CN103529243A - Light beam tracking type atomic force microscope scanning measuring head - Google Patents
Light beam tracking type atomic force microscope scanning measuring head Download PDFInfo
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- CN103529243A CN103529243A CN201310514419.4A CN201310514419A CN103529243A CN 103529243 A CN103529243 A CN 103529243A CN 201310514419 A CN201310514419 A CN 201310514419A CN 103529243 A CN103529243 A CN 103529243A
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Abstract
The invention relates to a light beam tracking type atomic force microscope scanning measuring head. The light beam tracking type atomic force microscope scanning measuring head consists of an optical detection module and a scanning module, wherein the scanning module comprises a Y-direction one-dimensional scanning mechanism and a Z-direction one-dimensional scanning mechanism; the Y-direction one-dimensional scanning mechanism performs horizontal one-dimensional scanning motion; the Z-direction one-dimensional scanning mechanism is fixedly connected to the Y-direction one-dimensional scanning mechanism and can perform vertical one-dimensional scanning motion; a cantilever beam probe and an aspherical lens positioned above the cantilever beam probe are fixed on the Z-direction one-dimensional scanning mechanism; a rectangular prism is fixedly arranged on the Y-direction one-dimensional scanning mechanism; the optical detection module comprises a laser, a collimating mirror, a polarizing beam splitter, a quarter-wave plate and a first beam splitter which are arranged sequentially along the horizontal incident light path of the rectangular prism; a second beam splitter, a pipe mirror and a CCD camera are arranged on the vertical light-splitting light path of the first beam splitter sequentially; a horizontal interface of the second beam splitter is connected with a lighting source; a convergent lens and a photoelectric detector are arranged on the vertical light path of the polarizing beam splitter sequentially. The light beam tracking type atomic force microscope scanning measuring head can eliminate errors and can perform high-speed scanning imaging.
Description
Technical field
The present invention relates to a kind of afm scan gauge head.Particularly relate to a kind of pencil tracing formula afm scan gauge head.
Background technology
The eighties in 20th century, the appearance of atomic force microscope made people be able to be familiar with intuitively at nanoscale the surface structure of all kinds of conductions, non-conducting material and even biological sample.Through the development of more than two decades, nowadays this technology has become one of the fundamental analysis technology in the fields such as semi-conductor industry, nano material, life science, applies very extensive.
The atomic force microscope of most all adopts beam type probe to survey sample surfaces and rises and falls, and utilizes optical lever method to amplify the deformation of semi-girder simultaneously.Optical lever detects light path and is positioned at gauge head, and wherein laser instrument gives off laser beam and beats on semi-girder, and semi-girder is by beam reflection to photodetector, and on detector, the displacement of hot spot reflects the distortion of beam.According to the difference of scanning motion object, the structure of atomic force microscope can be divided into scanning and lower scanning two classes, respectively as shown in Fig. 1 a, 1b.Upper scanning is that sample is static, and gauge head is done scanning motion with respect to sample; Lower scanning is that gauge head is static, and sample is done scanning motion with respect to gauge head.Scanning motion is realized by tubular type or tripod type piezoelectric scanner conventionally.This class scanner sweep velocity is fast, can realize three-dimensional motion simultaneously, but load capacity a little less than, and in principle, there is three-axis moving coupling, on a large scale, there will be obvious Z-direction flexural distortion during XY flat scanning.Therefore, for larger sample, can only use upper scan mode, allow scanner be integrated in gauge head moving with probe.Upper scan mode requires the motion that laser can real-time follow-up semi-girder.Though existing gauge head can guarantee that measuring beam beats on beam by following the tracks of lens, still can not eliminate the optical lever that the light beam reflection angle due to scanning motion changes and cause thus completely and detect error.In addition, in tradition optical lever light path, laser beam waist diameter is generally at tens microns, and the response speed of in recent years rising faster small size semi-girder itself only have twenty or thirty micron long, this just means that existing gauge head light path possibly cannot meet high-velocity scanning demand from now on.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of and can realize the pencil tracing formula afm scan gauge head that measuring beam is followed the tracks of the zero error of socle beam probe.
The technical solution adopted in the present invention is: a kind of pencil tracing formula afm scan gauge head, be by optical detecting module and carry out with described optical detecting module the scan module that light is connected and form, described scan module includes: can carry out the Y-direction one-dimensional scanning mechanism of horizontal one-dimensional scanning motion and be fixedly connected on the Z-direction one-dimensional scanning mechanism that can carry out vertical one-dimensional scanning motion in described Y-direction one-dimensional scanning mechanism, in described Z-direction one-dimensional scanning mechanism, be fixed with socle beam probe and the non-spherical lens that is positioned at socle beam probe top, in described Y-direction one-dimensional scanning mechanism, be fixedly installed the right-angle prism corresponding with described non-spherical lens transmitted light path, described optical detecting module includes: the laser instrument, collimating mirror, polarization spectroscope, quarter-wave plate and the first beam splitter that along the glancing incidence light path of right-angle prism, set gradually, wherein, on the vertical light splitting optical path of the first described beam splitter, be disposed with the second beam splitter, Guan Jing and CCD camera, the horizontal direction interface of the second described beam splitter is connected with lighting source, on the spectroscopical vertical optical path of described polarization, is disposed with convergent lens and photodetector.
Described optical detecting module HeYXiang one-dimensional scanning mechanism is fixed on gauge head pedestal.
The operative orientation quadrature of the operative orientation of described Z-direction one-dimensional scanning mechanism and described Y-direction one-dimensional scanning mechanism.
The laser that described described optical detecting module sends enters described scan module with linearly polarized light form, and the laser beam of returning to optical detecting module from described scan module is also line polarisation.
Between the second described beam splitter and Guan Jing, be provided with attenuator.
Described photodetector is arranged on beyond the back focal plane of convergent lens.
Between described convergent lens and photodetector, be provided with optical filter, described optical filter next-door neighbour photodetector is installed, and the band connection frequency of optical filter is consistent with laser frequency used.
Described socle beam probe is positioned at the focus place of non-spherical lens, and in scanning process, socle beam probe and non-spherical lens are followed the motion of Z-direction one-dimensional scanning mechanism and keep relative position constant; ErZXiang one-dimensional scanning mechanism follows again Y-direction one-dimensional scanning mechanism and carries out horizontal scanning campaign, thereby makes socle beam probe and non-spherical lens keep constant with the horizontal relative position of right-angle prism.
Described CCD camera, Guan Jing, the first beam splitter, right-angle prism and non-spherical lens are configured for observing the micro-light path of infinite conjugate of semi-girder and sample; Described photodetector, convergent lens, polarization spectroscope, quarter-wave plate, the first beam splitter, right-angle prism, non-spherical lens and socle beam probe form optical lever light path.
The focal length of setting non-spherical lens, convergent lens, Guan Jing corresponds to respectively f
1, f
2, f
3convergent lens back focal plane is L to the distance of photodetector photosurface, the length of cantilever that socle beam probe is set is l, and the reflection spot of setting laser on semi-girder, be socle beam probe at the free end of semi-girder, according to geometrical optics and material mechanics principle, obtain: optical lever light path is A=3 (L/l) (f to the enlargement ratio of probe free end Z-direction displacement
1/ f
2); The optical amplifier multiplying power of the micro-light path of infinite conjugate is M=f
3/ f
1; In the situation that keeping scan module constant, by adjusting convergent lens, the focal length of Guan Jing and the position of photodetector in optical detecting module, relevant enlargement ratio and detection sensitivity have been regulated.
A kind of pencil tracing formula afm scan gauge head of the present invention, can reach following beneficial effect:
1, for arbitrary scan scope, all can guarantee the tracking of laser to semi-girder in scanning process, eliminated in theory the optical lever error that scanner movements causes completely;
2, Laser Focusing hot spot is little, can coordinate small size semi-girder to carry out high-velocity scanning imaging;
3, the three-axis moving coupling that the discrete one-dimensional scanning device assembled scheme adopting has been avoided conventional scanners, can realize pure-surface scanning;
4, microexamination light path and optical lever light path be road altogether, is easy to the Laser Focusing situation on semi-girder and sample surfaces to carry out home position observation;
5, Systems for optical inspection and scanning moving mechanism are separate, convenient debugging, maintenance and upgrading.
Accompanying drawing explanation
Fig. 1 a is common atomic force microscope structural representation;
The another kind of common atomic force microscope structural representation of Fig. 1 b;
Fig. 2 is that the integral body of a kind of pencil tracing formula of the present invention afm scan gauge head forms schematic diagram;
Fig. 3 is the example of a practical application of the present invention.
In figure
1: sample 2: sample stage
3: socle beam probe 4: non-spherical lens
5:ZXiang one-dimensional scanning mechanism 6: right-angle prism
7:YXiang one-dimensional scanning mechanism 8: laser instrument
9: collimating mirror 10: polarization spectroscope
11: 12: the first beam splitters of quarter-wave plate
13: convergent lens 14: optical filter
15: photodetector 16: lighting source
Within 17: the second, beam splitter 18: attenuator
19: pipe mirror 20:CCD camera
Embodiment
Below in conjunction with embodiment and accompanying drawing, a kind of pencil tracing formula afm scan gauge head of the present invention is described in detail.
As shown in Figure 2, a kind of pencil tracing formula afm scan gauge head of the present invention is by optical detecting module II and carry out with described optical detecting module II the scan module I that light is connected forms, and realizes 3-D scanning, and the plane of scanning motion is pure-surface.Measuring beam is produced and is entered scan module by optical detecting module, after socle beam probe reflection, return to optical detecting module again from scan module; Measurement light is linear polarization parallel beam while transmitting between optical detecting module and scan module, and the direction of propagation is parallel with Y-axis,, the laser that described optical detecting module II sends enters described scan module I with linearly polarized light form, and the laser beam of returning to optical detecting module II from described scan module I is also line polarisation.
Described scan module I includes: can carry out the Y-direction one-dimensional scanning mechanism 7 of horizontal one-dimensional scanning motion and be fixedly connected on the Z-direction one-dimensional scanning mechanism 5 that can carry out vertical one-dimensional scanning motion in described Y-direction one-dimensional scanning mechanism 7, the operative orientation quadrature of the operative orientation of described Z-direction one-dimensional scanning mechanism 5 and described Y-direction one-dimensional scanning mechanism 7.In described Z-direction one-dimensional scanning mechanism 5, be fixed with socle beam probe 3 and the non-spherical lens 4 that is positioned at socle beam probe 3 tops, in described Y-direction one-dimensional scanning mechanism 7, be fixedly installed the right-angle prism 6 corresponding with described non-spherical lens 4 transmitted light paths.Described socle beam probe 3 is positioned at the focus place of non-spherical lens 4, and in scanning process, socle beam probe 3 is followed 5 motions of Z-direction one-dimensional scanning mechanism and keeps relative position constant with non-spherical lens 4; ErZXiang one-dimensional scanning mechanism 5 follows again Y-direction one-dimensional scanning mechanism 7 and carries out horizontal scanning campaign, thereby makes socle beam probe 3 and non-spherical lens 4 keep constant with the horizontal relative position of right-angle prism 6.Be parallel to the laser beam that Z axis enters non-spherical lens and be focused at all the time same point on semi-girder, the reflected light of semi-girder returns to non-spherical lens and is parallel to Z axis outgoing; Design of Aspherical Lenses wavelength is consistent with detection optical maser wavelength used, and the laser focal spot on semi-girder is much smaller than deck-siding.
Described optical detecting module II includes: the laser instrument 8 setting gradually along the glancing incidence light path of right-angle prism 6, collimating mirror 9, polarization spectroscope 10, quarter-wave plate 11 and the first beam splitter 12, wherein, on the vertical light splitting optical path of the first described beam splitter 12, be disposed with the second beam splitter 17, pipe mirror 19 and CCD camera 20, the horizontal direction interface of the second described beam splitter 17 is connected with lighting source 16, on the vertical optical path of described polarization spectroscope 10, be disposed with convergent lens 13 and photodetector 15, described photodetector 15 is arranged on beyond the focal plane of convergent lens 13, photodetector 15 can be according to photodetector 15 light-sensitive surface sizes with the actual range of convergent lens 13, required detection sensitivity and range adjustment.Between described convergent lens 13 and photodetector 15, be provided with optical filter 14, described optical filter 14 next-door neighbour's photodetectors (15) are installed, and its band connection frequency is consistent with laser frequency used.Between the second described beam splitter 17 and pipe mirror 19, be provided with attenuator 18, described attenuator 18 next-door neighbour's pipe mirrors 19 arrange, and attenuator 18 avoids CCD saturated for weakening laser intensity.
Described optical detecting module ⅡHeYXiang one-dimensional scanning mechanism 7 is fixed on gauge head pedestal.
The micro-light path of infinite conjugate that described CCD camera 20, pipe mirror 19, the first beam splitter 12, right-angle prism 6 and non-spherical lens 4 are configured for observing semi-girder and sample; Described photodetector 15, convergent lens 13, polarization spectroscope 10, quarter-wave plate 11, the first beam splitter 12, right-angle prism 6, non-spherical lens 4 and socle beam probe 3 form optical lever light path.
The focal length of setting non-spherical lens 4, convergent lens 13, pipe mirror 19 corresponds to respectively f
1, f
2, f
3 convergent lens 13 back focal planes are L to the distance of photodetector 15 photosurfaces, the length of cantilever that socle beam probe 3 is set is l, and the reflection spot of setting laser on semi-girder, be socle beam probe 3 at the free end of semi-girder, according to geometrical optics and material mechanics principle, obtain: optical lever light path is A=3 (L/l) (f to the enlargement ratio of probe free end Z-direction displacement
1/ f
2); The optical amplifier multiplying power of the micro-light path of infinite conjugate is M=f
3/ f
1; In the situation that keeping scan module I constant, by adjusting convergent lens 13 in optical detecting module II, the pipe focal length of mirror 19 and the position of photodetector 15, relevant enlargement ratio and detection sensitivity have been regulated.
A kind of pencil tracing formula afm scan gauge head of the present invention, during Y-direction scanner movements, the relative position of right-angle prism HeZXiang one-dimensional scanning mechanism 5 remains unchanged; By optical detecting module, send and be parallel to the light beam that Y-axis injects scan module and be parallel to Z axis directive non-spherical lens after right-angle prism reflection; The light beam that is parallel to Z axis directive right-angle prism by non-spherical lens is parallel to after reflection Y-axis and returns to optical detecting module; The Y of gauge head, Z-direction scanning motion do not change laser focus position and the direction of propagation.
In optical detecting module, the light beam that laser instrument sends through collimating mirror, polarization spectroscope, quarter-wave plate and the first beam splitter, is parallel to the right-angle prism in Y-axis directive scan module with line polarisation form successively; The light beam that scan module returns arrives polarization spectroscope along the direction with contrary before this through the first beam splitter and quarter-wave plate; 90 ° of twice Laser Beam Polarization direction rotations by quarter-wave plate, are reflexed to convergent lens completely and are incident upon on photodetector after returning to polarization spectroscope, and on photodetector, the displacement of hot spot is the amplification of semi-girder partial twist deformation; The light beam that scan module returns is during through the first beam splitter, 90 ° of process Guan Jing of part reflection converge on the CCD camera at its place, focal plane, and CCD camera, Guan Jing, the first beam splitter, right-angle prism and non-spherical lens form the micro-light path of infinite conjugate and be used for observing semi-girder and sample.
The principle of work of a kind of pencil tracing formula afm scan gauge head of the present invention is as follows: sample 1 is equipped on the sample stage 2 with one-dimensional scanning ability.Gauge head is positioned at sample top, and gauge head Z-direction is vertical with sample surfaces, and Y-direction is vertical with sample direction of motion.Gauge head comprises scan module I and optical detecting module II.In scan module I: socle beam probe 3 is installed on non-spherical lens 4 places, focal plane, below, and semi-girder becomes inclination angle, 10 ° of left and right with surface level, and its free end is positioned in the focus of spherical lens 4; Socle beam probe 3 and spherical lens 4 carries on Z-direction one-dimensional scanning device 5 independently, keeps the constant common SuiZXiang one-dimensional scanning of relative position mechanism 5 to do Z-direction motion; Z-direction one-dimensional scanning mechanism 5 integral body and right-angle prism 6 carries and at independently Y-direction one-dimensional scanning device 7 Shang，ZXiang one-dimensional scanning mechanisms 5, right-angle prism 6, keeps that relative positions are constant together does Y-direction motion with Y-direction one-dimensional scanning device 7; Right-angle prism 6 is for realizing the mutual conversion of Y, Z-direction parallel beam: be parallel to the light beam that Y-axis injects right-angle prism 6 and be parallel to Z axis directive non-spherical lens 4 after its reflection, be parallel to Z axis and after its reflection, be parallel to Y-axis outgoing by the light beam of non-spherical lens 4 directive right-angle prisms 6.Optical detecting module II is fixed on transfixion on gauge head pedestal, wherein: the laser beam that laser instrument 8 sends is first after collimating mirror 9 collimations, being parallel to Y-axis enters polarization spectroscope 10 and resolves into the orthogonal two bunch polarisations of polarization state (only drawing a branch of of actual use in figure), polarized light along the outgoing of the former direction of propagation is parallel to the right-angle prism 6 in Y-axis directive I through quarter-wave plate 11 and beam splitter 12 successively, right-angle prism 6 reflexes to non-spherical lens 4 by the parallel beam of incident and is assembled to socle beam probe 3 by the latter, the reflected light of socle beam probe 3 returns to non-spherical lens 4 and becomes directional light along Z-direction retroeflection to right-angle prism 6 along certain angle, after right-angle prism 6 reflections, be parallel to Y-axis again and return to optical detecting module II.The laser beam of getting back to optical detecting module II enters polarization spectroscope 10 through the first beam splitter 12 and quarter-wave plate 11 in succession with the direction with contrary before this.Owing to coming and going, pass through quarter-wave plate twice, the line polarisation polarization direction of returning to polarization spectroscope 10 has rotated 90 °, thereby be parallel to Z axis outgoing after the reflection of polarization spectroscope 10, be more finally incident upon on the photodetector 15 being positioned at beyond convergent lens 13 focal planes through convergent lens 13 and optical filter 14.Above-mentioned light path is optical lever and detects light path, and the small deflection of semi-girder and torsion are enlarged into the displacement of hot spot on photodetector 15 light-sensitive surfaces through it.The band connection frequency of optical filter 14 is identical with laser frequency herein, for filtering environmental light.For ease of observing the laser focal spot situation on sample and semi-girder, with CCD camera 20, pipe mirror 19, attenuator 18, lighting source 16, the second beam splitter 17, coordinate non-spherical lens 4, right-angle prism 6 and the first beam splitter 12 to form coaxial-illuminating infinite conjugate microscopic system.The illumination light that wherein lighting source 16 produces is coupled into aforementioned optical lever light path through the second beam splitter 17, then via the first beam splitter 12, right-angle prism 6, non-spherical lens 4, is incident upon on semi-girder 3 and sample 1 successively.The laser beam of the illumination light of sample 1, socle beam probe 3 reflections and socle beam probe 3 reflections is returned when the first beam splitter 12, a part, perpendicular to incident direction outgoing, images on the CCD camera 20 at pipe mirror 19 back focal plane places through the second beam splitter 17, attenuator 18, pipe mirror 19 afterwards successively.Attenuator 18 is for weakening laser intensity to avoid CCD saturated.
Liang Ge one-dimensional scanning mechanism in above-mentioned measuring head structure and the one-dimensional scanning mechanism pairwise orthogonal of carrying sample, three-axis moving is without coupling, and there is not flexural distortion in the plane of scanning motion.Because each scanning mechanism operative orientation in gauge head is all parallel with direction of beam propagation, and the elements relative position of carrying is fixed, so much light paths that do not affect of scanning mechanism stroke, laser can focus on all the time the same point of semi-girder and maintain invariable incident angle, and then the hot spot that guarantees photodetector reception is not because scanning motion is shifted; Only, when semi-girder self, because the pattern of sample rises and falls, partial twist deformation occurs, just can cause the change of facula position on photodetector.Design of Aspherical Lenses wavelength in gauge head is consistent with optical maser wavelength used, can, by laser convergence to diameter number micron, can meet the detection demand of all kinds of small size socle beam probes in theory.In addition, above-mentioned gauge head scan module I is few containing element, quality light, compact conformation, is conducive to keep when high-velocity scanning stable.Because each scanner is independent motion in one dimension structure, than integrated two dimension or three-dimensional scanner, its physical construction is more simple, and manufacturing cost is lower, conventionally also has better kinetic characteristic.According to each scanner loading condition, atomic force microscope gauge head of the present invention, when carrying out high-velocity scanning, should be take X-direction as fast axle, and Y-direction is slow axis.
Provide an application example below:
As shown in Figure 3, probe 3 ' and non-spherical lens 4 ' are fixed in the motion portion of Z-direction scanner 6 '.Wherein the diameter of non-spherical lens 4 ' is 18mm, design wavelength 532nm, focal length 15mm; Micro cantilever probe becomes 10 ° of inclination angles with surface level, free end is positioned at the focus place of non-spherical lens 4 '.Z-direction scanner 6 ' adopts the 1-dimention nano positioning table P-753.11C of PI company, and its closed loop stroke is 12 μ m, displacement resolving power 0.05nm.Z-direction scanner 6 ' is fixed in the motion portion of Y-direction scanner 7 ' by card extender 5 ' quadrature, the right-angle prism of length of side 20mm is also installed simultaneously for realizing the conversion of Y-direction and Z-direction parallel beam on card extender 5 '.Y-direction scanner 7 ' adopts the 1-dimention nano positioning table P-752.11C of PI company, its closed loop stroke is 15 μ m, displacement resolving power 0.1nm, edge-on being fixed on gauge head pedestal 8 ', operative orientation is parallel with surface level and guarantee that the operative orientation of Z-direction scanner 6 ' is vertical with surface level.The main optical detection of gauge head is partly fixed on pedestal by connector 9 '.The ZOOM6000 compound lens module of ，10’Wei NAVITAR company wherein, its inside comprises coaxial optical fiber lighting interface, attenuator, 200mm focal length Guan Jing, C shape interface from the bottom to top successively.C shape interface fixation of C CD camera 11 '.Compound lens module 10 ' below connects beam splitter 19 '.Beam splitter 19 ' adopts diameter 25.4mm, and the film-type beam splitter of wave band 400nm～700nm becomes 45 degree to tilt to install with surface level, concentric with the right-angle prism and the compound lens module 10 ' that are fixed on card extender 5 ' respectively with vertical direction in the horizontal direction.The opposite side of beam splitter 19 ' is fixedly λ/4 wave plate 18 ', polarization spectroscope 17 ', diode laser 16 ' successively from right to left.λ/4 wave plate 18 ' diameter 25.4mm wherein, centre wavelength 532nm, carries spinner in order to adjust polarization direction; Polarization spectroscope 17 ' adopts length of side 20mm polarization spectro cube, wavelength coverage 420nm～680nm; Diode laser 16 ' carries collimating mirror, wavelength 532nm, power 4.5mW, outgoing diameter 2mm.Diode laser 16 ' is parallel to eccentric 2.64mm in Z-axis direction and perpendicular to micro cantilever probe, projects after non-spherical lens 4 ' is assembled to guarantee laser beam while installing, the focal spot now obtaining is minimum.Polarization spectroscope top is convergent lens 15 ' fixedly.The focal length of convergent lens 15 ' is 15mm, during installation with respect to polarization spectroscope 17 ' eccentric 2.64mm left, to guarantee that reflected light under semi-girder free state is along convergent lens 15 ' primary optical axis outgoing.Convergent lens 15 ' the coaxial mounting adapter 14 ' in top, 4 quadrant detector 13 ' and two-dimentional manual displacement platform 12 ' are installed in adapter 14 ' exit.4 quadrant detector 13 ' light-sensitive surface diameter 7.8mm wherein, the principal plane 45mm of distance 15 '; The front fixedly 532nm bandpass filter of light-sensitive surface is with the impact of filtering illumination light; Two dimension manual displacement platform 12 ' is connected with 4 quadrant detector 13 ', utilize the fine-tuning 4 quadrant detector 13 ' of two-dimentional manual displacement platform 12 ' with respect to the position at adapter 14’ center so that hot spot falls within the appropriate area on 4 quadrant detector 13 ' light-sensitive surface.For reducing the machinery of opticator, rock, the shell of polarization spectroscope 17 ', beam splitter 19 ' is all fixed by screws on gauge head pedestal 8 '; For reducing optical noise, the light-emitting window of polarization spectroscope 17 ', beam splitter 19 ' downside blocks with black tape.
For coordinating this gauge head, realize 3-D scanning imaging, select the 1-dimention nano positioning table P-752.11C identical with Y-direction scanner 7 ' to carry out X-direction scanning as sample stage 1 ', its operative orientation and Y-direction scanner 7 ' quadrature, loading surface is vertical with the operative orientation of Z-direction scanner 6 ', and sample 2 ' is fixed in sample stage 1 ' motion portion.
The closed loop sweep limit of the common atomic force microscopy mirror system forming of above-mentioned gauge head and X-direction scanner is 15 μ m * 12, μ m * 15 μ m, and the plane of scanning motion is without flexural distortion; Laser focal spot theoretical diameter approximately 5 μ m; For the rectangular cantilever beam probe of length 30 μ m, needle point Normal Displacement magnification can reach 3000 times in theory; In system, the enlargement ratio of CCD microexamination part is about 13.3 times, can be in order to observe sample and the auxiliary reflection position of laser on semi-girder of adjusting.
In another embodiment, the detection light path part of above-mentioned gauge head remains unchanged, and only scanner need be replaced by P780 or the larger 1-dimention nano positioning table of other strokes of PI company, can realize wider scanning.
Claims (10)
1. a pencil tracing formula afm scan gauge head, to carry out by optical detecting module (II) with described optical detecting module (II) scan module (I) formation that light is connected, it is characterized in that, described scan module (I) includes: can carry out the Y-direction one-dimensional scanning mechanism (7) of horizontal one-dimensional scanning motion and be fixedly connected on the Z-direction one-dimensional scanning mechanism (5) that can carry out vertical one-dimensional scanning motion in described Y-direction one-dimensional scanning mechanism (7), in described Z-direction one-dimensional scanning mechanism (5), be fixed with socle beam probe (3) and be positioned at the non-spherical lens (4) of socle beam probe (3) top, in described Y-direction one-dimensional scanning mechanism (7), be fixedly installed the right-angle prism (6) corresponding with described non-spherical lens (4) transmitted light path, described optical detecting module (II) includes: the laser instrument (8) setting gradually along the glancing incidence light path of right-angle prism (6), collimating mirror (9), polarization spectroscope (10), quarter-wave plate (11) and the first beam splitter (12), wherein, on the vertical light splitting optical path of described the first beam splitter (12), be disposed with the second beam splitter (17), Guan Jing (19) and CCD camera (20), the horizontal direction interface of described the second beam splitter (17) is connected with lighting source (16), on the vertical optical path of described polarization spectroscope (10), be disposed with convergent lens (13) and photodetector (15).
2. a kind of pencil tracing formula afm scan gauge head according to claim 1, is characterized in that, described optical detecting module (II) HeYXiang one-dimensional scanning mechanism (7) is fixed on gauge head pedestal.
3. a kind of pencil tracing formula afm scan gauge head according to claim 1, is characterized in that, the operative orientation quadrature of the operative orientation of described Z-direction one-dimensional scanning mechanism (5) and described Y-direction one-dimensional scanning mechanism (7).
4. a kind of pencil tracing formula afm scan gauge head according to claim 1, it is characterized in that, the laser that described described optical detecting module (II) sends enters described scan module (I) with linearly polarized light form, and the laser beam of returning to optical detecting module (II) from described scan module (I) is also line polarisation.
5. a kind of pencil tracing formula afm scan gauge head according to claim 1, is characterized in that, between described the second beam splitter (17) and Guan Jing (19), is provided with attenuator (18).
6. a kind of pencil tracing formula afm scan gauge head according to claim 1, is characterized in that, described photodetector (15) is arranged on beyond the back focal plane of convergent lens (13).
7. a kind of pencil tracing formula afm scan gauge head according to claim 1, it is characterized in that, between described convergent lens (13) and photodetector (15), be provided with optical filter (14), described optical filter (14) next-door neighbour's photodetector (15) is installed, and the band connection frequency of optical filter (14) is consistent with laser frequency used.
8. a kind of pencil tracing formula afm scan gauge head according to claim 1, it is characterized in that, described socle beam probe (3) is positioned at the focus place of non-spherical lens (4), and socle beam probe in scanning process (3) is followed Z-direction one-dimensional scanning mechanism (5) motion and keeps relative position constant with non-spherical lens (4); ErZXiang one-dimensional scanning mechanism (5) follows again Y-direction one-dimensional scanning mechanism (7) and carries out horizontal scanning campaign, thereby makes socle beam probe (3) and non-spherical lens (4) keep constant with the horizontal relative position of right-angle prism (6).
9. a kind of pencil tracing formula afm scan gauge head according to claim 1, it is characterized in that, described CCD camera (20), Guan Jing (19), the first beam splitter (12), right-angle prism (6) and non-spherical lens (4) are configured for observing the micro-light path of infinite conjugate of semi-girder and sample; Described photodetector (15), convergent lens (13), polarization spectroscope (10), quarter-wave plate (11), the first beam splitter (12), right-angle prism (6), non-spherical lens (4) and socle beam probe (3) form optical lever light path.
10. according to a kind of pencil tracing formula afm scan gauge head described in claim 1 or 9, it is characterized in that, the focal length of setting non-spherical lens (4), convergent lens (13), Guan Jing (19) corresponds to respectively f
1, f
2, f
3convergent lens (13) back focal plane is L to the distance of photodetector (15) photosurface, the length of cantilever that socle beam probe (3) is set is l, and the reflection spot of setting laser on semi-girder, be socle beam probe (3) at the free end of semi-girder, according to geometrical optics and material mechanics principle, obtain: optical lever light path is A=3 (L/l) (f to the enlargement ratio of probe free end Z-direction displacement
1/ f
2); The optical amplifier multiplying power of the micro-light path of infinite conjugate is M=f
3/ f
1; In the situation that keeping scan module (I) constant, by adjusting convergent lens (13), the focal length of Guan Jing (19) and the position of photodetector (15) in optical detecting module (II), relevant enlargement ratio and detection sensitivity have been regulated.
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634997A (en) * | 2015-02-27 | 2015-05-20 | 天津大学 | Atomic force microscope system suitable for high-speed scanning |
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| CN106767428A (en) * | 2016-11-24 | 2017-05-31 | 李达成 | Laser alignment, displacement measurement system based on the disturbance of holographic conjugate light make-up air |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616916A (en) * | 1994-11-28 | 1997-04-01 | Matsushita Electric Industrial Co., Ltd. | Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
| CN2762110Y (en) * | 2004-12-02 | 2006-03-01 | 中国科学院上海光学精密机械研究所 | Light spot tracing device of atomic force microscope |
| CN101603911A (en) * | 2009-07-13 | 2009-12-16 | 浙江大学 | Large sample large range high resolution atomic force micro measurement method and device |
| CN202599978U (en) * | 2012-06-12 | 2012-12-12 | 浙江大学 | Three-scanner atomic power microscan detecting device |
| CN203643473U (en) * | 2013-10-28 | 2014-06-11 | 天津大学 | Atomic force microscope probe with two dimension scan function |
-
2013
- 2013-10-28 CN CN201310514419.4A patent/CN103529243B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616916A (en) * | 1994-11-28 | 1997-04-01 | Matsushita Electric Industrial Co., Ltd. | Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
| CN2762110Y (en) * | 2004-12-02 | 2006-03-01 | 中国科学院上海光学精密机械研究所 | Light spot tracing device of atomic force microscope |
| CN101603911A (en) * | 2009-07-13 | 2009-12-16 | 浙江大学 | Large sample large range high resolution atomic force micro measurement method and device |
| CN202599978U (en) * | 2012-06-12 | 2012-12-12 | 浙江大学 | Three-scanner atomic power microscan detecting device |
| CN203643473U (en) * | 2013-10-28 | 2014-06-11 | 天津大学 | Atomic force microscope probe with two dimension scan function |
Non-Patent Citations (2)
| Title |
|---|
| TOSHIO ANDO ET AL.: "A high-speed atomic force microscope for studying biological macromolecules", 《PNAS》 * |
| 吴森等: "基于弯曲法的AFM微悬臂梁弹性常数标定技术", 《仪器仪表学报》 * |
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| CN111796122A (en) * | 2019-04-04 | 2020-10-20 | 株式会社岛津制作所 | Surface analysis device |
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