CN113532285A - Micrometric displacement measurement system and method for picometer resolution - Google Patents
Micrometric displacement measurement system and method for picometer resolution Download PDFInfo
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Abstract
The invention discloses a micrometric displacement measuring system and a micrometric displacement measuring method for picometric resolution, wherein the system comprises a probe module, a light path module, a static phase-locking amplification processing module, an upper computer acquisition processing module and a micrometric displacement driving module, wherein the probe module comprises: the system comprises a measurement FBG sensor, a matching FBG sensor, a precise stainless steel needle tube and an external bracket; the optical path module includes: the ASE broadband light source, the first circulator, the second circulator and the InGaAs photodetector; host computer collection processing module includes: a data acquisition card and a computer; the micro displacement driving module includes: piezoelectric ceramic nanometer positioner, piezoelectric ceramic driver, three-dimensional accurate fine motion platform. The invention can realize the detection of the micro-displacement, has the pico-meter micro-displacement measurement resolution, the nano-scale sensitivity and the lower noise level, and has the advantages of stronger robustness to the measurement environment interference, stable work, better performance and lower cost.
Description
Technical Field
The invention relates to micro-nano measurement, in particular to a micro-displacement measurement system based on the fiber Bragg grating sensing principle and a measurement method thereof.
Background
In recent years, nanotechnology is rapidly developed, semiconductor technology, microelectronic technology, Micro Electro Mechanical Systems (MEMS) and the like are rapidly developed, and the precision of modern manufacturing industry is rapidly improved. The geometric dimension of the manufactured micro devices is almost in the micro-nano level, and special high-precision detection methods and technical equipment are required to be developed for carrying out precision measurement on the micro devices.
A miniature three-coordinate measuring machine and various probe measuring systems are core technologies and instruments in the field of high-precision micro-nano measurement, and the equipment is generally provided with probe tips with micro-nano characteristic sizes and sensitive elements with high sensitivity so as to improve the measuring sensitivity and expand the application range. In recent years, relevant research of micro-nano measurement is developed by a plurality of research institutions in the world, a plurality of nano-scale probe measurement systems based on various principles are researched, and the full-scale measurement range of micron-scale and nano-scale measurement resolution can be realized. The commonly used contact trigger type probe in the three-coordinate measuring machine has the defects that the accurate capture of a trigger point is difficult due to the existence of a pre-stroke, the golf effect generated by measuring a ball at a measuring end at the moment of contact and the limitation of the sensitivity of a detection system, so the improvement of the measurement precision and the resolution of the probe is hindered.
The Fiber Bragg Grating (FBG) is a novel passive optical sensor, has the advantages of small size, high sensitivity, large linear measurement range, electromagnetic interference resistance and the like, is an excellent sensing device in the field of micro-nano measurement, and is widely used for manufacturing micro-nano probe measurement systems and sensitive elements in the measurement systems. For example, Leira et al, the university of Wuhan theory, proposes a fiber Bragg grating-based displacement sensor, which utilizes an improved lever structure to directly stretch two fiber gratings, and the design is in the range of 0-300 μm, and the resolution can reach 42 nm. The Von Kunpeng of Harbin industry university also provides a preparation method of a four-core tapered fiber grating probe based on the self-assembly principle, the method directly senses three-dimensional contact displacement by the deformation of the four-core tapered fiber grating, the radial range of a measuring system reaches 4 mu m, the resolution is 30nm, the axial range is 0.8 mu m, and the resolution can reach 10 nm. At present, the resolution of the micro-nano measurement system based on the FBG probe is mostly concentrated on ten to dozens of nanometers, and along with the development of nano-technology and micro-device manufacturing precision, higher requirements can be provided for the resolution of the micro-nano measurement system, and even the resolution reaches the picometer magnitude.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a micrometric displacement measuring system and a micrometric displacement measuring method with picometric resolution, so that an optical power voltage signal changing along with micrometric displacement can be reliably obtained, and a voltage-piezoelectric ceramic nano positioner output displacement curve is established, thereby realizing the identification and detection of micrometric displacement smaller than the micrometric order.
The invention adopts the following technical method for solving the technical problems:
the micrometric displacement measurement system with picometer resolution of the invention is characterized by comprising the following components: the device comprises a probe module, a light path module, a static phase-locking amplification processing module, an upper computer acquisition processing module and a micro-displacement driving module;
the probe module includes: the system comprises a measurement FBG sensor, a matching FBG sensor, a precise stainless steel needle tube and an external bracket;
the precise stainless steel needle tube is clamped on the external bracket; the measurement FBG sensor and the matching FBG sensor are packaged in the precise stainless steel needle tube in parallel, and the distance from the optical fiber end face of the measurement FBG sensor to the bottom of the precise stainless steel needle tube is smaller than the distance from the optical fiber end face of the matching FBG sensor to the bottom of the precise stainless steel needle tube, so that a double FBG self-compensation demodulation structure is formed;
the optical path module includes: the ASE broadband light source, the first circulator, the second circulator and the InGaAs photodetector;
the input end of the first circulator is connected with the ASE broadband light source, and the output end of the first circulator is connected to the measurement FBG sensor; the input end of the second circulator is connected with the reflecting end of the first circulator, and the output end of the second circulator is connected to the matched FBG sensor; the reflecting end of the second circulator is connected with the input end of the InGaAs photodetector;
the output end of the InGaAs photoelectric detector is connected to the static phase-locking amplification processing module;
host computer collection processing module includes: a data acquisition card and a computer;
the output of the static phase-locking amplification processing module is transmitted to the computer through the data acquisition card;
the micro displacement driving module comprises: the device comprises a piezoelectric ceramic nano positioner, a piezoelectric ceramic driver and a three-dimensional precise micro-motion platform;
the input end of the piezoelectric ceramic driver is connected with the computer, and the output end of the piezoelectric ceramic driver is connected to the piezoelectric ceramic nanometer positioner; the piezoelectric ceramic nanometer positioner is fixed on the three-dimensional precise micropositioner;
laser light emitted by the ASE broadband light source is transmitted to the measurement FBG sensor through the first circulator, first reflected light obtained by reflecting the laser light by the measurement FBG sensor reaches the input end of the second circulator and is transmitted to the matching FBG sensor through the second circulator, second reflected light obtained by reflecting the first reflected light by the matching FBG sensor enters the InGaAs photoelectric detector through the reflecting end, and an optical power voltage signal is output by the InGaAs photoelectric detector and is transmitted to the static phase-locking amplification processing module for processing and then is transmitted to a computer through the data acquisition card; wherein the optical power voltage signal is proportional to the spectral overlapping area of the measuring FBG sensor and the matching FBG sensor.
The invention relates to a measuring method of a micrometric displacement measuring system based on picometer resolution, which is characterized by comprising the following steps of:
step 1, preheating the ASE broadband light source, and adjusting the upper end surface of the piezoelectric ceramic nano positioner to enable the upper end surface of the piezoelectric ceramic nano positioner to be aligned to the top of the FBG sensor;
and 4, after the computer carries out averaging and least square fitting treatment on the processed optical power voltage signals received in the stepping process, establishing an output displacement curve of the voltage-piezoelectric ceramic nano positioner, thereby completing the measurement of micro displacement.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention designs a micro-nano measurement system taking the fiber Bragg grating as a sensitive element, and the resolution of micro-displacement detection can reach the picometer level; the micro-displacement sensor has higher sensitivity, lower noise level and higher robustness to the interference of the measuring environment, thereby realizing the micro-displacement measurement with high sensitivity and ultrahigh resolution with stronger anti-interference performance and better repeatability and having lower cost.
2. The invention provides related technical support measures and a method for obtaining the picometer-level displacement resolution, which comprise selection and matching of high-precision and high-sensitivity equipment and devices, and application of a double FBG self-compensation demodulation structure and a static phase-locked amplification technology, are used for improving the robustness of an original signal acquisition part and the signal-to-noise ratio of a signal preprocessing part, and provide support and guarantee for the higher resolution of the whole micro-displacement measurement system.
3. The invention designs a micrometric displacement measuring method with picometer-level resolution, namely, a voltage-piezoelectric ceramic nano positioner output displacement curve is established by measuring a processed optical power voltage signal, so that the detection of micrometric displacement smaller than the nano level can be simply and directly realized.
Drawings
FIG. 1 is a schematic view of a measurement system according to the present invention;
FIG. 1a is a graph showing the temperature test results of a dual FBG;
FIG. 1b is a graph of single FBG temperature test results;
FIG. 1c is a diagram illustrating the experimental result of the double FBGs disturbed by the airflow;
FIG. 1d is a graph showing the results of a single FBG experiment subjected to airflow disturbance;
FIG. 2a is a graph of the results of a full scale data fit curve;
FIG. 2b is a graph showing the results of a measurement sensitivity curve;
FIG. 2c is a graph showing the results of standard deviation of reproducibility;
FIG. 2d is a graph of the results of measuring noise levels;
reference numbers in the figures: the device comprises a 1 measurement FBG sensor, a 2 matching FBG sensor, a 3 precision stainless steel needle tube, a 4 probe external support, a 5ASE broadband light source, a 6 first circulator, a 7 second circulator, an 8InGaAs photoelectric detector, a 10 data acquisition card, a 11 computer, a 12 piezoelectric ceramic nanometer positioner, a 13 piezoelectric ceramic driver and a 14 three-dimensional precision micro-motion platform.
Detailed Description
In this embodiment, in order to implement detection of a micro-displacement signal smaller than a nanometer level, a pico-meter level resolution micro-displacement measurement system is provided, and is a micro-nano measurement system design based on a fiber grating sensing principle, and an error self-compensation mechanism can be created, so as to play a critical role in improving the reliability of system measurement and correcting and optimizing the structure of the micro-nano measurement system. Theoretical basis and technical guarantee are provided for guiding the design of micro-nano measurement and instrument systems. As shown in fig. 1, the measuring system includes: the device comprises a probe module, a light path module, a static phase-locking amplification processing module, an upper computer acquisition processing module and a micro-displacement driving module.
The probe module includes: the method comprises the following steps of measuring an FBG sensor 1, matching the FBG sensor 2, a precise stainless steel needle tube 3 and an external bracket 4;
the precise stainless steel needle tube 3 is clamped on the external bracket 4; the measurement FBG sensor 1 and the matching FBG sensor 2 are packaged in the precision stainless steel needle tube 3 in parallel, and the distance from the optical fiber end face of the measurement FBG sensor 1 to the bottom of the precision stainless steel needle tube 3 is smaller than the distance from the optical fiber end face of the matching FBG sensor 2 to the bottom of the precision stainless steel needle tube 3, so that a double FBG self-compensation demodulation structure is formed; in this embodiment, the measurement FBG sensor 1 and the matching FBG sensor 2 are both single-mode FBGs, the bragg center wavelengths thereof are 1549.949nm and 1549.963nm, the 3dB bandwidths thereof are 0.134nm and 0.132nm, and the grating lengths are 15 mm. The difference of the central wavelengths of the two FBGs is only 0.014nm, namely, the overlapping area of the reflected light spectrums of the two FBGs is large, which is beneficial to improving the sensitivity of the measuring system.
In this embodiment, the sensing principle of the FBG can be briefly described as that a narrow-band spectrum part corresponding to the center wavelength of the FBG is reflected back, and the rest is transmitted. The center wavelength of an FBG is a function of the grating refractive index and the grating period and can be expressed as formula (1):
λ＝2neffΛ (1)
in formula (1): λ is the central wavelength of the grating, Λ is the grating period of the FBG, neffIs the effective index of the core.
The grating period Λ and the effective refraction n of the core as the temperature and strain of the FBG changeeffWill change, leadA shift of the center wavelength lambda. The shift amount of the center wavelength can be demodulated to realize measurement, and the shift of the center wavelength caused by strain and temperature can be expressed as formula (2):
in formula (2):
is the coefficient of elasticity, pijIs the Pockels coefficient, v is the Poisson's ratio, εxFor axial strain, α is the coefficient of thermal expansion, ξ is the thermo-optic coefficient, Δ T is the temperature variation. Therefore, when using FBGs as sensing elements, the effect of strain and temperature on their sensing must be considered simultaneously.
Assuming that a change in temperature does not cause a shift in the center wavelength, its relationship to strain can be expressed as equation (3):
in this embodiment, the double FBG self-compensation demodulation structure is used to demodulate the drift of the FBG center wavelength, and the matched FBG sensor 2 and the measurement FBG sensor 1 are approximately in the same temperature field, so that the change of factors such as temperature causes the equidirectional and equal central wavelength drift of the two FBG sensors, thereby not causing the change of the superposition area of the two reflected light spectrums, and realizing the error self-compensation of the common mode interference.
The double FBG self-compensation demodulation structure and the common single FBG probe structure used for the comparison experiment are placed in a water bath tank, the temperature control precision of the water bath tank is +/-0.1 ℃, and a graph 1a is a double FBG temperature test result graph. When the temperature of the water bath rises from 15 ℃ to 20 ℃, the average values of the output of the InGaAs photodetectors are-0.433V and-0.428V respectively, the standard deviation of the measurement is 2.293mV and 2.707mV respectively, and the output voltage drifts 5.345mV along with the temperature rise. FIG. 1b is a graph showing the temperature measurements of a single FBG, at 15 deg.C and 20 deg.C, the mean values of the output signals are-0.442V and-0.242V, respectively, and the standard deviations are 3.447mV and 5.585mV, respectively. The drift of the output signal of the conventional single FBG probe structure is 199.190mV, which is about 40 times that of the dual FBG self-compensation structure. Therefore, it can be seen that the dual FBG self-compensating demodulation system structure can significantly reduce the influence of the ambient temperature variation on the measurement.
Fig. 1c is a graph showing the results of the airflow disturbance experiment of the double FBGs, and fig. 1d is a graph showing the results of the airflow disturbance experiment of the single FBG, wherein the airflow disturbance is loaded in the area 2, and the airflow disturbance does not exist in the areas 1 and 3. The experimental curves for the dual FBG self-compensated demodulation system in zone 2 had mean and standard deviation of-0.469V and 4.489mV, respectively, while the mean and standard deviation for the normal single FBG probe structure in zone 2 was-0.456V and 3.231mV, respectively. The results show that the dual FBG self-compensating demodulation system has significantly less drift and noise fluctuation when subjected to the same airflow disturbance than the conventional single FBG probe structure. Therefore, the double FBG self-compensation demodulation structure has good robustness to common-mode interference such as temperature change, air current disturbance and the like.
The optical path module includes: an ASE broadband light source 5, a first circulator 6, a second circulator 7 and an InGaAs photodetector 8;
the input end of the first circulator 6 is connected with the ASE broadband light source 5, and the output end of the first circulator 6 is connected to the measurement FBG sensor 1; the input end of the second circulator 7 is connected with the reflection end of the first circulator 6, and the output end of the second circulator 7 is connected to the matching FBG sensor 2; the reflecting end of the second circulator 7 is connected with the input end of the InGaAs photodetector 8; in this embodiment, the wavelength of the ASE broadband light source 5 is 1525-1570nm, and the output power is mW. The first circulator 6 and the second circulator 7 are both 1X 2-type circulators, the working wavelength is 1550nm, the insertion loss is 0.80dB and 0.63dB respectively, and the return loss is more than or equal to 55 dB. The wavelength response range of the InGaAs photodetector 8 is 1100-1700nm, the responsivity is 10A/W, and the conversion gain is 1.6 multiplied by 104The saturated optical power was-20 dBm.
The output end of the InGaAs photodetector 8 is connected to the static phase-locking amplification processing module; in this embodiment, the static phase-locked amplification processing module mainly performs processing such as offset elimination, filtering, modulation and demodulation on the optical power voltage signal output by the photodetector, and can significantly reduce the noise of an input channel by the static phase-locked amplification technology, detect and process a static weak signal in a noise environment, and amplify the signal to an effective magnitude, thereby improving the measurement sensitivity of the system and improving the signal-to-noise ratio, and further improving the micro-displacement measurement resolution of the micro-nano test system.
This host computer collection processing module includes: a data acquisition card 10 and a computer 11; the signal acquisition card is USB-6120(16-bit,250 kS/s).
The output of the static phase-locking amplification processing module is transmitted to the computer 11 through the data acquisition card 10;
the micro displacement driving module comprises: a piezoelectric ceramic nanometer positioner 12, a piezoelectric ceramic driver 13 and a three-dimensional precise micro-motion platform 14. In this embodiment, the closed loop stroke of the piezoceramic nano-positioner 12 is 2 μm, the repeatability is 0.7nm, and the resolution is 0.03 nm.
The input end of the piezoelectric ceramic driver 13 is connected with the computer 11, and the output end of the piezoelectric ceramic driver 13 is connected to the piezoelectric ceramic nanometer positioner 12; the piezoelectric ceramic nano positioner 12 is fixed on a three-dimensional precise micro-motion stage 14.
Laser light emitted by an ASE broadband light source 5 is transmitted to a measurement FBG sensor 1 through a first circulator 6, first reflected light obtained by reflecting the laser light by the measurement FBG sensor 1 reaches the input end of a second circulator 7, the first reflected light is transmitted to a matching FBG sensor 2 through the second circulator 7, second reflected light obtained by reflecting the first reflected light by the matching FBG sensor 2 enters an InGaAs photoelectric detector 8 through a reflection end, and an optical power voltage signal is output by the InGaAs photoelectric detector 8 and transmitted to a static phase-locking amplification processing module for processing and then transmitted to a computer 11 through a data acquisition card 10; wherein the optical power voltage signal is proportional to the spectral overlapping area of the measuring FBG sensor 1 and the matching FBG sensor 2.
In this embodiment, a method for measuring a micrometric displacement measurement system with picometer resolution is performed according to the following steps:
step 1, preheating an ASE broadband light source 5, and adjusting the upper end surface of a piezoelectric ceramic nano positioner 12 to enable the upper end surface of the piezoelectric ceramic nano positioner 12 to be aligned with the top of a measurement FBG sensor 1;
and 4, after the computer 11 carries out averaging and least square fitting treatment on the processed optical power voltage signals received in the stepping process, establishing an output displacement curve of the voltage-piezoelectric ceramic nano positioner, thereby completing the measurement of micro displacement.
In this embodiment, after the top of the FBG sensor is measured to contact the upper surface of the piezoelectric ceramic nano-positioner, the piezoelectric ceramic nano-positioner works in a closed-loop mode, outputs micro-displacement with a step pitch of 10nm, samples 500 data at each displacement point, and takes the average value as the measurement data of the displacement point, so that a plurality of displacement measurement points can be obtained in a complete full-scale test process. Fig. 2a is a full scale data fit curve, as shown in fig. 2a, with an output voltage range of 10.437V. And performing five sets of repeated experiments, so that the piezoelectric ceramic nanometer positioner 12 outputs the same displacement step by step and records corresponding voltage signals respectively, and fitting the obtained data to obtain a sensitivity curve as shown in fig. 2 b. The fitted sensitivity curve formula is formula (4):
U＝-0.01533x+0.51671 (4)
in formula (4): u is the voltage signal collected, and x is the output displacement of the corresponding piezoelectric ceramic nanometer positioner. Thus, the slope of the sensitivity curve was-15.330 mV/nm, and the nonlinearity error was 5.811%.
FIG. 2c shows the calculated standard deviation of the reproducibility for five sets of the reproducibility experiments, and the result shows that the maximum normalized standard deviation of the reproducibility is 0.356 mV.
FIG. 2d is a graph showing the results of measuring the noise level, and the maximum noise during the period (1S) is about 0.990mV, as shown. The formula for calculating the resolving power is:
in formula (5): α is the resolution, N is the maximum noise level, and K is the slope of the sensitivity curve. From this, the resolution of the measurement system can be calculated to be 0.646nm (64.6 pm).
In conclusion, by the micrometric displacement measurement system with the picometer-level resolution and the measurement method thereof, the optical power voltage signal changing along with the micrometric displacement can be reliably obtained, the output displacement curve of the voltage-piezoelectric ceramic nanometer positioner is established, the identification and detection of the micrometric displacement smaller than the micrometric level are realized, the work is stable, and the performance is better. The method plays a key role in improving the reliability of the micro-nano measurement system and correcting and optimizing the structure of the system. And also provides theoretical basis and technical guarantee for guiding the design of micro-nano measurement and instrument systems.
Claims (2)
1. A micrometric displacement measuring system with picometer-level resolution is characterized by comprising: the device comprises a probe module, a light path module, a static phase-locking amplification processing module, an upper computer acquisition processing module and a micro-displacement driving module;
the probe module includes: the device comprises a measurement FBG sensor (1), a matching FBG sensor (2), a precise stainless steel needle tube (3) and an external bracket (4);
the precise stainless steel needle tube (3) is clamped on the external bracket (4); the measurement FBG sensor (1) and the matching FBG sensor (2) are packaged in the precise stainless steel needle tube (3) in parallel, and the distance from the optical fiber end face of the measurement FBG sensor (1) to the bottom of the precise stainless steel needle tube (3) is smaller than the distance from the optical fiber end face of the matching FBG sensor (2) to the bottom of the precise stainless steel needle tube (3), so that a double FBG self-compensation demodulation structure is formed;
the optical path module includes: an ASE broadband light source (5), a first circulator (6), a second circulator (7) and an InGaAs photodetector (8);
the input end of the first circulator (6) is connected with the ASE broadband light source (5), and the output end of the first circulator (6) is connected to the measurement FBG sensor (1); the input end of the second circulator (7) is connected with the reflection end of the first circulator (6), and the output end of the second circulator (7) is connected to the matched FBG sensor (2); the reflecting end of the second circulator (7) is connected with the input end of the InGaAs photodetector (8);
the output end of the InGaAs photodetector (8) is connected to the static phase-locking amplification processing module;
host computer collection processing module includes: a data acquisition card (10) and a computer (11);
the output of the static phase-locking amplification processing module is transmitted to the computer (11) through the data acquisition card (10);
the micro displacement driving module comprises: a piezoelectric ceramic nano positioner (12), a piezoelectric ceramic driver (13) and a three-dimensional precise micro-motion platform (14);
the input end of the piezoelectric ceramic driver (13) is connected with the computer (11), and the output end of the piezoelectric ceramic driver (13) is connected to the piezoelectric ceramic nanometer positioner (12); the piezoelectric ceramic nanometer positioner (12) is fixed on the three-dimensional precise micro-motion platform (14);
laser light emitted by the ASE broadband light source (5) is transmitted to the measurement FBG sensor (1) through the first circulator (6), first reflected light obtained by reflecting the laser light by the measurement FBG sensor (1) reaches the input end of the second circulator (7), the first reflected light is transmitted to the matching FBG sensor (2) through the second circulator (7), second reflected light obtained by reflecting the first reflected light by the matching FBG sensor (2) enters the InGaAs photoelectric detector (8) through the reflection end, and an optical power voltage signal is output by the InGaAs photoelectric detector (8) and is transmitted to the static phase-locked amplification processing module for processing and then is transmitted to the computer (11) through the data acquisition card (10); wherein the optical power voltage signal is proportional to the spectral overlap area of the measuring FBG sensor (1) and the matching FBG sensor (2).
2. A method for measuring the micrometric displacement measurement system based on the picometer resolution of claim 1, which is characterized by comprising the following steps:
step 1, preheating the ASE broadband light source (5), and adjusting the upper end surface of the piezoelectric ceramic nano positioner (12) to enable the upper end surface of the piezoelectric ceramic nano positioner (12) to be aligned to the top of the measurement FBG sensor (1);
step 2, fixing the FBG sensor (1) for measurement, and adjusting the level of the feeding amount to be in a micron level; so that the three-dimensional precision micropositioner (14) is gradually close to the top of the FBG sensor (1) according to the feeding amount, and when the distance between the two is in the full-scale measurement range, the adjustment of the three-dimensional precision micropositioner (14) is stopped;
step 3, the computer (11) controls the piezoelectric ceramic driver (13) to continuously output a piezoelectric signal so as to drive the piezoelectric ceramic nanometer positioner (12) to step according to the nanometer feeding amount; in the stepping process, the top of the FBG sensor (1) is gradually contacted with the upper end surface of the piezoelectric ceramic nanometer positioner (12), so that the optical power voltage signal output by the InGaAs photoelectric detector (8) continuously changes correspondingly, and meanwhile, the data acquisition card (10) synchronously acquires the optical power voltage signal processed by the static phase-locked amplification processing module and transmits the optical power voltage signal to the computer (11);
and 4, after the computer (11) carries out averaging and least square fitting treatment on the processed optical power voltage signals received in the stepping process, establishing an output displacement curve of the voltage-piezoelectric ceramic nano positioner, thereby completing the measurement of micro displacement.
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| CN114659465A (en) * | 2022-05-20 | 2022-06-24 | 华中科技大学 | Method and device for rapidly measuring micro-nano cross-scale surface structure |
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