CN103900468A - Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure - Google Patents
Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure Download PDFInfo
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Abstract
The invention provides a double-fiber ball-shared coupling micro-measuring-force targeting sensor with an end face micro-structure, and belongs to the technology of precision instrument manufacture and measurement. The sensor comprises a laser device, a beam expanding collimating mirror, a fiber coupling lens, a guide pipe, a microscope objective, a CCD camera, a computer and a probe composed of an incidence fiber, a coupler and an outgoing fiber with the conical end face micro-structure. The coupler serves as a contact of the probe, and light beams are led out through the outgoing fiber with the conical end face micro-structure after being led into the coupler through the incidence optical fiber. The light beams which are led out enter the CCD camera through the microscope objective. The light spot energy center positions formed by the outgoing light beams on the CCD camera can be obtained through the image processing technology, and the targeting condition of the sensor in the space can be obtained through the one-to-one correspondence relation between the light spot energy center positions on the CCD camera and the spatial positions of sensor contacts. The outgoing fiber in the probe of the sensor is provided with the end face micro-structure, the signal to noise ratio of a detection signal is greatly increased, and the measurement resolving power of the sensor is improved.
Description
Technical field
The invention belongs to exact instrument manufacture and measuring technique, particularly a kind of two optical fiber with end face microstructure ball coupling micro measuring force aiming sensor altogether.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and the impact of measuring contact force, the precision measurement of micro-member size becomes difficult to achieve, especially fathoming of small inner chamber member is difficult to improve, and these become " bottleneck " of restriction industry development already.In order to realize less dimensional measurement, increase and fathom, the most widely used way is exactly that the inner chamber that uses elongated probe to go deep into micro-member is surveyed, and measures the small inside dimension on different depth by the mode that aims at sender.Therefore, the aiming signal sending type detection system that the precision measurement of micro-member size at present mainly has very thin probe taking coordinate measuring machine combination is as main, due to, comparative maturity of the development of measurement of coordinates machine technology, accurate three-dimensional space motion can be provided, and therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement comprises following several method:
1. the people such as graduate professor H.Schwenke of German federal physical technique has proposed a kind of low-light pearl scattering imaging method, has realized the two-dimensional detection to probe probe location information.The method utilizes single fiber as probe measuring staff, bonding low-light pearl or be welded to measuring staff end, make light be coupled into inside of optical fibre and propagate on low-light pearl and form scattering, form sensitive signal with an area array CCD receiving scattered light, realized micro-power contact type measurement.The people such as professor H.Schwenke had expanded this method afterwards, a bonding low-light pearl on measuring staff, increase the imaging optical path of Liao Yi road to this low-light pearl, this makes this detection system have three-dimensional detection ability simultaneously, and the standard deviation obtaining when measurement standard ball is 0.2 μ m.According to relevant report, the method can realize the aperture of measuring Φ 151 μ m, fathoms as 1mm.This method is in measurement deep hole process, because low-light pearl scattering angle is larger, along with the increase fathoming, the quality of low-light pearl scattering imaging facula reduces gradually because scattered beam is subject to that hole wall blocks, cause image blur, reduce measuring accuracy, therefore cannot realize the high-acruracy survey of large aspect ratio.
2. the people such as the Chinese Tan Jiubin of Harbin Institute of Technology professor and doctor Cui Jiwen proposes a kind of probe structure based on two coupling fibers, two optical fiber are connected by end welding ball, welding ball is as gauge head, introduce light compared with long optical fibers for one, other one goes out light compared with short-range missile, overcome the limitation that low-light pearl scattering method fathoms, can realize accurate aiming when diameter is not less than micro deep-hole that 0.01mm, aspect ratio be not more than 50: 1 and is measured.But have relevant interference of light in the coupling ball of the method, and light beam decay rapidly after the outgoing of outgoing optical fiber, the luminous energy that detector detects is lower, finally cause the Signal-to-Noise that obtains lower, affect measuring accuracy and further promote.
3. USA National Institute of Standard and Technology has been used the probe of single fiber measuring staff in conjunction with low-light pearl gauge head, on two-dimensional directional, the imaging of optical fiber measuring staff is amplified to 35 times of left and right by optical design, differentiate and receive optical fiber measuring staff imaging on two-dimensional directional with 2 area array CCDs, then the image receiving is carried out to profile detection, thereby the minute movement in measuring process of monitoring optical fiber measuring staff, and then realize trigger-type and measure, the theoretical resolution of this detection system can reach 4nm, the probe measuring head diameter of detection system is Φ 75 μ m, in experiment, measure the aperture of Φ 129 μ m, its expanded uncertainty estimated value has reached 70nm (k=2), ergometry is μ N magnitude.This method detection resolving power is high, and measuring accuracy is high, and the gauge head of use is easy to miniaturization, can measure the micropore of larger aspect ratio.The limitation of the method is that image-generating unit is to the micrometric displacement enlargement factor of optical fiber measuring staff lower (only having 35 times), must further improve resolving power by image algorithm, the two-dimensional micro-displacement of detection optical fiber measuring staff must use two cover imaging systems, cause system architecture more complicated, measurement data calculated amount is larger, these factors cause the resolving power of detection system to be difficult to further raising, and the real-time of detection system is poor, and system forms more complicated.
Union Bank of Switzerland metering office researched and developed a novel coordinate measuring machine be devoted to brief summary member nano-precision can trace measurement.This measuring machine has adopted the novel contact type probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement, lower than 0.5mN, is supported removable probe simultaneously, and the diameter of probe gauge head is minimum to Φ 100 μ m.Detection system combines the platform of a high position precision of being developed by Philips CFT, and the positional precision of platform is 20nm.The standard deviation of this measuring system measuring repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, require measuring staff to have higher rigidity and hardness simultaneously, otherwise be difficult to realize effective displacement sensing, this makes measuring staff structure be difficult to further miniaturization, measure aspect ratio and be restricted simultaneously, the resolving power of detection system is difficult to further raising.
5. the people such as the Chinese Tan Jiubin of Harbin Institute of Technology professor and Wang Fei has proposed a kind of measuring method of the micro-focus collimation of one dimension based on single fiber probe measuring staff, the method utilizes the super large curvature of single fiber probe measuring staff and the design feature of micro-cylindrical lens to set up the micro-focus collimation imaging optical path of pointolite one dimension, by measuring position and the width of fringe of center of energy of imaging bright fringes, thereby obtain the two dimensional displacement quantity information of optical fiber probe measuring staff, if this device is configured as follows: optical fiber probe measuring staff radius is 10 μ m, its refractive index n=1.7, image distance l'=300mm, photelectric receiver pixel dimension is 7 μ m, utilize image algorithm can differentiate the variation of 0.1 pixel, its theoretical resolution can reach 0.03nm.The width of fringe of the method imaging bright fringes is difficult for measuring, in the time that two-dimension displacement is measured, there is the coupled problem in image-forming information, i.e. the position of the center of energy of imaging bright fringes and the coupled problem of width of fringe simultaneously, therefore, the method does not possess the ability of two-dimentional precision measurement.
In sum, at present in microsize and coordinates detection method, because the probe of optical fiber fabrication has, probe size is little, measurement contact force is little, measure aspect ratio feature large, that measuring accuracy is high has obtained extensive concern, utilizes its distinctive optical characteristics and mechanical property to be accomplished in several ways the minute sized precision measurement on certain depth.The problem that existing measurement means mainly exists has:
Detection system fathom limited.The be masked impact of effect of the low-light pearl scattering imaging method of Germany PTB, is difficult to realize the lifting fathoming, and has reduced system detection accuracy simultaneously.
2. the displacement resolving power of detection system is difficult to further raising.The elementary magnification of existing detection system is lower, has caused its overall magnification lower, is difficult to realize the further raising of its displacement resolving power.The optical beam path enlargement ratio of the optics measuring staff of the detection method that USA National Institute of Standard and Technology adopts only has 35 times, and lower elementary enlargement ratio has caused its displacement resolving power to be difficult to further raising.
3. detection system real-time is poor, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD to receive signal pattern, must use more complicated image algorithm could realize the high resolution monitoring to the displacement of optical fiber measuring staff, this causes measuring system to need data volume to be processed greatly to increase, reduce the real-time performance of detection system, be difficult to realize in small inner cavity size and two-dimensional coordinate measuring process the synchronism that aims at sender and open, only measures.
4. there is the coupling of two-dimension displacement sensing, cause two-dimension displacement orientation detection scarce capacity.In the time of two-dimension displacement sensing, there is coupling in the micro-focus collimation measuring method based on single fiber probe measuring staff that Harbin Institute of Technology proposes, when tested displacement is Two-dimensional Position, between the two-dimensional signal that the method obtains, there is correlativity, and cannot separate, cause two-dimensional measurement to have very large error, cannot realize the Measurement accuracy of two-dimension displacement.
5. outgoing beam decay rapidly due to diffraction effect, the luminous energy that receiver is received is less.In the probe structure based on two coupling fibers that Harbin Institute of Technology proposes, outgoing beam decay rapidly due to normal space diffraction, the luminous energy that CCD is received is less, and the signal to noise ratio (S/N ratio) of signal reduces, and therefore resolving power is lower.
Summary of the invention
The object of the invention is to overcome micro-member dimension measurement method the deficiencies in the prior art, a kind of ball coupling micro measuring force aiming sensor altogether of the two optical fiber with end face microstructure that is applicable to the dimensional measurement of large aspect ratio micro-member is provided, by coupling mechanism and microcobjective, by sensor probe, the small displacement in micropore changes the transversal displacement amount of ccd image capture system into, and the high precision being realized when hole wall is measured by image centroid location algorithm aims at.
Technical scheme of the present invention is: a kind of two optical fiber with end face microstructure are ball coupling micro measuring force aiming sensor altogether, described sensor is made up of laser instrument, beam-expanding collimation mirror, coupling fiber lens, conduit, probe, microcobjective, CCD camera and computing machine, data line is communicated with CCD camera with computing machine, probe is placed in micropore to be measured; Described probe comprises incident optical, coupling mechanism and the outgoing optical fiber with tapered end face microstructure, coupling mechanism is connected with incident optical with the outgoing optical fiber of tapered end face microstructure respectively, coupling mechanism is as the contact of probe, the light beam that laser instrument sends enters incident optical through beam-expanding collimation mirror and coupling fiber lens, light beam is derived by the outgoing optical fiber with tapered end face microstructure after incident optical imports coupling mechanism, derives light beam and enters CCD camera through microcobjective.
Gaussian beam after incident optical imports coupling mechanism will become approximate bessel beam after the outgoing optical fiber with tapered end face microstructure, the propagation distance of approximate bessel beam is much larger than the propagation distance of Gaussian beam, therefore enter the luminous energy increase of CCD camera through microcobjective, the signal to noise ratio (S/N ratio) of signal improves, thereby has improved the resolving power of sensor.
Advantage of the present invention is:
1. the outgoing optical fiber in the probe of sensor is with end face microstructure, improve greatly the signal to noise ratio (S/N ratio) of detection signal, make sensor have nano level resolving power, than the two coupling fiber sensors by the outgoing optical fiber with end face microstructure does not form, resolving power has promoted more than 30%.
2. this sensor can change by changing the magnification of microcobjective the measurement resolution of sensor, cost-saving to meet the requirement of different occasions.
3. optical detection signal, only in inside of optical fibre transmission, is not subject to the impact of micropore inwall, measures maximum aspect ratio and can reach 50: 1, meets the requirement of large aspect ratio micro measurement.
Brief description of the drawings
Fig. 1 is the two optical fiber ball coupling micro measuring force aiming sensor structural representation altogether with end face microstructure;
Fig. 2 is the probe structure schematic diagram with aspheric surface shape end face microstructure;
Fig. 3 is the probe structure schematic diagram with spheric end face microstructure.
In figure: 1, laser instrument, 2, beam-expanding collimation mirror, 3, coupling fiber lens, 4, conduit, 5, incident optical, 6, coupling mechanism, 7, with the outgoing optical fiber of tapered end face microstructure, 8, probe, 9, micropore to be measured, 10, microcobjective, 11, CCD camera, 12, computing machine, 13, with the outgoing optical fiber of aspheric surface shape end face microstructure, 14, with the outgoing optical fiber of spheric end face microstructure.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is described in further detail.
Embodiment 1:
A kind of two optical fiber with end face microstructure are ball coupling micro measuring force aiming sensor altogether, described sensor is made up of laser instrument 1, beam-expanding collimation mirror 2, coupling fiber lens 3, conduit 4, probe 8, microcobjective 10, CCD camera 11 and computing machine 12, data line is communicated with CCD camera 11 with computing machine 12, probe 8 is placed in micropore 9 to be measured; Described probe 8 comprises incident optical 5, coupling mechanism 6 and the outgoing optical fiber 7 with tapered end face microstructure, coupling mechanism 6 is connected with incident optical 5 with the outgoing optical fiber 7 of tapered end face microstructure respectively, coupling mechanism 6 is as the contact of probe 8, the light beam that laser instrument 1 sends enters incident optical 5 through beam-expanding collimation mirror 2 and coupling fiber lens 3, light beam is derived by the outgoing optical fiber 7 with tapered end face microstructure after incident optical 5 imports coupling mechanism 6, derives light beam and enters CCD camera 11 through microcobjective 10.
Utilize conduit 4 also can not use conduit 4 by bending incident optical 5 to image capture space is provided, and directly by thermal finalization method by incident optical 5 bendings to image capture space is provided.The signal to noise ratio (S/N ratio) that can improve greatly detection signal with the use of the outgoing optical fiber 7 of tapered end face microstructure, makes sensor have nano level resolving power.
The course of work of the present invention is as follows:
Open laser instrument 1, the beamstability that laser instrument 1 is sent half an hour in advance.Adjust relative position and attitude between coupling fiber lens 3 and incident optical 5, ensure that maximum luminous energy enters incident optical.Adjust with relative position and attitude between outgoing optical fiber 7 and the microcobjective 10 of tapered end face microstructure, ensure that the relative microcobjective 10 of outgoing end face of outgoing optical fiber 7 is objects in paraxial region, to improve image quality.Probe 8 is stretched into micropore to be measured 9 inside, and make it to produce relative displacement with micropore 9 to be measured, in the time that coupling mechanism 6 contacts with micropore 9 hole walls to be measured, by microcobjective 10, by probe 8, the small tactile displacement amount in micropore 9 to be measured changes the transversal displacement amount of CCD camera 11 image capture systems into, by CCD camera 11 to probe 8 at X to surveying with the displacement of Y-direction, the high precision finally being realized when hole wall is measured by image centroid location algorithm aims at.
Embodiment 2:
Embodiment 3:
Claims (3)
1. the two optical fiber with end face microstructure ball coupling micro measuring force aiming sensor altogether, described sensor is made up of laser instrument (1), beam-expanding collimation mirror (2), coupling fiber lens (3), conduit (4), probe (8), microcobjective (10), CCD camera (11) and computing machine (12), data line is communicated with CCD camera (11) with computing machine (12), probe (8) is placed in micropore to be measured (9), it is characterized in that: described probe (8) comprises incident optical (5), coupling mechanism (6) and with the outgoing optical fiber (7) of tapered end face microstructure, coupling mechanism (6) is connected with incident optical (5) with the outgoing optical fiber (7) of tapered end face microstructure respectively, coupling mechanism (6) is as the contact of probe (8), the light beam that laser instrument (1) sends enters incident optical (5) through beam-expanding collimation mirror (2) and coupling fiber lens (3), light beam is derived by the outgoing optical fiber (7) with tapered end face microstructure after incident optical (5) imports coupling mechanism (6), derive light beam and enter CCD camera (11) through microcobjective (10).
2. the two optical fiber with end face microstructure according to claim 1 ball coupling micro measuring force aiming sensor altogether, is characterized in that: described probe (8) is made up of incident optical (5), coupling mechanism (6) and the outgoing optical fiber (13) with aspheric surface shape end face microstructure.
3. the two optical fiber with end face microstructure according to claim 1 ball coupling micro measuring force aiming sensor altogether, is characterized in that: described probe (8) is made up of incident optical (5), coupling mechanism (6) and the outgoing optical fiber (14) with spheric end face microstructure.
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Cited By (5)
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| CN104677292A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Four-core fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| CN105021128A (en) * | 2015-07-02 | 2015-11-04 | 哈尔滨工业大学 | Probe sensing method and device based on light beam scanning confocal detection technology |
| CN105043255A (en) * | 2015-07-02 | 2015-11-11 | 哈尔滨工业大学 | Combined cantilever probe sensing method based on optical fiber emergent light detection and device |
| CN105841609A (en) * | 2016-03-22 | 2016-08-10 | 哈尔滨工业大学 | Beam scanning detection-based combined cantilever beam probe sensing device and sensing method |
| CN115096194A (en) * | 2022-07-27 | 2022-09-23 | 深圳市深视智能科技有限公司 | Displacement measuring probe, measuring device and displacement measuring method |
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Cited By (8)
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| CN104677292A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Four-core fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| CN105021128A (en) * | 2015-07-02 | 2015-11-04 | 哈尔滨工业大学 | Probe sensing method and device based on light beam scanning confocal detection technology |
| CN105043255A (en) * | 2015-07-02 | 2015-11-11 | 哈尔滨工业大学 | Combined cantilever probe sensing method based on optical fiber emergent light detection and device |
| CN105021128B (en) * | 2015-07-02 | 2017-09-26 | 哈尔滨工业大学 | Probe method for sensing and device based on beam-scanning confocal Detection Techniques |
| CN105043255B (en) * | 2015-07-02 | 2018-01-26 | 哈尔滨工业大学 | Combination socle beam probe method for sensing and device based on fiber exit optical detection |
| CN105841609A (en) * | 2016-03-22 | 2016-08-10 | 哈尔滨工业大学 | Beam scanning detection-based combined cantilever beam probe sensing device and sensing method |
| CN105841609B (en) * | 2016-03-22 | 2018-04-24 | 哈尔滨工业大学 | A kind of combination socle beam probe sensing device and method for sensing based on light beam scanning probe |
| CN115096194A (en) * | 2022-07-27 | 2022-09-23 | 深圳市深视智能科技有限公司 | Displacement measuring probe, measuring device and displacement measuring method |
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Application publication date: 20140702 |