CN104677282A - Five-core fiber grating probe micro-scale measurement device and method based on optical fiber ring-shaped laser - Google Patents
Five-core fiber grating probe micro-scale measurement device and method based on optical fiber ring-shaped laser Download PDFInfo
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- CN104677282A CN104677282A CN201510107908.7A CN201510107908A CN104677282A CN 104677282 A CN104677282 A CN 104677282A CN 201510107908 A CN201510107908 A CN 201510107908A CN 104677282 A CN104677282 A CN 104677282A
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Abstract
The invention relates to a five-core fiber grating probe micro-scale measurement device and method based on an optical fiber ring-shaped laser and belongs to the technical field of manufacturing and measurement of precision instruments. The device comprises a pumping source, a wavelength division multiplexer, an Erbium-doped fiber, a saturable absorber, a multiway optical switch, an external reference grating, a five-core fiber grating probe, a computer and an optical spectrum analyzer; the pumping source is connected with a ring-shaped cavity formed by the Erbium-doped fiber, a circulator, a coupler and an isolator B through the wavelength division multiplexer; the coupler is connected with the optical spectrum analyzer and the computer by an isolator A to form an access. According to the method, the computer controls the multiway optical switch to switch optical paths, the optical spectrum analyzer is used for respectively measuring a wavelength of laser output by the optical fiber ring-shaped laser when the five-core fiber grating probe and the external reference grating are used as laser wavelength selection devices, and three-dimensional micro-scale measurement without temperature coupling is realized by utilizing a differential data processing algorithm. The five-core fiber grating probe micro-scale measurement device based on the optical fiber ring-shaped laser has the characteristics of integration of sensing and energy supply, compact system and high sensitivity.
Description
Technical field
The invention belongs to exact instrument manufacture and field of measuring technique, particularly a kind of five core fibre grating probe micro-scale measurement device and methods based on optical fiber ring laser.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and measuring the impact of contact force, the precision measurement of micro-member yardstick becomes difficult to achieve, especially the degree of depth measuring small inner chamber component is difficult to improve, and these become " bottleneck " of restriction industry development already.Measuring to realize smaller szie, increasing and fathom, the most widely used way is exactly that the inner chamber using elongated probe to go deep into micro-member detects, and is measured the small inside dimension on different depth by the mode aiming at sender.Therefore, the precision measurement of current micro-member size combines the aiming signal sending type detection system with very thin probe based on coordinate measuring machine, due to the development comparative maturity of measurement of coordinates machine technology, can provide accurate three-dimensional space motion, therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system.
At present, the Main Means of micro-member dimensional measurement comprises following several method:
1. Chinese Harbin Institute of Technology Tan Jiubin teaches and Cui Ji culture and education the people such as to be awarded and proposed a kind of probe structure based on two coupling fiber, two optical fiber are communicated with by end welding ball, welding ball is as gauge head, one comparatively long optical fibers introduce light, other one comparatively short-range missile go out light, overcome the limitation that low-light pearl scattering method fathoms, can realize that 0.01mm is not less than to diameter, aspect ratio be not more than 15: 1 micro deep-hole measure time fine sight.Although this method overcomes capture-effect to a certain extent, the luminous energy of the reverse transfer that coupling ball realizes is very limited, fathoms and is difficult to further lifting.
2. USA National Institute of Standard and Technology employs the probe of single fiber measuring staff in conjunction with low-light pearl, in the two-dimensional direction the imaging of optical fiber measuring staff is amplified about 35 times by optical design, differentiate with 2 area array CCDs and receive optical fiber measuring staff imaging on two-dimensional directional, then contour detecting is carried out to the image received, thus the minute movement in measuring process of monitoring optical fiber measuring staff, and then realize trigger-type measurement, the theoretical resolution of this detection system can reach 4nm, the probe diameter of detection system is Φ 75 μm, the aperture of Φ 129 μm is measured in experiment, its expanded uncertainty probable value reaches 70nm (k=2), ergometry is μ N magnitude.This method detection resolving power is high, and measuring accuracy is high, and the gauge head of use is easy to miniaturization, can measure the micropore of larger aspect ratio.But in method, the two dimension of detection optical fiber measuring staff is touched displacement and must be used two cover imaging systems, and cause system architecture more complicated, measurement data calculated amount is larger, and these factors cause the real-time of detection system poor, System's composition more complicated.
3. what Union Bank of Switzerland metering office have developed that a novel coordinate measuring machine is devoted to structural features nano-precision can the measurement of trace.This measuring machine have employed the novel touch probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement, lower than 0.5mN, supports removable probe simultaneously, and probe diameter is minimum to Φ 100 μm.Detection system combines the platform of the high position precision that is developed by Philips CFT, and the positional precision of platform is 20nm.The standard deviation of this measuring system measuring repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, require that measuring staff has higher rigidity and hardness simultaneously, otherwise be difficult to realize effective tactile displacement sensing, this makes measuring staff structure be difficult to further miniaturization, the aspect ratio measured is restricted simultaneously, and the resolving power of detection system is difficult to further raising.
4. Chinese Harbin Institute of Technology Cui Ji culture and education is awarded and is proposed a kind of pore size measurement mechanism based on FBG Bending and method with people such as Yang Fuling, the probe that the method utilizes fiber grating to process and corresponding light source, pick-up unit are as aiming triggering system, coordinate two-frequency laser interferometer measuring motion, the pore size of different cross section can be obtained.The microscale sensor of the method is when tactile survey distortion, and the main stress of probe does not act on fiber grating, and the resolution of system is very low, is difficult to further raising.
In sum, in current microsize and coordinates detection method, probe due to optical fiber fabrication have probe size little, measure that contact force is little, the feature that aspect ratio is large, measuring accuracy is high measured and obtain extensive concern, utilize its distinctive optical characteristics and mechanical property to be accomplished in several ways minute sized precision measurement on certain depth.With the main Problems existing of measurement means be now:
1. the tactile displacement resolving power of detection system is difficult to further raising.The elementary magnification of existing detection system is lower, result in its overall magnification lower, is difficult to the further raising realizing its tactile displacement resolving power.Main micro-touch displacement exercising result can not be applied on fiber grating by the fiber grating probe based on the pore size measuring method of FBG Bending, and then the transducing signal being converted into spectral information is faint, and the resolving power of system is very low.
2. detection system poor real, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD Received signal strength image, more complicated image algorithm must be used could to realize touching optical fiber measuring staff the high resolution monitoring of displacement, this causes measuring system to need data volume to be processed greatly to increase, reduce the real-time performance of detection system, be difficult to the synchronism realizing aiming at sender in small inner cavity size and two-dimensional coordinate measuring process Yu opening, only measure.
3. there is the radial coupling of touching displacement of two dimension.Probe based on the pore size measuring method of FBG Bending has each consistent to performance, coupling is there is when radial two dimension touches displacement sensing, and cannot be separated, cause two-dimensional measurement to there is very big error, the Measurement accuracy that radial two dimension touches displacement cannot be realized.
4. do not possess the decoupling ability of radial and axial detection.Above-mentioned detection method or do not possess axial detection ability or do not possess the decoupling ability of radial and axial detection, when carrying out micro-scale measurement, measuring process is complicated, it is low to measure efficiency.
Summary of the invention
The object of the invention is to overcome micro-member dimension measurement method resolving power in above-mentioned prior art low, the drawback that tested dimension is single, a kind of device and method being applicable to the three-dimensional micro-scale measurement of micro-member is provided, five core fibre grating probes are utilized both to survey sensing element as touching, also as the wavelength selecting device of optical fiber ring laser, after five core fibre grating probe tips are by tactile displacement effect, stress causes the parameter of fiber grating to change, the reflection kernel wavelength of the fiber grating as optical fiber ring laser wavelength selecting device is changed, and change optical fiber ring laser Output of laser centre wavelength further, eliminate the vibration of many longitudinal modes owing to utilizing saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, thus make system have higher sensitivity.Multichannel photoswitch is adopted to carry out the passage of handover measurement fiber grating, to obtain corresponding optical fiber ring laser Output of laser centre wavelength information, then differential data process is done to it, reduce the impact of temperature fluctuation on measurement result, substantially increase the adaptive faculty of this device to environment, thus realize a kind of brand-new temperature without the three-dimensional micro-scale measurement of coupling.
The object of the present invention is achieved like this: a kind of five core fibre grating probe micro-scale measurement devices based on optical fiber ring laser, comprise the ring cavity connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, pumping source is communicated with ring cavity by wavelength division multiplexer; Described coupling mechanism is communicated with computing machine with spectroanalysis instrument successively by isolator A; Multichannel photoswitch is communicated with circulator by saturated absorbing body, and Multichannel photoswitch is communicated with five core fibres by five single-mode fibers, five core fibre fan-out devices, and five core fibre ends are fixedly mounted with five core fibre grating probes by probe clamper; Computing machine is communicated with Multichannel photoswitch; Multichannel photoswitch is connected with external reference grating; Described five core fibre grating probes and external reference grating are switched by Multichannel photoswitch can respectively as the wavelength selecting device of optical fiber ring laser.
A kind of five core fibre grating probe micro-scale measurement methods based on optical fiber ring laser, described method is: utilize pumping source to provide pump light, the Er-doped fiber entered as gain media through wavelength division multiplexer produces excited radiation light, excited radiation light is through coupling mechanism light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator, exported by B port, eliminate the vibration of many longitudinal modes through saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as five core fibre grating probes of wavelength selecting device or external reference grating pair laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in five core fibre grating probes and component to be measured, the reflectance spectrum centre wavelength of five core fibre grating probe inner fiber gratings will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch, spectroanalysis instrument is utilized to detect in five core fibre grating probes five optical fibers grating and external reference grating respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when the outer two groups of orthogonal fiber gratings of five core fibre grating probe core are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero two dimension is radial touches displacement and temperature drift; When the fiber grating of five core fibre grating probe core and external reference grating are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the three-dimensional micro-scale measurement without temperature coupling.
Advantage of the present invention is:
1. have that precision is high, contact force is little based on five core fibre grating probe micro-scale measurement device and methods of optical fiber ring laser, do not damage tested component surface, the feature of probe long service life.
2. utilize the laser of optical fiber ring laser generation single longitudinal mode, narrow linewidth as measurement light, sensing, energy supply are integrated, and system compact improves measurement sensistivity simultaneously.
3. optical detection signal is only in fiber grating internal transmission, contact in space is converted into the change of reflectance spectrum centre wavelength, be not subject to the impact of component capture-effect when measuring microscale component, measuring aspect ratio can reach 100: 1, meets the requirement of large aspect ratio microstructure micro-scale measurement.
4. based on five core grating probe micro-scale measurement methods of optical fiber ring laser, five core fibre grating probes are made to have two dimension radial without coupling sensing capability, the outer two groups of orthogonal fiber gratings of probe core can measure the tactile displacement in this direction respectively, achieve radial orthogonal tactile survey decoupling zero.
5. can realize based on five core fibre grating probe micro-scale measurement methods of optical fiber ring laser radial and axial without coupling measurement simultaneously, the step of micro-scale measurement is simplified, improve the efficiency of micro-scale measurement.
6. the differential compensation system of reference is each other devised in probe interior, in conjunction with the five core fibre grating probe micro-scale measurement installation methods based on optical fiber ring laser, eliminate variation of ambient temperature to the impact of measuring, substantially increase the adaptive faculty of sensors towards ambient, space and environment that traditional measurement instrument cannot normally work can be deep into carry out precision measurement, as narrow and small hemi-closure space and inflammable and explosive environment etc., be also applicable to industry spot and measure.
Accompanying drawing explanation
Fig. 1 is the five core fibre grating probe micro-scale measurement apparatus structure schematic diagram based on optical fiber ring laser;
Fig. 2 is the sectional view of A-A in Fig. 1;
Fig. 3 is the profile of five core fibre grating probes in Fig. 1;
In figure: 1. pumping source, 2. wavelength division multiplexer, 3. Er-doped fiber, 4. circulator, 5. saturated absorbing body, 6. Multichannel photoswitch, 7. external reference grating, 8. single-mode fiber, 9. five core fibre fan-out devices, 10. five core fibres, 11. probe clampers, 12. 5 core fibre grating probes, 13. computing machines, 14. spectroanalysis instruments, 15a. isolator A, 15b. isolator B, 16. coupling mechanisms.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of five core fibre grating probe micro-scale measurement devices based on optical fiber ring laser, comprise the ring cavity connected and composed successively by wavelength division multiplexer 2, Er-doped fiber 3, circulator 4, coupling mechanism 16 and isolator B15b, pumping source 1 is communicated with ring cavity by wavelength division multiplexer 2; Described coupling mechanism 16 is communicated with computing machine 13 with spectroanalysis instrument 14 successively by isolator A15a; Multichannel photoswitch 6 is communicated with circulator 4 by saturated absorbing body 5, Multichannel photoswitch 4 is communicated with five core fibres 10 by five single-mode fibers 8, five core fibre fan-out device 9, and five core fibre 10 ends are fixedly mounted with five core fibre grating probes 12 by probe clamper 11; Computing machine 13 is communicated with Multichannel photoswitch 6; Multichannel photoswitch 6 is connected with external reference grating 7; Described five core fibre grating probes 12 are switched by Multichannel photoswitch 6 with external reference grating 7 can respectively as the wavelength selecting device of optical fiber ring laser.
A kind of five core fibre grating probe micro-scale measurement methods based on optical fiber ring laser, described method is: utilize pumping source 1 to provide pump light, the Er-doped fiber 3 entered as gain media through wavelength division multiplexer 2 produces excited radiation light, excited radiation light is through coupling mechanism 16 light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer 2, Er-doped fiber 3, circulator 4, coupling mechanism 16 and isolator B15b, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator 4, exported by B port and eliminate the vibration of many longitudinal modes and suppression mode hopping through saturated absorbing body 5, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as five core fibre grating probes 12 of wavelength selecting device or external reference grating 7 pairs of laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in five core fibre grating probes 12 and component to be measured, the reflectance spectrum centre wavelength of five core fibre grating probe 12 inner fiber gratings will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch 6, spectroanalysis instrument 14 is utilized to detect in five core fibre grating probes 12 five optical fibers grating and external reference grating respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when two groups of fiber gratings orthogonal outside five core fibre grating probe 12 centers are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero two dimension is radial touches displacement and temperature drift; When the fiber grating at five core fibre grating probe 12 centers and external reference grating 7 are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the three-dimensional micro-scale measurement without temperature coupling.
Based on the innovative point of five core fibre grating probe micro-scale measurement device and methods of optical fiber ring laser and technique effect be: five core fibre grating probes are directly as the wavelength selecting device of optical fiber ring laser, touch displacement information and can directly act on optical fiber ring laser, the wavelength of its Output of laser is changed, and adopt saturated absorbing body to narrow Output of laser live width and make optical fiber ring laser at single longitudinal mode MODE of operation, compared with traditional fiber-optic grating sensor pick-up unit, sensitivity of the present invention has and significantly improves, in the present invention, as the wavelength selecting device that five optical fibers grating in five core fibre grating probes of sensor and external reference grating are again in optical fiber ring laser simultaneously, sensor and sensor energy feedway are organically combined, and, Multichannel photoswitch under the control of the computer, switch the wavelength selecting device forming optical fiber ring laser respectively, the three-dimensional completed under the prerequisite not increasing additional light device without temperature coupling touches displacement measurement, the fiber-optic grating sensor pick-up unit volume making the present invention more traditional reduces more than one times, cost reduces more than twice, technique effect of the present invention is given prominence to.
Claims (2)
1. five core fibre grating probe micro-scale measurement devices based on optical fiber ring laser, it is characterized in that: connect and compose ring cavity successively by wavelength division multiplexer (2), Er-doped fiber (3), circulator (4), coupling mechanism (16) and isolator B (15b), pumping source (1) is communicated with ring cavity by wavelength division multiplexer (2); Described coupling mechanism (16) is communicated with computing machine (13) with spectroanalysis instrument (14) successively by isolator A (15a); Multichannel photoswitch (6) is communicated with circulator (4) by saturated absorbing body (5), Multichannel photoswitch (6) is communicated with five core fibres (10) by five single-mode fibers (8), five core fibre fan-out devices (9), and five core fibres (10) end is fixedly mounted with five core fibre grating probes (12) by probe clamper (11); Computing machine (13) is communicated with Multichannel photoswitch (6); Multichannel photoswitch (6) is connected with external reference grating (7); Described five core fibre grating probes (12) and external reference grating (7) are switched by Multichannel photoswitch (6) can respectively as the wavelength selecting device of optical fiber ring laser.
2. five core fibre grating probe micro-scale measurement methods based on optical fiber ring laser, it is characterized in that: described method is as follows: utilize pumping source to provide pump light, the Er-doped fiber entered as gain media through wavelength division multiplexer produces excited radiation light, excited radiation light is through coupling mechanism light splitting, a part feeds back in the ring cavity that connected and composed successively by wavelength division multiplexer, Er-doped fiber, circulator, coupling mechanism and isolator B, and another part is as Laser output; Feed back to the light in ring cavity to enter from the A port of circulator, exported by B port, eliminate the vibration of many longitudinal modes through saturated absorbing body and suppress mode hopping, the single longitudinal mode narrow linewidth realizing optical fiber ring laser exports, again after carrying out frequency-selecting as five core fibre grating probes of wavelength selecting device or external reference grating pair laser, reflection enters B port, continue to transmit ring cavity after C port exports, along with pump power constantly increases, spontaneous radiation will be gradually suppressed, and the single longitudinal mode laser forming narrow linewidth exports; When there is tactile survey in five core fibre grating probes and component to be measured, the reflectance spectrum centre wavelength of five core fibre grating probe inner fiber gratings will offset, thus change Output of laser wavelength, by switching Multichannel photoswitch, spectroanalysis instrument is utilized to detect in five core fibre grating probes five optical fibers grating and external reference grating respectively as Output of laser centre wavelength during wavelength selecting device; Data processing, when the outer two groups of orthogonal fiber gratings of five core fibre grating probe core are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, and decoupling zero two dimension is radial touches displacement and temperature drift; When the fiber grating of five core fibre grating probe core and external reference grating are respectively as optical fiber ring laser wavelength selecting device, optical fiber ring laser Output of laser wavelength does differential data process, obtain and touch displacement without the radial axis touching displacement and temperature drift coupling, realize the three-dimensional micro-scale measurement without temperature coupling.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510107908.7A CN104677282A (en) | 2015-03-08 | 2015-03-08 | Five-core fiber grating probe micro-scale measurement device and method based on optical fiber ring-shaped laser |
| PCT/CN2016/075592 WO2016138871A1 (en) | 2015-03-05 | 2016-03-04 | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| US15/555,028 US10082383B2 (en) | 2015-03-05 | 2016-03-04 | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core FBG probe |
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| CN201510107908.7A CN104677282A (en) | 2015-03-08 | 2015-03-08 | Five-core fiber grating probe micro-scale measurement device and method based on optical fiber ring-shaped laser |
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| WO2016138871A1 (en) * | 2015-03-05 | 2016-09-09 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fbg probe |
| CN110793450A (en) * | 2019-10-15 | 2020-02-14 | 哈尔滨工程大学 | High-precision particle size measuring device and method based on optical fiber tweezers |
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| CN110793450A (en) * | 2019-10-15 | 2020-02-14 | 哈尔滨工程大学 | High-precision particle size measuring device and method based on optical fiber tweezers |
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Application publication date: 20150603 |