CN103759652A - Two-dimensional microscale measuring device and method based on double fiber bragg gratings - Google Patents
Two-dimensional microscale measuring device and method based on double fiber bragg gratings Download PDFInfo
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- CN103759652A CN103759652A CN201410030739.7A CN201410030739A CN103759652A CN 103759652 A CN103759652 A CN 103759652A CN 201410030739 A CN201410030739 A CN 201410030739A CN 103759652 A CN103759652 A CN 103759652A
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Abstract
The invention belongs to the technical field of precision instrument manufacture and measurement and provides a two-dimensional microscale measuring device and method based on double fiber bragg gratings. The device comprises a wideband light source, a spectrum analyzer, an optical circulator, a control computer, a multiplex photoswitch and an external reference grating. The multiplex photoswitch is communicated with a double-fiber-bragg-grating probe through a single mode optical fiber a and a single mode optical fiber b respectively. The upper end of the double-fiber-bragg-grating probe is fixed through a probe clamping device, the single mode optical fiber a and the single mode optical fiber b are connected with the double-fiber-bragg-grating probe to form a channel. The method comprises the following steps that the control computer controls the multipath photoswitch to switch optical paths, the spectrum analyzer is utilized to respectively measure reflectance spectrums of the fiber bragg gratings, and two-dimensional microscale measurement of non-temperature coupling is achieved by utilizing the differential data processing algorithm. The two-dimensional microscale measuring device and method based on the twin-core fiber bragg grating have the advantages of being high in precision, small in contact force and not influenced by the shadowing effect. In addition, the service life of the probe is long.
Description
Technical field
The invention belongs to exact instrument manufacture and field of measuring technique, particularly a kind of two-dimentional micro-scale measurement device and method based on double optical fiber grating.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and the impact of measuring contact force, the precision measurement of micro-member yardstick becomes difficult to achieve, especially the degree of depth of measuring small inner chamber member is difficult to improve, and these become " bottleneck " of restriction industry development already.In order to realize smaller szie, measure, increase and fathom, the most widely used way is exactly that the inner chamber that uses elongated probe to go deep into micro-member is surveyed, and by aiming at the mode of sender, measures the small inside dimension on different depth.Therefore, the at present precision measurement of micro-member size mainly take coordinate measuring machine in conjunction with the aiming signal sending type detection system with very thin probe as main, due to the development of measurement of coordinates machine technology comparative maturity, can provide accurate three-dimensional space motion, so the detection mode of aiming triggering type probe becomes the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement comprises following several method:
1. the Chinese Tan Jiubin of Harbin Institute of Technology professor and Cui Ji culture and education the people such as are awarded and are proposed a kind of probe structure based on two coupling fibers, two optical fiber are communicated with by end welding ball, welding ball is as gauge head, compared with long optical fibers, introduce light for one, other one goes out light compared with short-range missile, overcome the limitation that low-light pearl scattering method fathoms, can realize accurate aiming when diameter is not less than micro deep-hole that 0.01mm, aspect ratio be not more than 15:1 and is measured.Although this method has overcome capture-effect to a certain extent, the luminous energy of the reverse transfer that coupling ball is realized is very limited, fathoms and is difficult to further lifting.
2. USA National Institute of Standard and Technology has been used the probe of single fiber measuring staff in conjunction with low-light pearl, by optical design, on two-dimensional directional, the imaging of optical fiber measuring staff is amplified to 35 times of left and right, with 2 area array CCDs, differentiate and receive optical fiber measuring staff imaging on two-dimensional directional, then the image receiving is carried out to profile detection, thereby the minute movement in measuring process of monitoring optical fiber measuring staff, and then realize trigger-type and measure, the theoretical resolution of this detection system can reach 4nm, the probe diameter of detection system is Φ 75 μ m, in experiment, measured the aperture of Φ 129 μ n, its expanded uncertainty probable value has reached 70nn (k=2), ergometry is μ N magnitude.This method detection resolving power is high, and measuring accuracy is high, and the gauge head of use is easy to miniaturization, can measure the micropore of larger aspect ratio.But the two dimension of the method detection optical fiber measuring staff is touched displacement, must use two cover imaging systems, cause system architecture more complicated, measurement data calculated amount is larger, and these factors cause the real-time of detection system poor, and system forms more complicated.
Union Bank of Switzerland metering office researched and developed a novel coordinate measuring machine be devoted to brief summary member nano-precision can trace measurement.This measuring machine has adopted the novel contact type probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement, lower than 0.5mN, is supported removable probe simultaneously, and probe diameter is minimum to Φ 100 μ m.Detection system combines the platform of a high position precision of being developed by Philips CFT, and the positional precision of platform is 20nn.The standard deviation of this measuring system measuring repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, require measuring staff to have higher rigidity and hardness simultaneously, otherwise be difficult to realize, effectively touch displacement sensing, this makes measuring staff structure be difficult to further miniaturization, the aspect ratio of measuring is restricted simultaneously, and the resolving power of detection system is difficult to further raising.
4. the Chinese Cui Ji of Harbin Institute of Technology culture and education is awarded with people such as Yang Fuling and has been proposed a kind of pore size measurement mechanism and method based on FBG Bending, the method utilizes the probe of fiber grating processing and corresponding light source, pick-up unit as aiming at triggering system, coordinate two-frequency laser interferometer measuring motion, can obtain the pore size of different cross section.The microscale sensor of the method is when touching survey distortion, and the main stress of probe does not act on fiber grating, and the resolution of system is very low, is difficult to further raising.
In sum, at present in microsize and coordinates detection method, due to the probe of optical fiber fabrication have probe size little, measure contact force aspect ratio feature large, that measuring accuracy is high little, that measure and obtained extensive concern, utilize its distinctive optical characteristics and mechanical property to be accomplished in several ways the minute sized precision measurement on certain depth.The problem that existing measurement means mainly exists has:
1. the tactile displacement resolving power of detection system is difficult to further raising.The elementary magnification of existing detection system is lower, has caused its whole magnification lower, is difficult to realize the further raising of its tactile displacement resolving power.The fiber grating probe of the pore size measuring method based on FBG Bending can not be applied to main micro-touch displacement exercising result on fiber grating, and then it is faint to be converted into the transducing signal of spectral information, and the resolving power of system is very low.
2. detection system real-time is poor, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must be used two-way area array CCD to receive signal pattern, must use more complicated image algorithm could realize the high resolution monitoring of optical fiber measuring staff being touched to displacement, this causes measuring system to need data volume to be processed greatly to increase, reduce the real-time performance of detection system, be difficult to realize in small inner cavity size and two-dimensional coordinate measuring process the synchronism that aims at sender and open, only measures.
3. exist two dimension radially to touch the coupling of displacement.The probe of the pore size measuring method based on FBG Bending has respectively consistent to performance, when radially two dimension is touched displacement sensing, there is coupling, and cannot be separated, cause two-dimensional measurement to have very large error, cannot realize the radially Measurement accuracy of the tactile displacement of two dimension.
4. do not possess the decoupling ability of radial and axial detection.Above-mentioned detection method or do not possess axial detection ability or do not possess the decoupling ability of radial and axial detection, when carrying out micro-scale measurement, measuring process is complicated, it is low to measure efficiency.
Summary of the invention
The object of the invention is to overcome in prior art micro-member dimension measurement method resolving power low, the drawback that tested dimension is single, kind of a device and method that is applicable to micro-member two dimension micro-scale measurement is provided, double optical fiber grating probe is subject to touch after displacement effect in end, stress causes the parameter of fiber grating to change, and then there is corresponding change in its reflectance spectrum centre wavelength, adopt Multichannel photoswitch to carry out the passage of handover measurement fiber grating, to obtain corresponding reflectance spectrum centre wavelength information, then it is done to differential data processing, reduced the impact of temperature fluctuation on measurement result, greatly improved the adaptive faculty of this device to environment, thereby realize a kind of brand-new temperature without the two-dimentional micro-scale measurement of coupling.
Technical solution of the present invention is: a kind of two-dimentional micro-scale measurement device based on double optical fiber grating, comprise wide frequency light source, spectroanalysis instrument, light annular device, control computing machine, Multichannel photoswitch and external reference grating, described wide frequency light source is connected with light annular device respectively with spectroanalysis instrument, optical circulator and Multichannel photoswitch, Multichannel photoswitch and control computing machine, control computing machine and spectroanalysis instrument, Multichannel photoswitch and external reference grating are connected to form path, single-mode fiber a and single-mode fiber b are communicated with Multichannel photoswitch respectively with double optical fiber grating probe, double optical fiber grating probe upper end is fixedly mounted with by probe clamper, described single-mode fiber a and single-mode fiber b and double optical fiber grating probe are connected to form path.
A kind of two-dimentional micro-scale measurement method based on double optical fiber grating is as follows: in measuring process, Multichannel photoswitch switches different light paths under the control of controlling computing machine, use spectroanalysis instrument to measure respectively the reflectance spectrum of double joint fiber grating and the external reference grating of double optical fiber grating probe interior, Data processing, two fiber grating reflectance spectrum centre wavelengths in double optical fiber grating probe are done to differential data to be processed, can decoupling zero float along the radially tactile displacement of the one dimension on two fiber core distribution arrangements and temperature, two fiber grating reflectance spectrum centre wavelength mean value in double optical fiber grating probe and external reference optical grating reflection spectral centroid wavelength are done to differential data to be processed, obtain nothing and radially touch displacement and the warm axially tactile displacement that floats coupling, realization is without the two-dimentional micro-scale measurement of temperature coupling.
Advantage of the present invention is:
Two-dimentional micro-scale measurement device and method based on double optical fiber grating have that precision is high, contact force is little, do not damage tested component surface, the feature of probe long service life.
2. optical detection signal is only in fiber grating internal transmission, contact in space is converted into the variation of reflectance spectrum centre wavelength, while measuring microscale member, be not subject to the impact of member capture-effect, measure aspect ratio and can reach 100:1, met the requirement of large aspect ratio microstructure micro-scale measurement.
3. the two-dimentional micro-scale measurement method based on double optical fiber grating can realize radial and axially without coupling measurement simultaneously, and the step of micro-scale measurement is simplified, and has improved the efficiency of micro-scale measurement.
4. in probe interior, designed the differential compensation system of reference each other, in conjunction with the two-dimentional micro-scale measurement method based on double optical fiber grating, eliminated variation of ambient temperature to the impact of measuring, greatly improved the adaptive faculty of sensor to environment, can be deep into space and the environment that traditional measurement instrument cannot normally work and carry out precision measurement, as narrow and small hemi-closure space and inflammable and explosive environment etc., be also applicable to industry spot and measure.
Accompanying drawing explanation
Fig. 1 is the two-dimentional micro-scale measurement apparatus structure schematic diagram based on double optical fiber grating;
Fig. 2 is A-A sectional view in Fig. 1;
Fig. 3 is double optical fiber grating probe profile in Fig. 1;
In figure: 1. wide frequency light source, 2. spectroanalysis instrument, 3. optical circulator, 4. controls computing machine, 5. Multichannel photoswitch, 6. single-mode fiber a, 7. single-mode fiber b, 8. external reference grating, 9. probe clamper, 10. double optical fiber grating probe, 31. fiber gratings, 32. ultraviolet glued membranes, the spherical needle point of 33. probe.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail:
A kind of two-dimentional micro-scale measurement device based on double optical fiber grating, comprise wide frequency light source 1, spectroanalysis instrument 2, light annular device 3, control computing machine 4, Multichannel photoswitch 5 and external reference grating 8, described wide frequency light source 1 is connected with light annular device 3 respectively with spectroanalysis instrument 2, optical circulator 3 and Multichannel photoswitch 5, Multichannel photoswitch 5 and control computing machine 4, control computing machine 4 and spectroanalysis instrument 2, Multichannel photoswitch 5 is connected to form path with external reference grating 8, single-mode fiber a6 and single-mode fiber b7 are communicated with Multichannel photoswitch 5 respectively with double optical fiber grating probe 10, double optical fiber grating probe 10 upper ends are by the same dress of probe clamper 9, described single-mode fiber a6 and single-mode fiber b7 and double optical fiber grating probe 10 are connected to form path.
A kind of two-dimentional micro-scale measurement method based on double optical fiber grating is as follows: in measuring process, Multichannel photoswitch 5 switches different light paths under the control of controlling computing machine 4, use spectroanalysis instrument 2 to measure respectively the reflectance spectrum of double joint fiber grating and the external reference grating 8 of double optical fiber grating probe 10 inside, Data processing, two fiber grating reflectance spectrum centre wavelengths in double optical fiber grating probe 10 are done to differential data to be processed, can decoupling zero float along the radially tactile displacement of the one dimension on two fiber core distribution arrangements and temperature, two fiber grating reflectance spectrum centre wavelength mean value in double optical fiber grating probe 10 and external reference grating 8 reflectance spectrum centre wavelengths are done to differential data to be processed, obtain nothing and radially touch displacement and the warm axially tactile displacement that floats coupling, realization is without the two-dimentional micro-scale measurement of temperature coupling.
The course of work of the present invention is as follows:
The wide band light that wide frequency light source 1 produces, through optical circulator 3, enter Multichannel photoswitch 5, Multichannel photoswitch 5 is under the control of controlling computing machine 4, and spectroanalysis instrument 2 is measured respectively in double optical fiber grating probe 10 the reflectance spectrum centre wavelength of two fiber gratings and external reference grating 8.When double optical fiber grating probe 10 and member to be measured occur to touch, survey, the reflectance spectrum centre wavelength of double optical fiber grating probe 10 inner fiber gratings will change.The reflectance spectrum centre wavelength of two fiber gratings in double optical fiber grating probe 10 is made to differential data and processes, can obtain temperature decoupling zero along radially touching displacement on two fiber core distribution arrangements; The reflectance spectrum centre wavelength of two fiber grating reflectance spectrum centre wavelength mean value in double optical fiber grating probe 10 and external reference grating 8 is done to differential data and process, can obtain and axially touch displacement without what radially touch that displacement and temperature float coupling.
Comprehensive radial and axial tactile displacement information, finally realizes the two-dimentional micro-scale measurement of member to be measured.
Claims (2)
1. the two-dimentional micro-scale measurement device based on double optical fiber grating, comprise wide frequency light source (1), spectroanalysis instrument (2), light annular device (3), control computing machine (4), Multichannel photoswitch (5) and external reference grating (8), described wide frequency light source (1) is connected with light annular device (3) respectively with spectroanalysis instrument (2), optical circulator (3) and Multichannel photoswitch (5), Multichannel photoswitch (5) and control computing machine (4), control computing machine (4) and spectroanalysis instrument (2), Multichannel photoswitch (5) is connected to form path with external reference grating (8), it is characterized in that single-mode fiber a (6) and single-mode fiber b (7) are communicated with Multichannel photoswitch (5) respectively with double optical fiber grating probe (10), double optical fiber grating probe (10) upper end is fixedly mounted with by probe clamper (9), described single-mode fiber a (6) and single-mode fiber b (7) are connected to form path with double optical fiber grating probe (10).
2. the two-dimentional micro-scale measurement method based on double optical fiber grating, it is characterized in that in measuring process, Multichannel photoswitch (5) switches different light paths under the control of controlling computing machine (4), use spectroanalysis instrument (2) to measure respectively the inner double joint fiber grating of double optical fiber grating probe (10) and the reflectance spectrum of external reference grating (8), Data processing, two fiber grating reflectance spectrum centre wavelengths in double optical fiber grating probe (10) are done to differential data to be processed, can decoupling zero float along the radially tactile displacement of the one dimension on two fiber core distribution arrangements and temperature, two fiber grating reflectance spectrum centre wavelength mean value in double optical fiber grating probe (10) and external reference grating (8) reflectance spectrum centre wavelength are done to differential data to be processed, obtain nothing and radially touch displacement and the warm axially tactile displacement that floats coupling, realization is without the two-dimentional micro-scale measurement of temperature coupling.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410030739.7A CN103759652B (en) | 2014-01-17 | 2014-01-17 | Two-dimentional micro-scale measurement device and method based on double optical fiber grating |
| GB1610692.4A GB2536588B (en) | 2014-01-17 | 2014-12-25 | Method and apparatus based on fiber bragg grating probe for measuring structures of a micro part |
| US15/112,179 US10060723B2 (en) | 2014-01-17 | 2014-12-25 | Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part |
| PCT/CN2014/094987 WO2015106621A1 (en) | 2014-01-17 | 2014-12-25 | Method and equipment based on multi-core fiber bragg grating probe for measuring structures of a micro part |
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| CN201410030739.7A CN103759652B (en) | 2014-01-17 | 2014-01-17 | Two-dimentional micro-scale measurement device and method based on double optical fiber grating |
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| CN103759652B CN103759652B (en) | 2016-06-29 |
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| CN104677291A (en) * | 2015-03-08 | 2015-06-03 | 哈尔滨工业大学 | Double-core fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| CN104677288A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Micro-scale measurement device and method adopting dual-core optical fiber grating probe and based on optical fiber ring laser |
| CN104697448A (en) * | 2015-03-05 | 2015-06-10 | 哈尔滨工业大学 | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
| WO2015106621A1 (en) * | 2014-01-17 | 2015-07-23 | Harbin Institute Of Technology | Method and equipment based on multi-core fiber bragg grating probe for measuring structures of a micro part |
| WO2016138871A1 (en) * | 2015-03-05 | 2016-09-09 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| CN107515100A (en) * | 2017-08-15 | 2017-12-26 | 昆山金鸣光电科技有限公司 | A kind of pulsed light fiber switch condition detecting system |
| CN109708685A (en) * | 2017-10-26 | 2019-05-03 | 北京信息科技大学 | A kind of probe motion control method based on fiber Bragg grating sensor |
| CN114152194A (en) * | 2021-11-16 | 2022-03-08 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
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| US10060723B2 (en) | 2014-01-17 | 2018-08-28 | Harbin Institute Of Technology | Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part |
| GB2536588B (en) * | 2014-01-17 | 2018-08-15 | Harbin Inst Technology | Method and apparatus based on fiber bragg grating probe for measuring structures of a micro part |
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| CN104697448A (en) * | 2015-03-05 | 2015-06-10 | 哈尔滨工业大学 | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
| WO2016138871A1 (en) * | 2015-03-05 | 2016-09-09 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| CN104677288A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Micro-scale measurement device and method adopting dual-core optical fiber grating probe and based on optical fiber ring laser |
| CN104677285A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Double-fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| US10082383B2 (en) | 2015-03-05 | 2018-09-25 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core FBG probe |
| CN104677291A (en) * | 2015-03-08 | 2015-06-03 | 哈尔滨工业大学 | Double-core fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| CN107515100A (en) * | 2017-08-15 | 2017-12-26 | 昆山金鸣光电科技有限公司 | A kind of pulsed light fiber switch condition detecting system |
| CN107515100B (en) * | 2017-08-15 | 2019-08-20 | 昆山金鸣光电科技有限公司 | A kind of pulsed light fiber switch condition detecting system |
| CN109708685A (en) * | 2017-10-26 | 2019-05-03 | 北京信息科技大学 | A kind of probe motion control method based on fiber Bragg grating sensor |
| CN114152194A (en) * | 2021-11-16 | 2022-03-08 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
| CN114152194B (en) * | 2021-11-16 | 2022-10-04 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
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