CN101520313A - Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation - Google Patents
Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation Download PDFInfo
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- CN101520313A CN101520313A CN200910071623A CN200910071623A CN101520313A CN 101520313 A CN101520313 A CN 101520313A CN 200910071623 A CN200910071623 A CN 200910071623A CN 200910071623 A CN200910071623 A CN 200910071623A CN 101520313 A CN101520313 A CN 101520313A
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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Abstract
The invention relates to a sensing method and a device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed of precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopy, which is especially suitable for the three-dimensional detection of blind holes with large depth-diameter ratio. The device combines a micro spherical biconvex lens and an optical fiber probe measuring rod, and establishes a point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the high magnification and the sensing for the three-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber probe, easy miniaturization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick and ultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an absolute zero position exists in the three-dimensional measurement direction.
Description
Technical field
The invention belongs to exact instrument manufacturing and field of measuring technique, to small, the physical dimension of complicated inner cavity and the method for sensing and the device of three-dimensional coordinate, the three-dimensional structure size that is particularly useful for the small blind hole of big aspect ratio is surveyed in particularly a kind of " inferior macroscopic view " field.
Background technology
One of trend of industrial products development is exactly interior yardstick microminiaturization and precise treatment, development along with aerospace industry, electronics industry, medicine equipment, the demand sharp increase of accurate small inner chamber member is penetrated hole (as: Eustachian tube) in jet pipe, inertia type instrument, fiber stub, wortle, circuit printing forme and the medicine equipment etc. as fuel.Owing to be subjected to the restriction of space scale and the influence of measuring contact force, the precision measurement of yardstick becomes difficult to achieve in the small inner chamber member, measure aspect ratio and be difficult to improve, especially be difficult to realize the physical dimension measurement of dark blind micro hole, these have become " bottleneck " of restriction industry development.For the measurement that realizes littler inside dimension, improve and measure aspect ratio, the most widely used way is to use elongated probe to stretch into small inner chamber and surveys, and measures small inside dimension on the different depth by the mode of aiming sender.Therefore, the precision measurement of present small inner cavity size is mainly with coordinate measuring machine (CMM, Coordinate Measuring Machine) in conjunction with aiming signal sending type detection system (PS with very thin probe, Probing System) be main, the development of measurement of coordinates machine technology comparative maturity wherein, accurate three-dimensional space motion can be provided, and the detection mode that therefore aims at the signal sending type probe becomes the key of small inner cavity size detection system design.At present great majority are used for the probe design that small inner chamber measures and only have the two-dimensional detection ability, and this will be difficult to realize the measurement as blind hole depth or slit depth size.Therefore, in order accurately to obtain the three-D space structure size of complicated small inner chamber, need to realize a kind of probe that has high resolution, has the three-dimensional detection ability.
In small inner-cavity structure spare three-dimensional structure surveying work, in the surveying work of especially dark blind micro hole, the probe that has the three-dimensional detection ability at present realizes that means mainly comprise following several method:
1, the people such as professor Yang Shimin of China University Of Tianjin propose a kind of elasticity size transfer theory, developed the blind aperture gauge head of the diaphragm type with three-dimensional detection ability based on this principle, with the diaphragm is sensitive element, measuring staff is considered as being out of shape very big elastic body, automatically compensate elasticity measuring staff distortion inaccuracy by precision calibration, gauge head is installed on the three coordinate measuring machine, can carry out contact measurement to the logical blind aperture of various directions, measure the size and dimension error of its arbitrary section, can measure Φ 300 μ m, aspect ratio is 40 blind hole, the uncertainty of measurement result be 1 μ m (Yang Shimin, Japanese plum and, Zhang Guoxiong etc.The design and research of diaphragm type aperture gauge head, metering journal, 1998 the 19th the 2nd phases of volume).This method gauge head and measuring staff are difficult to further miniaturization, and the maximum nonlinearity erron of gauge head is 0.2 μ m, and measuring accuracy is difficult to further raising.
2, German federal physical technique research institute (PTB, Physikalisch-Technische Bundesanstalt) people such as professor Schwenke have proposed a kind of low-light pearl scattering imaging method, realized two dimension monitoring to the probe gauge head, they utilize single fiber as the probe measuring staff, bonding or be welded to the measuring staff end the low-light pearl, making light be coupled into inside of optical fibre propagates on the low-light pearl and forms scattering, form sensitive signal with an area array CCD receiving scattered light, realized little power contact type measurement, measured the aperture of Φ 214 μ m, fathom and be 0.8mm, the uncertainty of measurement result is 1 μ m, ergometry is μ N magnitude (Ji Guijun, Schwenke H Trapet E, Luo Zhen.The small nozzle opening size and dimension of engine nozzle measuring system, internal combustion engine journal,, the 16th the 4th phase of volume in 1998).People such as professor Schwenke had expanded this method afterwards, bonding low-light pearl has increased by one tunnel imaging optical path to this low-light pearl simultaneously on measuring staff, and this makes this detection system possess the three-dimensional detection ability, the standard deviation that obtains during the measurement standard ball is 0.2 μ m (H.Schwenke, F.
C.Weiskirch, H.Kunzmann.Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate MeasuringMachines, Annals of CIRP 50/1 (2001), pp.361-364).This method is in measuring the deep hole process, because low-light pearl scattering angle is bigger, along with the increase that fathoms, the quality of low-light pearl scattering imaging facula reduces gradually because scattered beam is subjected to that hole wall blocks, cause image blur, reduce measuring accuracy, therefore can't implement the high-acruracy survey of big aspect ratio.
3, (the National Institute of Standard Technology of USA National Institute of Standard and Technology, NIST) used the probe of single fiber measuring staff in conjunction with low-light pearl gauge head, on the two-dimensional directional imaging of optical fiber measuring staff is being amplified about 35 times by optical design, differentiate optical fiber measuring staff imaging on the reception two-dimensional directional with 2 area array CCDs, then the image that receives being carried out profile detects, thereby the minute movement on the space two-dimensional direction in measuring process of monitoring optical fiber measuring staff, and then the realization trigger-type is measured, the theoretical resolution of this detection system can reach 4nm, the probe gauge head diameter of detection system is Φ 50 μ m, measured the aperture of Φ 129 μ m in the experiment, the expanded uncertainty of measurement result has reached 70nm (k=2), fathom and to reach 5mm, ergometry is μ N magnitude (B.Muralikrishnan, J.A.Stone, J.R.Stoup.Fiber deflection probe for small holemetrology.Precision Engineering 30 (2006) 154-164.).Afterwards, people such as B.Muralikrishnan utilize the fiber optic rod bending techniques to expand the detection dimension of this method, the optical fiber probe that this method is used has the three-dimensional detection ability, and Z to the detection resolving power than X (perhaps Y) to having improved 100 times, the detection resolving power of two other direction does not change, also introduce the acoustic vibration method simultaneously and realized virtual scan, overcome the influence (B.Muralikrishnan of optical fiber gauge head viscous force, J.A.Stone, J.R.Stoup, ENANCED CAPABILITIES OF THE NIST FIBER PROBE FORMICROFEATURE METRO-LOGY.Proceedings of the Annual Meeting of the ASPE2006, Monterey CA).This method is surveyed the resolving power height, the measuring accuracy height, and the gauge head of use is easy to miniaturization, can measure the micropore of big aspect ratio, is the highest method of resolving power during present small inner chamber three-dimensional dimension is surveyed.The limitation of this method is the micrometric displacement enlargement factor lower (only have 35 times) of image-generating unit to the optical fiber measuring staff, must further improve resolving power by image algorithm, the three-dimensional micrometric displacement of detection optical fiber measuring staff must use two cover imaging systems, cause the system architecture more complicated, these factors cause the resolving power of detection system to be difficult to further raising, the real-time of detection system is relatively poor, system constitutes more complicated, more unfavorable be the Z that proposes of this method to method for sensing shared the light path of two other dimension, this cause this detection system measure Z to the time two other direction of measurement can not work simultaneously, for example sensor-based system can't solve the signal coupled problem of Z to information and two other directional information when measuring the slope, though therefore this kind method can realize Z to displacement survey make this method can not become three-dimensional probe truly owing to can't solve the coupled problem of three-D displacement signal.
4, Union Bank of Switzerland metering office (Swiss Federal Office of Metrology, but METAS) researched and developed the measurement that a novel coordinate measuring machine is devoted to the trace of brief summary member nano-precision.This measuring machine has adopted the novel contact type probe based on the flexure hinge structure of stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement is lower than 0.5mN, supports removable probe simultaneously, and the diameter of probe is minimum to Φ 0.1mm.Detection system combines a platform by the high position precision of Philips CFT exploitation, the positional precision of platform is 20nm, the standard deviation of this measuring system measuring repeatability reaches 5nm, maximum deviation is 20nm, the uncertainty of measurement result is 50nm (A.Kung, F.Meli and R.Thalmann, UltraprecisionMicro-CMM Using a Low Force 3D Touch Probe, Measurement Science and Technology 18 (2007), pp.319-327.).This kind method detection system complex structural designs, require measuring staff to have higher rigidity and hardness simultaneously, otherwise be difficult to realize effective displacement sensing, this makes the measuring staff structure be difficult to further miniaturization, measure aspect ratio and be restricted simultaneously, the resolving power of detection system is difficult to further raising.
In sum, in the present small inner cavity size three-dimensional detection method, owing to the probe of optical fiber fabrication have probe size little, measure contact force little, measure aspect ratio characteristics big, that measuring accuracy is high and obtained extensive concern, utilize its distinctive optical characteristics and mechanical property, be accomplished in several ways the precision measurement of the small inside dimension on the certain depth.The problem that existing measurement means mainly exists has:
1, the displacement resolving power of detection system is difficult to further raising.The detection method that USA National Institute of Standard and Technology adopts has the theoretical resolution of 4nm on two-dimensional directional, on third dimension direction, has higher resolving power (B.Muralikrishnan, J.A.Stone, J.R.Stoup.Fiber deflection probe for small hole metrology.Precision Engineering 30 (2006) 154-164.B.Muralikrishnan, J.A.Stone, J.R.Stoup, ENANCED CAPABILITIES OF THE NISTFIBER PROBE FOR MICROFEATURE METRO-LOGY.Proceedings of the Annual Meeting ofthe ASPE2006, Monterey CA), promptly the sensitivity characteristic parameter that imaging obtains on two-dimensional directional is 300nm/pixel, and the sensitivity characteristic parameter that obtains in third dimension direction (Z to) imaging is 3nm/pixel.The resolving power of 4nm obtains by two steps, first step is that optical imagery amplifies, enlargement ratio is 35 times, in this step, optical fiber measuring staff diameter is generally between 20 μ m～125 μ m, if will significantly improve the optical imagery enlargement ratio, then need complicated imaging system design and larger area CCD receiver, this will cause this method to lose exploitativeness in the measurement of small hole is used.Second step carried out profile identification for using image algorithm, thereby judges the displacement of optical fiber measuring staff, and the resolving power of this step is merely able to arrive the sub-pixel level, is difficult to significantly improve.Though this method at Z to having obtained higher resolving power, but Z can only work independently to surveying, can not work simultaneously to surveying with X, Y, for example this system can't realize the effective detection to the ramp structure key element, can only measure with Z to vertical plane Z to the position.
2, detection system not absolute " 0 " position on direction of measurement.The existing displacement of the detection means of small inner chamber mainly being judged the optical fiber measuring staff by the two dimensional image that area array CCD received, this method does not have definitely " 0 " position, this causes detection system to be difficult to distinguish the polarity of measuring key element, also is difficult to obtain higher measuring repeatability.
3, the detection system real-time is poor, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD received signal image (B.Murali-krishnan, J.A.Stone, J.R.Stoup.Fiberdeflection probe for small hole metrology.Precision Engineering 30 (2006) 154-164.), and because optical fiber measuring staff imaging optical path enlargement ratio only has 35 times, must use than the complex image algorithm and could realize the high resolution of optical fiber measuring staff displacement is monitored, this data volume that causes measuring system to handle increases greatly, reduced the real-time performance of detection system, be difficult to realize aim at sender and open in small inner cavity size and the three-dimensional coordinate measurement process, end the synchronism of measuring.
4, realize the structure more complicated of displacement sensing.The detection method that USA National Institute of Standard and Technology adopts must use the optical fiber measuring staff imaging optical path of two-way quadrature could realize three-dimensional detection (B.Murali-krishnan to the displacement of optical fiber measuring staff, J.A.Stone, J.R.Stoup.Fiber deflection probe for small hole metrology.Precision Engineering 30 (2006) 154-164.), this causes the adjustment of imaging optical path relatively more difficult, the orthogonality that needs check and correction two-way light path, the follow-up picture signal of two-way light path is handled also more complicated, need to solve the synchronism problem of two paths of signals, these all make this kind method can't further increase work efficiency in concrete use and operating aspect.
Summary of the invention
In order to overcome the deficiency of above-mentioned prior art, to satisfy small inner cavity size and three-dimensional coordinate measurement high precision, big aspect ratio and the demand of measuring fast, the present invention proposes a kind of small inner cavity size and three-dimensional coordinate method for sensing and device based on the little focus collimation of two dimension.
The object of the present invention is achieved like this:
A kind of small inner cavity size and three-dimensional coordinate method for sensing based on the little focus collimation of two dimension, realize sensing by following steps to optical fiber probe measuring staff three-D displacement:
1. the part with the optical fiber probe measuring staff combines with microballoon face biconvex lens;
2. utilize the 1. described microballoon face of step biconvex lens to set up the little focus collimation imaging optical path of pointolite two dimension, imaging is a light spot;
3. utilize the little focus collimation imaging optical path of the 2. described pointolite of step two dimension that the optical fiber probe measuring staff is changed the variation of the area of i.e. variation of the two-dimensional position of the center of energy of light spot and light spot with respect to the three-D displacement change transitions of pointolite for the light spot that the little focus collimation imaging optical path of pointolite two dimension is become;
4. pointolite and microballoon face biconvex lens are under a unique specific object distance, the little focus collimation imaging optical path imaging of the 2. described pointolite two dimension of step has minimum facula area and minimum two-dimentional degree of bias absolute value, and the optical fiber probe measuring staff position under the object distance that this is specific is as absolute " 0 " position on the three-D displacement sensing direction;
5. utilize electrooptical device to change the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step into electric signal;
6. utilize data acquisition and processing modules implement that the 5. resulting electric signal of step is gathered and handled, obtain the change information of the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step, finish of the extraction of optical fiber probe measuring staff with respect to the three-D displacement variable quantity of pointolite.
A kind of small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, comprise assembly bench, on assembly bench, assemble first link from left to right successively, second link, the 3rd link and the 4th link, four-dimensional adjustment rack, the spherical lens group, five dimension adjustment racks and CCD distribute successively and are installed in first link, second link, on the 3rd link and the 4th link following side, parallel light source is fitted on the four-dimensional adjustment rack, semi-girder is fitted on the five dimension adjustment racks, end at semi-girder is installed the optical fiber probe measuring staff, at the middle part of optical fiber probe measuring staff microballoon face biconvex lens is installed, the optical fiber probe gauge head is installed on optical fiber probe measuring staff bottom, the data line two ends are connected on CCD and the data collection processor, wherein: form the pointolite acquiring unit by parallel light source and spherical lens group, the refraction mode by light obtains pointolite; Form the little focus collimation image-generating unit of pointolite two dimension by pointolite and microballoon face biconvex lens; CCD, data line and data collection processor are formed photoelectricity and are received and the data acquisition process unit.
The present invention has following characteristics and good result:
1, the present invention utilizes microballoon face biconvex lens to have the design feature of super large curvature and small focal length, set up the little focus collimation imaging optical path of pointolite two dimension, utilization because of little focus collimation and super large curvature microballoon face biconvex lens in formed distinctive high power displacement amplification characteristic and birefringence deflection characteristic in the axle process, produced superelevation angle (line) displacement sensitivity, the displacement resolving power can reach dark inferior nanometer scale, and this is that the present invention distinguishes one of main innovate point of prior art.
2, method for sensing proposed by the invention and device are converted to the three-D displacement of optical fiber probe measuring staff the variation of light spot spatiality, its variation characteristic has only extreme point separately on the three-dimensional measurement direction, this makes method for sensing proposed by the invention and device have absolute " 0 " position on the three-dimensional measurement direction, and this is two of the present invention's main innovate point of distinguishing prior art.
3, method for sensing proposed by the invention and device only use an area array CCD can realize high efficiency extraction to the three-D displacement information of optical fiber probe measuring staff, the measuring-signal that is extracted is simple and easy to handle, be easy to realize on-line measurement, this is three of the present invention's main innovate point of distinguishing prior art.
4, method for sensing and system structure of device proposed by the invention are simple, can realize the high power of optical fiber probe measuring staff three-D displacement amount is amplified (enlargement ratio can reach several thousand times to up to ten thousand times) and sensing on a light path, this is four of the present invention's main innovate point of distinguishing prior art.
In sum, it is little that the present invention has not only possessed single fiber probe measurement power, be easy to miniaturization and can measure the big characteristics of aspect ratio, particularly the displacement resolving power of method for sensing and device has obtained a raising more than the order of magnitude with respect to the technical merit of existing 4nm, and has absolute " 0 " position on the three-dimensional measurement direction, system architecture is simple, the measuring-signal highly-efficient treatment is reliable, real-time is good, be easy to practical application, can be formed directly in and have nanoscale, small inner cavity size and the three-dimensional coordinate method for sensing and the device of Subnano-class and even dark Subnano-class displacement resolving power, the optical fiber probe of the optical fiber probe that uses for adopting in the present main small inner chamber yardstick detection method, its ergometry is a μ N magnitude, the spherical radius of microballoon face biconvex lens can be machined to 20 μ m, optical fiber probe measuring staff radius can be machined to 10 μ m, optical fiber probe gauge head radius can be machined to 20 μ m, and fathoming to reach 5mm.
Description of drawings
Fig. 1 is small inner cavity size and the three-dimensional coordinate sensing device synoptic diagram based on the little focus collimation of two dimension that passes through the refraction principle acquisition point light source of light of the present invention
Fig. 2 is small inner cavity size and the three-dimensional coordinate sensing device synoptic diagram based on the little focus collimation of two dimension by reflection of light principle acquisition point light source of the present invention
Fig. 3 is small inner cavity size and the three-dimensional coordinate sensing device synoptic diagram based on the little focus collimation of two dimension by diffraction of light principle acquisition point light source of the present invention
Fig. 4 a is that the combination of microballoon face biconvex lens of the present invention and optical fiber probe measuring staff is a damascene structures
Fig. 4 b is that the combination of microballoon face biconvex lens of the present invention and optical fiber probe measuring staff is the contiguous structure
Among the figure: 1. assembly bench, 2. first link, 3. second link, 4. semi-girder, 5. five dimension adjustment racks, 6. the 3rd link, 7. the 4th link, 8. four-dimensional adjustment rack, 9. parallel light source, 10. spherical lens group, 11. pointolites, 12. microballoon face biconvex lens, 13. the optical fiber probe gauge head, 14. optical fiber probe measuring staffs, the little focus collimation imaging optical path of 15. pointolite one dimensions optical axis, 16. data collection processor, 17.CCD, 18. data lines, 19. concave mirror, 20. plane mirrors, 21. micropore diaphragms.
Embodiment
A kind of small inner cavity size and three-dimensional coordinate method for sensing based on the little focus collimation of two dimension, realize sensing by following steps to optical fiber probe measuring staff three-D displacement:
1. the part with the optical fiber probe measuring staff combines with microballoon face biconvex lens;
Because will be by setting up the three-D displacement monitoring of the little focus collimation imaging optical path realization of pointolite two dimension to optical fiber probe measuring staff 14, therefore need to use microballoon face biconvex lens 12 to combine with optical fiber probe measuring staff 11 with small focal length, make them have identical motion state, the spherical radius of microballoon face biconvex lens 12 is usually between 20 μ m～100 μ m, so its curvature is 5 * 10
4m
-1～10
4m
-1Between.Optical fiber probe measuring staff 14 is with the measuring staff of one section optical fiber as probe, fundamental purpose is to utilize the peculiar mechanical property of optical fiber, its mechanical property is that optical fiber has higher rigidity, non-deformability is very strong, be easy to miniaturization and since want to survey object be small inner chamber, so the radius of optical fiber probe measuring staff 11 is very little usually, usually between 10 μ m～100 μ m, the focal length of microballoon face biconvex lens is a micron dimension to its radius.
But the focal distance f approximate expression of microballoon face biconvex lens 12 formed microballoon face biconvex lens is:
Wherein the refractive index of air is 1, and the refractive index of microballoon face biconvex lens 12 is n
1, the spherical radius of microballoon face biconvex lens 12 is r.As seen work as n
1=1.6, the radius of microballoon face biconvex lens 12 is in 100 μ m the time, and f is less than 33.33 μ m.
2. utilize the 1. described microballoon face of step biconvex lens to set up the little focus collimation imaging optical path of pointolite two dimension, imaging is a light spot;
Utilize refraction, reflection or the diffraction principle of light to obtain pointolite, pointolite is placed on the focus of microballoon face biconvex lens 12, then the light that pointolite sent is by microballoon face biconvex lens 12 two-dimensional collimations, and imaging is a light spot.
3. utilize the little focus collimation imaging optical path of the 2. described pointolite of step two dimension that the optical fiber probe measuring staff is changed the variation of the area of i.e. variation of the two-dimensional position of the center of energy of light spot and light spot with respect to the three-D displacement change transitions of pointolite for the light spot that the little focus collimation imaging optical path of pointolite two dimension is become;
When optical fiber probe measuring staff 14 with the vertical plane of the little focus collimation imaging optical path optical axis 15 of pointolite two dimension on when two-dimension displacement takes place, microballoon face biconvex lens 12 corresponding generation two-dimension displacements, pointolite 11 behind microballoon face biconvex lens 12 collimation become the center of energy of hot spot with corresponding generation two-dimension displacement, the light of pointolite 11 behind microballoon face biconvex lens 12 collimations will produce corner with the little focus collimation imaging optical path optical axis 15 of pointolite two dimension, along with the displacement enlargement ratio of the increase light path of image distance increases linearity, because the distance (object distance) between pointolite 11 and the microballoon face biconvex lens 12 is a micron dimension, and image distance is usually more than 100mm, therefore this light path can form microballoon face biconvex lens 12 is amplified phenomenon with respect to the two-dimensional migration amount high power of pointolite 11, and enlargement ratio can reach several thousand times to up to ten thousand times.
Basic theories according to geometrical optics can be derived, in the little focus collimation imaging optical path of pointolite two dimension, be positioned on the focus of microballoon face biconvex lens 12 when pointolite 11, the spherical radius of microballoon face biconvex lens 12 is that r, image distance are 1 ', the refractive index of microballoon face biconvex lens 12 is n
1, air refractive index be 1 o'clock, this moment, this light path satisfied the two-dimension displacement magnification β of microballoon face biconvex lens 12 on collimated light path optical axis 15 vertical direction:
Because the spherical radius of microballoon face biconvex lens 12 is typically chosen between 20 μ m～62.5 μ m, if get n
1=1.6,1 '=200mm, then the scope that calculates magnification β easily is between 7500～2400, and this compares with 35 times of elementary magnifications that optical system had that USA National Institute of Standard and Technology adopts and has obtained two liftings more than the order of magnitude.The spherical radius of for example choosing microballoon face biconvex lens 12 is 25 μ m, the vertical axle enlargement ratio β of its correspondence can be regarded as to such an extent that be 6000 according to formula (2), if the pixel dimension of the CCD17 that uses is 10 μ m, utilize data processing algorithm can differentiate the variation of 0.1 pixel, then this moment, sensing device to the theoretical displacement resolving power α of optical fiber probe measuring staff 14 on the two-dimensional measurement direction vertical with the little focus collimation imaging optical path optical axis of pointolite two dimension 15 was:
If this device is adopted the parameter outfit of obtainable the best of institute on current market, that is: when the spherical radius of microballoon face biconvex lens 12 is 20 μ m, its refractive index n
1=1.7, image distance 1 '=400mm, CCD pixel dimension are 7 μ m, utilize image algorithm can differentiate the variation of 0.1 pixel, and then sensing device can reach 0.04nm to optical fiber probe measuring staff 14 at the theoretical resolution α of the vertical direction of principal axis two-dimension displacement of collimated light path.
Continuing increases image distance, further reduces the size of CCD17 pixel, further improves the resolving power of image algorithm, and then this theoretical resolution can also improve.
When optical fiber probe measuring staff 14 when little focus collimation imaging optical path optical axis 15 directions of pointolite two dimension are subjected to displacement, the area of imaging facula changes corresponding, rate of change has high power linear amplification characteristic equally.
As seen, the little focus collimation imaging optical path of a single point light source two dimension has not only been realized the high power of the displacement of optical fiber probe measuring staff 14 is amplified, and imaging has comprised the three-D displacement information of optical fiber probe measuring staff 14 simultaneously, and but the image-forming information of this three-D displacement is decoupling zero, promptly the little focus collimation imaging optical path of pointolite two dimension become two positions of the center of energy of light spot to distinguish with the area of hot spot can be corresponding with the three-D displacement of optical fiber probe measuring staff 14.Therefore compare with existing main measurement means, method for sensing proposed by the invention has higher displacement resolving power and simple system structure more, the practical application of being more convenient for.
4. pointolite and microballoon face biconvex lens are under a unique specific object distance, the little focus collimation imaging optical path imaging of the 2. described pointolite two dimension of step has minimum facula area and minimum two-dimentional degree of bias absolute value, and the optical fiber probe measuring staff position under the object distance that this is specific is as absolute " 0 " position on the three-D displacement sensing direction;
When optical fiber probe measuring staff 14 moves in the little focus collimation imaging optical path optical axis 15 vertical direction generation two dimensions of pointolite two dimension, two-dimension displacement takes place in microballoon face biconvex lens 12 simultaneously, this causes the center and the degree of bias of the imaging facula energy of pointolite 11 to change on two-dimensional directional, degree of bias absolute value on all directions has unique minimal value respectively, imaging facula all directions energy degree of bias absolute value can be had minimizing position as absolute " 0 " position on the two-dimensional directional top offset investigative range.When optical fiber probe measuring staff 14 is subjected to displacement in little focus collimation imaging optical path optical axis 15 directions of pointolite two dimension, microballoon face biconvex lens 12 is subjected to displacement simultaneously, the degree of bias of its imaging facula is constant, facula area changes corresponding, facula area has unique minimal value, the imaging facula area can be had absolute " 0 " position that minimizing position is surveyed as this direction displacement.
5. utilize electrooptical device to change the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step into electric signal;
In the existing small inner chamber yardstick detection system based on optical fiber probe, most of detection systems must use 2 area array CCDs just can obtain the three-D displacement information of optical fiber probe measuring staff 14, must not use the high resolution of realizing detection system than the complex image algorithm because optical imagery part enlargement ratio is high simultaneously, this makes that the data volume of the needs processing in measuring is very big, has reduced the real-time of system.The designed little focus collimation imaging optical path of pointolite two dimension of the present invention has been realized the high power of optical fiber probe measuring staff 14 three-D displacement amounts is amplified (enlargement ratio can reach several thousand times to up to ten thousand times), imaging is a light spot, only need know the two-dimentional center of light spot energy and the three-dimensional micrometric displacement information that area just can accurately obtain optical fiber probe measuring staff 14, therefore can only use 1 area array CCD to get final product the three-D displacement signal of high efficiency extraction optical fiber probe measuring staff 14, the signal that collects uses better simply algorithm can obtain the identification of high resolution, has improved the real-time of detection system greatly.Compare with existing main measurement means, method for sensing proposed by the invention is littler with its measuring-signal data handling procedure calculated amount of device, speed is faster, be easier to guarantee aiming sender and the synchronism that opens, ends measurement in small inner cavity size and the three-dimensional coordinate measurement process, be easier to implement quick, high-precision on-line measurement.
6. utilize data acquisition and processing modules implement that the 5. resulting electric signal of step is gathered and handled, obtain the change information of the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step, finish of the extraction of optical fiber probe measuring staff with respect to the three-D displacement variable quantity of pointolite.
A kind of small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, comprise assembly bench 1, be on assembly bench 1, to assemble successively from left to right first link 2, second link 3, the 3rd link 6 and the 4th link 7, four-dimensional adjustment rack 8, spherical lens group 10, five dimension adjustment racks 5 and CCD17 distribute successively and are installed in first link 2, second link 3, on the 3rd link 6 and the 4th link 7 following sides, parallel light source 9 is fitted on the four-dimensional adjustment rack 8, semi-girder 4 is fitted on the five dimension adjustment racks 5, end at semi-girder 4 is installed optical fiber probe measuring staff 14, at the middle part of optical fiber probe measuring staff 14 microballoon face biconvex lens 12 is installed, optical fiber probe gauge head 13 is installed on optical fiber probe measuring staff 14 bottoms, data line 18 two ends are connected on CCD17 and the data collection processor 16, wherein: form the pointolite acquiring unit by parallel light source 9 and spherical lens group 10, the refraction mode by light obtains pointolite 11; Form the little focus collimation image-generating unit of pointolite two dimension by pointolite 11 and microballoon face biconvex lens 12; CCD17, data line 18 and data collection processor 16 are formed photoelectricity and are received and the data acquisition process unit.
Described small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, the center of the center of the optical axis of the directional light light beam that its parallel light source 9 is launched, the optical axis of spherical lens group 10, pointolite 11, the optical axis of microballoon face biconvex lens 12 and CCD17 is on the little focus collimation imaging optical path optical axis 15 of pointolite two dimension, form coaxial light path, optical fiber probe gauge head 12 has the above distance of 1mm with the little focus collimation imaging optical path optical axis 15 of pointolite two dimension.
Described small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, its pointolite acquiring unit can be made up of parallel light source 9, plane mirror 20 and concave mirror 19, by reflection of light acquisition point light source 11, wherein parallel light source 9 and plane mirror 20 are fitted in the top of assembly bench 1, and concave mirror 19 is fitted in the below of assembly bench 1.
Described small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, its pointolite acquiring unit can be made up of parallel light source 9 and micropore diaphragm 21, by diffraction of light acquisition point light source 11, wherein micropore diaphragm 21 is fitted in assembly bench 1 below, between parallel light source 9 and microballoon face biconvex lens 12, and the center of micropore diaphragm 21 is on the little focus collimation imaging optical path of pointolite one dimension optical axis 15, and the center of micropore diaphragm 21 overlaps with the center of pointolite 10.
Described small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, its optical fiber probe measuring staff 14 is embedded with the combination of microballoon face biconvex lens 12, is about to microballoon face biconvex lens 12 and is embedded in the middle of the optical fiber probe measuring staff 14.
Described small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, its optical fiber probe measuring staff 14 can also be a contiguous with the combination of microballoon face biconvex lens 12, is about to the side that microballoon face biconvex lens 12 is bonded in optical fiber probe measuring staff 14.
Claims (9)
1, a kind of small inner cavity size and three-dimensional coordinate method for sensing based on the little focus collimation of two dimension, it is characterized in that by the sensing of following steps realization to optical fiber probe measuring staff three-D displacement: 1. the part with the optical fiber probe measuring staff combines with microballoon face biconvex lens; 2. utilize the 1. described microballoon face of step biconvex lens to set up the little focus collimation imaging optical path of pointolite two dimension, imaging is a light spot; 3. utilizing the little focus collimation imaging optical path of the 2. described pointolite of step two dimension, is that the little focus collimation imaging optical path of pointolite two dimension becomes the two-dimensional position variation of light spot center of energy and the variation of light spot area with the optical fiber probe measuring staff with respect to the three-D displacement change transitions of pointolite; 4. pointolite and microballoon face biconvex lens are under a unique specific object distance, the little focus collimation imaging optical path imaging of the 2. described pointolite two dimension of step has minimum facula area and minimum two-dimentional degree of bias absolute value, and the optical fiber probe measuring staff position under the object distance that this is specific is as absolute " 0 " position on the three-D displacement sensing direction; 5. utilize electrooptical device to change the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step into electric signal; 6. utilize data acquisition and processing modules implement that the 5. resulting electric signal of step is gathered and handled, obtain the change information of the little focus collimation imaging optical path imaging of the 3. described pointolite two dimension of step, finish of the extraction of optical fiber probe measuring staff with respect to the three-D displacement variable quantity of pointolite.
2, small inner cavity size and three-dimensional coordinate method for sensing based on the little focus collimation of two dimension according to claim 1, the focal length that it is characterized in that microballoon face biconvex lens is a micron dimension.
3, small inner cavity size and three-dimensional coordinate method for sensing based on the little focus collimation of two dimension according to claim 1 is characterized in that using the extraction of a face battle array electrooptical device realization to optical fiber probe measuring staff three-D displacement information.
4, a kind of small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension, comprise assembly bench (1), it is characterized in that on assembly bench (1), assembling successively from left to right first link (2), second link (3), the 3rd link (6) and the 4th link (7), four-dimensional adjustment rack (8), spherical lens group (10), five dimension adjustment racks (5) and CCD (17) distribute successively and are installed in first link (2), second link (3), on the 3rd link (6) and the 4th link (7) following side, parallel light source (9) is fitted on the four-dimensional adjustment rack (8), semi-girder (4) is fitted on the five dimension adjustment racks (5), end at semi-girder (4) is installed optical fiber probe measuring staff (14), microballoon face biconvex lens (12) is installed at middle part at optical fiber probe measuring staff (14), optical fiber probe gauge head (13) is installed on optical fiber probe measuring staff (14) bottom, data line (18) two ends are connected on CCD (17) and the data collection processor (16), wherein: form the pointolite acquiring unit by parallel light source (9) and spherical lens group (10), obtain pointolite (11); Form the little focus collimation image-generating unit of pointolite two dimension by pointolite (11) and microballoon face biconvex lens (12); CCD (17), data line (18) and data collection processor (16) are formed photoelectricity and are received and the data acquisition process unit.
5, small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension according to claim 4, the center that it is characterized in that the optical axis of center, microballoon face biconvex lens (12) of optical axis, the pointolite (11) of optical axis, the spherical lens group (10) of the directional light light beam that parallel light source (9) is launched and CCD (17) is on the pointolite little focus collimation imaging optical path optical axis of two dimension (15), form coaxial light path, optical fiber probe gauge head (12) has the above distance of 1mm with the pointolite little focus collimation imaging optical path optical axis of two dimension (15).
6, small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension according to claim 4, it is characterized in that the pointolite acquiring unit can be made up of parallel light source (9), plane mirror (20) and concave mirror (19), by reflection of light acquisition point light source (11), wherein parallel light source (9) and plane mirror (20) are fitted in the top of assembly bench (1), and concave mirror (19) is fitted in the below of assembly bench (1).
7, small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension according to claim 4, it is characterized in that the pointolite acquiring unit can be made up of parallel light source (9) and micropore diaphragm (21), by diffraction of light acquisition point light source (11), wherein micropore diaphragm (21) is fitted in assembly bench (1) below, between parallel light source (9) and microballoon face biconvex lens (12), and the center of micropore diaphragm (21) is on the little focus collimation imaging optical path of pointolite one dimension optical axis (15), and the center of micropore diaphragm (21) overlaps with the center of pointolite (11).
8, small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension according to claim 4 is characterized in that the optical fiber probe measuring staff (14) and the combination of microballoon face biconvex lens (12) are embedded.
9, small inner cavity size and three-dimensional coordinate sensing device based on the little focus collimation of two dimension according to claim 4 is characterized in that the optical fiber probe measuring staff (14) and the combination of microballoon face biconvex lens (12) are contiguous.
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| CN2009100716237A CN101520313B (en) | 2009-03-24 | 2009-03-24 | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation |
| JP2012501115A JP5366278B2 (en) | 2009-03-24 | 2009-11-12 | Microcavity measurement method and detector based on microfocal length collimation |
| DE112009004575.8T DE112009004575B4 (en) | 2009-03-24 | 2009-11-12 | Microcavity measuring method based on collimation with micro-focal length and corresponding detection devices |
| GB1115277.4A GB2480202B (en) | 2009-03-24 | 2009-11-12 | Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof |
| PCT/CN2009/074909 WO2010108365A1 (en) | 2009-03-24 | 2009-11-12 | Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof |
| US13/260,464 US8559023B2 (en) | 2009-03-24 | 2009-11-12 | Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof |
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