110133108B (en) * | 2019-05-13 | 2020-09-22 | 浙江大学 | Measuring system and measuring method for sub-surface micro-nano defects of ultra-precise element |
| JP7347793B2 (en) * | 2019-11-13 | 2023-09-20 | 株式会社ディスコ | Imaging device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6452161B1 (en) * | 2000-03-28 | 2002-09-17 | Advanced Micro Devices, Inc. | Scanning probe microscope having optical fiber spaced from point of hp |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Complete optical fiber probe scanning type near-field optical microscope |
| US20080049223A1 (en) * | 2006-08-22 | 2008-02-28 | Masato Iyoki | Optical displacement-detecting mechanism and probe microscope using the same |
| CN101299024A (en) * | 2008-05-08 | 2008-11-05 | 北京大学 | Nano material optical characterization method and system based on optical fiber and nano-controller |
| CN101520313A (en) * | 2009-03-24 | 2009-09-02 | 哈尔滨工业大学 | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006349459A (en) * | 2005-06-15 | 2006-12-28 | Jeol Ltd | Scanning probe microscope |
-
2010
- 2010-05-21 CN CN 201010185004 patent/CN101833018B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6452161B1 (en) * | 2000-03-28 | 2002-09-17 | Advanced Micro Devices, Inc. | Scanning probe microscope having optical fiber spaced from point of hp |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Complete optical fiber probe scanning type near-field optical microscope |
| US20080049223A1 (en) * | 2006-08-22 | 2008-02-28 | Masato Iyoki | Optical displacement-detecting mechanism and probe microscope using the same |
| CN101299024A (en) * | 2008-05-08 | 2008-11-05 | 北京大学 | Nano material optical characterization method and system based on optical fiber and nano-controller |
| CN101520313A (en) * | 2009-03-24 | 2009-09-02 | 哈尔滨工业大学 | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation |
Non-Patent Citations (5)
| Title |
|---|
| H.Sturm et al.The Use of a Fibre-Based Light Sensor for the Calibration of Scanning Probe Microscopy Piezos.《physica status solidi(a)》.1999,第173卷(第1期),225-234. |
| JP特开2006-349459A 2006.12.28 |
| The Use of a Fibre-Based Light Sensor for the Calibration of Scanning Probe Microscopy Piezos;H.Sturm et al;《physica status solidi(a)》;19990531;第173卷(第1期);225-234 * |
| 微探针纳米尺度振动测试的实验研究;林浩山等;《光学技术》;20100331;第36卷(第2期);168-171 * |
| 林浩山等.微探针纳米尺度振动测试的实验研究.《光学技术》.2010,第36卷(第2期),168-171. |
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