CN102788888B - Probe inserting device of scanning probe microscope and method thereof - Google Patents
Probe inserting device of scanning probe microscope and method thereof Download PDFInfo
- Publication number
- CN102788888B CN102788888B CN201210265549.4A CN201210265549A CN102788888B CN 102788888 B CN102788888 B CN 102788888B CN 201210265549 A CN201210265549 A CN 201210265549A CN 102788888 B CN102788888 B CN 102788888B
- Authority
- CN
- China
- Prior art keywords
- probe
- control module
- controller
- laser
- inserting needle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses a probe inserting device of a scanning probe microscope. A stepping motor (8) is fixed on a base of the probe inserting device of the scanning probe microscope in a direction perpendicular to a horizontal direction, wherein the stepping motor (8) is connected with a piezoelectric ceramic scanner (7); a sample platform (11) is arranged on the piezoelectric ceramic scanner (7); the tip of a probe (2) is downward and the probe (2) is positioned rightly over the sample platform (11); a laser source (9) is installed above the probe (2); a photoelectric sensor (10) is positioned above the probe and is used for receiving a position signal of a light spot reflected by the probe (2), converting the position signal of the light spot into a voltage signal and sending the voltage signal into a controller (4); the stepping motor (8) is controlled by the controller (4) to drive a sample to approach the probe (2); the probe inserting device of the scanning probe microscope further comprises a dual-channel reflective optical fiber displacement sensor; and the distance between the probe and the surface of the sample is detected by the dual-channel reflective optical fiber displacement sensor. Under the control of the controller, the thick probe inserting speed is increased; and in combination with thin probe insertion control, the probe inserting device realizes quick probe insertion.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy (SPM) inserting needle device and method of puncture.
Background technology
Scanning probe microscopy (SPM) is as a kind of high-resolution three-dimensional appearance detecting instrument, not only in field of biology, be widely applied, obtained the great attention (T.Ando of semiconductor product industry simultaneously, " High-speed atomic force microscopy coming ofage ", Nanotechnology, 2012,23:06200-062028.).SPM is when sample surfaces scans, and the probe on micro-cantilever and sample interact, and cause micro-cantilever deflection, and this defection signal changes for characterizing the pattern of sample surfaces, and can reach atom level high resolving power.Different according to probe and the sample surfaces mode of action, SPM can realize many information measurements such as Surface field, carrier concentration profile, surface capacitance.Along with what process live width in semi-conductor industry, constantly reduce a large amount of uses with high dielectric constant material, optical detection and scanning electron microscope detection method have all run into technology barrier.The advantages such as the high resolving power of SPM, many information measurements, three-dimensional imaging will be in semiconductor detection field performance significant role.
At a high speed, high-throughout detection is the key that can a kind of detection technique practical in semi-conductor industry.The speed of detection speed will directly affect the detection efficiency of industry spot, and the slow disadvantage of SPM exactly of measuring speed.Affect SPM measuring speed and mainly comprise two aspect factors: one, the inserting needle time, namely probe, by away from sample surfaces position (1 ~ 2mm), approaches to the required time of sample surfaces scanning imagery position by feed mechanism (as stepper motor), is generally tens seconds to several minutes; Its two, imaging time, after namely inserting needle completes, shows the required time from starting the first spot scan until complete piece image, is generally a few minutes to tens of minutes.
At present, for the imaging time that shortens SPM, there have been a lot of research institutions to carry out correlative study work (B.J.Kenton, A.J.Fleming, K.K.Leang, " Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed ", Review of Scientific Instruments, 2011,82 (12): 123703-123711.; C.Richter, M.Burri, T.Sulzbach, C.Penzkofer, B.Irmer, " Ultrashort cantilever probes for high speed atomic force microscopy ", SPIE, 2011.), Bing You company develops Related product (Bruker Ltd., " Dimension fastscan:the world ' s fastest AFM ", 2011.
http:// www.bruker-axs.com).For the inserting needle time that shortens SPM, the general method that adopts segmentation inserting needle, be about to inserting needle process and be divided into two parts: first is inserting needle slightly fast, stepper motor by probe from approaching fast to closer locations (20um to 200um) compared with distant positions (more than 1mm) from sample surfaces, approximate procedure adopts laser interferometer, laser limit switch, capacitive transducer or judge by camera automatic focus completing place, Chinese patent 200910220156.X adopts laser limit switch, United States Patent (USP) U.S.Pat.No.7, 770, 231B2. adopt camera auto focusing method, second portion is thin inserting needle, complete first's inserting needle to after sample surfaces closer locations, stepper motor stop motion, high-speed response motor or piezoelectric ceramic tube are as driver, as United States Patent (USP) U.S.Pat.No.5,614,712 and U.S.Pat.No.2006/0230474A1., coordinate certain control method to complete inserting needle process, this process can accurately be controlled the distance of probe and sample surfaces, prevent from damaging, consuming time longer.
For thick inserting needle part, introduce the risk that laser interferometer or camera Techniques of Automatic Focusing can avoid probe and sample to clash into, but its complex structure, cost is high.Capacitive transducer is responsive to electromagnetic signal, to operating environment, requires high.The horizontal direction laser limit switch of Chinese patent 200910220156.X invention has the features such as simple in structure, cost is low, but its each change limit switch threshold value all needs manually to adjust laser instrument initial position.
Summary of the invention
The object of the invention is to overcome that existing SPM quick needle insertion apparatus structure is complicated, cost is high, adaptive capacity to environment is low, the deficiency of inconvenient operation, a kind of novel quick needle insertion apparatus and method are provided, the present invention can not only realize quick needle insertion, and have simple in structure, cost is low, strong adaptability, the feature such as easy and simple to handle, can easily be integrated in different SPM structures, be applicable to the on-the-spot detection automatically of semi-conductor industry.
Scanning probe microscopy inserting needle device of the present invention comprises controller, stepper motor, piezoelectric scanner, LASER Light Source, photoelectric sensor and probe, also comprises binary channels reflection formula optical fibre displacement sensor.Described controller is electrically connected to laser instrument, receiver in stepper motor, piezoelectric scanner, LASER Light Source, photoelectric sensor and binary channels reflection formula optical fibre displacement sensor.Controller core control module adopts embedded main board, coordinates host computer to complete data communication, and instruction is controlled, AD data acquisition, DA output, step motor control, photoelectric sensor information detects, scanner FEEDBACK CONTROL, binary channels reflection formula optical fibre displacement sensor control etc.Described controller mainly comprises PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module.Wherein, PC104 embedded main board is the core of controlling, and by network, communicates by letter with host computer, by PC104 bus, realizes step motor control module, photoelectric sensor information detection module, the control of scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module; Step motor control module controls stepper motor, stepper motor drive detected sample carry out to probe approach and away from action, for realizing Fast Coarse inserting needle; Photoelectric sensor information detection module is for detection of the output signal of photoelectric sensor, and the situation that contacts of judgement probe and sample surfaces also provides input signal for scanner feedback control module; Scanner feedback control module is used for controlling that piezoelectric scanner is quick, high precision is flexible, thereby accurately controls the interaction of probe and sample surfaces, realizes and can't harm the thin inserting needle of formula; Binary channels reflection formula optical fibre displacement sensor control module is used for controlling laser instrument Emission Lasers bundle, by receiver, is received the laser being reflected back and is the digital signal that control program can be identified through analog to digital conversion.
Described stepper motor is to be fixed on the base of scanning probe microscopy inserting needle device perpendicular to surface level direction, stepper motor connects piezoelectric scanner by screw rod.Described piezoelectric scanner can carry out X, Y, Z tri-direction of principal axis micrometric displacement motions, fixedly mounts sample stage, horizontal fixed placement sample on sample stage on piezoelectric scanner.Probe is installed on probe base and with scanning probe microscopy and is rigidly connected, and probe tip is position directly over sample stage down.Probe top fixed installation LASER Light Source, LASER Light Source with perpendicular to surface level direction Emission Lasers bundle through probe reflection to the photoelectric sensor that is positioned at probe oblique upper, photoelectric sensor is adjusted to the position that receives probe reflection hot spot by micro-adjusting mechanism, photoelectric sensor receives the light spot position signal of probe reflection, and light spot position signal is converted to voltage signal sends into controller, controller is controlled inserting needle process by light spot position signal and is judged whether inserting needle completes.Binary channels reflection formula optical fibre displacement sensor is for detection of the distance between probe and sample surface, binary channels reflect formula optical fibre displacement sensor by popping one's head in, optical fiber, laser instrument and receiver form.Described probe tip has three circular holes, and one is laser emission port, and two other is respectively laser pick-off hole one and laser pick-off hole two.Described probe is fixed on scan probe microscopic probe seat side, the top of probe is downward, perpendicular to detected sample surfaces, probe is H ' with the vertical range of probe, and Hmin-h0<H ' <Hmax-h0, wherein Hmin is the binary channels reflection formula optical fibre displacement sensor probe that can detect and the minor increment on sample surface, Hmax is the binary channels reflection formula optical fibre displacement sensor probe that can detect and the ultimate range on sample surface, and h0 is the distance of thick inserting needle probe and sample surfaces while finishing.Described optical fiber has three, and one is launching fiber, and other two are respectively the first reception optical fiber and the second reception optical fiber.One end of launching fiber is fixedly connected with laser emission port, and the other end of launching fiber is fixedly connected with laser instrument.First receives optical fiber is fixedly connected with respectively the first laser pick-off hole and the second laser pick-off hole with second one end that receives optical fiber, and first receives optical fiber is fixedly connected with receiver with second other end that receives optical fiber.Laser instrument and receiver are electrically connected to controller respectively.The binary channels reflection formula optical fibre displacement sensor control module of controller is controlled laser instrument Emission Lasers bundle, this laser beam conducts to the laser emission port on probe by described launching fiber, laser beam is from laser emission port vertical irradiation to being detected sample surfaces, reflex to two laser pick-off holes of probe, the light signal that two laser pick-off holes receive conducts to receiver by two root receiving fibers respectively, receiver is converted to two-way analog voltage signal Vs1 and Vs2 by two ways of optical signals, binary channels reflection formula optical fibre displacement sensor control module is converted to respectively two-way digital voltage signal Vd1 and Vd2 by two-way analog voltage signal Vs1 and Vs2, and two-way digital voltage signal Vd2 and Vd1 are divided by and draw nondimensional digital quantity Vd, digital quantity Vd is dull consistent within the scope of Hmin<H<Hmax with sample surfaces distance H with probe, set up digital quantity Vd and H look-up table one to one.Controller binary channels reflection formula optical fibre displacement sensor control module utilizes look-up table to judge probe and sample surfaces distance H by Vd, due to H=h+H ', wherein h is the current distance of probe and sample surfaces, and the distance H of probe and probe ' fix, can judge the distance h of probe and sample surfaces.
Method of puncture of the present invention comprises thick inserting needle and thin inserting needle at a slow speed fast, is specially:
Described thick method of puncture comprises the steps:
A. for the first time before inserting needle, the distance h 0 of probe and sample surfaces when setting thick inserting needle and finish by controller, the position that the distance that step motor control module controls stepper motor in controller drives detected sample to move to sample surfaces and probe is h0, the binary channels reflection formula optical fibre displacement sensor control module record of controller reflects by binary channels the digital quantity Vd that formula optical fibre displacement sensor collects, and this digital quantity Vd is recorded as to constant VD;
B. controller by step motor control module controls stepper motor drive sample away from probe to 1mm ~ 2mm safe distance, start thick inserting needle.
C. controller drives sample stage to rise by step motor control module controls stepper motor with 50um/s ~ 100um/s speed, by binary channels, reflect formula optical fibre displacement sensor control module simultaneously and detect binary channels reflection formula optical fibre displacement sensor output digital quantity Vd, when digital quantity Vd is less than or equal to the constant VD of step a setting, controller step motor control module stops stepper motor motion, and thick inserting needle completes;
Described thin method of puncture comprises the steps:
D. the scanner feedback control module of controller is controlled piezoelectric scanner and is extended to Z direction, approaches probe, with the photoelectric sensor information detection module of Time Controller, detects on photoelectric sensor the location deflection signal by probe reflection laser facula; When piezoelectric scanner reaches Z direction maximum displacement 1um ~ 8um, as photoelectric sensor is not exported 200mV ~ 500mV mutation voltage signal, scanner feedback control module is controlled piezoelectric scanner and is shortened to least displacement 0um position in Z direction, by controller step motor control module controls stepper motor, drive sample to approach to probe, approaching displacement is piezoelectric scanner Z direction maximum displacement simultaneously;
E. repeating step d, until photoelectric sensor produces 200mV ~ 500mV mutation voltage signal, thin inserting needle completes.
Principle of work and the course of work of binary channels reflection formula optical fibre displacement sensor are as follows: laser instrument Emission Lasers bundle conducts to the laser emission port of probe tip through launching fiber, laser beam is from laser emission port vertical irradiation to being detected sample surfaces, reflex to two laser pick-off holes of probe, the aperture in laser emission port and laser pick-off hole equates, the center distance in laser emission port and laser pick-off hole is respectively p1 and p2, p1<p2.The light signal that two laser pick-off holes receive conducts to receiver by two root receiving fibers respectively, and receiver is converted to two-way analog voltage signal by two ways of optical signals.The binary channels reflection formula optical fibre displacement sensor control module of two-way analog voltage signal via controller is processed and is drawn nondimensional digital quantity, this digital quantity changes dull consistent with the relative displacement of probe sample surfaces within the specific limits, set up the look-up table that this digital quantity and described relative displacement change, by look-up table, can draw probe and the sample surface distance that Contemporary Digital amount is corresponding.
The distance on the direct measuring sonde of formula optical fibre displacement sensor and sample surface is reflected in the present invention by binary channels, thereby records the distance on probe and sample surface.Because probe and the relative position of probe are fixed, therefore can guarantee the accurate of measurement result.Binary channels reflection formula optical fibre displacement sensor adopts the principle of laser reflection, can avoid the impacts of external environment on measurement effect such as temperature, electromagnetism.That binary channels reflection formula optical fibre displacement sensor also has is simple in structure, cost is low, strong adaptability, feature easy and simple to handle, can be integrated into easily the advantages such as SPM structure.The present invention sets thick inserting needle position by controller, can change flexibly thick inserting needle position by control program.The use in conjunction of thick, the thin inserting needle mode of the present invention, can improve inserting needle speed, can prevent again the damage of inserting needle process probe and sample.These characteristics makes the present invention can be widely used in dissimilar SPM, is particularly useful for the SPM of the working environment complexity such as semi-conductor industry Site Detection.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is further described.
The structured flowchart of Fig. 1 inserting needle device of the present invention;
Fig. 2 controller architecture sketch;
Fig. 3 binary channels reflection formula optical fibre displacement sensor structural drawing
Fig. 4 binary channels reflection formula optical fibre displacement sensor probe is mounted to the vertical view of SPM probe base position;
Fig. 5 is the side view of Fig. 4;
The schematic diagram of Fig. 6 binary channels reflection formula optical fibre displacement sensor;
" distance-digital voltage signal " curve of Fig. 7 two-way receiver hole;
" distance-digital quantity Vd " curve after Fig. 8 two-way digital voltage signal is divided by;
In figure: 1 binary channels reflection formula optical fibre displacement sensor, 2 probes, 3 probe bases, 4 controllers, 5 switches, 6 feedback controllers, 7 scanners, 8 stepper motors, 9 LASER Light Source, 10 photoelectric sensors, 11 sample stages, 12 receive optical fiber, 13 launching fibers, and 14 receive optical fiber, 15 laser instruments, 16 receivers, 17 receiver holes, 18 transmitting apertures, 19 receiver holes, 20 probes.
Embodiment
As shown in Figure 1, the inventive system comprises controller 4, stepper motor 8, piezoelectric scanner 7, LASER Light Source 9, photoelectric sensor 10, probe 2 and binary channels reflection formula optical fibre displacement sensor 1.Described controller 4 is electrically connected to stepper motor 8, piezoelectric scanner 7, LASER Light Source 9, photoelectric sensor 10 and binary channels reflection formula optical fibre displacement sensor 1.Described stepper motor 8 is fixed on the base of scanning probe microscopy inserting needle device with the direction perpendicular to surface level, stepper motor 8 connects piezoelectric scanner 7 by screw rod.Described piezoelectric scanner 7 can carry out X, Y, Z tri-direction of principal axis micrometric displacement motions.Sample stage 11 is set on piezoelectric scanner 7.Probe 2 is installed on probe base 3 and with scanning probe microscopy and is rigidly connected.Probe 2 needle points be positioned at down sample stage 11 directly over.Probe 2 top fixed installation LASER Light Source 9.LASER Light Source 9 is with perpendicular to surface level direction Emission Lasers bundle, and laser beam reflexes to the photoelectric sensor 10 that is positioned at probe 2 oblique uppers through probe 2.Photoelectric sensor 10 is adjusted to the position that receives probe 2 flares by micro-adjusting mechanism, photoelectric sensor 10 receives the light spot position signal of probe 2 reflections, and light spot position signal is converted to voltage signal sends into controller, controller is controlled inserting needle process by light spot position signal and is judged whether inserting needle completes.
As shown in Figure 2, controller 4 mainly comprises PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module.Wherein, PC104 embedded main board is the core of controlling, by network, communicate by letter with host computer, receive the instruction of host computer transmission and the data of collection are returned to host computer, utilizing PC104 bus to realize the control to step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module.Step motor control module controls stepper motor 8 drive detected sample carry out to probe 2 approach and away from action, for realizing Fast Coarse inserting needle.Photoelectric sensor information detection module is for detection of the output signal of photoelectric sensor 10, and the situation that contacts of judgement probe 2 and sample surfaces also provides input signal for scanner feedback control module.Scanner feedback control module be used for controlling piezoelectric scanner 7 fast, high-precision micro displacement motion, thereby accurately control the interaction of probe 2 and sample, realize the harmless thin inserting needle of formula; Binary channels reflection formula optical fibre displacement sensor control module is used for controlling laser instrument 15 Emission Lasers bundles, by receiver 16, is received the laser being reflected back and is the digital signal that control program can be identified through analog to digital conversion.
As shown in Figure 3, binary channels reflection formula optical fibre displacement sensor 1 consists of probe 20, launching fiber 13, reception optical fiber 12,14, laser instrument 15 and receiver 16.There are three circular holes on the top of described probe 20, and one is laser emission port 18, and two other is laser pick-off hole 17,19.One end of launching fiber 13 is fixedly connected with laser emission port 18, and the other end of launching fiber 13 is fixedly connected with laser instrument 15.First one end that receives optical fiber 12 is fixedly connected with one end that the first laser pick-off hole 17, the second receives optical fiber 14 and is fixedly connected with the second laser pick-off hole 19, the first and receives optical fiber 12 and be fixedly connected with receiver 16 with second other end that receives optical fiber 14.Laser instrument 15 and receiver 16 are electrically connected to controller 4 respectively.Probe 20 is fixed on the side of scan probe microscopic probe seat 3, as shown in Figure 4.The top of probe 20 is downward, perpendicular to sample surface, with vertical range the H '=600(um of probe 2), as shown in Figure 5.Controller 4 binary channels reflection formula optical fibre displacement sensor control modules are controlled laser instrument 15 Emission Lasers bundles, this laser beam conducts to the laser emission port 18 on probe by launching fiber 13, laser from laser emission port 18 vertical irradiations to sample surfaces, reflex to two laser pick-off holes 17,19 of probe 20, as shown in Figure 6.The light signal that two laser pick-off holes receive conducts to receiver 16 by two root receiving fibers 12 and 14 respectively, receiver 16 is converted to two-way analog voltage signal Vs1 and Vs2 by two ways of optical signals, controller 4 binary channels reflection formula optical fibre displacement sensor control modules are converted to respectively two-way digital voltage signal Vd1 and Vd2 by two-way analog voltage signal Vs1 and Vs2, as shown in Figure 7, and two-way digital voltage signal Vd2 and Vd1 are divided by and obtain digital quantity Vd, digital quantity Vd is dull consistent within the scope of Hmin<H<Hmax with sample surfaces distance H with probe, and Hmin=520um, Hmax=850um, as shown in Figure 8, set up digital quantity Vd and the sample surfaces distance H look-up table one to one of popping one's head in, binary channels reflection formula optical fibre displacement sensor control module in controller 4 utilizes look-up table to pass through digital quantity Vd judgement probe 20 and sample surfaces distance H, due to the distance H of probe 20 with probe 2 '=600um, and then the distance h=H-600 of judgement probe 2 and sample surfaces.
Method of puncture of the present invention comprises thick inserting needle and thin inserting needle at a slow speed fast, and the method for operating of embodiment is:
A. for the first time before inserting needle, the distance h 0=60um of probe 2 and sample surfaces while finishing by the thick inserting needle of controller 4 setting, controller 4 step motor control module controls stepper motors 8 drive detected sample to move to distance probes 2 for 60um position, and controller 4 binary channels reflection formula optical fibre displacement sensor control module records reflect by binary channels the digital quantity Vd=Vd2/Vd1=0.65/2.23=0.29 that formula optical fibre displacement sensor 1 collects;
B. controller 4 by step motor control module controls stepper motor 8 drive samples away from probe to 1mm safe distance, start thick inserting needle.
C. controller 4 drives sample stage 11 to rise by step motor control module controls stepper motor 8 with 100um/s speed, by binary channels, reflect formula optical fibre displacement sensor control module simultaneously and detect binary channels reflection formula optical fibre displacement sensor 1 output digital quantity Vd, when Vd≤0.29, controller step motor control module stops stepper motor motion, thick inserting needle completes, approximately 10 seconds consuming time;
D. start thin inserting needle, the scanner feedback control module of controller 4 is controlled piezoelectric scanner 7 and is extended and approach probe 2 to Z direction, with the photoelectric sensor information detection module of Time Controller 4, detects on photoelectric sensor 10 the location deflection signal by probe 2 reflected laser light spot; When piezoelectric scanner 7 reaches Z direction maximum displacement 4um, as still having exporting change amount, photoelectric sensor 10 is not greater than the mutation voltage signal of 200mV, scanner feedback control module is controlled piezoelectric scanner 7 and is shortened to least displacement 0um position in Z direction, step motor control module controls stepper motor by controller 4 drives sample to approach to probe simultaneously, and approaching displacement is piezoelectric scanner Z direction maximum displacement 4um;
E. repeating step d, until photoelectric sensor 10 produces the mutation voltage signal that is greater than 200mV, thin inserting needle completes, approximately 14 seconds consuming time.
In aforesaid operations method, controller 4 receives by network control parameter and the instruction that host computer sends, and scanning probe microscopy inserting needle device inserting needle process of the present invention is controlled.
Claims (3)
1. a scanning probe microscopy inserting needle device, described inserting needle device comprises controller (4), stepper motor (8), piezoelectric scanner (7), LASER Light Source (9), photoelectric sensor (10), probe (2) and binary channels reflection formula optical fibre displacement sensor (1); Described controller (4) is electrically connected to laser instrument (15), receiver (16) in stepper motor (8), piezoelectric scanner (7), LASER Light Source (9), photoelectric sensor (10) and binary channels reflection formula optical fibre displacement sensor (1); Described stepper motor (8) is to be fixed on the base of scanning probe microscopy inserting needle device perpendicular to surface level direction, and stepper motor (8) connects piezoelectric scanner (7); Sample stage (11) is set on piezoelectric scanner (7); Probe (2) needle point down, be positioned at sample stage (11) directly over; The top of probe (2) is provided with LASER Light Source (9); Photoelectric sensor (10) is positioned at probe oblique upper, the position signalling of the hot spot that reception probe (2) reflects, and light spot position signal is converted to voltage signal sends into controller (4), controller (4) is controlled inserting needle process by light spot position signal and is judged whether inserting needle completes;
It is characterized in that, described binary channels reflection formula optical fibre displacement sensor (1) consists of probe (20), launching fiber (13), reception optical fiber (12,14), laser instrument (15) and receiver (16); The top of described probe (20) has laser emission port (18) and two laser pick-off holes (17,19); Described probe (20) is fixed on the side of scan probe microscopic probe seat (3); The top of probe (20) is downward, perpendicular to detected sample surfaces; Probe (20) is H ' with the vertical range of probe (2), and Hmin-h0<H ' <Hmax-h0, wherein Hmin is binary channels reflection formula optical fibre displacement sensor (1) probe (20) that can detect and the minor increment on sample surface, Hmax is binary channels reflection formula optical fibre displacement sensor (1) probe (20) that can detect and the ultimate range on sample surface, and h0 is the distance of thick inserting needle probe (2) and sample surfaces while finishing; One end of described launching fiber (13) connects laser emission port (18), the other end connecting laser (15) of launching fiber (13); First one end that receives optical fiber (12) connects the first laser pick-off hole (17), and first other end that receives optical fiber (12) connects receiver (16); Second one end that receives optical fiber (14) connects the second laser pick-off hole (19), and second other end that receives optical fiber (14) connects receiver (16);
Described controller (4) comprises PC104 embedded main board, step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module; Described PC104 embedded main board is communicated by letter with host computer by network, receive the instruction of host computer transmission and the data of collection are returned to host computer, utilizing PC104 bus to realize the control to step motor control module, photoelectric sensor information detection module, scanner feedback control module and binary channels reflection formula optical fibre displacement sensor control module; Step motor control module controls stepper motor drive detected sample carry out to probe approach and away from action; Photoelectric sensor information detection module detects the output signal of photoelectric sensor (10), and the situation that contacts of judgement probe (2) and sample surfaces also provides input signal for scanner feedback control module; Scanner feedback control module is used for controlling the micrometric displacement motion of piezoelectric scanner (7); Binary channels reflection formula optical fibre displacement sensor control module is used for controlling laser instrument Emission Lasers bundle, by receiver, is received the laser being reflected back and is the digital signal that control program can be identified through analog to digital conversion.
2. according to scanning probe microscopy inserting needle device claimed in claim 1, it is characterized in that, described binary channels reflection formula optical fibre displacement sensor control module is controlled laser instrument (15) Emission Lasers bundle, and this laser beam conducts to the laser emission port (18) on probe (20) by launching fiber (13); Laser beam is from laser emission port (18) vertical irradiation to being detected sample surfaces, reflex to two laser pick-off holes (17,19) of probe (20), the light signal that two laser pick-off holes (17,19) receive conducts to receiver (16) by two root receiving fibers (12,14) respectively, and receiver (16) is converted to respectively analog voltage signal Vs1 and Vs2 by the two ways of optical signals that receives optical fiber (12) and reception optical fiber (14); Described binary channels reflection formula optical fibre displacement sensor control module is converted to respectively two-way digital voltage signal Vd1 and Vd2 by two-way analog voltage signal Vs1 and Vs2, and described two-way digital voltage signal Vd2 and Vd1 are divided by and obtain digital quantity Vd, digital quantity Vd is dull consistent within the scope of Hmin<H<Hmax with sample surfaces distance H with probe, sets up digital quantity Vd and probe (20) and sample surfaces distance H look-up table one to one; Described binary channels reflection formula optical fibre displacement sensor control module utilizes look-up table to pass through digital quantity Vd judgement probe (20) and sample surfaces distance H, according to formula H=h+H ', wherein h is the distance of probe (2) and sample surfaces, H ' is the distance of probe (20) with probe (2), can judge the distance h of probe (2) and sample surfaces.
3. the method for puncture of the scanning probe microscopy inserting needle device described in employing claim 1 or 2, is characterized in that, described method of puncture comprises thick inserting needle and thin inserting needle, and concrete operation step is:
A. for the first time before inserting needle, the distance h 0 of probe (2) and sample surfaces when setting thick inserting needle and finish by controller (4), the position that the distance that the step motor control module controls stepper motor (8) of controller (4) drives detected sample to move to sample surfaces and probe (2) is h0, the binary channels reflection formula optical fibre displacement sensor control module record of controller (4) reflects by binary channels the digital quantity Vd that formula optical fibre displacement sensor (1) collects, and this digital quantity Vd is recorded as to constant VD;
B. controller (4) by step motor control module controls stepper motor (8) drive sample away from probe to 1mm～2mm safe distance, start thick inserting needle;
C. controller (4) drives sample stage (11) to rise by step motor control module controls stepper motor (8) with 50um/s～100um/s speed, by binary channels, reflect formula optical fibre displacement sensor control module simultaneously and detect binary channels reflection formula optical fibre displacement sensor (1) output digital quantity Vd, when Vd≤VD, controller step motor control module stops stepper motor motion, and thick inserting needle completes;
D. start thin inserting needle, the scanner feedback control module of controller (4) is controlled piezoelectric scanner (7) and is extended and approach probe (2) to Z direction, and the photoelectric sensor information detection module of same Time Controller (4) detects the upper location deflection signal by probe (2) reflected laser light spot of photoelectric sensor (10); When piezoelectric scanner (7) reaches Z direction maximum displacement 1um～8um, as photoelectric sensor (10) is not exported 200mV～500mV mutation voltage signal, scanner feedback control module is controlled piezoelectric scanner (7) and is shortened to least displacement 0um position in Z direction, step motor control module controls stepper motor (8) by controller (4) drives sample to approach to probe (2) simultaneously, and approaching displacement is piezoelectric scanner Z direction maximum displacement;
E. repeating step d, until photoelectric sensor (10) produces 200mV～500mV mutation voltage signal, thin inserting needle completes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210265549.4A CN102788888B (en) | 2012-07-27 | 2012-07-27 | Probe inserting device of scanning probe microscope and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210265549.4A CN102788888B (en) | 2012-07-27 | 2012-07-27 | Probe inserting device of scanning probe microscope and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102788888A CN102788888A (en) | 2012-11-21 |
| CN102788888B true CN102788888B (en) | 2014-12-10 |
Family
ID=47154345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210265549.4A Expired - Fee Related CN102788888B (en) | 2012-07-27 | 2012-07-27 | Probe inserting device of scanning probe microscope and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102788888B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6079896B2 (en) * | 2013-10-31 | 2017-02-15 | 株式会社島津製作所 | Cantilever mounting jig and scanning probe microscope having the same |
| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| JP2021510828A (en) | 2018-01-18 | 2021-04-30 | エクセラ コーポレイション | Inspection needles, inspection probes, and flying probe testers for inspecting printed circuit boards |
| JP6939686B2 (en) * | 2018-04-16 | 2021-09-22 | 株式会社島津製作所 | Scanning probe microscope and cantilever movement method |
| CN108803680A (en) * | 2018-07-25 | 2018-11-13 | 方焕辉 | A kind of control device and method of MEMS sensor |
| US11016139B2 (en) | 2018-09-14 | 2021-05-25 | Chongqing Hkc Optoelectronics Technology Co., Ltd. | Test assembly and test device |
| CN109298274A (en) * | 2018-09-14 | 2019-02-01 | 重庆惠科金渝光电科技有限公司 | Testing element component and test equipment |
| CN109916971B (en) * | 2019-04-25 | 2022-05-17 | 云南中烟工业有限责任公司 | Rapid nondestructive testing method for fresh tobacco moisture based on capacitor |
| CN110082568B (en) * | 2019-04-28 | 2022-03-04 | 广州大学 | Scanning electrochemical microscope and correction method thereof |
| CN110736715B (en) * | 2019-10-25 | 2022-05-24 | 深圳市太赫兹科技创新研究院有限公司 | Method, device and system for preventing false touch of probe |
| CN111044803A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN113848349A (en) * | 2021-09-09 | 2021-12-28 | 国仪量子(合肥)技术有限公司 | Automatic probe needle inserting device and automatic probe needle inserting method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5614712A (en) * | 1995-03-24 | 1997-03-25 | Quesant Instrument Corporation | Method of engaging the scanning probe of a scanning probe microscope with a sample surface |
| CN102072970A (en) * | 2009-11-25 | 2011-05-25 | 中国科学院沈阳自动化研究所 | Method and device for lossless automatic approximation by facing nano observation and nano operation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7665349B2 (en) * | 2005-04-12 | 2010-02-23 | Veeco Instruments Inc. | Method and apparatus for rapid automatic engagement of a probe |
-
2012
- 2012-07-27 CN CN201210265549.4A patent/CN102788888B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5614712A (en) * | 1995-03-24 | 1997-03-25 | Quesant Instrument Corporation | Method of engaging the scanning probe of a scanning probe microscope with a sample surface |
| CN102072970A (en) * | 2009-11-25 | 2011-05-25 | 中国科学院沈阳自动化研究所 | Method and device for lossless automatic approximation by facing nano observation and nano operation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102788888A (en) | 2012-11-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102788888B (en) | Probe inserting device of scanning probe microscope and method thereof | |
| CN1300563C (en) | Minisize three-dimensional self-scanning confocal microscope | |
| EP2791688B1 (en) | Method and device for controlling a scanning probe microscope | |
| CN105242074B (en) | One white light interference atomic force probe of can tracing to the source is automatically positioned workpiece method | |
| CN202599978U (en) | Three-scanner atomic power microscan detecting device | |
| CN107085127B (en) | A kind of detection method and system of novel scanning probe microscopy | |
| CN101603911A (en) | Large sample large range high resolution atomic force micro measurement method and device | |
| CN103645347B (en) | The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration | |
| CN101833018B (en) | Scanning probe surface measurement system and measurement method based on optical fiber sensor | |
| CN110763873B (en) | Peak force tapping and torsional resonance compounding method based on atomic force microscope technology | |
| US9689892B2 (en) | Scanning probe microscope | |
| KR101198178B1 (en) | High-Speed and High-Resolution Atomic Force Microscope | |
| US20080087820A1 (en) | Probe control method for scanning probe microscope | |
| CN102788889A (en) | Needle inserting method for atomic force microscope | |
| CN102072969A (en) | Device for lossless automatic approximation by facing nano observation and nano operation | |
| CN106645803A (en) | Fast dual-probe atomic force microscope approximation device and fast dual-probe atomic force microscope approximation method | |
| JP5111102B2 (en) | Fine movement mechanism for scanning probe microscope and scanning probe microscope using the same | |
| CN210269909U (en) | Laser detection device based on scanning probe microscope | |
| CN1308655C (en) | Self-scanning projection measuring device for two-dimensional configuration outline | |
| JP2009074987A (en) | Scanning probe microscope and surface information measuring method | |
| US10955436B2 (en) | Scanning probe microscope | |
| CN102735880A (en) | Scanning probe measuring system and method for large-range micro-nano structure | |
| CN203350529U (en) | Micro-electro-mechanical interference platform with closed-loop control system | |
| CN209387684U (en) | A kind of adaptive step-scan module and its Three-dimensional atom force microscope | |
| CN201532396U (en) | Nonloss automatic approximation device facing nanometer observation and nanometer operation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 Termination date: 20150727 |
|
| EXPY | Termination of patent right or utility model |