CN220751944U - Linear motion platform and microscope detection device - Google Patents

Abstract

The embodiment discloses rectilinear motion platform and microscope detection device, rectilinear motion platform includes: the device comprises an objective table, a mounting seat, a first movement device, a second movement device and a third movement device, wherein the first movement device is connected with the mounting seat; the second movement device is connected with the first movement device; the third movement device is connected with the objective table; the first movement device comprises a fixed plate, a power piece and a sliding plate, the fixed plate is connected with the second movement device, the power piece is installed on the fixed plate and used for outputting driving force moving along the first axis direction so as to drive the sliding plate to reciprocate, and the installation seat is installed on the surface of the sliding plate deviating from the fixed plate. According to the technical scheme, the position adjustment of the object to be detected and the microscope can be automatically realized, manual adjustment is reduced, and the detection precision is improved.

Description

Linear motion platform and microscope detection device

Technical Field

The utility model relates to the technical field of automatic equipment, in particular to a linear motion platform and a microscope detection device.

Background

The microscope is an optical instrument composed of a lens or a combination of a plurality of lenses, is used for amplifying tiny objects into an instrument which can be seen by naked eyes of a person, an objective table is positioned below an objective lens and is used for placing a slide to be observed, a light through hole is formed in the center of the objective table, when an assay is carried out, the slide coated with the object to be tested is placed at the light through hole, the observation and the measurement are carried out by the microscope, and a moving platform is arranged below the objective table, so that the slide can move in the left-right direction and the front-back direction, and the slide can be observed and taken and placed in a large range. However, most of the existing motion platforms adopt a transmission mode of a rotating motor and a screw rod, and mechanical errors exist in motion due to the existence of mechanical virtual positions, so that repeated positioning is required to cause poor precision. In addition, because the X axis and the Y axis of the motion platform are integrated, when the object to be measured is driven to move on the X axis and the Y axis, the motion space is reserved in the X axis and the Y axis, and the occupied area of the motion platform is large.

Disclosure of Invention

In order to solve the technical problems, the utility model provides a linear motion platform and a microscope detection device.

In a first aspect, an embodiment of the present application provides a linear motion platform, including:

the object stage is used for bearing an object to be detected;

the mounting seat is used for mounting a microscope;

the first movement device is connected with the mounting seat and used for driving the mounting seat to reciprocate along the first axis direction so as to be close to or far away from the objective table;

the second movement device is connected with the first movement device and is used for driving the first movement device to reciprocate along the second axis direction; the first axis direction is perpendicular to the second axis direction;

the third movement device is connected with the objective table and used for driving the objective table to reciprocate along a third axis direction; the third axis direction is perpendicular to the first axis direction or the second axis direction;

the first movement device comprises a fixed plate, a power piece and a sliding plate, wherein the fixed plate is connected with the second movement device, the power piece is installed on the fixed plate and used for outputting driving force moving along the first axis direction so as to drive the sliding plate to reciprocate, and the installation seat is installed on the surface of the sliding plate, which is away from the fixed plate.

In one embodiment, a first sliding rail is arranged on the fixed plate along a first axis direction, a first sliding block is connected to the first sliding rail in a sliding manner, and the first sliding block is fixedly connected with the sliding plate.

In an implementation mode, the second motion device includes first straight line module, second guide rail and second slider, first straight line module with the second guide rail all sets up along the second axis direction, sliding connection has the second slider on the second guide rail, the second slider with the fixed plate deviates from the surface of slide links to each other, first straight line module is used for exporting and follows the drive power that the second axis direction removed, in order to drive the fixed plate can reciprocating motion.

In one embodiment, the device further comprises a mounting beam and a first anti-collision member, wherein the mounting beam is arranged above the objective table, the first anti-collision member is arranged on the outer sides of two ends of the first linear module and fixedly connected with the mounting beam, and the first anti-collision member is used for limiting the movement distance of the fixing plate.

In an embodiment, the third motion device includes bottom plate, second sharp module, third guide rail and third slider, the second sharp module with the third guide rail is all followed the third axis direction is fixed on the bottom plate, sliding connection has the third slider on the third guide rail, the third slider with the objective table deviates from the surface of mount pad is connected, the second sharp module is used for exporting and follows the drive power that the third axis direction removed, in order to drive the objective table can reciprocating motion.

In one embodiment, the device further comprises a second anti-collision member, wherein the second anti-collision member is arranged on the outer side of two ends of the second linear module and fixedly connected with the bottom plate, and the second anti-collision member is used for limiting the movement distance of the object stage.

In one embodiment, the device further comprises an organ cover, wherein the organ cover is arranged between the objective table and the bottom plate and is used for covering the second linear module, the third guide rail and the third sliding block.

In one embodiment, the mounting base comprises a mounting plate and a connecting plate, the connecting plate is connected with the surface of the sliding plate, which is away from the fixing plate, one end of the mounting plate is perpendicularly connected with the surface of the connecting plate, which is away from the sliding plate, and the other end of the mounting plate extends in a direction away from the fixing plate.

In one embodiment, the device further comprises a rotary platform rotatably arranged on the object stage for placing the object to be detected.

In a second aspect, the embodiment further provides a microscope detection device, including a microscope, a vibration isolation cabinet assembly, and the linear motion platform of the first aspect, where the linear motion platform is installed on the vibration isolation cabinet assembly, the microscope is installed on an installation seat of the linear motion platform, and a lens of the microscope faces the objective table.

Compared with the prior art, the above technical scheme provided by the embodiment of the application has the beneficial effects that:

the object stage is driven to move along the third axis direction by the third movement device, and the first movement device and the mounting seat are driven to move along the second axis direction by the second movement device until reaching the position where the object to be detected on the object stage can be detected by the microscope, so that the position adjustment of the object to be detected and the microscope can be automatically realized, manual adjustment is reduced, and the detection precision is improved. Meanwhile, the mounting seat can be driven to move along the first axis direction through the first moving device, so that the microscope is driven to approach or depart from the objective table along the first axis direction, the requirements of different detection objects on different heights are met, and the detection platform is more flexible. In addition, the second movement device and the third movement device are completely independent, and the object stage only needs to move along one direction, so that the occupied area of the platform is reduced.

Drawings

FIG. 1 is a schematic structural view of an embodiment of a linear motion platform according to the present application;

FIG. 2 is a schematic diagram of a connection structure of a first motion device and a second motion device in a linear motion platform according to the present application;

FIG. 3 is a schematic structural view of a first motion device in a linear motion platform according to the present application;

FIG. 4 is a schematic diagram of a third motion device and stage of a linear motion platform according to the present application;

FIG. 5 is a schematic structural view of a third motion device in a linear motion platform according to the present application;

FIG. 6 is a schematic view of a microscope detection device according to the present application;

fig. 7 is a schematic view of another structure of a microscope detecting device of the present application.

Reference numerals in the drawings:

10. a linear motion platform; 11. an objective table; 12. a mounting base; 121. a connecting plate; 122. a mounting plate; 123. a reinforcing block; 13. a first movement device; 131. a power member; 132. a fixing plate; 133. a slide plate; 134. a first slide rail; 135. a first slider; 14. a second movement device; 141. a first linear module; 142. a second guide rail; 143. a second slider; 15. a third movement device; 151. a bottom plate; 152. a second linear module; 153. a third guide rail; 154. a second bumper; 155. a third slider; 16. mounting a beam; 17. a first bumper; 18. rotating the platform; 20. a vibration isolation cabinet assembly; 21. a cabinet body; 22. vibration isolation members; 30. a microscope; 40. a protective cover; 50. an organ cover.

Detailed Description

For a clearer understanding of technical features, objects and effects of the present utility model, a detailed description of embodiments of the present utility model will be made with reference to the accompanying drawings. In the following description, it should be understood that the directions or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are configured and operated in specific directions based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model, and do not indicate that the apparatus or element to be referred to must have specific directions, and thus should not be construed as limiting the present utility model.

The following describes in further detail the embodiments of the present utility model with reference to the drawings and examples. The following examples are illustrative of the utility model and are not intended to limit the scope of the utility model.

The terms "first," "second," "third," and the like in this disclosure do not denote a particular quantity or order, but rather are used for distinguishing between similar names.

Referring to fig. 1, an embodiment of the present application discloses a linear motion platform 10, which includes a stage 11, a mounting base 12, a first motion device 13, a second motion device 14, and a third motion device 15.

Specifically, the stage 11 is for carrying an article to be inspected. Mount 12 is used to mount microscope 30. The first moving device 13 is connected to the mounting base 12, and is used for driving the mounting base 12 to reciprocate along the first axis direction so as to approach or separate from the objective table 11. The second movement device 14 is connected with the first movement device 13 and is used for driving the first movement device 13 to reciprocate along the second axis direction; the first axis direction is perpendicular to the second axis direction. The third movement device 15 is connected with the object stage 11 and is used for driving the object stage 11 to reciprocate along the third axis direction; the third axis direction is perpendicular to the first axis direction or the second axis direction.

Here, it should be noted that the "first movement device 13", "second movement device 14" and "third movement device 15" mentioned above are all members that move linearly in a predetermined direction, and may be specific structures of the following embodiments, or may be movement members in the prior art, which is not limited thereto.

When the linear motion platform 10 of the above embodiment is used, an object to be detected (such as a substrate, a wafer, a glass slide, etc.) is placed on the stage 11, the microscope 30 is mounted on the mount 12, then the third motion device 15 drives the stage 11 to move along the third axis direction, and meanwhile the second motion device 14 drives the first motion device 13 and the mount 12 to move along the second axis direction until reaching the position on the stage 11 where the object to be detected can be detected by the microscope 30, and then the mount 12 is driven by the first motion device 13 to move along the first axis direction, so as to drive the microscope 30 to approach or separate from the stage 11 along the first axis direction until the microscope 30 can accurately image and focus, thereby completing the detection of the object to be detected.

Referring to fig. 2 and 3, the first moving device 13 includes a fixed plate 132, a power member 131 and a sliding plate 133, the fixed plate 132 is connected to the second moving device 14, the power member 131 is mounted on the fixed plate 132, the power member 131 is configured to output a driving force moving along a first axis direction, so as to drive the sliding plate 133 to reciprocate, and the mounting base 12 is mounted on a surface of the sliding plate 133 facing away from the fixed plate 132.

For example, when the observation height of the microscope 30 needs to be adjusted, the power member 131 outputs a driving force moving along the first axis direction, so that the sliding plate 133 is driven to reciprocate along the first axis direction, and the mounting base 12 is mounted on the surface of the sliding plate 133 away from the fixing plate 132, so that the microscope 30 mounted on the mounting base 12 can be driven to move along the first axis direction, thereby realizing automatic adjustment of the observation height of the microscope 30, so as to meet the requirements of different detection objects on different heights, and enabling the detection platform to be more flexible.

In addition, in this embodiment, the power component 131 may adopt a servo motor, an output end of the servo motor is connected with a rotating rod, the rotating rod is disposed along the first axis direction, a connecting block is slidably connected on the rotating rod, the connecting block is connected with the sliding plate, and when the servo motor drives the rotating rod to rotate, the connecting block slides on the rotating rod along the first axis direction to drive the sliding plate to slide along the first axis direction.

Illustratively, the first movement device 13 further includes a protective cover 40, where the protective cover 40 is used to cover the fixing plate 132, the power member 131 and the sliding plate 133, so that external dust or impurities can be effectively prevented from affecting the movement of the power member 131 to drive the sliding plate 133.

Based on the above technical features, the linear motion platform 10 drives the objective table 11 to move along the third axis direction through the third motion device 15, and drives the first motion device 13 and the mounting seat 12 to move along the second axis direction through the second motion device 14 until reaching the position where the object to be detected on the objective table 11 can be detected by the microscope 30, so that the position adjustment of the object to be detected and the microscope 30 can be automatically realized, manual adjustment is reduced, and the detection precision is improved. Meanwhile, the mounting seat 12 can be driven to move along the first axis direction through the first moving device 13 so as to drive the microscope 30 to be close to or far away from the objective table 11 along the first axis direction, so that the requirements of different detection objects on different heights are met, and the detection platform is more flexible. In addition, the second moving device 14 and the third moving device 15 are completely independent, and the object stage 11 only needs to move along one direction, which is beneficial to reducing the occupied area of the platform.

Referring to fig. 3, in an embodiment, a first sliding rail 134 is disposed on the fixing plate 132 along a first axis direction, a first sliding block 135 is slidably connected to the first sliding rail 134, and the first sliding block 135 is fixedly connected to the sliding plate 133.

For example, a first sliding rail 134 along the first axis direction is disposed on the fixing plate 132 and is fixedly connected with the sliding plate 133 by a sliding block, so that the sliding plate 133 has better stability in the process of being driven by the power member 131 to move along the first axis direction, and the detection accuracy is prevented from being affected by shaking.

Referring to fig. 2, in an embodiment, the second moving device 14 includes a first linear module 141, a second guide rail 142, and a second slider 143, where the first linear module 141 and the second guide rail 142 are disposed along a second axis direction, the second slider 143 is slidably connected to the second guide rail 142, the second slider 143 is connected to a surface of the fixing plate 132 facing away from the sliding plate 133, and the first linear module 141 is configured to output a driving force moving along the second axis direction, so as to drive the fixing plate 132 to reciprocate.

For example, the first linear module 141 may be a linear motor module, and the specific structure of the linear motor module and the connection structure of the linear motor module and the fixing plate 132 may refer to the prior art, which will not be described in detail.

For example, when the position of the microscope 30 needs to be adjusted to the observation area, the first linear module 141 outputs a driving force moving along the second axis direction, so that the fixing plate 132 can move along the second axis direction, and the mounting base 12 is indirectly mounted on the fixing plate 132, so that the microscope 30 can be driven to move along the second axis direction, thereby realizing the adjustment of the microscope 30 to the area capable of observing the object to be measured. In addition, the first linear module 141 adopts a linear motor module to drive, and compared with the traditional rotary motor which is also provided with a screw rod, the linear motor module has no mechanical virtual position, can avoid mechanical errors and is beneficial to improving the precision.

In one embodiment, the device further comprises a mounting beam 16 and a first anti-collision member 17, wherein the mounting beam 16 is arranged above the object stage 11, the first anti-collision member 17 is arranged on the outer sides of two ends of the first linear module 141 and fixedly connected with the mounting beam 16, and the first anti-collision member 17 is used for limiting the movement distance of the fixing plate 132. In this way, the first anti-collision member 17 is disposed on the outer sides of the two ends of the first linear module 141, so that the first anti-collision member 17 can give a certain buffering effect to the fixing plate 132, and the fixing plate 132 is prevented from colliding with the mounting beam 16, so that the mechanical parts are damaged.

Referring to fig. 4 and 5, in one embodiment, the third movement device 15 includes a bottom plate 151, a second linear module 152, a third rail 153, and a third slider 155, where the second linear module 152 and the third rail are both fixed on the bottom plate 151 along a third axis direction, the third slider 155 is slidably connected to the third rail 153, the third slider 155 is connected to a surface of the stage 11 facing away from the mounting seat 12, and the second linear module 152 is configured to output a driving force that moves along the third axis direction to drive the stage 11 to reciprocate.

In one embodiment, the device further includes a second anti-collision member 154, where the second anti-collision member 154 is disposed outside two ends of the first linear module 141 and is fixedly connected to the bottom plate 151, and the second anti-collision member 154 is used to limit the movement distance of the stage 11. In this way, the second anti-collision members 154 are arranged on the outer sides of the two ends of the second linear module 152, so that the second anti-collision members 154 can give a certain buffering effect to the carrying plate, and the carrying plate is prevented from colliding with the bottom plate 151, so that the mechanical parts are damaged.

In one embodiment, the device further comprises an organ cover 50, wherein the organ cover 50 is arranged between the stage 11 and the bottom plate 151, and is used for covering the second linear module 152, the third guide rail 153 and the third slider 155. In this way, the second linear module 152, the third guide rail 153 and the third slider 155 are covered by the organ cover 50, so that external impurities or dust can be effectively prevented from entering the third guide rail 153 and the third slider 155, friction is generated, the movement of the object carrying plate is blocked, and the precision is reduced.

In addition, the bellows 50 is pressed or pulled by the stage 11 during the reciprocating movement of the stage 11, and thus the bellows 50 is extended and contracted, and the movement of the stage 11 is not affected.

Referring to fig. 3, in one embodiment, the mounting base 12 includes a mounting plate 122 and a connecting plate 121, the connecting plate 121 is connected to a surface of the sliding plate 133 facing away from the fixing plate 132, one end of the mounting plate 122 is vertically connected to the surface of the connecting plate 121 facing away from the sliding plate 133, and the other end of the mounting plate 122 extends away from the fixing plate 132.

Illustratively, to enhance the strength of the mount 12, the mounting plate 122 is prevented from falling off after the microscope 30 is mounted on the mounting plate 122, and in still another embodiment, the lower end of the reinforcing block 123 is connected to the surface of the mounting plate 122 by providing the reinforcing block 123 on the surface of the connecting plate 121 facing away from the slide plate 133. In this way, the overall strength of the mount 12 can be enhanced, the microscope 30 can be supported more firmly, and the risk of dropping the microscope 30 during movement can be avoided.

In one embodiment, the apparatus further comprises a rotary platform 18, wherein the rotary platform 18 is rotatably arranged on the object stage 11 for placing the object to be detected.

Illustratively, the rotary platform 18 for placing the object to be tested is arranged on the object stage 11, so that the rotary platform 18 can be driven to rotate the object to be tested to a required detection angle when the detection is performed, which is beneficial to improving the detection precision.

Referring to fig. 6 and 7, in a second aspect, the present embodiment further provides a device for detecting a microscope 30, including the microscope 30, the vibration isolation cabinet assembly 20, and the linear motion platform 10 of the first aspect, wherein the linear motion platform 10 is mounted on the vibration isolation cabinet assembly 20, the microscope 30 is mounted on the mounting base 12 of the linear motion platform 10, and the lens of the microscope 30 faces the stage 11.

The microscope 30 detection device according to the embodiment of the present disclosure, which adopts the above-mentioned linear motion platform 10, has the technical effects consistent with those of the above-mentioned linear motion platform 10, and will not be described herein again.

In addition, the vibration isolation cabinet assembly 20 includes a cabinet body 21 and a plurality of vibration isolation members 22, wherein the vibration isolation members 22 are disposed inside the cabinet body 21, and the vibration isolation members 22 are disposed at corners of the lower surface of the bottom plate 151 of the linear motion platform 10, so that the influence caused by environmental vibration can be effectively reduced, and the measurement accuracy of the microscope 30 in a high magnification state is ensured.

The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present utility model, and these modifications and substitutions should also be considered as being within the scope of the present utility model.

Claims (10)

1. A linear motion platform, comprising:

the object stage is used for bearing an object to be detected;

the mounting seat is used for mounting a microscope;

the first movement device is connected with the mounting seat and used for driving the mounting seat to reciprocate along the first axis direction so as to be close to or far away from the objective table;

the second movement device is connected with the first movement device and is used for driving the first movement device to reciprocate along the second axis direction; the first axis direction is perpendicular to the second axis direction;

the third movement device is connected with the objective table and used for driving the objective table to reciprocate along a third axis direction; the third axis direction is perpendicular to the first axis direction or the second axis direction;

the first movement device comprises a fixed plate, a power piece and a sliding plate, wherein the fixed plate is connected with the second movement device, the power piece is installed on the fixed plate and used for outputting driving force moving along the first axis direction so as to drive the sliding plate to reciprocate, and the installation seat is installed on the surface of the sliding plate, which is away from the fixed plate.

2. The linear motion platform of claim 1, wherein the fixed plate is provided with a first sliding rail along a first axis direction, and the first sliding rail is slidably connected with a first sliding block, and the first sliding block is fixedly connected with the sliding plate.

3. The linear motion platform of claim 1, wherein the second motion device comprises a first linear module, a second guide rail and a second slide block, the first linear module and the second guide rail are all arranged along a second axis direction, the second guide rail is slidably connected with the second slide block, the second slide block is connected with the surface of the fixed plate, which is away from the sliding plate, and the first linear module is used for outputting a driving force moving along the second axis direction so as to drive the fixed plate to reciprocate.

4. The linear motion platform of claim 3, further comprising a mounting beam and a first anti-collision member, wherein the mounting beam is disposed above the stage, the first anti-collision member is disposed outside two ends of the first linear module and fixedly connected to the mounting beam, and the first anti-collision member is configured to limit a movement distance of the fixing plate.

5. The linear motion platform of claim 1, wherein the third motion device comprises a bottom plate, a second linear module, a third guide rail and a third slider, the second linear module and the third guide rail are both fixed on the bottom plate along the third axis direction, the third guide rail is slidably connected with the third slider, the third slider is connected with the surface of the object stage, which is away from the mounting seat, and the second linear module is used for outputting a driving force moving along the third axis direction so as to drive the object stage to reciprocate.

6. The linear motion platform of claim 5, further comprising a second anti-collision member disposed outside of two ends of the second linear module and fixedly connected to the bottom plate, wherein the second anti-collision member is configured to limit a movement distance of the stage.

7. The linear motion platform of claim 5, further comprising an organ cover disposed between the stage and the base plate for covering the second linear module, the third rail, and the third slider.

8. The linear motion platform of claim 1, wherein the mount comprises a mounting plate and a connecting plate, the connecting plate is connected with a surface of the slide plate facing away from the fixed plate, one end of the mounting plate is vertically connected with a surface of the connecting plate facing away from the slide plate, and the other end of the mounting plate extends in a direction away from the fixed plate.

9. The linear motion platform of any of claims 1 to 6, further comprising a rotary platform rotatably disposed on the stage for positioning an item to be inspected.

10. A microscope detection device comprising a microscope, a vibration isolation cabinet assembly, and the linear motion platform according to any one of claims 1 to 9, wherein the linear motion platform is mounted on the vibration isolation cabinet assembly, the microscope is mounted on a mount of the linear motion platform, and a lens of the microscope is oriented toward the stage.