CN103529243B - A kind of pencil tracing formula afm scan gauge head - Google Patents
A kind of pencil tracing formula afm scan gauge head Download PDFInfo
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- CN103529243B CN103529243B CN201310514419.4A CN201310514419A CN103529243B CN 103529243 B CN103529243 B CN 103529243B CN 201310514419 A CN201310514419 A CN 201310514419A CN 103529243 B CN103529243 B CN 103529243B
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- 230000003287 optical effect Effects 0.000 claims abstract description 71
- 239000000523 sample Substances 0.000 claims abstract description 70
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 230000010287 polarization Effects 0.000 claims abstract description 27
- 238000001514 detection method Methods 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 3
- 230000003321 amplification Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000004304 visual acuity Effects 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
A kind of pencil tracing formula afm scan gauge head, it is to be made up of optical detecting module and scan module, scan module has: carries out the Y-direction one-dimensional scanning mechanism of horizontal one-dimensional scanning motion and being fixedly connected on and can carry out the Z-direction one-dimensional scanning mechanism of vertical one-dimensional scanning motion in Y-direction one-dimensional scanning mechanism, it is fixed with socle beam probe in Z-direction one-dimensional scanning mechanism and is positioned at the non-spherical lens above socle beam probe, Y-direction one-dimensional scanning mechanism is fixedly installed corner cube prism；Optical detecting module has: laser instrument, collimating mirror, polarization spectroscope, quarter-wave plate and the first beam splitter that the glancing incidence light path along corner cube prism sets gradually, wherein, it is disposed with the second beam splitter, Guan Jing and CCD camera on the vertical light splitting optical path of the first beam splitter, the horizontal direction interface of the second beam splitter connects lighting source, and spectroscopical vertical optical path that polarizes is disposed with collecting lens and photodetector.The present invention can eliminate error, carries out high-velocity scanning imaging.
Description
Technical field
The present invention relates to a kind of afm scan gauge head.Particularly relate to a kind of pencil tracing formula afm scan
Gauge head.
Background technology
The eighties in 20th century, the appearance of atomic force microscope made people be able at nanoscale to recognize all kinds of conduction intuitively, non-lead
Electric material or even the surface texture of biological sample.Through the development of more than two decades, nowadays this technology has become semi-conductor industry, has received
One of the fundamental analysis technology in the rice field such as material, life sciences, applies quite varied.
Current most atomic force microscope all uses beam type probe detection sample surfaces to rise and fall, and utilizes optical lever side simultaneously
Method amplifies the deformation of cantilever beam.Optical lever detection light path is positioned at gauge head, and wherein laser instrument sends laser beam and beats on a cantilever beam,
Light beam is reflexed to photodetector by cantilever beam, and on detector, the displacement of hot spot i.e. reflects the deformation of beam.According to scanning motion object
Difference, the structure of atomic force microscope can be divided into scanning and lower scanning two class, respectively as shown in Fig. 1 a, 1b.Upper scanning is
Sample is static, and gauge head does scanning motion relative to sample；Lower scanning is that gauge head is static, and sample does scanning motion relative to gauge head.
Scanning motion generally realizes by tubular type or tripod type piezoelectric scanner.This kind of scanning device scanning speed is fast, can be the most real
Existing three-dimensional motion, but load capacity is more weak, and in principle, there is three-axis moving coupling, can go out during X/Y plane scanning on a large scale
Now obvious Z-direction flexural distortion.Therefore, upper scan mode can only be used for bigger sample, i.e. allow scanning device be integrated in survey
Move with probe in Tou.Upper scan mode requires that laser can the motion of real-time tracking cantilever beam.Though existing gauge head can be by tracking
Lenses guarantee measuring beam is beaten on beam, but light beam reflection angle change scanning motion caused by still can not be completely eliminated and thus draw
The optical lever detection error risen.Additionally, laser beam waist diameter is typically at tens microns in tradition optical lever light path, and in recent years rise
Response speed faster small size cantilever beam itself only have twenty or thirty micron long, this means that existing gauge head light path possibly cannot
Meet high-velocity scanning demand from now on.
Summary of the invention
The technical problem to be solved is to provide a kind of measuring beam that is capable of and follows the tracks of the zero error of socle beam probe
Pencil tracing formula afm scan gauge head.
The technical solution adopted in the present invention is: a kind of pencil tracing formula afm scan gauge head, is by optical detection mould
Block and carry out the scan module that light is connected with described optical detecting module and constitute, described scan module includes: can carry out
The Y-direction one-dimensional scanning mechanism of horizontal one-dimensional scanning motion and being fixedly connected on can carry out vertical in described Y-direction one-dimensional scanning mechanism
The Z-direction one-dimensional scanning mechanism of one-dimensional scanning motion, described Z-direction one-dimensional scanning mechanism is fixed with socle beam probe and is positioned at outstanding
Non-spherical lens above arm beam probe, described Y-direction one-dimensional scanning mechanism is fixedly installed saturating with described non-spherical lens
Penetrate the corner cube prism that light path is corresponding；Described optical detecting module includes: the glancing incidence light path along corner cube prism sets successively
Laser instrument, collimating mirror, polarization spectroscope, quarter-wave plate and the first beam splitter put, wherein, the first described beam splitter
Vertical light splitting optical path on be disposed with the second beam splitter, Guan Jing and CCD camera, the horizontal direction of the second described beam splitter
Interface connects lighting source, and the spectroscopical vertical optical path of described polarization is disposed with collecting lens and photodetector.
Described optical detecting module and Y-direction one-dimensional scanning mechanism are fixed on gauge head pedestal.
The operative orientation of described Z-direction one-dimensional scanning mechanism is orthogonal with the operative orientation of described Y-direction one-dimensional scanning mechanism.
The laser that described optical detecting module sends is with the scan module described in the entrance of line polarized light form, from described scanning mould
It is also line polarisation that block returns the laser beam of optical detecting module.
It is provided with attenuator between described the second beam splitter and Guan Jing.
Described photodetector is arranged on beyond the back focal plane of collecting lens.
Being provided with optical filter between described collecting lens and photodetector, described optical filter next-door neighbour's photodetector is installed, and
The band connection frequency of optical filter is consistent with laser frequency used.
Described socle beam probe is positioned at the focal point of non-spherical lens, and in scanning process, socle beam probe is followed with non-spherical lens
Z-direction one-dimensional scanning mechanism motion and keep relative invariant position；And Z-direction one-dimensional scanning mechanism follows Y-direction one-dimensional scanning mechanism
Carry out horizontal scan motion, so that socle beam probe and non-spherical lens keep the level of relative invariant position with corner cube prism.
Described CCD camera, Guan Jing, the first beam splitter, corner cube prism and non-spherical lens constitute be used for observing cantilever beam and
The micro-light path of infinite conjugate of sample；Described photodetector, collecting lens, polarization spectroscope, quarter-wave plate,
One beam splitter, corner cube prism, non-spherical lens and socle beam probe constitute optical lever light path.
Setting non-spherical lens, collecting lens, the focal length of Guan Jing correspond to f respectively1、f2、f3, collecting lens back focal plane is to photoelectricity
The distance of detector photosurface is L, and the length of cantilever arranging socle beam probe is l, and sets laser pip on a cantilever beam,
I.e. socle beam probe is at the free end of cantilever beam, then obtain according to geometric optics and material mechanics principle: optical lever light path is to spy
The enlargement ratio of pin free end Z-direction displacement is A=3 (L/l) (f1/f2)；The optical magnification of the micro-light path of infinite conjugate is M=f3/
f1；In the case of keeping scan module constant, by adjusting collecting lens, the focal length of Guan Jing and light electrical resistivity survey in optical detecting module
The position surveying device i.e. have adjusted relevant enlargement ratio and detection sensitivity.
A kind of pencil tracing formula afm scan gauge head of the present invention, can reach following beneficial effect:
1, for arbitrary scan scope, all can guarantee that the laser tracking to cantilever beam in scanning process, completely eliminate in theory and sweep
Retouch the optical lever error that device motion causes；
2, laser focusing hot spot is little, and small size cantilever beam can be coordinated to carry out high-velocity scanning imaging；
3, the discrete one-dimensional scanning device assembled scheme used avoids the three-axis moving coupling of conventional scanners, can realize pure-surface
Scanning；
4, microexamination light path and optical lever light path road altogether, it is easy to the laser focusing situation on cantilever beam and sample surfaces are carried out former
Position is observed；
5, Systems for optical inspection is separate with scanning moving mechanism, conveniently debugs, safeguards and upgrades.
Accompanying drawing explanation
Fig. 1 a is common atomic force microscope structural representation；
Fig. 1 b another kind common atomic force microscope structural representation；
Fig. 2 be the present invention a kind of pencil tracing formula afm scan gauge head be monolithically fabricated schematic diagram；
Fig. 3 is the example of an actual application of the present invention.
In figure
1: sample 2: sample stage
3: socle beam probe 4: non-spherical lens
5:Z is to one-dimensional scanning mechanism 6: corner cube prism
7:Y is to one-dimensional scanning mechanism 8: laser instrument
9: collimating mirror 10: polarization spectroscope
11: quarter-wave plate 12: the first beam splitter
13: collecting lens 14: optical filter
15: photodetector 16: lighting source
17: the second beam splitters 18: attenuator
19: pipe mirror 20:CCD camera
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, a kind of pencil tracing formula afm scan gauge head of the present invention is made specifically
Bright.
As in figure 2 it is shown, a kind of pencil tracing formula afm scan gauge head of the present invention, it is by optical detecting module II He
Carrying out, with described optical detecting module II, scan module I composition that light is connected, it is achieved 3-D scanning, the plane of scanning motion is pure-surface.
Measuring beam is produced by optical detecting module and enters scan module, returns optics from scan module again after socle beam probe reflects
Detection module；Measuring light is linear polarization collimated light beam when transmit between optical detecting module and scan module, and the direction of propagation and
Y-axis is parallel, i.e. the laser that described optical detecting module II sends with line polarized light form enter described in scan module I,
The laser beam returning optical detecting module II from described scan module I is also line polarisation.
Described scan module I includes: can carry out horizontal one-dimensional scanning motion Y-direction one-dimensional scanning mechanism 7 and fixing even
It is connected on the Z-direction one-dimensional scanning mechanism 5 that can carry out vertical one-dimensional scanning motion in described Y-direction one-dimensional scanning mechanism 7, described
The operative orientation of Z-direction one-dimensional scanning mechanism 5 is orthogonal with the operative orientation of described Y-direction one-dimensional scanning mechanism 7.Described Z-direction
It is fixed with socle beam probe 3 in one-dimensional scanning mechanism 5 and is positioned at the non-spherical lens 4 above socle beam probe 3, described Y
The corner cube prism 6 corresponding with described non-spherical lens 4 transmitted light path it is fixedly installed in one-dimensional scanning mechanism 7.Described
Socle beam probe 3 be positioned at the focal point of non-spherical lens 4, in scanning process, socle beam probe 3 is followed with non-spherical lens 4
Z-direction one-dimensional scanning mechanism 5 moves and keeps relative invariant position；And Z-direction one-dimensional scanning mechanism 5 follows Y-direction one-dimensional scanning
Mechanism 7 carries out horizontal scan motion, so that socle beam probe 3 and non-spherical lens 4 keep the level phase with corner cube prism 6
To invariant position.It is parallel to Z axis enter the laser beam of non-spherical lens and assemble same point on a cantilever beam all the time, cantilever beam anti-
Penetrate light return non-spherical lens and be parallel to Z axis outgoing；Design of Aspherical Lenses wavelength optical maser wavelength used with detection is consistent, outstanding
Laser focal spot on arm beam is much smaller than deck-siding.
Described optical detecting module II includes: laser instrument 8 that the glancing incidence light path along corner cube prism 6 sets gradually, accurate
Straight mirror 9, polarization spectroscope 10, quarter-wave plate 11 and the first beam splitter 12, wherein, the first described beam splitter 12
It is disposed with the second beam splitter 17, pipe mirror 19 and CCD camera 20, the second described beam splitter 17 on vertical light splitting optical path
Horizontal direction interface connect and have a lighting source 16, the vertical optical path of described polarization spectroscope 10 is disposed with convergence thoroughly
Mirror 13 and photodetector 15, described photodetector 15 is arranged on beyond the focal plane of collecting lens 13, photodetection
The actual range of device 15 and collecting lens 13 can be adjusted according to photodetector 15 photosurface size, required detection sensitivity and range
Whole.Being provided with optical filter 14 between described collecting lens 13 and photodetector 15, described optical filter 14 is close to light electrical resistivity survey
Surveying device (15) to install, its band connection frequency is consistent with laser frequency used.Set between described the second beam splitter 17 and pipe mirror 19
Being equipped with attenuator 18, described attenuator 18 is close to pipe mirror 19 and arranges, and attenuator 18 is used for weakening laser intensity and avoids CCD
Saturated.
Described optical detecting module II and Y-direction one-dimensional scanning mechanism 7 are fixed on gauge head pedestal.
Described CCD camera 20, pipe mirror the 19, first beam splitter 12, corner cube prism 6 and non-spherical lens 4 composition are used for seeing
Examine the micro-light path of infinite conjugate of cantilever beam and sample；Described photodetector 15, collecting lens 13, polarization spectroscope 10,
Quarter-wave plate the 11, first beam splitter 12, corner cube prism 6, non-spherical lens 4 and socle beam probe 3 constitute optical lever light
Road.
Setting non-spherical lens 4, collecting lens 13, the focal length of pipe mirror 19 correspond to f respectively1、f2、f3, collecting lens 13 back focal plane
Distance to photodetector 15 photosurface is L, and the length of cantilever arranging socle beam probe 3 is l, and sets laser at cantilever
Pip on beam, i.e. socle beam probe 3 is at the free end of cantilever beam, then obtain according to geometric optics and material mechanics principle:
Optical lever light path is A=3 (L/l) (f to the enlargement ratio of probe free end Z-direction displacement1/f2)；The optics of the micro-light path of infinite conjugate
Enlargement ratio is M=f3/f1；In the case of keeping scan module I constant, assemble thoroughly by adjusting in optical detecting module II
The position of mirror 13, the focal length of pipe mirror 19 and photodetector 15 i.e. have adjusted relevant enlargement ratio and detection sensitivity.
A kind of pencil tracing formula afm scan gauge head of the present invention, during Y-direction scanner movements, corner cube prism and Z-direction
The relative position of one-dimensional scanning mechanism 5 keeps constant；Sent by optical detecting module and be parallel to Y-axis and inject the light of scan module
Restraint and be parallel to Z axis directive non-spherical lens after corner cube prism reflects；It is parallel to Z axis directive corner cube prism by non-spherical lens
Light beam is parallel to Y-axis after reflection and returns optical detecting module；The Y of gauge head, Z-direction scanning motion do not change laser focus position
And the direction of propagation.
In optical detecting module, the light beam that laser instrument sends sequentially pass through collimating mirror, polarization spectroscope, quarter-wave plate and
First beam splitter, is parallel to the corner cube prism in Y-axis directive scan module with line polarisation form；The light beam edge that scan module returns
Polarization spectroscope is arrived through the first beam splitter and quarter-wave plate with the most contrary direction；Pass twice through quarter-wave plate
Laser Beam Polarization direction half-twist, be completely reflected to collecting lens and be incident upon photodetector after returning polarization spectroscope
On, on photodetector, the displacement of hot spot is the amplification of cantilever beam partial twist deformation；The light beam that scan module returns is through the first beam splitting
During device, a part reflection 90 ° converge in the CCD camera at its focal plane through Guan Jing, CCD camera, Guan Jing, first point
Bundle device, corner cube prism and non-spherical lens constitute the micro-light path of infinite conjugate and are used for observing cantilever beam and sample.
The operation principle of a kind of pencil tracing formula afm scan gauge head of the present invention is as follows: sample 1 is equipped on tool
Have on the sample stage 2 of one-dimensional scanning ability.Gauge head is positioned at above sample, and gauge head Z-direction is vertical with sample surfaces, Y-direction and sample
The direction of motion is vertical.Gauge head includes scan module I and optical detecting module II.In scan module I: socle beam probe 3 is installed
Below non-spherical lens 4 at focal plane, cantilever beam is positioned at non-spherical lens 4 with the horizontal about 10 ° inclination angles, its free end
Focus on；Socle beam probe 3 and non-spherical lens 4 are mounted in independent Z-direction one-dimensional scanning mechanism 5, keep phase para-position
Put and constant jointly do Z-direction motion with Z-direction one-dimensional scanning mechanism 5；Z-direction one-dimensional scanning mechanism 5 entirety and corner cube prism 6 are taken
Being loaded in independent Y-direction one-dimensional scanning mechanism 7, Z-direction one-dimensional scanning mechanism 5, corner cube prism 6 keep relative invariant position one
Y-direction motion is done with Y-direction one-dimensional scanning mechanism 7；Corner cube prism 6 is for realizing the mutual conversion of Y, Z-direction collimated light beam:
Be parallel to Y-axis inject the light beam of corner cube prism 6 and be parallel to Z axis directive non-spherical lens 4 after it reflects, be parallel to Z axis by
The light beam of non-spherical lens 4 directive corner cube prism 6 is parallel to Y-axis outgoing after it reflects.Optical detecting module II is fixed on survey
Transfixion on head pedestal, wherein: after laser beam the most collimated mirror 9 collimation that laser instrument 8 sends, be parallel to Y-axis and enter
Polarization spectroscope 10 also resolves into the orthogonal two bunch polarisations of polarization state (only draw in figure actually used a branch of), along former
It is straight that the polarized light of direction of propagation outgoing sequentially passes through quarter-wave plate 11 and the first beam splitter 12 is parallel in Y-axis directive I
Angle prism 6, incident collimated light beam is reflexed to non-spherical lens 4 and is converged to socle beam probe 3 by the latter by corner cube prism 6
On, the reflection light of socle beam probe 3 returns non-spherical lens 4 along certain angle and becomes directional light along Z-direction retroeflection to right-angled edge
Mirror 6, then after corner cube prism 6 reflects, it is parallel to Y-axis return optical detecting module II.Return to the laser of optical detecting module II
Direction the most contrary for Shu Yiyu successively passes through the first beam splitter 12 and quarter-wave plate 11 enters polarization spectroscope 10.Due to
Coming and going and pass twice through quarter-wave plate, the line polarisation polarization direction returning polarization spectroscope 10 have rotated 90 °, thus through polarization
It is parallel to Z axis outgoing after spectroscope 10 reflection, is more finally incident upon through collecting lens 13 and optical filter 14 and is positioned at collecting lens
On photodetector 15 beyond 13 focal planes.Above-mentioned light path is optical lever detection light path, the small deflection of cantilever beam and torsion
Turn and be enlarged into the displacement of hot spot on photodetector 15 photosurface through it.The band connection frequency of optical filter 14 and laser frequency phase herein
With, for filtering environmental light.For ease of observing the laser focal spot situation on sample and cantilever beam, with CCD camera 20, Guan Jing
19, attenuator 18, lighting source the 16, second beam splitter 17 coordinate non-spherical lens 4, corner cube prism 6 and the first beam splitter
12 composition coaxial-illuminating infinite conjugate microscopic systems.The illumination light that wherein lighting source 16 produces is coupled into through the second beam splitter 17
Aforementioned optical lever light path, then it is incident upon cantilever beam 3 and via the first beam splitter 12, corner cube prism 6, non-spherical lens 4 successively
On sample 1.The illumination light of sample 1, socle beam probe 3 reflection and the laser beam of socle beam probe 3 reflection back through
During the first beam splitter 12, a part is perpendicular to incident direction outgoing, sequentially pass through afterwards the second beam splitter 17, attenuator 18,
Pipe mirror 19 images in the CCD camera 20 at pipe mirror 19 back focal plane.Attenuator 18 is used for weakening laser intensity to avoid CCD
Saturated.
Liang Ge one-dimensional scanning mechanism in above-mentioned measuring head structure and the one-dimensional scanning mechanism pairwise orthogonal carrying sample, three-axis moving without
Coupling, there is not flexural distortion in the plane of scanning motion.Owing to each sweep mechanism operative orientation in gauge head is all parallel with direction of beam propagation,
And the element carried fixes relative to position, the most no matter much light paths that do not affects of sweep mechanism stroke, laser can focus on all the time
In the same point of cantilever beam and maintain invariable incident angle, and then ensure that the hot spot that photodetector receives does not shifts because of scanning motion；
Only when cantilever beam self is because the pattern of sample rises and falls when there is partial twist deformation, changing of facula position on photodetector just can be caused
Become.Design of Aspherical Lenses wavelength in gauge head is consistent with optical maser wavelength used, laser can converge to diameter number in theory micro-
Rice, can meet the detection demand of all kinds of small size socle beam probe.Additionally, above-mentioned gauge head scan module I is few containing element, quality
Gently, compact conformation, be conducive to keeping stable when high-velocity scanning.Owing to each scanning device is independent motion in one dimension structure, than
Integrated two dimension or three-dimensional scanner, its frame for movement is the simplest, and manufacturing cost is lower, generally also has the spy that preferably moves
Property.According to each scanning device loading condition, atomic force microscope gauge head of the present invention when carrying out high-velocity scanning, should with X to for
Fast axle, Y-direction is slow axis.
An application example be given below:
As it is shown on figure 3, probe 3 ' and non-spherical lens 4 ' are fixed in the motion portion of Z-direction scanning device 6 '.Wherein non-spherical lens
A diameter of 18mm of 4 ', design wavelength 532nm, focal length 15mm；Micro cantilever probe is with the horizontal 10 ° of inclination angles, free end
It is positioned at the focal point of non-spherical lens 4 '.Z-direction scanning device 6 ' uses the 1-dimention nano positioning table P-753.11C of PI Corp., and it closes
Belt journey is 12 μm, displacement resolving power 0.05nm.Z-direction scanning device 6 ' is fixed on Y-direction scanning device 7 ' by keyset 5 ' is orthogonal
Motion portion on, keyset 5 ' is also equipped with the corner cube prism of length of side 20mm simultaneously for realizing Y-direction and Z-direction collimated light beam
Conversion.Y-direction scanning device 7 ' uses the 1-dimention nano positioning table P-752.11C of PI Corp., and its closed loop stroke is 15 μm, displacement
Resolving power 0.1nm, edge-on is fixed on gauge head pedestal 8 ', operative orientation and plane-parallel and the work ensureing Z-direction scanning device 6 '
Make direction and horizontal plane.The major optical detection part of gauge head is fixed on pedestal by adapter 9 '.Wherein, 10 ' are
The ZOOM6000 compound lens module of NAVITAR company, include the most successively inside it coaxial optical fiber lighting interface,
Attenuator, 200mm focal length Guan Jing, C-shaped interface.C-shaped seam fixes CCD camera 11 '.Compound lens module 10 '
Lower section connects beam splitter 19 '.Beam splitter 19 ' uses the film type beam splitter of diameter 25.4mm, wave band 400nm～700nm,
With the horizontal 45 degree tilt install, the most respectively with the corner cube prism being fixed on keyset 5 ' and
Compound lens module 10 ' is with one heart.The opposite side of beam splitter 19 ' fix the most successively λ/4 wave plate 18 ', polarization spectroscope 17 ',
Diode laser 16 '.Wherein λ/4 wave plate 18 ' diameter 25.4mm, centre wavelength 532nm, carries rotator in order to adjust partially
Shake direction；Polarization spectroscope 17 ' uses length of side 20mm polarization spectro cube, wave-length coverage 420nm～680nm；Diode
Laser instrument 16 ' carries collimating mirror, wavelength 532nm, power 4.5mW, exit diameter 2mm.Diode laser 16 ' is installed
Time be parallel in Z-axis direction eccentric 2.64mm to ensure that laser beam is perpendicular to micro cantilever probe projection after non-spherical lens 4 ' is assembled,
The focal spot now obtained is minimum.Polarization spectroscope collecting lens 15 ' fixed above.The focal length of collecting lens 15 ' is 15mm, peace
Relative to polarization spectroscope 17 ' eccentric 2.64mm to the left during dress, to ensure that reflection light under cantilever beam free state is along collecting lens
15 ' primary optical axis outgoing.Collecting lens 15 ' adapter 14 ' mounted co-axially over, 4 quadrant detector is installed in adapter 14 ' exit
13 ' and two dimension manual displacement platform 12 '.Wherein 4 quadrant detector 13 ' photosurface diameter 7.8mm, the principal plane 45mm of distance 15 '；
532nm bandpass filter is fixed to filter the impact of illumination light before photosurface；Two dimension manual displacement platform 12 ' and 4 quadrant detector
13 ' are connected, utilize two dimension the fine-tuning 4 quadrant detector 13 ' of manual displacement platform 12 ' relative to adapter 14 ' center position so that
Hot spot falls within the appropriate area on 4 quadrant detector 13 ' photosurface.Rocking for reducing the machinery of opticator, polarize spectroscope
17 ', the shell of beam splitter 19 ' is all fixed by screws on gauge head pedestal 8 '；For reducing optical noise, polarization spectroscope 17 ',
The light-emitting window black tape of beam splitter 19 ' downside blocks.
For coordinating this gauge head to realize 3-D scanning imaging, select the 1-dimention nano positioning table P-752.11C identical with Y-direction scanning device 7 '
Carrying out X to scanning as sample stage 1 ', its operative orientation is orthogonal with Y-direction scanning device 7 ', loading surface and Z-direction scanning device 6 '
Operative orientation is vertical, and sample 2 ' is fixed in sample stage 1 ' motion portion.
The closed loop sweep limits of the atomic force microscopy system that above-mentioned gauge head and X collectively constitute to scanning device is
15 μ m 15 μ m 12 μm, the plane of scanning motion is without flexural distortion；Laser focal spot theoretical diameter about 5 μm；Square for length 30 μm
Shape socle beam probe, needle point Normal Displacement amplification is in theory up to 3000 times；The amplification of CCD microexamination part in system
Multiplying power is about 13.3 times, may be used to observe sample and auxiliary adjusts laser reflection position on a cantilever beam.
In another embodiment, the detection light path part of above-mentioned gauge head keeps constant, only scanning device need to be replaced by PI Corp.
P780 or the bigger 1-dimention nano positioning table of other strokes, can realize larger range of scanning.
Claims (7)
1. a pencil tracing formula afm scan gauge head, be by optical detecting module (II) and with described optics
Detection module (II) carries out the scan module (I) of light connection and constitutes, it is characterised in that described scan module (I) includes
Have: Y-direction one-dimensional scanning mechanism (7) of horizontal one-dimensional scanning motion can be carried out and be fixedly connected on described Y-direction one-dimensional scanning
Z-direction one-dimensional scanning mechanism (5) of vertical one-dimensional scanning motion, described Z-direction profile scanner can be carried out in mechanism (7)
It is fixed with socle beam probe (3) on structure (5) and is positioned at the non-spherical lens (4) of socle beam probe (3) top, described
The corner cube prism corresponding with described non-spherical lens (4) transmitted light path it is fixedly installed in Y-direction one-dimensional scanning mechanism (7)
(6)；Described optical detecting module (II) includes: the laser that the glancing incidence light path along corner cube prism (6) sets gradually
Device (8), collimating mirror (9), polarization spectroscope (10), quarter-wave plate (11) and the first beam splitter (12), wherein,
The second beam splitter (17), Guan Jing (19) and CCD it is disposed with on the vertical light splitting optical path of described the first beam splitter (12)
Camera (20), the horizontal direction interface of described the second beam splitter (17) connects lighting source (16), and described polarization divides
Collecting lens (13) and photodetector (15), described optical detection it is disposed with on the vertical optical path of light microscopic (10)
Module (II) and Y-direction one-dimensional scanning mechanism (7) are fixed on gauge head pedestal, described Z-direction one-dimensional scanning mechanism (5)
Operative orientation is orthogonal with the operative orientation of described Y-direction one-dimensional scanning mechanism (7), and described photodetector (15) is installed
Beyond the back focal plane of collecting lens (13).
A kind of pencil tracing formula afm scan gauge head the most according to claim 1, it is characterised in that described
The laser that sends of optical detecting module (II) with line polarized light form enter described in scan module (I), from described scanning
It is also line polarisation that module (I) returns the laser beam of optical detecting module (II).
A kind of pencil tracing formula afm scan gauge head the most according to claim 1, it is characterised in that described
The second beam splitter (17) and Guan Jing (19) between be provided with attenuator (18).
A kind of pencil tracing formula afm scan gauge head the most according to claim 1, it is characterised in that described
Collecting lens (13) and photodetector (15) between be provided with optical filter (14), described optical filter (14) next-door neighbour's light
Electric explorer (15) is installed, and the band connection frequency of optical filter (14) is consistent with laser frequency used.
A kind of pencil tracing formula afm scan gauge head the most according to claim 1, it is characterised in that described
Socle beam probe (3) be positioned at the focal point of non-spherical lens (4), socle beam probe (3) and aspheric surface in scanning process
Lens (4) are followed Z-direction one-dimensional scanning mechanism (5) and are moved and keep relative invariant position；And Z-direction one-dimensional scanning mechanism (5)
Follow again Y-direction one-dimensional scanning mechanism (7) and carry out horizontal scan motion, so that socle beam probe (3) and non-spherical lens (4)
Keep the level of relative invariant position with corner cube prism (6).
A kind of pencil tracing formula afm scan gauge head the most according to claim 1, it is characterised in that described
CCD camera (20), Guan Jing (19), the first beam splitter (12), corner cube prism (6) and non-spherical lens (4) constitute
For observing the micro-light path of the infinite conjugate of cantilever beam and sample；Described photodetector (15), collecting lens (13), pole
Change spectroscope (10), quarter-wave plate (11), the first beam splitter (12), corner cube prism (6), non-spherical lens (4)
Optical lever light path is constituted with socle beam probe (3).
A kind of pencil tracing formula afm scan gauge head the most according to claim 6, it is characterised in that set
Non-spherical lens (4), collecting lens (13), the focal length of Guan Jing (19) correspond to f respectively1、f2、f3, collecting lens (13)
Back focal plane is L to the distance of photodetector (15) photosurface, and the length of cantilever arranging socle beam probe (3) is l, and sets
Determining laser pip on a cantilever beam, i.e. socle beam probe (3) is at the free end of cantilever beam, then according to geometric optics and
Material mechanics principle obtains: optical lever light path is A=3 (L/l) (f to the enlargement ratio of probe free end Z-direction displacement1/f2)；Infinitely
The optical magnification being conjugated micro-light path is M=f3/f1；In the case of keeping scan module (I) constant, by adjusting light
Learn the position of collecting lens (13), the focal length of Guan Jing (19) and photodetector (15) in detection module (II) i.e. to have adjusted
Relevant enlargement ratio and detection sensitivity.
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Address after: 215000 9 Linggang Road, Luzhi Town, Wuzhong District, Suzhou City, Jiangsu Province Patentee after: Furui Si (Suzhou) Instrument Co.,Ltd. Address before: 215127 No.9 Linggang Road, Luzhi Town, Wuzhong District, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhirui Technology Co.,Ltd. |