CN106441095B - Three coordinate micrometering head measuring system of nanometer based on Bragg grating and measurement method - Google Patents
Three coordinate micrometering head measuring system of nanometer based on Bragg grating and measurement method Download PDFInfo
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- CN106441095B CN106441095B CN201610826846.XA CN201610826846A CN106441095B CN 106441095 B CN106441095 B CN 106441095B CN 201610826846 A CN201610826846 A CN 201610826846A CN 106441095 B CN106441095 B CN 106441095B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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Abstract
The invention discloses a kind of three coordinate micrometering head measuring system of nanometer and its measurement method based on Bragg grating, it is characterized in that measuring system includes sensing module, demodulation light path module, signal conversion module and host computer；Sensing module is to use the three coordinate contact measuring head of resonant mode nanometer based on fiber bragg grating, and three FBG sensors in gauge head are connected to the different output ends of optical switch matrix；The light sent out by wideband light source enters different FBG sensors by optical switch matrix timesharing, enter demodulation light path after the reflection of FBG sensor, the reflective information for only having a FBG sensor at any time is arranged to be demodulated in demodulation light path using matched FBG, the demodulation mode of the space division multiplexing to three FBG sensors is realized using optical switch matrix, respectively obtain the measured value of each FBG sensor, realize three-dimensional measurement and dynamic demodulation, high sensitivity, reproducible, resolving power is high, stability is good.
Description
Technical field
The present invention relates to three coordinate gauge head measuring system of nanometer and measurement methods, more specifically a kind of to be used for nanometer amount
The FBG three-dimension measuring systems of the three coordinate measuring machine measuring head structure of grade.
Background technology
As modern industry is continuously increased the demand of high-acruracy survey, the measuring technique of micron dimension and nanometer scale
It is rapidly developed.Cooperation three coordinate of micron is generally required to carry out for the measurement of micro parts, this just needs to have precision
The better gauge head system of more high duplication.Existing micrometer/nanometer CMM gauge heads develop many sensing modes, and tend to reach
To higher and higher precision, condenser type, electromagnetic type, optical profile type and MEMS formulas etc. are mainly segmented into according to sensing mode.
Due to having the characteristics that low-loss, big bandwidth and not by electromagnetic interference, optical fiber has become in modern communication networks
Important transmission medium.Optical fiber has sensibility to many physical quantitys, therefore also becomes the important devices of sensory field.Fibre Optical Sensor
Device with its high sensitivity, electromagnetism interference, it is corrosion-resistant, can flexing, it is small, engineering material can be embedded to and distributed survey can be carried out
The advantages that amount, is concerned, and especially develops very fast fiber grating in recent years.As a kind of optical fiber passive of reflection-type
Device, fiber bragg grating have very high sensitivity characteristic and higher resolving power to temperature, strain, can measure such as temperature
The physical quantitys such as degree, strain, pressure, refractive index, humidity.
However, fiber grating is rarely applied on the CMM gauge heads of micrometer/nanometer magnitude.Since FBG sensor is a kind of incites somebody to action
Strain/temperature change is converted into the sensor of wavelength change, thus the application for FBG on micrometer/nanometer CMM gauge heads, most
Crucial problem is FBG demodulation methods used in gauge head system.It is realized using single FBG in the research of University of South Australia
One-dimensional CMM gauge heads demodulate FBG using the method for unbalanced M-Z interferometer combination CCD probe.It can in final experiment
The azimuthal resolution reached is 60nm, but due to FBG sensor to lateral strain and insensitive thus lateral resolving power etc.
Index not can determine that.
In the patent of Publication No. 105004267A, a kind of resonant trigger formula nanometer based on FBG sensor is disclosed
Three coordinate micrometering header structures.Three FBG sensors are installed, there are four optical fiber to connect for tool on the encapsulation casing of gauge head inside its gauge head
Connection interface.Gauge head is operated in resonant condition, i.e., when gauge head works, the stylus of gauge head drives FBG with fixed frequency fixed amplitude
It is vibrated, when gauge head touches measured object surface, transducing signal is begun on FBG, transducing signal shows as two signals
Stacking pattern, one of signal is vibration signal consistent with gauge head vibration frequency caused by resonance, another
Signal is stationary singnal caused by causing measuring head structure to deform due to contact.And contacted with testee surface with gauge head
Deepen, transducing signal changes in regularity.The gauge head is designed as trigger-type nano measuring head, can be not only used for the seat of micro devices
Mapping amount, and gauge head trigger signal can be provided for three coordinate measuring machine.So-called trigger signal is one and is touched by comparing
Hair curve and artificial settings activation threshold value come judge gauge head whether the signal with testee surface actual contact.Due to FBG
Sensing element is a kind of optical passive component by axial strain change transitions for the variation of FBG reflection wavelengths, can not be directly obtained
Measurement result, but do not disclosed in the patent document thirdly tieing up measurement method.
A kind of " optical fiber bragg grating FBG three is disclosed in the description of the invention application No. is 200810244304.7
Tie up gauge head ", it is realized and is measured with three FBG, the tunable fiber grating filter method after application enhancements is demodulated.In demodulation side
It in terms of case, is matched using the synergistic effect of three sensor reflected lights of a match grating pairs, final resolving power reaches 70nm.
But since what the gauge head measured is the synergistic effect of three FBG sensor reflected lights, passed so every FBG can not be respectively obtained
The measuring signal of sensor, therefore can not achieve real three-dimensional measurement.Meanwhile the transducing signal of the gauge head is stationary singnal, is held
It is vulnerable to the interference of environmental factor.Especially gauge head realizes the superposition of the reflected light of three FBG sensors using 1 × 3 coupler,
Obtained superposition light intensity attenuation is larger, is unable to reach preferable measurement sensitivity and resolving power, and the light after superposition is solved in matching
The timing linearity is poor, and measurement range is extremely limited.
Invention content
The present invention is to avoid above-mentioned existing deficiencies in the technology, provides a kind of nanometer based on Bragg grating
Three coordinate micrometering head measuring systems and measurement method to really realize three-dimensional measurement, and are obtained compared with high resolution, preferably weight
The measurement performance of renaturation, higher sensitivity and better stability.
The present invention is to solve technical problem to adopt the following technical scheme that：
It includes sensing module, solution to be the present invention is based on the characteristics of three coordinate micrometering head measuring system of nanometer of Bragg grating
Adjust light path module, signal conversion module and host computer；
The sensing module uses the three coordinate contact measuring head of resonant mode nanometer based on fiber bragg grating, institute
Three FBG sensors stated in gauge head are drawn by the inside of gauge head, and a matched FBG is arranged on the side wall of the gauge head；
The demodulation light path module, uses spectral width for the wideband light source of 1525~1570nm, the wideband light source
The input terminal of optical switch matrix is accessed by the first coupler, three FBG sensors are connected to photoswitch correspondingly
The different output ends of matrix；
The reflection end of first coupler is connect with the incidence end of the second coupler, and the matched FBG is coupled with second
The output end of device connects；
The signal conversion module includes data collecting card and photodetector, is set in the reflection end of second coupler
Photoelectric detector PD is set, the detectable signal of the photoconductive detector PD is acquired by the data collecting card and is transmitted to host computer；
The host computer is used to receive the detectable signal from data collecting card, and exports and gate to optical switch matrix
Control signal；
The light sent out by wideband light source enters different FBG sensors by optical switch matrix timesharing, by FBG sensor
Reflection after enter demodulation light path, setting at any time only have a FBG sensor reflective information utilize the matching light
Grid are demodulated in demodulation light path, and the demodulation mode of the space division multiplexing to three FBG sensors is realized using optical switch matrix,
The measured value of each FBG sensor is respectively obtained, realizes three-dimensional measurement.
The present invention is based on the characteristics of three coordinate micrometering head measuring system of nanometer of Bragg grating to lie also in：The matching light
Gauge head inner wall is fixed in the one end being connected with the output end of the second coupler in grid, and the other end of matched FBG is in gauge head
Vacantly.
The present invention is based on the characteristics of three coordinate micrometering head measuring system of nanometer of Bragg grating to lie also in：Described three
FBG sensor and a matched FBG are the fiber grating that three dB bandwidth is not more than 0.1nm.
The present invention is based on the characteristics of measurement method of the three coordinate micrometering head measuring system of nanometer of Bragg grating to be：Setting
The measuring system carries out Control ＆ data acquisition as follows：
Three switches that FBG sensor is connected in the optical switch matrix are controlled by host computer output signal by determining
Sequence cyclic switching successively, when interval switched every time, are T seconds a length of, such as：T=200ms is delayed t seconds with f hertz every time after switching
Hereby/second is that sample frequency carries out data acquisition, the acquisition of each switch data continue when a length of (T-t) second, t can be with value
10ms, when a length of (T-t) time in acquisition obtain a data sequence, the measurement of two neighboring measurement point in data sequence
Time interval is 1/f seconds；
Switch one time by the sequence of setting with three switches for being connected with FBG sensor in optical switch matrix to recycle for a wheel
Switching is 3T seconds when one repeating query ring cutting is used instead；Cyclic switching is carried out in m times of 3T seconds of duration 3mT and carries out data acquisition,
The m data sequence of every FBG sensor is obtained respectively, respectively by the m data sequence of every FBG sensor by the acquisition moment
Sequence be sequentially arranged, correspondingly obtain three FBG sensors gathered data sequence L1、L2And L3, wherein m is just whole
Number, the gathered data sequence L1、L2And L3All it is the gathered data sequence that length is n, each gathered data sequence L1、L2And L3It presses
Formula (1) is expressed as：
In formula (1)：
It is followed successively by gathered data sequence L1In respectively measure point data；
It is followed successively by gathered data sequence L2In respectively measure point data；
It is followed successively by gathered data sequence L3In respectively measure point data；
By each gathered data sequence L1、L2And L3It is respectively stored in the different storage units of host computer, is counted according to formula (2)
Calculate the absolute value delta for the gathered data variable quantity for obtaining every FBG sensor1、Δ2And Δ3For：
Then have, the output signal data sequence C of the three coordinate micrometering head of nanometer based on fiber bragg grating is：
Utilize absolute value delta1、Δ2And Δ3, 3 d space coordinate is obtained by the method that space coordinate decouples in real time and is measured
Value.
Compared with the prior art, beneficial effects of the present invention are embodied in：
1, the present invention is sensed using fiber bragg grating resonant transducer, and measuring system is applied to micro-nano-scale
Measurement of coordinates there is fabulous electromagnetism interference compared to the electric sensors such as strain-type, pressure resistance type, condenser type and inductance type
Ability, while higher sensitivity and precision can be obtained.
2, the transducing signal of measuring system is the Dynamic Signal generated by gauge head, this solution to Dynamic Signal in the present invention
Tune, measurement method can weaken various static, quasi-static interference, such as the influence of temperature drift, drift.
3, measuring system realizes the space division multiplexing for three FBG sensors, this survey by optical switch matrix in the present invention
Amount method may be implemented real three-dimensional measurement, and small with the FBG multiplex mode signals decaying that optical switch matrix is realized, can be with
Reach higher sensitivity, resolving power, it is good to measure the linearity.This measuring system can not only provide the trigger signal of gauge head, also
Real-time spatial value can be provided.
4, matched FBG is all made of the grating that three dB bandwidth is not more than 0.1nm with FBG sensor in the present invention, it is demonstrated experimentally that
The reduction of bandwidth can effectively improve sensitivity and the resolving power of measuring system.
5, the matched FBG used in the present invention is fixed on gauge head inner wall, and matched FBG is approximately at one with sensing grating
In temperature field, this set can effectively reduce influence of the environment temperature to measurement, greatly improve the stability of measuring system with
Repeatability.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is the structural schematic diagram of demodulation light path in the present invention；
Fig. 3 a and Fig. 3 b are respectively present system Z-direction repeatability and standard deviation test result；
Fig. 4 a and Fig. 4 b are respectively present system X-direction repeatability and standard deviation test result；
Fig. 5 a and Fig. 5 b are respectively present system Y-direction repeatability and standard deviation test result；
Fig. 6 a and Fig. 6 b are respectively the back to zero reperformance test result of tri- directions present system X/Y/Z respectively；
Fig. 7 a and Fig. 7 b are respectively the triggering reperformance test result of tri- directions present system X/Y/Z respectively；
Figure label：1 gauge head, 2 be FBG sensor, 3 matched FBGs, 4 first couplers, 5 second couplers, 6 photoswitches
Matrix, 7 host computers.
Specific implementation mode
In the present embodiment involved gauge head be Publication No. CN105004267A, application No. is
The hair of 201510391756.8, entitled " the three coordinate contact measuring head of resonant mode nanometer based on fiber bragg grating "
Three coordinate contact measuring head of resonant mode nanometer described in bright patent specification.
Referring to Fig. 1 and Fig. 2, the three coordinate micrometering head measuring system of nanometer based on Bragg grating includes passing in the present embodiment
Feel module, demodulation light path module, signal conversion module and host computer 7.
Sensing module uses the three coordinate contact measuring head 1 of resonant mode nanometer based on fiber bragg grating, in gauge head 1
Three FBG sensors 2 are drawn by the inside of gauge head 1, and a matched FBG 3 is arranged on the side wall of gauge head 1.
Demodulation light path module uses spectral width for the wideband light source of 1525~1570nm, and wideband light source passes through the first coupling
Device 4 accesses the input terminal of optical switch matrix 6, and three FBG sensors 2 are connected to the different of optical switch matrix 6 correspondingly
Output end.
The reflection end of first coupler 4 is connect with the incidence end of the second coupler 5, matched FBG 3 and the second coupler 5
Output end connects.
Signal conversion module includes data collecting card and photodetector, and photoelectricity is arranged in the reflection end of the second coupler 5
The detectable signal of detector PD, photoconductive detector PD are acquired by the data collecting card and are transmitted to host computer 7；Host computer 7 is used
Gate control signal is exported in detectable signal of the reception from data collecting card, and to optical switch matrix 6.
The light sent out by wideband light source enters different FBG sensors 2 by 6 timesharing of optical switch matrix, is sensed by FBG
Enter demodulation light path after the reflection of device 2, the reflective information that setting only has a FBG sensor at any time utilizes matched FBG
3 are demodulated in demodulation light path, and the demodulation side of the space division multiplexing to three FBG sensors 2 is realized using optical switch matrix 6
Formula respectively obtains the measured value of each FBG sensor 2, realizes three-dimensional measurement.
In the present embodiment, the one end being connected with the output end of the second coupler 5 in matched FBG 3 is fixed in gauge head
The other end of wall, matched FBG 3 is in hanging in gauge head.This form makes matched FBG be placed in same temperature with FBG sensor
；And the single-ended fixed form of matched FBG is conducive to reduce the strain that grating generates.
Three FBG sensors and a matched FBG are the fiber grating that three dB bandwidth is not more than 0.1nm.
Measuring system carries out Control ＆ data acquisition as follows：
Three switches that FBG sensor is connected in the optical switch matrix are controlled by host computer output signal by determining
Sequence cyclic switching successively, when interval switched every time, are T second a length of, be delayed after switching every time t second with f hertz/secs to sample frequently
Rate carries out data acquisition, the acquisition of each switch data continue when a length of (T-t) second, when a length of (T-t) time in acquisition
A data sequence is obtained, is divided into 1/f seconds between the time of measuring of two neighboring measurement point in the data sequence；
Switch one time by the sequence of setting with three switches for being connected with FBG sensor in optical switch matrix to recycle for a wheel
Switching is 3T seconds when one repeating query ring cutting is used instead；Cyclic switching is carried out in m times of 3T seconds of duration 3mT and carries out data acquisition,
The m data sequence of every FBG sensor is obtained respectively, respectively by the m data sequence of every FBG sensor by the acquisition moment
Sequence be sequentially arranged, correspondingly obtain three FBG sensors gathered data sequence L1、L2And L3, wherein m is just whole
Number, the gathered data sequence L1、L2And L3All it is the gathered data sequence that length is n, each gathered data sequence L1、L2With
L3It is expressed as by formula (1)：
In formula (1)：
It is followed successively by gathered data sequence L1In respectively measure point data；
It is followed successively by gathered data sequence L2In respectively measure point data；
It is followed successively by gathered data sequence L3In respectively measure point data；
The absolute value delta for the gathered data variable quantity for obtaining every FBG sensor is calculated according to formula (2)1、Δ2And Δ3For：
(2)
Then have, the output signal data sequence C of the three coordinate micrometering head of nanometer based on fiber bragg grating is：
Utilize absolute value delta1、Δ2And Δ3, 3 d space coordinate is obtained by the method that space coordinate decouples in real time and is measured
Value；The present invention realizes the demodulation mode of the space division multiplexing to three FBG using optical switch matrix, and this mode respectively obtains each
The measured value of root FBG sensor, thus real three-dimensional measurement may be implemented.
In order to verify the sensitivity of measuring system in this example, repeatability, single-point triggering/back to zero repeatability, resolving power etc.
Index builds following measuring systems and carries out preliminary test.Gauge head 1 is installed on accurate fixed station, builds measuring system, while frame
If SIOS single beam reflective laser interferometers and PI closed loop precise jiggle consoles.It is controlled by PI closed loop precise jiggles in experiment
The micro-displacement that platform drives high reflection optical mirror slip to generate nanoscale generates measuring signal to touch measuring probe.Using upper
Position machine Survey Software and SIOS single beam reflective laser interferometers measure signal, and measurement process and result are as follows：
The stepping of PI closed loop precise jiggle consoles is set as 100nm, the defeated of Three-Dimensional Solution adjusting system is recorded after each stepping
Artificial situation, experiment carry out within the scope of 2um.PI closed loop precise jiggles console is adjusted respectively from vertical direction (Z) and level side
It is contacted to (X, Y) with stylus, each direction carries out five groups of experiments.It is the repeated experiment of Z-direction as best shown in figures 3 a and 3b
And standard deviation result of calculation as a result.The sensitivity for being fitted to obtain Z-direction by the repeated experiment result of Fig. 3 a is
The maximum value of repeated standard deviation data is 3.26mV in 164.19mV/um, Fig. 3 b, converts to obtain Z with above-mentioned fit sensitivity
The repeated standard deviation in direction is not more than 19.86nm.As shown in Figs. 4a and 4b is the repeated experiment result and standard deviation of X-direction
Result of calculation.It is fitted to obtain the sensitivity of X-direction by the repeated experiment result of Fig. 4 a for 100.47mV/um, in Fig. 4 b again
The maximum value of renaturation standard deviation data is 4.81mV, and the repeatability that the X-direction sensitivity obtained with fitting converts to obtain X-direction is marked
Quasi- difference is not more than 47.87nm.It is the repeated experiment result and standard deviation result of calculation of Y-direction as shown in figure 5a and 5b.Pass through
The sensitivity that the repeated experiment result of Fig. 5 a is fitted to obtain Y-direction is 118.29mV/um, repeated standard deviation data in Fig. 5 b
Maximum value be 4.54mV, the repeated standard deviation for converting to obtain Y-direction with the obtained Y-direction sensitivity of fitting is not more than
38.38nm.The repeated standard deviation of measuring system is that measuring system carries out repeatedly continuous measure from same direction to same input
The repeated standard deviation of obtained error, measuring system is smaller, and measuring system is more stable.Meanwhile it being repeated according to measuring system
Property fitting experimental data obtains sensitivity, and sensitivity is the degree of measurement variation caused by unit variation to be measured, sensitivity
Bigger, the signal-to-noise ratio of measuring system is lower.
Triggering/back to zero repeatability is one of the basic index of trigger probe measuring system.It is to work as gauge head to trigger repeatability
When from not in contact with measured object to disposable contact measured surface certain depth, measuring system exports the performance whether stablized.Back to zero
Repeatability is when gauge head contacts measured object surface and recalls not in contact with state, and can measuring system export the property that return to zero-bit
Energy.
In order to verify the back to zero repeatability and triggering repeatability of this head mechanism, surveyed respectively from tri- directions X, Y, Z
Examination, the displacement specification for testing use is respectively 200nm, 500nm and 1000nm.The experimental method of back to zero and triggering repeatability is such as
Under：PI closed loop precise jiggle consoles are adjusted to the position of critical contact, each step of setting PI closed loop precise jiggle consoles
Into respectively 200nm, 500nm, 1000nm.Gauge head is contacted from tri- directions X, Y, Z respectively, the stepping of each specification is one group real
It tests, adjusts PI closed loop precise jiggle consoles and step to current specifications displacement, after system output numerical stability to be measured, be retracted into
Critical localisation records current measurement output, repeated measurement at least ten times, the experimental result as the group.
If the back to zero repeatability standard deviation that Fig. 6 a are three directions (X, Y, Z) is as a result, Fig. 6 b are the spirit according to three directions
The back to zero repeatability standard deviation result that sensitivity converts.It can be obtained in conjunction with Fig. 6 a and 6b：X, the back to zero weight in tri- directions Y, Z
Renaturation standard deviation is no more than 24.98nm.Back to zero repeatability standard deviation characterization measuring system returns to stability when zero, the numerical value
Smaller, the performance that measuring system returns to zero is more stable.Such as the triggering repeatability standard deviation knot that Fig. 7 a are three directions (X, Y, Z)
Fruit, Fig. 7 b are the triggering repeatability standard deviation result to be converted according to the sensitivity in three directions.It can be in conjunction with Fig. 7 a and 7b
It obtains：X, the triggering repeatability in tri- directions Y, Z is not more than 24.45nm.Triggering repeatability characterization measuring system is unexpected from zero
The stable case that measuring system exports when jumping to certain trigger value, the repeated standard deviation of triggering is smaller, the triggering of measuring system
Performance is more stable.
The resolving power situation of this measuring system in order to obtain, it is to be understood that the noise of this measuring system under the measuring head structure
It is horizontal.Configuration gauge head is in arbitrary contact condition with PI closed loop precise jiggle consoles, and acquisition 30s measurement data is made an uproar for extracting
Sound data sequence.According to noise data sequence, the voltage difference of adjacent measurement points is calculated separately, compares to obtain arbitrary in the sequence
Voltage absolute value of the difference between adjacent measurement points is not more than 2.24mV, thus the noise level of system is about 2.24mV.Due to
Resolving power is approximately equal to noise level and the ratio of sensitivity, thus to test obtained peak response (i.e. Z-direction sensitivity
It 164.19mV/um) calculates, it is 13.64nm that can obtain the attainable best resolving power of the gauge head system.System resolution characterizes
The discernmible measured minimum change of measuring system, the resolving power numerical value being calculated is smaller, the resolving power of measuring system
Better, measuring system is easier to reach higher measurement accuracy.
Claims (4)
1. a kind of three coordinate micrometering head measuring system of nanometer based on Bragg grating, it is characterized in that including sensing module, demodulation
Light path module, signal conversion module and host computer (7)；
The sensing module uses the three coordinate contact measuring head (1) of resonant mode nanometer based on fiber bragg grating, described
Three FBG sensors (2) in gauge head (1) are drawn by the inside of gauge head (1), and one is arranged on the side wall of the gauge head (1)
Matched FBG (3)；
The demodulation light path module, uses spectral width for the wideband light source of 1525~1570nm, and the wideband light source passes through
First coupler (4) accesses the input terminal of optical switch matrix (6), and three FBG sensors (2) are connected to light correspondingly
The different output ends of switch matrix (6)；
The reflection end of first coupler (4) is connect with the incidence end of the second coupler (5), the matched FBG (3) and the
The output end of two couplers (5) connects；
The signal conversion module includes data collecting card and photodetector, is set in the reflection end of second coupler (5)
Photoelectric detector PD is set, the detectable signal of the photoconductive detector PD is acquired by the data collecting card and is transmitted to host computer
(7)；
The host computer (7) is used to receive the detectable signal from data collecting card, and exports and select to optical switch matrix (6)
Logical control signal；
The light sent out by wideband light source enters different FBG sensor (2) by optical switch matrix (6) timesharing, is sensed by FBG
Enter demodulation light path after the reflection of device (2), the reflective information that setting only has a FBG sensor at any time utilizes described
It is demodulated in demodulation light path with grating (3), the spatial division multiplexing to three FBG sensors (2) is realized using optical switch matrix (6)
Demodulation mode respectively obtains the measured value of each FBG sensor (2), realizes three-dimensional measurement.
2. the nanometer three coordinate micrometering head measuring system according to claim 1 based on Bragg grating, it is characterized in that：Institute
It states the one end being connected with the output end of the second coupler (5) in matched FBG (3) and is fixed on gauge head inner wall, matched FBG (3)
The other end in gauge head in hanging.
3. the nanometer three coordinate micrometering head measuring system according to claim 1 based on Bragg grating, it is characterized in that：Institute
It is fiber grating of the three dB bandwidth no more than 0.1nm to state three FBG sensors and a matched FBG.
4. the measurement method of the three coordinate micrometering head measuring system of nanometer based on Bragg grating described in a kind of claim 1,
It is characterized in, the measuring system is set and carries out Control ＆ data acquisition as follows：
Three switches that FBG sensor is connected in the optical switch matrix are controlled by host computer output signal by determining sequence
Cyclic switching successively, when interval switched every time, are T seconds a length of, such as：T=200ms, every time switching after be delayed t seconds with f hertz/
Second be that sample frequency carries out data acquisition, the acquisition of each switch data continue when a length of (T-t) second, t can be 10ms with value,
When a length of (T-t) time in acquisition obtain a data sequence, the time of measuring of two neighboring measurement point in data sequence
Between be divided into 1/f seconds；
Switch one time by the sequence of setting as a repeating query ring cutting with three switches for being connected with FBG sensor in optical switch matrix
It changes, is 3T seconds when a repeating query ring cutting is used instead；Cyclic switching is carried out in m times of 3T seconds of duration 3mT and carries out data acquisition, point
The m data sequence of every FBG sensor is not obtained, respectively by the m data sequence of every FBG sensor by the acquisition moment
Sequence is sequentially arranged, and obtains the gathered data sequence L of three FBG sensors correspondingly1、L2And L3, wherein m is positive integer,
The gathered data sequence L1、L2And L3All it is the gathered data sequence that length is n, each gathered data sequence L1、L2And L3By formula
(1) it is expressed as：
In formula (1)：
It is followed successively by gathered data sequence L1In respectively measure point data；
It is followed successively by gathered data sequence L2In respectively measure point data；
It is followed successively by gathered data sequence L3In respectively measure point data；
By each gathered data sequence L1、L2And L3It is respectively stored in the different storage units of host computer, calculates and obtain according to formula (2)
Obtain the absolute value delta of the gathered data variable quantity of every FBG sensor1、Δ2And Δ3For：
Then have, the output signal data sequence C of the three coordinate micrometering head of nanometer based on fiber bragg grating is：
Utilize absolute value delta1、Δ2And Δ3, 3 d space coordinate measured value is obtained by the method that space coordinate decouples in real time.
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| JPH10288511A (en) * | 1997-04-16 | 1998-10-27 | Nippon Telegr & Teleph Corp <Ntt> | Three-dimensional measuring method used with diffraction and device thereof |
| CN104215197A (en) * | 2014-03-20 | 2014-12-17 | 哈尔滨工业大学 | Device and method for measuring shapes of spaces on basis of low-reflectivity three-core fiber grating arrays |
| CN104677286A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Micro-scale measurement device and method adopting four-core optical fiber grating probe and based on optical fiber ring laser |
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| JPH10288511A (en) * | 1997-04-16 | 1998-10-27 | Nippon Telegr & Teleph Corp <Ntt> | Three-dimensional measuring method used with diffraction and device thereof |
| CN104215197A (en) * | 2014-03-20 | 2014-12-17 | 哈尔滨工业大学 | Device and method for measuring shapes of spaces on basis of low-reflectivity three-core fiber grating arrays |
| CN104677286A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Micro-scale measurement device and method adopting four-core optical fiber grating probe and based on optical fiber ring laser |
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