CN202599978U - Three-scanner atomic power microscan detecting device - Google Patents
Three-scanner atomic power microscan detecting device Download PDFInfo
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- CN202599978U CN202599978U CN 201220275149 CN201220275149U CN202599978U CN 202599978 U CN202599978 U CN 202599978U CN 201220275149 CN201220275149 CN 201220275149 CN 201220275149 U CN201220275149 U CN 201220275149U CN 202599978 U CN202599978 U CN 202599978U
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Abstract
The utility model discloses a three-scanner atomic power microscan detecting device. A combined method of sample scanning and probe scanning is adopted to simultaneously achieve high-precision micro-nano detection for light and small samples and heavy and large samples. The three-scanner atomic power microscan detecting device is provided with a three-scanner atomic power microscope detection head and a scanning and feedback control system. The three-scanner atomic power microscope detection head is composed of a probe scanning and photoelectric detection unit, a sample scanning unit, a two-dimensional step scanning unit, and the like. The scanning and feedback control system is composed of a head amplifier, a proportion integration differentiation (PID) feedback unit, a first XYZ control module, a second XYZ control module, a step control module, a computer and interface, and the like. The three-scanner atomic power microscan detecting device has the advantages of having three probe and sample scanning manners, maintaining nanoscale scanning accuracy, achieving single image scanning for different weights and sizes of samples within the arrange of 1-100 microns and image splicing for different weights and sizes of samples within the arrange of 0.1-1 millimeter, overcoming limitation of a common atomic force microscope (AFM), and providing a novel approach for micro-nano scanning imaging of the micro-nano samples with various sizes and weights in high-precision, extensive, multi-scanning mode.
Description
Technical field
The utility model relates to a kind of three scanner atomic force microscan pick-up units.
Background technology
Micro-nano technology more and more becomes one of forward position of world today's development in science and technology, and development of modern science and technology and social progress are played great impetus.Atomic force microscope (AFM) has become indispensable important tool in the micro-nano field with PSTM ultrahigh resolution instruments such as (STM), and especially AFM is not widely used in fields such as physics, chemistry, biology, medical science, microelectronics, micromechanics and micro-nano technology because of it does not receive the restriction of sample electric conductivity.
At present, most conventional AFM in the world, its probe all adopts single scanner, they otherwise adopt merely that microprobe is fixed, the form of sample scanning, or adopt merely that sample is fixed, the form of microprobe scane.The former can realize the scanning survey among a small circle of small size, little quality sample, and the latter then is applicable to the large area scanning measurement of large scale, big quality sample.Although these conventional AFM have above characteristics; But because they only adopt single scanning device and single scanning mode; Therefore all there is limitation aspect performance and the technical indicator; Microprobe like routine is fixed, sample sweep type AFM, can't realize simultaneously that the large area scanning of large scale, big quality sample is measured; And conventional sample is fixed, microprobe scane type AFM; When the large area scanning of realizing large scale, big quality sample is measured; Often need sacrifice imaging resolution or precision, promptly can't realize the high resolution scanning imaging simultaneously, therefore need the new AFM technology of constantly development.
Summary of the invention
The purpose of the utility model is the deficiency that overcomes prior art, and a kind of three scanner atomic force microscan pick-up units are provided.
Three scanner atomic force microscan pick-up units comprise the micro-detecting head of three scanner atomic forces, prime amplifier, PID feedback unit, an XYZ control module, the 2nd XYZ control module, stepping control module, computing machine and interface; Prime amplifier links to each other with position sensor, PID feedback unit; The PID feedback unit links to each other with interface with an XYZ control module, the 2nd XYZ control module, computing machine; The one XYZ control module links to each other with interface with laminated piezoelectric pottery scanner, computing machine; The 2nd XYZ control module links to each other with interface with tubular piezo-electric pottery scanner, computing machine, and the stepping control module links to each other with interface with two-dimentional step-scan platform, computing machine.
Described three scanner atomic force microscope detecting heads comprise probe scanning and photodetector unit, sample scanning element and two-dimentional step-scan unit; Wherein, Probe scanning and photodetector unit comprise semiconductor laser, collimation lens, limit beam hole, scanning tracking lens, microprobe, feedback and tracking lens, PSD, bending rack, straight bracket, laminated piezoelectric pottery scanner, probe base, the first scanner seat, crossbeam; The sample scanning element comprises sample, sample stage, tubular piezo-electric pottery scanner, the second scanner seat, and two-dimentional step-scan unit comprises two-dimentional step-scan platform, base; The crossbeam that is installed on the pillar is fixed with PSD, bending rack, semiconductor laser, laminated piezoelectric pottery scanner; The feedback and tracking lens are housed on the bending rack; Collimation lens, limit beam hole, scanning are followed the tracks of lens and are fixed on from top to bottom on the straight bracket, are fixed with straight bracket in laminated piezoelectric pottery scanner left side, the lower end is fixed with probe base, and microprobe is fixed on the probe base; Sample is installed on the sample stage; Sample stage is fixed on the tubular piezo-electric pottery scanner, and tubular piezo-electric pottery scanner is installed on the two-dimentional step-scan platform through the second scanner seat, and two-dimentional step-scan platform is fixed on the base.
The utility model provides three kinds of different probes and sample scan mode first; Can be when keeping the nanoscale scanning accuracy; The sample of different size, Different Weight is realized one micron single image scanning to 100 micron order scopes; And 100 microns image mosaics to millimeter level scope; Overcome conventional sample scan-type AFM and be only applicable to the detection among a small circle of small sample and the limitation that detects that probe scanning formula AFM is applicable to large sample on a large scale; For the high precision of the micro-nano sample of realizing various sizes and weight, on a large scale, the micro-nano scanning imagery of many scan modes provides new way, be expected the field such as to control and be used widely in micro-nano detection, micro-nano processing and preparing and micro-nano.
Description of drawings
Fig. 1 is three scanner atomic force microscan pick-up unit structural representations;
Fig. 2 is the micro-measuring probe structure synoptic diagram of three scanner atomic forces of the utility model;
Among the figure: three scanner atomic force microscope detecting heads 1; Probe scanning and photodetector unit 2; Sample scanning element 3; Two dimension step-scan unit 4; Prime amplifier 5; PID feedback unit 6; The one XYZ control module 7; The 2nd XYZ control module 8; Stepping control module 9; Computing machine and interface 10; Semiconductor laser 11; Collimation lens 12; Limit beam hole 13; Lens 14 are followed the tracks of in scanning; Microprobe 15; Feedback and tracking lens 16; PSD17; Bending rack 18; Straight bracket 19; Laminated piezoelectric pottery scanner 20; Probe base 21; The first scanner seat 22; Pillar 23; Crossbeam 24; Sample 25; Sample stage 26; Tubular piezo-electric pottery scanner 27; The second scanner seat 28; Two dimension step-scan platform 29; Base 30.
Embodiment
Three scanner atomic force microscan detection methods are the detection methods that adopt sample scanning and probe scanning to combine; Introduce laminated piezoelectric pottery scanner and scanning and follow the tracks of light path and feedback and tracking light path, with sample fix, the mode of microprobe scane and feedback realizes the 0.1nm resolution of various samples, the micro-nano detection of 10 ~ 100 μ m sweep limits; Introduce the tubulose piezoelectric scanner, with the micro-nano detection that microprobe is fixed, sample scanning and the mode of feedback realize 1 ~ 10 μ m sweep limit of light small sample; Introduce two-dimentional step-scan platform scanning samples; Cooperate the laminated piezoelectric pottery to the Z of microprobe to FEEDBACK CONTROL and feedback and tracking light path, realize big, the 0.1nm resolution of same article, the image scanning and the splicing of 0.1 ~ 1mm scope with the mode of microprobe feedback, sample scanning.
The method that the utility model adopts sample scanning and probe scanning to combine provides three kinds of different probes and sample scan mode, both can realize the micro-nano detection of small-sized sample high precision, also can realize the micro-nano detection of bigger or more same article simultaneously.Introduce laminated piezoelectric pottery scanner and unique scanning tracking light path and feedback and tracking light path; XY is to the flexible probe scanning that drives of piezoelectric ceramics; Z feeds back to piezoelectric ceramics; Laser sends from semiconductor laser, arrives the micro-cantilever surface through collimation lens, limit beam hole with after scanning the tracking lens, after the micro-cantilever reflection, passes through feedback and tracking lens arrival PSD; XY scanning voltage signal according to the laminated piezoelectric pottery; And the Z of photo-signal or laminated piezoelectric pottery that comes PSD obtains the afm image of sample to feedback voltage signal, thus with sample fix, the mode of microprobe scane and feedback realizes the high precision of various samples, the micro-nano detection of 10 ~ 100 μ m sweep limits; Simultaneously; Introduce the tubulose piezoelectric scanner, XY scans to the flexible sample that drives of piezoelectric ceramics, and Z feeds back to piezoelectric ceramics; XY scanning voltage signal according to the tubular piezo-electric pottery; And the Z of photo-signal or tubular piezo-electric pottery that comes PSD obtains the afm image of sample to feedback voltage signal, thus with microprobe fix, sample scanning realizes the high precision of light small sample, the micro-nano detection of 1 ~ 10 μ m sweep limit with the mode of feedback; In addition; Introduce two-dimentional step-scan platform; The scanning on XY plane drives sample stage by two-dimentional step-scan platform and accomplishes; Cooperate the laminated piezoelectric pottery to the Z of microprobe to FEEDBACK CONTROL and feedback and tracking light path, according to the XY scanning voltage signal of step-scan platform, and the Z of photo-signal or laminated piezoelectric pottery that comes PSD is to feedback voltage signal; Obtain the afm image of sample, thereby realize the high precision of big more same article, the image scanning and the splicing of 0.1 ~ 1mm scope with the mode of microprobe feedback, sample scanning.
As shown in Figure 1, three scanner atomic force microscan pick-up units comprise the micro-detecting head of three scanner atomic forces 1, prime amplifier 5, PID feedback unit 6, an XYZ control module 7, the 2nd XYZ control module 8, stepping control module 9, computing machine and interface 10; Prime amplifier 5 links to each other with position sensor 17, PID feedback unit 6; PID feedback unit 6 and an XYZ control module 7, the 2nd XYZ control module 8, computing machine link to each other with interface 10; The one XYZ control module 7 links to each other with interface 10 with laminated piezoelectric pottery scanner 20, computing machine; The 2nd XYZ control module 8 and tubular piezo-electric pottery scanner 27, computing machine link to each other with interface 10, and stepping control module 9 links to each other with interface 10 with two-dimentional step-scan platform 29, computing machine.
As shown in Figure 2; Described three scanner atomic force microscope detecting heads 1 comprise probe scanning and photodetector unit 2, sample scanning element 3 and two-dimentional step-scan unit 4; Wherein, Probe scanning and photodetector unit 2 comprise that semiconductor laser 11, collimation lens 12, limit beam hole 13, scanning follows the tracks of lens 14, microprobe 15, feedback and tracking lens 16, PSD17, bending rack 18, straight bracket 19, laminated piezoelectric pottery scanner 20, probe base 21, the first scanner seat 22, crossbeam 24; Sample scanning element 3 comprises sample 25, sample stage 26, tubular piezo-electric pottery scanner 27, the second scanner seat 28, and two-dimentional step-scan unit 4 comprises two-dimentional step-scan platform 29, base 30; The crossbeam 24 that is installed on the pillar 23 is fixed with PSD17, bending rack 18, semiconductor laser 11, laminated piezoelectric pottery scanner 20; Feedback and tracking lens 16 are housed on the bending rack 18; Collimation lens 12, limit beam hole 13, scanning are followed the tracks of lens 14 and are fixed on from top to bottom on the straight bracket 19; Be fixed with straight bracket 19 in laminated piezoelectric pottery scanner 20 left sides, the lower end is fixed with probe base 21; Microprobe 15 is fixed on the probe base 21, and sample 25 is installed on the sample stage 26, and sample stage 26 is fixed on the tubular piezo-electric pottery scanner 27; Tubular piezo-electric pottery scanner 27 is installed on the two-dimentional step-scan platform 29 through the second scanner seat 28, and two-dimentional step-scan platform 29 is fixed on the base 30.
The detection method that the utility model adopts sample scanning and probe scanning to combine; Three kinds of different probes and sample scan mode can be provided; Can be when keeping the nanoscale scanning accuracy; The sample of different size, Different Weight is realized one micron single image scanning to 100 micron order scopes; And 100 microns image mosaics to millimeter level scope, overcome the limitation of conventional AFM, for the high precision of the micro-nano sample of realizing various sizes and weight, on a large scale, the micro-nano scanning imagery of many scan modes provides new way; Satisfy the micro-nano measurement demand of different samples under the different condition, can better adapt to the needs of micro-nano technical research and application.
Claims (2)
1. a scanner atomic force microscan pick-up unit is characterized in that comprising the micro-detecting heads of three scanner atomic forces (1), prime amplifier (5), PID feedback unit (6), an XYZ control module (7), the 2nd XYZ control module (8), stepping control module (9), computing machine and interface (10); Prime amplifier (5) links to each other with position sensor (17), PID feedback unit (6); PID feedback unit (6) links to each other with interface (10) with an XYZ control module (7), the 2nd XYZ control module (8), computing machine; The one XYZ control module (7) links to each other with interface (10) with laminated piezoelectric pottery scanner (20), computing machine; The 2nd XYZ control module (8) links to each other with interface (10) with tubular piezo-electric pottery scanner (27), computing machine, and stepping control module (9) links to each other with interface (10) with two-dimentional step-scan platform (29), computing machine.
2. a kind of three scanner atomic force microscan pick-up units according to claim 1; It is characterized in that described three scanner atomic force microscope detecting heads (1) comprise probe scanning and photodetector unit (2), sample scanning element (3) and two-dimentional step-scan unit (4); Wherein, Probe scanning and photodetector unit (2) comprise semiconductor laser (11), collimation lens (12), limit beam hole (13), scanning tracking lens (14), microprobe (15), feedback and tracking lens (16), PSD (17), bending rack (18), straight bracket (19), laminated piezoelectric pottery scanner (20), probe base (21), the first scanner seat (22), crossbeam (24); Sample scanning element (3) comprises sample (25), sample stage (26), tubular piezo-electric pottery scanner (27), the second scanner seat (28), and two-dimentional step-scan unit (4) comprises two-dimentional step-scan platform (29), base (30); The crossbeam (24) that is installed on the pillar (23) is fixed with PSD (17), bending rack (18), semiconductor laser (11), laminated piezoelectric pottery scanner (20); Feedback and tracking lens (16) are housed on the bending rack (18); Collimation lens (12), limit beam hole (13), scanning are followed the tracks of lens (14) and are fixed on from top to bottom on the straight bracket (19); Be fixed with straight bracket (19) in laminated piezoelectric pottery scanner (20) left side, the lower end is fixed with probe base (21); Microprobe (15) is fixed on the probe base (21); Sample (25) is installed on the sample stage (26); Sample stage (26) is fixed on the tubular piezo-electric pottery scanner (27), and tubular piezo-electric pottery scanner (27) is installed on the two-dimentional step-scan platform (29) through the second scanner seat (28), and two-dimentional step-scan platform (29) is fixed on the base (30).
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| CN 201220275149 CN202599978U (en) | 2012-06-12 | 2012-06-12 | Three-scanner atomic power microscan detecting device |
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| CN 201220275149 CN202599978U (en) | 2012-06-12 | 2012-06-12 | Three-scanner atomic power microscan detecting device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN103529243A (en) * | 2013-10-28 | 2014-01-22 | 天津大学 | Light beam tracking type atomic force microscope scanning measuring head |
| CN104528637B (en) * | 2015-01-16 | 2016-06-08 | 长春理工大学 | A kind of three probe robot nano-manipulation system and methods |
| CN106896241A (en) * | 2015-12-17 | 2017-06-27 | 北京爱普益生物科技有限公司 | One kind can be with utilizing total internal reflection fluorescence microscope associated with AFM |
| CN109219752A (en) * | 2016-06-02 | 2019-01-15 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN110288528A (en) * | 2019-06-25 | 2019-09-27 | 山东大学 | A kind of image mosaic system and method towards micro-nano visual observation |
| CN113466495A (en) * | 2021-08-19 | 2021-10-01 | 中国科学院兰州化学物理研究所 | Ultralow-temperature high-vacuum atomic force microscope system |
-
2012
- 2012-06-12 CN CN 201220275149 patent/CN202599978U/en not_active Withdrawn - After Issue
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN102707094B (en) * | 2012-06-12 | 2014-05-21 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN103529243A (en) * | 2013-10-28 | 2014-01-22 | 天津大学 | Light beam tracking type atomic force microscope scanning measuring head |
| CN103529243B (en) * | 2013-10-28 | 2016-11-16 | 天津大学 | A kind of pencil tracing formula afm scan gauge head |
| CN104528637B (en) * | 2015-01-16 | 2016-06-08 | 长春理工大学 | A kind of three probe robot nano-manipulation system and methods |
| CN106896241A (en) * | 2015-12-17 | 2017-06-27 | 北京爱普益生物科技有限公司 | One kind can be with utilizing total internal reflection fluorescence microscope associated with AFM |
| CN106896241B (en) * | 2015-12-17 | 2019-05-14 | 北京爱普益生物科技有限公司 | One kind can be with utilizing total internal reflection fluorescence microscope associated with atomic force microscope |
| CN109219752A (en) * | 2016-06-02 | 2019-01-15 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN109219752B (en) * | 2016-06-02 | 2021-06-11 | 株式会社岛津制作所 | Scanning probe microscope |
| CN110288528A (en) * | 2019-06-25 | 2019-09-27 | 山东大学 | A kind of image mosaic system and method towards micro-nano visual observation |
| CN113466495A (en) * | 2021-08-19 | 2021-10-01 | 中国科学院兰州化学物理研究所 | Ultralow-temperature high-vacuum atomic force microscope system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121212 Effective date of abandoning: 20140521 |
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| RGAV | Abandon patent right to avoid regrant |