CN103278098A - Ultra-precision micro-displacement sensing system and processing method based on double-FBG suspended type probe structure - Google Patents
Ultra-precision micro-displacement sensing system and processing method based on double-FBG suspended type probe structure Download PDFInfo
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Abstract
The invention discloses an ultra-precision micro-displacement sensing system based on a double-FBG suspended type probe structure. The system is characterized in that a stainless steel needle tube is adopted in a probe to serve as a protective sleeve, two FBG optical fiber measuring bars are arranged in the protective sleeve in the axial direction of the protective sleeve in a parallel mode, one ends of the two optical fiber measuring bars are fixed with the protective sleeve, and the other ends of the two optical fiber measuring bars are suspended in midair to be measured; one of optical fibers is a measuring optical fiber, the end portion of the measuring bar of the measuring optical fiber is provided with a measuring ball stretching out of the protective sleeve, the other of optical fibers is a compensated optical fiber which coats the protective sleeve, and the end portion of the compensated optical fiber forms a closed end through fusion and processing. The ultra-precision micro-displacement sensing system has the advantages of being high in sensitivity, good in stability, large in length-diameter ratio, and strong in anti-interference, and can be widely used for displacement parameter measurement of micro-nano magnitudes of micro devices, microstructures and micro-dimensions.
Description
Technical field
The present invention relates to micro-displacement sensor, more particularly a kind of micro-displacement sensor based on bragg grating for micro-nano magnitude.
Background technology
Micro-nano technology is the important front edge of current development in science and technology, and the ultra precise measurement technology that wherein has micro-nano magnitude is representational research field, also is prerequisite and basis that micro-nano science and technology is developed.At present, very active for micro-nano Research on Measuring Technology both at home and abroad, various measuring principles and method have been proposed.
Very active for micro-nano Research on Measuring Technology both at home and abroad, many measuring principles and method have been proposed.At present, the method that can carry out nanometer metering mainly contains non-optical method and optical means two big classes.The former comprises: SPM method, electric capacity micrometry, mini-inductance measurement method; The latter then comprises: methods such as X ray interferometric method, various forms of laser interferance method and optical grating.Because that Fiber Bragg Grating FBG has is highly sensitive, the range of linearity is wide, good reproducibility, anti-electromagnetic interference capability strong, etc. good sensing characteristics, it is the good senser element of nano measurement, a kind of novel micro-displacement sensor of ultraprecise cheaply system based on Fiber Bragg Grating FBG is developed, and realizing needs the high-acruracy survey of microelectronics, micro mechanical device.
Bragg grating (FBG) is as a kind of fiber-optic grating sensor spare, and its advantage has a lot.At first, sensitivity is very high, if adopt high-precision demodulation detection system, its resolution can reach n ε level; Secondly, export linear wide ranges, wavelength moves with strain good linear relationship is arranged in 10000 microstrain scopes; And because this sensing probe is simple in structure, size is little, is particularly suitable for minute sized measurement; Simultaneously, because bragg grating is a kind of mode of Wavelength-encoding sensing, thereby be not subjected to the influence of the intensity of light source, splice loss, light path loss factor; And insensitive to environmental interference, can effectively avoid the interference of electromagnetic field, this is that general electric sensor is incomparable; Its life-span is very long simultaneously.Therefore, the very wide model of the application of fiber-optic grating sensor spare, structure monitoring in the engineering is a focus and emphasis of its application, can carry out temperature and the strain monitoring of actual time safety in engineerings such as bridge, building, offshore platform, oil field and aviation, dam.Simultaneously, at other fields such as aerospace, power industry, medical science sensings a lot of application is arranged also.
Based on Fiber Bragg Grating FBG have that size is little, highly sensitive, the range of linearity is wide, good reproducibility, anti-electromagnetic interference capability are strong, etc. good sensing characteristics, it is the good senser element of nano measurement, be very suitable for size and the parameter measurement of micro/nano level, be used for micro-nano fields of measurement and have very big development space.
But because bragg grating is to be that the bare fibre of 125um carries out ultraviolet light and writes to form at diameter, so bragg grating is crisp and easily broken, therefore can not directly use, and must encapsulate.Present common method for packing is the encapsulation of engineering landfill and the encapsulation of semi-girder adhesive type, and these two kinds of packaged type dimensional structures are bigger, and ergometry is also bigger, is unfavorable for the ultra precise measurement of size and the parameter of micro-nano device.
Summary of the invention
The present invention is for avoiding above-mentioned existing in prior technology weak point, provide a kind of ultraprecise micro-displacement sensing system based on two FBG suspension type sonde configurations, advantages such as that this ultraprecise micro-displacement sensor system has is highly sensitive, good stability, length-diameter ratio are big, strong interference immunity.
The technical scheme that technical solution problem of the present invention adopts:
Ultraprecise micro-displacement sensing system based on two FBG suspension type sonde configurations, be characterized in that it is protective sleeve that probe adopts the stainless steel needle tubing, along its axially parallel two FBG optical fiber measuring staffs are set in the described protective sleeve, described two optical fiber measuring staff one ends and protective sleeve are fixed, and the other end is unsettled to measure; Wherein an optical fiber is measuring optical fiber, and its measuring staff end has stretches out the outer survey ball of protective sleeve, and another root optical fiber measuring staff is compensated optical fiber, is coated on protective sleeve, and its end is processed to form blind end through fusing.
Design feature of the present invention also is:
Described survey ball fuses optical fiber measuring staff end by electric spark and forms, and described survey ball and FBG optical fiber measuring staff are integrated.
Described survey bulb diameter is less than 250um.
The present invention discloses a kind of job operation of above-mentioned measuring optical fiber simultaneously: be characterized in, the measuring staff end survey ball of described measuring optical fiber fuses by electric spark and forms, described electric spark fuses and refers to the measuring staff end is fused by discharge mode, described discharge time is 2 times, twice discharge position is centrosymmetric, described each discharge current is 6mA, and discharge time, T was 3000ms.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the measurement sensitive element that adopts among the present invention is highly sensitive novel optical senser element-bragg grating, realize the design of micro-nano displacement measurement, be different from the senser element that adopts in the existing micro-nano measuring technique such as capacitive transducer, inductance displacement sensor, optical grating sensor, for new situation is opened in the research of micro-nano high resolving power sensing measurement.
2, the integrated suspension measuring staff probe of FBG sensing arrangement among the present invention has the remarkable advantage that compact conformation is small and exquisite, length-diameter ratio is big, dynamometry is little, is more suitable for the micro-size measurement in micro element.
3, the integrated optical fiber in measuring staff top fuses the microballoon head among the present invention, and diameter can effectively reduce and survey the ball distortion error less than 0.25mm, satisfies the micrometering amount of pore and grooved micro element.
4, two FBG probe sensing arrangements of developing among the present invention, in conjunction with double-sensing difference processing technology, highly sensitive, good stability has interference in real time from the correction ability, the property that has fundamentally the improved measuring-signal ratio of making an uproar, significantly reduce measuring error, measuring accuracy also improves greatly.
5, the critical technical parameter of micro-displacement sensing of the present invention system is: optimal resolution is 10nm, and nonlinearity erron is less than 150nm, and full scale repeatability is surveyed bulb diameter less than 250um less than 350nm.
Description of drawings
Fig. 1 is the relation of discharge time optical fiber microballoon head diameter of the present invention.
Fig. 2 is the image on four sense of rotation of optical fiber microballoon head of making by the inventive method.
Fig. 3 is the two FBG suspension linking probe of the present invention sensing arrangement synoptic diagram.
Fig. 4 is FBG micro-displacement measuring system framework synoptic diagram.
Fig. 5 a, 5b are probe tip microphotogram of the present invention: wherein Fig. 5 a is not for contacting measured surface; Fig. 5 b is for contacting measured surface.
Fig. 6 is temperature disturbance test findings figure of the present invention.
Fig. 7 is interference in air flow test findings figure of the present invention.
Fig. 8 is other interference test of the present invention figure as a result.
Measurement output map when Fig. 9 is PI micromotion platform stepping 50nm.
Technical solution of the present invention is done further by embodiment below in conjunction with accompanying drawing and to be explained.
Embodiment
1, probe bulb technology of preparing
The modern precision process technology develops towards minor diameter direction more the processing of surveying ball, to adapt to the measurement of micro-nano device micro-scale.Be the demand of the micro-size measurement that adapts to micro element, micrometering ball electrosparking principle of the present invention and optical fiber fuse process principle, have prepared the miniature probe bulb.Adopt the glass optical fiber material in the experiment, utilize optical fiber splicer to fuse discharge mechanism, optical fiber head melts rapidly after absorbing the spark discharge energy, physical phenomenon according to the contraction of fused solution surface tension, optical fiber melts part and form spheroid form gradually in solidification process, makes fiber end face form small ball naturally.And, on the basis of original experiment flow, optimize the process parameter, obtain being applicable to the contact type optical fiber microballoon head of miniature surface measurement.Because sensing system of the present invention is displacement measurement on the one dimension, therefore, to the circularity of bulb and eccentric less demanding, emphasis analysis and research that the bulb diameter parameters is correlated with here.
Fig. 1 is the relation of discharge time optical fiber microballoon head diameter.Find in test simultaneously, in the solidification process of bulb, cause bulb off-centre.For reducing owing to the gravity effect produces bulb hading phenomenon, adopt spin fiber bar 180 degree successively, the method for multiple discharge, bulb eccentricity issues have obtained solving preferably.But because discharge time is more many, the bulb diameter is more big, in order to obtain less bulb diameter and to reduce bulb off-centre, discharge time get 2 times comparatively reasonable.
According to experimental result, suitable parameters is that discharge time is 2 times finally to determine to fire in the process of work the first melt of optical fiber microballoon comparatively, and discharge current is that I is 0.1mA for 60(unit), discharge time, T was 100ms for 30(unit).Fig. 2 has shown the image on four sense of rotation of optical fiber microballoon head of making by above-mentioned parameter, and corresponding measurement result is shown in Table 1, and the result satisfies the design objective requirement.
The diameter measurement result of table 1 optical fiber microballoon head on the different rotary angle
| Angle | 0 | 90 | 180 | 270 |
| Diameter | 235.6 | 234.0 | 236.4 | 234.8 |
2, two FBG suspension linking probe sensing arrangements
In this probe mechanism, as shown in Figure 3, it is protective sleeve 1 that probe adopts the stainless steel needle tubing, accurate stainless pin external diameter of pipe 0.51mm, internal diameter 0.26mm, long 12mm arranges two FBG optical fiber measuring staffs along its axially parallel in the protective sleeve 1, two optical fiber measuring staff one ends are fixing with probe stiff end 2 bondings that are positioned at protective sleeve one end, and the other end is unsettled to measure; Wherein an optical fiber is measuring optical fiber 3, and its measuring staff end has stretches out the outer survey ball 4 of protective sleeve, and another root optical fiber measuring staff is compensated optical fiber 4; be coated on protective sleeve; blind end is processed into through fusing in its end, forms the measuring condition identical with measuring FBG, also can reduce echo reflection simultaneously.Two FBG fibre diameter 0.125mm, long 10mm, the bragg wavelength of measuring optical fiber and compensated optical fiber is respectively 1551.5nm and 1552.5nm.This structure makes probe have bigger length-diameter ratio, directly adopts the FBG grating to make measuring staff and also makes sonde configuration compact.Because FBG optical fiber is crisp and easily broken, therefore can not directly use, it is encapsulated in the accurate stainless steel needle tubing, with protection FBG, and farthest reduce the measuring error introduced by FBG optical fiber lateral bending and ambient windstream.
In FBG micro-displacement sensor system, temperature, air-flow, vibration, light source fluctuation, optical device optical energy loss and fluctuation and circuit noise etc. all will produce greatly influence to the FBG transducing signal.For reducing the influence of various interference as far as possible, in the present invention, two FBG sensing arrangements have been designed, as shown in Figure 3.In accurate stainless steel needle tubing, encapsulated two FBG optical fiber (diameter 0.125mm, long 10mm), measurement FBG optical fiber wherein is used for sensing micrometric displacement amount to be measured, and another root FBG is optical fiber by way of compensation, revises disturbing effect (correction result is seen below) in real time.Since two FBG positions very close to, both suffered environmental interference are approximate identical, adopting same light source, light path and demodulation module that two FBG are carried out signal in the simultaneity factor handles, interference exists with the common mode form, differential technique in conjunction with dual sensor, separate and correction technique by error, can revise the influence of environmental interference in real time, farthest reduce the influence of common mode interference such as light source fluctuation, electromagnetic noise, improve system signal noise ratio, and then improved sensitivity and the stability of this sensing system.
FBG micro-displacement measuring system framework as shown in Figure 4, system mainly comprises the ASE light source, measures FBG probe-type probe, the tunable demodulating system of FBG, system signal are handled 4 major parts.When measurement FBG is subjected to axial strain, wherein the cardiac wave long hair is given birth to drift, by tunable matching method demodulating system demodulation light wavelength, highly-sensitive detector is converted into voltage signal with light intensity signal, by data collecting card voltage signal is uploaded to host computer then.Signal generator and HPV type drive power supply for piezoelectric ceramics provide high-voltage sawtooth wave, drive piezoelectric ceramics and carry out stretching motion, the signal of scanning survey FBG.
In order to test the Lu Jianxing of FBG micro-displacement sensing system, this system has been carried out the anti-interference test of temperature, air-flow and other random noises.
In the temperature disturbance experiment, remove again after making a certain thermal source shift near probe, the gained measurement result is shown in Fig. 5 a, 5b, two FBG optical fiber in the probe all sense variation of temperature, meanwhile, measure the microdisplacement measurement that FBG is carrying out the 50nm step pitch, the signal (Fig. 6 (a)) of namely measuring FBG is the synthesis result of micrometric displacement and temperature variation, and the signal (Fig. 6 (b)) of compensation FBG only reflects variation of temperature.In final output signal (Fig. 6 (c)), Temperature Influence is very little, and useful micrometric displacement signal is manifested.
The interference in air flow experimental result as shown in Figure 7, here, the micrometric displacement step pitch of measuring FBG is 150nm.In like manner, the signal (Fig. 7 (a)) of measuring FBG is the synthesis result of micrometric displacement and variations in flow, and the signal (Fig. 7 (b)) of compensation FBG only reflects the variation of air-flow.In final output signal (Fig. 7 (c)), the influence of air-flow can be ignored fully.
In addition, carried out the other factors disturbed test that caused by intensity of light source fluctuation, joints of optical fibre disturbance, platform vibration, electromagnetic interference (EMI), seen Fig. 8, the micrometric displacement step pitch of getting here is 10nm.From figure, can obviously find out, disturb to have obtained suppressing significantly.
The influence of real-Time Compensation interference effectively of this FBG micro-displacement sensing system is described thus, has stronger interference rejection capability, verified that this FBG micro-displacement sensing system has stronger Lu Jianxing, lower to environment requirement in micro-nano measurement, have wide actual application value.
In conjunction with PI nanometer micromotion platform and Reinshaw XL-80 laser interferometer FBG micro-displacement sensing system has been carried out performance test in the test experiments.By the fine motion control to PI nanometer micromotion platform, make each stepping of micropositioner produce the displacement that adds up of about 1umm, act on the probe tip, thereby produce the output of FBG measuring system, adopt Reinshaw XL-80 laser interferometer that real-time non-cpntact measurement is carried out in the fine motion displacement of PI nanometer micromotion platform simultaneously, demarcate to carry out high-precision comparison, carried out 10 groups test experiments altogether, maximum deviation between the output of measurement result demonstration laser interferometer measurement output and FBG measuring system is greater than 200nm, for revising systematic error bigger in this measuring system, adopting matlab that 10 groups of data are carried out 9 rank polynomial expression optimal fittings demarcates, the match residual error is 75.4nm to the maximum, and fitting function is
fittedmodel11(x)=p1*x^9+p2*x^8+p3*x^7+p4*x^6+
p5*x^5+p6*x^4+p7*x^3+p8*x^2+p9*x+p10
Coefficients(with95%confidence?bounds):
p1=-4.981e-031(-6.083e-031,-3.879e-031)
p2=2.901e-026(2.255e-026,3.547e-026)
p3=-7.006e-022(-8.594e-022,-5.418e-022)
p4=9.069e-018(6.945e-018,1.119e-017)
p5=-6.786e-014(-8.463e-014,-5.109e-014)
p6=2.947e-010(2.154e-010,3.739e-010)
p7=-7.031e-007(-9.196e-007,-4.867e-007)
p8=0.0008039(0.0004922,0.001116)
p9=0.6601(0.4619,0.8582)
p10=-1.435(-53.66,50.79)
The optimal resolution of measuring system is that 10nm(sees Fig. 8 according to testing as can be known), the measurement output when Fig. 9 is PI micromotion platform stepping 50nm.
The FBG micro-displacement measuring system being carried out the precision duplicate measurements that repeatedly waits of actual displacement amount tests.The about 3500nm of displacement of control PI nanometer micromotion platform carries out 10 inferior precision repeated experiments, obtains the actual measurement output of FBG measuring system, brings its measurement result into fitting formula and revises the back and export and be shown in Table 2.Calculate revising the back result,
Average
Maximum residul difference ν=45.643nm,
Standard deviation sigma=21.487nm,
Final output
10 repeated measuring results of table 2 pair 3500 nanometer displacement amounts with and revise the back result
Claims (4)
1. based on the ultraprecise micro-displacement sensing system of two FBG suspension type sonde configurations, it is characterized in that it is protective sleeve that probe adopts the stainless steel needle tubing, along its axially parallel two FBG optical fiber measuring staffs are set in the described protective sleeve, described two optical fiber measuring staff one ends and protective sleeve are fixed, and the other end is unsettled to measure; Wherein an optical fiber is measuring optical fiber, and the measuring staff end of measuring optical fiber has stretches out the outer survey ball of protective sleeve, and another root optical fiber measuring staff is compensated optical fiber, is coated on protective sleeve, and its end is processed to form blind end through fusing.
2. the ultraprecise micro-displacement sensing system based on two FBG suspension type sonde configurations according to claim 1 is characterized in that described survey ball fuses optical fiber measuring staff end by electric spark and forms, and described survey ball and measuring optical fiber measuring staff are integrated.
3. the ultraprecise micro-displacement sensing system based on two FBG suspension type sonde configurations according to claim 2 is characterized in that described survey bulb diameter is less than 250um.
4. the job operation of the described measuring optical fiber of claim 1: it is characterized in that, the measuring staff end survey ball of described measuring optical fiber fuses by electric spark and forms, described electric spark fuses and refers to the measuring staff end is fused by discharge mode, described discharge time is 2 times, twice discharge position is centrosymmetric, described each discharge current is 6mA, and discharge time, T was 3000ms.
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| CN103759652A (en) * | 2014-01-17 | 2014-04-30 | 哈尔滨工业大学 | Two-dimensional microscale measuring device and method based on double fiber bragg gratings |
| CN106643491A (en) * | 2016-11-15 | 2017-05-10 | 北京交通大学 | Bridge micro-displacement sensing system based on double-core fiber |
| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
| CN113532285A (en) * | 2021-07-16 | 2021-10-22 | 合肥工业大学 | Micrometric displacement measurement system and method for picometer resolution |
| WO2023284592A1 (en) * | 2021-07-16 | 2023-01-19 | 合肥工业大学 | Micro-displacement measurement system having picometer scale resolution and measurement method |
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| CN111879451B (en) * | 2020-07-30 | 2021-10-15 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
| CN113532285A (en) * | 2021-07-16 | 2021-10-22 | 合肥工业大学 | Micrometric displacement measurement system and method for picometer resolution |
| WO2023284592A1 (en) * | 2021-07-16 | 2023-01-19 | 合肥工业大学 | Micro-displacement measurement system having picometer scale resolution and measurement method |
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