CN103033919A - System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof - Google Patents
System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof Download PDFInfo
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- CN103033919A CN103033919A CN2012104648052A CN201210464805A CN103033919A CN 103033919 A CN103033919 A CN 103033919A CN 2012104648052 A CN2012104648052 A CN 2012104648052A CN 201210464805 A CN201210464805 A CN 201210464805A CN 103033919 A CN103033919 A CN 103033919A
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Abstract
The invention relates to a system capable of automatically compensating and focusing in a process of automatic scanning, an implementation method thereof and an application thereof on a microscope, and is used for compensating and revising tiny errors caused by factors such as mechanical motions, machining work and installations, and expansions caused by heat and contractions caused by cold, so that the microscope is guaranteed to gain a clear image on each view field in the process of scanning. The system capable of automatically compensating and focusing comprises a target platform and an imaging device. The target platform moves in a plane. The imaging device moves in a direction perpendicular to the target platform. The system capable of automatically compensating and focusing further comprises a focusing and compensating system which comprises at least two displacement measuring devices. The first displacement measuring device is installed on the target platform and is used for detecting displacement errors in the vertical direction in the movement process of the target platform. The second displacement measuring device is installed on the imaging device and is used for detecting a relative distance between a lens of the imaging device and the target platform.
Description
Technical field
The present invention relates to a kind of compensation focusing system, more particularly, the system that relates to a kind of auto-compensation focusing in the autoscan process, and implementation method, and it is used on the microscope, be used for to since the slight error that mechanical motion, machining and installation, the factor such as expand with heat and contract with cold produce compensate and correct, thereby guarantee microscope in scanning process, each visual field can both obtain clearly image.
Background technology
The full microscope scanning system is the high precision scanner that occurs in recent years, is widely used in the fields such as medical research, clinical practice, biological study and commercial Application.Traditional microscope scanning system as shown in Figure 1, object lens 102 keep static during focusing, objective table 101 drives testees and moves up and down.Also have and adopt sensor to detect microscope Z axis position, sensor is fixed on the microscope frame, it is popped one's head in and contacts, when objective table moves up and down focusing, follow objective table and move up and down synchronously, and drive the sensor probe motion, so that sensor can obtain the displacement that objective table moves up and down, in conjunction with the software focus model, finish the focusing compensation process.
The micro objective depth of field is generally less than 2um, and trickle variation all can cause image blurring, and mainly there is the three aspects: defective in prior art, produces easily the problems referred to above.
One, objective table is except X, Y-direction motion, also have the motion of Z direction, when X, Y moved, the center of gravity of objective table can change, and objective table is not fixed on the Z direction, the variation of center of gravity can cause objective table to tilt to some directions, causes thus the variation on the Z direction, although this variation may be very trickle, but have very large probability to surpass object lens depth of field 2um, thereby affect image definition.
Its two, objective table X, Y-axis adopt screw mandrel to add the kind of drive of linear guide rail usually, whether linear guides enough smooth, it is fully parallel whether screw mandrel and the assembling of guide rail can be accomplished, these only just may reach in the ideal situation.During actual objective table X, Y motion, because machining can produce error, add the error that assembling produces, make stage surface that micron-sized up and down fluctuating error can occur, this fluctuation will affect image definition as long as surpass the object lens depth of field.
Its three, when detecting the displacement of objective table Z axis with sensor, all only detected the lifting displacement of objective table, often ignored the impact of above-mentioned first, second point, cause its actual effect unsatisfactory.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of slight error that can detect between target and camera lens is provided, and provide the system and method for the auto-compensation focusing of correction, and it is applied to microscope, realize microscope in scanning process, each visual field can both obtain clearly image.
Technical scheme of the present invention is as follows:
A kind of system of auto-compensation focusing in the autoscan process, comprise target platform, imaging device, described target platform is in the place plane motion, described imaging device moves in the direction perpendicular to target platform, also comprise the focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is installed on target platform, for detection of the error displacement of the vertical direction that exists in the target platform motion process; The second displacement measuring device is installed on the imaging device, for detection of the relative distance of camera lens and the target platform of imaging device.
As preferably, described displacement measuring device comprises displacement transducer, probe, and the first probe and target platform Surface Contact of the first displacement measuring device is used for the fluctuating displacement of the vertical direction that the measurement target platform produces at motion process; The second probe of the second displacement measuring device contacts with the focus adjusting mechanism of imaging device, is used for measuring the camera lens of imaging device and the relative distance of target platform.
As preferably, be provided with trimmer between the first probe and target platform surface, described tab surface is smooth, and trimmer is fixed on the surface of target platform, and the first probe contacts with trimmer.
A kind of in the autoscan process auto-compensation focusing method, step is as follows:
The error displacement of the vertical direction that 1) produces in the measurement target platform motion process, and the displacement of the focus adjusting mechanism of imaging device;
2) obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of target platform and position of focal plane by the error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and target platform equal step 2) calculate gained position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that imaging device is in all the time the position of focal plane and obtains clearly image.
A kind of microscope of the system based on auto-compensation in autoscan process focusing comprises microscopic system, digital camera head; Described this microscopic system comprises frame, object lens, objective table, focus adjusting mechanism, imaging optical system, light-source illuminating system; , described objective table is fixed on the frame, and objective table keeps static in the motion of place surface level and vertical direction, and object lens move up and down in the direction perpendicular to plane, objective table place; Also comprise the focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is installed in the objective table top, for detection of the error displacement of the vertical direction that exists in the target platform motion process; The second displacement measuring device is installed on the object lens, for detection of the moving displacement of object lens.
As preferably, described displacement measuring device comprises displacement transducer, probe, and the first probe of the first displacement measuring device contact with stage surface, the fluctuating displacement of the vertical direction that produces at motion process for the measurement objective table; The second probe of the second displacement measuring device contacts with the focus adjusting mechanism of object lens, for detection of the relative distance of object lens with the observation sample.
As preferably, be provided with trimmer between the first probe and stage surface, described tab surface is smooth, and trimmer is fixed on the surface of objective table, and the first probe contacts with trimmer.
As preferably, the area of trimmer is not less than object lens to the sweep limit of objective table.
As preferably, described focusing bucking-out system links to each other with computer system, computer system is obtained the distance of error displacement and object lens and observation sample, obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of objective table and position of focal plane by the error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and objective table equal position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that object lens are in all the time the position of focal plane and obtain clearly image.
As preferably, described objective table, object lens are by motor-driven, and described motor links to each other with electronic control system, controlled by electronic control system, electronic control system links to each other with computer system, obtains the result of calculation of computer system, carries out the automatic compensating correction.
As preferably, described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
Beneficial effect of the present invention is as follows:
Utilize high-precision sensor measurement microscopic system Z axis position and objective table X, the kinetic Z-direction change of Y-direction displacement, and because the slight error that mechanical motion, machining and installation, the factor such as expand with heat and contract with cold produce, measurement data by control system and software Real-time Obtaining scrambler is carried out COMPREHENSIVE CALCULATING, draw the correct offset that arrives the testee focal plane, and control in real time the microscope Z axis and revise, thereby guarantee microscope in scanning process, each visual field can both obtain clearly image.
The mode of control object lens focusing has more significant advantage:
One, object lens are with respect to objective table, and volume is little, lightweight, easier control, and be not easy to glide because of deadweight;
Its two, objective table has been cancelled the motion of Z direction, can firmly be fixed on objective table on the frame, makes the impact of the Z direction change that the objective table gravity center shift causes drop to minimum.
Description of drawings
Fig. 1 is the structural representation of early stage autoscan microscopic system;
Fig. 2 is focusing bucking-out system synoptic diagram of the present invention;
Fig. 3 is structural representation of the present invention;
Fig. 4 is front schematic view of the present invention;
Fig. 5 is side schematic view of the present invention;
Fig. 6 is the partial schematic diagram of the present invention's the first displacement measuring device;
Fig. 7 is the partial schematic diagram of the present invention's the second displacement measuring device;
Among the figure: the 101st, the microscopical objective table of prior art, the 102nd, the microscopical object lens of prior art, the 1st, frame, the 2nd, target platform, the 3rd, trimmer, 4 is first displacement measuring devices, 41 is first probes, 42 is first supports, 5 is second displacement measuring devices, and 51 is second probes, and 52 is second supports, 53 is second probe brackets, the 6th, camera lens, 7 is first motors, 8 is second motors, the 9th, the Z axis motor, the 10th, imaging optical system, the 11st, digital camera head, the 12nd, light-source illuminating system, the 13rd, gear, the 14th, Z axis screw mandrel.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described in detail.
As shown in Figure 2, a kind of system of auto-compensation focusing in the autoscan process, comprise target platform 2, imaging device, described target platform 2 is in the place plane motion, described imaging device is moving perpendicular to the direction of target platform 2, also comprises the focusing bucking-out system, and described focusing bucking-out system comprises at least two displacement measuring devices, the first displacement measuring device 4 is installed on target platform 2, for detection of the error displacement of the vertical direction that exists in target platform 2 motion processes; The second displacement measuring device 5 is installed on the imaging device, for detection of the camera lens 6 of imaging device and the relative distance of target platform 2.
Described displacement measuring device comprises displacement transducer, probe, and the first probe 41 and target platform 2 Surface Contacts of the first displacement measuring device 4 is used for the fluctuating displacement of the vertical direction that measurement target platform 2 produces at motion process; The second probe 51 of the second displacement measuring device 5 contact with the focus adjusting mechanism of imaging device, is used for the camera lens 6 of measurement imaging device and the relative distance of target platform 2.
Be provided with trimmer 3 between the first probe 41 and target platform 2 surfaces, described trimmer 3 surfacings, trimmer 3 is fixed on the surface of target platform 2, and first pops one's head in 41 contacts with trimmer 3.
A kind of in the autoscan process auto-compensation focusing method, step is as follows:
The error displacement of the vertical direction that 1) produces in measurement target platform 2 motion processes, and the displacement of the focus adjusting mechanism of imaging device;
2) obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of target platform 2 and position of focal plane by the error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and target platform 2 equal step 2) calculate gained position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that imaging device is in all the time the position of focal plane and obtains clearly image.
A kind of microscope of the system based on auto-compensation in autoscan process focusing comprises microscopic system, digital camera head; Described this microscopic system comprises frame 1, object lens (being the camera lens 6 of imaging device), objective table (being target platform 2), focus adjusting mechanism, imaging optical system, light-source illuminating system; , described objective table is fixed on the frame 1, and objective table keeps static in the motion of place surface level and vertical direction, and object lens move up and down in the direction perpendicular to plane, objective table place; Also comprise the focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device 4 is installed in the objective table top, for detection of the error displacement of the vertical direction that exists in target platform 2 motion processes; The second displacement measuring device 5 is installed on the object lens, for detection of the relative distance of object lens with the observation sample.
Described displacement measuring device comprises displacement transducer, probe, and the first probe 41 of the first displacement measuring device 4 contact with stage surface, the fluctuating displacement of the vertical direction that produces at motion process for the measurement objective table; The second probe 51 of the second displacement measuring device 5 contact with the focus adjusting mechanism of object lens, the relative distance that is used for measuring object lens and observes sample.
Be provided with trimmer 3 between the first probe 41 and stage surface, described trimmer 3 surfacings, trimmer 3 is fixed on the surface of objective table, and the first probe 41 contacts with trimmer 3.In order to reach optimum effect, the area of trimmer 3 is not less than object lens to the sweep limit of objective table.
Described focusing bucking-out system links to each other with computer system, computer system is obtained the distance of error displacement and object lens and observation sample, obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of objective table and position of focal plane by the error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and objective table equal position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that object lens are in all the time the position of focal plane and obtain clearly image.
Described objective table, object lens are by motor-driven, and described motor links to each other with electronic control system, controlled by electronic control system, and electronic control system links to each other with computer system, obtains the result of calculation of computer system, carries out the automatic compensating correction.
Described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
Embodiment
Microscope such as Fig. 3, Fig. 4, a kind of system based on the focusing of auto-compensation in the autoscan process shown in Figure 5 comprises: frame 1, object lens, motor-driven objective table, motor-driven focusing (Z axis) mechanism, imaging optical system 10, digital camera head 11, light-source illuminating system 12.
Its mid frame 1 is gantry frame structure, and objective table is fixed on the portal frame, and objective table can move in X, Y-direction, and keeps static in the Z direction, is fixed on the portal frame all the time.Portal frame has enough rigidity, support objective table four jiaos, guarantees that caused objective table gravity center shift can not exert an influence in the Z direction in objective table X, the Y-direction motion process.
Objective table is by motor-driven, and the first motor 7 driving objective table X-directions are moved, the motion of the second motor 8 driving objective table Y-directions.
Focus adjusting mechanism is fixed on the portal frame, comprises object lens, object lens lifting (Z direction) gearing.
The focusing bucking-out system mainly comprises the first displacement measuring device 4, the second displacement measuring device 5.
As shown in Figure 6, object lens are driven by Z axis motor 9 driven gears 13 and Z axis screw mandrel 14.Different from conventional microscope focusing mode, the present invention moves up and down by the control object lens and realizes focusing, rather than the control objective table moves up and down focusing.With the traditional approach contrast, the mode of control object lens focusing has more significant advantage, and one, object lens are with respect to objective table, and volume is little, lightweight, easier control, and be not easy to glide because of deadweight.Its two, objective table has been cancelled the motion of Z direction, can firmly be fixed on objective table 2 on the portal frame, makes the impact of the Z direction change that the objective table gravity center shift causes drop to minimum.
The second displacement measuring device 5 is fixed on the portal frame by the second support 52, position near focus adjusting mechanism, the focus adjusting mechanism special design second probe bracket 53, the second probe 51 contacts with the second probe bracket 53, in focus adjusting mechanism Z axis travel range, the second probe 51 of the second displacement measuring device 5 can be followed 53 motions of the second probe bracket, makes the second displacement measuring device 5 can check the moving displacement of object lens.
As shown in Figure 7, the first displacement measuring device 4 is fixed on the portal frame by the first probe 41 first supports 42, be positioned at the objective table top, the first probe 41 contacts with stage surface, in objective table and the first probe 41 positions that contact, a trimmer 3 is arranged, and the trimmer 3 in the present embodiment is the minute surface thin slice.The minute surface sheet surface is smooth smooth, the required area of its area, size and microscan, measure-alike or slightly large, to guarantee that the first probe 41 is mobile in minute surface thin slice scope all the time in scanning process, can detect the Z-direction that causes in objective table X, the Y motion process by the first displacement measuring device 4 and change.
The first displacement measuring device 4 and the second displacement measuring device 5 obtain in the focusing bucking-out system data input electronic control system and computer system, consider the error displacement of object lens position, objective table, obtain the physical location of current object lens, and the position of current object lens and correct position of focal plane compared, subsequently control system driving Z axis motor 9 makes object lens arrive correct position of focal plane, obtains clearly image.In whole scanning process, the focusing bucking-out system is controlled in real time according to the method described above object lens and is in correct position of focal plane, thereby so that each visual field in the scanning process can both obtain clearly image.
Optical imaging system has a plurality of light splitting optical paths, and the splitting ratio of each light path can be different, can connect the camera of different model and classification, reaches the purposes such as imaging, identification, auxiliary focusing.
Above-described embodiment only is that the present invention is described, and is not as limitation of the invention.So long as according to technical spirit of the present invention, to above-described embodiment change, modification etc. all will drop in the scope of claim of the present invention.
Claims (11)
1. the system of an auto-compensation focusing in the autoscan process, comprise target platform, imaging device, described target platform is in the place plane motion, described imaging device moves in the direction perpendicular to target platform, it is characterized in that, also comprise the focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, the first displacement measuring device is installed on target platform, for detection of the error displacement of the vertical direction that exists in the target platform motion process; The second displacement measuring device is installed on the imaging device, for detection of the relative distance of camera lens and the target platform of imaging device.
2. the system of auto-compensation focusing in the autoscan process according to claim 1, it is characterized in that, described displacement measuring device comprises displacement transducer, probe, the first probe and target platform Surface Contact of the first displacement measuring device is used for the fluctuating displacement of the vertical direction that the measurement target platform produces at motion process; The second probe of the second displacement measuring device contacts with the focus adjusting mechanism of imaging device, is used for measuring the camera lens of imaging device and the relative distance of target platform.
3. the system of auto-compensation focusing in the autoscan process according to claim 2, it is characterized in that be provided with trimmer between the first probe and target platform surface, described tab surface is smooth, trimmer is fixed on the surface of target platform, and the first probe contacts with trimmer.
4. auto-compensation focusing method in the autoscan process is characterized in that step is as follows:
The error displacement of the vertical direction that 1) produces in the measurement target platform motion process, and the displacement of the focus adjusting mechanism of imaging device;
2) obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of target platform and position of focal plane by the error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and target platform equal step 2) calculate gained position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that imaging device is in all the time the position of focal plane and obtains clearly image.
5. the microscope based on the system of the focusing of auto-compensation in the autoscan process comprises microscopic system, digital camera head; Described this microscopic system comprises frame, object lens, objective table, focus adjusting mechanism, imaging optical system, light-source illuminating system; Described objective table is fixed on the frame, and objective table keeps static in the motion of place surface level and vertical direction, and object lens move up and down in the direction perpendicular to plane, objective table place; It is characterized in that, also comprise the focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is installed in the objective table top, for detection of the error displacement of the vertical direction that exists in the target platform motion process; The second displacement measuring device is installed on the object lens, for detection of the relative distance of object lens with the observation sample.
6. microscope according to claim 5, it is characterized in that, described displacement measuring device comprises displacement transducer, probe, and the first probe of the first displacement measuring device contact with stage surface, the fluctuating displacement of the vertical direction that produces at motion process for the measurement objective table; The second probe of the second displacement measuring device contacts with the focus adjusting mechanism of object lens, is used for measuring object lens and the relative distance of observing sample.
7. microscope according to claim 6 is characterized in that, is provided with trimmer between the first probe and stage surface, and described tab surface is smooth, and trimmer is fixed on the surface of objective table, and the first probe contacts with trimmer.
8. microscope according to claim 7 is characterized in that, the area of trimmer is not less than object lens to the sweep limit of objective table.
9. microscope according to claim 5, it is characterized in that, described focusing bucking-out system links to each other with computer system, computer system is obtained the distance of error displacement and object lens and observation sample, obtain the position of focal plane by the current coordinate Calculation of focus adjusting mechanism, calculate the deviation of objective table and position of focal plane by the error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the revised focus adjusting mechanism of compensation and objective table equal position of focal plane and the distance that does not compensate and correct front focus adjusting mechanism, guarantee that object lens are in all the time the position of focal plane and obtain clearly image.
10. microscope according to claim 9, it is characterized in that, described objective table, object lens pass through motor-driven, described motor links to each other with electronic control system, controlled by electronic control system, electronic control system links to each other with computer system, obtains the result of calculation of computer system, carries out the automatic compensating correction.
11. microscope according to claim 5 is characterized in that, described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
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| CN113038003B (en) * | 2021-02-26 | 2023-11-14 | 上海精测半导体技术有限公司 | Automatic focusing device and method, and detection device and method |
| CN113176273A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device and method and panel defect detection system |
| CN113176273B (en) * | 2021-03-19 | 2023-08-15 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device, method and panel defect detection system |
| CN117078662A (en) * | 2023-10-11 | 2023-11-17 | 杭州睿影科技有限公司 | Detection method and device for laminated battery, image processing equipment and medium |
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