CN102371506A - Device for measuring actuating of multi-shaft machine tool - Google Patents
Device for measuring actuating of multi-shaft machine tool Download PDFInfo
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- CN102371506A CN102371506A CN2010102597536A CN201010259753A CN102371506A CN 102371506 A CN102371506 A CN 102371506A CN 2010102597536 A CN2010102597536 A CN 2010102597536A CN 201010259753 A CN201010259753 A CN 201010259753A CN 102371506 A CN102371506 A CN 102371506A
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Abstract
The invention provides a device for measuring a multi-shaft machine tool. The device is mainly provided with a sensing head, a lens group and a signal processing group; the sensing head is provided with at least one sensing group; each sensing group is provided with a light source and a sensor; the sensor is opposite to the light source and is provided with a sensing receiving surface which is vertical to a light beam of the light source; the lens group is provided with a spherical lens to ensure that the light sources of all sensing groups can be irradiated to the corresponding sensors through the spherical lens; the signal processing group is electrically connected with the sensors of two sensing groups to receive signals output by all sensors; and the signal processing group is provided with a processing program which is used for performing operation processing and analytical detection; and the device for measuring the multi-shaft machine tool is convenient to assemble and is low in cost.
Description
Technical field
The present invention refers to a kind of in order to measure the measuring equipment of multiaxis machine tool start about a kind of measuring equipment especially.
Background technology
Owing to the lifting of multiaxis process technology, multiaxis machine tool has received the attention and the use of industrial quarters gradually at present in recent years, and existing multiaxis machine tool has more several rotating shafts than general trilinear axle toolroom machine; And through the mode of controlling the rotating shaft start; Not only can produce how much more complicated parts of structure, and can have better machining accuracy, wherein existing six toolroom machines are provided with three linear axes (X, Y, Z) and three rotating shafts (A, B, C); Wherein rotating shaft (A) rotates around the X axle; Rotating shaft (B) is around the rotation of Y axle, and rotating shaft (C) rotates around the Z axle, and existing five toolroom machines are provided with three linear axes and two rotating shafts; Wherein the position and the configuration of relative main shaft with the trilinear axle of two rotating shafts and workbench can produce different machine types and processing mode;
The equipment of five toolroom machines of existing measurement has a Three Degree Of Freedom measurement system, an easy measurement system and a toolroom machine check system; Wherein this Three Degree Of Freedom measurement system can be in order to the angle at the adjustment elevation angle; But this easy measurement system measured X axle, Y axle and Z axle; Use the path of analyzing rotating shaft, and this toolroom machine check system can measure displacement with dual axial angle and twin shaft to five frees degree such as straight degree via the mode of laser correction with software compensation;
Aforementioned several kinds of multiaxis machine tool measurement equipments; Though can each measure and proofread and correct for toolroom machine, it be quite a lot of and complicated to measure required equipment, therefore in assembling and set up quite complicated; Not only can improve relatively and measure required cost and time, in addition improvements are really arranged.
Summary of the invention
Therefore, the inventor is because existing multiaxis machine tool measuring equipment is assembled deficiency and problem complicated and that cost is high, and is special through continuous research and experiment, develops finally a kind of the present invention that can improve existing disappearance.
The object of the present invention is to provide a kind of multiaxis machine tool measuring equipment, it sees through the mode that optical element cooperatively interacts, and carries out dynamic measurement for multiaxis machine tool, and then an ease of assembly and the low purpose person of cost are provided.
For achieving the above object, the present invention provides a kind of multiaxis machine tool measuring equipment, and it includes a sensing head and a set of lenses, wherein:
This sensing head is provided with at least one sensing group, and each sensing group is provided with a light source and a sensor, wherein this sensor and light source mutually in the face of and be provided with one and be mutually vertical sensing receiving plane with the light beam of light source; And
This set of lenses is provided with a sphere lens, makes the light source of each sensing group can be via sphere lens on the corresponding sensor of directive.
Further; This multiaxis machine tool measuring equipment is provided with the signal processed group that is connected with each sensor; Use receiving the signal that each sensor is exported, and this signal processed group is provided with one in order to carry out the handling procedure of calculation process and analyzing and testing, this sense side head is provided with a connecting support, one first sensing group and one second sensing group; This connecting support is provided with a base plate and a plurality of board that is convexly set in base plate one side; This first sensing is mounted on the connecting support and is provided with one first light source and one first sensor, and this first light source is located on connecting support one board, faces mutually with first light source and this first sensor is established on another board of connecting support; And this second sensing is mounted on the connecting support and close with the space that the first sensing group is a quadrature; This second sensing group is provided with a secondary light source and one second sensor, and this secondary light source is located on the board that connecting support differs from the first sensing group, faces mutually with secondary light source and this second sensor is established on the board of connecting support.
Further again; This connecting support is provided with a connecting rod in order to combine with a multiaxis machine tool main shaft in the center of a side that differs from board; This set of lenses is provided with a support bar; The top of this support bar is stretched in the connecting support and between light source and corresponding sensor, the bottom of this support bar is fixed on the workbench, and this sphere lens is fixedly arranged on the supporting bar top.
Preferably, each sensing group is provided with at least one lens between light source and sensor, uses this light beam is modified to a collimated light and shines sensor.
Preferably, each sensor is a photo-electric sensor.
Preferably, each light source is respectively a collimated light source or a focused light source.
Preferably, each light source can be a visible light or a black light.
Through above-mentioned technological means; Multiaxis machine tool measuring equipment of the present invention; When measuring, only need sensing head and set of lenses are installed in respectively on multiaxis machine tool main shaft and the workbench; And utilize the mode of light source detection fetching device location and angular error; See through the displacement characteristic that two sensor senses receive continuous light beam and come relatively moving between sensing input beam and this sensing receiving plane, and the mode of computational analysis sphere lens sphere center position can obtain the error of multiaxis machine tool, and then an ease of assembly and the low multiaxis machine tool measuring equipment of cost are provided.
Description of drawings
Fig. 1 is the stereoscopic sketch map of multiaxis machine tool measuring equipment of the present invention;
Fig. 2 is the three-dimensional appearance sketch map that measuring equipment of the present invention is installed in a multiaxis machine tool;
Fig. 3 is the part amplification three-dimensional appearance sketch map that measuring equipment of the present invention is installed in a multiaxis machine tool;
Fig. 4 is the operational block sketch map of multiaxis machine tool measuring equipment of the present invention;
Fig. 5 is the stereoscopic sketch map of another embodiment of sensing head of the present invention.
Description of reference numerals: 10-sensing head; The 11-connecting support; The 111-base plate; The 112-board; The 113-connecting rod; The 12-first sensing group; 121-first light source; 122-first sensor; 123-sensing receiving plane; The 124-lens; The 13-second sensing group; The 131-secondary light source; 132-second sensor; 133-sensing receiving plane; The 134-lens; The 20-set of lenses; The 21-support bar; The 22-sphere lens; 23-magnet; 30-signal processed group; The 31-handling procedure; The 50-multiaxis machine tool; The 51-main shaft; The 52-workbench.
The specific embodiment
Being can detail knowledge technical characterictic of the present invention and practical effect, and can implement according to the content of specification, further with the preferred embodiment shown in graphic (like Fig. 1 to shown in Figure 4), specifies as the back now:
The optical principle of the present invention through simplifying, an and then ease of assembly and the low multiaxis machine tool measuring equipment of cost are provided, it is provided with a sensing head 10, a set of lenses 20 and a signal processed group 30, wherein:
This sensing head 10 is located on the main shaft 51 of a multiaxis machine tool 50 and is provided with a connecting support 11, one first sensing group 12 and one second sensing group 13; Wherein this connecting support 11 is one slightly to be square and to be provided with a base plate 111; This connecting support 11 convexes with a plurality of boards 112 in a side of base plate 111; And this connecting support 11 is provided with a connecting rod 113 in order to combine with a multiaxis machine tool 50 main shafts 51 in the center of base plate 111 another sides; This first sensing group 12 is located on the connecting support 11 and is provided with one first light source 121 and one first sensor 122; This first light source 121 is located on the board 112 in connecting support 11 base plates 111; Face mutually with first light source 121 and this first sensor 122 is established on another board 112 of connecting support 11, wherein this first sensor 122 is provided with one and is mutually vertical sensing receiving plane 123 with the light beam of first light source 121;
And this second sensing group 13 is located on the connecting support 11 and and be the spatial relationship of a quadrature with the first sensing group 12, this second sensing group 13 is provided with a secondary light source 131 and one second sensor 132, this secondary light source 131 is located on the board 112 that connecting support 11 differs from the first sensing group 12, and this second sensor 132 is established on the sidewall in connecting support 11 base plates 111 and face mutually with secondary light source 131; Wherein this second sensor 132 is provided with one and is mutually vertical sensing receiving plane 133 with the light beam of secondary light source 131, preferably, and each light source 121; 131 are respectively a collimated light source or a focused light source, and each light source 121,131 can be a visible light or a black light; Use the measurement that is applied to absolute distance, each sensing group 12,13 is as shown in Figure 5 in addition; Between light source 121,131 and sensor 122,132, be provided with lens 124; 134, this light beam be modified to a collimated light and shine sensor 122,132; Preferably, each sensor 122,132 is a photo-electric sensor;
This set of lenses 20 is located on the workbench 52 of multiaxis machine tool 50 and is provided with a support bar 21 and a sphere lens 22, and wherein this support bar 21 and the workbench 52 of multiaxis machine tool 50 set firmly mutually and combine and connecting support 11 is stretched into and between light source 121,131 and sensor 122 in the top; Between 132, preferably, the bottom of this support bar 21 is provided with the magnet 23 that attracts mutually with workbench 52; Make support bar 21 can firmly be located on the workbench 52; And this sphere lens 22 is fixedly arranged on support bar 21 tops, makes the light source 121 of each sensing group 12,13; 131 can be via sphere lens 22 on the corresponding sensor 122,132 of directive; And
The sensor 122,132 of this signal processed group 30 and two sensing groups 12,13 is connected; To receive each sensor 122; 132 signals exported, preferably, this signal processed group 30 can be through wired or wireless mode and each sensor 122; 132 are connected, and this signal processed group 30 is provided with a handling procedure 31 in order to carry out calculation process and analyzing and testing.
Multiaxis machine tool measuring equipment of the present invention when using as shown in Figures 2 and 3; The connecting rod 113 of connecting support 11 is combined with the main shaft 51 of multiaxis machine tool 50, and the support bar 21 of set of lenses 20 is combined with the workbench 52 of multiaxis machine tool 50, make sphere lens 22 be arranged at 112 of connecting support 11 each boards; See through the mode of Move tool machine X axle and Y axle; Two light sources 121,131 can and be shone in 122,132 last times of relative sensor through sphere lens 22; Two sensing receiving planes 123; 133 meetings produce a sensing signal for the incoming position of light beam respectively, and the sensing signal that is produced is sent in the handling procedure 31 of this signal processed group 30, can carry out calculation process for two sensing signals; Shown in second figure, see through the sensing signal of the first sensing group 12 and can measure the side-play amount of other two vertical axises (Y axle and Z axle); And the measurement signal that sees through the second sensing group 13 can be measured the side-play amount of other two vertical axises (X axle and Z axle), passes through the sphere center position of computational analysis sphere lens 22 again, can obtain multiaxis machine tool 50 dynamically and the error on the static state;
The X-direction of the parallel multiaxis machine tool tool 50 of beam direction sense of first light source wherein is so first sensor 122 can obtain Y axle (PSD1Y) and the axial signal of Z (PSD1Z);
The Y direction of the parallel multiaxis machine tool 50 of beam direction sense of secondary light source again is so second sensor 132 can obtain X axle (PSD2X) and the axial signal of Z (PSD2Z);
Calculate via formula, can obtain the side-play amount of the centre of sphere:
The side-play amount of centre of sphere X-direction: Δ X=PSD2X
Centre of sphere Y direction side-play amount: Δ Y=PSD1Y
Centre of sphere Z-direction side-play amount: Δ Z=(PSD1Z+PSD2Z)/2;
Moreover multiaxis machine tool measuring equipment of the present invention the time can divide two kinds to implement aspects in operation, and wherein one to implement aspect fixed and be parallel to axle to be measured with this sensing head 10; When two light sources 121; 131 penetrate and after getting into two sensors 122,132 respectively, can measure the side-play amount of two vertical axises in addition through the sphere lens 22 that moves; And the another kind of aspect of implementing is fixed with this sphere lens 22; And this sensing head 10 is parallel to axle to be measured and moves, when two sensors 122,132 receive behind the light source of sphere lens 22; Also can measure the in addition side-play amount of two vertical axises, again through the sphere center position of computational analysis sphere lens 22 can obtain multiaxis machine tool 50 dynamically, error on the static state.
Again then; Multiaxis machine tool measuring equipment of the present invention can divide two kinds to implement aspect when setting up; Wherein an enforcement aspect is set up in this sensing head 10 on toolroom machine 50 main shafts 51; This set of lenses 20 is set up on the workbench 52, and the another kind of aspect of implementing is set up in set of lenses 20 on toolroom machine 50 main shafts 51, and this sensing head 10 is set up on the workbench 52.
Through above-mentioned technological means; Multiaxis machine tool measuring equipment of the present invention; When measuring, only need sensing head 10 and set of lenses 20 are installed in respectively on multiaxis machine tool 50 main shafts 51 and the workbench 52, and utilize the mode of light source detection fetching device location and angular error, see through two sensors 122; The displacement characteristic that 132 senses receive continuous light beam comes sensing input beam and this sensing receiving plane 123; Relatively moving between 133, and the mode of computational analysis sphere lens 22 sphere center positions can obtain the error of multiaxis machine tool 50, and then an ease of assembly and the low multiaxis machine tool measuring equipment person of cost are provided.
The above; Only being preferred embodiment of the present invention, is not that the present invention is done any pro forma restriction, has common knowledge the knowledgeable in any affiliated technical field; If in the scope that does not break away from technical scheme that the present invention puies forward; Utilize disclosed technology contents to do the local equivalent embodiment that changes or modify, and do not break away from technical scheme content of the present invention, all still belong in the scope of technical scheme of the present invention.
Claims (10)
1. a multiaxis machine tool measuring equipment is characterized in that, it includes a sensing head and a set of lenses, wherein:
This sensing head is provided with at least one sensing group, and each sensing group is provided with a light source and a sensor, wherein this sensor and this light source mutually in the face of and be provided with one and be mutually vertical sensing receiving plane with the light beam of this light source; And
This set of lenses is provided with a sphere lens, and the light source that makes each sensing group is via this sphere lens on the corresponding sensor of directive.
2. multiaxis machine tool measuring equipment as claimed in claim 1; It is characterized in that; This multiaxis machine tool measuring equipment is provided with the signal processed group that is connected with each sensor; Receiving the signal that each sensor is exported, and this signal processed group is provided with one in order to carry out the handling procedure of calculation process and analyzing and testing, and this sense side head is provided with a connecting support, one first sensing group and one second sensing group; This connecting support is provided with a base plate and a plurality of board that is convexly set in base plate one side; This first sensing is mounted on the connecting support and is provided with one first light source and one first sensor, and this first light source is located on connecting support one board, faces mutually with first light source and this first sensor is established on another board of connecting support; And this second sensing is mounted on the connecting support and be the spatial relationship of a quadrature with the first sensing group; This second sensing group is provided with a secondary light source and one second sensor, and this secondary light source is located on the board that connecting support differs from the first sensing group, faces mutually with secondary light source and this second sensor is established on the board of connecting support.
3. multiaxis machine tool measuring equipment as claimed in claim 2; It is characterized in that; This connecting support is provided with a connecting rod in order to combine with a multiaxis machine tool main shaft in the center of a side that differs from board, this set of lenses is provided with a support bar, and the top of this support bar is stretched in the connecting support and between light source and corresponding sensor; The bottom of this support bar is fixed on the workbench, and this sphere lens is fixedly arranged on the supporting bar top.
4. multiaxis machine tool measuring equipment as claimed in claim 3 is characterized in that, each sensing group is provided with at least one lens between light source and sensor, this light beam be modified to a collimated light and shine sensor.
5. multiaxis machine tool measuring equipment as claimed in claim 4 is characterized in that, each sensor is a photo-electric sensor.
6. multiaxis machine tool measuring equipment as claimed in claim 5 is characterized in that, each light source is respectively a collimated light source.
7. multiaxis machine tool measuring equipment as claimed in claim 5 is characterized in that each light source is respectively a focused light source.
8. like claim 5,6 or 7 described multiaxis machine tool measuring equipments, it is characterized in that each light source is a visible light.
9. like claim 5,6 or 7 described multiaxis machine tool measuring equipments, it is characterized in that each light source is a black light.
10. multiaxis machine tool measuring equipment as claimed in claim 1 is characterized in that, each sensing group is provided with at least one lens between light source and sensor, and this light beam being modified to a collimated light and shining sensor, and each sensor is a photo-electric sensor.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105277119A (en) * | 2014-07-16 | 2016-01-27 | 刘建宏 | Error detection device and error detection method for multi-axis machine tool |
TWI633522B (en) * | 2017-06-02 | 2018-08-21 | 國家中山科學研究院 | Measuring and correcting compensation system and method for machine tool |
TWI754562B (en) * | 2021-03-12 | 2022-02-01 | 國立虎尾科技大學 | Spindle temperature measurement and compensation system and method |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0266118A1 (en) * | 1986-10-24 | 1988-05-04 | The University Of Liverpool | Displacement detection |
JPS63127103A (en) * | 1986-11-17 | 1988-05-31 | Nissan Motor Co Ltd | Position measuring apparatus |
WO1997043703A1 (en) * | 1996-05-10 | 1997-11-20 | Automated Precision, Inc. | Real time machine tool error correction using global differential wet modeling |
US6301007B1 (en) * | 1998-05-29 | 2001-10-09 | The Regents Of The University Of California | Machine tool locator |
CN1353635A (en) * | 1999-04-01 | 2002-06-12 | 菲迪亚股份公司 | System and process for certification of position of tool in machine tool |
US20020126297A1 (en) * | 2001-03-07 | 2002-09-12 | Charles Wang | Method and apparatus for measuring displacement or motion error |
CN1729080A (en) * | 2002-12-19 | 2006-02-01 | 瑞尼斯豪公司 | Tool analysis device and method |
CN2794697Y (en) * | 2005-06-17 | 2006-07-12 | 徐晓东 | Photoelectric detector for intelligent digital control lathe |
DE102005008055A1 (en) * | 2005-02-22 | 2006-08-24 | Deckel Maho Pfronten Gmbh | Measuring process for program controlled machine tool using measuring sphere, uses probe to determine position of sphere and compares with ideal position stored in control unit |
CN1857860A (en) * | 2006-06-06 | 2006-11-08 | 中国科学院光电技术研究所 | Tool presetting system with photoelectric aiming positioning |
CN101389446A (en) * | 2006-02-24 | 2009-03-18 | 瑞尼斯豪公司 | Tool detection |
CN101520313A (en) * | 2009-03-24 | 2009-09-02 | 哈尔滨工业大学 | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation |
-
2010
- 2010-08-23 CN CN 201010259753 patent/CN102371506B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0266118A1 (en) * | 1986-10-24 | 1988-05-04 | The University Of Liverpool | Displacement detection |
JPS63127103A (en) * | 1986-11-17 | 1988-05-31 | Nissan Motor Co Ltd | Position measuring apparatus |
WO1997043703A1 (en) * | 1996-05-10 | 1997-11-20 | Automated Precision, Inc. | Real time machine tool error correction using global differential wet modeling |
US6301007B1 (en) * | 1998-05-29 | 2001-10-09 | The Regents Of The University Of California | Machine tool locator |
CN1353635A (en) * | 1999-04-01 | 2002-06-12 | 菲迪亚股份公司 | System and process for certification of position of tool in machine tool |
US20020126297A1 (en) * | 2001-03-07 | 2002-09-12 | Charles Wang | Method and apparatus for measuring displacement or motion error |
CN1729080A (en) * | 2002-12-19 | 2006-02-01 | 瑞尼斯豪公司 | Tool analysis device and method |
DE102005008055A1 (en) * | 2005-02-22 | 2006-08-24 | Deckel Maho Pfronten Gmbh | Measuring process for program controlled machine tool using measuring sphere, uses probe to determine position of sphere and compares with ideal position stored in control unit |
CN2794697Y (en) * | 2005-06-17 | 2006-07-12 | 徐晓东 | Photoelectric detector for intelligent digital control lathe |
CN101389446A (en) * | 2006-02-24 | 2009-03-18 | 瑞尼斯豪公司 | Tool detection |
CN1857860A (en) * | 2006-06-06 | 2006-11-08 | 中国科学院光电技术研究所 | Tool presetting system with photoelectric aiming positioning |
CN101520313A (en) * | 2009-03-24 | 2009-09-02 | 哈尔滨工业大学 | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105277119A (en) * | 2014-07-16 | 2016-01-27 | 刘建宏 | Error detection device and error detection method for multi-axis machine tool |
TWI633522B (en) * | 2017-06-02 | 2018-08-21 | 國家中山科學研究院 | Measuring and correcting compensation system and method for machine tool |
TWI754562B (en) * | 2021-03-12 | 2022-02-01 | 國立虎尾科技大學 | Spindle temperature measurement and compensation system and method |
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