CN104697448A - Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device - Google Patents
Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device Download PDFInfo
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- CN104697448A CN104697448A CN201510107910.4A CN201510107910A CN104697448A CN 104697448 A CN104697448 A CN 104697448A CN 201510107910 A CN201510107910 A CN 201510107910A CN 104697448 A CN104697448 A CN 104697448A
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Abstract
A double-fiber grating probe microscale measurement device and method based on an optical fiber ring laser device belongs to the technical field of precise instrument manufacture and measurement. The device comprises a pump source, a wavelength division multiplexer, an Er-doped optical fiber, a saturable absorber, a multiway optical switch, an external reference grating, a double-fiber grating probe, a computer and a spectrum analyzer. Through the wavelength division multiplexer, the pump source is connected with a ring cavity composed of the Er-doped optical fiber, a circulator, the saturable absorber, a coupler and an isolator B; the coupler is connected in circuit with the spectrum analyzer and the computer through an isolator A. The method comprises controlling the multiway optical switch through the computer to switch light paths; measuring the laser wavelength output by the optical fiber ring laser device through the spectrum analyzer when the double-fiber grating probe and the external reference grating serve as a laser wavelength selector respectively; through a differential data processing algorithm, achieving non-temperature-coupled two-dimensional microscale measurement. The double-fiber grating probe microscale measurement device and method based on the optical fiber ring laser device has the advantages of integrating sensing and energy supply into a whole and being compact in system and high in sensitivity.
Description
Technical field
The invention belongs to exact instrument manufacture and field of measuring technique, particularly a kind of double optical fiber grating probe micro-scale measurement device and method based on optical fiber ring laser.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and measuring the impact of contact force, the precision measurement of micro-member yardstick becomes difficult to achieve, especially the degree of depth measuring small inner chamber component is difficult to improve, and these become " bottleneck " of restriction industry development already.Measuring to realize smaller szie, increasing and fathom, the most widely used way is exactly that the inner chamber using elongated probe to go deep into micro-member detects, and is measured the small inside dimension on different depth by the mode aiming at sender.Therefore, the precision measurement of current micro-member size combines the aiming signal sending type detection system with very thin probe based on coordinate measuring machine, due to the development comparative maturity of measurement of coordinates machine technology, can provide accurate three-dimensional space motion, therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system.
At present, the Main Means of micro-member dimensional measurement comprises following several method:
1. Chinese Harbin Institute of Technology Tan Jiubin teaches and Cui Ji culture and education the people such as to be awarded and proposed a kind of probe structure based on two coupling fiber, two optical fiber are communicated with by end welding ball, welding ball is as gauge head, one comparatively long optical fibers introduce light, other one comparatively short-range missile go out light, overcome the limitation that low-light pearl scattering method fathoms, can realize that 0.01mm is not less than to diameter, aspect ratio be not more than 15: 1 micro deep-hole measure time fine sight.Although this method overcomes capture-effect to a certain extent, the luminous energy of the reverse transfer that coupling ball realizes is very limited, fathoms and is difficult to further lifting.
2. USA National Institute of Standard and Technology employs the probe of single fiber measuring staff in conjunction with low-light pearl, in the two-dimensional direction the imaging of optical fiber measuring staff is amplified about 35 times by optical design, differentiate with 2 area array CCDs and receive optical fiber measuring staff imaging on two-dimensional directional, then contour detecting is carried out to the image received, thus the minute movement in measuring process of monitoring optical fiber measuring staff, and then realize trigger-type measurement, the theoretical resolution of this detection system can reach 4nm, the probe diameter of detection system is Φ 75 μm, the aperture of Φ 129 μm is measured in experiment, its expanded uncertainty probable value reaches 70nm (k=2), ergometry is μ N magnitude.This method detection resolving power is high, and measuring accuracy is high, and the gauge head of use is easy to miniaturization, can measure the micropore of larger aspect ratio.But in method, the two dimension of detection optical fiber measuring staff is touched displacement and must be used two cover imaging systems, and cause system architecture more complicated, measurement data calculated amount is larger, and these factors cause the real-time of detection system poor, System's composition more complicated.
3. what Union Bank of Switzerland metering office have developed that a novel coordinate measuring machine is devoted to structural features nano-precision can the measurement of trace.This measuring machine have employed the novel touch probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement, lower than 0.5mN, supports removable probe simultaneously, and probe diameter is minimum to Φ 100 μm.Detection system combines the platform of the high position precision that is developed by PhilipsCFT, and the positional precision of platform is 20nm.The standard deviation of this measuring system measuring repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, require that measuring staff has higher rigidity and hardness simultaneously, otherwise be difficult to realize effective tactile displacement sensing, this makes measuring staff structure be difficult to further miniaturization, the aspect ratio measured is restricted simultaneously, and the resolving power of detection system is difficult to further raising.
4. Chinese Harbin Institute of Technology Cui Ji culture and education is awarded and is proposed a kind of pore size measurement mechanism based on FBGBending and method with people such as Yang Fuling, the probe that the method utilizes fiber grating to process and corresponding light source, pick-up unit are as aiming triggering system, coordinate two-frequency laser interferometer measuring motion, the pore size of different cross section can be obtained.The microscale sensor of the method is when tactile survey distortion, and the main stress of probe does not act on fiber grating, and the resolution of system is very low, is difficult to further raising.
In sum, in current microsize and coordinates detection method, probe due to optical fiber fabrication have probe size little, measure that contact force is little, the feature that aspect ratio is large, measuring accuracy is high measured and obtain extensive concern, utilize its distinctive optical characteristics and mechanical property to be accomplished in several ways minute sized precision measurement on certain depth.With the main Problems existing of measurement means be now:
1. the tactile displacement resolving power of detection system is difficult to further raising.The elementary magnification of existing detection system is lower, result in its overall magnification lower, is difficult to the further raising realizing its tactile displacement resolving power.Main micro-touch displacement exercising result can not be applied on fiber grating by the fiber grating probe based on the pore size measuring method of FBG Bending, and then the transducing signal being converted into spectral information is faint, and the resolving power of system is very low.
2. detection system poor real, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD Received signal strength image, more complicated image algorithm must be used could to realize touching optical fiber measuring staff the high resolution monitoring of displacement, this causes measuring system to need data volume to be processed greatly to increase, reduce the real-time performance of detection system, be difficult to the synchronism realizing aiming at sender in small inner cavity size and two-dimensional coordinate measuring process Yu opening, only measure.
3. there is the radial coupling of touching displacement of two dimension.Probe based on the pore size measuring method of FBG Bending has each consistent to performance, coupling is there is when radial two dimension touches displacement sensing, and cannot be separated, cause two-dimensional measurement to there is very big error, the Measurement accuracy that radial two dimension touches displacement cannot be realized.
4. do not possess the decoupling ability of radial and axial detection.Above-mentioned detection method or do not possess axial detection ability or do not possess the decoupling ability of radial and axial detection, when carrying out micro-scale measurement, measuring process is complicated, it is low to measure efficiency.
Summary of the invention
The object of the invention is to overcome micro-member dimension measurement method resolving power in above-mentioned prior art low, the drawback that tested dimension is single, a kind of device and method being applicable to micro-member two dimension micro-scale measurement is provided, double optical fiber grating probe is utilized both to survey sensing element as touching, also as the wavelength selecting device of optical fiber ring laser, after double optical fiber grating probe tips is by tactile displacement effect, stress causes the parameter of fiber grating to change, the reflection kernel wavelength of the fiber grating as optical fiber ring laser wavelength selecting device is changed, and change optical fiber ring laser Output of laser centre wavelength further, eliminate the vibration of many longitudinal modes owing to utilizing saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, thus make system have higher sensitivity.Multichannel photoswitch is adopted to carry out the passage of handover measurement fiber grating, to obtain corresponding optical fiber ring laser Output of laser centre wavelength information, then differential data process is done to it, reduce the impact of temperature fluctuation on measurement result, substantially increase the adaptive faculty of this device to environment, thus realize a kind of brand-new temperature without the two-dimentional micro-scale measurement of coupling.
The object of the present invention is achieved like this: a kind of double optical fiber grating probe micro-scale measurement device based on optical fiber ring laser, comprise the ring cavity connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, pumping source is communicated with ring cavity by wavelength division multiplexer; Described coupling mechanism is communicated with computing machine with spectroanalysis instrument successively by isolator A; Multichannel photoswitch is communicated with circulator by saturated absorbing body, and Multichannel photoswitch is communicated with double optical fiber grating probe with single-mode fiber B by single-mode fiber A, and double optical fiber grating probe pin upper ends portion is fixedly mounted with by probe clamper; Computing machine is communicated with Multichannel photoswitch; Multichannel photoswitch is connected with external reference grating; Described double optical fiber grating probe and external reference grating are switched by Multichannel photoswitch can respectively as the wavelength selecting device of optical fiber ring laser.
A kind of double optical fiber grating probe micro-scale measurement method based on optical fiber ring laser, described method is: utilize pumping source to provide pump light, the Er-doped fiber entered as gain media through wavelength division multiplexer produces excited radiation light, excited radiation light is through coupling mechanism light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator, exported by B port, eliminate the vibration of many longitudinal modes through saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as the double optical fiber grating probe of wavelength selecting device or external reference grating pair laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in double optical fiber grating probe and component to be measured, the reflectance spectrum centre wavelength of double optical fiber grating probe inner fiber grating will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch, spectroanalysis instrument is utilized to detect in double optical fiber grating probe two fiber gratings and external reference grating respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when the fiber grating of two in double optical fiber grating probe is respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero one dimension radial direction touches displacement and temperature drift; When in double optical fiber grating probe, two fiber gratings do differential data process respectively as optical fiber ring laser Output of laser wavelength mean value during optical fiber ring laser wavelength selecting device and external reference grating as optical fiber ring laser Output of laser wavelength during optical fiber ring laser wavelength selecting device, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
Advantage of the present invention is:
1. have that precision is high, contact force is little based on the double optical fiber grating probe micro-scale measurement device and method of optical fiber ring laser, do not damage tested component surface, the feature of probe long service life.
2. utilize the laser of optical fiber ring laser generation single longitudinal mode, narrow linewidth as measurement light, sensing, energy supply are integrated, and system compact improves measurement sensistivity simultaneously.
3. optical detection signal is only in fiber grating internal transmission, contact in space is converted into the change of reflectance spectrum centre wavelength, be not subject to the impact of component capture-effect when measuring microscale component, measuring aspect ratio can reach 100: 1, meets the requirement of large aspect ratio microstructure micro-scale measurement.
4. can realize based on the double optical fiber grating probe micro-scale measurement method of optical fiber ring laser radial and axial without coupling measurement simultaneously, the step of micro-scale measurement is simplified, improve the efficiency of micro-scale measurement.
5. the differential compensation system of reference is each other devised in probe interior, in conjunction with the double optical fiber grating probe micro-scale measurement installation method based on optical fiber ring laser, eliminate variation of ambient temperature to the impact of measuring, substantially increase the adaptive faculty of sensors towards ambient, space and environment that traditional measurement instrument cannot normally work can be deep into carry out precision measurement, as narrow and small hemi-closure space and inflammable and explosive environment etc., be also applicable to industry spot and measure.
Accompanying drawing explanation
Fig. 1 is the double optical fiber grating probe micro-scale measurement apparatus structure schematic diagram based on optical fiber ring laser;
Fig. 2 is the sectional view of A-A in Fig. 1;
Fig. 3 is the profile of double optical fiber grating probe in Fig. 1;
In figure: 1. pumping source, 2. wavelength division multiplexer, 3. Er-doped fiber, 4. circulator, 5. saturated absorbing body, 6. Multichannel photoswitch, 7a. single-mode fiber A, 7b. single-mode fiber B, 8. external reference grating, 9. probe clamper, 10. double optical fiber grating probe, 11. computing machines, 12. spectroanalysis instruments, 13a. isolator A, 13b. isolator B, 14. coupling mechanisms, 31. fiber gratings, 32. ultraviolet glued membranes, the spherical needle point of 33. probe.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of double optical fiber grating probe micro-scale measurement device based on optical fiber ring laser, comprise and connect and compose ring cavity successively by wavelength division multiplexer 2, Er-doped fiber 3, circulator 4, coupling mechanism 14 and isolator B13b, pumping source 1 is communicated with ring cavity by wavelength division multiplexer 2; Described coupling mechanism 14 is communicated with computing machine 11 with spectroanalysis instrument 12 successively by isolator A13a; Multichannel photoswitch 6 is communicated with circulator 4 by saturated absorbing body 5, and Multichannel photoswitch 6 is communicated with double optical fiber grating probe 10 with single-mode fiber B7b by single-mode fiber A7a, and double optical fiber grating probe 10 upper end is fixedly mounted with by probe clamper 9; Computing machine 11 is communicated with Multichannel photoswitch 6; Multichannel photoswitch 6 is connected with external reference grating 8; Described double optical fiber grating probe 10 is switched by Multichannel photoswitch 6 with external reference grating 8 can respectively as the wavelength selecting device of optical fiber ring laser.
A kind of double optical fiber grating probe micro-scale measurement method based on optical fiber ring laser, described method is: utilize pumping source 1 to provide pump light, the Er-doped fiber 3 entered as gain media through wavelength division multiplexer 2 produces excited radiation light, excited radiation light is through coupling mechanism 14 light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer 2, Er-doped fiber 3, circulator 4, coupling mechanism 14 and isolator B13b, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator 4, exported by B port, eliminate the vibration of many longitudinal modes through saturated absorbing body 5 and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as the double optical fiber grating probe 10 of wavelength selecting device or external reference grating 8 pairs of laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in double optical fiber grating probe 10 and component to be measured, the reflectance spectrum centre wavelength of double optical fiber grating probe 10 inner fiber grating will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch 6, spectroanalysis instrument 12 is utilized to detect in double optical fiber grating probe two fiber gratings and external reference grating 8 respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when the fiber grating of two in double optical fiber grating probe 10 is respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero one dimension radial direction touches displacement and temperature drift; When in double optical fiber grating probe 10, two fiber gratings do differential data process respectively as optical fiber ring laser Output of laser wavelength mean value during optical fiber ring laser wavelength selecting device and external reference grating 8 as optical fiber ring laser Output of laser wavelength during optical fiber ring laser wavelength selecting device, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
Based on the innovative point of the double optical fiber grating probe micro-scale measurement device and method of optical fiber ring laser and technique effect be: double optical fiber grating probe is directly as the wavelength selecting device of optical fiber ring laser, touch displacement information and can directly act on optical fiber ring laser, the wavelength of its Output of laser is changed, and adopt saturated absorbing body to narrow Output of laser live width and make optical fiber ring laser at single longitudinal mode MODE of operation, compared with traditional fiber-optic grating sensor pick-up unit, sensitivity of the present invention has and significantly improves, in the present invention, as the wavelength selecting device that two fiber gratings in the double optical fiber grating probe of sensor and external reference grating are again in optical fiber ring laser simultaneously, sensor and sensor energy feedway are organically combined, and, Multichannel photoswitch under the control of the computer, switch the wavelength selecting device forming optical fiber ring laser respectively, the two dimension completed under the prerequisite not increasing additional light device without temperature coupling touches displacement measurement, the fiber-optic grating sensor pick-up unit volume making the present invention more traditional reduces more than one times, cost reduces more than twice, technique effect of the present invention is given prominence to.
Claims (2)
1. the double optical fiber grating probe micro-scale measurement device based on optical fiber ring laser, it is characterized in that: connect and compose ring cavity successively by wavelength division multiplexer (2), Er-doped fiber (3), circulator (4), coupling mechanism (14) and isolator B (13b), pumping source (1) is communicated with ring cavity by wavelength division multiplexer (2); Described coupling mechanism (14) is communicated with computing machine (11) with spectroanalysis instrument (12) successively by isolator A (13a); Multichannel photoswitch (6) is communicated with circulator (4) by saturated absorbing body (5), Multichannel photoswitch (6) is communicated with double optical fiber grating probe (10) with single-mode fiber B (7b) by single-mode fiber A (7a), and double optical fiber grating probe (10) upper end is fixedly mounted with by probe clamper (9); Computing machine (11) is communicated with Multichannel photoswitch (6); Multichannel photoswitch (6) is connected with external reference grating (8); Described double optical fiber grating probe (10) and external reference grating (8) are switched by Multichannel photoswitch (6) can respectively as the wavelength selecting device of optical fiber ring laser.
2. the double optical fiber grating probe micro-scale measurement method based on optical fiber ring laser, it is characterized in that: described method is as follows: utilize pumping source to provide pump light, the Er-doped fiber entered as gain media through wavelength division multiplexer produces excited radiation light, excited radiation light is through coupling mechanism light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator, exported by B port, eliminate the vibration of many longitudinal modes through saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as the double optical fiber grating probe of wavelength selecting device or external reference grating pair laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in double optical fiber grating probe and component to be measured, the reflectance spectrum centre wavelength of double optical fiber grating probe inner fiber grating will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch, spectroanalysis instrument is utilized to detect in double optical fiber grating probe two fiber gratings and external reference grating respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when the fiber grating of two in double optical fiber grating probe is respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero one dimension radial direction touches displacement and temperature drift; When in double optical fiber grating probe, two fiber gratings do differential data process respectively as optical fiber ring laser Output of laser wavelength mean value during optical fiber ring laser wavelength selecting device and external reference grating as optical fiber ring laser Output of laser wavelength during optical fiber ring laser wavelength selecting device, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510107910.4A CN104697448A (en) | 2015-03-05 | 2015-03-05 | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
| PCT/CN2016/075592 WO2016138871A1 (en) | 2015-03-05 | 2016-03-04 | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| US15/555,028 US10082383B2 (en) | 2015-03-05 | 2016-03-04 | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core FBG probe |
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| CN201510107910.4A CN104697448A (en) | 2015-03-05 | 2015-03-05 | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
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| WO2016138871A1 (en) * | 2015-03-05 | 2016-09-09 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| WO2017000364A1 (en) * | 2015-07-02 | 2017-01-05 | 哈尔滨工业大学 | Probe sensing method and apparatus based on optical beam scanning confocal detection technique |
| CN109708685A (en) * | 2017-10-26 | 2019-05-03 | 北京信息科技大学 | A kind of probe motion control method based on fiber Bragg grating sensor |
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Application publication date: 20150610 |